US20070122299A1 - Valveless micro impedance pump - Google Patents
Valveless micro impedance pump Download PDFInfo
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- US20070122299A1 US20070122299A1 US11/288,186 US28818605A US2007122299A1 US 20070122299 A1 US20070122299 A1 US 20070122299A1 US 28818605 A US28818605 A US 28818605A US 2007122299 A1 US2007122299 A1 US 2007122299A1
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- layer
- photoresistor
- micro
- sink
- valveless
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 31
- 239000012528 membrane Substances 0.000 claims abstract description 27
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 16
- 238000005406 washing Methods 0.000 claims description 10
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 238000000206 photolithography Methods 0.000 claims description 4
- 238000010422 painting Methods 0.000 claims 6
- 230000005685 electric field effect Effects 0.000 abstract 1
- 239000010935 stainless steel Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
- F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
Definitions
- the present invention is related to a valveless micro impedance pump in which the difference between impedances of materials results in difference between the impedances of the walls of the flow way for transmitting a medium.
- the conventional micro-fluid elements are mainly developed and applied to control, detection, reaction and analysis of micro-fluid.
- the key elements include micropumps, microvalves, micro-flow ways, micromixers, etc. These elements can be integrated into intelligent micro-fluid chips with different functions.
- the intelligent micro-fluid chips are applicable to biotechnology, portable physiologic monitor, environmental analyzer, precision fluid control, fuel battery engineering, high-resolution nozzle, micro-power system, etc.
- the micropump is one of the most important key elements.
- the micropumps can be mainly divided into valve-equipped type and valveless type. With respect to valveless micropumps, they can be powered by piezoelectric measure, pneumatic measure, static measure, profile-memorizing alloy, thermopneumatic measure, ultrasonic measure and bimetal.
- FIG. 8 is a sectional view of a typical piezoelectric valveless micropump 6 .
- FIG. 9 is a sectional view taken along line B-B of FIG. 8 .
- the piezoelectric valveless micropump 6 is composed of a bottom layer 61 , a top layer 62 , a piezoelectric element 63 and two micro-flow ducts 64 .
- the piezoelectric valveless micropump 6 is operated in such a manner that a drive voltage is applied to the piezoelectric element 63 .
- the piezoelectric element 63 works to push a vibration membrane 621 .
- the vibration membrane 621 is deformed to cause change of the capacity of a middle flow way 65 . This leads to change of pressure.
- the water comes in from a water inlet 66 and flows through an expanded flow way 67 and the middle flow way 65 .
- the water then flows through another expanded flow way 68 to a water outlet 69 .
- the change of the capacity of the middle flow way 65 results in a pressure difference between the water inlet 66 and water outlet 69 . Therefore, the net flow of the water outlet 69 is larger than the net flow of the water inlet 66 . Accordingly, the water will flow from the water inlet 66 to the water outlet 69 .
- the conventional piezoelectric valveless micropump is designed with a complicated expanded flow way. This increases the cost of the piezoelectric valveless micropump. In addition, the liquid can only one-way flow. This limits the application of the piezoelectric valveless micropump.
- valveless micro impedance pump of the present invention includes:
- the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;
- top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, a boss being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and
- a piezoelectric element a bottom face of the piezoelectric element being lengthwise fixed on top end of the boss and top face of the fixing seat.
- FIG. 1 is a sectional view of the valveless micro impedance pump of the present invention
- FIG. 2 is a sectional view taken along line 2 - 2 of FIG. 1 ;
- FIG. 3 is a perspective sectional view of the valveless micro impedance pump of the present invention.
- FIG. 4 is a flow chart of the manufacturing of the bottom layer of the valveless micro impedance pump of the present invention.
- FIG. 5 is a flow chart of the manufacturing of the middle layer of the valveless micro impedance pump of the present invention.
- FIG. 6 is a flow chart of the manufacturing of the top layer of the valveless micro impedance pump of the present invention.
- FIG. 7 is a sectional view of a second embodiment of the valveless micro impedance pump of the present invention.
- FIG. 8 is a sectional view of a conventional piezoelectric valveless micropump.
- FIG. 9 is a sectional view taken along line 9 - 9 of FIG. 8 .
- the valveless micro impedance pump 1 of the present invention includes a thin sheet-like bottom layer 10 formed with a central opening 101 .
- the valveless micro impedance pump 1 of the present invention further includes a thin sheet-like middle layer 11 overlaid on the bottom layer 10 .
- the middle layer 11 is formed with an elongated recess in a position corresponding to the position of the opening 101 of the bottom layer 10 .
- the recess is slightly larger than the width of the opening 101 and serves as a flow way 113 .
- Amedium (which can be water or other liquid) can flow through the flow way 113 .
- a bottom area of the middle layer 11 between the flow way 113 and the bottom layer 10 is defined as a lower vibration membrane 114 .
- the valveless micro impedance pump 1 of the present invention further includes a top layer 12 overlaid on the middle layer 11 .
- a bottom face of the top layer 12 serves as the top face of the flow way 113 .
- the top layer 12 has a fixing seat 121 .
- a sink 122 is formed on a nearly central portion of the fixing seat 121 .
- the sink 122 is aligned with the opening 101 and has a width equal to the width of the opening 101 .
- a boss 123 is disposed on the bottom of the sink 122 .
- the boss 123 is asymmetrically disposed on the bottom of the sink 122 proximal to lengthwise left side of the sink 122 .
- a first water inlet/outlet 124 is formed between lengthwise left side of the sink 122 and the left end of the top layer 12 .
- a second water inlet/outlet 124 is formed between lengthwise right side of the sink 122 and the right end of the top layer 12 .
- the water inlets/outlets 124 communicate with the flow way 113 .
- a bottom area of the sink 122 is defined as an upper vibration membrane 125 .
- the valveless micro impedance pump 1 of the present invention further includes a piezoelectric element 2 fixedly bridged over the sink 122 of the fixing seat 121 between two sides thereof.
- the bottom face of the piezoelectric element 2 nearly attaches to the top end of the boss 123 .
- the piezoelectric element 2 works by way of uni-morph or bi-morph.
- the piezoelectric element 2 is fixed on the top face of the fixing seat 121 for driving the micropump.
- the upper vibration membrane connected with the boss 123 is pushed to produce vibration wave.
- the medium within the flow way 113 is squeezed by the upper and lower vibration membranes 125 , 114 to wave to the water inlets/outlets 124 on two sides.
- the flow way 113 is defined between the upper vibration membrane 125 and the lower vibration membrane 114 .
- the fixing seat 121 and the bottom layer 10 have different structural designs. Therefore, the thickness of the wall of the flow way is varied and the impedance of the upper and lower vibration membranes, 115 , 114 is varied. Accordingly, the hardness of the wall of the flow way is varied with sections of the flow way.
- the boss 123 is asymmetrically disposed on the bottom of the sink 122 proximal to one side of the fixing seat 121 .
- the wave of the medium will be reflected in reverse direction.
- the wave is continuously collided and reflected so that the medium is transmitted to the water inlet/outlet 124 distal from the boss 123 .
- the bottom layer 10 , middle layer 11 and top layer 12 of the present invention are made by means of photolithography in semiconductor manufacturing procedure.
- the bottom layer 10 , middle layer 11 and top layer 12 are mainly made of electrocasting nickel. The manufacturing procedure is described as follows:
- FIG. 4 shows the manufacturing flow chart of the bottom layer 10 of the valveless micro impedance pump 1 of the present invention.
- step (a) of FIG. 4 a stainless steel plate 21 is prepared.
- step (b) a certain thickness of photoresistor 22 is painted on the stainless steel plate 21 .
- step(c) through exposure, development and washing out photoresistor 22 , a desired pattern is left.
- step (d) by means of micro-electrocasting technique, the desired structure is electrocast. The material of the structure is nickel.
- step (e) the photoresistor 22 is removed and the structure is demolded to separate from the stainless steel plate 21 and form the bottom layer 10 of the valveless micro impedance pump 1 of the present invention.
- FIG. 5 shows the manufacturing flow chart of the middle layer 11 of the valveless micro impedance pump 1 of the present invention.
- step (a) of FIG. 5 a stainless steel plate 21 is prepared.
- step (b) a layer of nickel is electrocast on the stainless steel plate 21 to form the lower vibration membrane 114 .
- step (c) a certain thickness of photoresistor 22 is painted on the lower vibration membrane 114 .
- step (d) through exposure, development and washing out photoresistor 22 , a desired pattern is left.
- step (e) by means of micro-electrocasting technique, the desired structure is electrocast.
- the material of the structure is nickel.
- step (f) the photoresistor 22 is removed and the structure is demolded to separate from the stainless steel plate 21 and form the middle layer 11 of the valveless micro impedance pump 1 of the present invention.
- the middle layer 11 includes the lower vibration membrane 114 and the flow way 113 .
- FIG. 6 shows the manufacturing flow chart of the top layer 12 of the valveless micro impedance pump 1 of the present invention.
- a stainless steel plate 21 is prepared.
- a layer of photoresistor 22 is painted on the stainless steel plate 21 .
- step (c) through exposure, development and washing out photoresistor 22 , a desired pattern is left.
- step (d) a layer of nickel is electrocast to form the upper vibration membrane.
- step (e) of a secondary photolithography a certain thickness of photoresistor. 22 is painted on the upper vibration membrane 125 .
- step (f) through exposure, development and washing out photoresistor 22 , a desired pattern is left.
- step (g) again by means of micro-electrocasting technique, the fixing seat 121 is electrocast.
- the material of the fixing seat 121 is nickel.
- step (h) the photoresistor 22 is removed and the structure is demolded to separate from the stainless steel plate 21 and form the top layer 12 of the valveless micro impedance pump 1 of the present invention.
- the top layer 12 includes the fixing seat 121 , the sink 122 , the boss 123 , the water inlets/outlets 124 and the upper vibration membrane 125 .
- FIG. 7 shows a second embodiment of the present invention, in which two bosses 123 A are disposed in the sink 122 A of the top layer 12 A.
- the bosses 123 A are symmetrically arranged.
- a piezoelectric element 2 A is disposed on each boss 123 A.
- the bottom face of the piezoelectric element 2 A is lengthwise fixed on top end of the boss 123 A and top face of the fixing seat 121 A.
- the upper and lower vibration membranes 125 A, 114 A are pushed by the piezoelectric elements through the bosses 123 A.
- the medium within the flow way 113 A is squeezed to flow toward the water inlets/outlets 124 A on two sides.
- the upper and lower vibration membranes 125 A, 114 A have different structures.
- the hardness of the fixing seat 121 A is different from the hardness of the bottom layer 10 A. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted.
Abstract
A valveless micro impedance pump including a bottom layer, a middle layer, a top layer and a piezoelectric element. The middle layer and the top layer are sealed to form the water inlets/outlets, flow way, upper and lower vibration membranes and boss of the micropump. The piezoelectric element is fixed on the boss and the fixing seat. By means of the electric field effect, the upper and lower vibration membranes are pushed by the piezoelectric element through the boss. The medium within the flow way is squeezed to flow toward the water inlets/outlets on two sides. The upper and lower vibration membranes have different structures. Also, the hardness of the fixing seat is different from the hardness of the bottom layer. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted.
Description
- The present invention is related to a valveless micro impedance pump in which the difference between impedances of materials results in difference between the impedances of the walls of the flow way for transmitting a medium.
- The conventional micro-fluid elements are mainly developed and applied to control, detection, reaction and analysis of micro-fluid. The key elements include micropumps, microvalves, micro-flow ways, micromixers, etc. These elements can be integrated into intelligent micro-fluid chips with different functions. The intelligent micro-fluid chips are applicable to biotechnology, portable physiologic monitor, environmental analyzer, precision fluid control, fuel battery engineering, high-resolution nozzle, micro-power system, etc. The micropump is one of the most important key elements.
- The micropumps can be mainly divided into valve-equipped type and valveless type. With respect to valveless micropumps, they can be powered by piezoelectric measure, pneumatic measure, static measure, profile-memorizing alloy, thermopneumatic measure, ultrasonic measure and bimetal.
-
FIG. 8 is a sectional view of a typical piezoelectricvalveless micropump 6.FIG. 9 is a sectional view taken along line B-B ofFIG. 8 . The piezoelectricvalveless micropump 6 is composed of abottom layer 61, atop layer 62, apiezoelectric element 63 and twomicro-flow ducts 64. The piezoelectricvalveless micropump 6 is operated in such a manner that a drive voltage is applied to thepiezoelectric element 63. Thepiezoelectric element 63 works to push avibration membrane 621. Thevibration membrane 621 is deformed to cause change of the capacity of amiddle flow way 65. This leads to change of pressure. The water comes in from awater inlet 66 and flows through an expandedflow way 67 and themiddle flow way 65. The water then flows through another expandedflow way 68 to awater outlet 69. The change of the capacity of themiddle flow way 65 results in a pressure difference between thewater inlet 66 andwater outlet 69. Therefore, the net flow of thewater outlet 69 is larger than the net flow of thewater inlet 66. Accordingly, the water will flow from thewater inlet 66 to thewater outlet 69. - The conventional piezoelectric valveless micropump is designed with a complicated expanded flow way. This increases the cost of the piezoelectric valveless micropump. In addition, the liquid can only one-way flow. This limits the application of the piezoelectric valveless micropump.
- It is therefore a primary object of the present invention to provide a valveless micro impedance pump in which the materials are different in structure or hardness to lead to a difference between the impedances of the materials. Accordingly, the walls of the flow way have different impedances. Therefore, the medium within the flow way are waved along with the vibration membranes and thus transmitted to the water inlets/outlets.
- According to the above object, the valveless micro impedance pump of the present invention includes:
- a bottom layer formed with an opening;
- a middle layer overlaid on the bottom layer, the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;
- a top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, a boss being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and
- a piezoelectric element, a bottom face of the piezoelectric element being lengthwise fixed on top end of the boss and top face of the fixing seat.
- The present invention can be best understood through the following description and accompanying drawings wherein:
-
FIG. 1 is a sectional view of the valveless micro impedance pump of the present invention; -
FIG. 2 is a sectional view taken along line 2-2 ofFIG. 1 ; -
FIG. 3 is a perspective sectional view of the valveless micro impedance pump of the present invention; -
FIG. 4 is a flow chart of the manufacturing of the bottom layer of the valveless micro impedance pump of the present invention; -
FIG. 5 is a flow chart of the manufacturing of the middle layer of the valveless micro impedance pump of the present invention; -
FIG. 6 is a flow chart of the manufacturing of the top layer of the valveless micro impedance pump of the present invention; -
FIG. 7 is a sectional view of a second embodiment of the valveless micro impedance pump of the present invention; -
FIG. 8 is a sectional view of a conventional piezoelectric valveless micropump; and -
FIG. 9 is a sectional view taken along line 9-9 ofFIG. 8 . - Please refer to
FIGS. 1 and 2 . The valveless micro impedance pump 1 of the present invention includes a thin sheet-like bottom layer 10 formed with acentral opening 101. - The valveless micro impedance pump 1 of the present invention further includes a thin sheet-
like middle layer 11 overlaid on thebottom layer 10. Themiddle layer 11 is formed with an elongated recess in a position corresponding to the position of the opening 101 of thebottom layer 10. The recess is slightly larger than the width of the opening 101 and serves as aflow way 113. Amedium (which can be water or other liquid) can flow through theflow way 113. A bottom area of themiddle layer 11 between theflow way 113 and thebottom layer 10 is defined as alower vibration membrane 114. - The valveless micro impedance pump 1 of the present invention further includes a
top layer 12 overlaid on themiddle layer 11. A bottom face of thetop layer 12 serves as the top face of theflow way 113. Thetop layer 12 has afixing seat 121. Asink 122 is formed on a nearly central portion of thefixing seat 121. In this embodiment, thesink 122 is aligned with the opening 101 and has a width equal to the width of the opening 101. Aboss 123 is disposed on the bottom of thesink 122. In this embodiment, theboss 123 is asymmetrically disposed on the bottom of thesink 122 proximal to lengthwise left side of thesink 122. A first water inlet/outlet 124 is formed between lengthwise left side of thesink 122 and the left end of thetop layer 12. A second water inlet/outlet 124 is formed between lengthwise right side of thesink 122 and the right end of thetop layer 12. The water inlets/outlets 124 communicate with theflow way 113. A bottom area of thesink 122 is defined as anupper vibration membrane 125. - The valveless micro impedance pump 1 of the present invention further includes a
piezoelectric element 2 fixedly bridged over thesink 122 of thefixing seat 121 between two sides thereof. The bottom face of thepiezoelectric element 2 nearly attaches to the top end of theboss 123. Thepiezoelectric element 2 works by way of uni-morph or bi-morph. - Referring to
FIG. 3 , thepiezoelectric element 2 is fixed on the top face of the fixingseat 121 for driving the micropump. The upper vibration membrane connected with theboss 123 is pushed to produce vibration wave. The medium within theflow way 113 is squeezed by the upper andlower vibration membranes outlets 124 on two sides. Theflow way 113 is defined between theupper vibration membrane 125 and thelower vibration membrane 114. The fixingseat 121 and thebottom layer 10 have different structural designs. Therefore, the thickness of the wall of the flow way is varied and the impedance of the upper and lower vibration membranes, 115, 114 is varied. Accordingly, the hardness of the wall of the flow way is varied with sections of the flow way. In addition, theboss 123 is asymmetrically disposed on the bottom of thesink 122 proximal to one side of the fixingseat 121. As a result, when the medium waves to collide a section of the fixingseat 121 more proximal to theboss 123, the wave of the medium will be reflected in reverse direction. The wave is continuously collided and reflected so that the medium is transmitted to the water inlet/outlet 124 distal from theboss 123. By means of changing the driving frequency of thepiezoelectric element 2, the flow can be otherwise controlled and the medium can flow in reverse direction. - The
bottom layer 10,middle layer 11 andtop layer 12 of the present invention are made by means of photolithography in semiconductor manufacturing procedure. Thebottom layer 10,middle layer 11 andtop layer 12 are mainly made of electrocasting nickel. The manufacturing procedure is described as follows: -
FIG. 4 shows the manufacturing flow chart of thebottom layer 10 of the valveless micro impedance pump 1 of the present invention. In step (a) ofFIG. 4 , astainless steel plate 21 is prepared. In step (b), a certain thickness ofphotoresistor 22 is painted on thestainless steel plate 21. In step(c), through exposure, development and washing outphotoresistor 22, a desired pattern is left. In step (d), by means of micro-electrocasting technique, the desired structure is electrocast. The material of the structure is nickel. Finally, in step (e), thephotoresistor 22 is removed and the structure is demolded to separate from thestainless steel plate 21 and form thebottom layer 10 of the valveless micro impedance pump 1 of the present invention. -
FIG. 5 shows the manufacturing flow chart of themiddle layer 11 of the valveless micro impedance pump 1 of the present invention. In step (a) ofFIG. 5 , astainless steel plate 21 is prepared. In step (b), a layer of nickel is electrocast on thestainless steel plate 21 to form thelower vibration membrane 114. In step (c), a certain thickness ofphotoresistor 22 is painted on thelower vibration membrane 114. In step (d), through exposure, development and washing outphotoresistor 22, a desired pattern is left. In step (e), by means of micro-electrocasting technique, the desired structure is electrocast. The material of the structure is nickel. Finally, in step (f), thephotoresistor 22 is removed and the structure is demolded to separate from thestainless steel plate 21 and form themiddle layer 11 of the valveless micro impedance pump 1 of the present invention. Themiddle layer 11 includes thelower vibration membrane 114 and theflow way 113. -
FIG. 6 shows the manufacturing flow chart of thetop layer 12 of the valveless micro impedance pump 1 of the present invention. In step (a) ofFIG. 6 , astainless steel plate 21 is prepared. In step (b), a layer ofphotoresistor 22 is painted on thestainless steel plate 21. In step (c), through exposure, development and washing outphotoresistor 22, a desired pattern is left. In step (d), a layer of nickel is electrocast to form the upper vibration membrane. In step (e) of a secondary photolithography, a certain thickness of photoresistor. 22 is painted on theupper vibration membrane 125. In step (f), through exposure, development and washing outphotoresistor 22, a desired pattern is left. In step (g), again by means of micro-electrocasting technique, the fixingseat 121 is electrocast. The material of the fixingseat 121 is nickel. Finally, in step (h), thephotoresistor 22 is removed and the structure is demolded to separate from thestainless steel plate 21 and form thetop layer 12 of the valveless micro impedance pump 1 of the present invention. Thetop layer 12 includes the fixingseat 121, thesink 122, theboss 123, the water inlets/outlets 124 and theupper vibration membrane 125. -
FIG. 7 shows a second embodiment of the present invention, in which twobosses 123A are disposed in thesink 122A of thetop layer 12A. In this embodiment, thebosses 123A are symmetrically arranged. Apiezoelectric element 2A is disposed on eachboss 123A. The bottom face of thepiezoelectric element 2A is lengthwise fixed on top end of theboss 123A and top face of the fixingseat 121A. - According to the above arrangement, by means of the effect of the electric field, the upper and
lower vibration membranes bosses 123A. The medium within theflow way 113A is squeezed to flow toward the water inlets/outlets 124A on two sides. The upper andlower vibration membranes seat 121A is different from the hardness of thebottom layer 10A. This leads to difference in impedance. Therefore, the wave of the medium can be transmitted. - The above embodiments are only used to illustrate the present invention, not intended to limit the scope thereof. Many modifications of the above embodiments can be made without departing from the spirit of the present invention.
Claims (11)
1. A valveless micro impedance pump comprising:
a bottom layer formed with an opening;
a middle layer overlaid on the bottom layer, the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;
a top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, a boss being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and
a piezoelectric element, a bottom face of the piezoelectric element being lengthwise fixed on top end of the boss and top face of the fixing seat.
2. The valveless micro impedance pump as claimed in claim 1 , wherein the piezoelectric element works by way of uni-morph or bi-morph.
3. The valveless micro impedance pump as claimed in claim 1 , wherein the bottom layer, middle layer and top layer are made of electrocasting nickel.
4. The valveless micro impedance pump as claimed in claim 1 , wherein the bottom layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.
5. The valveless micro impedance pump as claimed in claim 1 , wherein the middle layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.
6. The valveless micro impedance pump as claimed in claim 1 , wherein the top layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting, secondary photolithography and removing photoresistor.
7. A valveless micro impedance pump comprising:
a bottom layer formed with an opening;
a middle layer overlaid on the bottom layer, the middle layer being formed with an elongated recess in a position corresponding to the position of the opening of the bottom layer, the recess being slightly larger than a width of the opening and serving as a flow way, a bottom area of the middle layer between the flow way and the bottom layer being defined as a lower vibration membrane;
a top layer overlaid on the middle layer, the top layer having a fixing seat, a sink being formed on a nearly central portion of the fixing seat, two bosses being disposed in the sink, a first water inlet/outlet being formed between left side of the sink and a left end of the top layer, a second water inlet/outlet being formed between right side of the sink and a right end of the top layer, the water inlets/outlets communicating with the flow way, a bottom area of the sink being defined as an upper vibration membrane; and
two piezoelectric elements, bottom faces of the piezoelectric elements being respectively lengthwise fixed on top ends of the bosses and top face of the fixing seat.
8. The valveless micro impedance pump as claimed in claim 7 , wherein the bottom layer, middle layer and top layer are made of electrocasting nickel.
9. The valveless micro impedance pump as claimed in claim 7 , wherein the bottom layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.
10. The valveless micro impedance pump as claimed in claim 7 , wherein the middle layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting and removing photoresistor.
11. The valveless micro impedance pump as claimed in claim 7 , wherein the top layer is made by means of painting photoresistor, exposure, development, washing out photoresistor, micro-electrocasting, secondary photolithography and removing photoresistor.
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US11/288,186 US20070122299A1 (en) | 2005-11-29 | 2005-11-29 | Valveless micro impedance pump |
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US11/288,186 US20070122299A1 (en) | 2005-11-29 | 2005-11-29 | Valveless micro impedance pump |
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US11/288,186 Abandoned US20070122299A1 (en) | 2005-11-29 | 2005-11-29 | Valveless micro impedance pump |
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Cited By (13)
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US20060280655A1 (en) * | 2005-06-08 | 2006-12-14 | California Institute Of Technology | Intravascular diagnostic and therapeutic sampling device |
US20070140875A1 (en) * | 2005-12-16 | 2007-06-21 | Green James S | Piezoelectric pump |
US20090209945A1 (en) * | 2008-01-18 | 2009-08-20 | Neurosystec Corporation | Valveless impedance pump drug delivery systems |
CN101975153A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valveless piezoelectric pump of elliptical combined pipe |
CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
CN102135087A (en) * | 2011-04-12 | 2011-07-27 | 江苏大学 | Diffusion/contraction combined pipe valveless piezoelectric pump |
CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
US8298176B2 (en) | 2006-06-09 | 2012-10-30 | Neurosystec Corporation | Flow-induced delivery from a drug mass |
CN102852775A (en) * | 2012-07-27 | 2013-01-02 | 华中科技大学 | Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof |
US20130041319A1 (en) * | 2011-06-07 | 2013-02-14 | Derek Rinderknecht | Medicament Delivery Systems |
CN103638852A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Valveless piezoelectric micromixer for synthesizing jet |
CN104373325A (en) * | 2014-10-11 | 2015-02-25 | 北京联合大学 | Arc-shaped subsection equal diameter pipe valveless piezoelectric pump |
US20210180723A1 (en) * | 2019-12-16 | 2021-06-17 | Frore Systems Inc. | Virtual valve in a mems-based cooling system |
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US20070140875A1 (en) * | 2005-12-16 | 2007-06-21 | Green James S | Piezoelectric pump |
US8298176B2 (en) | 2006-06-09 | 2012-10-30 | Neurosystec Corporation | Flow-induced delivery from a drug mass |
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CN101975153A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valveless piezoelectric pump of elliptical combined pipe |
CN101975154A (en) * | 2010-10-12 | 2011-02-16 | 江苏大学 | Valve-free piezoelectric pump of logarithmic spiral combined tube |
CN102135087A (en) * | 2011-04-12 | 2011-07-27 | 江苏大学 | Diffusion/contraction combined pipe valveless piezoelectric pump |
US20130041319A1 (en) * | 2011-06-07 | 2013-02-14 | Derek Rinderknecht | Medicament Delivery Systems |
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CN102691648A (en) * | 2012-05-02 | 2012-09-26 | 江苏大学 | Valveless piezoelectric pump with axisymmetric logarithmic spiral pipe |
CN102852775A (en) * | 2012-07-27 | 2013-01-02 | 华中科技大学 | Valveless micropump based on laser impact wave mechanical effect and manufacturing method thereof |
CN103638852A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Valveless piezoelectric micromixer for synthesizing jet |
CN104373325A (en) * | 2014-10-11 | 2015-02-25 | 北京联合大学 | Arc-shaped subsection equal diameter pipe valveless piezoelectric pump |
US20210180723A1 (en) * | 2019-12-16 | 2021-06-17 | Frore Systems Inc. | Virtual valve in a mems-based cooling system |
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