US20070137536A1 - Device to orient a supporting plate with respect to a plurality of axes - Google Patents
Device to orient a supporting plate with respect to a plurality of axes Download PDFInfo
- Publication number
- US20070137536A1 US20070137536A1 US11/518,686 US51868606A US2007137536A1 US 20070137536 A1 US20070137536 A1 US 20070137536A1 US 51868606 A US51868606 A US 51868606A US 2007137536 A1 US2007137536 A1 US 2007137536A1
- Authority
- US
- United States
- Prior art keywords
- supporting plate
- base
- axis
- respect
- orient
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0015—Orientation; Alignment; Positioning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0061—Tools for holding the circuit boards during processing; handling transport of printed circuit boards
- H05K13/0069—Holders for printed circuit boards
Definitions
- the present invention concerns a device to orient, on several axes, a supporting plate with respect to a fixed base.
- the invention is advantageously but not exclusively applied in the production of multi-layer electronic circuits of the type consisting of a plurality of elementary circuits each of which is made, in turn, on a base support, also known as greentape®, which is disposed on the plate.
- each base support is moved from one work station to another and, in each of them, is disposed on a supporting plate, which must be oriented with micrometric precision, on various axes, with respect to a fixed base.
- orientation devices comprising several electric motors disposed outside the supporting plate and mechanically connected thereto by means of mechanical transmission members such as arms, shafts, pulleys and reduction gears.
- Said known devices are structurally very complex, however, they have considerable bulk, and do not allow to achieve a precise and repeatable micrometric orientation of the supporting plate, and therefore to obtain great precision in the final product.
- a purpose of the present invention is to achieve a device to orient on several axes a supporting plate with respect to a fixed base, which allows good precision in the orientation or positioning of the plate in order to obtain good repeatability of the product and narrow working tolerances.
- the Applicant has devised, tested and embodied the present invention to overcome the shortcomings of the state of the art and to obtain these and other purposes and advantages.
- a device according to the invention is able to be used to orient on several axes a supporting plate with respect to a fixed base.
- An object on which a determinate process is then carried out is able to be disposed on said plate.
- the device comprises at least two linear motors interposed between the base and the supporting plate, wherein at least a first of the linear motors is able to cause a movement of the supporting plate along a first axis “X” and at least a second motor is able to cause a movement of the supporting plate along a second axis “Y”.
- the axis “X” and the axis “Y” are orthogonal to each other and lie on a plane of orientation which is parallel to the supporting surface of the supporting plate.
- each of said linear motors comprises a fixed element, or stator, solid with the base, and a mobile element, or cursor, facing the stator and solid with the supporting plate.
- the movements to which the supporting plate is subjected are substantially independent of each other and allow to translate said plate with respect to the base, both along the axis “X” and also along the axis “Y”, by any determinate entity.
- linear motors allow to eliminate every mechanical transmission member, such as arms, shafts, pulleys or reduction gears, which are typical of known devices, and allows both to obtain greater precision and also to considerably reduce the bulk and complexity of the device according to the invention.
- a third linear motor is interposed which, driven together with at least one of the other two, is able to cause a rotation of the supporting plate with respect to a third axis “ ⁇ ” substantially orthogonal to the plane of orientation.
- the device according to the present invention is able to orient, with extreme precision, the supporting plate with respect to at least three axes (X, Y, ⁇ ).
- the device in order to reduce to a minimum the friction between the supporting plate and the base, the device comprises ball means, mounted on the base, on which the supporting plate is rested and is free to move.
- a sensor means is advantageously provided to detect the position with respect to the base of the supporting plate, and hence the object disposed thereon.
- the sensor means is connected to a control unit, able to process the signals emitted by said sensor means in order to control and drive the linear motors.
- FIG. 1 is a plane view, partly sectioned, of a device according to the present invention to orient on several axes a supporting plate with respect to a fixed base;
- FIG. 2 is a lateral section from II to II of the device in FIG. 1 ;
- FIG. 3 is a lateral section from III to III of the device in FIG. 1 ;
- FIG. 4 is an enlarged detail of FIG. 2 .
- a device 10 according to the invention to orient on several axes a supporting plate 12 with respect to a fixed base 14 is usable for example in the production of electronic circuits.
- the supporting plate 12 ( FIGS. 1 and 2 ) has a plane upper surface 17 on which a base support 15 is able to be disposed, on which a printing station, not shown here and solid with the base 14 , is able to dispose tracks of electrically conducting material.
- the supporting plate 12 is made of rigid material, for example aluminum, and is shaped substantially like a parallelepiped, with sizes of about 400 mm by about 370 mm and with a thickness of about 20 mm.
- the base support 15 consists for example of one or more flexible and very thin sheets, in the order of some tenths of a millimeter, of insulating material, such as aluminum or plastic material, and also known as greentape®.
- the supporting plate 12 is connected to the base 14 by means of a plurality of supports 20 , in this case eight, each comprising a base 21 ( FIG. 3 ) fixed to the base 14 itself and having a substantially semi-spherical seating where a ball 22 is inserted, free to rotate.
- the supporting plate 12 comprises, in turn, eight inserts 23 made for example of widia, or other material with similar characteristics of hardness, each of which rests on a respective ball 22 .
- the points where the inserts 23 rest on the balls 22 define a substantially horizontal plane, with respect to which the supporting plate 12 is free to move.
- the device 10 comprises three linear motors ( FIGS. 1 and 2 ), respectively first 25 , second 26 and third 27 , positioned between the base 14 and the supporting plate 12 and each comprising a stator 28 ( FIG. 4 ), fixed to the base 14 , and a cursor 29 , fixed to the supporting plate 12 .
- the base 14 comprises, facing towards the supporting plate 12 , a shaped plate 31 including seatings 32 , inside each of which a respective electric coil 31 of the stator 28 is inserted, substantially flush with the upper surface of the shaped plate 30 .
- Each cursor 29 comprises two permanent magnets 34 aligned with each other and along a longitudinal axis, and facing each other on one side of said coil 31 .
- the first and the third motor 25 and 27 are mounted so that the longitudinal axes of the magnets 34 of the respective cursors 29 are parallel to each other and parallel to an axis Y of the supporting plate 12 ( FIG. 1 ).
- the second motor 26 is disposed so that the longitudinal axis of the magnets 34 of the cursor 29 is substantially orthogonal to that of the magnets 34 of the cursor 29 of the first and third motor 25 and 27 and is parallel to an axis X of the supporting plate 12 and therefore orthogonal to the axis Y.
- the supporting plate 12 moves along the axis X and, according to the energizing mode, moves to the right or to the left.
- the supporting plate 12 moves along the axis Y, whereas, by varying the energizing mode in both motors 25 and 27 , the supporting plate 12 moves along the axis Y in the direction opposite the previous one.
- the supporting plate 12 rotates in said plane defined by the balls 22 of the supports 20 with respect to an axis ⁇ , in a clockwise or anti-clockwise direction, according to the energizing mode itself.
- the device 10 also comprises three sensors, respectively first 35 , second 36 and third 37 ( FIG. 1 ), for example of the optical type, two of which are fixed to the same side of the base 14 and the third 37 to an adjacent side.
- the sensors 35 , 36 and 37 are of the feeler type.
- the sensors 35 , 36 and 37 are able to detect the distance from the outer edge of the plate 12 .
- the device 10 also comprises a command and control unit, of a known type and not shown here, which based on the data detected by the three sensors 35 , 36 and 37 commands the three motors 25 , 26 and 27 so as to move and orient the supporting plate 12 and center the base support 15 with respect to the base 14 and hence with respect to the printing device.
- a command and control unit of a known type and not shown here, which based on the data detected by the three sensors 35 , 36 and 37 commands the three motors 25 , 26 and 27 so as to move and orient the supporting plate 12 and center the base support 15 with respect to the base 14 and hence with respect to the printing device.
- the three sensors 35 , 36 and 37 in cooperation with the command and control unit, allow to achieve an accuracy of orientation of about 0.5 ⁇ m.
- the plate 12 is clamped to the base 14 by means of clamping means, not shown, for example a clamp, or by suitably energizing the linear motors 25 , 26 and 27 .
- the base 14 comprises a plurality of cylindrical elements 40 disposed in correspondence with each of the four sides of the supporting plate 12 , elements 40 that function as a containing frame and as security against possible additional travels of the plate 12 .
- the first and the third motor 25 and 27 are disposed in the central zone of the base 14 , substantially aligned with the axis X.
Abstract
Device to orient on several axes a supporting plate with respect to a fixed base. The device comprises at least two linear motors interposed between the base and the supporting plate, wherein a first linear motor is able to cause a movement of the supporting plate along a first axis and the other two linear motors are able to cause a movement of the supporting plate along a second axis.
Description
- The present invention concerns a device to orient, on several axes, a supporting plate with respect to a fixed base. The invention is advantageously but not exclusively applied in the production of multi-layer electronic circuits of the type consisting of a plurality of elementary circuits each of which is made, in turn, on a base support, also known as greentape®, which is disposed on the plate.
- In the field of production of electronic circuits, particularly multi-layer circuits, it is known, as described in the Italian patent of industrial invention IT-B-1310557 granted on Feb. 18, 2002 in the name of the present Applicant, to use elementary circuits each made on a base support, comprising one or more sheets of insulating material, consisting of aluminum, or synthetic materials, and also called greentape®.
- In the course of the various working steps, each base support is moved from one work station to another and, in each of them, is disposed on a supporting plate, which must be oriented with micrometric precision, on various axes, with respect to a fixed base.
- In order to orient the supporting plate with respect to the base, orientation devices are known, comprising several electric motors disposed outside the supporting plate and mechanically connected thereto by means of mechanical transmission members such as arms, shafts, pulleys and reduction gears. Said known devices are structurally very complex, however, they have considerable bulk, and do not allow to achieve a precise and repeatable micrometric orientation of the supporting plate, and therefore to obtain great precision in the final product.
- A purpose of the present invention is to achieve a device to orient on several axes a supporting plate with respect to a fixed base, which allows good precision in the orientation or positioning of the plate in order to obtain good repeatability of the product and narrow working tolerances.
- The Applicant has devised, tested and embodied the present invention to overcome the shortcomings of the state of the art and to obtain these and other purposes and advantages.
- The present invention is set forth and characterized in the main claim, while the dependent claims describe other characteristics of the invention or variants to the main inventive idea.
- In accordance with the above purpose, a device according to the invention is able to be used to orient on several axes a supporting plate with respect to a fixed base.
- An object on which a determinate process is then carried out is able to be disposed on said plate.
- According to a characteristic of the present invention, the device comprises at least two linear motors interposed between the base and the supporting plate, wherein at least a first of the linear motors is able to cause a movement of the supporting plate along a first axis “X” and at least a second motor is able to cause a movement of the supporting plate along a second axis “Y”.
- In a preferential form of embodiment, the axis “X” and the axis “Y” are orthogonal to each other and lie on a plane of orientation which is parallel to the supporting surface of the supporting plate.
- Moreover, each of said linear motors comprises a fixed element, or stator, solid with the base, and a mobile element, or cursor, facing the stator and solid with the supporting plate.
- The movements to which the supporting plate is subjected are substantially independent of each other and allow to translate said plate with respect to the base, both along the axis “X” and also along the axis “Y”, by any determinate entity.
- Moreover, the use of the linear motors allows to eliminate every mechanical transmission member, such as arms, shafts, pulleys or reduction gears, which are typical of known devices, and allows both to obtain greater precision and also to considerably reduce the bulk and complexity of the device according to the invention.
- According to a preferential form of embodiment of the invention, between the fixed base and the supporting plate at least a third linear motor is interposed which, driven together with at least one of the other two, is able to cause a rotation of the supporting plate with respect to a third axis “θ” substantially orthogonal to the plane of orientation.
- In this way, the device according to the present invention is able to orient, with extreme precision, the supporting plate with respect to at least three axes (X, Y, θ).
- According to an advantageous embodiment, in order to reduce to a minimum the friction between the supporting plate and the base, the device comprises ball means, mounted on the base, on which the supporting plate is rested and is free to move.
- Moreover, a sensor means is advantageously provided to detect the position with respect to the base of the supporting plate, and hence the object disposed thereon.
- The sensor means is connected to a control unit, able to process the signals emitted by said sensor means in order to control and drive the linear motors.
- These and other characteristics of the present invention will become apparent from the following description of a preferential form of embodiment, given as a non-restrictive example with reference to the attached drawings wherein:
-
FIG. 1 is a plane view, partly sectioned, of a device according to the present invention to orient on several axes a supporting plate with respect to a fixed base; -
FIG. 2 is a lateral section from II to II of the device inFIG. 1 ; -
FIG. 3 is a lateral section from III to III of the device inFIG. 1 ; -
FIG. 4 is an enlarged detail ofFIG. 2 . - With reference to
FIG. 1 , adevice 10 according to the invention to orient on several axes a supportingplate 12 with respect to afixed base 14 is usable for example in the production of electronic circuits. - To be more exact, the supporting plate 12 (
FIGS. 1 and 2 ) has a planeupper surface 17 on which abase support 15 is able to be disposed, on which a printing station, not shown here and solid with thebase 14, is able to dispose tracks of electrically conducting material. - The supporting
plate 12 is made of rigid material, for example aluminum, and is shaped substantially like a parallelepiped, with sizes of about 400 mm by about 370 mm and with a thickness of about 20 mm. - The
base support 15 consists for example of one or more flexible and very thin sheets, in the order of some tenths of a millimeter, of insulating material, such as aluminum or plastic material, and also known as greentape®. - The supporting
plate 12 is connected to thebase 14 by means of a plurality ofsupports 20, in this case eight, each comprising a base 21 (FIG. 3 ) fixed to thebase 14 itself and having a substantially semi-spherical seating where aball 22 is inserted, free to rotate. The supportingplate 12 comprises, in turn, eightinserts 23 made for example of widia, or other material with similar characteristics of hardness, each of which rests on arespective ball 22. The points where theinserts 23 rest on theballs 22 define a substantially horizontal plane, with respect to which the supportingplate 12 is free to move. - The
device 10 according to the present invention comprises three linear motors (FIGS. 1 and 2 ), respectively first 25, second 26 and third 27, positioned between thebase 14 and the supportingplate 12 and each comprising a stator 28 (FIG. 4 ), fixed to thebase 14, and acursor 29, fixed to the supportingplate 12. - The
base 14 comprises, facing towards the supportingplate 12, ashaped plate 31 includingseatings 32, inside each of which a respectiveelectric coil 31 of thestator 28 is inserted, substantially flush with the upper surface of theshaped plate 30. - Each
cursor 29 comprises twopermanent magnets 34 aligned with each other and along a longitudinal axis, and facing each other on one side ofsaid coil 31. - The first and the
third motor magnets 34 of therespective cursors 29 are parallel to each other and parallel to an axis Y of the supporting plate 12 (FIG. 1 ). - The
second motor 26 is disposed so that the longitudinal axis of themagnets 34 of thecursor 29 is substantially orthogonal to that of themagnets 34 of thecursor 29 of the first andthird motor plate 12 and therefore orthogonal to the axis Y. - In this way, when the
second motor 26 is energized, the supportingplate 12 moves along the axis X and, according to the energizing mode, moves to the right or to the left. - By energizing the first and the
third motor plate 12 moves along the axis Y, whereas, by varying the energizing mode in bothmotors plate 12 moves along the axis Y in the direction opposite the previous one. - Moreover, by energizing the first and the
third motor plate 12 rotates in said plane defined by theballs 22 of thesupports 20 with respect to an axis θ, in a clockwise or anti-clockwise direction, according to the energizing mode itself. - The
device 10 also comprises three sensors, respectively first 35, second 36 and third 37 (FIG. 1 ), for example of the optical type, two of which are fixed to the same side of thebase 14 and the third 37 to an adjacent side. According to a variant not shown here, thesensors sensors plate 12. - The
device 10 also comprises a command and control unit, of a known type and not shown here, which based on the data detected by the threesensors motors plate 12 and center thebase support 15 with respect to thebase 14 and hence with respect to the printing device. - The three
sensors - Once the correct position of the supporting
plate 12 with respect to thebase 14 has been identified, theplate 12 is clamped to thebase 14 by means of clamping means, not shown, for example a clamp, or by suitably energizing thelinear motors - According to one embodiment of the invention, the
base 14 comprises a plurality ofcylindrical elements 40 disposed in correspondence with each of the four sides of the supportingplate 12,elements 40 that function as a containing frame and as security against possible additional travels of theplate 12. - It is clear that modifications and/or additions of parts may be made to the
device 10 as described heretofore, without departing from the field and scope of the present invention. - According to a variant of the invention, the first and the
third motor base 14, substantially aligned with the axis X. - It is also clear that, although the present invention has been described with reference to some specific examples, a person of skill in the art shall certainly be able to achieve many other equivalent forms of device to orient on several axes a supporting plate, having the characteristics as set forth in the claims and hence all coming within the field of protection defined thereby.
Claims (9)
1. Device to orient on several axes a supporting plate with respect to a fixed base, comprising at least two linear motors interposed between said base and said supporting plate, wherein at least a first linear motor is able to cause a movement of said supporting plate along a first axis and wherein at least a second linear motor is able to cause a movement of said supporting plate along a second axis.
2. Device as in claim 1 , wherein said first axis and said second axis are substantially orthogonal to each other.
3. Device as in claim 1 , further comprising at least a third linear motor which is interposed between said base and said supporting plate and which, driven together with said first and/or said second linear motor, is able to cause a rotation of said supporting plate with respect to a third axis substantially orthogonal to said first axis and said second axis.
4. Device as in claim 1 , further comprising sensor means associated with said base and able to detect the position of said supporting plate with respect to said base.
5. Device as in claim 4 , further comprising a control unit connected to said sensor means and able to control and selectively drive said linear motors.
6. Device as in claim 1 , further comprising ball means associated with said base on which said supporting plate rests, free to move.
7. Device as in claim 1 , wherein each of said linear motors comprises at least a fixed element associated with said base and at least a mobile element associated with said supporting plate, and wherein said fixed and mobile elements face each other.
8. Device as in claim 7 , wherein said fixed element comprises at least an electric coil and said mobile element comprises one or more permanent magnets.
9. Device as in claim 7 , wherein shaped seatings are made on said base, inside each of which a respective fixed element is inserted.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT000159A ITUD20050159A1 (en) | 2005-09-26 | 2005-09-26 | DEVICE TO ORIENT A SUPPORT PLATE COMPARED TO A PLURALITY OF AXES |
ITUD2005A000159 | 2005-09-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
US20070137536A1 true US20070137536A1 (en) | 2007-06-21 |
Family
ID=37607182
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/518,686 Abandoned US20070137536A1 (en) | 2005-09-26 | 2006-09-11 | Device to orient a supporting plate with respect to a plurality of axes |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070137536A1 (en) |
EP (1) | EP1768480A1 (en) |
IT (1) | ITUD20050159A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103203655A (en) * | 2012-01-11 | 2013-07-17 | 昆山允升吉光电科技有限公司 | Mechanism for strengthening flatness of tabletop of operating table |
CN106044630A (en) * | 2016-07-28 | 2016-10-26 | 成都驿都果业有限责任公司 | Fruit storage warehouse hoisting device |
Citations (14)
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---|---|---|---|---|
US4667139A (en) * | 1984-10-31 | 1987-05-19 | Hitachi, Ltd. | Table device |
US4774442A (en) * | 1984-09-25 | 1988-09-27 | Hiroshi Teramachi | Linear motor-driven X-Y table |
US4916340A (en) * | 1988-01-22 | 1990-04-10 | Canon Kabushiki Kaisha | Movement guiding mechanism |
US5216590A (en) * | 1990-07-13 | 1993-06-01 | Seiko Seiki Kabushiki Kaisha | Contactless guided positioning table |
US5315751A (en) * | 1990-10-24 | 1994-05-31 | International Business Machines Corporation | Method of fabricating a combined linear-rotary direct drive step motor |
US5334892A (en) * | 1992-12-22 | 1994-08-02 | Anorad Corporation | Positioning device for planar positioning |
US5763965A (en) * | 1995-01-27 | 1998-06-09 | Carl-Zeiss-Stiftung | Linearly displaceable precision table |
US5952743A (en) * | 1995-08-29 | 1999-09-14 | Sidey; Roger Charles Hey | Electric motor |
US6370748B1 (en) * | 1999-04-02 | 2002-04-16 | Gisulfo Baccini | Device to produce multi-layer electronic circuits |
US20040003670A1 (en) * | 2002-07-02 | 2004-01-08 | Kimberly-Clark Worldwide, Inc. | Method of collecting data relating to attributes of personal care articles and compositions |
US20040061383A1 (en) * | 2002-08-09 | 2004-04-01 | Nippon Thompson Co., Ltd. | Position-control stage with onboard linear motor |
US6904820B2 (en) * | 2002-12-20 | 2005-06-14 | Kimberly-Clark Worldwide, Inc. | Method of using a simulated skin substrate and method for determining material dryness performance |
US6954041B2 (en) * | 2002-05-27 | 2005-10-11 | Canon Kabushiki Kaisha | Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus |
US7137970B1 (en) * | 2006-01-23 | 2006-11-21 | The Procter & Gamble Company | Test method for assessing irritation of skin |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3281045B2 (en) * | 1992-08-07 | 2002-05-13 | 株式会社東芝 | Positioning device |
DE4310119C1 (en) * | 1993-03-27 | 1994-02-17 | Krauss Maffei Ag | Mobile transport system for automatic mfg. plant - uses transport platforms supported by air cushion bearings and displaced via linear drive motors |
-
2005
- 2005-09-26 IT IT000159A patent/ITUD20050159A1/en unknown
-
2006
- 2006-09-07 EP EP06120326A patent/EP1768480A1/en not_active Withdrawn
- 2006-09-11 US US11/518,686 patent/US20070137536A1/en not_active Abandoned
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4774442A (en) * | 1984-09-25 | 1988-09-27 | Hiroshi Teramachi | Linear motor-driven X-Y table |
US4667139A (en) * | 1984-10-31 | 1987-05-19 | Hitachi, Ltd. | Table device |
US4916340A (en) * | 1988-01-22 | 1990-04-10 | Canon Kabushiki Kaisha | Movement guiding mechanism |
US5216590A (en) * | 1990-07-13 | 1993-06-01 | Seiko Seiki Kabushiki Kaisha | Contactless guided positioning table |
US5315751A (en) * | 1990-10-24 | 1994-05-31 | International Business Machines Corporation | Method of fabricating a combined linear-rotary direct drive step motor |
US5334892A (en) * | 1992-12-22 | 1994-08-02 | Anorad Corporation | Positioning device for planar positioning |
US5763965A (en) * | 1995-01-27 | 1998-06-09 | Carl-Zeiss-Stiftung | Linearly displaceable precision table |
US5952743A (en) * | 1995-08-29 | 1999-09-14 | Sidey; Roger Charles Hey | Electric motor |
US6370748B1 (en) * | 1999-04-02 | 2002-04-16 | Gisulfo Baccini | Device to produce multi-layer electronic circuits |
US6954041B2 (en) * | 2002-05-27 | 2005-10-11 | Canon Kabushiki Kaisha | Supporting apparatus having a plurality of magnets that generate a floating force and method, stage apparatus, and exposure apparatus |
US20040003670A1 (en) * | 2002-07-02 | 2004-01-08 | Kimberly-Clark Worldwide, Inc. | Method of collecting data relating to attributes of personal care articles and compositions |
US20040061383A1 (en) * | 2002-08-09 | 2004-04-01 | Nippon Thompson Co., Ltd. | Position-control stage with onboard linear motor |
US6904820B2 (en) * | 2002-12-20 | 2005-06-14 | Kimberly-Clark Worldwide, Inc. | Method of using a simulated skin substrate and method for determining material dryness performance |
US7137970B1 (en) * | 2006-01-23 | 2006-11-21 | The Procter & Gamble Company | Test method for assessing irritation of skin |
Also Published As
Publication number | Publication date |
---|---|
EP1768480A1 (en) | 2007-03-28 |
ITUD20050159A1 (en) | 2007-03-27 |
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Legal Events
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AS | Assignment |
Owner name: AFCO C.V., NETHERLANDS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:BACCINI, GISULFO;REEL/FRAME:020741/0666 Effective date: 20080131 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |