US20080242046A1 - Method on Forming an Isolation Film or a Semiconductor Device - Google Patents
Method on Forming an Isolation Film or a Semiconductor Device Download PDFInfo
- Publication number
- US20080242046A1 US20080242046A1 US12/112,679 US11267908A US2008242046A1 US 20080242046 A1 US20080242046 A1 US 20080242046A1 US 11267908 A US11267908 A US 11267908A US 2008242046 A1 US2008242046 A1 US 2008242046A1
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- Prior art keywords
- film
- forming
- trench
- pad
- sacrificial
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Abstract
A method of forming an isolation film in a semiconductor device is disclosed. The disclosed method includes performing a patterning process on a predetermined region of a semiconductor substrate in which a patterned pad film is formed, forming a trench defining an inactive region and an active region, forming a liner film on the entire surface including the trench, forming an insulating film for trench burial only within the trench, stripping the remaining liner film formed except for the inside of the trench and the patterned pad film formed below the liner film, forming a sacrificial film on the entire surface, and performing a polishing process on the entire surface in which the sacrificial film is formed until the semiconductor substrate of the active region is exposed, thereby forming the isolation film having no topology difference with the semiconductor substrate of the active region.
Description
- This is a division of U.S. application Ser. No. 11/156,998 filed Jun. 20, 2005, which claims the priority benefit under 35 USC 119 of KR 2005-19636 filed Mar. 9, 2005, the entire respective disclosures of which are incorporated herein by reference.
- 1. Field of Disclosure
- Methods for isolation films of semiconductor devices are shown and described.
- 2. Disclosure of the Related Art
- As semiconductor devices become more highly-integrated, semiconductor manufacturing processes become more complicated. Further, there is an urgent need for the development of isolation film technology having good electrical properties at a small area.
- Technologies for fabricating isolation films include a shallow trench isolation method. A pad oxide film and a pad nitride film are first sequentially formed on a semiconductor substrate. An isolation mask is then formed on the pad oxide film. If the pad nitride film, the pad oxide film and the semiconductor substrate of a predetermined thickness are etched by means of the etch process using the isolation mask, trenches are formed in the semiconductor substrate. An insulating film for trench burial is formed to bury the trenches, and the top surface of the insulating film is then polished. The pad nitride film and the pad oxide film are then removed.
- At this time, a moat is unintentionally created in which the oxide film is located at the interface between the oxide film burying the trenches and the semiconductor substrate, i.e., the interface between an inactive region and an active region of the isolation region is etched into the trenches. This makes a subsequent process difficult and causes the leakage current of the semiconductor substrate.
- Accordingly, there is a need for technology that can improve threshold voltage characteristics of cells by avoiding the above-described moat phenomenon that can be generated at the interface between an inactive region and an active region, and that can enhance the reliability of semiconductor devices by securing characteristics of a stabilized transistor.
- Accordingly, in view of the above problems, a method of forming an isolation film of a semiconductor device is disclosed, wherein threshold voltage characteristics of cells can be improved by prohibiting the moat phenomenon that can be generated at the interface between an inactive region and an active region, and wherein the reliability of the resulting semiconductor devices can be improved through secured characteristics of a stabilized transistor by improving threshold voltage characteristics of cells.
- A disclosed method of forming an isolation film comprises: performing a patterning process on a predetermined region of a semiconductor substrate in which a patterned pad film is formed; forming a trench defining an inactive region and an active region; forming a liner film on the entire surface including the trench; forming an insulating film for trench burial only within the trench; stripping the remaining liner film formed except for the inside of the trench and the patterned pad film formed below the liner film, forming a sacrificial film on the entire surface; and performing a polishing process on the entire surface in which the sacrificial film is formed until the semiconductor substrate of the active region is exposed, thereby forming the isolation film with little or no topology difference with the semiconductor substrate of the active region.
- The pad film may be a pad nitride film.
- The pad film preferably has a pad oxide film and a pad nitride film sequentially formed on.
- The disclosed method can further comprise forming a wall oxide film on sidewalls of the trench, after the trench is formed.
- The liner film is preferably a nitride liner film.
- The forming the insulating film for trench burial only within the trench may include forming the insulating film for trench burial on the entire surface of the semiconductor substrate in which the liner film is formed, and then performing a polishing process until the pad film is exposed.
- The stripping of the remaining liner film formed except for the inside of the trench and the patterned pad film may include stripping the liner film formed on the sidewalls of the trench to a predetermined depth, while stripping the liner film and the pad film, whereby moats are formed at the interface between the inactive region and the active region.
- The sacrificial film is preferably formed while filling the moats formed at the interface between the inactive region and the active region.
- The sacrificial film can be formed using a sacrificial oxide film that is formed by means of a deposition method of the CVD mode or PVD mode, or a sacrificial oxide film that is formed by means of a growth process of an oxygen atmosphere.
- The sacrificial oxide film may be formed by means of a dry oxidization process or a wet oxidization process using H2 and O2 gas at a pressure of about 10 to 100 Torr for about 3 to 5 hours.
- The polishing process may be performed using one of a dry etch process, a CMP process and a wet etch process.
- The dry etch process may be performed using a gas having a high selective ratio between the sacrificial film and the insulating film for trench burial.
- The dry etch process may be performed using a mixed gas of CH3 gas and CF4 gas at high bias power of 200 W.
- The CMP process may be performed using slurry having a high selective ratio between the sacrificial film and the insulating film for trench burial.
- A method of forming an isolation film of a semiconductor device comprises: the steps of providing a semiconductor substrate in which moats are formed at the interface between an active region and an inactive region; forming an isolation film buried with an insulating film for trench burial in the inactive region; forming a sacrificial film on the entire surface; and performing a polishing process on the entire surface in which the sacrificial film is formed until the semiconductor substrate of the active region is exposed, thereby forming the isolation film having no topology difference with the semiconductor substrate of the active region.
- The sacrificial film may be formed using a sacrificial oxide film that is formed by means of a deposition method of the CVD mode or PVD mode, or a sacrificial oxide film that is formed by means of a growth process of an oxygen atmosphere.
- The sacrificial oxide film may be formed by means of a dry oxidization process or a wet oxidization process using H2 and O2 gas at a pressure in the range of from about 10 to about 100 Torr for a time period in the range of from about 3 to about 5 hours.
- The polishing process may be performed using one of a dry etch process, a CMP process and a wet etch process.
- The dry etch process may be performed using a gas having a high selective ratio between the sacrificial film and the insulating film for trench burial.
- The dry etch process may be performed using a mixed gas of CH3 gas and CF4 gas at high bias power of about 200 W.
- The CMP process may be performed using slurry having a high selective ratio between the sacrificial film and the insulating film for trench burial.
-
FIGS. 1 to 6 are cross-sectional views explaining a disclosed method of forming an isolation film of a semiconductor device. - In the description below, when one film is described as being “disposed on” or “on” another film or a semiconductor substrate, the one film may directly contact the other film or the semiconductor substrate or, one or more additional films may be disposed between the one film and the other film or the semiconductor substrate. Furthermore, in the drawings, the thickness and size of each layer is not to scale and may be exaggerated for convenience of explanation and clarity. Like reference numerals are used to identify the same or similar parts.
-
FIGS. 1 to 6 are cross-sectional views for explaining a disclosed method of forming an isolation film of a semiconductor device. Referring toFIG. 1 , apad oxide film 12 and apad nitride film 14 are sequentially formed on asemiconductor substrate 10. A patterning process for defining an active region and an inactive region is then performed on thesemiconductor substrate 10 on which thepad nitride film 14 is formed, thereby forming a trench in which a predetermined region of the semiconductor substrate is etched. - A thermal oxidization process is then performed on the resulting structure in which the trench is formed, thus forming a
wall oxide film 16 on sidewalls of the trench. Anitride liner film 18 is then formed to a predetermined thickness along the sidewalls on which thewall oxide film 16 is formed. - In order to fill the trench in which the
wall oxide film 16 and thenitride liner film 18 are stacked, aninsulating film 20 is deposited which is a HDP oxide film having good gap-fill characteristics and which is enough to cover the entire semiconductor substrate, is formed. - Referring to
FIG. 2 , a polishing process, such as a CMP process, is performed on the entire result in which theinsulating film 20 for trench burial is formed until thenitride liner film 18 is exposed, thereby forming anisolation film 20 a. During the polishing process, the nitride liner film formed on thepad nitride film 14 serves as anti-polishing layer. - Referring to
FIG. 3 , if an etch process for stripping thenitride liner film 18, and thepad nitride film 14 is performed, anisolation film 20 b in which the sidewalls of the trench are recessed to a predetermined thickness is formed. In the etch process for stripping thenitride liner film 18 and thepad nitride film 14, thenitride liner film 18 remaining on the sidewalls of the trench is etched to a predetermined depth while the sidewalls of theHDP oxide film 20 is recessed to a predetermined thickness, due to a difference in the etch selective ratio between thenitride line film 18 and theHDP oxide film 20 a being an insulating film for trench burial, which is adjacent to thenitride liner film 18. As a result, moats (“A” inFIG. 3 ) are generated at the interface between an inactive region and an active region in which the isolation film is formed. - Referring to
FIG. 4 , if an etch process for removing thepad oxide film 12 formed below thepad nitride film 14 is performed, the semiconductor substrate of the active region is exposed. At the time of the process for stripping thepad oxide film 12, thenitride liner film 18 that is etched to a predetermined depth shown inFIG. 3 is further etched whereby the moats at the interface between the inactive region and the active region (“B” inFIG. 4 ) become deeper. That is, although the moat A whose height above thesemiconductor substrate 10 is about “a” as shown inFIG. 3 , the moat B having a similar height as that of thesemiconductor substrate 10 ofFIG. 4 is formed. - Referring to
FIG. 5 , asacrificial oxide film 22, preferably a SiO2 film is formed on the entire surface from which thepad oxide film 12 has been stripped, thefilm 22 will be used as a sacrificial film in a polishing process that will be performed subsequently. Thesacrificial oxide film 22 can be formed by means of a deposition method of the CVD mode or the PVD mode, or can be formed by growing it on thesemiconductor substrate 10 exposed by stripping the pad oxide film and the oxide film of the isolation film by means of a growth process of an oxygen atmosphere. - The oxide film growth process under the oxygen atmosphere can be performed using a dry oxidization process or a wet oxidization process using H2 and O2 gas at a pressure of about 10 to 100 Torr for about 3 to 5 hours. The
sacrificial oxide film 22 is formed to a thickness greater than that of theisolation film 20 b, while filling the moats (“B” inFIG. 4 ) at the interface between the inactive region and the active region, which are generated due to thenitride liner film 18 etched to a predetermined depth. - Referring to
FIG. 6 , if a polishing process is performed on the entire surface in which thesacrificial oxide film 22 is formed until thesemiconductor substrate 10 of the active region is exposed, anisolation film 20 c having the same height as that of the active region is formed. - After the polishing process is performed, the
sacrificial oxide film 22 is stripped. Thus, theheight 20 c of the isolation film of the inactive region becomes the same as that ofsemiconductor substrate 10 of the active region, while the semiconductor substrate of the active region is exposed. - The polishing process can be performs using one of a dry etch process, a CMP process and a wet etch process.
- The dry etch process for performing polishing can be performed in process conditions in which a mixed gas of CH3 gas and CF4 gas having a high selectivity ratio between the
sacrificial oxide film 22 being SiO2 and theisolation film 20 b being a HDP oxide film is used, and high bias power is 200 W or higher. - Furthermore, the CMP process for performing polishing can be performed using a slurry having a high selectivity ratio between the
sacrificial oxide film 22 being SiO2 and theisolation film 20 b being a HDP oxide film. - As described above, after moats formed at the interface between an active region and an inactive region are filled with a sacrificial oxide film, the remaining sacrificial oxide film except for the sacrificial oxide film fills in the moats is stripped by means of a polishing process. As such, since a moat phenomenon that can be generated at the interface between the inactive region and the active region is avoided, threshold voltage characteristics of a cell can be improved. If the threshold voltage characteristics of a cell is improved, there are effects in that characteristics of a stabilized transistor is secured and the reliability of a semiconductor device is increased.
- Furthermore, since moats formed at the interface between an active region and an inactive region are filled with a sacrificial oxide film, there is an effect in that bridge failure due to the remnants generated in a subsequent process is prevented.
- Although the foregoing description has been made with reference to the preferred embodiments, it is to be understood that changes and modifications may be made by the ordinary skilled in the art without departing from the spirit and scope of this disclosure and the appended claims.
Claims (8)
1. A method of forming an isolation film of a semiconductor device, comprising:
forming a patterned pad film comprising a pad oxide film and a pad nitride film sequentially formed on the substrate on a semiconductor substrate;
forming a trench through the patterned pad film defining an inactive region and an active region;
forming a liner film on the resulting structure;
forming an insulating film in the trench;
stripping the liner film disposed outside of the trench and on top of the patterned pad film leaving liner film disposed inside the trench and in sidewalls of the pad film intact;
forming a sacrificial film on the resulting structure; and
performing a wet etch process on the resulting structure until the semiconductor substrate of the active region is exposed, thereby forming the isolation film having an upper surface that is coplanar with the semiconductor substrate of the active region.
2. The method as claimed in claim 1 , further comprising forming a wall oxide film on sidewalls of the trench after the trench is formed and before the liner film is formed.
3. The method as claimed in claim 1 , wherein the liner film comprises a nitride liner film.
4. The method as claimed in claim 1 , wherein the forming the insulating film within the trench comprises forming the insulating film on the resulting structure on which the liner film is formed, and then performing a polishing process until the pad film is exposed.
5. The method as claimed in claim 1 , wherein the stripping of the liner film disposed outside of the trench and on top of the patterned pad film further comprises stripping the liner film formed on sidewalls of the trench to a predetermined depth while stripping the pad film to form moats at an interface between the inactive region and the active region.
6. The method as claimed in claim 5 , wherein the sacrificial film fills the moats formed at the interface between the inactive region and the active region.
7. The method as claimed in claim 1 , wherein the sacrificial film is a sacrificial oxide film that is formed by a deposition method selected from the group consisting of chemical vapor deposition (CVD) and physical vapor deposition (PVD), or is a growth process in an oxygen atmosphere.
8. The method as claimed in claim 1 , wherein the sacrificial film comprises a sacrificial oxide film formed by a dry oxidization process or a wet oxidization process using H2 and O2 gas at a pressure of about 10 Torr to about 100 Torr for about 3 hours to about 5 hours.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/112,679 US20080242046A1 (en) | 2005-03-09 | 2008-04-30 | Method on Forming an Isolation Film or a Semiconductor Device |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050019636A KR100590383B1 (en) | 2005-03-09 | 2005-03-09 | Method of forming a field oxide layer in semiconductor device |
KR2005-19636 | 2005-03-09 | ||
US11/156,998 US7429520B2 (en) | 2005-03-09 | 2005-06-20 | Methods for forming trench isolation |
US12/112,679 US20080242046A1 (en) | 2005-03-09 | 2008-04-30 | Method on Forming an Isolation Film or a Semiconductor Device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/156,998 Division US7429520B2 (en) | 2005-03-09 | 2005-06-20 | Methods for forming trench isolation |
Publications (1)
Publication Number | Publication Date |
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US20080242046A1 true US20080242046A1 (en) | 2008-10-02 |
Family
ID=36971565
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/156,998 Active 2026-03-15 US7429520B2 (en) | 2005-03-09 | 2005-06-20 | Methods for forming trench isolation |
US12/112,679 Abandoned US20080242046A1 (en) | 2005-03-09 | 2008-04-30 | Method on Forming an Isolation Film or a Semiconductor Device |
US12/112,725 Abandoned US20080206955A1 (en) | 2005-03-09 | 2008-04-30 | Method of Forming an Isolation Film in a Semiconductor Device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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US11/156,998 Active 2026-03-15 US7429520B2 (en) | 2005-03-09 | 2005-06-20 | Methods for forming trench isolation |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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US12/112,725 Abandoned US20080206955A1 (en) | 2005-03-09 | 2008-04-30 | Method of Forming an Isolation Film in a Semiconductor Device |
Country Status (5)
Country | Link |
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US (3) | US7429520B2 (en) |
JP (1) | JP2006253624A (en) |
KR (1) | KR100590383B1 (en) |
CN (1) | CN1832124A (en) |
TW (1) | TWI303079B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070148908A1 (en) * | 2005-12-28 | 2007-06-28 | Byun Dong I | Method of forming trench isolation layer of semiconductor device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4756926B2 (en) * | 2005-06-17 | 2011-08-24 | Okiセミコンダクタ株式会社 | Method for manufacturing element isolation structure |
US8012846B2 (en) * | 2006-08-04 | 2011-09-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Isolation structures and methods of fabricating isolation structures |
DE102007008530B4 (en) * | 2007-02-21 | 2015-11-12 | Infineon Technologies Ag | A method of manufacturing a nonvolatile memory device, a nonvolatile memory device, a memory card having a nonvolatile memory device, and an electrical device having a memory card |
CN102814727B (en) * | 2012-08-13 | 2015-05-06 | 无锡华润上华科技有限公司 | Method for chemically and mechanically grinding shallow trench isolation structure |
CN103855072B (en) * | 2012-12-06 | 2016-08-17 | 中国科学院微电子研究所 | Deng flat field oxidation isolation structure and forming method thereof |
US9502499B2 (en) * | 2015-02-13 | 2016-11-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device structure having multi-layered isolation trench structures |
KR20180068229A (en) * | 2016-12-13 | 2018-06-21 | 삼성전자주식회사 | Semiconductor device and method for fabricating the same |
CN110943033B (en) * | 2018-09-25 | 2022-04-26 | 长鑫存储技术有限公司 | Preparation method of shallow trench isolation structure liner |
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-
2005
- 2005-03-09 KR KR1020050019636A patent/KR100590383B1/en not_active IP Right Cessation
- 2005-06-13 JP JP2005172541A patent/JP2006253624A/en active Pending
- 2005-06-20 US US11/156,998 patent/US7429520B2/en active Active
- 2005-06-23 TW TW094120981A patent/TWI303079B/en not_active IP Right Cessation
- 2005-08-04 CN CNA2005100910525A patent/CN1832124A/en active Pending
-
2008
- 2008-04-30 US US12/112,679 patent/US20080242046A1/en not_active Abandoned
- 2008-04-30 US US12/112,725 patent/US20080206955A1/en not_active Abandoned
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Also Published As
Publication number | Publication date |
---|---|
US20080206955A1 (en) | 2008-08-28 |
TWI303079B (en) | 2008-11-11 |
US7429520B2 (en) | 2008-09-30 |
US20060205173A1 (en) | 2006-09-14 |
JP2006253624A (en) | 2006-09-21 |
TW200633006A (en) | 2006-09-16 |
KR100590383B1 (en) | 2006-06-19 |
CN1832124A (en) | 2006-09-13 |
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