US20090010605A1 - Multilayer optic device and system and method for making same - Google Patents

Multilayer optic device and system and method for making same Download PDF

Info

Publication number
US20090010605A1
US20090010605A1 US12/212,115 US21211508A US2009010605A1 US 20090010605 A1 US20090010605 A1 US 20090010605A1 US 21211508 A US21211508 A US 21211508A US 2009010605 A1 US2009010605 A1 US 2009010605A1
Authority
US
United States
Prior art keywords
solid phase
optic device
core
layers
optic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/212,115
Inventor
Susanne Madeline Lee
Forrest Frank Hopkins
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Priority to US12/212,115 priority Critical patent/US20090010605A1/en
Publication of US20090010605A1 publication Critical patent/US20090010605A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G21NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21KTECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Definitions

  • the invention relates generally to optics, and more particularly to multilayer optic devices and methods for making the same.
  • EDXRD energy dispersive X-ray diffraction
  • Such EDXRD may suffer from high false positives due to weak diffracted X-ray signals.
  • the weakness of the X-ray signals may stem from a variety of origins.
  • the polychromatic X-ray spectrum used in EDXRD is produced by the Bremsstrahlung part of the source spectrum, which is inherently low in intensity.
  • X-ray source may collimation eliminate more than 99.99 percent of the source X-rays incident on the baggage volume under analysis.
  • some of the materials being searched for may not diffract strongly as they are amorphous.
  • the diffracting volume may be small. The last two limitations arise from the type of threat materials being searched for in baggage, making all but the second limitation unavoidable.
  • hollow glass polycapillary optics may be found in, for example, U.S. Pat. No. 5,192,869.
  • the glass is the low index of refraction material, and air filling the hollow portions is the high index of refraction material.
  • These types of optics typically do not provide much gain at energy levels above 80 keV, since the difference in the indices of refraction between air and glass becomes increasingly small as energy levels approach and surpass 80 keV.
  • such optics use a concept of total internal reflection to reflect X-rays entering the hollow glass capillaries at appropriate angles back into the hollow capillaries, thereby channeling a solid angle of the source X-rays into collimated or focused beams at the output of the optic.
  • the term “collimate” refers to the creation of quasi-parallel beams of electromagnetic (EM) radiation from divergent EM beams. Only about five percent of an EM source's solid angle typically is captured by the input of such known optics.
  • the invention includes embodiments that relate to an optic device for transmitting photons through total internal reflection.
  • the optic device includes at least three conformal solid phase layers. Interfaces between the solid phase layers are gapless. Further, the at least three conformal solid phase layers include at least two photon redirection regions.
  • the invention includes embodiments that relate to an optic device for redirecting, through total internal reflection, photons having an energy above one keV.
  • the optic device includes a first solid phase layer having a first index of refraction and a second solid phase layer having a second index of refraction.
  • the invention includes embodiments that relate to a system for focusing photons through total internal reflection.
  • the system includes a source of photons and an optic device including at least three conformal solid phase layers. Interfaces between the solid phase layers lack void areas. Further, the at least three conformal solid phase layers include at least two photon redirection regions.
  • the invention includes embodiments that relate to a method for forming an optic.
  • the method includes forming a first solid phase layer, characterized by a first index of refraction, onto a blank and forming on the first solid phase layer a second solid phase layer, characterized by a second index of refraction. Between the first solid phase layer, the blank, and the second solid phase layer are at least two photon redirection regions.
  • FIG. 1 is a schematic view illustrating the phenomenon of total internal reflection.
  • FIG. 2 is a top schematic view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 3 is a cross-sectional view of the optic device of FIG. 2 taken along line III-III.
  • FIG. 4 is a side schematic view of the optic device of FIG. 2 .
  • FIG. 5 is a perspective view of the optic device of FIG. 2 .
  • FIG. 6 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 7 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 8 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 9 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 10 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 11 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 12 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 13 is a schematic view of a deposition assembly constructed in accordance with an embodiment of the invention.
  • FIG. 14 is a schematic view of a deposition assembly constructed in accordance with an embodiment of the invention.
  • FIG. 15 illustrates process steps for fabricating an optic device in accordance with an embodiment of the invention.
  • Embodiments of the invention described herein utilize the phenomenon of total internal reflection.
  • a critical angle ⁇ c when an angle of incidence is less than a critical angle ⁇ c , total internal reflection occurs.
  • the critical angle ⁇ c for total internal reflection depends on, among other factors, the material, the difference in the relative indices of refraction, and the energy of the incident photons.
  • the multilayer optic 10 includes multiple layers of material, each having a different index of refraction.
  • layers 16 , 20 , and 24 surrounding a core 50 .
  • Layer 16 is positioned radially exterior to and contiguous with the core 50 .
  • the core 50 may be formed of a higher index of refraction material such as beryllium, lithium hydride, magnesium, or any other suitable elements or compounds having similarly higher refractive indices and high X-ray transmission properties.
  • the core 50 may be less than a micrometer to greater than one centimeter in diameter.
  • Layer 20 is positioned radially exterior to layer 16 and radially interior to layer 24 and contiguous with both layers 16 and 24 .
  • the layers making up the multilayer optic 10 may be formed of materials that have varying indices of refraction.
  • layers 15 , 19 , 23 and 27 may be formed of materials that have a lower index of refraction and a high photon absorption.
  • appropriate materials may be chosen from osmium, platinum, gold, or any other suitable elements or compounds having similarly lower refractive indices and high X-ray absorption properties.
  • the core 50 and layers 16 , 20 and 24 may be formed of materials having a higher index of refraction and a high photon transmission.
  • appropriate materials may be chosen from beryllium, lithium hydride, magnesium, or any other suitable elements or compounds having similarly higher refractive indices and high X-ray transmission properties.
  • the diameter of the core 50 is determined by the critical angle for total internal reflection between the higher index of refraction of the core 50 and the lower index of refraction of the layer 16 .
  • the multilayer optic 10 can utilize the principle of total internal reflection of electromagnetic radiation. Specifically, diverging electromagnetic radiation beams 36 , 38 , 40 , and 42 containing photons and stemming from an electromagnetic radiation source 34 enter the input face 12 and are redirected into quasi-parallel beams of photons 44 exiting the output face 14 .
  • Multilayer optics in accordance with embodiments of the invention can collect a large solid angle of an X-ray source 34 and redirect polychromatic energies into quasi-parallel photon beams.
  • “Quasi-parallel” means that diverging beams of photons have been collected and focused into beams of electromagnetic radiation or photons to exit the output face 14 at or below the critical angle ⁇ c . This divergence causes the X-ray beam to be larger than the output face 14 of the optic 10 .
  • multilayer optics in accordance with embodiments of the invention may be configured to produce slightly focused, highly focused, slightly diverging, or highly diverging beams.
  • the beam size at the point of interest i.e., where the diameter of the beam is of concern
  • the beam size at the point of interest is approximately the same as at the output face 14 of the optic 10 .
  • highly focused is meant that the beam size at the point of interest is smaller than at the output face 14 of the optic 10 .
  • the beam size at the point of interest is larger than a quasi-parallel beam but smaller than the intrinsic source beam.
  • highly diverging is meant that the beam is the same size or larger than the intrinsic source beam.
  • the composition of materials making up the multilayer optic 10 , the macroscopic geometry of the multilayer optic 10 , the thickness of the multilayer optic 10 , and the number of individual layers determine the angular acceptance range of the multilayer optic 10 .
  • the angular acceptance range may be from about 0 steradians up to about 2 ⁇ steradians of a solid angle of a source of the photons.
  • only a few layers have been illustrated with reference to multilayer optic 10 .
  • any number of layers, including into the hundreds, thousands, or millions of layers, can be fabricated to utilize total internal reflection to form the various types of photon beams listed previously.
  • the core 50 and the layers 16 , 20 , 24 have photon redirection regions.
  • layer 16 has a photon redirection region 17 stemming from a center of curvature
  • layer 20 has a photon redirection region 21 stemming from a second center of curvature
  • layer 24 has a photon redirection region 25 stemming from yet another center of curvature.
  • the photon redirection regions 17 , 21 , 25 are chosen to allow for the diverging electromagnetic radiation beams 36 , 38 , 40 , and 42 to be made parallel or near parallel, or conversely to allow for parallel or converging electromagnetic radiation beams to be made diverging.
  • the minimum photon redirection region is determined by the minimum thickness that would still enable a smooth surface, which is at least two atomic layers, or about ten angstroms.
  • the photon redirection regions 17 , 21 , 25 each contain redirecting segments.
  • the redirecting segments are chosen such that they each have a constant curvature.
  • the curvature of each redirecting segment may be the same as or different from the curvatures of other redirecting segments. If each of the redirecting segments for a particular photon redirection region is straight, then the radius of curvature is infinite.
  • the photons or electromagnetic radiation 36 , 38 , 40 , 42 entering the input face 12 can be redirected into parallel pencil beams 44 , thereby increasing the photon flux density at the output face 14 over the photon flux density in the direct source beam at the same distance from the source 34 .
  • the output face 14 may be formed closer to the input face 12 , i.e., positioned prior to the region where the photons are redirected into parallel rays, allowing the input electromagnetic radiation beams 36 , 38 , 40 , 42 to remain somewhat diverging as they exit the output face 14 .
  • core 50 and any number of the layers may have no arc of curvature, instead having a cylindrical cross-sectional profile.
  • additional layers can be formed contiguous with those described and illustrated in FIGS. 3 and 4 .
  • this optic 10 An important feature of this optic 10 is that the layers can be made thin enough and the overall optic length (from input face 12 to output face 14 ) short enough that photons are redirected through bounces along only one side of a particular layer, for example, layer 24 . This is unlike known optics, where the photons bounce off both sides of a particular layer. The fewer number of bounces needed to redirect the photons in this multilayer optic 10 significantly increase the photon transmission efficiency of the optic 10 .
  • the multilayer optic 10 can be utilized in applications that operate at energy levels above 60 keV, such as, for example, X-ray diffraction, explosive detection, industrial X-ray, and cargo inspection, to name a few. Some of these applications may operate at energy levels as high as 450 keV.
  • a multilayer optic 110 including a plurality of layers 113 a - 113 n , one on top of the other, extending between an input face 112 and an output face 114 having a polygonal profile.
  • the middle layer of the multilayer optic 110 is layer 113 mid .
  • all of the layers include a photon redirection region positioned between the input face 112 and the output face 114 . It should be appreciated, however, that layer 113 mid may include a photon redirection region, or that other layers in addition to 113 mid may lack a photon redirection region.
  • the design shown allows diverging electromagnetic radiation to be input into the input face 112 , redirected by the optic multilayers, and output from the output face 114 into a parallel fan beam.
  • the fan beams may be parallel or near parallel or may be somewhat divergent but still focused relative to the input of electromagnetic radiation.
  • the conformal nature of the individual layers allows for the multilayer optic 110 to be utilized in a vacuum environment.
  • a multilayer optic 210 that includes an input face 212 and an output face 214 .
  • the multilayer optic 210 includes individual layers sandwiching a mid-layer. The design shown allows for a focused parallel fan beam output. As with the previously described embodiments, the conformal nature of the individual layers allows the multilayer optic 210 to be used in a vacuum environment.
  • FIG. 8 illustrates a multilayer optic 310 having an input face 312 and an output face 314 .
  • the layers have been positioned over a cone 150 , which serves as a blank or mold for the individual layers.
  • the output beam exiting the output face 314 is shaped into a curved output, which can be coupled to a singly curved diffracting crystal (not shown) to enable the creation of a fan beam of highly monochromatic radiation.
  • Monochromatic radiation is used in several different applications, including, for example, X-ray diffraction. Highly monochromatic radiation is radiation within a very narrow energy range approximately equal to that produced by diffracting from a single crystal.
  • the singly curved diffracting crystal can be formed of any suitable material, such as, for example, mica, silicon, germanium, or platinum and curved so that the crystal conforms to the surface of, for example, a cone or cylinder.
  • suitable material such as, for example, mica, silicon, germanium, or platinum and curved so that the crystal conforms to the surface of, for example, a cone or cylinder.
  • the suitability of any material for use as the diffracting crystal is dependent upon the diffraction intensity and the lattice spacing of the material. It should be appreciated that the multilayer optic 310 should be positioned between the source of the electromagnetic radiation and the diffracting crystal.
  • Quasi-monochromatic radiation is radiation within a limited wavelength range that is greater than the highly monochromatic range but less than the full Bremsstrahlung spectrum from an X-ray source.
  • FIGS. 9-12 illustrate various other potential embodiments of multilayer optics.
  • FIGS. 9 and 10 illustrate multilayer optics that have output faces in a photon redirection region, thereby allowing such optics to emit highly diverging beams.
  • FIGS. 11 and 12 illustrate multilayer optics whose output faces are dimensionally smaller than their respective input faces, allowing such optics to emit highly focused beams.
  • a multilayer optic deposition assembly 400 including a deposition chamber 402 and a movable shutter apparatus 410 .
  • the deposition chamber 402 may be utilized in suitable deposition techniques, including, for example, vapor deposition, or thermal spray deposition.
  • suitable vapor deposition techniques include sputtering, ion implantation, ion plating, laser deposition, evaporation, and jet vapor deposition.
  • Evaporation techniques may include thermal, electron-beam, or any other suitable technique resulting in appreciable deposition of material.
  • Suitable thermal spray deposition includes combustion, electric arc, and plasma spray.
  • the deposition chamber 402 includes an inputting apparatus 404 for allowing ingress of deposition materials into the deposition chamber 402 .
  • the inputting apparatus 404 may include numerous inlet nozzles, each being associated with a specific deposition material.
  • a blank 420 is positioned within the deposition chamber 402 .
  • the blank 420 may be a core 50 or a cone 150 , described previously with regard to the embodiments illustrated in FIGS. 4 and 8 , or it may be a substrate serving as a support mechanism for deposited layers.
  • the blank 420 can assume virtually any suitable geometric configuration consistent with the desired beam profile. Examples of the almost infinite number of suitable geometric configurations include a circular wafer, a rectangular prism, a cone, a cylinder, and an egg-shape, to name a few.
  • the shutter apparatus 410 enables the formation of a multilayer optic wherein the individual layers have a photon redirection region. Specifically, as a deposition material is input into the deposition chamber 402 through the inputting apparatus 404 , the shutter apparatus 410 moves in a direction A relative to the blank 420 . If the speed of the shutter apparatus 410 decreases as it moves in the direction A, an increasing amount of deposition material will contact the blank 420 in the direction A, thereby enabling the formation of a multilayer optic with individual layers having different thicknesses and having photon redirection regions. Control of the movement and velocity of the shutter apparatus 410 may be accomplished electronically with a digital controlling mechanism, such as a microcontroller, microprocessor, or computer. Alternatively, control of the movement may be accomplished manually, or mechanically, such as, pneumatically, hydraulically, or otherwise.
  • the individual layers can be deposited upon the blank 402 , and a multilayer optic having conformal individual layers, like the multilayer optic 110 , can be formed.
  • the first layer to be laid down may be the mid-layer 113 mid .
  • the subsequent layers leading to and including layer 113 a can be deposited.
  • the partially formed multilayer optic can be turned over and the layers leading to and including layer 113 n can be deposited.
  • a multilayer optic like the multilayer optic 210 can be formed. It should be appreciated that the deposition rate of the deposition material in the deposition chamber 402 may be altered as well.
  • a multilayer optic deposition assembly 500 that includes a deposition chamber 502 and the movable shutter 410 .
  • the deposition chamber 502 includes the apparatus 404 that is the source of a vapor stream and a pair of rotatable spindles 505 .
  • the spindles 505 are capable of rotating in a direction B. Further, the spindles 505 each include a pointed end that comes into contact with and holds the blank 420 . By rotating the spindles 505 in the same direction B the blank 420 can be rotated while deposition material is introduced into the deposition chamber 502 through the inputting apparatus 404 .
  • the spindles 505 can remain in a non-rotating state during a first set of deposition steps to form the layers 113 mid to 113 a . Then, the spindles 505 can be rotated to turn the partially formed multilayer optic one hundred and eighty degrees around to allow for a second set of deposition steps to form the layers leading to and including 113 n to form the multilayer optic 110 .
  • FIG. 15 illustrates process steps for forming a multilayer optic in accordance with an embodiment of the invention.
  • a first material having a pre-determined index of refraction with a pre-determined photon transmission coefficient is laid down.
  • the first material is laid down on a blank or substrate, which may be a core, a cone, or a polygonal support mechanism. It should be appreciated that the blank or substrate may be incorporated within the multilayer optic, such as the core 50 , or may serve merely as a mold, like cone 150 .
  • a second material having a second index of refraction with a second photon transmission coefficient is deposited on the first material in such a way as to be conformal and have minimal void spaces.
  • each individual layer may be formed at thicknesses in the range of one nanometer to thousands of nanometers.
  • the Steps 600 and 605 can be sequentially repeated to prepare multiple pairs of layers, with each pair having one layer having a first index of refraction with a first photon transmission coefficient and a second layer having a second index of refraction with a second photon transmission coefficient.
  • the deposition of the first and second materials may be accomplished by any number of suitable processes, such as, for example, vapor deposition, thermal spray deposition, or electroplating.
  • suitable vapor deposition techniques include sputtering, ion implantation, ion plating, laser deposition (using a laser beam to vaporize a material or materials to be deposited), evaporation, or jet vapor deposition (using sound waves to vaporize a material or materials to be deposited).
  • Evaporation techniques may be thermal, electron-beam or any other suitable technique that will result in appreciable deposition of material.
  • suitable thermal spray deposition techniques include combustion, electric arc, and plasma spray.
  • the partially formed multilayer optic may be rotated, oscillated, or moved, it may be turned, and it may be subjected to a deposition process whereby the deposition material is deposited at different rates along the axis of the multilayer optic.
  • multilayer optics can be formed with various configurations and profiles that will allow for a greater amount of electromagnetic radiation to be collected from a source at the input of the optic, parallel or near parallel beams of electromagnetic radiation to be output from the multilayer optic, or the beams of electromagnetic radiation output from the multilayer optic may be shaped into pencil beams, fan beams, or curved in an arc, as an example.
  • Multilayer optics in accordance with embodiments of the invention may be used in various industrial applications.
  • a multilayer optic formed to emit a quasi-parallel beam having a circular cross-section may find utility in X-ray diffraction and backscatter, such as non-destructive examination, applications.
  • a multilayer optic formed to emit a slightly focused beam with a circular cross-section may find utility in X-ray diffraction, X-ray fluorescence, and non-destructive examination applications.
  • Multilayer optics formed to emit a highly focused beam having a circular cross-section may find utility in X-ray fluorescence and non-destructive examination applications.
  • Multilayer optics formed to emit a slightly diverging beam having a circular cross-section may find utility in computed tomography and X-ray diagnostic system applications.
  • Multilayer optics formed to emit a highly diverging beam having a circular cross-section may find utility in non-destructive examination applications requiring an increased field-of-view, and in medical interventional imaging and treatments requiring an increased field-of-view, such as the imaging and treatment of large tumors.
  • multilayer optics formed to emit a quasi-parallel fan beam in one plane that is quasi-parallel, slightly focused, highly focused, slightly diverging, or highly diverging in a direction parallel to the fan would produce a beam having a rectangular cross-section that may find utility in non-destructive examination applications.
  • Multilayer optics formed to emit a fan beam in one plane that is quasi-parallel, slightly focusing, highly focusing, slightly diverging, or highly diverging in a direction transverse to the plane may find utility in computed tomography, X-ray diagnostic system, and non-destructive examination applications.
  • the fan beam may have a divergence the same as or greater than that of the source.
  • Multilayer optics formed to emit a fan beam in one plane that is slightly or highly diverging in the direction transverse to the fan beam plane may find utility in medical interventional applications, such as close-up imaging to increase field-of-view.
  • the divergence in the direction transverse to the fan beam plane is equal to or greater than the source divergence.
  • a multilayer optic coupled to a diffracting crystal may produce a quasi-parallel monochromatic fan beam that may find utility, provided the intensity is great enough, in medical imaging and interventional treatments.
  • Such monochromatic imaging would reduce a patient's dose of X-rays while increasing the resolution.

Abstract

An optic device, system and method for making are described. The optic device includes a first solid phase layer having a first index of refraction with a first photon transmission property and a second solid phase layer having a second index of refraction with a second photon transmission property. The first and second layers are conformal to each other. The optic device may be fabricated by vapor depositing a first layer and then vapor depositing a second layer thereupon. The first layer may be deposited onto a blank or substrate. The blank or substrate may be rotated during deposition. Further, a computer-controlled shutter may be used to alter the deposition rate of material along an axis of the optic device. Alternatively, the optic device may be moved at varying speeds through a vapor stream to alter the deposition rate of material.

Description

    BACKGROUND
  • The invention relates generally to optics, and more particularly to multilayer optic devices and methods for making the same.
  • Numerous applications exist that require a focused beam of electromagnetic radiation. For example, energy dispersive X-ray diffraction (EDXRD) may be used to inspect checked airline baggage for the detection of explosive threats or other contraband. Such EDXRD may suffer from high false positives due to weak diffracted X-ray signals. The weakness of the X-ray signals may stem from a variety of origins. First, the polychromatic X-ray spectrum used in EDXRD is produced by the Bremsstrahlung part of the source spectrum, which is inherently low in intensity. Second, X-ray source may collimation eliminate more than 99.99 percent of the source X-rays incident on the baggage volume under analysis. Third, some of the materials being searched for, e.g., explosives, may not diffract strongly as they are amorphous. Fourth, the diffracting volume may be small. The last two limitations arise from the type of threat materials being searched for in baggage, making all but the second limitation unavoidable.
  • At lower X-ray energies, such as 80 keV and below, increasing the polychromatic X-ray flux density at the material being inspected has been addressed by coupling hollow glass polycapillary optics to low powered, sealed tube (stationary anode) X-ray sources. An example of hollow glass polycapillary optics may be found in, for example, U.S. Pat. No. 5,192,869. The glass is the low index of refraction material, and air filling the hollow portions is the high index of refraction material. These types of optics typically do not provide much gain at energy levels above 80 keV, since the difference in the indices of refraction between air and glass becomes increasingly small as energy levels approach and surpass 80 keV.
  • Further, such optics use a concept of total internal reflection to reflect X-rays entering the hollow glass capillaries at appropriate angles back into the hollow capillaries, thereby channeling a solid angle of the source X-rays into collimated or focused beams at the output of the optic. As used herein, the term “collimate” refers to the creation of quasi-parallel beams of electromagnetic (EM) radiation from divergent EM beams. Only about five percent of an EM source's solid angle typically is captured by the input of such known optics.
  • In addition, the use of air in known optics as one of the materials prevents such optics from being placed within a vacuum. Thus, known optics are limited in their potential uses.
  • It would thus be desirable for a device that could collect more of the primary electromagnetic radiation source and redirect those rays to a desired spot to improve the electromagnetic radiation flux density at that spot.
  • BRIEF DESCRIPTION
  • The invention includes embodiments that relate to an optic device for transmitting photons through total internal reflection. The optic device includes at least three conformal solid phase layers. Interfaces between the solid phase layers are gapless. Further, the at least three conformal solid phase layers include at least two photon redirection regions.
  • The invention includes embodiments that relate to an optic device for redirecting, through total internal reflection, photons having an energy above one keV. The optic device includes a first solid phase layer having a first index of refraction and a second solid phase layer having a second index of refraction.
  • The invention includes embodiments that relate to a system for focusing photons through total internal reflection. The system includes a source of photons and an optic device including at least three conformal solid phase layers. Interfaces between the solid phase layers lack void areas. Further, the at least three conformal solid phase layers include at least two photon redirection regions.
  • The invention includes embodiments that relate to a method for forming an optic. The method includes forming a first solid phase layer, characterized by a first index of refraction, onto a blank and forming on the first solid phase layer a second solid phase layer, characterized by a second index of refraction. Between the first solid phase layer, the blank, and the second solid phase layer are at least two photon redirection regions.
  • These and other advantages and features will be more readily understood from the following detailed description of preferred embodiments of the invention that is provided in connection with the accompanying drawings.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a schematic view illustrating the phenomenon of total internal reflection.
  • FIG. 2 is a top schematic view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 3 is a cross-sectional view of the optic device of FIG. 2 taken along line III-III.
  • FIG. 4 is a side schematic view of the optic device of FIG. 2.
  • FIG. 5 is a perspective view of the optic device of FIG. 2.
  • FIG. 6 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 7 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 8 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 9 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 10 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 11 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 12 is a perspective view of an optic device constructed in accordance with an embodiment of the invention.
  • FIG. 13 is a schematic view of a deposition assembly constructed in accordance with an embodiment of the invention.
  • FIG. 14 is a schematic view of a deposition assembly constructed in accordance with an embodiment of the invention.
  • FIG. 15 illustrates process steps for fabricating an optic device in accordance with an embodiment of the invention.
  • DETAILED DESCRIPTION
  • Embodiments of the invention described herein utilize the phenomenon of total internal reflection. Referring to FIG. 1, when an angle of incidence is less than a critical angle θc, total internal reflection occurs. The critical angle θc for total internal reflection depends on, among other factors, the material, the difference in the relative indices of refraction, and the energy of the incident photons.
  • Referring now to FIGS. 2-5, there is shown a multilayer optic 10 including an input face 12 and an output face 14. By “multilayer” is meant a structure that has a plurality of monolayers. As shown more particularly in FIGS. 3 and 4, the multilayer optic 10 includes multiple layers of material, each having a different index of refraction. For example, there are layers 16, 20, and 24 surrounding a core 50. Layer 16 is positioned radially exterior to and contiguous with the core 50. The core 50 may be formed of a higher index of refraction material such as beryllium, lithium hydride, magnesium, or any other suitable elements or compounds having similarly higher refractive indices and high X-ray transmission properties. The core 50 may be less than a micrometer to greater than one centimeter in diameter. Layer 20 is positioned radially exterior to layer 16 and radially interior to layer 24 and contiguous with both layers 16 and 24.
  • In one embodiment, the layers making up the multilayer optic 10 may be formed of materials that have varying indices of refraction. For example, layers 15, 19, 23 and 27 may be formed of materials that have a lower index of refraction and a high photon absorption. For example, for high energy X-rays, appropriate materials may be chosen from osmium, platinum, gold, or any other suitable elements or compounds having similarly lower refractive indices and high X-ray absorption properties. Further, the core 50 and layers 16, 20 and 24 may be formed of materials having a higher index of refraction and a high photon transmission. For example, for high energy X-rays, appropriate materials may be chosen from beryllium, lithium hydride, magnesium, or any other suitable elements or compounds having similarly higher refractive indices and high X-ray transmission properties. The diameter of the core 50 is determined by the critical angle for total internal reflection between the higher index of refraction of the core 50 and the lower index of refraction of the layer 16.
  • By using alternating lower and higher index of refraction materials with concurrent high and low X-ray absorption properties, respectively, in contiguous layers, the multilayer optic 10 can utilize the principle of total internal reflection of electromagnetic radiation. Specifically, diverging electromagnetic radiation beams 36, 38, 40, and 42 containing photons and stemming from an electromagnetic radiation source 34 enter the input face 12 and are redirected into quasi-parallel beams of photons 44 exiting the output face 14.
  • Multilayer optics in accordance with embodiments of the invention, such as optic 10, can collect a large solid angle of an X-ray source 34 and redirect polychromatic energies into quasi-parallel photon beams. “Quasi-parallel” means that diverging beams of photons have been collected and focused into beams of electromagnetic radiation or photons to exit the output face 14 at or below the critical angle θc. This divergence causes the X-ray beam to be larger than the output face 14 of the optic 10. Alternatively, multilayer optics in accordance with embodiments of the invention may be configured to produce slightly focused, highly focused, slightly diverging, or highly diverging beams. By “slightly focused” is meant that the beam size at the point of interest (i.e., where the diameter of the beam is of concern) is approximately the same as at the output face 14 of the optic 10. By “highly focused” is meant that the beam size at the point of interest is smaller than at the output face 14 of the optic 10. By “slightly diverging” is meant that the beam size is larger than a quasi-parallel beam but smaller than the intrinsic source beam. By “highly diverging” is meant that the beam is the same size or larger than the intrinsic source beam.
  • The composition of materials making up the multilayer optic 10, the macroscopic geometry of the multilayer optic 10, the thickness of the multilayer optic 10, and the number of individual layers determine the angular acceptance range of the multilayer optic 10. The angular acceptance range may be from about 0 steradians up to about 2π steradians of a solid angle of a source of the photons. For ease of illustration, only a few layers have been illustrated with reference to multilayer optic 10. However, it should be appreciated that any number of layers, including into the hundreds, thousands, or millions of layers, can be fabricated to utilize total internal reflection to form the various types of photon beams listed previously.
  • Another feature of the multilayer optic 10 is that the core 50 and the layers 16, 20, 24 have photon redirection regions. For example, layer 16 has a photon redirection region 17 stemming from a center of curvature; layer 20 has a photon redirection region 21 stemming from a second center of curvature; and, layer 24 has a photon redirection region 25 stemming from yet another center of curvature. The photon redirection regions 17, 21, 25 are chosen to allow for the diverging electromagnetic radiation beams 36, 38, 40, and 42 to be made parallel or near parallel, or conversely to allow for parallel or converging electromagnetic radiation beams to be made diverging. The minimum photon redirection region is determined by the minimum thickness that would still enable a smooth surface, which is at least two atomic layers, or about ten angstroms. The photon redirection regions 17, 21, 25 each contain redirecting segments. The redirecting segments are chosen such that they each have a constant curvature. The curvature of each redirecting segment may be the same as or different from the curvatures of other redirecting segments. If each of the redirecting segments for a particular photon redirection region is straight, then the radius of curvature is infinite.
  • By curving the multilayers 16, 20, 24 at the input side of the optic 10, the photons or electromagnetic radiation 36, 38, 40, 42 entering the input face 12 can be redirected into parallel pencil beams 44, thereby increasing the photon flux density at the output face 14 over the photon flux density in the direct source beam at the same distance from the source 34. Depending upon the number of layers in the multilayer optic, there may be a photon density gain for 100 keV photons of as much as 5000 times in the electromagnetic radiation output from the multilayer optic over the output of conventional pinhole collimators. It should be appreciated that, alternatively, the output face 14 may be formed closer to the input face 12, i.e., positioned prior to the region where the photons are redirected into parallel rays, allowing the input electromagnetic radiation beams 36, 38, 40, 42 to remain somewhat diverging as they exit the output face 14. It should further be appreciated that core 50 and any number of the layers may have no arc of curvature, instead having a cylindrical cross-sectional profile. Finally, it should be appreciated, and as illustrated in FIG. 5, that additional layers can be formed contiguous with those described and illustrated in FIGS. 3 and 4.
  • An important feature of this optic 10 is that the layers can be made thin enough and the overall optic length (from input face 12 to output face 14) short enough that photons are redirected through bounces along only one side of a particular layer, for example, layer 24. This is unlike known optics, where the photons bounce off both sides of a particular layer. The fewer number of bounces needed to redirect the photons in this multilayer optic 10 significantly increase the photon transmission efficiency of the optic 10.
  • Another feature of the multilayer optic 10 is that through fabrication techniques that will be described in detail below, the individual layers can be formed conformally on one another. The conformation of the layers enables the multilayer optic 10 to be utilized in a vacuum environment. Prior art optics utilize air as the higher refractive index material. Such optics cannot be used in vacuum environments. Further, the multilayer optic 10 can be utilized in applications that operate at energy levels above 60 keV, such as, for example, X-ray diffraction, explosive detection, industrial X-ray, and cargo inspection, to name a few. Some of these applications may operate at energy levels as high as 450 keV.
  • Referring now to FIG. 6, there is shown a multilayer optic 110 including a plurality of layers 113 a-113 n, one on top of the other, extending between an input face 112 and an output face 114 having a polygonal profile. As illustrated, the middle layer of the multilayer optic 110 is layer 113 mid. Except for layer 113 mid, all of the layers include a photon redirection region positioned between the input face 112 and the output face 114. It should be appreciated, however, that layer 113 mid may include a photon redirection region, or that other layers in addition to 113 mid may lack a photon redirection region. The design shown allows diverging electromagnetic radiation to be input into the input face 112, redirected by the optic multilayers, and output from the output face 114 into a parallel fan beam. Depending upon where the output face 114 is located relative to the photon redirection regions, the fan beams may be parallel or near parallel or may be somewhat divergent but still focused relative to the input of electromagnetic radiation. Additionally, the conformal nature of the individual layers allows for the multilayer optic 110 to be utilized in a vacuum environment.
  • Referring to FIG. 7, there is shown a multilayer optic 210 that includes an input face 212 and an output face 214. As with the embodiment shown in FIG. 6, the multilayer optic 210 includes individual layers sandwiching a mid-layer. The design shown allows for a focused parallel fan beam output. As with the previously described embodiments, the conformal nature of the individual layers allows the multilayer optic 210 to be used in a vacuum environment.
  • FIG. 8 illustrates a multilayer optic 310 having an input face 312 and an output face 314. The layers have been positioned over a cone 150, which serves as a blank or mold for the individual layers. Through this design, the output beam exiting the output face 314 is shaped into a curved output, which can be coupled to a singly curved diffracting crystal (not shown) to enable the creation of a fan beam of highly monochromatic radiation. Monochromatic radiation is used in several different applications, including, for example, X-ray diffraction. Highly monochromatic radiation is radiation within a very narrow energy range approximately equal to that produced by diffracting from a single crystal. The singly curved diffracting crystal can be formed of any suitable material, such as, for example, mica, silicon, germanium, or platinum and curved so that the crystal conforms to the surface of, for example, a cone or cylinder. The suitability of any material for use as the diffracting crystal is dependent upon the diffraction intensity and the lattice spacing of the material. It should be appreciated that the multilayer optic 310 should be positioned between the source of the electromagnetic radiation and the diffracting crystal.
  • Placing a filter at the input or the output faces of the optics in FIGS. 5-7 will make the output radiation from these optics quasi-monochromatic. Quasi-monochromatic radiation is radiation within a limited wavelength range that is greater than the highly monochromatic range but less than the full Bremsstrahlung spectrum from an X-ray source.
  • FIGS. 9-12 illustrate various other potential embodiments of multilayer optics. FIGS. 9 and 10 illustrate multilayer optics that have output faces in a photon redirection region, thereby allowing such optics to emit highly diverging beams. FIGS. 11 and 12 illustrate multilayer optics whose output faces are dimensionally smaller than their respective input faces, allowing such optics to emit highly focused beams.
  • Referring now to FIG. 13, next will be described an apparatus for use in forming a multilayer optic. Specifically, a multilayer optic deposition assembly 400 is shown including a deposition chamber 402 and a movable shutter apparatus 410. The deposition chamber 402 may be utilized in suitable deposition techniques, including, for example, vapor deposition, or thermal spray deposition. Suitable vapor deposition techniques include sputtering, ion implantation, ion plating, laser deposition, evaporation, and jet vapor deposition. Evaporation techniques may include thermal, electron-beam, or any other suitable technique resulting in appreciable deposition of material. Suitable thermal spray deposition includes combustion, electric arc, and plasma spray. The deposition chamber 402 includes an inputting apparatus 404 for allowing ingress of deposition materials into the deposition chamber 402. It should be appreciated that the inputting apparatus 404 may include numerous inlet nozzles, each being associated with a specific deposition material. A blank 420 is positioned within the deposition chamber 402. The blank 420 may be a core 50 or a cone 150, described previously with regard to the embodiments illustrated in FIGS. 4 and 8, or it may be a substrate serving as a support mechanism for deposited layers. It should be appreciated that the blank 420 can assume virtually any suitable geometric configuration consistent with the desired beam profile. Examples of the almost infinite number of suitable geometric configurations include a circular wafer, a rectangular prism, a cone, a cylinder, and an egg-shape, to name a few.
  • The shutter apparatus 410 enables the formation of a multilayer optic wherein the individual layers have a photon redirection region. Specifically, as a deposition material is input into the deposition chamber 402 through the inputting apparatus 404, the shutter apparatus 410 moves in a direction A relative to the blank 420. If the speed of the shutter apparatus 410 decreases as it moves in the direction A, an increasing amount of deposition material will contact the blank 420 in the direction A, thereby enabling the formation of a multilayer optic with individual layers having different thicknesses and having photon redirection regions. Control of the movement and velocity of the shutter apparatus 410 may be accomplished electronically with a digital controlling mechanism, such as a microcontroller, microprocessor, or computer. Alternatively, control of the movement may be accomplished manually, or mechanically, such as, pneumatically, hydraulically, or otherwise.
  • By moving the shutter apparatus 410 along direction A as each deposition material is input through the inputting apparatus 404 into the deposition chamber 402, the individual layers can be deposited upon the blank 402, and a multilayer optic having conformal individual layers, like the multilayer optic 110, can be formed. In forming a multilayer optic like the multilayer optic 110, the first layer to be laid down may be the mid-layer 113 mid. Then, the subsequent layers leading to and including layer 113 a can be deposited. Then, the partially formed multilayer optic can be turned over and the layers leading to and including layer 113 n can be deposited. Further, assuming a constant rate of deposition material being injected into the deposition chamber 402, if the shutter apparatus 410 is programmed to begin with a first velocity, transition into a second different velocity, and then transition back to the first velocity, a multilayer optic like the multilayer optic 210 can be formed. It should be appreciated that the deposition rate of the deposition material in the deposition chamber 402 may be altered as well.
  • Instead of utilizing a shuttle apparatus 410, it is possible to move at varying speeds the inputting apparatus 404 relative to the blank 420. Further, it is possible to move at varying speeds the blank 420 within the deposition chamber 402 relative to the inputting apparatus 404.
  • Referring to FIG. 14, there is shown a multilayer optic deposition assembly 500 that includes a deposition chamber 502 and the movable shutter 410. The deposition chamber 502 includes the apparatus 404 that is the source of a vapor stream and a pair of rotatable spindles 505. The spindles 505 are capable of rotating in a direction B. Further, the spindles 505 each include a pointed end that comes into contact with and holds the blank 420. By rotating the spindles 505 in the same direction B the blank 420 can be rotated while deposition material is introduced into the deposition chamber 502 through the inputting apparatus 404. Movement of the shutter apparatus 410 in the direction A and rotation of the blank 420 in the direction B will enable the formation of a multilayer optic such as the multilayer optic 10. Alternatively, the spindles 505 can remain in a non-rotating state during a first set of deposition steps to form the layers 113 mid to 113 a. Then, the spindles 505 can be rotated to turn the partially formed multilayer optic one hundred and eighty degrees around to allow for a second set of deposition steps to form the layers leading to and including 113 n to form the multilayer optic 110.
  • Instead of utilizing a shutter apparatus 410, it is possible to move at varying speeds the inputting apparatus 404 relative to the blank 420 while the blank 420 is being rotated by the spindles 505. Further, it is possible to move at varying speeds the spindles 505 and the blank 420 within the deposition chamber 402 relative to the inputting apparatus 404.
  • FIG. 15 illustrates process steps for forming a multilayer optic in accordance with an embodiment of the invention. At Step 600, a first material having a pre-determined index of refraction with a pre-determined photon transmission coefficient is laid down. The first material is laid down on a blank or substrate, which may be a core, a cone, or a polygonal support mechanism. It should be appreciated that the blank or substrate may be incorporated within the multilayer optic, such as the core 50, or may serve merely as a mold, like cone 150. Then, at Step 605, a second material having a second index of refraction with a second photon transmission coefficient is deposited on the first material in such a way as to be conformal and have minimal void spaces. It should be appreciated that each individual layer may be formed at thicknesses in the range of one nanometer to thousands of nanometers. After Step 605, the Steps 600 and 605 can be sequentially repeated to prepare multiple pairs of layers, with each pair having one layer having a first index of refraction with a first photon transmission coefficient and a second layer having a second index of refraction with a second photon transmission coefficient. The deposition of the first and second materials may be accomplished by any number of suitable processes, such as, for example, vapor deposition, thermal spray deposition, or electroplating. Examples of suitable vapor deposition techniques include sputtering, ion implantation, ion plating, laser deposition (using a laser beam to vaporize a material or materials to be deposited), evaporation, or jet vapor deposition (using sound waves to vaporize a material or materials to be deposited). Evaporation techniques may be thermal, electron-beam or any other suitable technique that will result in appreciable deposition of material. Examples of suitable thermal spray deposition techniques include combustion, electric arc, and plasma spray.
  • It should be appreciated that during the deposition process, the partially formed multilayer optic may be rotated, oscillated, or moved, it may be turned, and it may be subjected to a deposition process whereby the deposition material is deposited at different rates along the axis of the multilayer optic. In this way, multilayer optics can be formed with various configurations and profiles that will allow for a greater amount of electromagnetic radiation to be collected from a source at the input of the optic, parallel or near parallel beams of electromagnetic radiation to be output from the multilayer optic, or the beams of electromagnetic radiation output from the multilayer optic may be shaped into pencil beams, fan beams, or curved in an arc, as an example.
  • Multilayer optics in accordance with embodiments of the invention may be used in various industrial applications. For example, a multilayer optic formed to emit a quasi-parallel beam having a circular cross-section may find utility in X-ray diffraction and backscatter, such as non-destructive examination, applications. A multilayer optic formed to emit a slightly focused beam with a circular cross-section may find utility in X-ray diffraction, X-ray fluorescence, and non-destructive examination applications. Multilayer optics formed to emit a highly focused beam having a circular cross-section may find utility in X-ray fluorescence and non-destructive examination applications. Multilayer optics formed to emit a slightly diverging beam having a circular cross-section may find utility in computed tomography and X-ray diagnostic system applications. Multilayer optics formed to emit a highly diverging beam having a circular cross-section may find utility in non-destructive examination applications requiring an increased field-of-view, and in medical interventional imaging and treatments requiring an increased field-of-view, such as the imaging and treatment of large tumors.
  • Alternatively, multilayer optics formed to emit a quasi-parallel fan beam in one plane that is quasi-parallel, slightly focused, highly focused, slightly diverging, or highly diverging in a direction parallel to the fan would produce a beam having a rectangular cross-section that may find utility in non-destructive examination applications.
  • Multilayer optics formed to emit a fan beam in one plane that is quasi-parallel, slightly focusing, highly focusing, slightly diverging, or highly diverging in a direction transverse to the plane may find utility in computed tomography, X-ray diagnostic system, and non-destructive examination applications. The fan beam may have a divergence the same as or greater than that of the source.
  • Multilayer optics formed to emit a fan beam in one plane that is slightly or highly diverging in the direction transverse to the fan beam plane may find utility in medical interventional applications, such as close-up imaging to increase field-of-view. The divergence in the direction transverse to the fan beam plane is equal to or greater than the source divergence.
  • A multilayer optic coupled to a diffracting crystal may produce a quasi-parallel monochromatic fan beam that may find utility, provided the intensity is great enough, in medical imaging and interventional treatments. Such monochromatic imaging would reduce a patient's dose of X-rays while increasing the resolution.
  • While the invention has been described in detail in connection with only a limited number of embodiments, it should be readily understood that the invention is not limited to such disclosed embodiments. Rather, the invention can be modified to incorporate any number of variations, alterations, substitutions or equivalent arrangements not heretofore described, but which are commensurate with the spirit and scope of the invention. Additionally, while various embodiments of the invention have been described, it is to be understood that aspects of the invention may include only some of the described embodiments. Accordingly, the invention is not to be seen as limited by the foregoing description, but is only limited by the scope of the appended claims.

Claims (20)

1-50. (canceled)
51. An optic device for transmitting photons through total internal reflection, comprising:
a core having an arcuate portion; and
at least two conformal solid phase layers, wherein interfaces between the solid phase layers are gapless, the at least two conformal solid phase layers including:
at least one photon redirection region being formed to redirect the photons into a quasi-parallel beam, a slightly focused beam, a highly focused beam, a slightly diverging beam, a highly diverging beam, or a beam with a curved transverse profile;
wherein the at least one photon redirection region is curved around the arcuate portion of the core.
52. The optic device of claim 51, wherein the at least two solid phase layers comprise alternating indices of refraction.
53. The optic device of claim 51, wherein the at least two solid phase layers are comprised of two or more materials.
54. The optic device of claim 51, comprising an input face for receiving the photons and an output face through which the photons exit the optic device.
55. The optic device of claim 54, configured to transmit photons with energies above 1 keV.
56. The optic device of claim 54, wherein said input face is adapted for an angular acceptance range of about 0 steradians up to about 2π steradians of a solid angle of a source of the photons.
57. The optic device of claim 51, wherein an interface between the core and one of the at least two conformal solid phase layers is gapless.
58. An optic device for redirecting, through total internal reflection, photons having an energy above one keV, comprising:
a core having an arcuate portion;
a first solid phase layer having a first index of refraction; and
a second solid phase layer having a second index of refraction;
wherein the first and second solid phase layers are curved around the arcuate portion of the core.
59. A method for forming an optic device, comprising:
forming a first set of one or more solid phase layers each in a single plane, with the one or more layers characterized by one or more indices of refraction;
curving the first set of one or more solid phases layer around an arcuate portion of a core;
wherein between the core and the solid phase layers is at least one photon redirection region.
60. The method of claim 59, comprising forming a second set of one or more solid phase layers on the first set of one or more solid phase layers, wherein the first and second sets of one or more solid phase layers are each characterized by one or more indices of refraction.
61. The method of claim 59, wherein the forming comprises vapor depositing, thermal spray depositing, or electroplating.
62. The method of claim 61, further comprising altering a forming rate of the forming.
63. The method of claim 62, wherein the altering comprises moving a source of deposition material or the core relative to each other.
64. The method of claim 62, wherein the altering comprises:
providing a shutter; and
moving the shutter along an axis of the core at a changing velocity.
65. The method of claim 64, comprising rotating or oscillating the core during the forming steps.
66. The method of claim 59, wherein the core serves as a mold and is removable from a formed optic device.
67. The method of claim 66, wherein the mold comprises a cone-shaped core and wherein the curving step comprises curving the first solid phase layer at least partially around the core.
68. The method of claim 59, comprising abutting a diffracting crystal against either an input face or an output face of a formed optic device.
69. The method of claim 59, wherein the curving a first solid phase layer comprises forming the first solid phase layer in a single plane and then curving the first solid phase layer around the arcuate portion of a core.
US12/212,115 2007-01-02 2008-09-17 Multilayer optic device and system and method for making same Abandoned US20090010605A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/212,115 US20090010605A1 (en) 2007-01-02 2008-09-17 Multilayer optic device and system and method for making same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/619,009 US7412131B2 (en) 2007-01-02 2007-01-02 Multilayer optic device and system and method for making same
US11/869,337 US20080159707A1 (en) 2007-01-02 2007-10-09 Multilayer optic device and system and method for making same
US12/212,115 US20090010605A1 (en) 2007-01-02 2008-09-17 Multilayer optic device and system and method for making same

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US11/869,337 Continuation US20080159707A1 (en) 2007-01-02 2007-10-09 Multilayer optic device and system and method for making same

Publications (1)

Publication Number Publication Date
US20090010605A1 true US20090010605A1 (en) 2009-01-08

Family

ID=39584015

Family Applications (3)

Application Number Title Priority Date Filing Date
US11/619,009 Active US7412131B2 (en) 2007-01-02 2007-01-02 Multilayer optic device and system and method for making same
US11/869,337 Abandoned US20080159707A1 (en) 2007-01-02 2007-10-09 Multilayer optic device and system and method for making same
US12/212,115 Abandoned US20090010605A1 (en) 2007-01-02 2008-09-17 Multilayer optic device and system and method for making same

Family Applications Before (2)

Application Number Title Priority Date Filing Date
US11/619,009 Active US7412131B2 (en) 2007-01-02 2007-01-02 Multilayer optic device and system and method for making same
US11/869,337 Abandoned US20080159707A1 (en) 2007-01-02 2007-10-09 Multilayer optic device and system and method for making same

Country Status (1)

Country Link
US (3) US7412131B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8693631B2 (en) 2011-08-29 2014-04-08 General Electric Company Craser device, imaging system and method

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9098577B1 (en) 2006-03-31 2015-08-04 Qurio Holdings, Inc. System and method for creating collaborative content tracks for media content
JP4933932B2 (en) 2007-03-23 2012-05-16 ソニー株式会社 Information processing system, information processing apparatus, information processing method, and program
US20090041198A1 (en) * 2007-08-07 2009-02-12 General Electric Company Highly collimated and temporally variable x-ray beams
US7742566B2 (en) * 2007-12-07 2010-06-22 General Electric Company Multi-energy imaging system and method using optic devices
US8762476B1 (en) 2007-12-20 2014-06-24 Qurio Holdings, Inc. RDMA to streaming protocol driver
US8060904B1 (en) 2008-02-25 2011-11-15 Qurio Holdings, Inc. Dynamic load based ad insertion
US8369674B2 (en) * 2009-05-20 2013-02-05 General Electric Company Optimizing total internal reflection multilayer optics through material selection
US8263387B2 (en) * 2009-06-10 2012-09-11 Cynvenio Biosystems, Inc. Sheath flow devices and methods
US8208602B2 (en) 2010-02-22 2012-06-26 General Electric Company High flux photon beams using optic devices
US8311184B2 (en) 2010-08-30 2012-11-13 General Electric Company Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices
US8744048B2 (en) 2010-12-28 2014-06-03 General Electric Company Integrated X-ray source having a multilayer total internal reflection optic device
US8671111B2 (en) * 2011-05-31 2014-03-11 International Business Machines Corporation Determination of rules by providing data records in columnar data structures
US8761346B2 (en) 2011-07-29 2014-06-24 General Electric Company Multilayer total internal reflection optic devices and methods of making and using the same
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US9570265B1 (en) 2013-12-05 2017-02-14 Sigray, Inc. X-ray fluorescence system with high flux and high flux density
US10297359B2 (en) 2013-09-19 2019-05-21 Sigray, Inc. X-ray illumination system with multiple target microstructures
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10269528B2 (en) 2013-09-19 2019-04-23 Sigray, Inc. Diverging X-ray sources using linear accumulation
US9449781B2 (en) 2013-12-05 2016-09-20 Sigray, Inc. X-ray illuminators with high flux and high flux density
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
US9448190B2 (en) 2014-06-06 2016-09-20 Sigray, Inc. High brightness X-ray absorption spectroscopy system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10304580B2 (en) 2013-10-31 2019-05-28 Sigray, Inc. Talbot X-ray microscope
JP6025211B2 (en) * 2013-11-28 2016-11-16 株式会社リガク X-ray topography equipment
US9823203B2 (en) 2014-02-28 2017-11-21 Sigray, Inc. X-ray surface analysis and measurement apparatus
US9594036B2 (en) 2014-02-28 2017-03-14 Sigray, Inc. X-ray surface analysis and measurement apparatus
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
JP6397690B2 (en) * 2014-08-11 2018-09-26 株式会社日立ハイテクノロジーズ X-ray transmission inspection apparatus and foreign object detection method
US10352880B2 (en) 2015-04-29 2019-07-16 Sigray, Inc. Method and apparatus for x-ray microscopy
US10295486B2 (en) 2015-08-18 2019-05-21 Sigray, Inc. Detector for X-rays with high spatial and high spectral resolution
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
US10845491B2 (en) 2018-06-04 2020-11-24 Sigray, Inc. Energy-resolving x-ray detection system
CN112470245A (en) 2018-07-26 2021-03-09 斯格瑞公司 High brightness X-ray reflection source
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
DE112019004433T5 (en) 2018-09-04 2021-05-20 Sigray, Inc. SYSTEM AND PROCEDURE FOR X-RAY FLUORESCENCE WITH FILTERING
CN112823280A (en) 2018-09-07 2021-05-18 斯格瑞公司 System and method for depth-selectable X-ray analysis
US11217357B2 (en) 2020-02-10 2022-01-04 Sigray, Inc. X-ray mirror optics with multiple hyperboloidal/hyperbolic surface profiles

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2641409A (en) * 1948-07-16 1953-06-09 Robert H Dicke Method and apparatus for counting selected electrical transients
US3901581A (en) * 1973-07-05 1975-08-26 Corning Glass Works Tapered coupler for optical communication system
US4204850A (en) * 1977-08-26 1980-05-27 Corning Glass Works Carbon coating for a starting member used in producing optical waveguide
US4298365A (en) * 1980-07-03 1981-11-03 Corning Glass Works Method of making a soot preform compositional profile
US4436368A (en) * 1977-06-06 1984-03-13 Corning Glass Works Multiple core optical waveguide for secure transmission
US5192869A (en) * 1990-10-31 1993-03-09 X-Ray Optical Systems, Inc. Device for controlling beams of particles, X-ray and gamma quanta
US5604353A (en) * 1995-06-12 1997-02-18 X-Ray Optical Systems, Inc. Multiple-channel, total-reflection optic with controllable divergence
US5729643A (en) * 1996-04-05 1998-03-17 Coherent, Inc. Tapered composite optical fiber and method of making the same
US5838868A (en) * 1995-06-30 1998-11-17 Syracuse University Semiconductor fiber light amplifier
US6934359B2 (en) * 2001-06-19 2005-08-23 X-Ray Optical Systems, Inc. Wavelength dispersive XRF system using focusing optic for excitation and a focusing monochromator for collection

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5086443A (en) * 1990-08-03 1992-02-04 The United States Of America As Represented By The United States Department Of Energy Background-reducing x-ray multilayer mirror
US7549424B2 (en) * 1991-10-18 2009-06-23 Pro Surg, Inc. Method and apparatus for tissue treatment with laser and electromagnetic radiation
US6571044B2 (en) * 2001-05-18 2003-05-27 Scram Technologies, Inc. High contrast display panel and a method of making a high contrast display panel
US7092843B2 (en) * 2003-10-21 2006-08-15 X-Ray Optical Systems, Inc. Apparatus and method for suppressing insignificant variations in measured sample composition data, including data measured from dynamically changing samples using x-ray analysis techniques
US7006741B1 (en) * 2005-03-22 2006-02-28 Bi Yu Contact-field optical microscope

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2641409A (en) * 1948-07-16 1953-06-09 Robert H Dicke Method and apparatus for counting selected electrical transients
US3901581A (en) * 1973-07-05 1975-08-26 Corning Glass Works Tapered coupler for optical communication system
US4436368A (en) * 1977-06-06 1984-03-13 Corning Glass Works Multiple core optical waveguide for secure transmission
US4204850A (en) * 1977-08-26 1980-05-27 Corning Glass Works Carbon coating for a starting member used in producing optical waveguide
US4298365A (en) * 1980-07-03 1981-11-03 Corning Glass Works Method of making a soot preform compositional profile
US5192869A (en) * 1990-10-31 1993-03-09 X-Ray Optical Systems, Inc. Device for controlling beams of particles, X-ray and gamma quanta
US5604353A (en) * 1995-06-12 1997-02-18 X-Ray Optical Systems, Inc. Multiple-channel, total-reflection optic with controllable divergence
US5838868A (en) * 1995-06-30 1998-11-17 Syracuse University Semiconductor fiber light amplifier
US5729643A (en) * 1996-04-05 1998-03-17 Coherent, Inc. Tapered composite optical fiber and method of making the same
US6934359B2 (en) * 2001-06-19 2005-08-23 X-Ray Optical Systems, Inc. Wavelength dispersive XRF system using focusing optic for excitation and a focusing monochromator for collection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8693631B2 (en) 2011-08-29 2014-04-08 General Electric Company Craser device, imaging system and method

Also Published As

Publication number Publication date
US7412131B2 (en) 2008-08-12
US20080159484A1 (en) 2008-07-03
US20080159707A1 (en) 2008-07-03

Similar Documents

Publication Publication Date Title
US7412131B2 (en) Multilayer optic device and system and method for making same
EP2229682B1 (en) A multi-energy imaging system and method using optic devices
US7366374B1 (en) Multilayer optic device and an imaging system and method using same
US7508911B1 (en) X-ray imaging system and methods of using and forming an array of optic devices therein
US8735844B1 (en) Compact neutron imaging system using axisymmetric mirrors
US8369674B2 (en) Optimizing total internal reflection multilayer optics through material selection
US8422633B2 (en) X-ray beam device
US20050117239A1 (en) Optical unit and associated method
US8311184B2 (en) Fan-shaped X-ray beam imaging systems employing graded multilayer optic devices
TW445488B (en) X-ray diagnostic system
JP7195341B2 (en) Wavelength dispersive X-ray spectrometer
Mildner et al. Wolter optics for neutron focusing
Franks X-ray optics
JP2000502188A (en) Steerable X-ray optical system
WO2001075488A1 (en) Optical assembly for increasing the intensity of a formed x-ray beam
US8309944B1 (en) Grazing incidence neutron optics
Aquilanti et al. Instrumentation at synchrotron radiation beamlines
EP1035422B1 (en) Neutron beam controlling apparatus, and neutron energy measuring apparatus
US8761346B2 (en) Multilayer total internal reflection optic devices and methods of making and using the same
JP2004117343A (en) Parallel x-ray beam extracting method and apparatus, and x-ray diffraction system
JP4668899B2 (en) Refraction type X-ray element
Vis et al. On the development of X-ray microprobes using synchrotron radiation
Morawe Graded multilayers for synchrotron optics
Zeraouli et al. Development of an adjustable Kirkpatrick-Baez microscope for laser driven x-ray sources
Cotroneo et al. Carbon overcoatings for soft x-ray reflectivity enhancement

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION