US20090029063A1 - Resin Film Forming Device, Method and Program of the Same - Google Patents
Resin Film Forming Device, Method and Program of the Same Download PDFInfo
- Publication number
- US20090029063A1 US20090029063A1 US12/223,663 US22366307A US2009029063A1 US 20090029063 A1 US20090029063 A1 US 20090029063A1 US 22366307 A US22366307 A US 22366307A US 2009029063 A1 US2009029063 A1 US 2009029063A1
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- disc
- resin
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- light irradiation
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Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/266—Sputtering or spin-coating layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/06—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
- G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
- G11B7/265—Apparatus for the mass production of optical record carriers, e.g. complete production stations, transport systems
Definitions
- the present invention relates to a resin film forming device for forming a resin film on a disc, a method of forming a resin film, and a program for controlling the resin film forming device. More particularly, the present invention relates to a resin film forming device, a method of forming a resin film and a program in which resin can be re-used.
- Optical discs have been developed from compact discs (CDs) into digital versatile discs (DVDs) and into next generation DVDs.
- the recording density has increased accordingly.
- fine pits and lands are formed in a spiral groove on a surface of, for example, a polycarbonate substrate.
- recorded information is read out. If information is recorded on a single substrate as in a CD, a recording surface is protected with a resin coating.
- a DVD is fabricated by bonding two or more substrates together, each having a recording surface, using adhesive resin so as to increase recording density.
- Application of coating resin or adhesive resin on a substrate surface generally includes applying the resin circularly near a center hole of the substrate, and making the substrate spin at high speed to spread the resin out into uniform thickness. The spread resin is then irradiated with light sequentially from a center side toward an outer circumference so as to cure the resin (see pages 11 to 13 and FIG. 1 of Patent Document 1).
- Patent Document 1 Japanese Unexamined Patent Application, First Publication No.
- an object of the invention is to provide a resin film forming device, a method of forming a resin film, and a program readable by a control device for controlling the resin film forming device. In the device, method and program, resin can be re-used.
- a resin film forming device includes: as shown in FIGS. 1 and 3 for example, a spinner 16 ( 16 A, 16 B) on which a circular disc 1 having a hole 2 at the center thereof is mounted, the spinner 16 ( 16 A, 16 B) making the disc 1 spin about the hole 2 ; a resin supply unit 13 which applies resin 3 around the hole 2 of the disc 1 ; and a light irradiation unit 17 ( 17 A, 17 B) which irradiates the resin 3 on the disc 1 mounted on the spinner 16 with light to cure the resin 3 , the light irradiation unit 17 ( 17 A, 17 B) shifting a light irradiation position from an inner circumference side toward an outer circumference side of the disc 1 mounted on the spinner 16 , and stopping the light irradiation before the light irradiation unit 17 ( 17 A, 17 B) reaches the outer circumference of the disc 1 .
- curing resin used herein includes complete curing of the resin.
- the concept may also include curing resin to an extent that the resin is not completely cured and is gelled and no more spread out toward the outer circumference by centrifugal force caused by further spinning of the disc (hereinafter, referred to as “semi-curing”).
- the light irradiation unit 17 may be configured to continuously shift a light irradiation position from the inner circumference side toward the outer circumference side of the disc 1 mounted on the spinner 16 .
- the spinner 16 makes the disc 1 spin at first spin speed V 3 to spread the resin 3 applied around the hole 2 , and then makes the disc 1 spin at second spin speed slower than the first spin speed V 3 ; and the light irradiation unit 17 may begin irradiating the disc 1 with light while the spinner 16 spins the disc 1 at the second spin speed.
- the resin is spread quickly and uniformly on the disc while the disc is spinning at the first spin speed. After that, the spin speed is change from the first spin speed to the second spin speed which is slower than the first spin speed. Thus, the speed at which the resin moves toward the outer circumference of the disc decreases. Since the resin is irradiated with light in this state, the resin irradiated with light can be prevented from moving toward the outer circumference of the disc.
- a resin film forming device may further include, as shown in FIG. 2 for example, in the above-described resin film forming device, a disc alignment unit 14 which places, on the disc 1 having thereon the resin 3 applied by the resin supply unit, another disc 1 ′ from a side at which the resin 3 is given.
- two or more substrates having recording surfaces to increase recording density can be fabricated for, for example, a DVD.
- the adhesive resin for bonding the two or more substrates together having recording surfaces can be re-used.
- a resin film forming device may further include, as shown in FIG. 3 for example, in the above-described resin film forming device, a resin suction units 41 to 43 for sucking the resin 3 escaping from the disc 1 mounted on the spinner 16 .
- escaping means that the resin is released from the disc, and the term also includes scattering of the resin due to spin of the disc and dropping of the resin from the circumference of the disc.
- a resin film forming device may further include, as shown in FIG. 1 for example, in the above-described resin film forming device 100 , a curing unit 21 which re-irradiates the resin 3 with light, the resin 3 having been spread and irradiated with light by the light irradiation unit 17 .
- the light irradiation position is shifted from the inner circumference side toward the outer circumference side of the disc and irradiation of light is stopped before the irradiation unit reaches the outer circumference.
- the resin which has not been completely cured and the resin which is located at the outermost circumference of the disc and has not cured are cured by the moving irradiation light.
- the cured resin is used as adhesive resin, or cured resin as a protection film.
- a method of forming a resin film according to a seventh aspect of the invention includes: as shown in FIG. 10 for example, a resin supply process S 10 in which resin is applied on a circular disc, around a hole formed at the center of the disc; a first spinning process S 30 in which the disc with the resin applied thereon in the resin supply process S 10 is spun at first spin speed; after the first spinning process S 30 , a reduction process S 40 in which the spin speed is reduced; during or after the reduction process S 40 , a light irradiation processes S 50 and S 60 in which the resin is cured while an irradiation position at which the resin is cured by light is shifted from the center toward an outer circumference side of the disc; and a light irradiation stopping process S 70 in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light.
- the circular disc with the resin applied thereon is spun at the first spin speed to spread the resin quickly and uniformly on the circular disc. Then the spin speed is reduced, and the resin is irradiated with light for curing while the irradiation position of the light is shifted from the center toward the outer circumference side of the disc. Then, irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- a method of forming a resin film according to an eighth aspect of the invention may further include, as shown in FIG. 10 for example, in the above-described method of forming a resin film, a resin collection process S 80 in which the resin applied to the disc and escapes from the disc is collected.
- a ninth aspect of the invention may further include a second light irradiation process S 100 after the light irradiation stopping process S 70 in the above-described method of forming a resin film.
- the resin is irradiated with light for curing the resin in the second light irradiation process S 100 .
- the light irradiation position is shifted from the inner circumference side toward the outer circumference side of the disc, and irradiation of light is stopped before the irradiation unit irradiates the outer circumference of the disc.
- the resin which has not been completely cured and the resin which is located at the outermost circumference of the disc and has not cured can be cured by the moving irradiation light.
- the cured resin is used as adhesive resin, or cured resin as a protection film.
- a program according to a tenth aspect of the invention is a program for controlling the resin film forming device 100 which forms a resin film on a circular disc having a center hole as shown in FIGS. 1 and 10 for example.
- the program executes the following steps: a resin application step S 10 in which the resin is applied around a hole of a disc; a spinning step S 30 in which the spinner 16 on which the disc with resin applied thereon is mounted is spun at first spin speed; after the spinning step S 30 , a reduction step S 40 in which the spin speed of the spinner 16 is reduced; after the reduction step S 40 , a light irradiation steps S 50 and S 60 in which the disc is irradiated with light from the inner circumference side toward the outer circumference side of the disc; and a light irradiation stopping step S 70 in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light.
- the resin film forming device includes: a spinner on which a circular disc having a center hole is mounted, the spinner spinning the disc about the hole; a resin supply unit which applies resin onto the disc around the hole; a light irradiation unit which irradiates the resin on the disc mounted on the spinner with light for curing the resin, the light irradiation unit shifting a light irradiation position from an inner circumference side toward an outer circumference of the disc mounted on the spinner, and stopping irradiation of light before the irradiation point reaches the outer circumference of the disc.
- the resin escaping from the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light.
- the resin can be re-used.
- the method of forming a resin film includes: a resin supply process in which resin is applied on a circular disc, around a hole formed at the center of the disc; a first spinning process in which the disc with the resin applied thereon in the resin supply process is spun at first spin speed; after the first spinning process, a reduction process in which the spin speed is reduced; during or after the reduction process, a light irradiation process in which the resin is cured while an irradiation position at which the resin is cured by light is shifted from the center toward an outer circumference side of the disc; and a light irradiation stopping process in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light.
- the circular disc with the resin applied thereon is spun at the first spin speed to spread the resin quickly and uniformly on the circular disc. Then the spin speed is reduced, and the resin is irradiated with light for curing while the irradiation position of the light is shifted from the center toward the outer circumference side of the disc. Then, irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- the program readable by a control device for controlling the resin film forming device which forms a resin film on a circular disc having a center hole executes the following steps: a resin application step in which the resin is applied around a hole of a disc; a spinning step in which the spinner on which the disc with resin applied thereon is mounted is spun at first spin speed; after the spinning step, a reduction step in which the spin speed of the spinner is reduced; after the reduction step, a light irradiation step in which the disc is irradiated with light from the inner circumference side toward the outer circumference side of the disc; and a light irradiation stopping step in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light.
- the invention may alternatively include the following structures.
- the invention is a resin film forming device in which the light irradiation unit includes: a light irradiation portion; an arm which supports the light irradiation portion; and a pivot driver which supports the arm, makes the aim pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc.
- an effect is advantageously provided that the pivotal movement facilitates continuous movement, in its precise sense, of the light irradiation unit.
- an effect is also advantageously provided that the shifting speed of the light irradiation position can be adjusted by the speed of the pivotal movement.
- the invention is the above-described resin film forming device, in which the light irradiation unit includes: a light irradiation portion; an arm which supports the light irradiation portion; a pivot driver which supports the arm, makes the arm pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc; and a vertical driver connected to the pivot driver, for moving the arm upward to move the light irradiation portion upward when the light irradiation portion reaches the outer circumference of the disc.
- the invention is a method of forming a resin film, which includes: a process of mounting a circular disc having a center hole on a spinner, and making the disc spun about the hole; a process of applying resin onto the disc around the hole; a process of irradiating the disc with light while an irradiation position is shifted from an inner circumference side toward an outer circumference side of the disc mounted on the spinner; and a process of stopping irradiation of light before the light irradiation reaches the outer circumference of the disc.
- the resin escaping from the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light.
- the resin can be re-used.
- FIG. 1 is a plan view illustrating a structure of a resin film forming device according to the invention.
- FIG. 2A is a side view illustrating an overall structure and motion of a disc alignment unit.
- FIG. 2B is a partially enlarged cross-sectional view illustrating a state in which the disc alignment unit sucks and holds a disc substrate.
- FIG. 3 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking the resin caught on the coater house, and a control unit.
- FIG. 4 is a perspective view illustrating travelling of an irradiating section of the light irradiation unit.
- FIG. 5 is a time series graph showing a relationship between a spin speed of the disc spinning on the spinner and an ultraviolet irradiation position of the light irradiation unit.
- FIG. 6 is a schematic view showing a relationship between a spreading speed of the resin due to spin of the disc and a speed at which the ultraviolet irradiation position is moved.
- FIG. 7 is a time series graph showing a relationship between a spin speed of the disc spinning on the spinner and an ultraviolet irradiation position of the light irradiation unit.
- FIG. 8 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking the resin 3 caught on the coater house, and a control unit.
- FIG. 9 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking the resin caught on the coater house, and a control unit.
- FIG. 10 is a flow chart illustrating a main part of the method of forming a resin film according to the invention.
- FIG. 11A is a graph showing distribution at radius positions of the resin film on the disc formed in accordance with a conventional method.
- FIG. 11B is a graph showing distribution at radius positions of the resin film on the disc formed in accordance with the invention.
- FIG. 12 is a graph illustrating comparison among absorbance characteristics of resin in an ultraviolet region in which: curve A represents absorbance of an unused resin; curve B represents absorbance of resin escaping from a disc and collected in a process of resin film formation according to the invention; and curve C represents absorbance of resin irradiated with ultraviolet light to an extent that the resin is not cured.
- FIG. 1 is a plan view illustrating a structure of the resin film forming device 100 according to the invention.
- the resin film forming device 100 includes a disc mounting arm 10 , a turn table 11 , an inversion unit 12 , a resin supply unit 13 , a disc alignment unit 14 , a transfer unit 15 , spinners 16 A and 16 B, and light irradiation units 17 A and 17 B.
- the disc mounting arm 10 mounts the disc substrate 1 (see FIG. 3 ) on a receiving part 11 a of the turn table 11 .
- the turn table 11 sends the disc substrate 1 mounted on the receiving part 11 a to processing.
- the inversion unit 12 inverts the disc substrate 1 placed on the receiving part 11 a .
- the resin supply unit 13 applies resin to the disc substrate 1 around the hole 2 (see FIG. 3 ).
- the disc alignment unit 14 places a disc substrate 1 ′ (see FIG. 3 ) on the disc substrate 1 onto which the resin 3 has been applied.
- the transfer unit 15 transfers a disc 4 (see FIG. 3 ) consisting of the disc substrates 1 and 1 ′ bonded together with the resin 3 from the turn table 11 to the spinners 16 A and 16 B, and from the spinners 16 A and 16 B to a receiver 18 .
- the spinners 16 A and 16 B cause the disc 4 to spin about the hole 2 .
- the light irradiation units 17 A and 17 B irradiate the disc 4 on the spinners 16 A and 16 B with light.
- the spinners 16 A and 16 B and the light irradiation units 17 A and 17 B are provided in two series. This is because it takes time to make the disc 4 spin on the spinners 16 A and 16 B and to irradiate light by the light irradiation units 17 A and 17 B.
- the spinners 16 A and 16 B and the light irradiation units 17 A and 17 B may alternatively be provided in one series, or in more than three series. In a one series structure, the resin film forming device 100 is made simple, compact and lightweight.
- spinners 16 A and 16 B and the light irradiation units 17 A and 17 B When spinning of the disc 4 and irradiation of light take time, working efficiency of the overall resin film forming device 100 can be improved by providing three or more series of the spinners 16 A and 16 B and the light irradiation units 17 A and 17 B.
- spinners 16 A and 16 B and light irradiation units 17 A and 17 B when they need not to be distinguished, they will be described as the spinner 16 and the light irradiation unit 17 .
- the resin film forming device 100 also includes a receiver 18 , a transfer unit 19 , a turn table 20 , a curing unit 21 , a turn table 22 , an inversion unit 23 , an electric discharge unit 24 , a transfer unit 25 , an inspection unit 26 , a lifting stage 27 , a transfer unit 28 , a non-defective article table 29 and a defective article table 30 .
- the disc 4 irradiated with light is temporarily placed on the receiver 18 .
- the transfer unit 19 transfers the disc 4 from the receiver 18 to the turn table 20 and from the turn table 20 to the turn table 22 .
- the turn table 20 transfers the disc 4 to the curing unit 21 .
- the curing unit 21 re-irradiates the disc 4 on the turn table 20 with light, thereby completely curing the entire resin 3 .
- the turn table 22 moves the disc 4 to the inversion unit 23 and to the electric discharge unit 24 .
- the electric discharge unit 24 discharges the disc 4 and the inversion unit 23 which inverts the disc 4 .
- the transfer unit 25 transfers the disc 4 from the turn table 22 to the inspection unit 26 and from the inspection unit 26 to the lifting stage 27 .
- the inspection unit 26 inspects the disc 4 .
- the lifting stage 27 lifts the disc 4 to the height of the transfer unit 28 .
- the transfer unit 28 transfers the disc 4 from the lifting stage 27 to the non-defective article table 29 and to the defective article table 30 .
- Discs 4 defined as non-defective articles in the inspection are placed on the non-defective article table 29 .
- Discs 4 defined as defective articles in the inspection are placed on the defective article table 30 .
- the disc substrates 1 and 1 ′ are typically polycarbonate resin-made discs, but not limited thereto. Other materials that transmit laser beam may be used suitably.
- the disc substrate 1 is a circular thin board, which has a circular hole 2 in the center thereof.
- the disc is typically circular-shaped, but not limited thereto.
- the disc substrate 1 is 120 mm in diameter and 0.6 mm in thickness.
- the center hole is 15 mm in diameter.
- Fine grooves constituting spiral grooves or signals are formed on one side of the disc substrate 1 .
- the disc substrate 1 and the disc substrate 1 have different grooves. These disc substrates are temporary placed near the turn table 11 .
- the disc substrate 1 and the disc substrate 1 ′ are alternately placed on the receiving part 11 a of the turn table 11 by the disc mounting arm 10 with the groove-formed surfaces facing upward.
- the disc mounting arm 10 places the disc substrates 1 and 1 ′ on the receiving parts 11 a by holding them at the hole from the inside or at the outer circumference from the outside so that the arm 10 does not contact the groove-formed surfaces.
- the turn table 11 has twelve receiving parts 11 a .
- the number of the receivers is not limited to twelve, but twelve is preferred in that the receivers come to the same position by turns as the turn table 11 intermittently rotates by 30 degrees.
- a central portion of the receiving part 11 a is empty space, of which circular periphery is recessed to receive the disc substrate 1 .
- the circular recess of the receiving part 11 a opens to outside at the outer circumference of the turn table 11 . With this structure in which the receiving part 11 a opens to outside, a later-described arm of the inversion unit 12 can be inserted from the underside of the disc substrate 1 placed in the receiving part 11 a.
- the inversion unit 12 inverts the disc substrate 1 ′ placed in the receiving part 11 a .
- the inversion unit 12 inverts the disc substrate 1 ′ placed in every second receiving part 11 a of the turn table 11 .
- a distal end of the arm holds the disc substrate 1 ′ and lifts the same from the receiving part 11 a .
- the arm rotates by 180 degrees about the axis to invert the disc substrate 1 ′ and place it again in the receiving part 11 a .
- the inversion unit 12 may be provided separately from the turn table 11 such that the inversion unit 12 inverts the disc substrate 1 ′ before the disc substrate 1 ′ is placed in the turn table 11 .
- the resin supply unit 13 applies resin circularly on the disc substrate 1 around the hole 2 .
- ultraviolet curing resin is used as a liquid adhesive.
- the resin supply unit 13 applies the resin circularly by moving a nozzle 13 a over a peripheral circumference of the hole 2 to supply resin.
- the nozzle 13 a may alternatively be fixed and the disc substrate 1 may rotate slowly.
- the resin is applied to the non-inverted disc substrate 1 by the disc inversion unit 12 . That is, the resin is applied to the groove-formed surface of the disc substrate 1 .
- the resin supply unit 13 may be provided separately form the turn table 11 so that the resin supply unit 13 applies the resin to the disc substrate 1 before the disc substrate 1 is placed in the turn table 11 .
- FIG. 2 the disc alignment unit 14 sucks and holds the disc substrate 1 ′ that has been inverted by the disc inversion unit 12 , and places the disc substrate 1 ′ to align with the disc substrate 1 in the next receiving part 11 a .
- FIG. 2A is a side view illustrating an overall structure and motion of the disc alignment unit 14 .
- FIG. 2B is a partially enlarged cross-sectional view illustrating a state in which the disc alignment unit 14 sucks and holds a disc substrate 1 ′.
- the disc alignment unit 14 includes two suction units 142 which suck the disc substrate 1 ′, an arm 141 from which the suction units 142 are suspended, and a column 140 which hangs the arm at its center (i.e., the midpoint of two suction units 142 ) and rotate the army 180 degrees.
- the column 140 hangs the arm 141 at the center thereof via an unillustrated fixing table over the turn table 11 between the two predetermined receiving parts 11 a .
- Each suction unit 142 is located directly above the corresponding receiving part 11 a .
- the suction unit 142 sucks and holds the disc substrate 1 ′ placed in one receiving part 11 a , moves the disc substrate 1 ′ to the next receiving part 11 a while rotating the arm 141 by 180 degrees, and then places the disc substrate 1 ′ to align with the disc substrate 1 .
- the arm 141 may be rotated by 180 degrees by any known method.
- the suction unit 142 includes a suction surface 143 for sucking the disc substrate 1 ′.
- the suction surface 143 includes a vacuum section 144 .
- the vacuum section 144 is connected with a vacuum tube 146 .
- An unillustrated vacuum device sucks the air to suck the disc substrate 1 ′ to the suction surface 143 .
- the suction surface 143 may be formed from a relatively soft material, such as hard rubber, not to damage the disc substrate 1 ′ while facilitating vacuum suction.
- the suction unit 142 includes a suspending portion 145 to suspend from the arm 141 .
- the suspending portion 145 may be a member to simply suspend from the arm 141 so long as it includes a lifting stage for moving the disc substrate 1 ′ and the disc substrate 1 ′ upward to a required height at the time of sucking the disc substrate 1 ′ and placing it aligned with the disc substrate 1 . However, if the turn table 11 includes no lifting table, the suspending portion 145 has a structure to extend and contract by a solenoid or other mechanism to vertically move the suction surface 143 .
- the disc substrate 1 ′ In order to align the two disc substrates 1 and 1 ′ with each other, the disc substrate 1 ′, inverted by the disc inversion unit 12 , is lifted by the lifting stage, or suction surface 143 is moved down by the suspending portion 145 , so that the suction surface 143 abuts the substrate 1 ′ to suck and hold the same.
- the arm 141 After moving the lifting stage downward, or retracting the suspending portion 145 to remove the disc substrate 1 ′ upward from the receiver 11 a , the arm 141 is rotated by 180 degrees to move the disc substrate 1 ′ onto the disc substrate 1 in the next receiver 11 a .
- the disc substrate 1 When the disc substrate 1 is lifted by the lifting stage, or the suspending portion 145 extends to move the suction surface 143 , i.e., the disc substrate 1 ′ downward so that the disc substrate 1 ′ is aligned with the disc substrate 1 , the disc substrate 1 ′ is released from suction force.
- the suction force to the disc substrate 1 ′ When the suction force to the disc substrate 1 ′ is released, the lifting stage is moved downward, or the suspending portion 145 is retracted, and the suction surface 143 is released over the receiver 11 a . While a disc substrate 1 ′ is sucked in a certain receiver 11 a , a disc substrate 1 and a disc substrate 1 ′ are aligned together in the next receiver 11 a.
- the disc alignment unit 14 includes two suction units 142 , and the arm 141 rotates by 180 degrees to move to the next receiver 11 a .
- the disc alignment unit 14 may alternatively include only one suction unit 142 that is fixed and supported by the arm 141 .
- the suction unit 142 may suck and hold the disc substrate 1 ′, and the turn table 11 may be rotated by 30 degrees.
- the suction unit 142 may align the disc substrate 1 ′ with the disc substrate 1 at that position.
- the turn table 11 rotates by 30 degrees and aligns the disc substrate 1 ′ with the disc substrate 1 placed in the next receiving part 11 a . In this manner, the two disc substrates 1 and 1 ′ are aligned with each other. In this manner, since the disc substrate 1 ′ to be aligned with the disc substrate 1 from upward without moving, the disc substrate 1 and the disc substrate 1 ′ cannot be misaligned or rotated with each other. In a structure with two suction units 142 , operating time can be reduced. In that structure, the aim 141 is rotated 180 degrees without waiting for the rotation of the turn table 11 to move the disc substrate 1 ′, and the disc substrate 1 ′ is aligned on the disc substrate 1 . Note that, the structure of the disc alignment unit 14 is not limited to that illustrated to FIG. 2 . Rather, any structure may be employed so long as it can lift the disc substrate 1 ′ and aligns it with the disc substrate 1 .
- the transfer unit 15 transfers the aligned disc substrates 1 and 1 ′ (referred to as “disc 4 ” altogether with the resin 3 ) from the receiver 11 a of the turn table 11 to the spinners 16 A and 16 B, and from 16 A and 16 B to the receiver 18 .
- the transfer unit 15 includes three arms extending perpendicularly to one another. With this configuration, the transfer unit 15 can transfer the disc 4 from the receiver 11 a to the spinner 16 A, from the spinner 16 A to the receiver 18 , and from the receiver 11 a to the spinner 16 B at a time. At the same time, the transfer unit 15 can transfer the disc 4 from the spinner 16 B to the receiver 18 .
- the receiver 11 a , the spinner 16 A, the receiver 18 and the spinner 16 B are circumferentially disposed at 90 degrees from one another counterclockwise in this order.
- the transfer unit 15 may transfer two discs 4 at a time by two arms. However, three arms may reduce a rotation angle required to transfer the disc 4 . If the transfer unit 15 has four arms, the rotation angle may further be reduced since operation for returning the transfer unit 15 to the original position can be omitted.
- the spinner 16 makes the disc 4 spin in order to spread the resin 3 uniformly on the disc 4 while spinning the disc 4 at high speed, and to irradiate light from the light irradiation unit 17 on the entire surface of the disc 4 .
- the light irradiation unit 17 is assembled to the spinner 16 .
- FIG. 3 is a partial cross-sectional block diagram illustrating the spinner 16 , the light irradiation unit 17 , the coater house 40 for catching resin escaping from the disc 4 mounted on the spinner 16 , a suction pipe 41 as the resin suction unit for sucking the resin 3 caught on the coater house 40 , a resin reservoir 42 , a suction unit 43 , and a control unit 60 .
- the dashed line shows a communication channel of control signals.
- the Spinner 16 includes a receiver 16 a , a spinning axis 16 b , and a spin driver 16 c .
- the receiver 16 a receives the disc 4 and makes the disc 4 spin.
- the receiver 16 a Includes a circular plate on which the disc 4 is mounted, and a pillar-shaped projection at the center of the plate. The projection is inserted in the holes 2 of the disc substrates 1 and 1 ′. In this manner, the center of the disc 4 and the center of rotation of the receiver 16 a are aligned with each other.
- the projection may also be tapered to facilitate insertion in the hole 2 .
- a pillar-shaped spinning axis 16 b is disposed directly below and at an opposite side of the receiver 16 a cocentrically with the receiver 16 a .
- the other end of spinning axis 16 b is connected to the spin driver 16 c .
- the receiver 16 a spins about the projection when the spin driver 16 c spins.
- the spin driver 16 c includes, for example, a motor and a gearbox for varying the spin speed of the receiver 16 a .
- the spin driver 16 c may include an inverter motor. Any mechanism may be employed which can rotate the receiver 16 a with varying spin speed.
- the coater house 40 is a container formed to surround the receiver 16 a .
- the coater house 40 catches on the surrounding wall the resin 3 scattering from the disc 4 spinning on the spinner 16 and collects the resin 3 .
- the coater house 40 collects the resin 3 escaping from the disc 4 .
- the coater house 40 has an opening at the bottom thereof.
- a suction pipe 41 is connected with the opening to suck the resin 3 collected in the coater house 40 .
- the other end of the suction pipe 41 is connected to a resin reservoir 42 .
- the resin reservoir 42 is a sealed container which has an opening connected to the suction pipe 41 and an opening to be connected with a suction unit 43 .
- the resin reservoir 42 may also include a discharge port (not shown) for sometimes discharging the resin collected in the resin reservoir 42 .
- the discharge port is closed for normal operation.
- the suction unit 43 sucks air through the suction pipe 41 to such the resin reservoir 42 from the interior of the coater house 40 .
- the suction unit 43 is typically a draft fan. The air sucked from the resin reservoir 42 by the suction unit 43 is emitted to the atmosphere.
- a demister (not shown) may be provided at a position where the air is sucked from the resin reservoir 42 by the suction unit 43 .
- the light irradiation unit 17 includes an irradiating section 171 , an ultraviolet light source 176 , an irradiation control unit 178 and an optical fiber 175 .
- the irradiating section 171 emits the ultraviolet light in a spot manner as light beam to irradiate the disc with.
- the ultraviolet light source 176 generates the ultraviolet light to be irradiated from the irradiating section 171 .
- the irradiation control unit 178 controls generation of the ultraviolet light in the ultraviolet light source 176 .
- the optical fiber 175 transmits the ultraviolet light generated in the ultraviolet light source 176 to the irradiating section 171 .
- the irradiating section 171 irradiates a surface of the disc 4 with ultraviolet light, while travelling from the position R 1 at the inner circumference side around the hole 2 toward the outer circumference side of the disc 4 . That is, travelling of the irradiating section 171 shifts the irradiation position of the ultraviolet light on the disc surface.
- the irradiating section 171 stops at a position R 2 before it travels further toward the outer circumference.
- the irradiation of the ultraviolet light to disc 4 is completed at the position R 2 .
- the position R 1 at the inner circumference side is typically located within a range of 10 to 25 mm in radius (16 to 42% of the disc substrate radius) from the center.
- the position R 2 at the outer circumference side is typically located within a range of 40 to 58 mm in radius (66 to 97% of the disc substrate radius) from the center.
- the control unit 60 controls the timing and the spin speed at which the spin driver 16 c of the spinner 16 makes the receiver 16 a spin, the timing of the light irradiation unit 17 irradiate the disc with ultraviolet light, the position of the irradiating section 171 (including travelling speed), and irradiation amount.
- the spinner 16 spins and the light irradiation unit 17 irradiates light in a cooperative manner.
- the control unit 60 may control operation of the entire resin film forming device 100 , and, may also control operation and stopping of the suction unit 43 , for example.
- FIG. 4 is a perspective view illustrating the travel of the irradiating section 171 of the light irradiation unit 17 .
- the irradiating section 171 is supported by an irradiation aim 172 .
- the irradiating section 171 may be formed as an end surface of the optical fiber 175 .
- the irradiating section 171 may include a lens mechanism at the end surface of the optical fiber 175 , and may have function for concentrating and diffusing the ultraviolet light.
- the irradiation arm 172 is supported by the pivot driver 174 via a vertical driver 173 .
- the vertical driver 173 vertically moves up and down. When moving up, it removes the irradiating section 171 away from the disc 4 so that the irradiation of the ultraviolet light to the disc 4 is substantially eliminated.
- the term “the irradiation of the ultraviolet light to the disc 4 is substantially eliminated” means that, even if the ultraviolet light is irradiated, that irradiation amount is too small to cure the resin 3 , and that concept is included in the concept “irradiation is stopped”.
- the pivot driver 174 makes the irradiation arm 172 pivot so that the irradiating section 171 travels between the center side and the outer circumference side of the disc 4 .
- the pivot driver 174 may be configured to travel over the outer circumference of the disc 4 .
- the pivot driver 174 may alternatively be configured to stop before reaching the outer circumference of the disc 4 , or configured such that the rotation of the pivot driver 174 may be restricted not to travel over the outer circumference of the disc 4 .
- the optical cable for connecting the irradiating section 171 and the ultraviolet light source 176 to transmit the ultraviolet light from the ultraviolet light source 176 to the irradiating section 171 has a flexible structure. Since the optical cable is flexible, it can follow the travelling irradiating section 171 with almost no resistance.
- the receiver 18 is a base on which the disc 4 , irradiated with ultraviolet light from the light irradiation units 17 A and 17 B by the two spinners 16 A and 16 B, is temporarily placed at a site.
- the disk 4 temporarily placed in the receiver 18 is transferred to the turn table 20 by the transfer unit 19 .
- the transfer unit 19 includes two arms opened at a predetermined angle. When the arms are rotated, the disc 4 can be transferred from the receiver 18 to the turn table 20 and from the turn table 20 to the next turn table 22 at the same time. That is, the position at which the receiver 18 and the disc 3 of the turn table 20 is placed and removed, and the position at which the disc 4 of the receiver 22 is placed are located at equal intervals on a circle about the center of rotation of the arm of the transfer unit 19 .
- the turn table 20 for receiving the disc 4 .
- the turn table 20 rotates, the disc 4 placed on the receiving parts is transferred to the curing unit 21 .
- the turn table 20 rotates intermittently by 90 degrees to transfer the disc 4 placed thereon to the curing unit 21 .
- the curing device 21 irradiates the entire surface of the disc 4 with ultraviolet light to completely cure the resin 3 on the disc 4 .
- the disc 4 can be irradiated with ultraviolet light without rotating the disc 4 .
- the curing unit 21 has a xenon lamp which generates the ultraviolet light in pulses, or a UV generating lamp which generates the ultraviolet light continuously on one or both of the upper and lower surfaces of the turn table 20 . After the resin 3 is completely cured by the curing unit 21 , the disc 4 is transferred to the turn table 22 by the transfer unit 19 .
- the turn table 22 also includes cylindrical receiving parts which open to outside at outer circumferences thereof.
- the turn table 22 includes four receiving parts and rotates intermittently by 90 degrees.
- the turn table 22 is rotated to transfer the disc 4 sequentially to the inversion unit 23 and the electric discharge unit 24 .
- the inversion unit 23 has a similar structure to that of the inversion unit 12 .
- the disc 4 is optionally inverted when required for later inspection process. For this reason, the receiving part of the turn table 22 also opens to outside.
- the electric discharge unit 24 blows ionized air off to remove dust or the like adhering to the surface of the disc 4 .
- the disc 4 after removing the dust or the like is transferred from the turn table 22 to the inspection unit 26 by the transfer unit 25 .
- the transfer unit 25 includes two arms opened at a predetermined angle. By rotating the two arms, the transfer unit 25 can transfer the disc 4 from the turn table 22 to the lifting stage 27 to the inspection unit 26 , and from the inspection unit 26 to the next lifting stage 27 at the same time. That is, the position at which the disc 4 is removed from the turn table 22 , the position of the inspection unit 26 , and the position of the lifting stage 27 are placed at equal intervals on a circle about the center of rotation of the arm of the transfer unit 25 .
- the disc 4 is mounted on the inspection unit 26 , which inspects the disc 4 from the underside.
- the inspection unit 26 inspects, for example, existence of blemish on the disc substrates 1 and 1 ′, misalignment of the two disc substrates 1 and 1 ′, uniformity in the spread resin 3 , and warping of the disc 4 .
- the inspected disc 4 is transferred to the lifting stage 27 by the transfer unit 25 .
- the lifting stage 27 includes a stage which moves up and down between the height in which the foregoing processes are performed and the height at which the product is taken out. That is, in the resin film forming device 100 , the product disc 4 is taken out from an upper port. In this manner, the disc 4 is easily transferred to subsequent processes.
- the lifting stage 27 moves upward with the disc 4 placed thereon, and continues moving until the disc 4 contacts the suction surface (not shown) of the transfer unit 28 .
- the transfer unit 28 includes a pivoting arm, and a suction surface for sucking the disc 4 below a distal end of the arm. According to the inspection result, the transfer unit 28 , by sucking the disc 4 at the suction surface at the distal end of the arm and pivoting the arm, transfers discs 4 that passed the inspection to the non-defective article table 29 , and transfers discs 4 that did not pass the inspection to the defective article table 30 .
- the non-defective article table 29 includes eight receiving parts, and rotates intermittently by 45 degrees to receive the disc 4 as a product one at a time in each receiving part.
- the defective article table 30 receives the discs 4 that failed to pass the inspection and thus cannot be used as products.
- the discs 4 may be stacked, and the defective article table 30 may include a guide for supporting the outer periphery of the discs 4
- a resin film is formed using a resin film forming device 100 , and two disc substrates 1 and 1 ′ are bonded together to form a disc 4 .
- the disc substrates 1 and 1 ′ are separately fabricated and recording grooves are also formed separately.
- the disc substrate 1 and the disc substrate 1 ′ are separately conveyed to the vicinity of the resin film forming device 100 .
- the disc substrates 1 and 1 ′ are stored within the reach of the disc mounting arm 10 with the groove-formed surfaces facing upward.
- the disc substrate 1 and the disc substrate 1 ′ are alternately placed in the receiving part 11 a of the turn table 11 by the disc mounting arm 10 . That is, the disc substrate 1 and the disc substrate 1 ′ are alternately placed in the receiving part 11 a of the turn table 11 .
- the turn table 11 rotates intermittently by 30 degrees.
- the inversion unit 12 does not invert the disc 1 when the disc 1 comes to the position of the inversion unit 12 .
- the inversion unit 12 inverts the disc 1 ′ only when the disc 1 ′ comes to the position of the inversion unit 12 .
- the resin supply unit 13 supplies resin around the hole 2 of the disc 1 , when the disc 1 comes to the position of the resin supply unit 13 .
- the resin 3 is circularly applied around the hole 2 while the supply nozzle 13 a moving around the hole 2 .
- the disc alignment unit 14 the disc 1 ′ which has been inverted by the inversion unit 12 is placed to align with the disc 1 having the resin 3 applied thereto. In this manner, the disc 4 is fabricated.
- the alignment unit 14 moves the disc 1 ′ to be aligned with the disc 1 in the next receiving part 11 a , two discs 1 and 1 ′ are aligned together with the groove-formed surfaces facing with each other. Then, the disc 4 is transferred from the turn table 11 to the spinner 16 by the transfer unit 15 .
- the spinner 16 When the disc 4 is mounted on the spinner 16 , the spinner 16 begins to spinning with the disc 4 . As shown in FIGS. 3 and 4 , while disc 4 is spun, the irradiation arm 172 is made to pivot by the pivot driver 174 to position the irradiating section 171 at a position R 1 at the inner circumference side. The irradiating section 171 is moved downward by the vertical driver 173 to a position where the disc 4 is irradiated with ultraviolet light of irradiation intensity sufficient to cure the resin 3 . Alternatively, the irradiation intensity of the ultraviolet light may be adjusted by concentration. However, irradiation of the ultraviolet light is not started yet.
- the irradiating section 171 is kept away from the disc 4 by the vertical driver 173 so that the disc 4 is substantially not irradiated with ultraviolet light. It is preferred that, when the disc 4 is placed on or removed from the spinner 16 , the irradiation arm 172 is made to pivot by the pivot driver 174 to a retracted position away from the position over the spinner 16 so as not to interfere the mounting and removal of the disc 4 .
- FIG. 5 is a time series graph showing a relationship between a spin speed V of the disc 4 spinning on the spinner 16 and an ultraviolet irradiation position R of the light irradiation unit.
- Time is plotted on a horizontal scale
- the spin speed of the disc 4 is plotted on a vertical scale (left side)
- the ultraviolet irradiation position of the disc 4 is plotted on the vertical scale (right side).
- the spin speed V is represented by the thick line
- the ultraviolet irradiation position R is represented by the thin, marked line.
- spinning begins at the time t 0 , and the spin speed is increased to a high spin speed V 3 as a first spin speed.
- the high spin speed V 3 is 2000 to 10000 (min ⁇ 1), for example.
- the high spin speed V 3 is kept from time t 1 to time t 2 .
- the time to keep the high spin speed V 3 is typically several seconds, the high spin speed V 3 is not necessarily kept.
- t 1 and t 2 indicate the same time.
- the resin 3 circularly applied around the hole 2 spreads toward the outer circumference by centrifugal force, and spreads uniformly between the disc substrate 1 and the disc substrate 1 ′.
- thickness of the resin 3 rarely becomes uniform. Since the resin 3 spreads toward the outer circumference by centrifugal force, the thickness of the resin 3 becomes larger toward the outer circumference side.
- the spin speed V begins to decrease, and the spin speed V becomes low spin speed V 1 at time t 3 .
- the low spin speed V 1 is slower than the high spin speed V 3 , and is a spin speed at which the resin 3 is spread toward the outer circumference by centrifugal force becomes slow.
- the low spin speed V 1 is, for example, several hundreds to 7000 (min ⁇ 1).
- a second spin speed does not necessarily represent the low spin speed V 1 , but represents all the spin speed V reduced from the high spin speed V 3 . That is, the spin speed V which begins to decrease from the high spin speed V 1 is also the second spin speed.
- the spin speed V begins to decrease, ultraviolet irradiation will begin from the position R 1 at the inner circumference side by the light irradiation unit 17 . It is when the thickness of the resin 3 i.e., the distance between the disc substrate 1 and the disc substrate 1 ′ at the inner circumference side becomes a predetermined length, the irradiation of the ultraviolet light is started. Since the resin 3 is an ultraviolet curing resin, it begins curing when irradiated with ultraviolet light. The resin 3 may be completely cured by the ultraviolet light from the light irradiation unit 17 . The resin 3 is not necessarily cured completely, but may be gelled, and cured to such an extent that the resin 3 does not spread over the outer circumference by centrifugal force caused by the subsequent spinning (i.e., thickness of the resin 3 does not become thinner).
- the resin 3 in a position other than that irradiated with ultraviolet light continues spreading toward the outer circumference side by centrifugal force.
- the irradiation arm 172 is made to pivot by the pivot driver 174 to move the irradiating section 171 , i.e., the position where the resin 3 is irradiated with ultraviolet light, is shifted toward the outer circumference side, and resin 3 at that position is cured.
- the resin 3 can be cured with uniform thickness.
- the time when the thickness of the resin 3 becomes a predetermined thickness is determined depending on viscosity of the resin 3 , the spin speed V, and other factors.
- the shifting speed of the position at which ultraviolet light is irradiated from the light irradiation unit 17 toward the outer circumference side can be determined in advance.
- the film thickness of the resin 3 can be kept more uniform by continuously shifting the ultraviolet irradiation position from the inner circumference side toward the outer circumference side while rotating the disc 4 , and by adjusting the movement speed appropriately.
- the shift of the ultraviolet irradiation position toward the outer circumference side is achieved by the pivotal movement of the pivot driver 174 , and the movement speed is also adjusted by the speed of the pivoting movement.
- FIG. 6 is a schematic view illustrating a relationship between a spreading speed of the resin 3 due to spin of the disc 4 and a shifting speed of the ultraviolet irradiation position. Even when the disc 4 is rotated at low spin speed V 1 , the resin 3 spreads toward the outer circumference side by centrifugal force.
- the spreading speed of the resin 3 at that time varies depending on the viscosity and the spin speed of the resin 3 , or on the predetermined distance between the disc substrates 1 and 1 ′, but typically is about 1 to 5 mm/sec.
- the speed at which the irradiating section 171 travels toward the outer circumference side i.e., the speed at which the position of the resin 3 irradiated with ultraviolet light from the light irradiation unit 17 shifts
- the resin 3 which receives ultraviolet irradiation slightly and tries to spread toward the outer circumference side is caught up to by the moving ultraviolet irradiation, and is cured in response to the ultraviolet irradiation. That is, the resin 3 influenced by the even slight ultraviolet irradiation spreads out toward the outer circumference side, and does not scatter from the outer circumference of the disc 4 .
- the irradiation intensity of the ultraviolet light is determined such that the resin is gelled and cured even at the outer circumference side to an extent that it no more spread from the outer circumference by centrifugal force due to further spinning.
- the travelling speed of the irradiating section 171 may decrease as it moves toward the outer circumference side.
- the degree of curing of the resin 3 can be uniform at both the outer and inner circumferences.
- the irradiation intensity of the ultraviolet light may be increased as the irradiating section 171 moves toward the outer circumference side, and the travel irradiating section 171 may travel at a constant speed.
- the resin 3 can be cured uniformly with the controlled irradiation intensity of the ultraviolet light.
- the film thickness of the resin 3 is tend to become thin as the irradiating section 171 approaches the outer circumference, it is required to increase the travelling speed of the irradiating section 171 as it approaches the outer circumference side.
- the curing state of the resin 3 can be controlled to increase the irradiation intensity of the ultraviolet light as the irradiating section 171 approaches the outer circumference.
- the irradiation intensity of the ultraviolet light may be controlled by altering generating amount of the ultraviolet light in an ultraviolet light source 176 .
- the irradiation intensity of the ultraviolet light may be controlled by adjusting the lens.
- the irradiation intensity of the ultraviolet light may be controlled by a vertical movement of the vertical driver 173 . Referring again to FIG. 5 , description on the spin of the disc 4 on the spinner 16 and the ultraviolet irradiation of the light irradiation unit 17 will be continued.
- the position R at which the resin 3 is irradiated with ultraviolet light by the light irradiation unit 17 is stopped at the position R 2 before the light irradiation unit 17 reaches the outer circumference of the disc 4 .
- the spinner 16 keeps spinning at the low spin speed V 1 until time t 5 when the thickness of the resin 3 outside of a range cured in response to the irradiation of ultraviolet light, i.e., the resin 3 in the range where no ultraviolet light has been irradiated, obtains predetermined thickness.
- the spin speed V of the spinner 16 is reduced, and becomes 0 (zero) at time t 6 .
- the resin While the spinner 16 keeps spinning at the low spin speed V 1 , the resin is scattering from the outer circumference of the disc 4 .
- the ultraviolet light irradiation unit reaches the outer circumference of the disc 4 , a portion of the resin 3 that has been irradiated with ultraviolet light but has not cured begins scattering.
- the irradiation of the ultraviolet light by the light irradiation unit 17 stops when the irradiating section 171 reaches the position R 2 .
- the irradiation of the ultraviolet light may be stopped by stopping the generation of ultraviolet light in the ultraviolet light source 176 .
- the irradiation of the ultraviolet light may be stopped by separating the irradiating section 171 from the disc 4 by vertical driver 173 to substantially eliminate irradiation of the ultraviolet light to the disc 4 . Then, the irradiating section 171 and the irradiation arm 172 are retracted to a standby position by pivoting movement of the pivot driver 174 . In this manner, the movement of the pivot driver 174 and the vertical driver 173 may cause the irradiating section 171 and the irradiation arm 172 that otherwise interfere the movement of the mounting or removal of the disc 4 to standby, and cause the irradiation to start or stop. As a result, the device configuration becomes simple and the operating time can be reduced.
- the height of the irradiating section 171 of the light irradiation unit 17 may be determined in advance suitable to irradiate ultraviolet light to the surface of the disc 4 mounted on the receiver 16 a of the spinner 16 . In this manner, since the disc 4 can be irradiated at a predetermined range only by the pivoting operation of the pivot driver 174 without operating the vertical driver 173 , the operating time can be reduced.
- the ultraviolet light absorbance characteristic, viscosity, and other characteristics of the resin 3 varies and it is thus difficult to mix the irradiated resin with new resin to re-use the same.
- the ultraviolet irradiation is stopped at the position R 2 slightly before the irradiation unit reaches the outer circumference of the disc 4 so that the resin 3 at the outermost side is not irradiated with ultraviolet light.
- Spinning is controlled to prevent scattering of the irradiated resin due to further spinning of the disc 4 . In this manner, mixing of the resin irradiated with ultraviolet light with the resin scattering from the disc 4 can be prevented.
- the resin 3 which receives slight ultraviolet irradiation is prevented from spreading toward the outer circumference and scattering from the outer circumference of the disc 4 .
- mixing of the resin irradiated with ultraviolet light with the resin scattering from the disc 4 can be prevented.
- the resin 3 scattered from the disc 4 impinges on the wall of the coater house 40 naturally falls down and collected on the bottom surface of the coater house 40 .
- air is sucked from the coater house 40 via the resin reservoir 42 and the suction pipe 41 , when the suction unit 43 sucks air.
- the central portion of the coater house 40 is closed by the receiver 16 a of the spinner 16 .
- downward air flow is formed around the disc 4 .
- air flow from the bottom surface of the coater house 40 to the suction pipe 41 is also formed.
- the resin 3 scattering from the disc 4 is also influenced by the air flow to flow into the suction pipe 41 .
- the resin 3 flown into the suction pipe 41 is collected on the bottom of the resin reservoir 42 . Since the resin reservoir 42 includes an upper opening communicating with the suction unit 43 , only air is sucked by the suction unit 43 .
- the resin 3 is thus stored in the resin reservoir 42 .
- plural suction pipes 41 may be provided and connected to single or plural resin reservoirs 42 .
- providing plural suction pipes 41 on the bottom of the coater house 40 may facilitate collection of the resin 3 in the resin reservoir 42 .
- the resin 3 collected in the resin reservoir 42 is taken out suitably and is re-used as resin.
- FIG. 7 is a time series graph like that of FIG. 5 showing a relationship between a spin speed V of the disc 4 spinning on the spinner 16 and an ultraviolet irradiation position R of the light irradiation unit 17 .
- Time is plotted on a horizontal scale
- the spin speed of the disc 4 is plotted on a vertical scale (left side)
- the ultraviolet irradiation position of the disc 4 is plotted on the vertical scale (right side).
- the spin speed V is represented by the thick line
- the ultraviolet irradiation position R is represented by the thin, marked line.
- the spin speed V is increased to spin speed V 2 at time t 7 after the resin 3 is irradiated with ultraviolet light before the irradiation unit reaches the outer circumference and the resin 3 is cured.
- the spin speed V 2 is speed at which the cured resin does not scatter due to the spinning. Particularly when the spreading and curing of the resin 3 is a bottleneck in the operating process in the resin film forming device 100 , even slight reduction in time may contribute to the improvement in working efficiency of the resin film forming device 100 .
- the disc 4 is not necessarily irradiated with ultraviolet light while spinning at a certain low rotation speed V 1 .
- the disc 4 may alternatively be irradiated with ultraviolet light while the spin speed of the disc 4 is gradually reduced from the spin speed V 3 to the spin speed V 1 . That is, the spin speed can be reduced from the high spin speed V 3 to the low spin speed V 1 during the time period in which the ultraviolet light is irradiated (from time t 2 to time t 4 ). In this case, no time t 3 exists in the graph of FIG. 5 or FIG. 7 , and the spin speed is reduced from V 3 to V 1 from during time t 2 and time t 4 . Although the spin speed is reduced linearly with respect to the time in FIG. 5 or FIG. 7 , the spin speed reduction is not necessary linear. During time t 3 and time t 4 , the spin speed is not necessarily constant, but may be increased or decreased depending on the state of film thickness. Increase or decrease of the spin speed in this time period can control the film thickness of the disc 4 highly precisely.
- the disc 4 is placed in the receiver 18 by the transfer unit 15 from the spinners 16 A and 16 B.
- the transfer unit 15 has three arms and the angles among the arms correspond to the angles among a position in the receiving part 11 a of the turn table 11 at which the disc 4 is taken out, the spinner 16 and the receiver 18 .
- the disc 4 temporarily placed in the receiver 18 is transferred to the receiving part of the turn table 20 by the transfer unit 19 .
- the receiver 18 and the transfer unit 19 are not necessarily provided, and the disc 4 may be transferred to the turn table 20 from the spinner 16 by the transfer unit 15 .
- the turn table 20 rotates intermittently by 90 degrees to transfer the disc 4 to the curing unit 21 and returns the disc 4 to the position at which the disc 4 is placed. Since the disc 4 is placed and removed at the same position on the turn table 20 , a single transfer unit 19 can be used to place and remove the disc 4 .
- the curing unit 21 irradiates the entire disc 4 with ultraviolet light so as to completely cure the resin 3 that has not received irradiation of the ultraviolet light by the light irradiation unit 17 , and also completely cure semi-cured resin. Here, when the resin 3 is completely cured, it is solidified.
- the disc 4 with completely cured resin 3 is transferred to the turn table 22 by the transfer unit 19 .
- the positional relationship of the receiver 18 , the turn table 20 and the turn table 22 corresponds to the angle made by two arms of the transfer unit 19 . For this reason, like the transfer unit 15 , transfer of the disc 4 from the receiver 18 to the turn table 20 and transfer of the disc 4 from the turn table 20 to the turn table 22 can be efficiently performed at the same time.
- the turn table 22 sends the disc 4 to the inversion unit 23 and the electric discharge unit 24 by rotating intermittently by 90 degrees.
- the inversion unit 23 inverts the disc 4 for later inspection depending on the state of the film formed on the disc 4 .
- ionized air is blown off from the electric discharge unit 24 to the upper and lower surfaces of the disc 4 to remove any dust or other material adhering on the surface of disc 4 , thereby cleaning the surface.
- the disc 4 with clean surface is transferred to the inspection unit 26 by the transfer unit 25 .
- the inspection unit 26 inspects the disc 4 as a product.
- the inspection unit 26 inspects, for example, misalignment between the disc substrate 1 and the disc substrate 1 ′ and existence of blemish. Since dust or other material is removed by the electric discharge unit 24 , the dust or other material cannot be wrongly considered as blemish, or the disc substrates 1 and 1 ′ cannot be misaligned. Thus, reliability is improved.
- the disc 4 inspected by the inspection unit 26 is transferred to the lifting stage 27 by the transfer unit 25 .
- the positional relationship among the position at which the disc 4 is taken out on the turn table 22 , the position of the inspection unit 26 and the position of the lifting stage 27 also corresponds to the angle made by the two arms of the transfer unit 25 .
- transfer of the disc 4 from the turn table 22 to the inspection unit 26 and transfer of the disc 4 to the lifting stage 27 from the inspection unit 26 can be performed efficiently at the same time.
- the disc 4 is lifted by the lifting stage 27 , made to abut the undersurface of the distal end of the arm of the transfer unit 28 , and is sucked and held by the suction unit provided at the undersurface of the arm.
- the disc 4 sucked and held by the transfer unit 28 is transferred to the non-defective article table 29 if the disc 4 passed the inspection, and to the defective article table 30 if the disc 4 failed to pass the inspection.
- the discs 4 placed on the non-defective article table 29 are fed to subsequent processes and then shipped.
- the discs 4 placed on the defective article table 30 are processed as defective articles.
- the discs 4 may be stacked on the non-defective article table 29 or the defective article table 30 . Since the position at which the disc 4 is taken out from the resin film forming device 100 by the lifting stage 27 is high, subsequent processes are easy to conduct.
- Devices required with high positional accuracy such as the turn table 11 , the spinner 16 and the light irradiation unit 17 can be arranged at low, stable positions.
- the non-defective article table 29 , the defective article table 30 and the like may be placed at the same height.
- the lifting stage 27 may be omitted.
- FIG. 8 is a partial cross section block diagram like FIG.
- FIG. 8 which illustrates the spinner 16 , the light irradiation unit 17 , the coater house 40 for catching resin 3 escaping from the disc 4 mounted on the spinner 16 , a suction pipe 41 as the resin suction unit for sucking the resin 3 caught on the coater house 40 , a resin reservoir 42 , a suction unit 43 , and a control unit 60 .
- dashed line shows a communication channel of control signals.
- the disc 5 is shown in FIG. 8 , which is different from the disc 4 fabricated by bonding two disc substrates together, disc 4 may also be used.
- the disc 5 is fabricated by forming a resin film 3 as a protective layer on a single disc substrate.
- FIG. 8 is different from FIG. 3 in that a shutter 46 is provided to extend from a side wall of the coater house 40 .
- the shutter 46 is for shutting the irradiation of the ultraviolet light from the irradiating section 171 of the light irradiation unit 17 onto the disc 5 .
- a board for blocking the ultraviolet light is provided as the shutter 46 between the irradiating section 171 and the disc 5 in a course of the irradiating section 171 at the side of the outer circumference from the position R 2 at which the irradiation of ultraviolet light is stopped.
- the shutter 46 By providing the shutter 46 , even if the irradiating section 171 does not stop, or even if the irradiating section 171 is not moved upward apart from the disc 5 , the shutter 46 blocks the ultraviolet light. In this manner, irradiation of the ultraviolet light to the disc 5 is stopped.
- the shutter 46 may be rotatable with the side wall of the coater house 40 as a rotation support.
- the shutter 46 may also be foldable or retractable. With these configurations, the shutter 46 is preferably retracted so as not to interfere with the transfer of the disc 5 at the time of mounting and removal of the disc 5 .
- the shutter 46 may only be disposed directly under the linear or circular path of the irradiating section 171 . For this reason, the disc 5 may be inclined during mounting and removal so as not interfere with the shutter 46 .
- FIG. 9 is a partial cross section block diagram which illustrates the spinner 16 , the light irradiation unit 180 , the coater house 40 for catching resin 3 escaping from the disc 4 mounted on the spinner 16 , a suction pipe 41 as the resin suction unit for sucking the resin 3 caught on the coater house 40 , a resin reservoir 42 , a suction unit 43 , and a control unit 60 .
- the spinner 16 the light irradiation unit 180
- the coater house 40 for catching resin 3 escaping from the disc 4 mounted on the spinner 16
- a suction pipe 41 as the resin suction unit for sucking the resin 3 caught on the coater house 40
- a resin reservoir 42 a resin reservoir 42
- a suction unit 43 a control unit 60 .
- dashed line shows a communication channel of control signals.
- the light irradiation unit 180 is not structured to irradiate ultraviolet light while the irradiating section 171 is moved.
- LED 9 includes ten LEDs 181 a to 181 j , more LEDs may also be provided.
- the distance between each of the LEDs 181 a to 181 j is set to be, for example, 5 mm or less and may also be 2 mm or less.
- the LEDs turn on from the 181 a at the inside of the disc 4 . Continuous turning-on of the LEDs provides continuous irradiation. The irradiation position of the ultraviolet light is not continuously shifted in its precise sense. However, when multiple LEDs 181 a to 181 j emit light sequentially toward the outer circumference from the inner circumference side, the resin cures sequentially toward the outer circumference side from the inner circumference side. For this reason, it will move continuously substantially.
- the LEDs may be arranged linearly in the radial direction of the disc 4 , or may be arranged diagonally, or in a checkerboard pattern. It suffices that the LED emits ultraviolet light while continuously moving in the radial direction of the disc 4 .
- the ultraviolet light generator is not limited to the LED and other lamps may alternatively be used. The LED, however, is employed in the description herein.
- each of the LEDs 181 a to 181 j is turned on every 0 second. That is, when the LED at the inner circumference side is turned off, the LED at the outer circumference side is turned on simultaneously. There may be slight interval of lighting time such as shorter than 0.1 seconds. The lighting time may also be slightly overlapped. In any case, the resin 3 is irradiated with ultraviolet light sequentially from the inner side toward the outer side so that the film thickness of the resin 3 becomes uniform at predetermined thickness. Turning-on and turning-off of the LEDs 181 a to 181 j are controlled by the LED controller 188 .
- the LED controller 188 is preferably controlled by the control unit 60 to adjust timing with spinning of the spinner 16 or mounting of the disc 4 .
- the light irradiation units 180 has a structure for sequentially turning the LEDs on and off from the inner circumference side toward the outer circumference side, so as to continuously shift the irradiation position from the inner circumference side toward the outer circumference side. With the structure, mechanical moving parts decrease in number, and thus the device can be simplified to reduce occurrence of mechanical malfunction.
- the irradiating section 171 travels via the irradiation arm 172 by pivotal movement of the pivot driver 174 as in the light irradiation unit 17 , it is easy to continuously, in its precise sense, shift the ultraviolet irradiation position. It is easy to retract the irradiating section 171 and the irradiation arm 172 from the position above the spinner 16 , and the disc 4 is easily mounted on and removed from the spinner.
- the disc 4 is transferred to the processing units such as the resin supply unit 13 and the curing unit 21 via the turn tables 11 , 20 and 22 .
- the processing unit provided at the turn tables is not limited to those shown in FIG. 1 .
- the disc 4 may be conveyed on, for example, a conveyor belt sequentially to the processing units.
- the resin film forming device 100 It has been described in the resin film forming device 100 that the resin film is formed as an adhesive for bonding the disc substrates 1 and 1 ′ together with the resin 3 interposed therebetween.
- the resin film forming device 100 may be used as a device for forming a resin film as a protective layer of the disc substrate 1 as the disc 5 shown in FIG. 8 .
- the resin film forming device 100 may be formed without a disc alignment unit 14 or other units.
- the process of spreading and curing the resin as described above may be used in a device for forming a protective layer. In this manner, the same advantageous effects can be obtained.
- FIG. 10 is a flow chart illustrating a main part of the method of forming a resin film according to the invention.
- the resin is circularly applied to the disc substrate around the hole (Step S 10 ).
- the disc substrate is aligned with a surface of another disc substrate on which the resin has been applied (Step S 12 ). Alignment of the disc substrates may be omitted and Step S 12 may be skipped.
- the disc with resin applied to the disc substrate, or the disc fabricated by disc substrates aligned with each other is mounted on the spinner (Step S 20 ).
- the resin may be applied to the disc (Step S 10 ) after the disc is mounted on the spinner (Step S 20 ).
- the disc is made to spin at high speed on the spinner (Step S 30 ), and then the spin speed is reduced (Step S 40 ).
- irradiation of the ultraviolet light is started at a position at the inner circumference side of the disc (Step S 50 ).
- the irradiation position of the ultraviolet light is shifted from the inner circumference side toward the outer circumference side of the disc (Step S 60 ).
- Irradiation is stopped before the irradiation position of the ultraviolet light reaches the outer circumference of the disc (Step S 70 ).
- the resin escaping from the disc while the disc is spinning is collected (Step S 80 ).
- Step S 10 it is illustrated that the resin is collected (Step S 80 ) after the irradiation of the ultraviolet light is stopped (Step S 70 ).
- the resin may also be collected while the disc is spinning (Steps S 30 to S 70 ). Then, the disc is stopped spinning (Step S 90 ). Note that, the spinning of the disc is not necessarily stopped completely, but may be reduced to such speed that the resin no more escapes by centrifugal force. Then, the entire surface of the disc is irradiated with ultraviolet light to completely cure the resin (Step S 100 ).
- Step S 100 the ultraviolet light in Step S 100 may be irradiated only to the vicinity of the outer circumference where the resin remains uncured.
- the above-described method of forming the resin film may be performed not in the resin film forming device 100 but a resin supply unit, a spinner, and an ultraviolet light irradiation unit of any structure.
- independent devices may be used employed.
- the resin film may be formed by a program incorporated in a control device for controlling the above-described method of forming the resin film.
- FIG. 11 shows distribution in thickness of the resin film formed by the device and method of forming the resin film according to the invention, and distribution in thickness of a resin film formed by conventional technology.
- FIG. 11A shows distribution at radius positions of the resin film on the disc formed in accordance with a conventional method.
- FIG. 11B shows distribution at radius positions of the resin film on the disc formed in accordance with the invention.
- radius position on the disc is plotted on the horizontal scale, and the maximum and minimum values of the measured thickness of the resin film (left side) and difference between the maximum and minimum values of the resin film thickness (variation in thickness in the circumferential direction) are plotted on the vertical scale.
- the distribution at radius positions of the resin film on the disc formed in accordance with a conventional method means the distribution obtained in the following manner: as described in JP-A No. 2004-280927, the resin is circularly applied to a disc substrate around a hole; the resin is spread due to high-speed spinning of the disc substrate, then the disc substrate is made to spin at low spin speed at which the resin is no more spread out; at the same time, the resin of predetermined thickness is irradiated with ultraviolet light from the inner circumference side; after the resin is spread again while spinning the disc substrate at high speed, the resin of predetermined thickness is irradiated with ultraviolet light while the disc substrate spins at low spin speed; and the thickness of each radius positions is measured on a cocentric circle of the resin film formed by repeating the process.
- the distribution at radius positions of the resin film on the disc formed in accordance with the invention means the distribution of thickness of the formed resin film obtained in the following manner: after circularly applying resin to a disc substrate around a hole, the resin is spread due to high-speed spinning of the disc substrate; the spin speed is reduced to reduce the spreading speed of the resin; the disc substrate is irradiated with ultraviolet light, while the irradiation position is shifted from the inner circumference side to the outer circumference side so that the resin film obtains predetermined thickness; and irradiation is stopped before the irradiation unit reaches the outer circumference.
- the disc substrate is continuously irradiated with ultraviolet light from the inner circumference to the outer circumference while the resin is spread at high first spin speed, and then at low second spin speed. Therefore, the disc of the invention is preferably used as a disc with higher accuracy, such as a next generation high-capacity optical disc.
- FIG. 12 is a graph illustrating comparison of absorbance characteristic of the resin in the ultraviolet region.
- the wavelength in the ultraviolet region is plotted on the horizontal scale, and absorbance is plotted on the vertical scale.
- curve A represents absorbance of unused resin
- curve B represents absorbance of the resin escaping from the disc and collected in the resin film formation according to the invention
- curve C represents absorbance of the resin after being irradiated with ultraviolet light to such an extent that the resin remains uncured.
- the degree of curing reaction with absorbance of the ultraviolet curing resin can be determined from the graph. As the ultraviolet curing reaction progresses, the absorbance in the ultraviolet wavelength area changes.
- the absorbance of the resin irradiated with ultraviolet light shown by curve C changes greatly as compared with the absorbance of the resin before being irradiated with ultraviolet light. It is found that the ultraviolet curing reaction has progressed. As compared with the curve C, absorbance of the resin escaping from the disc and collected in resin film formation according to the invention of curve B did not change at all compared with absorbance of curve A, and curve B overlaps with curve A. Thus, it can be found that the resin escaping from the disc and collected in the resin film formation: process according to the invention did not undergo any ultraviolet curing reaction and thus can be re-used.
- a resin film forming device in which escaping resin can be re-used while characteristics such as absorbance and viscosity of the resin remain static.
Abstract
A resin film forming device is provided which includes a spinner on which a circular disc having a hole at the center thereof is mounted, the spinner making the disc spin about the hole; a resin supply unit which applies resin around the hole of the disc; and a light irradiation unit which irradiates the resin on the disc mounted on the spinner with light to cure the resin, the light irradiation unit shifting a light irradiation position from an inner circumference side toward an outer circumference side of the disc mounted on the spinner, and stopping the light irradiation before the light irradiation unit reaches the outer circumference of the disc.
Description
- The present invention relates to a resin film forming device for forming a resin film on a disc, a method of forming a resin film, and a program for controlling the resin film forming device. More particularly, the present invention relates to a resin film forming device, a method of forming a resin film and a program in which resin can be re-used.
- Priority is claimed on Japanese Patent Application No. 2006-029211, filed Feb. 7, 2006, the content of which is incorporated herein by reference.
- Optical discs have been developed from compact discs (CDs) into digital versatile discs (DVDs) and into next generation DVDs. The recording density has increased accordingly. In the optical discs, fine pits and lands are formed in a spiral groove on a surface of, for example, a polycarbonate substrate. When scanning the pits and lands with laser beam, recorded information is read out. If information is recorded on a single substrate as in a CD, a recording surface is protected with a resin coating. A DVD is fabricated by bonding two or more substrates together, each having a recording surface, using adhesive resin so as to increase recording density.
- Application of coating resin or adhesive resin on a substrate surface generally includes applying the resin circularly near a center hole of the substrate, and making the substrate spin at high speed to spread the resin out into uniform thickness. The spread resin is then irradiated with light sequentially from a center side toward an outer circumference so as to cure the resin (see
pages 11 to 13 and FIG. 1 of Patent Document 1). - When resin applied on a disc is to be spread out and cured while the disc is spinning at high speed, the resin spread and reached an outer circumference of the disc is partially blown off due to high-speed spinning. If the resin blown off has been subject to light irradiation, the characteristics, such as absorbance and viscosity, of the resin have varied. As a result, it is difficult to re-use the resin, and the resin is wasted. In view of the aforementioned, an object of the invention is to provide a resin film forming device, a method of forming a resin film, and a program readable by a control device for controlling the resin film forming device. In the device, method and program, resin can be re-used.
- To achieve the above object, a resin film forming device according to a first aspect of the invention includes: as shown in
FIGS. 1 and 3 for example, a spinner 16 (16A, 16B) on which acircular disc 1 having ahole 2 at the center thereof is mounted, the spinner 16 (16A, 16B) making thedisc 1 spin about thehole 2; aresin supply unit 13 which appliesresin 3 around thehole 2 of thedisc 1; and a light irradiation unit 17 (17A, 17B) which irradiates theresin 3 on thedisc 1 mounted on thespinner 16 with light to cure theresin 3, the light irradiation unit 17 (17A, 17B) shifting a light irradiation position from an inner circumference side toward an outer circumference side of thedisc 1 mounted on thespinner 16, and stopping the light irradiation before the light irradiation unit 17 (17A, 17B) reaches the outer circumference of thedisc 1. - With this configuration, since the light irradiation is stopped before the irradiation unit reaches the outer circumference, the resin escaping from the disc is not irradiated with light. The characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light, and thus the resin can be re-used. The concept of “curing resin” used herein includes complete curing of the resin. In addition, the concept may also include curing resin to an extent that the resin is not completely cured and is gelled and no more spread out toward the outer circumference by centrifugal force caused by further spinning of the disc (hereinafter, referred to as “semi-curing”).
- In a resin film forming device according to a second aspect of the invention, as shown in
FIG. 3 for example, in the above-described resin film forming device, thelight irradiation unit 17 may be configured to continuously shift a light irradiation position from the inner circumference side toward the outer circumference side of thedisc 1 mounted on thespinner 16. - With this configuration, since the light irradiation position is continuously shifted from the inner circumference side toward the outer circumference side of the disc, the resin becomes gradually cured from the inside toward the outer circumference, and thus only the resin that has not been subject to light irradiation escapes from the circumference of the disc.
- In a resin film forming device according to a third aspect of the invention, as shown in
FIGS. 3 and 5 for example, in the above-described resin film forming device, thespinner 16 makes thedisc 1 spin at first spin speed V3 to spread theresin 3 applied around thehole 2, and then makes thedisc 1 spin at second spin speed slower than the first spin speed V3; and thelight irradiation unit 17 may begin irradiating thedisc 1 with light while thespinner 16 spins thedisc 1 at the second spin speed. - With this configuration, the resin is spread quickly and uniformly on the disc while the disc is spinning at the first spin speed. After that, the spin speed is change from the first spin speed to the second spin speed which is slower than the first spin speed. Thus, the speed at which the resin moves toward the outer circumference of the disc decreases. Since the resin is irradiated with light in this state, the resin irradiated with light can be prevented from moving toward the outer circumference of the disc.
- A resin film forming device according to a fourth aspect of the invention may further include, as shown in
FIG. 2 for example, in the above-described resin film forming device, adisc alignment unit 14 which places, on thedisc 1 having thereon theresin 3 applied by the resin supply unit, anotherdisc 1′ from a side at which theresin 3 is given. - With this configuration, two or more substrates having recording surfaces to increase recording density can be fabricated for, for example, a DVD. Also in this case, the adhesive resin for bonding the two or more substrates together having recording surfaces can be re-used.
- A resin film forming device according to a fifth aspect of the invention may further include, as shown in
FIG. 3 for example, in the above-described resin film forming device, aresin suction units 41 to 43 for sucking theresin 3 escaping from thedisc 1 mounted on thespinner 16. Here, the term “escaping” means that the resin is released from the disc, and the term also includes scattering of the resin due to spin of the disc and dropping of the resin from the circumference of the disc. - With this configuration, the resin escaping from the disc can be reliably collected, thereby increasing a re-use ratio of the resin.
- A resin film forming device according to a sixth aspect of the invention may further include, as shown in
FIG. 1 for example, in the above-described resinfilm forming device 100, acuring unit 21 which re-irradiates theresin 3 with light, theresin 3 having been spread and irradiated with light by thelight irradiation unit 17. - With this configuration, the light irradiation position is shifted from the inner circumference side toward the outer circumference side of the disc and irradiation of light is stopped before the irradiation unit reaches the outer circumference. Thus, the resin which has not been completely cured and the resin which is located at the outermost circumference of the disc and has not cured are cured by the moving irradiation light. The cured resin is used as adhesive resin, or cured resin as a protection film.
- To achieve the above object, a method of forming a resin film according to a seventh aspect of the invention includes: as shown in
FIG. 10 for example, a resin supply process S10 in which resin is applied on a circular disc, around a hole formed at the center of the disc; a first spinning process S30 in which the disc with the resin applied thereon in the resin supply process S10 is spun at first spin speed; after the first spinning process S30, a reduction process S40 in which the spin speed is reduced; during or after the reduction process S40, a light irradiation processes S50 and S60 in which the resin is cured while an irradiation position at which the resin is cured by light is shifted from the center toward an outer circumference side of the disc; and a light irradiation stopping process S70 in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light. - With this configuration, the circular disc with the resin applied thereon is spun at the first spin speed to spread the resin quickly and uniformly on the circular disc. Then the spin speed is reduced, and the resin is irradiated with light for curing while the irradiation position of the light is shifted from the center toward the outer circumference side of the disc. Then, irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- A method of forming a resin film according to an eighth aspect of the invention may further include, as shown in
FIG. 10 for example, in the above-described method of forming a resin film, a resin collection process S80 in which the resin applied to the disc and escapes from the disc is collected. - With this configuration, since the resin escaping from the disc is collected, the resin can be re-used and is not wasted.
- A ninth aspect of the invention may further include a second light irradiation process S100 after the light irradiation stopping process S70 in the above-described method of forming a resin film. As shown in
FIG. 10 for example, the resin is irradiated with light for curing the resin in the second light irradiation process S100. - With this configuration, the light irradiation position is shifted from the inner circumference side toward the outer circumference side of the disc, and irradiation of light is stopped before the irradiation unit irradiates the outer circumference of the disc. Thus, the resin which has not been completely cured and the resin which is located at the outermost circumference of the disc and has not cured can be cured by the moving irradiation light. The cured resin is used as adhesive resin, or cured resin as a protection film.
- To achieve the above object, a program according to a tenth aspect of the invention is a program for controlling the resin
film forming device 100 which forms a resin film on a circular disc having a center hole as shown inFIGS. 1 and 10 for example. The program executes the following steps: a resin application step S10 in which the resin is applied around a hole of a disc; a spinning step S30 in which thespinner 16 on which the disc with resin applied thereon is mounted is spun at first spin speed; after the spinning step S30, a reduction step S40 in which the spin speed of thespinner 16 is reduced; after the reduction step S40, a light irradiation steps S50 and S60 in which the disc is irradiated with light from the inner circumference side toward the outer circumference side of the disc; and a light irradiation stopping step S70 in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light. - With this configuration, since irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- The resin film forming device includes: a spinner on which a circular disc having a center hole is mounted, the spinner spinning the disc about the hole; a resin supply unit which applies resin onto the disc around the hole; a light irradiation unit which irradiates the resin on the disc mounted on the spinner with light for curing the resin, the light irradiation unit shifting a light irradiation position from an inner circumference side toward an outer circumference of the disc mounted on the spinner, and stopping irradiation of light before the irradiation point reaches the outer circumference of the disc. With this configuration, since irradiation of light is stopped before the irradiation unit reaches the outer circumference, the resin escaping from the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- The method of forming a resin film includes: a resin supply process in which resin is applied on a circular disc, around a hole formed at the center of the disc; a first spinning process in which the disc with the resin applied thereon in the resin supply process is spun at first spin speed; after the first spinning process, a reduction process in which the spin speed is reduced; during or after the reduction process, a light irradiation process in which the resin is cured while an irradiation position at which the resin is cured by light is shifted from the center toward an outer circumference side of the disc; and a light irradiation stopping process in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light. With this configuration, the circular disc with the resin applied thereon is spun at the first spin speed to spread the resin quickly and uniformly on the circular disc. Then the spin speed is reduced, and the resin is irradiated with light for curing while the irradiation position of the light is shifted from the center toward the outer circumference side of the disc. Then, irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- In addition, the program readable by a control device for controlling the resin film forming device which forms a resin film on a circular disc having a center hole executes the following steps: a resin application step in which the resin is applied around a hole of a disc; a spinning step in which the spinner on which the disc with resin applied thereon is mounted is spun at first spin speed; after the spinning step, a reduction step in which the spin speed of the spinner is reduced; after the reduction step, a light irradiation step in which the disc is irradiated with light from the inner circumference side toward the outer circumference side of the disc; and a light irradiation stopping step in which irradiation of light is stopped before the outer circumference of the disc is irradiated with light. With this configuration, since irradiation of light is stopped before the outer circumference of the disc is irradiated with light. In this manner, the resin escaping from the circumference of the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
- The invention may alternatively include the following structures. The invention is a resin film forming device in which the light irradiation unit includes: a light irradiation portion; an arm which supports the light irradiation portion; and a pivot driver which supports the arm, makes the aim pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc.
- With this configuration, an effect is advantageously provided that the pivotal movement facilitates continuous movement, in its precise sense, of the light irradiation unit. In addition, an effect is also advantageously provided that the shifting speed of the light irradiation position can be adjusted by the speed of the pivotal movement.
- The invention is the above-described resin film forming device, in which the light irradiation unit includes: a light irradiation portion; an arm which supports the light irradiation portion; a pivot driver which supports the arm, makes the arm pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc; and a vertical driver connected to the pivot driver, for moving the arm upward to move the light irradiation portion upward when the light irradiation portion reaches the outer circumference of the disc.
- In this configuration, since the distance between the disc and the light irradiation portion becomes long when the arm is moved upward, similar effect to the stopping of light irradiation can be obtained.
- The invention is a method of forming a resin film, which includes: a process of mounting a circular disc having a center hole on a spinner, and making the disc spun about the hole; a process of applying resin onto the disc around the hole; a process of irradiating the disc with light while an irradiation position is shifted from an inner circumference side toward an outer circumference side of the disc mounted on the spinner; and a process of stopping irradiation of light before the light irradiation reaches the outer circumference of the disc.
- With this configuration, since irradiation of light is stopped before the light irradiation reaches the outer circumference, the resin escaping from the disc is not irradiated with light, and the characteristics, such as absorbance and viscosity, of the escaping resin are not influenced by the light. Thus, the resin can be re-used.
-
FIG. 1 is a plan view illustrating a structure of a resin film forming device according to the invention. -
FIG. 2A is a side view illustrating an overall structure and motion of a disc alignment unit. -
FIG. 2B is a partially enlarged cross-sectional view illustrating a state in which the disc alignment unit sucks and holds a disc substrate. -
FIG. 3 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking the resin caught on the coater house, and a control unit. -
FIG. 4 is a perspective view illustrating travelling of an irradiating section of the light irradiation unit. -
FIG. 5 is a time series graph showing a relationship between a spin speed of the disc spinning on the spinner and an ultraviolet irradiation position of the light irradiation unit. -
FIG. 6 is a schematic view showing a relationship between a spreading speed of the resin due to spin of the disc and a speed at which the ultraviolet irradiation position is moved. -
FIG. 7 is a time series graph showing a relationship between a spin speed of the disc spinning on the spinner and an ultraviolet irradiation position of the light irradiation unit. -
FIG. 8 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking theresin 3 caught on the coater house, and a control unit. -
FIG. 9 is a partial cross-sectional block diagram illustrating a spinner, a light irradiation unit, a coater house for catching resin escaping from the disc mounted on the spinner, a resin suction unit for sucking the resin caught on the coater house, and a control unit. -
FIG. 10 is a flow chart illustrating a main part of the method of forming a resin film according to the invention. -
FIG. 11A is a graph showing distribution at radius positions of the resin film on the disc formed in accordance with a conventional method. -
FIG. 11B is a graph showing distribution at radius positions of the resin film on the disc formed in accordance with the invention. -
FIG. 12 is a graph illustrating comparison among absorbance characteristics of resin in an ultraviolet region in which: curve A represents absorbance of an unused resin; curve B represents absorbance of resin escaping from a disc and collected in a process of resin film formation according to the invention; and curve C represents absorbance of resin irradiated with ultraviolet light to an extent that the resin is not cured. - 1, 1′: disc substrates, 2: hole, 3: resin, 4, 5: optical disc, 10: disc mounting arm, 11: turn table, 11 a, 11 b: receiving part, 12: inversion unit, 13: resin supply unit, 13 a: supply nozzle, 14: disc alignment unit, 15: transfer unit, 16 (16A, 16B): spinner, 16 a: receiver, 16 b: spinning axis, 16 c: spin driver, 17 (17A, 17B): light irradiation unit, 18: receiver, 19: transfer unit, 20: turn table, 21: curing unit, 22: turn table, 23: inversion unit, 24: electric discharger, 25: transfer unit, 26: inspection unit, 27: lifting stage, 28: transfer unit, 29; non-defective article table, 30: defective article table, 40: coater house, 41: suction pipe, 42: resin reservoir, 43: suction unit, 46: shutter, 60: control unit, 111: disc receiver, 112: projection, 113: notch, 140: column, 141: arm, 142: suction unit, 143: suction surface, 144: vacuum section, 145: Suspending portion, 146: vacuum tube, 171: irradiation unit, 172: irradiation arm, 173: vertical driver, 174: pivot driver, 175: optical fiber, 176: ultraviolet light source, 178: irradiation control unit, 180: light irradiation unit, 181: LED, 188: LED control unit, R1: position at inner circumference side of disc where ultraviolet light irradiation is started, R2: position at outer circumference side of disc where irradiation of ultraviolet light is stopped, V1, V2, V3: spin speed of disc
- Hereinafter, embodiments of the invention will be described with reference to the drawings. In the drawings, identical reference numerals are given to the identical or corresponding devices, and repeated description thereof will be omitted.
- First, a resin
film forming device 100 according to the invention will be described with reference toFIG. 1 .FIG. 1 is a plan view illustrating a structure of the resinfilm forming device 100 according to the invention. The resinfilm forming device 100 includes adisc mounting arm 10, a turn table 11, aninversion unit 12, aresin supply unit 13, adisc alignment unit 14, atransfer unit 15,spinners light irradiation units disc mounting arm 10 mounts the disc substrate 1 (seeFIG. 3 ) on a receivingpart 11 a of the turn table 11. The turn table 11 sends thedisc substrate 1 mounted on the receivingpart 11 a to processing. Theinversion unit 12 inverts thedisc substrate 1 placed on the receivingpart 11 a. Theresin supply unit 13 applies resin to thedisc substrate 1 around the hole 2 (seeFIG. 3 ). Thedisc alignment unit 14 places adisc substrate 1′ (seeFIG. 3 ) on thedisc substrate 1 onto which theresin 3 has been applied. Thetransfer unit 15 transfers a disc 4 (seeFIG. 3 ) consisting of thedisc substrates resin 3 from the turn table 11 to thespinners spinners spinners disc 4 to spin about thehole 2. Thelight irradiation units disc 4 on thespinners spinners light irradiation units disc 4 spin on thespinners light irradiation units film forming device 100 improves. Thespinners light irradiation units film forming device 100 is made simple, compact and lightweight. When spinning of thedisc 4 and irradiation of light take time, working efficiency of the overall resinfilm forming device 100 can be improved by providing three or more series of thespinners light irradiation units spinners light irradiation units spinner 16 and thelight irradiation unit 17. - The resin
film forming device 100 also includes a receiver 18, atransfer unit 19, a turn table 20, a curingunit 21, a turn table 22, aninversion unit 23, anelectric discharge unit 24, atransfer unit 25, aninspection unit 26, a liftingstage 27, atransfer unit 28, a non-defective article table 29 and a defective article table 30. Thedisc 4 irradiated with light is temporarily placed on the receiver 18. Thetransfer unit 19 transfers thedisc 4 from the receiver 18 to the turn table 20 and from the turn table 20 to the turn table 22. The turn table 20 transfers thedisc 4 to thecuring unit 21. The curingunit 21 re-irradiates thedisc 4 on the turn table 20 with light, thereby completely curing theentire resin 3. The turn table 22 moves thedisc 4 to theinversion unit 23 and to theelectric discharge unit 24. Theelectric discharge unit 24 discharges thedisc 4 and theinversion unit 23 which inverts thedisc 4. Thetransfer unit 25 transfers thedisc 4 from the turn table 22 to theinspection unit 26 and from theinspection unit 26 to the liftingstage 27. Theinspection unit 26 inspects thedisc 4. The liftingstage 27 lifts thedisc 4 to the height of thetransfer unit 28. Thetransfer unit 28 transfers thedisc 4 from the liftingstage 27 to the non-defective article table 29 and to the defective article table 30.Discs 4 defined as non-defective articles in the inspection are placed on the non-defective article table 29.Discs 4 defined as defective articles in the inspection are placed on the defective article table 30. - The
disc substrates disc substrate 1 is a circular thin board, which has acircular hole 2 in the center thereof. The disc is typically circular-shaped, but not limited thereto. For example, thedisc substrate 1 is 120 mm in diameter and 0.6 mm in thickness. The center hole is 15 mm in diameter. However, the size may vary depending on application. Fine grooves constituting spiral grooves or signals are formed on one side of thedisc substrate 1. Thedisc substrate 1 and thedisc substrate 1 have different grooves. These disc substrates are temporary placed near the turn table 11. Thedisc substrate 1 and thedisc substrate 1′ are alternately placed on the receivingpart 11 a of the turn table 11 by thedisc mounting arm 10 with the groove-formed surfaces facing upward. Thedisc mounting arm 10 places thedisc substrates parts 11 a by holding them at the hole from the inside or at the outer circumference from the outside so that thearm 10 does not contact the groove-formed surfaces. - The turn table 11 has twelve receiving
parts 11 a. The number of the receivers is not limited to twelve, but twelve is preferred in that the receivers come to the same position by turns as the turn table 11 intermittently rotates by 30 degrees. A central portion of the receivingpart 11 a is empty space, of which circular periphery is recessed to receive thedisc substrate 1. The circular recess of the receivingpart 11 a opens to outside at the outer circumference of the turn table 11. With this structure in which the receivingpart 11 a opens to outside, a later-described arm of theinversion unit 12 can be inserted from the underside of thedisc substrate 1 placed in the receivingpart 11 a. - The
inversion unit 12 inverts thedisc substrate 1′ placed in the receivingpart 11 a. In order that the twodisc substrates FIG. 3 , theinversion unit 12 inverts thedisc substrate 1′ placed in every second receivingpart 11 a of the turn table 11. In theinversion unit 12, a distal end of the arm holds thedisc substrate 1′ and lifts the same from the receivingpart 11 a. Then, the arm rotates by 180 degrees about the axis to invert thedisc substrate 1′ and place it again in the receivingpart 11 a. Theinversion unit 12 may be provided separately from the turn table 11 such that theinversion unit 12 inverts thedisc substrate 1′ before thedisc substrate 1′ is placed in the turn table 11. - The
resin supply unit 13 applies resin circularly on thedisc substrate 1 around thehole 2. In the resinfilm forming device 100, since the twodisc substrates resin supply unit 13 applies the resin circularly by moving anozzle 13 a over a peripheral circumference of thehole 2 to supply resin. However, thenozzle 13 a may alternatively be fixed and thedisc substrate 1 may rotate slowly. The resin is applied to thenon-inverted disc substrate 1 by thedisc inversion unit 12. That is, the resin is applied to the groove-formed surface of thedisc substrate 1. Theresin supply unit 13 may be provided separately form the turn table 11 so that theresin supply unit 13 applies the resin to thedisc substrate 1 before thedisc substrate 1 is placed in the turn table 11. - As shown in
FIG. 2 , thedisc alignment unit 14 sucks and holds thedisc substrate 1′ that has been inverted by thedisc inversion unit 12, and places thedisc substrate 1′ to align with thedisc substrate 1 in the next receivingpart 11 a.FIG. 2A is a side view illustrating an overall structure and motion of thedisc alignment unit 14.FIG. 2B is a partially enlarged cross-sectional view illustrating a state in which thedisc alignment unit 14 sucks and holds adisc substrate 1′. Thedisc alignment unit 14 includes twosuction units 142 which suck thedisc substrate 1′, anarm 141 from which thesuction units 142 are suspended, and acolumn 140 which hangs the arm at its center (i.e., the midpoint of two suction units 142) and rotate thearmy 180 degrees. Thecolumn 140 hangs thearm 141 at the center thereof via an unillustrated fixing table over the turn table 11 between the twopredetermined receiving parts 11 a. Eachsuction unit 142 is located directly above the corresponding receivingpart 11 a. At the position, thesuction unit 142 sucks and holds thedisc substrate 1′ placed in one receivingpart 11 a, moves thedisc substrate 1′ to the next receivingpart 11 a while rotating thearm 141 by 180 degrees, and then places thedisc substrate 1′ to align with thedisc substrate 1. Thearm 141 may be rotated by 180 degrees by any known method. - Here, with reference to
FIG. 2B , a structure for sucking and holding thedisc substrate 1′ will be described in detail. Thesuction unit 142 includes asuction surface 143 for sucking thedisc substrate 1′. Thesuction surface 143 includes avacuum section 144. Thevacuum section 144 is connected with avacuum tube 146. An unillustrated vacuum device sucks the air to suck thedisc substrate 1′ to thesuction surface 143. Thesuction surface 143 may be formed from a relatively soft material, such as hard rubber, not to damage thedisc substrate 1′ while facilitating vacuum suction. Thesuction unit 142 includes a suspendingportion 145 to suspend from thearm 141. The suspendingportion 145 may be a member to simply suspend from thearm 141 so long as it includes a lifting stage for moving thedisc substrate 1′ and thedisc substrate 1′ upward to a required height at the time of sucking thedisc substrate 1′ and placing it aligned with thedisc substrate 1. However, if the turn table 11 includes no lifting table, the suspendingportion 145 has a structure to extend and contract by a solenoid or other mechanism to vertically move thesuction surface 143. In order to align the twodisc substrates disc substrate 1′, inverted by thedisc inversion unit 12, is lifted by the lifting stage, orsuction surface 143 is moved down by the suspendingportion 145, so that thesuction surface 143 abuts thesubstrate 1′ to suck and hold the same. After moving the lifting stage downward, or retracting the suspendingportion 145 to remove thedisc substrate 1′ upward from thereceiver 11 a, thearm 141 is rotated by 180 degrees to move thedisc substrate 1′ onto thedisc substrate 1 in thenext receiver 11 a. When thedisc substrate 1 is lifted by the lifting stage, or the suspendingportion 145 extends to move thesuction surface 143, i.e., thedisc substrate 1′ downward so that thedisc substrate 1′ is aligned with thedisc substrate 1, thedisc substrate 1′ is released from suction force. When the suction force to thedisc substrate 1′ is released, the lifting stage is moved downward, or the suspendingportion 145 is retracted, and thesuction surface 143 is released over thereceiver 11 a. While adisc substrate 1′ is sucked in acertain receiver 11 a, adisc substrate 1 and adisc substrate 1′ are aligned together in thenext receiver 11 a. - In the foregoing description, the
disc alignment unit 14 includes twosuction units 142, and thearm 141 rotates by 180 degrees to move to thenext receiver 11 a. However, thedisc alignment unit 14 may alternatively include only onesuction unit 142 that is fixed and supported by thearm 141. Thesuction unit 142 may suck and hold thedisc substrate 1′, and the turn table 11 may be rotated by 30 degrees. When thenext disc substrate 1 is positioned directly below thesuction unit 142, thesuction unit 142 may align thedisc substrate 1′ with thedisc substrate 1 at that position. While thedisc substrates 1′ is sucked, held and lifted, the turn table 11 rotates by 30 degrees and aligns thedisc substrate 1′ with thedisc substrate 1 placed in the next receivingpart 11 a. In this manner, the twodisc substrates disc substrate 1′ to be aligned with thedisc substrate 1 from upward without moving, thedisc substrate 1 and thedisc substrate 1′ cannot be misaligned or rotated with each other. In a structure with twosuction units 142, operating time can be reduced. In that structure, theaim 141 is rotated 180 degrees without waiting for the rotation of the turn table 11 to move thedisc substrate 1′, and thedisc substrate 1′ is aligned on thedisc substrate 1. Note that, the structure of thedisc alignment unit 14 is not limited to that illustrated toFIG. 2 . Rather, any structure may be employed so long as it can lift thedisc substrate 1′ and aligns it with thedisc substrate 1. - The
transfer unit 15 transfers the aligneddisc substrates disc 4” altogether with the resin 3) from thereceiver 11 a of the turn table 11 to thespinners transfer unit 15 includes three arms extending perpendicularly to one another. With this configuration, thetransfer unit 15 can transfer thedisc 4 from thereceiver 11 a to thespinner 16A, from thespinner 16A to the receiver 18, and from thereceiver 11 a to thespinner 16B at a time. At the same time, thetransfer unit 15 can transfer thedisc 4 from thespinner 16B to the receiver 18. Thereceiver 11 a, thespinner 16A, the receiver 18 and thespinner 16B are circumferentially disposed at 90 degrees from one another counterclockwise in this order. Thetransfer unit 15 may transfer twodiscs 4 at a time by two arms. However, three arms may reduce a rotation angle required to transfer thedisc 4. If thetransfer unit 15 has four arms, the rotation angle may further be reduced since operation for returning thetransfer unit 15 to the original position can be omitted. - The
spinner 16 makes thedisc 4 spin in order to spread theresin 3 uniformly on thedisc 4 while spinning thedisc 4 at high speed, and to irradiate light from thelight irradiation unit 17 on the entire surface of thedisc 4. Thelight irradiation unit 17 is assembled to thespinner 16. - Here, also referring to
FIG. 3 , thespinner 16 and thelight irradiation unit 17 will be described in more detail.FIG. 3 is a partial cross-sectional block diagram illustrating thespinner 16, thelight irradiation unit 17, thecoater house 40 for catching resin escaping from thedisc 4 mounted on thespinner 16, asuction pipe 41 as the resin suction unit for sucking theresin 3 caught on thecoater house 40, aresin reservoir 42, asuction unit 43, and acontrol unit 60. InFIG. 3 , the dashed line shows a communication channel of control signals. - The
Spinner 16 includes areceiver 16 a, a spinningaxis 16 b, and aspin driver 16 c. Thereceiver 16 a receives thedisc 4 and makes thedisc 4 spin. Thereceiver 16 a. Includes a circular plate on which thedisc 4 is mounted, and a pillar-shaped projection at the center of the plate. The projection is inserted in theholes 2 of thedisc substrates disc 4 and the center of rotation of thereceiver 16 a are aligned with each other. Other than being shaped as a pillar, the projection may also be tapered to facilitate insertion in thehole 2. A pillar-shapedspinning axis 16 b is disposed directly below and at an opposite side of thereceiver 16 a cocentrically with thereceiver 16 a. The other end of spinningaxis 16 b is connected to thespin driver 16 c. Thereceiver 16 a spins about the projection when thespin driver 16 c spins. Thespin driver 16 c includes, for example, a motor and a gearbox for varying the spin speed of thereceiver 16 a. Instead of the gearbox, thespin driver 16 c may include an inverter motor. Any mechanism may be employed which can rotate thereceiver 16 a with varying spin speed. - The
coater house 40 is a container formed to surround thereceiver 16 a. Thecoater house 40 catches on the surrounding wall theresin 3 scattering from thedisc 4 spinning on thespinner 16 and collects theresin 3. In addition, thecoater house 40 collects theresin 3 escaping from thedisc 4. Thecoater house 40 has an opening at the bottom thereof. Asuction pipe 41 is connected with the opening to suck theresin 3 collected in thecoater house 40. The other end of thesuction pipe 41 is connected to aresin reservoir 42. Theresin reservoir 42 is a sealed container which has an opening connected to thesuction pipe 41 and an opening to be connected with asuction unit 43. Theresin reservoir 42 may also include a discharge port (not shown) for sometimes discharging the resin collected in theresin reservoir 42. The discharge port is closed for normal operation. Thesuction unit 43 sucks air through thesuction pipe 41 to such theresin reservoir 42 from the interior of thecoater house 40. Thesuction unit 43 is typically a draft fan. The air sucked from theresin reservoir 42 by thesuction unit 43 is emitted to the atmosphere. A demister (not shown) may be provided at a position where the air is sucked from theresin reservoir 42 by thesuction unit 43. - The
light irradiation unit 17 includes anirradiating section 171, anultraviolet light source 176, anirradiation control unit 178 and anoptical fiber 175. The irradiatingsection 171 emits the ultraviolet light in a spot manner as light beam to irradiate the disc with. The ultravioletlight source 176 generates the ultraviolet light to be irradiated from the irradiatingsection 171. Theirradiation control unit 178 controls generation of the ultraviolet light in the ultravioletlight source 176. Theoptical fiber 175 transmits the ultraviolet light generated in the ultravioletlight source 176 to theirradiating section 171. The irradiatingsection 171 irradiates a surface of thedisc 4 with ultraviolet light, while travelling from the position R1 at the inner circumference side around thehole 2 toward the outer circumference side of thedisc 4. That is, travelling of theirradiating section 171 shifts the irradiation position of the ultraviolet light on the disc surface. The irradiatingsection 171 stops at a position R2 before it travels further toward the outer circumference. The irradiation of the ultraviolet light todisc 4 is completed at the position R2. Travelling of theirradiating section 171 and the irradiation of the ultraviolet light, i.e., generation of the ultraviolet light in the ultravioletlight source 176, are controlled by theirradiation control unit 178. Here, if a disc substrate having a radius of 60 mm (a diameter of 120 mm) is used, the position R1 at the inner circumference side is typically located within a range of 10 to 25 mm in radius (16 to 42% of the disc substrate radius) from the center. The position R2 at the outer circumference side is typically located within a range of 40 to 58 mm in radius (66 to 97% of the disc substrate radius) from the center. - The
control unit 60 controls the timing and the spin speed at which thespin driver 16 c of thespinner 16 makes thereceiver 16 a spin, the timing of thelight irradiation unit 17 irradiate the disc with ultraviolet light, the position of the irradiating section 171 (including travelling speed), and irradiation amount. Thespinner 16 spins and thelight irradiation unit 17 irradiates light in a cooperative manner. Thecontrol unit 60 may control operation of the entire resinfilm forming device 100, and, may also control operation and stopping of thesuction unit 43, for example. - Referring again to
FIG. 4 , the travel of theirradiating section 171 of thelight irradiation unit 17 will be described in more detail.FIG. 4 is a perspective view illustrating the travel of theirradiating section 171 of thelight irradiation unit 17. The irradiatingsection 171 is supported by anirradiation aim 172. The irradiatingsection 171 may be formed as an end surface of theoptical fiber 175. The irradiatingsection 171 may include a lens mechanism at the end surface of theoptical fiber 175, and may have function for concentrating and diffusing the ultraviolet light. Theirradiation arm 172 is supported by thepivot driver 174 via avertical driver 173. Thevertical driver 173 vertically moves up and down. When moving up, it removes theirradiating section 171 away from thedisc 4 so that the irradiation of the ultraviolet light to thedisc 4 is substantially eliminated. Here, the term “the irradiation of the ultraviolet light to thedisc 4 is substantially eliminated” means that, even if the ultraviolet light is irradiated, that irradiation amount is too small to cure theresin 3, and that concept is included in the concept “irradiation is stopped”. Thepivot driver 174 makes theirradiation arm 172 pivot so that theirradiating section 171 travels between the center side and the outer circumference side of thedisc 4. Thepivot driver 174 may be configured to travel over the outer circumference of thedisc 4. Thepivot driver 174 may alternatively be configured to stop before reaching the outer circumference of thedisc 4, or configured such that the rotation of thepivot driver 174 may be restricted not to travel over the outer circumference of thedisc 4. The optical cable for connecting theirradiating section 171 and the ultravioletlight source 176 to transmit the ultraviolet light from the ultravioletlight source 176 to theirradiating section 171 has a flexible structure. Since the optical cable is flexible, it can follow the travellingirradiating section 171 with almost no resistance. - Referring again to
FIG. 1 , description of the resinfilm forming device 100 will be continued. The receiver 18 is a base on which thedisc 4, irradiated with ultraviolet light from thelight irradiation units spinners disk 4 temporarily placed in the receiver 18 is transferred to the turn table 20 by thetransfer unit 19. Thetransfer unit 19 includes two arms opened at a predetermined angle. When the arms are rotated, thedisc 4 can be transferred from the receiver 18 to the turn table 20 and from the turn table 20 to the next turn table 22 at the same time. That is, the position at which the receiver 18 and thedisc 3 of the turn table 20 is placed and removed, and the position at which thedisc 4 of thereceiver 22 is placed are located at equal intervals on a circle about the center of rotation of the arm of thetransfer unit 19. - Four receiving parts are provided in the turn table 20 for receiving the
disc 4. When the turn table 20 rotates, thedisc 4 placed on the receiving parts is transferred to thecuring unit 21. The turn table 20 rotates intermittently by 90 degrees to transfer thedisc 4 placed thereon to thecuring unit 21. The curingdevice 21 irradiates the entire surface of thedisc 4 with ultraviolet light to completely cure theresin 3 on thedisc 4. Unlike the case where theresin 3 is cured by thespinner 16 and thelight irradiation unit 17, in thecuring unit 21, thedisc 4 can be irradiated with ultraviolet light without rotating thedisc 4. The curingunit 21 has a xenon lamp which generates the ultraviolet light in pulses, or a UV generating lamp which generates the ultraviolet light continuously on one or both of the upper and lower surfaces of the turn table 20. After theresin 3 is completely cured by the curingunit 21, thedisc 4 is transferred to the turn table 22 by thetransfer unit 19. - Similar to the turn table 11, the turn table 22 also includes cylindrical receiving parts which open to outside at outer circumferences thereof. The turn table 22 includes four receiving parts and rotates intermittently by 90 degrees. The turn table 22 is rotated to transfer the
disc 4 sequentially to theinversion unit 23 and theelectric discharge unit 24. Theinversion unit 23 has a similar structure to that of theinversion unit 12. Thedisc 4 is optionally inverted when required for later inspection process. For this reason, the receiving part of the turn table 22 also opens to outside. Theelectric discharge unit 24 blows ionized air off to remove dust or the like adhering to the surface of thedisc 4. - The
disc 4 after removing the dust or the like is transferred from the turn table 22 to theinspection unit 26 by thetransfer unit 25. Thetransfer unit 25 includes two arms opened at a predetermined angle. By rotating the two arms, thetransfer unit 25 can transfer thedisc 4 from the turn table 22 to the liftingstage 27 to theinspection unit 26, and from theinspection unit 26 to thenext lifting stage 27 at the same time. That is, the position at which thedisc 4 is removed from the turn table 22, the position of theinspection unit 26, and the position of the liftingstage 27 are placed at equal intervals on a circle about the center of rotation of the arm of thetransfer unit 25. - The
disc 4 is mounted on theinspection unit 26, which inspects thedisc 4 from the underside. Theinspection unit 26 inspects, for example, existence of blemish on thedisc substrates disc substrates spread resin 3, and warping of thedisc 4. The inspecteddisc 4 is transferred to the liftingstage 27 by thetransfer unit 25. The liftingstage 27 includes a stage which moves up and down between the height in which the foregoing processes are performed and the height at which the product is taken out. That is, in the resinfilm forming device 100, theproduct disc 4 is taken out from an upper port. In this manner, thedisc 4 is easily transferred to subsequent processes. The liftingstage 27 moves upward with thedisc 4 placed thereon, and continues moving until thedisc 4 contacts the suction surface (not shown) of thetransfer unit 28. Thetransfer unit 28 includes a pivoting arm, and a suction surface for sucking thedisc 4 below a distal end of the arm. According to the inspection result, thetransfer unit 28, by sucking thedisc 4 at the suction surface at the distal end of the arm and pivoting the arm, transfersdiscs 4 that passed the inspection to the non-defective article table 29, and transfersdiscs 4 that did not pass the inspection to the defective article table 30. The non-defective article table 29 includes eight receiving parts, and rotates intermittently by 45 degrees to receive thedisc 4 as a product one at a time in each receiving part. The defective article table 30 receives thediscs 4 that failed to pass the inspection and thus cannot be used as products. Thediscs 4 may be stacked, and the defective article table 30 may include a guide for supporting the outer periphery of thediscs 4. - Next, a method of fabricating a
disc 4 will be described. A resin film is formed using a resinfilm forming device 100, and twodisc substrates disc 4. Thedisc substrates disc substrate 1 and thedisc substrate 1′ are separately conveyed to the vicinity of the resinfilm forming device 100. Thedisc substrates disc mounting arm 10 with the groove-formed surfaces facing upward. Thedisc substrate 1 and thedisc substrate 1′ are alternately placed in the receivingpart 11 a of the turn table 11 by thedisc mounting arm 10. That is, thedisc substrate 1 and thedisc substrate 1′ are alternately placed in the receivingpart 11 a of the turn table 11. - The turn table 11 rotates intermittently by 30 degrees. The
inversion unit 12 does not invert thedisc 1 when thedisc 1 comes to the position of theinversion unit 12. Theinversion unit 12 inverts thedisc 1′ only when thedisc 1′ comes to the position of theinversion unit 12. Theresin supply unit 13 supplies resin around thehole 2 of thedisc 1, when thedisc 1 comes to the position of theresin supply unit 13. Theresin 3 is circularly applied around thehole 2 while thesupply nozzle 13 a moving around thehole 2. Then, in thedisc alignment unit 14, thedisc 1′ which has been inverted by theinversion unit 12 is placed to align with thedisc 1 having theresin 3 applied thereto. In this manner, thedisc 4 is fabricated. Since thedisc 1′ had been inverted, when thealignment unit 14 moves thedisc 1′ to be aligned with thedisc 1 in the next receivingpart 11 a, twodiscs disc 4 is transferred from the turn table 11 to thespinner 16 by thetransfer unit 15. - When the
disc 4 is mounted on thespinner 16, thespinner 16 begins to spinning with thedisc 4. As shown inFIGS. 3 and 4 , whiledisc 4 is spun, theirradiation arm 172 is made to pivot by thepivot driver 174 to position the irradiatingsection 171 at a position R1 at the inner circumference side. The irradiatingsection 171 is moved downward by thevertical driver 173 to a position where thedisc 4 is irradiated with ultraviolet light of irradiation intensity sufficient to cure theresin 3. Alternatively, the irradiation intensity of the ultraviolet light may be adjusted by concentration. However, irradiation of the ultraviolet light is not started yet. Alternatively, while the ultraviolet light may be continuously irradiated, the irradiatingsection 171 is kept away from thedisc 4 by thevertical driver 173 so that thedisc 4 is substantially not irradiated with ultraviolet light. It is preferred that, when thedisc 4 is placed on or removed from thespinner 16, theirradiation arm 172 is made to pivot by thepivot driver 174 to a retracted position away from the position over thespinner 16 so as not to interfere the mounting and removal of thedisc 4. - Now, also referring to
FIG. 5 , spinning of thedisc 4 on thespinner 16 and the ultraviolet irradiation from thelight irradiation unit 17 will be described.FIG. 5 is a time series graph showing a relationship between a spin speed V of thedisc 4 spinning on thespinner 16 and an ultraviolet irradiation position R of the light irradiation unit. Time is plotted on a horizontal scale, the spin speed of thedisc 4 is plotted on a vertical scale (left side) and the ultraviolet irradiation position of thedisc 4 is plotted on the vertical scale (right side). The spin speed V is represented by the thick line, and the ultraviolet irradiation position R is represented by the thin, marked line. First, spinning begins at the time t0, and the spin speed is increased to a high spin speed V3 as a first spin speed. The high spin speed V3 is 2000 to 10000 (min−1), for example. Then, the high spin speed V3 is kept from time t1 to time t2. Although the time to keep the high spin speed V3 is typically several seconds, the high spin speed V3 is not necessarily kept. In this case, t1 and t2 indicate the same time. When spinning at high speed, theresin 3 circularly applied around thehole 2 spreads toward the outer circumference by centrifugal force, and spreads uniformly between thedisc substrate 1 and thedisc substrate 1′. However, thickness of theresin 3 rarely becomes uniform. Since theresin 3 spreads toward the outer circumference by centrifugal force, the thickness of theresin 3 becomes larger toward the outer circumference side. - At time t2, the spin speed V begins to decrease, and the spin speed V becomes low spin speed V1 at time t3. The low spin speed V1 is slower than the high spin speed V3, and is a spin speed at which the
resin 3 is spread toward the outer circumference by centrifugal force becomes slow. The low spin speed V1 is, for example, several hundreds to 7000 (min−1). A second spin speed does not necessarily represent the low spin speed V1, but represents all the spin speed V reduced from the high spin speed V3. That is, the spin speed V which begins to decrease from the high spin speed V1 is also the second spin speed. When the spin speed V begins to decrease, ultraviolet irradiation will begin from the position R1 at the inner circumference side by thelight irradiation unit 17. It is when the thickness of theresin 3 i.e., the distance between thedisc substrate 1 and thedisc substrate 1′ at the inner circumference side becomes a predetermined length, the irradiation of the ultraviolet light is started. Since theresin 3 is an ultraviolet curing resin, it begins curing when irradiated with ultraviolet light. Theresin 3 may be completely cured by the ultraviolet light from thelight irradiation unit 17. Theresin 3 is not necessarily cured completely, but may be gelled, and cured to such an extent that theresin 3 does not spread over the outer circumference by centrifugal force caused by the subsequent spinning (i.e., thickness of theresin 3 does not become thinner). - While spinning at the low spin speed V1, the
resin 3 in a position other than that irradiated with ultraviolet light continues spreading toward the outer circumference side by centrifugal force. When the thickness of theresin 3 at a position adjacent to the position where theresin 3 has been cured at the side of the outer circumference becomes thinner to a predetermined thickness, theirradiation arm 172 is made to pivot by thepivot driver 174 to move theirradiating section 171, i.e., the position where theresin 3 is irradiated with ultraviolet light, is shifted toward the outer circumference side, andresin 3 at that position is cured. In this manner, by shifting the position at which theresin 3 is irradiated with ultraviolet light fromlight irradiation unit 17 toward the outer circumference side while confirming that the thickness of theresin 3 has become a predetermined thickness, theresin 3 can be cured with uniform thickness. Actually, the time when the thickness of theresin 3 becomes a predetermined thickness is determined depending on viscosity of theresin 3, the spin speed V, and other factors. Thus, the shifting speed of the position at which ultraviolet light is irradiated from thelight irradiation unit 17 toward the outer circumference side can be determined in advance. That is, the film thickness of theresin 3 can be kept more uniform by continuously shifting the ultraviolet irradiation position from the inner circumference side toward the outer circumference side while rotating thedisc 4, and by adjusting the movement speed appropriately. The shift of the ultraviolet irradiation position toward the outer circumference side is achieved by the pivotal movement of thepivot driver 174, and the movement speed is also adjusted by the speed of the pivoting movement. - Here, also referring to
FIG. 6 , a relationship between the spread of theresin 3 toward the outer circumference side and the shift of the position at which theresin 3 is irradiated with ultraviolet light from thelight irradiation unit 17 will be described.FIG. 6 is a schematic view illustrating a relationship between a spreading speed of theresin 3 due to spin of thedisc 4 and a shifting speed of the ultraviolet irradiation position. Even when thedisc 4 is rotated at low spin speed V1, theresin 3 spreads toward the outer circumference side by centrifugal force. The spreading speed of theresin 3 at that time varies depending on the viscosity and the spin speed of theresin 3, or on the predetermined distance between thedisc substrates irradiating section 171 travels toward the outer circumference side, i.e., the speed at which the position of theresin 3 irradiated with ultraviolet light from thelight irradiation unit 17 shifts, is preferably higher than the speed at which theresin 3 is spread, and for example, is 10 to 50 mm/sec. Then, as shown inFIG. 6 , theresin 3 which receives ultraviolet irradiation slightly and tries to spread toward the outer circumference side is caught up to by the moving ultraviolet irradiation, and is cured in response to the ultraviolet irradiation. That is, theresin 3 influenced by the even slight ultraviolet irradiation spreads out toward the outer circumference side, and does not scatter from the outer circumference of thedisc 4. - Since points at the side of the outer circumference on the
disc 4 moves faster than those at the side of the inner circumference, when theirradiating section 171 is moved at a constant travelling speed, irradiation of the ultraviolet light decreased in amount as theirradiating section 171 moves toward the outer circumference side. However, since the amount of ultraviolet light decreases gradually, the degree of curing of theresin 3 does not vary rapidly and not cause unevenness in thickness of theresin 3. That is, the irradiation intensity of the ultraviolet light is determined such that the resin is gelled and cured even at the outer circumference side to an extent that it no more spread from the outer circumference by centrifugal force due to further spinning. Alternatively, the travelling speed of theirradiating section 171 may decrease as it moves toward the outer circumference side. In this case, the degree of curing of theresin 3 can be uniform at both the outer and inner circumferences. Alternatively, the irradiation intensity of the ultraviolet light may be increased as theirradiating section 171 moves toward the outer circumference side, and thetravel irradiating section 171 may travel at a constant speed. In this case, theresin 3 can be cured uniformly with the controlled irradiation intensity of the ultraviolet light. When the film thickness of theresin 3 is tend to become thin as theirradiating section 171 approaches the outer circumference, it is required to increase the travelling speed of theirradiating section 171 as it approaches the outer circumference side. Also in this case, the curing state of theresin 3 can be controlled to increase the irradiation intensity of the ultraviolet light as theirradiating section 171 approaches the outer circumference. The irradiation intensity of the ultraviolet light may be controlled by altering generating amount of the ultraviolet light in an ultravioletlight source 176. When theirradiating section 171 has a lens mechanism, the irradiation intensity of the ultraviolet light may be controlled by adjusting the lens. Alternatively, the irradiation intensity of the ultraviolet light may be controlled by a vertical movement of thevertical driver 173. Referring again toFIG. 5 , description on the spin of thedisc 4 on thespinner 16 and the ultraviolet irradiation of thelight irradiation unit 17 will be continued. The position R at which theresin 3 is irradiated with ultraviolet light by thelight irradiation unit 17 is stopped at the position R2 before thelight irradiation unit 17 reaches the outer circumference of thedisc 4. Then, thespinner 16 keeps spinning at the low spin speed V1 until time t5 when the thickness of theresin 3 outside of a range cured in response to the irradiation of ultraviolet light, i.e., theresin 3 in the range where no ultraviolet light has been irradiated, obtains predetermined thickness. At the time t5, the spin speed V of thespinner 16 is reduced, and becomes 0 (zero) at time t6. While thespinner 16 keeps spinning at the low spin speed V1, the resin is scattering from the outer circumference of thedisc 4. When the ultraviolet light irradiation unit reaches the outer circumference of thedisc 4, a portion of theresin 3 that has been irradiated with ultraviolet light but has not cured begins scattering. The irradiation of the ultraviolet light by thelight irradiation unit 17 stops when theirradiating section 171 reaches the position R2. The irradiation of the ultraviolet light may be stopped by stopping the generation of ultraviolet light in the ultravioletlight source 176. Alternatively, the irradiation of the ultraviolet light may be stopped by separating theirradiating section 171 from thedisc 4 byvertical driver 173 to substantially eliminate irradiation of the ultraviolet light to thedisc 4. Then, the irradiatingsection 171 and theirradiation arm 172 are retracted to a standby position by pivoting movement of thepivot driver 174. In this manner, the movement of thepivot driver 174 and thevertical driver 173 may cause theirradiating section 171 and theirradiation arm 172 that otherwise interfere the movement of the mounting or removal of thedisc 4 to standby, and cause the irradiation to start or stop. As a result, the device configuration becomes simple and the operating time can be reduced. The height of theirradiating section 171 of thelight irradiation unit 17 may be determined in advance suitable to irradiate ultraviolet light to the surface of thedisc 4 mounted on thereceiver 16 a of thespinner 16. In this manner, since thedisc 4 can be irradiated at a predetermined range only by the pivoting operation of thepivot driver 174 without operating thevertical driver 173, the operating time can be reduced. - Once the
resin 3 is irradiated with ultraviolet light, the ultraviolet light absorbance characteristic, viscosity, and other characteristics of theresin 3 varies and it is thus difficult to mix the irradiated resin with new resin to re-use the same. Thus, the ultraviolet irradiation is stopped at the position R2 slightly before the irradiation unit reaches the outer circumference of thedisc 4 so that theresin 3 at the outermost side is not irradiated with ultraviolet light. Spinning is controlled to prevent scattering of the irradiated resin due to further spinning of thedisc 4. In this manner, mixing of the resin irradiated with ultraviolet light with the resin scattering from thedisc 4 can be prevented. As described above, theresin 3 which receives slight ultraviolet irradiation is prevented from spreading toward the outer circumference and scattering from the outer circumference of thedisc 4. Thus, mixing of the resin irradiated with ultraviolet light with the resin scattering from thedisc 4 can be prevented. - As shown in
FIG. 3 , theresin 3 scattered from thedisc 4 impinges on the wall of thecoater house 40, naturally falls down and collected on the bottom surface of thecoater house 40. At that time, air is sucked from thecoater house 40 via theresin reservoir 42 and thesuction pipe 41, when thesuction unit 43 sucks air. The central portion of thecoater house 40 is closed by thereceiver 16 a of thespinner 16. Thus, when air is sucked toward thesuction pipe 41 from the circumference of thereceiver 16 a, downward air flow is formed around thedisc 4. Further, air flow from the bottom surface of thecoater house 40 to thesuction pipe 41 is also formed. Therefore, theresin 3 scattering from thedisc 4 is also influenced by the air flow to flow into thesuction pipe 41. Theresin 3 flown into thesuction pipe 41 is collected on the bottom of theresin reservoir 42. Since theresin reservoir 42 includes an upper opening communicating with thesuction unit 43, only air is sucked by thesuction unit 43. Theresin 3 is thus stored in theresin reservoir 42. Although only onesuction pipe 41 is shown inFIG. 3 ,plural suction pipes 41 may be provided and connected to single orplural resin reservoirs 42. When the viscosity of the resin is especially high, providingplural suction pipes 41 on the bottom of thecoater house 40 may facilitate collection of theresin 3 in theresin reservoir 42. Theresin 3 collected in theresin reservoir 42 is taken out suitably and is re-used as resin. - As shown in
FIG. 7 , the rotation may be stopped after the irradiation of the ultraviolet light is stopped and the spin speed V is once increased to the spin speed V2 of medium speed.FIG. 7 is a time series graph like that ofFIG. 5 showing a relationship between a spin speed V of thedisc 4 spinning on thespinner 16 and an ultraviolet irradiation position R of thelight irradiation unit 17. Time is plotted on a horizontal scale, the spin speed of thedisc 4 is plotted on a vertical scale (left side) and the ultraviolet irradiation position of thedisc 4 is plotted on the vertical scale (right side). The spin speed V is represented by the thick line, and the ultraviolet irradiation position R is represented by the thin, marked line. As shown inFIG. 7 , the spin speed V is increased to spin speed V2 at time t7 after theresin 3 is irradiated with ultraviolet light before the irradiation unit reaches the outer circumference and theresin 3 is cured. Thus, theresin 3 at the outer circumference which has not been cured can be rapidly made thin to improve working efficiency. The spin speed V2 is speed at which the cured resin does not scatter due to the spinning. Particularly when the spreading and curing of theresin 3 is a bottleneck in the operating process in the resinfilm forming device 100, even slight reduction in time may contribute to the improvement in working efficiency of the resinfilm forming device 100. Thedisc 4 is not necessarily irradiated with ultraviolet light while spinning at a certain low rotation speed V1. Thedisc 4 may alternatively be irradiated with ultraviolet light while the spin speed of thedisc 4 is gradually reduced from the spin speed V3 to the spin speed V1. That is, the spin speed can be reduced from the high spin speed V3 to the low spin speed V1 during the time period in which the ultraviolet light is irradiated (from time t2 to time t4). In this case, no time t3 exists in the graph ofFIG. 5 orFIG. 7 , and the spin speed is reduced from V3 to V1 from during time t2 and time t4. Although the spin speed is reduced linearly with respect to the time inFIG. 5 orFIG. 7 , the spin speed reduction is not necessary linear. During time t3 and time t4, the spin speed is not necessarily constant, but may be increased or decreased depending on the state of film thickness. Increase or decrease of the spin speed in this time period can control the film thickness of thedisc 4 highly precisely. - Now, referring again to
FIG. 1 , description will be continued on the method of fabricating thedisc 4 in which twodisc substrates film forming device 100. Thedisc 4 is placed in the receiver 18 by thetransfer unit 15 from thespinners transfer unit 15 has three arms and the angles among the arms correspond to the angles among a position in the receivingpart 11 a of the turn table 11 at which thedisc 4 is taken out, thespinner 16 and the receiver 18. Thus, transfer of thedisc 4 before spreading and curing of theresin 3 from the receivingpart 11 a to thespinner 16, and transfer of thedisc 4 after spreading and curing of theresin 3 from thespinner 16 to the receiver 18 can be efficiently performed at the same time. Thedisc 4 temporarily placed in the receiver 18 is transferred to the receiving part of the turn table 20 by thetransfer unit 19. By transferring thedisc 4 to the turn table 20 from thespinner 16 via the receiver 18, even if timing difference is generated between the operation of thespinner 16 and the operation of the turn table 20, the resinfilm forming device 100 works without inconvenience. The receiver 18 and thetransfer unit 19 are not necessarily provided, and thedisc 4 may be transferred to the turn table 20 from thespinner 16 by thetransfer unit 15. - The turn table 20 rotates intermittently by 90 degrees to transfer the
disc 4 to thecuring unit 21 and returns thedisc 4 to the position at which thedisc 4 is placed. Since thedisc 4 is placed and removed at the same position on the turn table 20, asingle transfer unit 19 can be used to place and remove thedisc 4. The curingunit 21 irradiates theentire disc 4 with ultraviolet light so as to completely cure theresin 3 that has not received irradiation of the ultraviolet light by thelight irradiation unit 17, and also completely cure semi-cured resin. Here, when theresin 3 is completely cured, it is solidified. Thedisc 4 with completely curedresin 3 is transferred to the turn table 22 by thetransfer unit 19. The positional relationship of the receiver 18, the turn table 20 and the turn table 22 corresponds to the angle made by two arms of thetransfer unit 19. For this reason, like thetransfer unit 15, transfer of thedisc 4 from the receiver 18 to the turn table 20 and transfer of thedisc 4 from the turn table 20 to the turn table 22 can be efficiently performed at the same time. - The turn table 22 sends the
disc 4 to theinversion unit 23 and theelectric discharge unit 24 by rotating intermittently by 90 degrees. Theinversion unit 23 inverts thedisc 4 for later inspection depending on the state of the film formed on thedisc 4. Then, ionized air is blown off from theelectric discharge unit 24 to the upper and lower surfaces of thedisc 4 to remove any dust or other material adhering on the surface ofdisc 4, thereby cleaning the surface. Thedisc 4 with clean surface is transferred to theinspection unit 26 by thetransfer unit 25. Theinspection unit 26 inspects thedisc 4 as a product. Theinspection unit 26 inspects, for example, misalignment between thedisc substrate 1 and thedisc substrate 1′ and existence of blemish. Since dust or other material is removed by theelectric discharge unit 24, the dust or other material cannot be wrongly considered as blemish, or thedisc substrates - The
disc 4 inspected by theinspection unit 26 is transferred to the liftingstage 27 by thetransfer unit 25. The positional relationship among the position at which thedisc 4 is taken out on the turn table 22, the position of theinspection unit 26 and the position of the liftingstage 27 also corresponds to the angle made by the two arms of thetransfer unit 25. In this manner, like thetransfer units disc 4 from the turn table 22 to theinspection unit 26 and transfer of thedisc 4 to the liftingstage 27 from theinspection unit 26 can be performed efficiently at the same time. Thedisc 4 is lifted by the liftingstage 27, made to abut the undersurface of the distal end of the arm of thetransfer unit 28, and is sucked and held by the suction unit provided at the undersurface of the arm. Thedisc 4 sucked and held by thetransfer unit 28 is transferred to the non-defective article table 29 if thedisc 4 passed the inspection, and to the defective article table 30 if thedisc 4 failed to pass the inspection. Thediscs 4 placed on the non-defective article table 29 are fed to subsequent processes and then shipped. Thediscs 4 placed on the defective article table 30 are processed as defective articles. In order to prevent that the height of thediscs 4 transferred to the non-defective article table 29 or the defective article table 30 by the liftingstage 27 becomes too large, thediscs 4 may be stacked on the non-defective article table 29 or the defective article table 30. Since the position at which thedisc 4 is taken out from the resinfilm forming device 100 by the liftingstage 27 is high, subsequent processes are easy to conduct. Devices required with high positional accuracy, such as the turn table 11, thespinner 16 and thelight irradiation unit 17 can be arranged at low, stable positions. However, the non-defective article table 29, the defective article table 30 and the like may be placed at the same height. In this case, the liftingstage 27 may be omitted. - Next, with reference to
FIG. 8 , another example will be described in which the irradiation position is shifted by thelight irradiation unit 17 from the inner circumference side toward the outer circumference side of adisc 5, and irradiation of light is stopped before thelight irradiation unit 17 reaches the outer circumference.FIG. 8 is a partial cross section block diagram likeFIG. 3 , which illustrates thespinner 16, thelight irradiation unit 17, thecoater house 40 for catchingresin 3 escaping from thedisc 4 mounted on thespinner 16, asuction pipe 41 as the resin suction unit for sucking theresin 3 caught on thecoater house 40, aresin reservoir 42, asuction unit 43, and acontrol unit 60. InFIG. 8 , dashed line shows a communication channel of control signals. Although thedisc 5 is shown inFIG. 8 , which is different from thedisc 4 fabricated by bonding two disc substrates together,disc 4 may also be used. Thedisc 5 is fabricated by forming aresin film 3 as a protective layer on a single disc substrate. -
FIG. 8 is different fromFIG. 3 in that ashutter 46 is provided to extend from a side wall of thecoater house 40. Theshutter 46 is for shutting the irradiation of the ultraviolet light from the irradiatingsection 171 of thelight irradiation unit 17 onto thedisc 5. That is, a board for blocking the ultraviolet light is provided as theshutter 46 between the irradiatingsection 171 and thedisc 5 in a course of theirradiating section 171 at the side of the outer circumference from the position R2 at which the irradiation of ultraviolet light is stopped. By providing theshutter 46, even if theirradiating section 171 does not stop, or even if theirradiating section 171 is not moved upward apart from thedisc 5, theshutter 46 blocks the ultraviolet light. In this manner, irradiation of the ultraviolet light to thedisc 5 is stopped. - The
shutter 46 may be rotatable with the side wall of thecoater house 40 as a rotation support. Theshutter 46 may also be foldable or retractable. With these configurations, theshutter 46 is preferably retracted so as not to interfere with the transfer of thedisc 5 at the time of mounting and removal of thedisc 5. Alternatively, theshutter 46 may only be disposed directly under the linear or circular path of theirradiating section 171. For this reason, thedisc 5 may be inclined during mounting and removal so as not interfere with theshutter 46. - Next, with reference to
FIG. 9 , another example will be described in which the irradiation position is shifted by thelight irradiation unit 180 from the inner circumference side toward the outer circumference side of adisc 4, and irradiation of light is stopped before thelight irradiation unit 180 reaches the outer circumference.FIG. 9 is a partial cross section block diagram which illustrates thespinner 16, thelight irradiation unit 180, thecoater house 40 for catchingresin 3 escaping from thedisc 4 mounted on thespinner 16, asuction pipe 41 as the resin suction unit for sucking theresin 3 caught on thecoater house 40, aresin reservoir 42, asuction unit 43, and acontrol unit 60. InFIG. 9 , dashed line shows a communication channel of control signals. Thelight irradiation unit 180 is not structured to irradiate ultraviolet light while theirradiating section 171 is moved. In thelight irradiation unit 180, closely arranged light emitting diodes (LEDs) 181 a, 181 b . . . turn on in sequence. With this configuration, the irradiation position is shifted from the inside toward the outside of thedisc 4. Since theLED 181 j of outermost periphery is positioned within the outer circumference of thedisc 4, irradiation of the ultraviolet light stops within the outer circumference of thedisc 4. AlthoughFIG. 9 includes tenLEDs 181 a to 181 j, more LEDs may also be provided. The distance between each of theLEDs 181 a to 181 j is set to be, for example, 5 mm or less and may also be 2 mm or less. The LEDs turn on from the 181 a at the inside of thedisc 4. Continuous turning-on of the LEDs provides continuous irradiation. The irradiation position of the ultraviolet light is not continuously shifted in its precise sense. However, whenmultiple LEDs 181 a to 181 j emit light sequentially toward the outer circumference from the inner circumference side, the resin cures sequentially toward the outer circumference side from the inner circumference side. For this reason, it will move continuously substantially. The LEDs may be arranged linearly in the radial direction of thedisc 4, or may be arranged diagonally, or in a checkerboard pattern. It suffices that the LED emits ultraviolet light while continuously moving in the radial direction of thedisc 4. The ultraviolet light generator is not limited to the LED and other lamps may alternatively be used. The LED, however, is employed in the description herein. - In the
light irradiation unit 180, each of theLEDs 181 a to 181 j is turned on every 0 second. That is, when the LED at the inner circumference side is turned off, the LED at the outer circumference side is turned on simultaneously. There may be slight interval of lighting time such as shorter than 0.1 seconds. The lighting time may also be slightly overlapped. In any case, theresin 3 is irradiated with ultraviolet light sequentially from the inner side toward the outer side so that the film thickness of theresin 3 becomes uniform at predetermined thickness. Turning-on and turning-off of theLEDs 181 a to 181 j are controlled by theLED controller 188. TheLED controller 188 is preferably controlled by thecontrol unit 60 to adjust timing with spinning of thespinner 16 or mounting of thedisc 4. Thelight irradiation units 180 has a structure for sequentially turning the LEDs on and off from the inner circumference side toward the outer circumference side, so as to continuously shift the irradiation position from the inner circumference side toward the outer circumference side. With the structure, mechanical moving parts decrease in number, and thus the device can be simplified to reduce occurrence of mechanical malfunction. In a structure in which theirradiating section 171 travels via theirradiation arm 172 by pivotal movement of thepivot driver 174 as in thelight irradiation unit 17, it is easy to continuously, in its precise sense, shift the ultraviolet irradiation position. It is easy to retract theirradiating section 171 and theirradiation arm 172 from the position above thespinner 16, and thedisc 4 is easily mounted on and removed from the spinner. - It has been described that, in the resin
film forming device 100 as shown inFIG. 1 , thedisc 4 is transferred to the processing units such as theresin supply unit 13 and the curingunit 21 via the turn tables 11, 20 and 22. However, the processing unit provided at the turn tables is not limited to those shown inFIG. 1 . Instead of the turn tables, thedisc 4 may be conveyed on, for example, a conveyor belt sequentially to the processing units. - It has been described in the resin
film forming device 100 that the resin film is formed as an adhesive for bonding thedisc substrates resin 3 interposed therebetween. However, the resinfilm forming device 100 may be used as a device for forming a resin film as a protective layer of thedisc substrate 1 as thedisc 5 shown inFIG. 8 . Alternatively, the resinfilm forming device 100 may be formed without adisc alignment unit 14 or other units. The process of spreading and curing the resin as described above may be used in a device for forming a protective layer. In this manner, the same advantageous effects can be obtained. - Here, with reference to
FIG. 10 , the method of forming the resin film will be summarized.FIG. 10 is a flow chart illustrating a main part of the method of forming a resin film according to the invention. First, the resin is circularly applied to the disc substrate around the hole (Step S10). Optionally, the disc substrate is aligned with a surface of another disc substrate on which the resin has been applied (Step S12). Alignment of the disc substrates may be omitted and Step S12 may be skipped. The disc with resin applied to the disc substrate, or the disc fabricated by disc substrates aligned with each other is mounted on the spinner (Step S20). Alternatively, the resin may be applied to the disc (Step S10) after the disc is mounted on the spinner (Step S20). - The disc is made to spin at high speed on the spinner (Step S30), and then the spin speed is reduced (Step S40). During or after the reduction in spin speed, irradiation of the ultraviolet light is started at a position at the inner circumference side of the disc (Step S50). The irradiation position of the ultraviolet light is shifted from the inner circumference side toward the outer circumference side of the disc (Step S60). Irradiation is stopped before the irradiation position of the ultraviolet light reaches the outer circumference of the disc (Step S70). The resin escaping from the disc while the disc is spinning is collected (Step S80). In the flow chart of
FIG. 10 , it is illustrated that the resin is collected (Step S80) after the irradiation of the ultraviolet light is stopped (Step S70). However, the resin may also be collected while the disc is spinning (Steps S30 to S70). Then, the disc is stopped spinning (Step S90). Note that, the spinning of the disc is not necessarily stopped completely, but may be reduced to such speed that the resin no more escapes by centrifugal force. Then, the entire surface of the disc is irradiated with ultraviolet light to completely cure the resin (Step S100). In a case where the resin irradiated with the moving ultraviolet light irradiation unit has been completely cured (Steps S50 to S70), the ultraviolet light in Step S100 may be irradiated only to the vicinity of the outer circumference where the resin remains uncured. - The above-described method of forming the resin film may be performed not in the resin
film forming device 100 but a resin supply unit, a spinner, and an ultraviolet light irradiation unit of any structure. For example, independent devices may be used employed. The resin film may be formed by a program incorporated in a control device for controlling the above-described method of forming the resin film. -
FIG. 11 shows distribution in thickness of the resin film formed by the device and method of forming the resin film according to the invention, and distribution in thickness of a resin film formed by conventional technology.FIG. 11A shows distribution at radius positions of the resin film on the disc formed in accordance with a conventional method.FIG. 11B shows distribution at radius positions of the resin film on the disc formed in accordance with the invention. In bothFIGS. 11A and 11B , radius position on the disc is plotted on the horizontal scale, and the maximum and minimum values of the measured thickness of the resin film (left side) and difference between the maximum and minimum values of the resin film thickness (variation in thickness in the circumferential direction) are plotted on the vertical scale. - Here, the distribution at radius positions of the resin film on the disc formed in accordance with a conventional method means the distribution obtained in the following manner: as described in JP-A No. 2004-280927, the resin is circularly applied to a disc substrate around a hole; the resin is spread due to high-speed spinning of the disc substrate, then the disc substrate is made to spin at low spin speed at which the resin is no more spread out; at the same time, the resin of predetermined thickness is irradiated with ultraviolet light from the inner circumference side; after the resin is spread again while spinning the disc substrate at high speed, the resin of predetermined thickness is irradiated with ultraviolet light while the disc substrate spins at low spin speed; and the thickness of each radius positions is measured on a cocentric circle of the resin film formed by repeating the process. Whereas the distribution at radius positions of the resin film on the disc formed in accordance with the invention means the distribution of thickness of the formed resin film obtained in the following manner: after circularly applying resin to a disc substrate around a hole, the resin is spread due to high-speed spinning of the disc substrate; the spin speed is reduced to reduce the spreading speed of the resin; the disc substrate is irradiated with ultraviolet light, while the irradiation position is shifted from the inner circumference side to the outer circumference side so that the resin film obtains predetermined thickness; and irradiation is stopped before the irradiation unit reaches the outer circumference.
- Even in the resin film formed by the conventional technology shown in
FIG. 11A , variation in distribution of thickness is suppressed small. However, variation in the distribution of thickness of the resin film formed by the invention shown inFIG. 11B is still smaller, which means that the resin film has more uniform thickness. This is because the disc substrate is continuously irradiated with ultraviolet light from the inner circumference to the outer circumference while the resin is spread at high first spin speed, and then at low second spin speed. Therefore, the disc of the invention is preferably used as a disc with higher accuracy, such as a next generation high-capacity optical disc. -
FIG. 12 is a graph illustrating comparison of absorbance characteristic of the resin in the ultraviolet region. The wavelength in the ultraviolet region is plotted on the horizontal scale, and absorbance is plotted on the vertical scale. InFIG. 12 , curve A represents absorbance of unused resin, curve B represents absorbance of the resin escaping from the disc and collected in the resin film formation according to the invention, and curve C represents absorbance of the resin after being irradiated with ultraviolet light to such an extent that the resin remains uncured. The degree of curing reaction with absorbance of the ultraviolet curing resin can be determined from the graph. As the ultraviolet curing reaction progresses, the absorbance in the ultraviolet wavelength area changes. The absorbance of the resin irradiated with ultraviolet light shown by curve C changes greatly as compared with the absorbance of the resin before being irradiated with ultraviolet light. It is found that the ultraviolet curing reaction has progressed. As compared with the curve C, absorbance of the resin escaping from the disc and collected in resin film formation according to the invention of curve B did not change at all compared with absorbance of curve A, and curve B overlaps with curve A. Thus, it can be found that the resin escaping from the disc and collected in the resin film formation: process according to the invention did not undergo any ultraviolet curing reaction and thus can be re-used. - As described above, a resin film forming device is provided in which escaping resin can be re-used while characteristics such as absorbance and viscosity of the resin remain static.
Claims (9)
1. A resin film forming device, comprising:
a spinner on which a circular disc having a hole at the center thereof is mounted, the spinner making the disc spin about the hole;
a resin supply unit which applies resin onto the disc around the hole; and
a light irradiation unit which irradiates the resin on the disc mounted on the spinner with light to cure the resin, the light irradiation unit shifting a light irradiation position from an inner circumference side toward an outer circumference side of the disc mounted on the spinner, and stopping the light irradiation before the light irradiation unit reaches the outer circumference of the disc.
2. A resin film forming device according to claim 1 , wherein the light irradiation unit continuously shifts the light irradiation position from the inner circumference side toward the outer circumference side of the disc mounted on the spinner.
3. A resin film forming device according to claim 1 , wherein:
the spinner makes the disc spin at first spin speed to spread the resin applied around the hole, and then makes the disc spin at second spin speed slower than the first spin speed; and
the light irradiation unit begins irradiating the disc with light while the spinner spins the disc at the second spin speed.
4. A resin film forming device according to claim 1 , further comprising a disc alignment unit which places, on the disc having thereon the resin applied by the resin supply unit, another disc from a side at which the resin is given.
5. A resin film forming device according to claim 1 , further comprising a resin suction unit which sucks the resin escaping from the disc mounted on the spinner.
6. A resin film forming device according to claim 1 , further comprising a curing unit which re-irradiates light on the resin which has been spread and irradiated with light by the light irradiation unit.
7. A resin film forming device according to claim 1 , wherein
the light irradiation unit includes:
a light irradiation portion;
an arm which supports the light irradiation portion; and
a pivot driver which supports the arm and makes the arm pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc.
8. A resin film forming device according to claim 1 , wherein
the light irradiation unit includes:
a light irradiation portion;
an arm which supports the light irradiation portion;
a pivot driver which supports the arm and makes the arm pivot and travel from the inner circumference side toward the outer circumference side of the spinning disc; and
a vertical driver connected to the pivot drivel; for moving the arm upward to thus move the light irradiation portion upward when the light irradiation portion is moved toward the outer circumference of the disc.
9. A method of forming a resin film, comprising:
a process of mounting a circular disc having a hole at the center thereof on a spinner, and making the disc spin about the hole;
a process of applying resin onto the disc around the hole;
a process of irradiating the disc with light while shifting an irradiation position from an inner circumference side toward an outer circumference side of the disc mounted on the spinner; and
a process of stopping irradiation of light before the irradiation position reaches the outer circumference of the disc.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2006-029211 | 2006-02-07 | ||
JP2006029211A JP4588645B2 (en) | 2006-02-07 | 2006-02-07 | Resin film forming apparatus, method and program |
PCT/JP2007/051934 WO2007091524A1 (en) | 2006-02-07 | 2007-02-05 | Apparatus, method and program for forming resin film |
Publications (1)
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US20090029063A1 true US20090029063A1 (en) | 2009-01-29 |
Family
ID=38345122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US12/223,663 Abandoned US20090029063A1 (en) | 2006-02-07 | 2007-02-05 | Resin Film Forming Device, Method and Program of the Same |
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US (1) | US20090029063A1 (en) |
JP (1) | JP4588645B2 (en) |
TW (1) | TWI338894B (en) |
WO (1) | WO2007091524A1 (en) |
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US20100301233A1 (en) * | 2009-05-26 | 2010-12-02 | Masayuki Yamamoto | Ultraviolet irradiation device |
US20170238036A1 (en) * | 2012-12-04 | 2017-08-17 | Saturn Licensing Llc | Broadcast transition channel |
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JP2009245510A (en) * | 2008-03-31 | 2009-10-22 | Yasuhiko Aoyama | Spin coater, recording medium and spin coating method |
JP6049597B2 (en) * | 2013-11-28 | 2016-12-21 | Towa株式会社 | Resin material supply method and supply mechanism of compression molding apparatus, and compression molding method and compression molding apparatus |
JP6655882B2 (en) * | 2015-03-31 | 2020-03-04 | 日本電産サンキョー株式会社 | Manufacturing equipment for lenses with light-blocking layers |
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JP7120120B2 (en) * | 2019-03-29 | 2022-08-17 | 新東工業株式会社 | Additive Manufacturing Apparatus and Additive Manufacturing Method |
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US20170238036A1 (en) * | 2012-12-04 | 2017-08-17 | Saturn Licensing Llc | Broadcast transition channel |
Also Published As
Publication number | Publication date |
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TWI338894B (en) | 2011-03-11 |
JP2007209839A (en) | 2007-08-23 |
TW200802361A (en) | 2008-01-01 |
JP4588645B2 (en) | 2010-12-01 |
WO2007091524A1 (en) | 2007-08-16 |
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Owner name: ORIGIN ELECTRIC COMPANY, LIMITED, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KOKAJI, HIDEYUKI;OZAWA, NAOTO;REEL/FRAME:021385/0356 Effective date: 20080805 |
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