US20090127974A1 - Small piezoelectric or electrostrictive linear motor - Google Patents
Small piezoelectric or electrostrictive linear motor Download PDFInfo
- Publication number
- US20090127974A1 US20090127974A1 US12/357,438 US35743809A US2009127974A1 US 20090127974 A1 US20090127974 A1 US 20090127974A1 US 35743809 A US35743809 A US 35743809A US 2009127974 A1 US2009127974 A1 US 2009127974A1
- Authority
- US
- United States
- Prior art keywords
- piezoelectric
- movable shaft
- electrostrictive
- movable
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000758 substrate Substances 0.000 claims abstract description 117
- 238000006073 displacement reaction Methods 0.000 claims description 32
- 238000005452 bending Methods 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 19
- 230000004044 response Effects 0.000 claims description 12
- 230000005684 electric field Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 5
- 238000010276 construction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920001690 polydopamine Polymers 0.000 description 3
- 229910000906 Bronze Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011222 crystalline ceramic Substances 0.000 description 1
- 229910002106 crystalline ceramic Inorganic materials 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Definitions
- the following description relates to a piezoelectric/electrostrictive linear motor, and more particularly, to a small piezoelectric/electrostrictive ultrasonic linear motor which may be installed in cell phones or PDAs, etc., to drive, for example, their camera lenses and in which a movable shaft is coupled to a unimorph or bimorph, which is made by attaching a piezoelectric or electrostrictive substrate to an elastic body, so that a movable body fitted over the movable shaft is linearly moved along the movable shaft by vibration of the piezoelectric or electrostrictive substrate.
- Small stepping motors which may be installed in cell phones or PDAs, etc., to drive their camera lenses, are generally provided with reduction gears and cams to convert high speed rotation into linear motion. Furthermore, in conventional small stepping motors, when rotated or reversely rotated, backlash may occur, thus resulting in error. Therefore, such small stepping motors have been limitedly used. In addition, the small stepping motor is problematic in that high electric current is required and excessive heat is generated.
- a driving method of using a traveling wave generated by a flexural wave there are a driving method which uses a standing wave and in which a linear motor is provided with both a longitudinal vibration actuator and a transverse vibration actuator so that a movable unit is operated by repeated vertical and horizontal vibration.
- Standing wave type linear motors are provided with vibrators having different operating modes and use multiple vibrations generated by them.
- Such a standing wave type linear motor includes a piezoelectric/electrostrictive actuator which vibrates vertically and horizontally, and a contact part which transmits mechanical displacement to a movable body which is moving.
- Piezoelectric effect means that an electric charge is generated in a crystalline body when the crystalline body receives pressure, or, conversely, when an electric field is applied to the crystalline body, the crystalline body is mechanically displaced.
- a piezoelectric substrate having such piezoelectric effect is characterized in that mechanical displacement is induced according to the polarization direction and the direction of the electric field.
- FIGS. 1( a ) through 1 ( c ) show mechanical displacement of a piezoelectric substrate 10 according to the polarization direction and the direction of the electric field.
- FIG. 1( a ) shows displacement of the piezoelectric substrate 10 when an electric field is applied to the piezoelectric substrate 10 polarized in a predetermined direction.
- the piezoelectric substrate 10 is expanded in a direction designated by the reference character z and is constricted by Poisson's ratio in a direction designated by the reference character x.
- the piezoelectric substrate 10 is constricted in a direction z and is expanded in a direction x.
- FIG. 1( b ) illustrates displacement of the piezoelectric substrate 10 attached to an elastic body 20 .
- the piezoelectric substrate 10 is displaced in the same manner as that described for the case of FIG. 1( a ), and bending displacement of the elastic body 20 attached to the piezoelectric substrate 10 is induced by the expansion and constriction of the piezoelectric substrate 10 .
- the dotted line of FIG. 1( b ) denotes the shape of the elastic body 20 bent when the piezoelectric substrate 10 is expanded in a direction z. Such bending displacement of the elastic body 20 is achieved by the expansion of the piezoelectric substrate 10 while a fixed edge 25 of the elastic body 20 is held at a predetermined position.
- FIG. 1( c ) illustrates the elastic body 20 bent in a direction z by the expansion of the piezoelectric substrate 10 in a direction x.
- the direction of the electric field is instantaneously changed, the displacement state of the piezoelectric substrate 10 , which was in the state of FIG. 1( b ), is quickly changed.
- the elastic body 20 is quickly bent in a direction z by instantaneous acceleration and expansion of the piezoelectric substrate 10 in the direction x.
- the bending displacement of the piezoelectric substrate when an electric field is applied, has been described, even if an electrostrictive substrate is used in place of the piezoelectric substrate, the same bending displacement as that of the case of the piezoelectric substrate is induced.
- the electrostriction means that an electrostrictive body is mechanically displaced when an electric field is applied to the electrostrictive body. Even if the piezoelectric substrate of FIG. 1 is replaced with the electrostrictive substrate, the same bending displacement is induced.
- a linear motor which induces bending displacement using the piezoelectric or electrostrictive substrate and converts the bending displacement into linear displacement.
- a piezoelectric/electrostrictive linear motor including a piezoelectric or electrostrictive substrate driven by a voltage applied thereto, an elastic body, to one surface or each of both surfaces of which the piezoelectric or electrostrictive substrate is attached, and a movable shaft coupled at an end thereof to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, the movable shaft being operated in conjunction with displacement of the piezoelectric or electrostrictive substrate, wherein a movable body provided with respect to the movable shaft is moved with respect to the movable shaft in response to the operation of the movable shaft.
- the movable shaft may be moved in conjunction with bending displacement of the elastic body and the one or more piezoelectric or electrostrictive substrate attached thereto, to move the movable body.
- a surface area of a largest surface of the elastic body may be greater than a surface area of a largest surface of the piezoelectric or electrostrictive substrate.
- a portion of the elastic body and/or the piezoelectric or electrostrictive substrate may be fixed such that the movable shaft is moved in conjunction with bending displacement of the unfixed portion.
- the movable shaft may be moved in conjunction with displacement of the piezoelectric or electrostrictive substrate between a first position and a second position, and the movable body may be moved along with a movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body may not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position.
- the piezoelectric or electrostrictive substrate may be polarized.
- the movable body may be moved with respect to the movable shaft in response to vibration of the movable shaft.
- a weight of the movable body and a frictional force between the movable shaft and the movable body are provided so that the movable body may be moved with respect to the movable shaft when the movable shaft vibrates in conjunction with the displacement of the piezoelectric or electrostrictive substrate.
- the movable body may include a friction member being in close contact with an outer surface of the movable shaft, a weight provided around an outer surface of the friction member, and an elastic shell fitted over an outer surface of the weight to hold both the friction member and the weight around the movable shaft, wherein the movable body is fitted over the movable shaft.
- a method of driving a piezoelectric/electrostrictive linear motor having an elastic body to which at least one piezoelectric or electrostrictive substrate is attached and a movable shaft coupled to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, wherein a movable body provided with respect to the movable shaft is to be moved with respect the movable shaft, the method including the step (a) of applying a voltage, which varies from a first voltage to a second voltage, to the piezoelectric or electrostrictive substrate during a first period, and the step (b) of applying a voltage, which varies from the second voltage to the first voltage, to the the piezoelectric or electrostrictive substrate during a second period after the step (a), wherein, the movable body is moved along with a movement of the movable shaft in conjunction with displacement of the piezoelectric or electrostrictive substrate during the step (a) or step (b), to move with respect to the movable
- the movable body may be moved along with the movement of the movable shaft during one of the step (a) and step (b), and the movable body may not moved back to a position of the movable shaft during the other one of the step (a) and step (b).
- the movable shaft may moved in conjunction with bending displacement of the elastic body and the piezoelectric or electrostrictive substrate, the piezoelectric or electrostrictive substrate may be displaced between a first position and a second position, and the movable body may be moved along with the movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body may not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position
- the first period is longer than the second period.
- the movable body may be moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft.
- the first period may be shorter than the second period.
- the movable body may be moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft.
- FIGS. 1( a ) through 1 ( c ) are diagrams illustrating a principle of bending movement of both a piezoelectric or electrostrictive substrate and an elastic body used in exemplary embodiments.
- FIGS. 2( a ) through 2 ( f ) are diagrams illustrating a principle of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment.
- FIG. 3 is a diagram illustrating a saw-tooth pulse wave for driving a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment.
- FIG. 4 is a diagram illustrating a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment.
- FIG. 5 is a diagram illustrating a piezoelectric/electrostrictive ultrasonic linear motor according to another exemplary embodiment.
- FIG. 6 is front and side views illustrating a piezoelectric/electrostrictive ultrasonic linear motor according still another exemplary embodiment.
- FIGS. 7( a ) and 7 ( b ) are diagrams illustrating a movable body of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment.
- FIGS. 8( a ) through 8 ( d ) are diagrams illustrating a principle of movement of a movable body and a stator of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment.
- a piezoelectric or electrostrictive substrate 10 used in exemplary embodiments may be made of a single-crystalline ceramic, a polycrystalline ceramic or polymeric material.
- the piezoelectric substrate may be polarized in a thickness direction of the substrate.
- An elastic body 20 may be made of an elastic member having a predetermined thickness.
- phosphor bronze may be used as the material constituting the elastic body 20 .
- FIGS. 2( a ) through 2 ( f ) illustrate an exemplary driving mechanism of the movable body 40 fitted over a movable shaft 30 .
- FIG. 3 shows an input pulse applied to the piezoelectric or electrostrictive substrate 10 . As shown in the drawing, a repeated saw-tooth pulse may be used as a drive pulse.
- both the piezoelectric or electrostrictive substrate 10 and the elastic body 20 are coupled to a left end of the movable shaft 30 of FIGS. 2( a )- 2 ( f ) in the same manner as that shown in FIG. 4 .
- the movement of the movable body 40 with respect to the movement of the movable shaft 30 when the saw-tooth pulse wave as shown in FIG. 3 is input as the drive pulse wave, will be explained herein below.
- FIG. 2( a ) and the point ‘a’ of FIG. 3 illustrate a start of an operation.
- the movable body 40 is placed on the movable shaft 30 at a position spaced apart from an end of the movable shaft 30 by a distance Sa.
- FIG. 2( c ) and the section between the point ‘b’ and the point ‘c’ of FIG. 3 illustrate that the voltage of the saw-tooth pulse wave of FIG. 3 varies from the point ‘b’ to the point ‘c’ so that the voltage becomes zero. This means that the voltage applied to the piezoelectric or electrostrictive substrate becomes zero.
- the movable shaft 30 instantaneously moves to the left by a distance 2 A due to a restoring force of the elastic body. Because the movable shaft 30 instantaneously moves to the left, the movable body 40 having a predetermined weight stays at the position of the distance Sc according to the law of inertia. In other words, only the movable shaft 30 moves to the left (Sc>Sb).
- FIG. 2( e ) and the section between the point ‘d’ and the point ‘e’ of FIG. 3 illustrate that the movable shaft 30 and the movable body 40 move in the same manner as that described for the section between the point ‘b’ and the point ‘c.’
- FIG. 2( f ) and the section between the point ‘e’ and the point ‘f’ of FIG. 3 illustrate that the movable shaft 30 and the movable body 40 move in the same manner as that described for the section between the point ‘c’ and the point ‘d.’
- the movable body 40 is moved by the drive of the saw-tooth pulse wave input into the piezoelectric or electrostrictive substrate 10 , and by the elasticity of the elastic body 20 , as well as according to the law of inertia.
- Such displacement is continuously and repeatedly induced by repeating the process in which the repeated bending motion of the piezoelectric or electrostrictive substrate 10 forming a unimorph or bimorph structure, that is, a single substrate or double substrate structure, is transmitted to the movable shaft 30 .
- the movable body 40 moves from the left end to the right end of the movable shaft 30 using this principle.
- an exemplary motor may be provided based on the law of inertia.
- a piezoelectric/electrostrictive linear motor which is reversibly and linearly moved by an ultrasonic pulse voltage applied thereto, and which has a structure capable of precisely controlling the position by varying the period of the applied voltage and allows simplified manufacturing process thereof.
- the piezoelectric/electrostrictive linear motor may be installed in, for example, a cell phone or PDA, etc., to drive, for example, its camera lens.
- a piezoelectric/electrostrictive linear motor having the above-mentioned construction uses bending movement of a unimorph or bimorph including both an elastic body 20 and a piezoelectric or electrostrictive substrate 10 as its driving source, so that a movable body 40 moves along a movable shaft 30 .
- a small piezoelectric/electrostrictive linear motor may be provided.
- the manufacturing process of the small piezoelectric/electrostrictive linear motor may also be simplified, and the motor may be easily practicable according to a basic principle and have superior characteristics over known motors.
- the small piezoelectric/electrostrictive linear motor may be advantageous in that its thrust is superior for its size, operation is speedy, and the drive is stable.
- a fundamental construction of a piezoelectric/electrostrictive linear motor includes a piezoelectric or electrostrictive substrate, a movable body, a movable shaft and an elastic body. While various types of piezoelectric/electrostrictive linear motors may be provided based on the fundamental construction, three exemplary linear motors will be explained below.
- FIGS. 4 , 5 and 6 show three exemplary piezoelectric/electrostrictive ultrasonic linear motors, that is, three exemplary piezoelectric/electrostrictive linear motors driven by an ultrasonic pulse voltage applied thereto.
- FIG. 4 shows a first exemplary embodiment which includes a piezoelectric or electrostrictive substrate 10 , an elastic body 20 and a movable body 40 .
- the assembly of the piezoelectric or electrostrictive substrate 10 and the elastic body 20 forms a unimorph having a disk shape.
- the elastic body 20 is not limited to a specific material, so long as the material has a predetermined thickness and is able to efficiently transmit vibration from the piezoelectric or electrostrictive substrate 10 thereto.
- the elastic body 20 may be made of phosphor bronze. Where the movable shaft 30 is directly attached to the elastic body, a protrusion 35 may be provided to support the movable shaft.
- the unimorph having a single piezoelectric or electrostrictive substrate 10 as shown in FIG.
- the piezoelectric or electrostrictive substrate 10 and the movable shaft 30 may be provided on opposite sides of the elastic body 20 .
- both the piezoelectric or electrostrictive substrate and the movable shaft may be provided on the same side of the elastic body.
- the movable shaft is mounted to the center of the assembly of the piezoelectric or electrostrictive substrate and the elastic body, maximum displacement may be induced. Therefore, this case may be most effective.
- the movable shaft 30 may be attached to a surface opposite another surface of the elastic body 20 to which the piezoelectric or electrostrictive substrate 10 is attached.
- the movable shaft 30 may be attached to the same surface of the elastic body 20 to which the piezoelectric or electrostrictive substrate 10 is attached.
- the piezoelectric or electrostrictive substrate 10 may be attached to a region of the surface of the elastic body 20 other than a region of the surface of the elastic body 20 to which the movable shaft 30 is attached.
- the piezoelectric or electrostrictive substrate 10 is polarized in a thickness direction. Furthermore, the piezoelectric or electrostrictive substrate 10 having the disk shape vibrates according to an input saw-tooth pulse wave in a direction from the outer diameter to the inner diameter or in a direction from the inner diameter to the outer diameter, thereby executing a unimorph bending movement.
- the piezoelectric or electrostrictive substrate 10 is attached to a surface of the elastic body 20 .
- a coupling hole is formed at the center on an opposite surface of the elastic body 20 so that the movable shaft 30 is fitted into the coupling hole of the elastic body 20 .
- the elastic body has an outer diameter larger than that of the piezoelectric or electrostrictive substrate 10 such that the elastic body is supported by a support surface.
- a fixed edge 25 may be provided around the circumference of the elastic body 20 to fasten the linear motor to the support surface. The fixed edge 25 may serve to prevent the linear motor from undesirably moving due to the vibration of the piezoelectric or electrostrictive substrate 10 .
- the movable shaft 30 is several times lighter than a bimorph which is a double structure of the elastic body 20 coupled to the piezoelectric or electrostrictive substrate 10 .
- the movable shaft 30 has a structure capable of efficiently transmitting vibration generated by the piezoelectric or electrostrictive substrate 10 .
- the movable shaft 30 is manufactured such that the movable body 40 fitted over the movable shaft 30 may move along the movable shaft 30 .
- a hollow shaft is used as the movable shaft 30 .
- Electrodes, which are provided on both surfaces of the piezoelectric or electrostrictive substrate 10 are connected to a saw-tooth pulse voltage source (U), so that a drive pulse is input through the electrodes.
- U saw-tooth pulse voltage source
- FIG. 5 shows a second exemplary embodiment.
- a linear motor according to the second exemplary embodiment is a bimorph having two piezoelectric or electrostrictive substrates 10 .
- the piezoelectric or electrostrictive substrates 10 may be polarized in a thickness direction.
- the polarization direction of the pair of piezoelectric or electrostrictive substrates 10 is appropriately adjusted such that generated vibration is able to reach the maximum value.
- an earth terminal is connected to the elastic body 20 , so that, when a saw-tooth pulse is applied to upper and lower electrodes of the piezoelectric or electrostrictive substrates 10 , the linear motor is actuated.
- the piezoelectric or electrostrictive substrate 10 which is placed at the same side as a movable shaft 30 , may be attached to a region of the surface of the elastic body 20 other than a region of the surface of the elastic body 20 to which the movable shaft 30 is attached.
- the movable shaft 30 may be attached to an outer surface of the piezoelectric or electrostrictive substrate 10 , not the elastic body 20 .
- FIG. 6 shows a third exemplary embodiment.
- each of an elastic body 20 and a piezoelectric or electrostrictive substrate 10 has a rectangular plate shape, not a disk shape.
- This linear motor may be used in a place the length of one side of which is limited.
- the linear motor is operated by the bending movement of a unimorph, which consists of the elastic body 20 and the piezoelectric or electrostrictive substrate 10 and has a rectangular plate shape and a size of a ⁇ b.
- the third embodiment may be also manufactured as the bimorph type shown in FIG. 5 . In this case, the bimorph may have the same arrangement as that described for FIG. 6 .
- the shape of both a piezoelectric or electrostrictive substrate and an elastic body may be changed such that the shape of the piezoelectric/electrostrictive ultrasonic linear motor is suitable for a particular device.
- the shape may be changed to various shapes other than the disclosed circular or rectangular shape.
- FIG. 7 shows an example of a movable body 40 fitted over a movable shaft 30 .
- the piezoelectric or electrostrictive substrate vibrates along with an elastic body. This vibration is transmitted to the movable shaft 30 . Then, the movable body 40 moves along the movable shaft 30 . As such, the vibration of the piezoelectric or electrostrictive substrate is converted into the linear motion of the movable body 40 .
- the structure of the movable body 40 of FIG. 7 is merely one example of the movable body. Therefore, the movable body 40 is not limited to a specific structure, so long as predetermined friction between the movable shaft 30 and the movable body 40 is maintained and the movable body 40 has a predetermined weight.
- the movable body 40 is a metal body or substance having a predetermined weight.
- the movable body 40 is in close contact with the movable shaft 30 and is manufactured such that constant friction is maintained at a junction between the movable shaft 30 and the movable body 40 .
- the movable body 40 may be a single body.
- the movable body 40 is in close contact with the outer surface of the movable shaft 30 to cover at least part of the movable shaft 30 , thus maintaining constant friction.
- the movable body 40 has a structure capable of being fitted over the movable shaft 30 .
- the movable body 40 must be manufactured such that it is applicable to the law of inertia using the frictional force and the predetermined weight.
- the movable body 40 includes a friction member 42 which is in close contact with the outer surface of the movable shaft 30 , thus providing the constant friction.
- the movable body 40 further includes a weight 44 which is provided around an outer surface of the friction member 42 and covers at least part of the friction member 42 .
- the weight 44 may be made of metal of a predetermined weight.
- the movable body 40 further includes an elastic shell 46 which is fitted over an outer surface of the weight 44 to reliably couple the weight 44 to the friction member 42 .
- the movable body 40 may consist of two subcylindrical bodies, each of which has a friction member being in contact with the movable shaft 30 and a metal body that has a predetermined weight and is provided around an outer surface of the friction member.
- the subcylindrical bodies are held around the movable shaft by the elasticity of the elastic spring 46 .
- the elastic spring 46 having a predetermined elasticity is fitted over the movable body 40 , thus providing the optimum holding force by which the movable body 40 is held around the movable shaft 30 .
- a nonmetallic member having a braking function is used as the friction member.
- the weight may be made of dense metal.
- FIG. 8 shows a movement of the movable body 40 fitted over the movable shaft 30 of a linear motor (unimorph or bimorph) according to an exemplary embodiment.
- a linear motor unimorph or bimorph
Abstract
A piezoelectric/electrostrictive linear motor is provided. A movable shaft is coupled to a unimorph or bimorph, which is made by attaching a piezoelectric or electrostrictive substrate to an elastic body, so that a movable body provided with respect to the movable shaft is linearly moved along the movable shaft by the vibration or movement of the piezoelectric or electrostrictive substrate.
Description
- This application is a continuation application of and claims the benefit under 35 U.S.C. § 120 of a U.S. patent application Ser. No. 10/578,922 filed in the U.S. Patent and Trademark Office on May 9, 2006, which is a U.S. national stage application under 35 U.S.C § 371 of a PCT application number PCT/KR2005/00353 filed on Feb. 4,2005, and claims the benefit under 35 U.S.C. § 119(a) of a Korean patent application No. 10-2004-0014050 filed Mar. 2, 2004 and Korean patent application No. 10-2004-0040895 filed on Jun. 4,2004, in the Korean Intellectual Property Office, the entire disclosures of which are hereby incorporated by reference.
- The following description relates to a piezoelectric/electrostrictive linear motor, and more particularly, to a small piezoelectric/electrostrictive ultrasonic linear motor which may be installed in cell phones or PDAs, etc., to drive, for example, their camera lenses and in which a movable shaft is coupled to a unimorph or bimorph, which is made by attaching a piezoelectric or electrostrictive substrate to an elastic body, so that a movable body fitted over the movable shaft is linearly moved along the movable shaft by vibration of the piezoelectric or electrostrictive substrate.
- Small stepping motors, which may be installed in cell phones or PDAs, etc., to drive their camera lenses, are generally provided with reduction gears and cams to convert high speed rotation into linear motion. Furthermore, in conventional small stepping motors, when rotated or reversely rotated, backlash may occur, thus resulting in error. Therefore, such small stepping motors have been limitedly used. In addition, the small stepping motor is problematic in that high electric current is required and excessive heat is generated.
- Generally, in methods of driving linear motors using piezoelectric or electrostrictive substrates, there are a driving method of using a traveling wave generated by a flexural wave, and a driving method which uses a standing wave and in which a linear motor is provided with both a longitudinal vibration actuator and a transverse vibration actuator so that a movable unit is operated by repeated vertical and horizontal vibration. Standing wave type linear motors are provided with vibrators having different operating modes and use multiple vibrations generated by them. Such a standing wave type linear motor includes a piezoelectric/electrostrictive actuator which vibrates vertically and horizontally, and a contact part which transmits mechanical displacement to a movable body which is moving. Longitudinal vibration of a piezoelectric vibrator is transmitted to the contact part at which the movable unit is coupled to the piezoelectric vibrator. The movable body is operated by friction at a junction between it and the movable unit. In the meantime, several other vibration transmitting methods have been proposed, but, because maintaining constant vibration amplitude is difficult due to wear resulting from repeated motion over a long period of time, it is very hard to put into practical use.
- First, before exemplary embodiments are explained, a piezoelectric effect and vibration theory will be described herein below for comprehension of the exemplary embodiments.
- Piezoelectric effect means that an electric charge is generated in a crystalline body when the crystalline body receives pressure, or, conversely, when an electric field is applied to the crystalline body, the crystalline body is mechanically displaced. A piezoelectric substrate having such piezoelectric effect is characterized in that mechanical displacement is induced according to the polarization direction and the direction of the electric field.
-
FIGS. 1( a) through 1(c) show mechanical displacement of apiezoelectric substrate 10 according to the polarization direction and the direction of the electric field. -
FIG. 1( a) shows displacement of thepiezoelectric substrate 10 when an electric field is applied to thepiezoelectric substrate 10 polarized in a predetermined direction. When the polarization direction of thepiezoelectric substrate 10 is the same as the direction of the electric field, thepiezoelectric substrate 10 is expanded in a direction designated by the reference character z and is constricted by Poisson's ratio in a direction designated by the reference character x. When the polarization direction of thepiezoelectric substrate 10 is opposite to the direction of the electric field, thepiezoelectric substrate 10 is constricted in a direction z and is expanded in a direction x. -
FIG. 1( b) illustrates displacement of thepiezoelectric substrate 10 attached to anelastic body 20. In this case, thepiezoelectric substrate 10 is displaced in the same manner as that described for the case ofFIG. 1( a), and bending displacement of theelastic body 20 attached to thepiezoelectric substrate 10 is induced by the expansion and constriction of thepiezoelectric substrate 10. - The dotted line of
FIG. 1( b) denotes the shape of theelastic body 20 bent when thepiezoelectric substrate 10 is expanded in a direction z. Such bending displacement of theelastic body 20 is achieved by the expansion of thepiezoelectric substrate 10 while afixed edge 25 of theelastic body 20 is held at a predetermined position. -
FIG. 1( c) illustrates theelastic body 20 bent in a direction z by the expansion of thepiezoelectric substrate 10 in a direction x. When the direction of the electric field is instantaneously changed, the displacement state of thepiezoelectric substrate 10, which was in the state ofFIG. 1( b), is quickly changed. As a result, theelastic body 20 is quickly bent in a direction z by instantaneous acceleration and expansion of thepiezoelectric substrate 10 in the direction x. - Although the bending displacement of the piezoelectric substrate, when an electric field is applied, has been described, even if an electrostrictive substrate is used in place of the piezoelectric substrate, the same bending displacement as that of the case of the piezoelectric substrate is induced. The electrostriction means that an electrostrictive body is mechanically displaced when an electric field is applied to the electrostrictive body. Even if the piezoelectric substrate of
FIG. 1 is replaced with the electrostrictive substrate, the same bending displacement is induced. - In one general aspect, there is provided a linear motor which induces bending displacement using the piezoelectric or electrostrictive substrate and converts the bending displacement into linear displacement.
- In another aspect, there is provided a piezoelectric/electrostrictive linear motor, including a piezoelectric or electrostrictive substrate driven by a voltage applied thereto, an elastic body, to one surface or each of both surfaces of which the piezoelectric or electrostrictive substrate is attached, and a movable shaft coupled at an end thereof to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, the movable shaft being operated in conjunction with displacement of the piezoelectric or electrostrictive substrate, wherein a movable body provided with respect to the movable shaft is moved with respect to the movable shaft in response to the operation of the movable shaft.
- The movable shaft may be moved in conjunction with bending displacement of the elastic body and the one or more piezoelectric or electrostrictive substrate attached thereto, to move the movable body.
- A surface area of a largest surface of the elastic body may be greater than a surface area of a largest surface of the piezoelectric or electrostrictive substrate.
- A portion of the elastic body and/or the piezoelectric or electrostrictive substrate may be fixed such that the movable shaft is moved in conjunction with bending displacement of the unfixed portion.
- The movable shaft may be moved in conjunction with displacement of the piezoelectric or electrostrictive substrate between a first position and a second position, and the movable body may be moved along with a movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body may not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position.
- The piezoelectric or electrostrictive substrate may be polarized.
- The movable body may be moved with respect to the movable shaft in response to vibration of the movable shaft.
- A weight of the movable body and a frictional force between the movable shaft and the movable body are provided so that the movable body may be moved with respect to the movable shaft when the movable shaft vibrates in conjunction with the displacement of the piezoelectric or electrostrictive substrate.
- The movable body may include a friction member being in close contact with an outer surface of the movable shaft, a weight provided around an outer surface of the friction member, and an elastic shell fitted over an outer surface of the weight to hold both the friction member and the weight around the movable shaft, wherein the movable body is fitted over the movable shaft.
- In still another aspect, there is provided a method of driving a piezoelectric/electrostrictive linear motor, the motor having an elastic body to which at least one piezoelectric or electrostrictive substrate is attached and a movable shaft coupled to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, wherein a movable body provided with respect to the movable shaft is to be moved with respect the movable shaft, the method including the step (a) of applying a voltage, which varies from a first voltage to a second voltage, to the piezoelectric or electrostrictive substrate during a first period, and the step (b) of applying a voltage, which varies from the second voltage to the first voltage, to the the piezoelectric or electrostrictive substrate during a second period after the step (a), wherein, the movable body is moved along with a movement of the movable shaft in conjunction with displacement of the piezoelectric or electrostrictive substrate during the step (a) or step (b), to move with respect to the movable shaft. The step (a) and step (b) may be repeated.
- The movable body may be moved along with the movement of the movable shaft during one of the step (a) and step (b), and the movable body may not moved back to a position of the movable shaft during the other one of the step (a) and step (b).
- The movable shaft may moved in conjunction with bending displacement of the elastic body and the piezoelectric or electrostrictive substrate, the piezoelectric or electrostrictive substrate may be displaced between a first position and a second position, and the movable body may be moved along with the movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body may not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position
- The first period is longer than the second period. During the second period, the movable body may be moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft. The first period may be shorter than the second period. During the first period, the movable body may be moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft.
- Other features will become apparent to those skilled in the art from the following detailed description, which, taken in conjunction with the attached drawings, discloses exemplary embodiments of the invention.
-
FIGS. 1( a) through 1(c) are diagrams illustrating a principle of bending movement of both a piezoelectric or electrostrictive substrate and an elastic body used in exemplary embodiments. -
FIGS. 2( a) through 2(f) are diagrams illustrating a principle of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment. -
FIG. 3 is a diagram illustrating a saw-tooth pulse wave for driving a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment. -
FIG. 4 is a diagram illustrating a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment. -
FIG. 5 is a diagram illustrating a piezoelectric/electrostrictive ultrasonic linear motor according to another exemplary embodiment. -
FIG. 6 is front and side views illustrating a piezoelectric/electrostrictive ultrasonic linear motor according still another exemplary embodiment. -
FIGS. 7( a) and 7(b) are diagrams illustrating a movable body of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment. -
FIGS. 8( a) through 8(d) are diagrams illustrating a principle of movement of a movable body and a stator of a piezoelectric/electrostrictive ultrasonic linear motor according to an exemplary embodiment. - Throughout the drawings and the detailed description, unless otherwise described or apparent, the same drawing reference numerals will be understood to refer to the same elements, features, and structures. The elements may be exaggerated for clarity and convenience.
- The following detailed description is provided to assist the reader in gaining a comprehensive understanding of the methods, apparatuses and/or systems described herein. Accordingly, various changes, modifications, and equivalents of the systems, apparatuses and/or methods described herein will be suggested to those of ordinary skill in the art. Also, descriptions of well-known functions and constructions are omitted to increase clarity and conciseness.
- With reference to
FIGS. 1( a) through 1(c), a piezoelectric orelectrostrictive substrate 10 used in exemplary embodiments may be made of a single-crystalline ceramic, a polycrystalline ceramic or polymeric material. In the case of the piezoelectric substrate, the piezoelectric substrate may be polarized in a thickness direction of the substrate. Anelastic body 20 may be made of an elastic member having a predetermined thickness. For example, phosphor bronze may be used as the material constituting theelastic body 20. Where a movable shaft is coupled to theelastic body 20, a coupling hole into which the movable shaft is inserted may be formed at the center on theelastic body 20. - As described above with reference to
FIGS. 1( a) through 1(c), when an electric field is applied to both theelastic body 20 and the piezoelectric orelectrostrictive substrate 10 which are attached to each other, bending vibration of both theelastic body 20 and the piezoelectric orelectrostrictive substrate 10 is transmitted to the movable shaft. As a result, amovable body 40 linearly moves (seeFIGS. 2( a) through 2(f). Here, the principle of moving themovable body 40 may be based on the law of inertia. -
FIGS. 2( a) through 2(f) illustrate an exemplary driving mechanism of themovable body 40 fitted over amovable shaft 30.FIG. 3 shows an input pulse applied to the piezoelectric orelectrostrictive substrate 10. As shown in the drawing, a repeated saw-tooth pulse may be used as a drive pulse. - Although not shown in
FIGS. 2( a)-2(f), it is assumed that both the piezoelectric orelectrostrictive substrate 10 and theelastic body 20 are coupled to a left end of themovable shaft 30 ofFIGS. 2( a)-2(f) in the same manner as that shown inFIG. 4 . The movement of themovable body 40 with respect to the movement of themovable shaft 30, when the saw-tooth pulse wave as shown inFIG. 3 is input as the drive pulse wave, will be explained herein below. -
FIG. 2( a) and the point ‘a’ ofFIG. 3 illustrate a start of an operation. Themovable body 40 is placed on themovable shaft 30 at a position spaced apart from an end of themovable shaft 30 by a distance Sa. -
FIG. 2( b) and the section between the point ‘a’ and the point ‘b’ ofFIG. 3 illustrate a first step ofFIG. 3 which is an inclined part of the saw-tooth pulse wave that represents an increase in voltage. That is, in the section in which the pulse wave from the point ‘a’ to the point ‘b’ is input, themovable body 40 linearly moves along with themovable shaft 30 in the direction of the x-axis by a distance A (Sa=Sb). -
FIG. 2( c) and the section between the point ‘b’ and the point ‘c’ ofFIG. 3 illustrate that the voltage of the saw-tooth pulse wave ofFIG. 3 varies from the point ‘b’ to the point ‘c’ so that the voltage becomes zero. This means that the voltage applied to the piezoelectric or electrostrictive substrate becomes zero. At this time, as shown inFIG. 2( c), themovable shaft 30 instantaneously moves to the left by adistance 2A due to a restoring force of the elastic body. Because themovable shaft 30 instantaneously moves to the left, themovable body 40 having a predetermined weight stays at the position of the distance Sc according to the law of inertia. In other words, only themovable shaft 30 moves to the left (Sc>Sb). -
FIG. 2( d) and the section between the point ‘c’ and the point ‘d’ ofFIG. 3 illustrate that themovable shaft 30 moves along with themovable body 40 in the direction of the x-axis by adistance 2A (Sc=Sd). -
FIG. 2( e) and the section between the point ‘d’ and the point ‘e’ ofFIG. 3 illustrate that themovable shaft 30 and themovable body 40 move in the same manner as that described for the section between the point ‘b’ and the point ‘c.’ -
FIG. 2( f) and the section between the point ‘e’ and the point ‘f’ ofFIG. 3 illustrate that themovable shaft 30 and themovable body 40 move in the same manner as that described for the section between the point ‘c’ and the point ‘d.’ - As such, the
movable body 40 is moved by the drive of the saw-tooth pulse wave input into the piezoelectric orelectrostrictive substrate 10, and by the elasticity of theelastic body 20, as well as according to the law of inertia. Such displacement is continuously and repeatedly induced by repeating the process in which the repeated bending motion of the piezoelectric orelectrostrictive substrate 10 forming a unimorph or bimorph structure, that is, a single substrate or double substrate structure, is transmitted to themovable shaft 30. Themovable body 40 moves from the left end to the right end of themovable shaft 30 using this principle. - In the same principle, when the direction of the saw-tooth pulse of
FIG. 3 is changed and displacement induced by the changed pulse is transmitted to themovable shaft 30, the direction of the motion of themovable body 40 changes. Thus, themovable body 40 can move from the right end to the left end of themovable shaft 30. As such, an exemplary motor may be provided based on the law of inertia. - Accordingly, according to an exemplary embodiment, there is provided a piezoelectric/electrostrictive linear motor which is reversibly and linearly moved by an ultrasonic pulse voltage applied thereto, and which has a structure capable of precisely controlling the position by varying the period of the applied voltage and allows simplified manufacturing process thereof. The piezoelectric/electrostrictive linear motor may be installed in, for example, a cell phone or PDA, etc., to drive, for example, its camera lens.
- A piezoelectric/electrostrictive linear motor having the above-mentioned construction uses bending movement of a unimorph or bimorph including both an
elastic body 20 and a piezoelectric orelectrostrictive substrate 10 as its driving source, so that amovable body 40 moves along amovable shaft 30. Thus, a small piezoelectric/electrostrictive linear motor may be provided. The manufacturing process of the small piezoelectric/electrostrictive linear motor may also be simplified, and the motor may be easily practicable according to a basic principle and have superior characteristics over known motors. Furthermore, the small piezoelectric/electrostrictive linear motor may be advantageous in that its thrust is superior for its size, operation is speedy, and the drive is stable. - According to an aspect, a fundamental construction of a piezoelectric/electrostrictive linear motor includes a piezoelectric or electrostrictive substrate, a movable body, a movable shaft and an elastic body. While various types of piezoelectric/electrostrictive linear motors may be provided based on the fundamental construction, three exemplary linear motors will be explained below.
-
FIGS. 4 , 5 and 6 show three exemplary piezoelectric/electrostrictive ultrasonic linear motors, that is, three exemplary piezoelectric/electrostrictive linear motors driven by an ultrasonic pulse voltage applied thereto. -
FIG. 4 shows a first exemplary embodiment which includes a piezoelectric orelectrostrictive substrate 10, anelastic body 20 and amovable body 40. The assembly of the piezoelectric orelectrostrictive substrate 10 and theelastic body 20 forms a unimorph having a disk shape. Theelastic body 20 is not limited to a specific material, so long as the material has a predetermined thickness and is able to efficiently transmit vibration from the piezoelectric orelectrostrictive substrate 10 thereto. Theelastic body 20 may be made of phosphor bronze. Where themovable shaft 30 is directly attached to the elastic body, aprotrusion 35 may be provided to support the movable shaft. In the case of the unimorph having a single piezoelectric orelectrostrictive substrate 10, as shown inFIG. 4 , the piezoelectric orelectrostrictive substrate 10 and themovable shaft 30 may be provided on opposite sides of theelastic body 20. Alternatively, both the piezoelectric or electrostrictive substrate and the movable shaft may be provided on the same side of the elastic body. Furthermore, when the movable shaft is mounted to the center of the assembly of the piezoelectric or electrostrictive substrate and the elastic body, maximum displacement may be induced. Therefore, this case may be most effective. - As shown in
FIG. 4 , themovable shaft 30 may be attached to a surface opposite another surface of theelastic body 20 to which the piezoelectric orelectrostrictive substrate 10 is attached. Alternatively, as shown inFIG. 5 , themovable shaft 30 may be attached to the same surface of theelastic body 20 to which the piezoelectric orelectrostrictive substrate 10 is attached. In this case, the piezoelectric orelectrostrictive substrate 10 may be attached to a region of the surface of theelastic body 20 other than a region of the surface of theelastic body 20 to which themovable shaft 30 is attached. - The piezoelectric or
electrostrictive substrate 10 is polarized in a thickness direction. Furthermore, the piezoelectric orelectrostrictive substrate 10 having the disk shape vibrates according to an input saw-tooth pulse wave in a direction from the outer diameter to the inner diameter or in a direction from the inner diameter to the outer diameter, thereby executing a unimorph bending movement. - In the first exemplary embodiment of
FIG. 4 , the piezoelectric orelectrostrictive substrate 10 is attached to a surface of theelastic body 20. A coupling hole is formed at the center on an opposite surface of theelastic body 20 so that themovable shaft 30 is fitted into the coupling hole of theelastic body 20. The elastic body has an outer diameter larger than that of the piezoelectric orelectrostrictive substrate 10 such that the elastic body is supported by a support surface. For example, a fixededge 25 may be provided around the circumference of theelastic body 20 to fasten the linear motor to the support surface. The fixededge 25 may serve to prevent the linear motor from undesirably moving due to the vibration of the piezoelectric orelectrostrictive substrate 10. - The
movable shaft 30 is several times lighter than a bimorph which is a double structure of theelastic body 20 coupled to the piezoelectric orelectrostrictive substrate 10. Themovable shaft 30 has a structure capable of efficiently transmitting vibration generated by the piezoelectric orelectrostrictive substrate 10. Furthermore, themovable shaft 30 is manufactured such that themovable body 40 fitted over themovable shaft 30 may move along themovable shaft 30. For example, a hollow shaft is used as themovable shaft 30. Electrodes, which are provided on both surfaces of the piezoelectric orelectrostrictive substrate 10, are connected to a saw-tooth pulse voltage source (U), so that a drive pulse is input through the electrodes. -
FIG. 5 shows a second exemplary embodiment. A linear motor according to the second exemplary embodiment is a bimorph having two piezoelectric orelectrostrictive substrates 10. Such structure is able to operate using reduced voltage, thus extending the lifetime of the linear motor. The piezoelectric orelectrostrictive substrates 10 may be polarized in a thickness direction. Here, the polarization direction of the pair of piezoelectric orelectrostrictive substrates 10 is appropriately adjusted such that generated vibration is able to reach the maximum value. Furthermore, an earth terminal is connected to theelastic body 20, so that, when a saw-tooth pulse is applied to upper and lower electrodes of the piezoelectric orelectrostrictive substrates 10, the linear motor is actuated. In the second exemplary embodiment, the piezoelectric orelectrostrictive substrate 10, which is placed at the same side as amovable shaft 30, may be attached to a region of the surface of theelastic body 20 other than a region of the surface of theelastic body 20 to which themovable shaft 30 is attached. Alternatively, themovable shaft 30 may be attached to an outer surface of the piezoelectric orelectrostrictive substrate 10, not theelastic body 20. -
FIG. 6 shows a third exemplary embodiment. In a linear motor according to the third exemplary embodiment, each of anelastic body 20 and a piezoelectric orelectrostrictive substrate 10 has a rectangular plate shape, not a disk shape. This linear motor may be used in a place the length of one side of which is limited. In this embodiment, the linear motor is operated by the bending movement of a unimorph, which consists of theelastic body 20 and the piezoelectric orelectrostrictive substrate 10 and has a rectangular plate shape and a size of a×b. The third embodiment may be also manufactured as the bimorph type shown inFIG. 5 . In this case, the bimorph may have the same arrangement as that described forFIG. 6 . - As such, the shape of both a piezoelectric or electrostrictive substrate and an elastic body may be changed such that the shape of the piezoelectric/electrostrictive ultrasonic linear motor is suitable for a particular device. Furthermore, the shape may be changed to various shapes other than the disclosed circular or rectangular shape.
-
FIG. 7 shows an example of amovable body 40 fitted over amovable shaft 30. When an input pulse is applied to a piezoelectric or electrostrictive substrate, the piezoelectric or electrostrictive substrate vibrates along with an elastic body. This vibration is transmitted to themovable shaft 30. Then, themovable body 40 moves along themovable shaft 30. As such, the vibration of the piezoelectric or electrostrictive substrate is converted into the linear motion of themovable body 40. - The structure of the
movable body 40 ofFIG. 7 is merely one example of the movable body. Therefore, themovable body 40 is not limited to a specific structure, so long as predetermined friction between themovable shaft 30 and themovable body 40 is maintained and themovable body 40 has a predetermined weight. - The
movable body 40 is a metal body or substance having a predetermined weight. In addition, themovable body 40 is in close contact with themovable shaft 30 and is manufactured such that constant friction is maintained at a junction between themovable shaft 30 and themovable body 40. Furthermore, themovable body 40 may be a single body. - The
movable body 40 is in close contact with the outer surface of themovable shaft 30 to cover at least part of themovable shaft 30, thus maintaining constant friction. For example, themovable body 40 has a structure capable of being fitted over themovable shaft 30. Furthermore, themovable body 40 must be manufactured such that it is applicable to the law of inertia using the frictional force and the predetermined weight. - As shown in
FIG. 7 , themovable body 40 includes afriction member 42 which is in close contact with the outer surface of themovable shaft 30, thus providing the constant friction. Themovable body 40 further includes aweight 44 which is provided around an outer surface of thefriction member 42 and covers at least part of thefriction member 42. Theweight 44 may be made of metal of a predetermined weight. Themovable body 40 further includes anelastic shell 46 which is fitted over an outer surface of theweight 44 to reliably couple theweight 44 to thefriction member 42. - Referring to
FIG. 7 , themovable body 40 may consist of two subcylindrical bodies, each of which has a friction member being in contact with themovable shaft 30 and a metal body that has a predetermined weight and is provided around an outer surface of the friction member. The subcylindrical bodies are held around the movable shaft by the elasticity of theelastic spring 46. - When the
movable body 40 is held around themovable shaft 30 by an optimum force, superior performance of the linear motor is achieved. For this, theelastic spring 46 having a predetermined elasticity is fitted over themovable body 40, thus providing the optimum holding force by which themovable body 40 is held around themovable shaft 30. - For example, a nonmetallic member having a braking function is used as the friction member. The weight may be made of dense metal.
-
FIG. 8 shows a movement of themovable body 40 fitted over themovable shaft 30 of a linear motor (unimorph or bimorph) according to an exemplary embodiment. In this drawing, the movement of both themovable shaft 30 and themovable body 40, which depends on themovable shaft 30, by the bending movement of the unimorph or bimorph is illustrated. It is understood that themovable body 40 is moved by the displacement of the unimorph or bimorph. - A number of exemplary embodiments have been described above. Nevertheless, it will be understood that various modifications may be made. For example, suitable results may be achieved if the described techniques are performed in a different order and/or if components in a described system, architecture, device, or circuit are combined in a different manner and/or replaced or supplemented by other components or their equivalents. Accordingly, other implementations are within the scope of the following claims.
Claims (17)
1. A piezoelectric/electrostrictive linear motor, comprising:
a piezoelectric or electrostrictive substrate driven by a voltage applied thereto;
an elastic body, to one surface or each of both surfaces of which the piezoelectric or electrostrictive substrate is attached; and
a movable shaft coupled at an end thereof to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, the movable shaft being operated in conjunction with displacement of the piezoelectric or electrostrictive substrate, wherein a movable body provided with respect to the movable shaft is moved with respect to the movable shaft in response to the operation of the movable shaft.
2. The piezoelectric/electrostrictive linear motor of claim 1 , wherein the movable shaft is moved in conjunction with bending displacement of the elastic body and the one or more piezoelectric or electrostrictive substrate attached thereto, to move the movable body.
3. The piezoelectric/electrostrictive linear motor of claim 2 , wherein a surface area of a largest surface of the elastic body is greater than a surface area of a largest surface of the piezoelectric or electrostrictive substrate.
4. The piezoelectric/electrostrictive linear motor of claim 2 , wherein a portion of the elastic body and/or the piezoelectric or electrostrictive substrate is fixed such that the movable shaft is moved in conjunction with bending displacement of the unfixed portion.
5. The piezoelectric/electrostrictive linear motor of claim 1 , wherein the movable shaft is moved in conjunction with displacement of the piezoelectric or electrostrictive substrate between a first position and a second position, and the movable body is moved along with a movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body is not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position.
6. The piezoelectric/electrostrictive linear motor of claim 1 , wherein the piezoelectric or electrostrictive substrate is polarized.
7. The piezoelectric/electrostrictive linear motor of claim 1 , wherein the movable body is moved with respect to the movable shaft in response to vibration of the movable shaft.
8. The piezoelectric/electrostrictive linear motor of claim 1 , wherein a weight of the movable body and a frictional force between the movable shaft and the movable body are provided so that the movable body is moved with respect to the movable shaft when the movable shaft vibrates in conjunction with the displacement of the piezoelectric or electrostrictive substrate.
9. The piezoelectric/electrostrictive linear motor of claim 1 , wherein the movable body comprises: a friction member being in close contact with an outer surface of the movable shaft; a weight provided around an outer surface of the friction member; and an elastic shell fitted over an outer surface of the weight to hold both the friction member and the weight around the movable shaft, wherein the movable body is fitted over the movable shaft.
10. A method of driving a piezoelectric/electrostrictive linear motor, the motor having an elastic body to which at least one piezoelectric or electrostrictive substrate is attached and a movable shaft coupled to the elastic body or the piezoelectric or electrostrictive substrate attached to the elastic body, wherein a movable body provided with respect to the movable shaft is to be moved with respect the movable shaft, the method comprising:
the step (a) of applying a voltage, which varies from a first voltage to a second voltage, to the piezoelectric or electrostrictive substrate during a first period; and
the step (b) of applying a voltage, which varies from the second voltage to the first voltage, to the the piezoelectric or electrostrictive substrate during a second period after the step (a), wherein,
the movable body is moved along with a movement of the movable shaft in conjunction with displacement of the piezoelectric or electrostrictive substrate during the step (a) or step (b), to move with respect to the movable shaft.
11. The method of claim 10 , wherein the step (a) and step (b) are repeated.
12. The method of claim 10 , wherein the movable body is moved along with the movement of the movable shaft during one of the step (a) and step (b), and the movable body is not moved back to a position of the movable shaft during the other one of the step (a) and step (b).
13. The method of claim 10 , wherein the movable shaft is moved in conjunction with bending displacement of the elastic body and the piezoelectric or electrostrictive substrate, the piezoelectric or electrostrictive substrate is displaced between a first position and a second position, and the movable body is moved along with the movement of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the second position and the movable body is not moved back to a position of the movable shaft in response to the piezoelectric or electrostrictive substrate being displaced toward the first position
14. The method of claim 10 , wherein the first period is longer than the second period.
15. The method of claim 10 , wherein, during the second period, the movable body is moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft.
16. The method of claim 10 , wherein the first period is shorter than the second period.
17. The method of claim 10 , wherein, during the first period, the movable body is moved along with the movement of the movable shaft, so that the movable body is moved along the movable shaft.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/357,438 US20090127974A1 (en) | 2004-03-02 | 2009-01-22 | Small piezoelectric or electrostrictive linear motor |
Applications Claiming Priority (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2004-0014050 | 2004-03-02 | ||
KR10-2004-0014050A KR100443638B1 (en) | 2004-03-02 | 2004-03-02 | small piezoelectric or electrostrictive linear motor |
KR10-2004-0040895 | 2004-06-04 | ||
KR1020040040895A KR100443639B1 (en) | 2004-06-04 | 2004-06-04 | small piezoelectric or electrostrictive linear motor |
PCT/KR2005/000353 WO2005083874A1 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
US10/578,922 US7498719B2 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
US12/357,438 US20090127974A1 (en) | 2004-03-02 | 2009-01-22 | Small piezoelectric or electrostrictive linear motor |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2005/000353 Continuation WO2005083874A1 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
US11/578,922 Continuation US8568625B2 (en) | 2004-04-26 | 2005-04-07 | Aqueous dispersion of flame retardant for textiles and process for producing same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20090127974A1 true US20090127974A1 (en) | 2009-05-21 |
Family
ID=34914604
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/578,922 Active 2025-06-24 US7498719B2 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
US12/357,438 Abandoned US20090127974A1 (en) | 2004-03-02 | 2009-01-22 | Small piezoelectric or electrostrictive linear motor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/578,922 Active 2025-06-24 US7498719B2 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
Country Status (6)
Country | Link |
---|---|
US (2) | US7498719B2 (en) |
EP (1) | EP1721382B1 (en) |
JP (1) | JP2007516688A (en) |
AT (1) | ATE479201T1 (en) |
DE (1) | DE602005023129D1 (en) |
WO (1) | WO2005083874A1 (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100102674A1 (en) * | 2006-04-17 | 2010-04-29 | Inova Inc. | Piezoelectric linear motor offering enhanced displacement |
US20100290138A1 (en) * | 2007-01-18 | 2010-11-18 | Newport Corporation | Optical adjustment mounts with piezoelectric inertia driver |
US20110101826A1 (en) * | 2009-10-29 | 2011-05-05 | Shicoh Co., Ltd. | Linear driving device |
US20120013999A1 (en) * | 2010-07-15 | 2012-01-19 | Thomas Patrick J | Optical adjustable mounts with absolute position feedback |
US9312790B2 (en) | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
US9425711B2 (en) | 2014-04-15 | 2016-08-23 | Newport Corporation | Integral preload mechanism for piezoelectric actuator |
US10161560B2 (en) | 2015-01-29 | 2018-12-25 | Newport Corporation | Integrated picomotor mount |
WO2021256653A1 (en) * | 2020-06-16 | 2021-12-23 | 엘지이노텍 주식회사 | Ultrasonic linear motor and operation method therefor |
US20220213973A1 (en) * | 2019-04-23 | 2022-07-07 | Satake Corporation | Piezoelectric valve and method of manufacturing the piezoelectric valve |
US20220316617A1 (en) * | 2019-06-05 | 2022-10-06 | Satake Corporation | Piezoelectric actuator, piezoelectric valve, and method of manufacturing piezoelectric actuator |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100698438B1 (en) * | 2005-05-18 | 2007-03-22 | 한국과학기술연구원 | Piezoelectric linear motor with displacement amplifying device |
KR100817470B1 (en) | 2006-10-24 | 2008-03-31 | 한국과학기술연구원 | Piezzo electric linear motor |
JP2008259345A (en) * | 2007-04-06 | 2008-10-23 | Shicoh Engineering Co Ltd | Linear drive unit, lens drive unit, camera, and portable telephone with camera |
CN101556366B (en) * | 2008-04-09 | 2010-09-29 | 鸿富锦精密工业(深圳)有限公司 | Zoom lens driving device |
JP5544504B2 (en) * | 2008-05-09 | 2014-07-09 | 新シコー科技株式会社 | Linear drive device, lens drive device, camera and mobile phone with camera |
JP2009276422A (en) * | 2008-05-13 | 2009-11-26 | Mitsumi Electric Co Ltd | Driving gear |
JP2010246277A (en) * | 2009-04-07 | 2010-10-28 | Shicoh Engineering Co Ltd | Linear drive unit |
US9105198B2 (en) | 2010-03-01 | 2015-08-11 | Noa Habas | Visual and tactile display |
WO2012086285A1 (en) * | 2010-12-24 | 2012-06-28 | 株式会社村田製作所 | Acceleration sensor |
WO2012108309A1 (en) | 2011-02-07 | 2012-08-16 | 株式会社村田製作所 | Displacement member, driving member, actuator, and driving apparatus |
WO2012127420A2 (en) | 2011-03-21 | 2012-09-27 | Ipu Industries Ltd. | An implatable prosthetic valve controllable with a piezoelectric mems actuator |
EP2748499A1 (en) | 2012-10-14 | 2014-07-02 | IPU Industries Ltd | A proportional valve controlled with a piezoelectric linear actuator |
JP5540249B1 (en) * | 2013-04-01 | 2014-07-02 | 新シコー科技株式会社 | Vibration device and electronic device |
WO2014181208A1 (en) | 2013-05-07 | 2014-11-13 | Koninklijke Philips N.V. | Linear digital proportional piezoelectric valve |
JP6155460B2 (en) * | 2013-06-06 | 2017-07-05 | 新シコー科技株式会社 | Drive member, linear drive device, camera device, and electronic device |
DE102013211630A1 (en) | 2013-06-20 | 2014-12-24 | Robert Bosch Gmbh | Electroacoustic transducer |
JP5685703B1 (en) * | 2013-09-20 | 2015-03-18 | 新シコー科技株式会社 | LINEAR DRIVE DEVICE, ELECTRONIC DEVICE USING LINEAR DRIVE DEVICE AND BODY |
JP5686330B2 (en) * | 2014-02-25 | 2015-03-18 | 新シコー科技株式会社 | Linear drive device, lens drive device, camera and mobile phone with camera |
WO2015155661A1 (en) * | 2014-04-07 | 2015-10-15 | I.P.U. Industries Ltd | Pinch valve |
JP2016046407A (en) * | 2014-08-25 | 2016-04-04 | 新シコー科技株式会社 | Piezoelectric actuator, linear drive device and electronic apparatus |
EP3714282B1 (en) | 2017-11-23 | 2022-02-23 | Qonetec AG | Nmr probe head with piezoelectric actuators |
CN108199612A (en) * | 2018-02-26 | 2018-06-22 | 盐城工学院 | A kind of double-driving foot type linear piezoelectric motor and electric excitation method thereof |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949247A (en) * | 1972-03-10 | 1976-04-06 | Siemens Aktiengesellschaft | Mounting arrangement for a piezoelectric element |
US5225941A (en) * | 1990-07-03 | 1993-07-06 | Canon Kabushiki Kaisha | Driving device |
US5408376A (en) * | 1992-10-06 | 1995-04-18 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric head actuator |
US5490015A (en) * | 1993-03-04 | 1996-02-06 | Olympus Optical Co., Ltd. | Actuator apparatus |
US5768016A (en) * | 1994-08-03 | 1998-06-16 | Minolta Co., Ltd. | Electro-mechanical transducer lens drive mechanism for a vibration compensating lens system |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63283478A (en) | 1987-05-14 | 1988-11-21 | Marcon Electronics Co Ltd | Ultrasonic motor |
JPH02188169A (en) | 1989-01-13 | 1990-07-24 | Sony Corp | Ultrasonic motor |
JPH03178581A (en) | 1989-12-06 | 1991-08-02 | Sumitomo Metal Ind Ltd | Ultrasonic wave linear motor |
US5632841A (en) * | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
US5565726A (en) * | 1995-04-13 | 1996-10-15 | Toda; Kohji | Ultrasonic vibrating actuator |
JP3523488B2 (en) | 1998-03-31 | 2004-04-26 | 京セラ株式会社 | Ultrasonic linear motor and driving device using the same |
KR100483804B1 (en) | 2002-03-22 | 2005-04-20 | 한국과학기술연구원 | Piezoelectric Linear Ultrasonic Motor |
JP3832396B2 (en) * | 2002-07-17 | 2006-10-11 | コニカミノルタフォトイメージング株式会社 | Drive device, position control device, and camera |
-
2005
- 2005-02-04 WO PCT/KR2005/000353 patent/WO2005083874A1/en not_active Application Discontinuation
- 2005-02-04 US US10/578,922 patent/US7498719B2/en active Active
- 2005-02-04 AT AT05726601T patent/ATE479201T1/en not_active IP Right Cessation
- 2005-02-04 EP EP05726601A patent/EP1721382B1/en active Active
- 2005-02-04 JP JP2006541050A patent/JP2007516688A/en active Pending
- 2005-02-04 DE DE602005023129T patent/DE602005023129D1/en active Active
-
2009
- 2009-01-22 US US12/357,438 patent/US20090127974A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949247A (en) * | 1972-03-10 | 1976-04-06 | Siemens Aktiengesellschaft | Mounting arrangement for a piezoelectric element |
US5225941A (en) * | 1990-07-03 | 1993-07-06 | Canon Kabushiki Kaisha | Driving device |
US5408376A (en) * | 1992-10-06 | 1995-04-18 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric head actuator |
US5490015A (en) * | 1993-03-04 | 1996-02-06 | Olympus Optical Co., Ltd. | Actuator apparatus |
US5768016A (en) * | 1994-08-03 | 1998-06-16 | Minolta Co., Ltd. | Electro-mechanical transducer lens drive mechanism for a vibration compensating lens system |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100102674A1 (en) * | 2006-04-17 | 2010-04-29 | Inova Inc. | Piezoelectric linear motor offering enhanced displacement |
US8283838B2 (en) * | 2006-04-17 | 2012-10-09 | Inova Inc. | Piezoelectric linear motor offering enhanced displacement |
US8520327B2 (en) | 2007-01-18 | 2013-08-27 | Newport Corporation | Optical adjustment mounts with piezoelectric inertia driver |
US20100290138A1 (en) * | 2007-01-18 | 2010-11-18 | Newport Corporation | Optical adjustment mounts with piezoelectric inertia driver |
US20110101826A1 (en) * | 2009-10-29 | 2011-05-05 | Shicoh Co., Ltd. | Linear driving device |
US8466602B2 (en) * | 2009-10-29 | 2013-06-18 | New Shicoh Technology Co., Ltd. | Linear driving device |
US8755133B2 (en) * | 2010-07-15 | 2014-06-17 | Newport Corporation | Optical adjustable mounts with absolute position feedback |
US8482868B2 (en) * | 2010-07-15 | 2013-07-09 | Newport Corporation | Optical adjustable mounts with absolute position feedback |
US20120013999A1 (en) * | 2010-07-15 | 2012-01-19 | Thomas Patrick J | Optical adjustable mounts with absolute position feedback |
US9312790B2 (en) | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
US9425711B2 (en) | 2014-04-15 | 2016-08-23 | Newport Corporation | Integral preload mechanism for piezoelectric actuator |
US10389276B2 (en) | 2014-04-15 | 2019-08-20 | Newport Corporation | Integral preload mechanism for piezoelectric actuator |
US10161560B2 (en) | 2015-01-29 | 2018-12-25 | Newport Corporation | Integrated picomotor mount |
US20220213973A1 (en) * | 2019-04-23 | 2022-07-07 | Satake Corporation | Piezoelectric valve and method of manufacturing the piezoelectric valve |
US20220316617A1 (en) * | 2019-06-05 | 2022-10-06 | Satake Corporation | Piezoelectric actuator, piezoelectric valve, and method of manufacturing piezoelectric actuator |
WO2021256653A1 (en) * | 2020-06-16 | 2021-12-23 | 엘지이노텍 주식회사 | Ultrasonic linear motor and operation method therefor |
Also Published As
Publication number | Publication date |
---|---|
JP2007516688A (en) | 2007-06-21 |
US20070120442A1 (en) | 2007-05-31 |
DE602005023129D1 (en) | 2010-10-07 |
ATE479201T1 (en) | 2010-09-15 |
WO2005083874A1 (en) | 2005-09-09 |
EP1721382A4 (en) | 2007-04-18 |
EP1721382A1 (en) | 2006-11-15 |
US7498719B2 (en) | 2009-03-03 |
EP1721382B1 (en) | 2010-08-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20090127974A1 (en) | Small piezoelectric or electrostrictive linear motor | |
CN1898856B (en) | Small piezoelectric or electrostrictive linear motor | |
US6856072B2 (en) | Ultrasonic driving mechanism | |
JP4144171B2 (en) | Drive device using electro-mechanical transducer | |
JP4103799B2 (en) | Linear actuator | |
EP1523777B1 (en) | Near-resonance electromechanical motor | |
KR100698438B1 (en) | Piezoelectric linear motor with displacement amplifying device | |
KR101100484B1 (en) | Flat resonating electromechanical drive unit | |
KR20110083600A (en) | Semi-resonant driving systems and methods thereof | |
JP2006158113A (en) | Piezoelectric power generation mechanism | |
KR100965433B1 (en) | Omni-directional linear piezoelectric ultrasonic motor | |
JPWO2002015378A1 (en) | Folding type piezoelectric stator, folding type piezoelectric actuator and their applications | |
KR101601871B1 (en) | Displacement member, driving member, actuator, and driving apparatus | |
JP2005057907A (en) | Driving device | |
KR100902923B1 (en) | Piezoelectric motor | |
US7671512B2 (en) | Impact drive actuator | |
KR100683934B1 (en) | Micro piezoelectric linear motor | |
KR100443639B1 (en) | small piezoelectric or electrostrictive linear motor | |
KR100683933B1 (en) | Micro piezoelectric linear motor | |
KR100683932B1 (en) | Micro piezoelectric linear motor | |
KR100728372B1 (en) | Micro piezoelectric linear motor | |
US6611081B1 (en) | Vibration actuator with two vibration modes | |
KR100728373B1 (en) | Micro piezoelectric linear motor | |
JP2002233171A (en) | Driver | |
KR100717858B1 (en) | Micro piezoelectric linear motor of beam type and camera module |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: PIEZOELECTRIC TECHNOLOGY CO., LTD., KOREA, REPUBLI Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:PIOTR, VASILJEF;KIM, BO KEUN;YOON, SEOK MIN;AND OTHERS;REEL/FRAME:022136/0276 Effective date: 20060504 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |