US20090218679A1 - Chip package and process thereof - Google Patents

Chip package and process thereof Download PDF

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Publication number
US20090218679A1
US20090218679A1 US12/437,817 US43781709A US2009218679A1 US 20090218679 A1 US20090218679 A1 US 20090218679A1 US 43781709 A US43781709 A US 43781709A US 2009218679 A1 US2009218679 A1 US 2009218679A1
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United States
Prior art keywords
chip
active surface
bond pads
chip package
package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US12/437,817
Inventor
Min-Chih Hsuan
Kai-Kuang Ho
Kuo-Ming Chen
Kuang-Hui Tang
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United Microelectronics Corp
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United Microelectronics Corp
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Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to US12/437,817 priority Critical patent/US20090218679A1/en
Publication of US20090218679A1 publication Critical patent/US20090218679A1/en
Abandoned legal-status Critical Current

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    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/02—Containers; Seals
    • H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
    • H01L21/481—Insulating layers on insulating parts, with or without metallisation
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    • H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
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Definitions

  • This invention generally relates to a chip package and a process thereof, and more particularly to a chip package having a rigid cover on the active surface of the chip and a process thereof.
  • integrated circuit (IC) manufacturing includes 3 steps—design, process, and packaging. Chips are manufactured by the steps of making wafer, designing the circuit, making the mask, sawing the wafer and so on. Each chip is electrically connected to the external circuit via the bond pads on the chip. Then the insulating material is optionally used to package the chip.
  • the purposes of packaging are to protect the chip from moisture, heat and noise, and to provide the electrical connection between the chip and the external circuit such as printed circuit board (PCB) or other carriers.
  • PCB printed circuit board
  • chip scale package is one of the package technologies that the length of the package is smaller than 1.2 times of the length of the chip inside the package, or (the chip area/package area) is smaller than 80% while the pitch of the pins of the package is smaller than 1 mm.
  • CSP includes rigid interposer type, flex interposer type, custom lead frame type, wafer level type and so on.
  • the wafer level package focuses on packaging wafer in order to simplify the chip packaging process. Hence, after the integrated circuits have been manufactured on the wafer, the whole wafer can be packaged. Then the wafer sawing can be performed to form a plurality of chips from the wafer.
  • An object of the present invention is to provide a chip package having a better structural strength, thermal conductive efficiency, and anti-electromagnetic interference ability.
  • the present invention provides a chip package.
  • the chip package comprises a chip, a plurality of bond pads, a plurality of connecting lines and a rigid cover.
  • the chip has a plurality of recesses arranged along at least an edge of the chip and the chip also has an active surface and a backside opposite to the active surface.
  • the bond pads are disposed on the active surface of the chip and the bond pads are arranged to be corresponding to the recesses respectively.
  • the connecting lines are disposed on surfaces of the recesses respectively at the edge of the chip. For each of the connecting lines, a first end of the connecting line is connected to one of the bond pads and a second end of the connecting line extends to the backside of the chip to be a terminal pad.
  • the rigid cover is located on the active surface of the chip without covering the bond pads on the active surface of the chip.
  • the chip package further comprises an adhesive layer disposed between the chip and the rigid cover, wherein the rigid cover is adhered to the chip via the adhesive layer.
  • the chip package further comprises a plurality of contacts electrically connected to the terminal pads respectively.
  • the contacts include conductive bumps.
  • the contacts are connected to the PCB.
  • the chip includes a redistribution layer on the chip to form the bond pads.
  • the material of the rigid cover includes a conducting material, an insulating material, or a transparent material.
  • the bond pads are disposed on the chip as an array.
  • the bond pads are disposed in an interior region of the chip.
  • a rigid cover is disposed on the active surface of the chip to protect the active surface of the chip and enhance the structural strength of the chip package. Further, if the material of the rigid cover is a thermal conductive material such as Cu or Al alloy, the heat-spread ability of the chip package can be enhanced. If the rigid cover is made of an electrical conductive material and electrically connected to the ground of the chip package, the electromagnetic interference (EMI) to the chip package can be reduced. It should be noted that the chip packaging process could form a plurality of the terminal pads on the backside of the chip so that the chip package can be connected to the PCB or substrate via these terminal pads.
  • EMI electromagnetic interference
  • FIG. 1A is a top view of the first chip package in accordance with the first embodiment of the present invention.
  • FIG. 1B is a cross-sectional view of the first chip package of FIG. 1A along I-I′ line.
  • FIG. 1C is a cross-sectional view of the first chip package of FIG. 1A connected to a printed circuit board.
  • FIG. 2A is a top view of the second chip package in accordance with the first embodiment of the present invention.
  • FIG. 2B is a cross-sectional view of the second chip package of FIG. 2A along II-II′ line.
  • FIG. 2C is a cross-sectional view of the second chip package of FIG. 2A connected to a printed circuit board.
  • FIGS. 3A-3F show top views of the progression steps of the chip packaging process in accordance with the second embodiment of the present invention.
  • FIGS. 4A-4F show cross-sectional views of the chip packaging process of FIGS. 3A-3F along III-III′ line.
  • FIG. 5 is a cross-sectional view of the chip package of FIG. 3F connected to a printed circuit board.
  • FIG. 6 is a cross-sectional view of another chip package connected to a printed circuit board in accordance with a second embodiment of the present invention.
  • FIG. 1A is a top view of the first chip package in accordance with the first embodiment of the present invention.
  • FIG. 1B is a cross-sectional view of the first chip package of FIG. 1A along I-I′ line.
  • the chip package 100 includes a chip 110 , a rigid cover 120 , and an adhesive layer 130 .
  • the chip 110 is one of a plurality of unsawed chips of the wafer (not shown).
  • the chip 110 has a rectangular shape having an active surface 112 and a plurality of bond pads 114 .
  • the bond pads 114 are disposed on the circumference of the active surface 112 .
  • the periphery of the rigid cover 120 is adhered to the active surface 112 via the adhesive layer 130 .
  • the bond pads 114 are disposed outside the periphery of the rigid cover 120 .
  • FIG. 1C is a cross-sectional view of the first chip package of FIG. 1A connected to a printed circuit board.
  • a plurality of contacts 116 such as conductive bumps are disposed on the bond pads respectively.
  • the heights of the contacts 116 relative to the active surface 112 are larger than the height of the rigid cover 120 relative to the active surface 112 so that the chip package 100 can be connected to the PCB 140 via the contacts 116 .
  • the PCB 140 has a plurality of contact pads 142 .
  • the bond pads 114 of the chip package 100 are electrically connected to the contact pads 142 of the PCB 140 via the contacts 116 .
  • the cover 120 can be structurally or electrically connected to the PCB 140 .
  • the bond pads 114 are not limited to be disposed around the circumference of the active surface 112 .
  • the bond pads can also be disposed on one side or two sides (adjacent or opposite) of the active surface.
  • FIG. 2A is a top view of the second chip package in accordance with the first embodiment of the present invention.
  • FIG. 2B is a cross-sectional view of the second chip package of FIG. 2A along II-II′ line.
  • the chip 210 of the second chip package 200 has a plurality of bond pads 214 disposed as an area array on the active surface 212 .
  • the active surface 212 of the chip 210 has a redistribution layer (not shown), which can rearrange the bond pads 214 around the circumference of the active surface 212 with an area array.
  • the rigid cover 220 is adhered to the active surface 212 via the adhesive layer 230 .
  • the rigid cover 220 has a plurality of openings 222 corresponding to the bond pads 214 and exposing the bond pads 214 .
  • FIG. 2C is a cross-sectional view of the second chip package of FIG. 2A connected to a printed circuit board.
  • a plurality of contacts 216 is disposed on the bond pads 214 respectively.
  • the heights of the contacts 216 relative to the active surface 212 is larger than the height of the rigid cover 220 relative to the active surface 212 so that the chip package 200 can be connected to the PCB 240 via the contacts 116 .
  • the PCB 240 has a plurality of contact pads 242 .
  • the bond pads 214 of the chip package 200 are electrically connected to the contact pads 242 of the PCB 240 via the contacts 216 .
  • the rigid covers completely cover the wafers.
  • a plurality of contacts such as conductive bumps, is disposed on the bond pads respectively. Then the wafer is sawed to obtain independent chip packages. It should be noted that although the contacts can be formed before sawing the wafer, one may also choose to form the contacts on the contact pads of the PCB. Then the chip package can be connected to the PCB via these contacts.
  • the second embodiment uses a plurality of connecting lines to extend the bond pads to the backside of the chip and to form the terminal pads on the backside of the chip.
  • FIGS. 3A-3F show top views of the progression steps of the chip packaging process in accordance with the second embodiment of the present invention.
  • FIGS. 4A-4F show the cross-sectional views of the chip packaging process of FIGS. 3A-3F along III-III′ line.
  • a wafer 302 is provided.
  • the wafer 302 has an active surface 312 and a backside 316 corresponding to the active surface 312 .
  • the wafer 302 has a first chip area 310 a and a second chip area 310 b adjacent to the first chip area 310 a .
  • the wafer 302 has a plurality of first and second bond pads 314 a and 314 b on the active surface 312 in the first and second chip areas 310 a and 310 b respectively.
  • a plurality of through holes 318 are formed on the wafer 302 .
  • the through holes 318 are through the wafer 302 by laser drilling or mechanical drilling and connect the active surface 312 and the backside 316 .
  • the through holes 318 are arranged between the first chip area 310 a and the second chip area 310 b.
  • first and second connecting lines 322 a and 322 b are formed on the wafer 302 by electroplating.
  • Each of the first connecting lines 322 a has a first end through one of the through holes 318 electrically connected to one of the first bond pads 314 a .
  • Each of the first connecting lines 322 a has a second end extended to the backside 306 of the first chip area 310 a to form one first terminal pad 324 a on the backside 306 of the first chip area 310 a .
  • Each of the second connecting lines 322 b has a first end through one of the through holes 318 electrically connected to one of the second bond pads 314 b .
  • Each of the second connecting lines 322 b has a second end extended to the backside 306 of the second chip area 310 b to form one second terminal pad 324 b on the backside 306 of the second chip area 310 b . It should be noted that because the first and second connecting lines 322 a and 322 b are formed on the wafer 302 by electroplating, portions of the first connecting lines 322 a in the through holes 318 may be connected to portions of the second connecting lines 322 b in the through holes 318 respectively.
  • a first rigid cover 320 a and a second rigid cover 320 b are disposed on the active surface 312 of the first chip area 310 a and the active surface 312 of the second chip area 310 b via the adhesive layers 330 respectively.
  • the first and second rigid covers 320 a and 320 b can be a conducting material, an insulating material, and a transparent material.
  • the chip packaging process can be a wafer level packaging process.
  • the first and second rigid covers 320 a and 320 b can be a single structure.
  • first and second rigid covers 320 a and 320 b can be structurally connected via a connecting bar 320 c or other connecting structures. Therefore, only a single action is required to dispose the first and second rigid covers 320 a and 320 b on the active surface 312 .
  • the wafer 302 is sawed along an area between the first and second chip areas 310 a and 310 b by mechanical or laser sawing.
  • the portions of the first connecting lines 322 a in the through holes 318 and the portions of the second connecting lines 322 b in the through holes 318 are also sawed.
  • the lateral side of the chip 310 has a plurality of concave surfaces 318 a (i.e., a half of the through holes 318 ).
  • first connecting lines 322 a in the through holes 318 and the portions of the second connecting lines 322 b in the through holes 318 are disposed on the concave surfaces 318 a to electrically connect the bond pads 314 and the terminal pads 324 . Further, when the first and second rigid covers 320 a and 320 b is a single structure, the connecting bars 320 c will be sawed to separate the first and second rigid covers 320 a and 320 b.
  • the first chip area 310 a and the second chip area 310 b are separated from the wafer 302 by mechanical or laser sawing. Hence, the first chip area 310 a and the first rigid cover 32 a become a first chip package 300 a , the second chip area 310 b and the second rigid cover 320 b become a second chip package 300 b.
  • FIG. 5 is a cross-sectional view of the chip package of FIG. 3F connected to a printed circuit board.
  • the chip package 300 includes a chip 310 , a rigid cover 320 , and an adhesive layer 330 .
  • the chip 300 has a rectangular shape and an active surface 312 and a plurality of bond pads 314 .
  • the bond pads 314 are disposed on the circumference of the active surface 312 .
  • a plurality of connecting lines 322 extend the bond pads 314 to the backside 316 of the chip 310 to form a plurality of the terminal pads 324 .
  • the terminal pads 324 can be connected to the contact pads 342 of the PCB 340 via a pre-solder, ACP or ACF (not shown).
  • FIG. 6 is the cross-sectional view of another chip package connected to a printed circuit board in accordance with the second embodiment of the present invention.
  • the chip 310 of the second chip package 300 has a plurality of terminal pads 324 disposed as an area array on backside 316 of the chip 310 . These terminal pads 324 can be connected to the contact pads 342 of the PCB 340 via the contacts 350 such as conductive bumps.
  • the second embodiment uses a plurality of connecting lines to extend the bond pads to the backside of the chip and to form the terminal pads on the backside of the chip. Hence, when the chip is connected to the PCB, the active surface of the chip can be exposed.
  • the rigid cover is a transparent material
  • the chip package in the second embodiment can be applied in optical-electronic devices such as CMOS image sensor (CIS) and solar cell, or bio-chip.
  • the chip package and the process thereof dispose a rigid cover on the active surface of the chip to protect the active surface of the chip and enhance the structural strength of the chip package.
  • the material of the rigid cover is a thermally conductive material such as Cu or Al alloy, the heat-spread ability of the chip package can be enhanced.
  • the rigid cover is made of an electrical conductive material and electrically connected to the ground of the chip package, the electromagnetic interference (EMI) to the chip package can be reduced.
  • the rigid cover is a transparent material, the chip package can be applied in optic-electric or bio devices.
  • the chip packaging process can form a plurality of the terminal pads on the backside of the chip so that the chip package can be connected to the PCB or substrate via these terminal pads.

Abstract

A chip package is disclosed. The chip package comprises a chip, a plurality of bond pads, a plurality of connecting lines and a rigid cover. The chip has a plurality of recesses arranged along at least an edge of the chip and also has an active surface and a backside. The bond pads are disposed on the active surface and the bond pads are arranged to be corresponding to the recesses respectively. The connecting lines are disposed on surfaces of the recesses respectively at the edge of the chip. For each of the connecting lines, a first end of the connecting line is connected to one of the bond pads and a second end of the connecting line extends to the backside to be a terminal pad. The rigid cover is located on the active surface without covering the bond pads on the active surface.

Description

    CROSS-REFERENCE TO RELATED APPLICATION
  • This application is a divisional application of and claims priority benefit of a prior application Ser. No. 12/100,631, filed on Apr. 10, 2008, which is a divisional of and claims priority benefit of a prior application of U.S. patent application Ser. No. 10/810,436, filed on Mar. 25, 2004. The entirety of each of the above-mentioned patent applications is hereby incorporated by reference herein and made a part of this specification.
    • BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • This invention generally relates to a chip package and a process thereof, and more particularly to a chip package having a rigid cover on the active surface of the chip and a process thereof.
  • 2. Description of Related Art
  • In the semiconductor industry, integrated circuit (IC) manufacturing includes 3 steps—design, process, and packaging. Chips are manufactured by the steps of making wafer, designing the circuit, making the mask, sawing the wafer and so on. Each chip is electrically connected to the external circuit via the bond pads on the chip. Then the insulating material is optionally used to package the chip. The purposes of packaging are to protect the chip from moisture, heat and noise, and to provide the electrical connection between the chip and the external circuit such as printed circuit board (PCB) or other carriers.
  • As the IC packaging technology advances, the package is getting smaller. Among the IC packaging types, chip scale package (CSP) is one of the package technologies that the length of the package is smaller than 1.2 times of the length of the chip inside the package, or (the chip area/package area) is smaller than 80% while the pitch of the pins of the package is smaller than 1 mm. Based on the material and the structures, CSP includes rigid interposer type, flex interposer type, custom lead frame type, wafer level type and so on.
  • Unlike the packaging technology for single chip, the wafer level package focuses on packaging wafer in order to simplify the chip packaging process. Hence, after the integrated circuits have been manufactured on the wafer, the whole wafer can be packaged. Then the wafer sawing can be performed to form a plurality of chips from the wafer.
    • SUMMARY OF THE INVENTION
  • An object of the present invention is to provide a chip package having a better structural strength, thermal conductive efficiency, and anti-electromagnetic interference ability.
  • The present invention provides a chip package. The chip package comprises a chip, a plurality of bond pads, a plurality of connecting lines and a rigid cover. The chip has a plurality of recesses arranged along at least an edge of the chip and the chip also has an active surface and a backside opposite to the active surface. The bond pads are disposed on the active surface of the chip and the bond pads are arranged to be corresponding to the recesses respectively. The connecting lines are disposed on surfaces of the recesses respectively at the edge of the chip. For each of the connecting lines, a first end of the connecting line is connected to one of the bond pads and a second end of the connecting line extends to the backside of the chip to be a terminal pad. The rigid cover is located on the active surface of the chip without covering the bond pads on the active surface of the chip.
  • In a preferred embodiment, the chip package further comprises an adhesive layer disposed between the chip and the rigid cover, wherein the rigid cover is adhered to the chip via the adhesive layer.
  • In a preferred embodiment, the chip package further comprises a plurality of contacts electrically connected to the terminal pads respectively.
  • In a preferred embodiment, the contacts include conductive bumps.
  • In a preferred embodiment, the contacts are connected to the PCB.
  • In a preferred embodiment, the chip includes a redistribution layer on the chip to form the bond pads.
  • In a preferred embodiment, the material of the rigid cover includes a conducting material, an insulating material, or a transparent material.
  • In a preferred embodiment, the bond pads are disposed on the chip as an array.
  • In a preferred embodiment, the bond pads are disposed in an interior region of the chip.
  • According to the chip package and the process thereof, a rigid cover is disposed on the active surface of the chip to protect the active surface of the chip and enhance the structural strength of the chip package. Further, if the material of the rigid cover is a thermal conductive material such as Cu or Al alloy, the heat-spread ability of the chip package can be enhanced. If the rigid cover is made of an electrical conductive material and electrically connected to the ground of the chip package, the electromagnetic interference (EMI) to the chip package can be reduced. It should be noted that the chip packaging process could form a plurality of the terminal pads on the backside of the chip so that the chip package can be connected to the PCB or substrate via these terminal pads.
  • The above is a brief description of some deficiencies in the prior art and advantages of the present invention. Other features, advantages and embodiments of the invention will be apparent to those skilled in the art from the following description, accompanying drawings and appended claims.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1A is a top view of the first chip package in accordance with the first embodiment of the present invention.
  • FIG. 1B is a cross-sectional view of the first chip package of FIG. 1A along I-I′ line.
  • FIG. 1C is a cross-sectional view of the first chip package of FIG. 1A connected to a printed circuit board.
  • FIG. 2A is a top view of the second chip package in accordance with the first embodiment of the present invention.
  • FIG. 2B is a cross-sectional view of the second chip package of FIG. 2A along II-II′ line.
  • FIG. 2C is a cross-sectional view of the second chip package of FIG. 2A connected to a printed circuit board.
  • FIGS. 3A-3F show top views of the progression steps of the chip packaging process in accordance with the second embodiment of the present invention.
  • FIGS. 4A-4F show cross-sectional views of the chip packaging process of FIGS. 3A-3F along III-III′ line.
  • FIG. 5 is a cross-sectional view of the chip package of FIG. 3F connected to a printed circuit board.
  • FIG. 6 is a cross-sectional view of another chip package connected to a printed circuit board in accordance with a second embodiment of the present invention.
    •  DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • FIG. 1A is a top view of the first chip package in accordance with the first embodiment of the present invention. FIG. 1B is a cross-sectional view of the first chip package of FIG. 1A along I-I′ line. Referring to FIGS. 1A and 1B, the chip package 100 includes a chip 110, a rigid cover 120, and an adhesive layer 130. The chip 110 is one of a plurality of unsawed chips of the wafer (not shown). The chip 110 has a rectangular shape having an active surface 112 and a plurality of bond pads 114. The bond pads 114 are disposed on the circumference of the active surface 112. The periphery of the rigid cover 120 is adhered to the active surface 112 via the adhesive layer 130. The bond pads 114 are disposed outside the periphery of the rigid cover 120.
  • FIG. 1C is a cross-sectional view of the first chip package of FIG. 1A connected to a printed circuit board. Referring to FIGS. 1A, 1B, and 1C, a plurality of contacts 116 such as conductive bumps are disposed on the bond pads respectively. The heights of the contacts 116 relative to the active surface 112 are larger than the height of the rigid cover 120 relative to the active surface 112 so that the chip package 100 can be connected to the PCB 140 via the contacts 116. The PCB 140 has a plurality of contact pads 142. The bond pads 114 of the chip package 100 are electrically connected to the contact pads 142 of the PCB 140 via the contacts 116. Further, one can control the heights of the contacts 116 relative to the active surface 112 or the height of the rigid cover 120 relative to the active surface 112 to optionally make the rigid cover 120 contact or not contact the PCB 140. For thermal dissipation or electric characteristic consideration, the cover 120 can be structurally or electrically connected to the PCB 140. In FIGS. 1A-1C, the bond pads 114 are not limited to be disposed around the circumference of the active surface 112. The bond pads can also be disposed on one side or two sides (adjacent or opposite) of the active surface.
  • FIG. 2A is a top view of the second chip package in accordance with the first embodiment of the present invention. FIG. 2B is a cross-sectional view of the second chip package of FIG. 2A along II-II′ line. Referring to FIGS. 2A and 2B, the chip 210 of the second chip package 200 has a plurality of bond pads 214 disposed as an area array on the active surface 212. The active surface 212 of the chip 210 has a redistribution layer (not shown), which can rearrange the bond pads 214 around the circumference of the active surface 212 with an area array. Further, the rigid cover 220 is adhered to the active surface 212 via the adhesive layer 230. The rigid cover 220 has a plurality of openings 222 corresponding to the bond pads 214 and exposing the bond pads 214.
  • FIG. 2C is a cross-sectional view of the second chip package of FIG. 2A connected to a printed circuit board. A plurality of contacts 216 is disposed on the bond pads 214 respectively. The heights of the contacts 216 relative to the active surface 212 is larger than the height of the rigid cover 220 relative to the active surface 212 so that the chip package 200 can be connected to the PCB 240 via the contacts 116. The PCB 240 has a plurality of contact pads 242. The bond pads 214 of the chip package 200 are electrically connected to the contact pads 242 of the PCB 240 via the contacts 216.
  • In the above first and second chip packages, the rigid covers completely cover the wafers. A plurality of contacts such as conductive bumps, is disposed on the bond pads respectively. Then the wafer is sawed to obtain independent chip packages. It should be noted that although the contacts can be formed before sawing the wafer, one may also choose to form the contacts on the contact pads of the PCB. Then the chip package can be connected to the PCB via these contacts.
  • The second embodiment uses a plurality of connecting lines to extend the bond pads to the backside of the chip and to form the terminal pads on the backside of the chip.
  • FIGS. 3A-3F show top views of the progression steps of the chip packaging process in accordance with the second embodiment of the present invention. FIGS. 4A-4F show the cross-sectional views of the chip packaging process of FIGS. 3A-3F along III-III′ line. Referring to FIGS. 3A and 4A, a wafer 302 is provided. The wafer 302 has an active surface 312 and a backside 316 corresponding to the active surface 312. The wafer 302 has a first chip area 310 a and a second chip area 310 b adjacent to the first chip area 310 a. The wafer 302 has a plurality of first and second bond pads 314 a and 314 b on the active surface 312 in the first and second chip areas 310 a and 310 b respectively.
  • Referring to FIGS. 3B and 4B, a plurality of through holes 318 are formed on the wafer 302. The through holes 318 are through the wafer 302 by laser drilling or mechanical drilling and connect the active surface 312 and the backside 316. The through holes 318 are arranged between the first chip area 310 a and the second chip area 310 b.
  • Referring to FIGS. 3C and 4C, a plurality of first and second connecting lines 322 a and 322 b are formed on the wafer 302 by electroplating. Each of the first connecting lines 322 a has a first end through one of the through holes 318 electrically connected to one of the first bond pads 314 a. Each of the first connecting lines 322 a has a second end extended to the backside 306 of the first chip area 310 a to form one first terminal pad 324 a on the backside 306 of the first chip area 310 a. Each of the second connecting lines 322 b has a first end through one of the through holes 318 electrically connected to one of the second bond pads 314 b. Each of the second connecting lines 322 b has a second end extended to the backside 306 of the second chip area 310 b to form one second terminal pad 324 b on the backside 306 of the second chip area 310 b. It should be noted that because the first and second connecting lines 322 a and 322 b are formed on the wafer 302 by electroplating, portions of the first connecting lines 322 a in the through holes 318 may be connected to portions of the second connecting lines 322 b in the through holes 318 respectively.
  • Referring to FIGS. 3D and 4D, a first rigid cover 320 a and a second rigid cover 320 b are disposed on the active surface 312 of the first chip area 310 a and the active surface 312 of the second chip area 310 b via the adhesive layers 330 respectively. For thermal dissipation or electric characteristic consideration, the first and second rigid covers 320 a and 320 b can be a conducting material, an insulating material, and a transparent material. Further, the chip packaging process can be a wafer level packaging process. Hence, the first and second rigid covers 320 a and 320 b can be a single structure. That is, the first and second rigid covers 320 a and 320 b can be structurally connected via a connecting bar 320 c or other connecting structures. Therefore, only a single action is required to dispose the first and second rigid covers 320 a and 320 b on the active surface 312.
  • Referring to FIGS. 3E and 4E, the wafer 302 is sawed along an area between the first and second chip areas 310 a and 310 b by mechanical or laser sawing. The portions of the first connecting lines 322 a in the through holes 318 and the portions of the second connecting lines 322 b in the through holes 318 are also sawed. Hence, the lateral side of the chip 310 has a plurality of concave surfaces 318 a (i.e., a half of the through holes 318). The portions of the first connecting lines 322 a in the through holes 318 and the portions of the second connecting lines 322 b in the through holes 318 are disposed on the concave surfaces 318 a to electrically connect the bond pads 314 and the terminal pads 324. Further, when the first and second rigid covers 320 a and 320 b is a single structure, the connecting bars 320 c will be sawed to separate the first and second rigid covers 320 a and 320 b.
  • Referring to FIGS. 3F and 4F, the first chip area 310 a and the second chip area 310 b are separated from the wafer 302 by mechanical or laser sawing. Hence, the first chip area 310 a and the first rigid cover 32 a become a first chip package 300 a, the second chip area 310 b and the second rigid cover 320 b become a second chip package 300 b.
  • FIG. 5 is a cross-sectional view of the chip package of FIG. 3F connected to a printed circuit board. The chip package 300 includes a chip 310, a rigid cover 320, and an adhesive layer 330. The chip 300 has a rectangular shape and an active surface 312 and a plurality of bond pads 314. The bond pads 314 are disposed on the circumference of the active surface 312. A plurality of connecting lines 322 extend the bond pads 314 to the backside 316 of the chip 310 to form a plurality of the terminal pads 324. The terminal pads 324 can be connected to the contact pads 342 of the PCB 340 via a pre-solder, ACP or ACF (not shown).
  • FIG. 6 is the cross-sectional view of another chip package connected to a printed circuit board in accordance with the second embodiment of the present invention. Compared to FIG. 5, the chip 310 of the second chip package 300 has a plurality of terminal pads 324 disposed as an area array on backside 316 of the chip 310. These terminal pads 324 can be connected to the contact pads 342 of the PCB 340 via the contacts 350 such as conductive bumps.
  • The second embodiment uses a plurality of connecting lines to extend the bond pads to the backside of the chip and to form the terminal pads on the backside of the chip. Hence, when the chip is connected to the PCB, the active surface of the chip can be exposed. When the rigid cover is a transparent material, the chip package in the second embodiment can be applied in optical-electronic devices such as CMOS image sensor (CIS) and solar cell, or bio-chip.
  • In brief, the chip package and the process thereof dispose a rigid cover on the active surface of the chip to protect the active surface of the chip and enhance the structural strength of the chip package. Further, if the material of the rigid cover is a thermally conductive material such as Cu or Al alloy, the heat-spread ability of the chip package can be enhanced. If the rigid cover is made of an electrical conductive material and electrically connected to the ground of the chip package, the electromagnetic interference (EMI) to the chip package can be reduced. If the rigid cover is a transparent material, the chip package can be applied in optic-electric or bio devices. In addition, the chip packaging process can form a plurality of the terminal pads on the backside of the chip so that the chip package can be connected to the PCB or substrate via these terminal pads.
  • The above description provides a full and complete description of the preferred embodiments of the present invention. Various modifications, alternate construction, and equivalent may be made by those skilled in the art without changing the scope or spirit of the invention. Accordingly, the above description and illustrations should not be construed as limiting the scope of the invention which is defined by the following claims.

Claims (9)

1. A chip package, comprising:
a chip having a plurality of recesses arranged along at least an edge of the chip, wherein the chip has an active surface and a backside opposite to the active surface;
a plurality of bond pads on the active surface of the chip, wherein the bond pads are arranged to be corresponding to the recesses respectively;
a plurality of connecting lines disposed on surfaces of the recesses respectively at the edge of the chip, wherein, for each of the connecting lines, a first end of the connecting line is connected to one of the bond pads and a second end of the connecting line extends to the backside of the chip to be a terminal pad; and
a rigid cover located on the active surface of the chip without covering the bond pads on the active surface of the chip.
2. The chip package of claim 1 further comprising an adhesive layer disposed between the chip and the rigid cover, wherein the rigid cover is adhered to the chip via the adhesive layer.
3. The chip package of claim 1 further comprising a plurality of contacts electrically connected to the terminal pads respectively.
4. The chip package of claim 3, wherein the contacts include conductive bumps.
5. The chip package of claim 3, wherein the contacts are connected to the PCB.
6. The chip package of claim 1, wherein the chip includes a redistribution layer on the active surface of the chip to form the bond pads.
7. The chip package of claim 1, wherein the material of the rigid cover is selected from a group comprising a conducting material, an insulating material, and a transparent material.
8. The chip package of claim 1, wherein the bond pads are disposed on the chip as an array.
9. The chip package of claim 1, wherein the bond pads are disposed in an interior region of the chip.
US12/437,817 2004-03-25 2009-05-08 Chip package and process thereof Abandoned US20090218679A1 (en)

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US20050212132A1 (en) 2005-09-29
US20070085206A1 (en) 2007-04-19

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