US20100013067A9 - Stress Mitigation in Packaged Microchips - Google Patents

Stress Mitigation in Packaged Microchips Download PDF

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Publication number
US20100013067A9
US20100013067A9 US11/770,369 US77036907A US2010013067A9 US 20100013067 A9 US20100013067 A9 US 20100013067A9 US 77036907 A US77036907 A US 77036907A US 2010013067 A9 US2010013067 A9 US 2010013067A9
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Prior art keywords
base
leadframe
package
lid
exterior surface
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Granted
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US11/770,369
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US20090230521A2 (en
US8344487B2 (en
US20080157298A1 (en
Inventor
Xin Zhang
Michael Judy
Kevin H.L. Chau
Nelson Kuan
Timothy Spooner
Chetan Paydenkar
Peter Farrell
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Analog Devices Inc
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Analog Devices Inc
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Assigned to ANALOG DEVICES, INC. reassignment ANALOG DEVICES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHAU, KEVIN H.L., SPOONER, TIMOTHY, JUDY, MICHAEL, FARRELL, PETER, PAYDENKAR, CHETAN, ZHANG, XIN
Assigned to ANALOG DEVICES, INC. reassignment ANALOG DEVICES, INC. NOTICE OF OWNERSHIP OF RIGHTS Assignors: KUAN, NELSON
Assigned to ANALOG DEVICES, INC. reassignment ANALOG DEVICES, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KUAN, NELSON
Publication of US20080157298A1 publication Critical patent/US20080157298A1/en
Publication of US20090230521A2 publication Critical patent/US20090230521A2/en
Publication of US20100013067A9 publication Critical patent/US20100013067A9/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
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    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3142Sealing arrangements between parts, e.g. adhesion promotors
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    • H01L23/00Details of semiconductor or other solid state devices
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
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    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49503Lead-frames or other flat leads characterised by the die pad
    • H01L23/4951Chip-on-leads or leads-on-chip techniques, i.e. inner lead fingers being used as die pad
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
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    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48471Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area being a ball bond, i.e. wedge-to-ball, reverse stitch
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    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
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    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
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    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/102Material of the semiconductor or solid state bodies
    • H01L2924/1025Semiconducting materials
    • H01L2924/10251Elemental semiconductors, i.e. Group IV
    • H01L2924/10253Silicon [Si]
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    • H01L2924/10Details of semiconductor or other solid state devices to be connected
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    • H01L2924/14Integrated circuits
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    • H01L2924/14Integrated circuits
    • H01L2924/143Digital devices
    • H01L2924/1433Application-specific integrated circuit [ASIC]
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    • H01L2924/151Die mounting substrate
    • H01L2924/156Material
    • H01L2924/157Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
    • H01L2924/15738Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950 C and less than 1550 C
    • H01L2924/15747Copper [Cu] as principal constituent
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    • H01L2924/19041Component type being a capacitor

Definitions

  • the invention generally relates to electronic device packaging and, more particularly, the invention relates to mounting orientations of electronic packages.
  • Leadframe based packages commonly are formed to be surface mounted in a horizontal orientation.
  • the exterior package surface having the largest surface area i.e., often referred to as the “bottom side” of the package
  • the bottom side typically is surface mounted to a printed circuit board or other similar interconnection apparatus.
  • this mounting orientation is not optimal.
  • an accelerometer often is oriented along a specific axis. As such, it generally requires a specific mounting orientation.
  • the circuit board supporting the accelerometer therefore must be mounted within the underlying device in the correct orientation. Requiring that a circuit board be mounted in a specific orientation can be cumbersome and inefficient.
  • a package apparatus has a base coupled with a lid to form a leadframe package.
  • the package has first and second exterior surfaces with respective first and second contact patterns.
  • the first exterior surface is in a plane that intersects the plane of the second exterior surface (e.g., the two planes are not parallel).
  • the first and second contact patterns are substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.
  • the base and lid illustratively form a premolded leadframe package with a chamber for receiving an integrated circuit.
  • the package apparatus also may have an integrated circuit (e.g., a MEMS device, such as an accelerometer or a gyroscope) secured within the chamber.
  • the integrated circuit may be substantially identically electrically connected with the first contact pattern and the second contact pattern.
  • the lid and base include a moldable material.
  • the first contact pattern may have a first plurality of contacts substantially embedded within the moldable material of at least one of the lid and base.
  • the contacts are exposed for mounting to an exterior apparatus. Accordingly, the moldable material does not completely encapsulate the contacts of this embodiment.
  • the second contact pattern may have a second plurality of contacts substantially embedded within the moldable material of at least one of the lid and base.
  • the first exterior surface is orthogonal to the second exterior surface.
  • the base has a base leadframe that is in electrical contact with a leadframe embedded by moldable material of the lid.
  • the base may have a plurality of walls that form a chamber for receiving an integrated circuit.
  • a method of forming a packaged integrated circuit forms at least one leadframe to have a first plurality of contacts and a second plurality of contacts.
  • the method encapsulates a portion of the at least one leadframe within a moldable material to form a base and a lid.
  • the method secures an integrated circuit to the base, and electrically connects the integrated circuit with the a least one leadframe.
  • the integrated circuit substantially identically electrically connects with the first plurality of contacts and the second plurality of contacts.
  • the method connects the base to the lid to form a premolded package having first and second orthogonal, exterior surfaces. After the package is formed, the first plurality of contacts are on the first exterior surface, while the second plurality of contacts are on the second exterior surface.
  • FIG. 1 schematically shows a bottom perspective view of a package configured in accordance with illustrative embodiments of the invention.
  • FIG. 2 schematically shows a bottom perspective view of another package configured in accordance with illustrative embodiments of the invention.
  • FIG. 3 schematically shows a cross-sectional, partially exploded view of the package shown in FIG. 1 along line 3 - 3 .
  • FIG. 4 schematically shows the package of FIG. 1 coupled with a printed circuit board.
  • FIG. 5 shows a process of forming the packaged microchip shown in FIG. 1 in accordance with illustrative embodiments of the invention.
  • a premolded leadframe package has at least two, non-parallel exterior sides with substantially electrically identical contact patterns. Accordingly, such a package is capable of being mounted in at least two different orientations (e.g., on its side surface or on its bottom surface). Designers thus can orient the package to the requirements of a particular application—they no longer are limited to orienting the printed circuit board only. Details of various embodiments are discussed below.
  • FIG. 1 schematically shows a bottom, perspective view of a packaged electronic device 10 (also referred to as a “packaged microchip 10 ”) configured in accordance with illustrative embodiments of the invention.
  • the packaged electronic device 10 can contain an integrated circuit chip, such as an ASIC or a MEMS device (see FIG. 3 , discussed below).
  • the packaged electronic device 10 can function as an inertial sensor, such as an accelerometer or gyroscope, or as a transducer, such as a microphone or microspeaker.
  • the packaged electronic device 10 shown in FIG. 1 has a base 12 that, together with a corresponding lid 14 , forms a premolded leadframe package 13 for containing circuitry, such as the above noted integrated circuit chips and/or other circuitry.
  • the leadframe package 13 of this embodiment has a generally rectangular cross-sectional shape with six sides; namely, a top surface 22 A, a bottom surface 22 B and four side surfaces 20 .
  • the top and bottom surfaces 22 A and 22 B have larger surface areas than those of the side surfaces 20 .
  • some of the surfaces 20 , 22 A, and 22 B of the embodiment shown are generally orthogonal to each of their adjacent surfaces.
  • at least two generally nonparallel (e.g., orthogonal) surfaces 20 , 22 A, and 22 B of the package 13 have separate but substantially electrically equivalent contact patterns (generally identified by reference number “ 18 ”).
  • one side surface 20 may have a first contact pattern 18
  • the bottom surface 22 B may have a second contact pattern 18
  • the first contact pattern 18 on the side surface 20 may be substantially electrically equivalent to the second contact pattern 18 on the bottom surface 22 B.
  • each contact (also identified by reference number “ 18 ”) of the first contact pattern 18 may have a corresponding, electrically equivalent contact 18 on the second contact pattern 18 .
  • one contact 18 (or more contacts 18 ) on the first contact pattern 18 may have multiple corresponding, electrically equivalent contacts 18 on the second contact pattern 18 .
  • the package 13 may mount to an underlying interconnect apparatus 24 (see FIG. 4 , discussed below) either on its side surface 20 , or on its bottom surface 22 B.
  • a set of one or more contacts 18 may be considered to be substantially electrically identical or equivalent with another set of one or more contacts 18 on another surface when either set may be used to make the same electrical connection with the internal circuitry of the package 13 .
  • the internal chip may be a gyroscope having an output for forwarding an output signal identifying rotational movement. If this gyroscope output is electrically connected to a first set of contacts 18 on one side surface 20 of the package 13 , and also to a second set of contacts 18 on the bottom surface 22 B, then the first and second sets of contacts 18 each receive substantially identical electrical signals. As such, the first and second sets of contacts 18 are considered to be substantially electrically identical. Accordingly, either the bottom surface 22 B or the side surface 20 may be mounted to an interconnect apparatus 24 , thus providing flexibility in the mounting orientation of the package 13 .
  • electrical equivalence does not necessarily require a one-to-one relationship between the contacts 18 of two different sides.
  • one side of the package 13 may have a single contact 18 for forwarding a specific signal to, or receiving a specific signal from, internal package components.
  • the package 13 may have two or more contacts 18 on another side for providing the same electrical connection (i.e., for forwarding or receiving the same specific signal). These two or more contacts 18 on the other side may be required to receive the entire signal (e.g., each provides a portion of the signal), or both may receive the same signal.
  • the package 13 shown in FIG. 1 may be surface mounted to a printed circuit board 24 or related apparatus on one of its side surfaces 20 (see FIG. 4 , discussed below), on its bottom surface 22 B, or on its top surface 22 A (if it has contacts 18 ).
  • the application therefore can dictate the ultimate orientation. It should be noted that the number and positioning of contacts 18 can vary depending upon application.
  • Illustrative embodiments use conventional surface mounting techniques to secure the package 13 to an underlying interconnect apparatus 24 , such as a printed circuit board 24 .
  • an underlying interconnect apparatus 24 such as a printed circuit board 24
  • other embodiments may use other techniques for securing the package 13 , such as with solder balls.
  • the contacts 18 illustratively are formed as far apart as possible on a given surface.
  • the two side surfaces 20 may each have contacts 18 at or near its far corners. In some embodiments, however, the contacts 18 are not at the corners. If the contacts 18 are embedded (discussed below) and flush with the molding material, the side or surface 20 , 22 A or 22 B may provide much of the support.
  • FIG. 3 schematically shows a cross-sectional, partially exploded view of the packaged electronic device 10 shown in FIG. 1 along line 3 - 3 .
  • This view shows an internal chamber 32 formed by coupling the lid 14 to the base 12 , and the chip 16 mounted therein. Moreover, this view also shows a part of the interior leadframe(s) 26 , its/their extension to the bottom and side surfaces 22 B and 20 , and its/their coupling to the chip 16 via wirebonds 28 .
  • this figure shows the interior chamber 32 containing circuitry, such as a chip 16 and/or analog circuitry.
  • circuitry such as a chip 16 and/or analog circuitry.
  • the chip 16 is discussed. It nevertheless should be recognized that different circuitry (other than, or in addition to the chip 16 ) may be within the chamber 32 .
  • the base 12 in this embodiment is a premolded, leadframe cavity-type base, which has four walls 30 extending generally orthogonally from a bottom, interior face to form a cavity.
  • the lid 14 also effectively is a premolded, leadframe lid.
  • the lid 14 comprises a leadframe 26 encapsulated by molding material.
  • the lid 14 also has exposed metal forming contacts 18 and electrically connecting with the leadframe 26 of the base 12 .
  • this type of leadframe package 13 shown in FIG. 3 is formed from at least two leadframes 26 . In alternative embodiments, however, the lid 14 does not have a leadframe.
  • the lid 14 secures to the top face of the walls 30 to form the interior chamber 32 .
  • one or more details 34 in the base 12 may mate with corresponding details 34 formed in the lid 14 .
  • the details 34 of the base 12 may be upwardly extending protrusions, while the details 34 of the lid 14 may be corresponding orifices.
  • physical connection of the lid 14 and base 12 mechanically and electrically connects the leadframes 26 of the lid 14 and the base 12 .
  • the lid 14 and base 12 thus form a premolded, leadframe-type package 13 (also referred to as a “premolded package 13 ”).
  • a premolded package has a moldable material (e.g., polymeric material, such as plastic) molded directly to a leadframe.
  • a moldable material e.g., polymeric material, such as plastic
  • Such package type generally is formed before the chip 16 is secured to it. This package type thus typically is ready to accept the chip 16 without requiring any additional molding operations.
  • a premolded, leadframe-type package is ready made to package the electronic chip 16 .
  • This is in contrast to certain types of other plastic packages, such as “overmolded” or “post-molded” packages, which apply molten plastic to the chip 16 after it is coupled with leads of its leadframe.
  • some embodiments can apply to post-molded and other technologies. For example, among others, some embodiments may apply to ceramic packages or stacked laminated packages using leadframes, vias, or other conductive paths to make appropriate connections.
  • FIG. 4 schematically shows the packaged microchip 10 mounted on one of its side surfaces 20 to a printed circuit board 24 .
  • the package 13 is coupled to the printed circuit board 24 at or near its corners. It should be noted, however, that some embodiments may mount the package 13 inwardly from its corners.
  • the contacts 18 may be any of a plurality of different types of contacts. Among other things, the embodiment shown in FIGS. 1-4 has pads, which are substantially embedded within the molding material of the package 13 . It should be noted that the molding material does not completely encapsulate this type of contact 18 —it must be partially exposed to electrically connect with an interconnect apparatus 24 . For example, the contact 18 may be flush with the mold material. Alternatively, the contact 18 may be somewhat recessed within, or somewhat protruding from, the mold material. In other embodiments, however, the contacts 18 may be pins extending from the package 13 .
  • FIG. 5 shows a process of forming the packaged microchip 10 shown in FIG. 1 in accordance with illustrative embodiments of the invention. This process shows various primary steps of a much larger process. Accordingly, those in the art should understand that further steps may be added, or some of the steps shown may be modified or omitted depending upon the application.
  • the process begins at step 500 , which processes a pair of leadframes 26 .
  • the process stamps, etches, and/or bends, etc . . . a first leadframe 26 for use as the base 12 , and a second leadframe 26 for use as the lid 14 .
  • Conventional techniques thus may form the leadframes 26 so that they have the configuration shown in FIG. 3 . More particularly, as shown in FIG. 3 , the leadframes 26 are formed to ensure that the ultimately package 13 has contacts 18 on at least two adjacent surfaces. In addition, the leadframes 26 also are formed to ensure proper electrical communication between the lid 14 and the base 12 .
  • the process preferably uses batch processing techniques, which process two-dimensional arrays of leadframes 26 that ultimately are diced. For simplicity, however, the process of FIG. 5 is discussed without application of batch processing techniques.
  • step 502 encapsulates the leadframes 26 in a molding material, such as a conventional plastic. Accordingly, after completing this step, the process has formed the primary components of the leadframe package 13 , which includes the lid 14 and base 12 shown in the figures.
  • the process may secure the die 16 and circuitry within the base 12 (step 504 ).
  • the die 16 may be secured with a conventional adhesive or other apparatus to a die attach pad or similar surface within the cavity of the base 12 .
  • Additional circuitry may be added, such as an application-specific integrated circuit (i.e., an ASIC) or a discrete circuit element (e.g., a capacitor).
  • the process electrically connects the electrical interfaces of the die 16 with the leadframe 26 of the base 12 (step 506 ).
  • the process may connect the wirebonds 28 to specified portions of the leadframe 26 in the base 12 .
  • one wirebond 28 connects with a first lead to the left of the die 16 (from the perspective of the drawing), while another wirebond 28 connects with a second lead to the right of the die 16 .
  • the lead to the left of the die 16 effectively forms two contacts 18 ; namely, one contact 18 on the bottom surface 22 B and another, electrically equivalent/identical contact 18 on the side surface 20 .
  • the lead to the right of the die 16 connects to another contact 18 on the bottom surface 22 B and an exposed metal lead at the top of the base 12 .
  • step 508 secures the lid 14 to the base 12 .
  • Any conventional means may be used to secure the two together, such as by using an adhesive or an ultrasonic weld.
  • the bottom portion of the lid leadframe 26 mechanically contacts the exposed metal at the top of the base 12 . This mechanical contact electrically connects the lead positioned to the right of the die 16 to a second contact 18 on the side surface 20 of the lid 14 .
  • discussion of only two contacts 18 is for simplicity only. Actual applications often can have many more contacts 18 .
  • the premolded package 13 shown in FIG. 3 thus has substantially electrically identical contact patterns 18 on the bottom surface 22 B and side surface 20 .
  • the package 13 may be horizontally mounted (i.e., mounted on its bottom surface 22 B) or vertically mounted (i.e., mounted on its side surface 20 , as shown in FIG. 4 ) to an underlying interconnect apparatus 24 .
  • various embodiments of this invention enable a single packaged microchip 10 to perform both functions.
  • illustrative embodiments are intended to provide a lower cost, flexible mounting solution in a number of applications.
  • test handling equipment and fixturing may be configured to test horizontal parts, which are designed for horizontal mounting.
  • test equipment for vertical mounted (packaged) microchips, however, such a test device may not suffice.
  • packaged microchips that are to be vertically mounted to be tested in a horizontal orientation.
  • the lid 14 can form a cavity rather than, or in addition to the base 12 .
  • the package 13 can have adjacent sides/surfaces that are not substantially orthogonal (e.g., see FIG. 1 ), or packages having more or fewer than six sides.
  • the package 13 can have angled or curved surfaces between the top surface 22 A and side surface 20 .
  • discussion of leadframes as providing the conductive paths and contacts 18 is illustrative.
  • leadframes and other conductive members may provide appropriate connections and contacts 18 . Accordingly, those in the art can modify various aspects and still achieve the various advantages of illustrative embodiments.

Abstract

A package apparatus has a base coupled with a lid to form a leadframe package. The package has first and second exterior surfaces with respective first and second contact patterns. The first and second contact patterns are substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.

Description

    PRIORITY
  • This patent application claims priority from provisional U.S. patent application No. 60/832,742, filed Jul. 21, 2006, entitled, “PACKAGE HAVING A PLURALITY OF MOUNTING ORIENTATIONS,” and naming Timothy R. Spooner and Nelson Kuan as inventors, the disclosure of which is incorporated herein, in its entirety, by reference.
  • FIELD OF THE INVENTION
  • The invention generally relates to electronic device packaging and, more particularly, the invention relates to mounting orientations of electronic packages.
  • BACKGROUND OF THE INVENTION
  • Leadframe based packages commonly are formed to be surface mounted in a horizontal orientation. Specifically, during use, the exterior package surface having the largest surface area (i.e., often referred to as the “bottom side” of the package) typically is surface mounted to a printed circuit board or other similar interconnection apparatus. There are times, however, when this mounting orientation is not optimal. For example, as known by those skilled in the art, an accelerometer often is oriented along a specific axis. As such, it generally requires a specific mounting orientation. The circuit board supporting the accelerometer therefore must be mounted within the underlying device in the correct orientation. Requiring that a circuit board be mounted in a specific orientation can be cumbersome and inefficient.
  • SUMMARY OF THE INVENTION
  • In accordance with one embodiment of the invention, a package apparatus has a base coupled with a lid to form a leadframe package. The package has first and second exterior surfaces with respective first and second contact patterns. In illustrative embodiments, the first exterior surface is in a plane that intersects the plane of the second exterior surface (e.g., the two planes are not parallel). The first and second contact patterns are substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.
  • The base and lid illustratively form a premolded leadframe package with a chamber for receiving an integrated circuit. The package apparatus also may have an integrated circuit (e.g., a MEMS device, such as an accelerometer or a gyroscope) secured within the chamber. The integrated circuit may be substantially identically electrically connected with the first contact pattern and the second contact pattern.
  • As premolded components, the lid and base include a moldable material. The first contact pattern may have a first plurality of contacts substantially embedded within the moldable material of at least one of the lid and base. Of course, although embedded, the contacts are exposed for mounting to an exterior apparatus. Accordingly, the moldable material does not completely encapsulate the contacts of this embodiment. In a similar manner, the second contact pattern may have a second plurality of contacts substantially embedded within the moldable material of at least one of the lid and base. In some embodiments, the first exterior surface is orthogonal to the second exterior surface.
  • In some embodiments, the base has a base leadframe that is in electrical contact with a leadframe embedded by moldable material of the lid. Moreover, the base may have a plurality of walls that form a chamber for receiving an integrated circuit.
  • In accordance with another embodiment of the invention, a method of forming a packaged integrated circuit forms at least one leadframe to have a first plurality of contacts and a second plurality of contacts. Next, the method encapsulates a portion of the at least one leadframe within a moldable material to form a base and a lid. After encapsulating, the method secures an integrated circuit to the base, and electrically connects the integrated circuit with the a least one leadframe. Specifically, the integrated circuit substantially identically electrically connects with the first plurality of contacts and the second plurality of contacts. Finally, the method connects the base to the lid to form a premolded package having first and second orthogonal, exterior surfaces. After the package is formed, the first plurality of contacts are on the first exterior surface, while the second plurality of contacts are on the second exterior surface.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The foregoing advantages of the invention will be appreciated more fully from the following further description thereof with reference to the accompanying drawings wherein:
  • FIG. 1 schematically shows a bottom perspective view of a package configured in accordance with illustrative embodiments of the invention.
  • FIG. 2 schematically shows a bottom perspective view of another package configured in accordance with illustrative embodiments of the invention.
  • FIG. 3 schematically shows a cross-sectional, partially exploded view of the package shown in FIG. 1 along line 3-3.
  • FIG. 4 schematically shows the package of FIG. 1 coupled with a printed circuit board.
  • FIG. 5 shows a process of forming the packaged microchip shown in FIG. 1 in accordance with illustrative embodiments of the invention.
  • DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
  • In illustrative embodiments of the invention, a premolded leadframe package has at least two, non-parallel exterior sides with substantially electrically identical contact patterns. Accordingly, such a package is capable of being mounted in at least two different orientations (e.g., on its side surface or on its bottom surface). Designers thus can orient the package to the requirements of a particular application—they no longer are limited to orienting the printed circuit board only. Details of various embodiments are discussed below.
  • FIG. 1 schematically shows a bottom, perspective view of a packaged electronic device 10 (also referred to as a “packaged microchip 10”) configured in accordance with illustrative embodiments of the invention. Among other things, the packaged electronic device 10 can contain an integrated circuit chip, such as an ASIC or a MEMS device (see FIG. 3, discussed below). For example, if a MEMS device, the packaged electronic device 10 can function as an inertial sensor, such as an accelerometer or gyroscope, or as a transducer, such as a microphone or microspeaker.
  • The packaged electronic device 10 shown in FIG. 1 has a base 12 that, together with a corresponding lid 14, forms a premolded leadframe package 13 for containing circuitry, such as the above noted integrated circuit chips and/or other circuitry. In a manner similar to many other types of packages, the leadframe package 13 of this embodiment has a generally rectangular cross-sectional shape with six sides; namely, a top surface 22A, a bottom surface 22B and four side surfaces 20. The top and bottom surfaces 22A and 22B have larger surface areas than those of the side surfaces 20. As shown, some of the surfaces 20, 22A, and 22B of the embodiment shown are generally orthogonal to each of their adjacent surfaces. Moreover, as discussed above and shown in FIG. 1, at least two generally nonparallel (e.g., orthogonal) surfaces 20, 22A, and 22B of the package 13 have separate but substantially electrically equivalent contact patterns (generally identified by reference number “18”).
  • For example, one side surface 20 may have a first contact pattern 18, while the bottom surface 22B may have a second contact pattern 18. In accordance with illustrative embodiments of the invention, the first contact pattern 18 on the side surface 20 may be substantially electrically equivalent to the second contact pattern 18 on the bottom surface 22B. Among other ways, each contact (also identified by reference number “18”) of the first contact pattern 18 may have a corresponding, electrically equivalent contact 18 on the second contact pattern 18. Alternatively, one contact 18 (or more contacts 18) on the first contact pattern 18 may have multiple corresponding, electrically equivalent contacts 18 on the second contact pattern 18. Accordingly, in this example, the package 13 may mount to an underlying interconnect apparatus 24 (see FIG. 4, discussed below) either on its side surface 20, or on its bottom surface 22B.
  • A set of one or more contacts 18 may be considered to be substantially electrically identical or equivalent with another set of one or more contacts 18 on another surface when either set may be used to make the same electrical connection with the internal circuitry of the package 13. For example, the internal chip may be a gyroscope having an output for forwarding an output signal identifying rotational movement. If this gyroscope output is electrically connected to a first set of contacts 18 on one side surface 20 of the package 13, and also to a second set of contacts 18 on the bottom surface 22B, then the first and second sets of contacts 18 each receive substantially identical electrical signals. As such, the first and second sets of contacts 18 are considered to be substantially electrically identical. Accordingly, either the bottom surface 22B or the side surface 20 may be mounted to an interconnect apparatus 24, thus providing flexibility in the mounting orientation of the package 13.
  • As noted above, electrical equivalence does not necessarily require a one-to-one relationship between the contacts 18 of two different sides. For example, one side of the package 13 may have a single contact 18 for forwarding a specific signal to, or receiving a specific signal from, internal package components. The package 13, however, may have two or more contacts 18 on another side for providing the same electrical connection (i.e., for forwarding or receiving the same specific signal). These two or more contacts 18 on the other side may be required to receive the entire signal (e.g., each provides a portion of the signal), or both may receive the same signal.
  • Accordingly, the package 13 shown in FIG. 1 may be surface mounted to a printed circuit board 24 or related apparatus on one of its side surfaces 20 (see FIG. 4, discussed below), on its bottom surface 22B, or on its top surface 22A (if it has contacts 18). The application therefore can dictate the ultimate orientation. It should be noted that the number and positioning of contacts 18 can vary depending upon application.
  • Illustrative embodiments use conventional surface mounting techniques to secure the package 13 to an underlying interconnect apparatus 24, such as a printed circuit board 24. Of course, other embodiments may use other techniques for securing the package 13, such as with solder balls.
  • To improve stability, the contacts 18 illustratively are formed as far apart as possible on a given surface. For example, the two side surfaces 20 may each have contacts 18 at or near its far corners. In some embodiments, however, the contacts 18 are not at the corners. If the contacts 18 are embedded (discussed below) and flush with the molding material, the side or surface 20, 22A or 22B may provide much of the support.
  • It should be noted that discussion of adjacent sides or orthogonal sides and the relationship of contact patterns 18 is illustrative of several embodiments only. Such embodiments necessarily fall under the general characterization of being two non-parallel sides. In other words, at least one side having the noted contact pattern 18 is in a plane that intersects the plane of the other side (having the electrically identical contact pattern 18). Moreover, as shown in FIG. 2, some of these non-parallel sides are not necessarily on adjacent sides (i.e., FIG. 2 shows intermediate sides 22C that are between the primary sides 20, 22A and 22B). Accordingly, discussion of adjacent sides, or orthogonal sides, is not intended to limit many other embodiments of the invention.
  • FIG. 3 schematically shows a cross-sectional, partially exploded view of the packaged electronic device 10 shown in FIG. 1 along line 3-3. This view shows an internal chamber 32 formed by coupling the lid 14 to the base 12, and the chip 16 mounted therein. Moreover, this view also shows a part of the interior leadframe(s) 26, its/their extension to the bottom and side surfaces 22B and 20, and its/their coupling to the chip 16 via wirebonds 28.
  • Specifically, this figure shows the interior chamber 32 containing circuitry, such as a chip 16 and/or analog circuitry. For simplicity, only the chip 16 is discussed. It nevertheless should be recognized that different circuitry (other than, or in addition to the chip 16) may be within the chamber 32.
  • The base 12 in this embodiment is a premolded, leadframe cavity-type base, which has four walls 30 extending generally orthogonally from a bottom, interior face to form a cavity. In a similar manner, the lid 14 also effectively is a premolded, leadframe lid. In other words, the lid 14 comprises a leadframe 26 encapsulated by molding material. Like the base 12, the lid 14 also has exposed metal forming contacts 18 and electrically connecting with the leadframe 26 of the base 12. Accordingly, this type of leadframe package 13 shown in FIG. 3 is formed from at least two leadframes 26. In alternative embodiments, however, the lid 14 does not have a leadframe.
  • The lid 14 secures to the top face of the walls 30 to form the interior chamber 32. To ensure a proper physical connection, one or more details 34 in the base 12 may mate with corresponding details 34 formed in the lid 14. For example, the details 34 of the base 12 may be upwardly extending protrusions, while the details 34 of the lid 14 may be corresponding orifices. As noted above, physical connection of the lid 14 and base 12 mechanically and electrically connects the leadframes 26 of the lid 14 and the base 12. The lid 14 and base 12 thus form a premolded, leadframe-type package 13 (also referred to as a “premolded package 13”).
  • As known by those in the art, a premolded package has a moldable material (e.g., polymeric material, such as plastic) molded directly to a leadframe. Such package type generally is formed before the chip 16 is secured to it. This package type thus typically is ready to accept the chip 16 without requiring any additional molding operations. In other words, a premolded, leadframe-type package is ready made to package the electronic chip 16. This is in contrast to certain types of other plastic packages, such as “overmolded” or “post-molded” packages, which apply molten plastic to the chip 16 after it is coupled with leads of its leadframe. It nevertheless is anticipated that some embodiments can apply to post-molded and other technologies. For example, among others, some embodiments may apply to ceramic packages or stacked laminated packages using leadframes, vias, or other conductive paths to make appropriate connections.
  • FIG. 4 schematically shows the packaged microchip 10 mounted on one of its side surfaces 20 to a printed circuit board 24. As shown, to improve mechanical stability, the package 13 is coupled to the printed circuit board 24 at or near its corners. It should be noted, however, that some embodiments may mount the package 13 inwardly from its corners.
  • The contacts 18 may be any of a plurality of different types of contacts. Among other things, the embodiment shown in FIGS. 1-4 has pads, which are substantially embedded within the molding material of the package 13. It should be noted that the molding material does not completely encapsulate this type of contact 18—it must be partially exposed to electrically connect with an interconnect apparatus 24. For example, the contact 18 may be flush with the mold material. Alternatively, the contact 18 may be somewhat recessed within, or somewhat protruding from, the mold material. In other embodiments, however, the contacts 18 may be pins extending from the package 13.
  • FIG. 5 shows a process of forming the packaged microchip 10 shown in FIG. 1 in accordance with illustrative embodiments of the invention. This process shows various primary steps of a much larger process. Accordingly, those in the art should understand that further steps may be added, or some of the steps shown may be modified or omitted depending upon the application.
  • The process begins at step 500, which processes a pair of leadframes 26. Specifically, the process stamps, etches, and/or bends, etc . . . a first leadframe 26 for use as the base 12, and a second leadframe 26 for use as the lid 14. Conventional techniques thus may form the leadframes 26 so that they have the configuration shown in FIG. 3. More particularly, as shown in FIG. 3, the leadframes 26 are formed to ensure that the ultimately package 13 has contacts 18 on at least two adjacent surfaces. In addition, the leadframes 26 also are formed to ensure proper electrical communication between the lid 14 and the base 12.
  • To improve fabrication efficiency, the process preferably uses batch processing techniques, which process two-dimensional arrays of leadframes 26 that ultimately are diced. For simplicity, however, the process of FIG. 5 is discussed without application of batch processing techniques.
  • The process continues to step 502, which encapsulates the leadframes 26 in a molding material, such as a conventional plastic. Accordingly, after completing this step, the process has formed the primary components of the leadframe package 13, which includes the lid 14 and base 12 shown in the figures.
  • At this point, the process may secure the die 16 and circuitry within the base 12 (step 504). For example, the die 16 may be secured with a conventional adhesive or other apparatus to a die attach pad or similar surface within the cavity of the base 12. Additional circuitry may be added, such as an application-specific integrated circuit (i.e., an ASIC) or a discrete circuit element (e.g., a capacitor).
  • After securing the die 16, the process electrically connects the electrical interfaces of the die 16 with the leadframe 26 of the base 12 (step 506). To that end, the process may connect the wirebonds 28 to specified portions of the leadframe 26 in the base 12. For example, in the simplified device 10 shown in FIG. 3, one wirebond 28 connects with a first lead to the left of the die 16 (from the perspective of the drawing), while another wirebond 28 connects with a second lead to the right of the die 16. The lead to the left of the die 16 effectively forms two contacts 18; namely, one contact 18 on the bottom surface 22B and another, electrically equivalent/identical contact 18 on the side surface 20. The lead to the right of the die 16 connects to another contact 18 on the bottom surface 22B and an exposed metal lead at the top of the base 12.
  • The process then concludes at step 508, which secures the lid 14 to the base 12. Any conventional means may be used to secure the two together, such as by using an adhesive or an ultrasonic weld. For the embodiment shown in FIG. 3, the bottom portion of the lid leadframe 26 mechanically contacts the exposed metal at the top of the base 12. This mechanical contact electrically connects the lead positioned to the right of the die 16 to a second contact 18 on the side surface 20 of the lid 14. Of course, discussion of only two contacts 18 is for simplicity only. Actual applications often can have many more contacts 18.
  • The premolded package 13 shown in FIG. 3 thus has substantially electrically identical contact patterns 18 on the bottom surface 22B and side surface 20. In other words, the package 13 may be horizontally mounted (i.e., mounted on its bottom surface 22B) or vertically mounted (i.e., mounted on its side surface 20, as shown in FIG. 4) to an underlying interconnect apparatus 24. Accordingly, rather than requiring a chip manufacturer to produce one packaged microchip for vertical mounting, and a second, different packaged microchip with identical functionality for horizontal mounting, various embodiments of this invention enable a single packaged microchip 10 to perform both functions.
  • In addition to providing more flexibility for mounting the packaged microchip 10, using leadframe package technology as discussed should significantly reduce device cost when compared to many other packaging technologies, such as ceramic package technology. Accordingly, illustrative embodiments are intended to provide a lower cost, flexible mounting solution in a number of applications.
  • Moreover, various embodiments permit additional uses. For example, some test handling equipment and fixturing may be configured to test horizontal parts, which are designed for horizontal mounting. For vertical mounted (packaged) microchips, however, such a test device may not suffice. Various embodiments, however, permit packaged microchips that are to be vertically mounted to be tested in a horizontal orientation.
  • Although the above discussion discloses various exemplary embodiments of the invention, it should be apparent that those skilled in the art can make various modifications that will achieve some of the advantages of the invention without departing from the true scope of the invention. For example, the lid 14 can form a cavity rather than, or in addition to the base 12. As another example, the package 13 can have adjacent sides/surfaces that are not substantially orthogonal (e.g., see FIG. 1), or packages having more or fewer than six sides. For example, the package 13 can have angled or curved surfaces between the top surface 22A and side surface 20. Moreover, discussion of leadframes as providing the conductive paths and contacts 18 is illustrative. For example, leadframes and other conductive members (e.g., vias) may provide appropriate connections and contacts 18. Accordingly, those in the art can modify various aspects and still achieve the various advantages of illustrative embodiments.

Claims (21)

1. A package apparatus comprising:
a base; and
a lid coupled with the base forming a leadframe package,
the leadframe package forming a first exterior surface and a second exterior surface, the first exterior surface forming a first contact pattern, the second exterior surface forming a second contact pattern, the first exterior surface being in a plane that intersects the plane of the second exterior surface, the first and second contact patterns being substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.
2. The apparatus as defined by claim 1 wherein the base and lid form a premolded leadframe package.
3. The apparatus as defined by claim 2 wherein the base and lid form a chamber for receiving an integrated circuit.
4. The apparatus as defined by claim 3 further comprising an integrated circuit mounted within the chamber, the integrated circuit being substantially identically electrically connected with the first contact pattern and the second contact pattern.
5. The apparatus as defined by claim 1 wherein the lid and base comprise a moldable material, the first contact pattern comprising a first plurality of contacts substantially embedded within the moldable material of at least one of the lid and base, the second contact pattern comprising a second plurality of contacts substantially embedded within the moldable material of at least one of the lid and base.
6. The apparatus as defined by claim 1 wherein the lid comprises a lid leadframe, the base comprising a base leadframe, the lid leadframe being in electrical contact with the base leadframe.
7. The apparatus as defined by claim 1 wherein the first exterior surface is substantially orthogonal to the second exterior surface.
8. The apparatus as defined by claim 1 wherein the first exterior surface is adjacent to the second exterior surface.
9. An apparatus comprising:
a base; and
a lid coupled with the base to form a package having at least one leadframe,
the base and lid forming a plurality of exterior surfaces, the at least one leadframe forming a first contact means on a first exterior surface, the at least one leadframe forming a second contact means on a second exterior surface, the first exterior surface being orthogonal to the second exterior surface, the first contact means and second contact means being substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.
10. The apparatus as defined by claim 9 wherein the first contact means comprises a plurality of contacts.
11. The apparatus as defined by claim 9 further comprising an electrical interconnect apparatus coupled with no more than one of the first contact means or the second contact means.
12. The apparatus as defined by claim 9 wherein the package is a premolded leadframe package.
13. The apparatus as defined by claim 12 wherein the base and lid form a chamber for receiving an integrated circuit.
14. The apparatus as defined by claim 13 further comprising an integrated circuit mounted within the chamber.
15. The apparatus as defined by claim 9 wherein the lid comprises a leadframe encapsulated in moldable material.
16. A method of forming a packaged integrated circuit, the method comprising:
forming at least one leadframe to have a first plurality of contacts and a second plurality of contacts;
encapsulating a portion of the at least one leadframe within a moldable material to form a base and a lid;
securing an integrated circuit to the base after encapsulating;
electrically connecting the integrated circuit with the a least one leadframe, the integrated circuit substantially identically electrically connecting with the first plurality of contacts and the second plurality of contacts; and
connecting the base to the lid to form a premolded package having first and second orthogonal, exterior surfaces, the first plurality of contacts being on the first exterior surface, the second plurality of contacts being on the second exterior surface.
17. The method as defined by claim 16 wherein encapsulating comprises:
encapsulating a first leadframe with the moldable material to form the lid; and
encapsulating a second leadframe with the moldable material to form the base.
18. The method as defined by claim 17 wherein the first leadframe is in electrical contact with the second leadframe after connecting the base to the lid.
19. The method as defined by claim 16 wherein the integrated circuit comprises a MEMS device.
20. The method as defined by claim 16 wherein encapsulating comprises embedding the first plurality of contacts within the moldable material.
21. A package apparatus comprising:
a base; and
a lid coupled with the base forming a package,
the package forming a first exterior surface and a second exterior surface, the first exterior surface forming a first contact pattern, the second exterior surface forming a second contact pattern, the first exterior surface being in a plane that intersects the plane of the second exterior surface, the first and second contact patterns being substantially electrically identical to permit the package to be either vertically or horizontally mounted to an underlying apparatus.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8841738B2 (en) 2012-10-01 2014-09-23 Invensense, Inc. MEMS microphone system for harsh environments
US9215519B2 (en) 2010-07-30 2015-12-15 Invensense, Inc. Reduced footprint microphone system with spacer member having through-hole

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7838974B2 (en) * 2007-09-13 2010-11-23 National Semiconductor Corporation Intergrated circuit packaging with improved die bonding
US8138027B2 (en) * 2008-03-07 2012-03-20 Stats Chippac, Ltd. Optical semiconductor device having pre-molded leadframe with window and method therefor
US8193620B2 (en) * 2010-02-17 2012-06-05 Analog Devices, Inc. Integrated circuit package with enlarged die paddle
US20120025337A1 (en) * 2010-07-28 2012-02-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Mems transducer device having stress mitigation structure and method of fabricating the same
US8749036B2 (en) 2012-11-09 2014-06-10 Analog Devices, Inc. Microchip with blocking apparatus and method of fabricating microchip
US9676614B2 (en) 2013-02-01 2017-06-13 Analog Devices, Inc. MEMS device with stress relief structures
EP2947692B1 (en) 2013-12-20 2020-09-23 Analog Devices, Inc. Integrated device die and package with stress reduction features
US10167189B2 (en) 2014-09-30 2019-01-01 Analog Devices, Inc. Stress isolation platform for MEMS devices
DE102014119396A1 (en) * 2014-12-22 2016-06-23 Endress + Hauser Gmbh + Co. Kg Pressure measuring device
US20160181180A1 (en) * 2014-12-23 2016-06-23 Texas Instruments Incorporated Packaged semiconductor device having attached chips overhanging the assembly pad
US10287161B2 (en) 2015-07-23 2019-05-14 Analog Devices, Inc. Stress isolation features for stacked dies
US10131538B2 (en) 2015-09-14 2018-11-20 Analog Devices, Inc. Mechanically isolated MEMS device
EP3671155B1 (en) * 2017-09-20 2021-10-20 Asahi Kasei Kabushiki Kaisha Surface stress sensor, hollow structural element, and method for manufacturing same
US10446414B2 (en) 2017-12-22 2019-10-15 Texas Instruments Incorporated Semiconductor package with filler particles in a mold compound
US11127716B2 (en) 2018-04-12 2021-09-21 Analog Devices International Unlimited Company Mounting structures for integrated device packages
KR20210058165A (en) * 2019-11-13 2021-05-24 삼성전자주식회사 Semiconductor package
US11417611B2 (en) 2020-02-25 2022-08-16 Analog Devices International Unlimited Company Devices and methods for reducing stress on circuit components
EP3929540A1 (en) * 2020-06-26 2021-12-29 TE Connectivity Norge AS Attachment system for attaching a sensor to a substrate, method of attaching a sensor to a substrate
US11664340B2 (en) 2020-07-13 2023-05-30 Analog Devices, Inc. Negative fillet for mounting an integrated device die to a carrier

Citations (95)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3839660A (en) * 1973-02-05 1974-10-01 Gen Motors Corp Power semiconductor device package
US4492825A (en) * 1982-07-28 1985-01-08 At&T Bell Laboratories Electroacoustic transducer
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4710744A (en) * 1985-04-08 1987-12-01 Honeywell Inc. Pressure transducer package
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US4744863A (en) * 1985-04-26 1988-05-17 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4776019A (en) * 1986-05-31 1988-10-04 Horiba, Ltd. Diaphragm for use in condenser microphone type detector
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
US4825335A (en) * 1988-03-14 1989-04-25 Endevco Corporation Differential capacitive transducer and method of making
US4853669A (en) * 1985-04-26 1989-08-01 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4872047A (en) * 1986-11-07 1989-10-03 Olin Corporation Semiconductor die attach system
US4918032A (en) * 1988-04-13 1990-04-17 General Motors Corporation Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures
US4948757A (en) * 1987-04-13 1990-08-14 General Motors Corporation Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures
US4996082A (en) * 1985-04-26 1991-02-26 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US5067007A (en) * 1988-06-13 1991-11-19 Hitachi, Ltd. Semiconductor device having leads for mounting to a surface of a printed circuit board
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
US5105258A (en) * 1990-11-21 1992-04-14 Motorola, Inc. Metal system for semiconductor die attach
US5113466A (en) * 1991-04-25 1992-05-12 At&T Bell Laboratories Molded optical packaging arrangement
US5146435A (en) * 1989-12-04 1992-09-08 The Charles Stark Draper Laboratory, Inc. Acoustic transducer
US5172213A (en) * 1991-05-23 1992-12-15 At&T Bell Laboratories Molded circuit package having heat dissipating post
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5207102A (en) * 1991-02-12 1993-05-04 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor
US5241133A (en) * 1990-12-21 1993-08-31 Motorola, Inc. Leadless pad array chip carrier
US5303210A (en) * 1992-10-29 1994-04-12 The Charles Stark Draper Laboratory, Inc. Integrated resonant cavity acoustic transducer
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5315155A (en) * 1992-07-13 1994-05-24 Olin Corporation Electronic package with stress relief channel
US5317107A (en) * 1992-09-24 1994-05-31 Motorola, Inc. Shielded stripline configuration semiconductor device and method for making the same
US5336928A (en) * 1992-09-18 1994-08-09 General Electric Company Hermetically sealed packaged electronic system
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response
US5468999A (en) * 1994-05-26 1995-11-21 Motorola, Inc. Liquid encapsulated ball grid array semiconductor device with fine pitch wire bonding
US5490220A (en) * 1992-03-18 1996-02-06 Knowles Electronics, Inc. Solid state condenser and microphone devices
US5515732A (en) * 1992-09-01 1996-05-14 Rosemount Inc. Capacitive pressure sensor and reference with stress isolating pedestal
US5593926A (en) * 1993-10-12 1997-01-14 Sumitomo Electric Industries, Ltd. Method of manufacturing semiconductor device
US5596222A (en) * 1994-08-12 1997-01-21 The Charles Stark Draper Laboratory, Inc. Wafer of transducer chips
US5608265A (en) * 1993-03-17 1997-03-04 Hitachi, Ltd. Encapsulated semiconductor device package having holes for electrically conductive material
US5629566A (en) * 1994-08-15 1997-05-13 Kabushiki Kaisha Toshiba Flip-chip semiconductor devices having two encapsulants
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US5658710A (en) * 1993-07-16 1997-08-19 Adagio Associates, Inc. Method of making superhard mechanical microstructures
US5692060A (en) * 1995-05-01 1997-11-25 Knowles Electronics, Inc. Unidirectional microphone
US5740261A (en) * 1996-11-21 1998-04-14 Knowles Electronics, Inc. Miniature silicon condenser microphone
US5828127A (en) * 1994-11-15 1998-10-27 Sumitomo Electric Industries, Ltd. Semiconductor substate with improved thermal conductivity
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
US5901046A (en) * 1996-12-10 1999-05-04 Denso Corporation Surface mount type package unit and method for manufacturing the same
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US5939633A (en) * 1997-06-18 1999-08-17 Analog Devices, Inc. Apparatus and method for multi-axis capacitive sensing
US5945605A (en) * 1997-11-19 1999-08-31 Sensym, Inc. Sensor assembly with sensor boss mounted on substrate
US5956292A (en) * 1995-04-13 1999-09-21 The Charles Stark Draper Laboratory, Inc. Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same
US5960093A (en) * 1998-03-30 1999-09-28 Knowles Electronics, Inc. Miniature transducer
US5994161A (en) * 1997-09-03 1999-11-30 Motorola, Inc. Temperature coefficient of offset adjusted semiconductor device and method thereof
US6084292A (en) * 1997-08-19 2000-07-04 Mitsubishi Denki Kabushiki Kaisha Lead frame and semiconductor device using the lead frame
US6128961A (en) * 1995-12-24 2000-10-10 Haronian; Dan Micro-electro-mechanics systems (MEMS)
US6169328B1 (en) * 1994-09-20 2001-01-02 Tessera, Inc Semiconductor chip assembly
US6243474B1 (en) * 1996-04-18 2001-06-05 California Institute Of Technology Thin film electret microphone
US6249075B1 (en) * 1999-11-18 2001-06-19 Lucent Technologies Inc. Surface micro-machined acoustic transducers
US6309915B1 (en) * 1998-02-05 2001-10-30 Tessera, Inc. Semiconductor chip package with expander ring and method of making same
US6384472B1 (en) * 2000-03-24 2002-05-07 Siliconware Precision Industries Co., Ltd Leadless image sensor package structure and method for making the same
US6384473B1 (en) * 2000-05-16 2002-05-07 Sandia Corporation Microelectronic device package with an integral window
US6401545B1 (en) * 2000-01-25 2002-06-11 Motorola, Inc. Micro electro-mechanical system sensor with selective encapsulation and method therefor
US20020102004A1 (en) * 2000-11-28 2002-08-01 Minervini Anthony D. Miniature silicon condenser microphone and method for producing same
US20020125559A1 (en) * 2001-03-06 2002-09-12 Mclellan Neil Enhanced leadless chip carrier
US6505511B1 (en) * 1997-09-02 2003-01-14 Analog Devices, Inc. Micromachined gyros
US20030016839A1 (en) * 2001-07-20 2003-01-23 Loeppert Peter V. Raised microstructure of silicon based device
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6535460B2 (en) * 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer
US6548895B1 (en) * 2001-02-21 2003-04-15 Sandia Corporation Packaging of electro-microfluidic devices
US6552469B1 (en) * 1998-06-05 2003-04-22 Knowles Electronics, Llc Solid state transducer for converting between an electrical signal and sound
US20030133588A1 (en) * 2001-11-27 2003-07-17 Michael Pedersen Miniature condenser microphone and fabrication method therefor
US6617683B2 (en) * 2001-09-28 2003-09-09 Intel Corporation Thermal performance in flip chip/integral heat spreader packages using low modulus thermal interface material
US20030189222A1 (en) * 2002-04-01 2003-10-09 Matsushita Electric Industrial Co., Ltd. Semiconductor device
US6677176B2 (en) * 2002-01-18 2004-01-13 The Hong Kong University Of Science And Technology Method of manufacturing an integrated electronic microphone having a floating gate electrode
US20040041254A1 (en) * 2002-09-04 2004-03-04 Lewis Long Packaged microchip
US6704427B2 (en) * 2000-02-24 2004-03-09 Knowles Electronics, Llc Acoustic transducer with improved acoustic damper
US20040056337A1 (en) * 2000-12-28 2004-03-25 Hitachi, Ltd. And Hitachi Hokkai Semiconductor, Ltd. Semiconductor device
US6732588B1 (en) * 1999-09-07 2004-05-11 Sonionmems A/S Pressure transducer
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
US6753583B2 (en) * 2000-08-24 2004-06-22 Fachhochschule Electrostatic electroacoustical transducer
US6768196B2 (en) * 2002-09-04 2004-07-27 Analog Devices, Inc. Packaged microchip with isolation
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
US20040179705A1 (en) * 2002-09-13 2004-09-16 Zhe Wang High performance silicon condenser microphone with perforated single crystal silicon backplate
US20040184632A1 (en) * 2003-02-28 2004-09-23 Minervini Anthony D. Acoustic transducer module
US6812620B2 (en) * 2000-12-22 2004-11-02 Bruel & Kjaer Sound & Vibration Measurement A/S Micromachined capacitive electrical component
US6816301B1 (en) * 1999-06-29 2004-11-09 Regents Of The University Of Minnesota Micro-electromechanical devices and methods of manufacture
US6847090B2 (en) * 2001-01-24 2005-01-25 Knowles Electronics, Llc Silicon capacitive microphone
US20050018864A1 (en) * 2000-11-28 2005-01-27 Knowles Electronics, Llc Silicon condenser microphone and manufacturing method
US6859542B2 (en) * 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US6857312B2 (en) * 2001-06-15 2005-02-22 Textron Systems Corporation Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
US20050089188A1 (en) * 2003-10-24 2005-04-28 Feng Jen N. High performance capacitor microphone and manufacturing method thereof
US20050093117A1 (en) * 2003-04-11 2005-05-05 Dai Nippon Printing Co., Ltd. Plastic package and method of fabricating the same
US6914992B1 (en) * 1998-07-02 2005-07-05 Sonion Nederland B.V. System consisting of a microphone and a preamplifier
US6984886B2 (en) * 2000-03-02 2006-01-10 Micron Technology, Inc. System-on-a-chip with multi-layered metallized through-hole interconnection
US7166911B2 (en) * 2002-09-04 2007-01-23 Analog Devices, Inc. Packaged microchip with premolded-type package
US20070040231A1 (en) * 2005-08-16 2007-02-22 Harney Kieran P Partially etched leadframe packages having different top and bottom topologies

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6077434A (en) 1983-10-04 1985-05-02 Mitsubishi Electric Corp Semiconductor device
US4668338A (en) 1985-12-30 1987-05-26 Applied Materials, Inc. Magnetron-enhanced plasma etching process
DE4107658A1 (en) 1991-03-09 1992-09-17 Bosch Gmbh Robert ASSEMBLY METHOD FOR MICROMECHANICAL SENSORS
JPH05226501A (en) 1992-02-08 1993-09-03 Nissan Motor Co Ltd Semiconductor chip mounting substrate structure
JPH07142518A (en) 1993-11-17 1995-06-02 Hitachi Ltd Lead frame, semiconductor chip, and semiconductor device
JPH08116007A (en) 1994-10-13 1996-05-07 Nec Corp Semiconductor device
JP2842355B2 (en) * 1996-02-01 1999-01-06 日本電気株式会社 package
KR100335480B1 (en) 1999-08-24 2002-05-04 김덕중 Leadframe using chip pad as heat spreading path and semiconductor package thereof
US6829131B1 (en) 1999-09-13 2004-12-07 Carnegie Mellon University MEMS digital-to-acoustic transducer with error cancellation
JP2002005951A (en) 2000-06-26 2002-01-09 Denso Corp Semiconductor dynamical quantity sensor and its manufacturing method
US6570259B2 (en) 2001-03-22 2003-05-27 International Business Machines Corporation Apparatus to reduce thermal fatigue stress on flip chip solder connections
US20040262781A1 (en) * 2003-06-27 2004-12-30 Semiconductor Components Industries, Llc Method for forming an encapsulated device and structure
US7262491B2 (en) * 2005-09-06 2007-08-28 Advanced Interconnect Technologies Limited Die pad for semiconductor packages and methods of making and using same

Patent Citations (99)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3839660A (en) * 1973-02-05 1974-10-01 Gen Motors Corp Power semiconductor device package
US4492825A (en) * 1982-07-28 1985-01-08 At&T Bell Laboratories Electroacoustic transducer
US4558184A (en) * 1983-02-24 1985-12-10 At&T Bell Laboratories Integrated capacitive transducer
US4524247A (en) * 1983-07-07 1985-06-18 At&T Bell Laboratories Integrated electroacoustic transducer with built-in bias
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US4710744A (en) * 1985-04-08 1987-12-01 Honeywell Inc. Pressure transducer package
US4996082A (en) * 1985-04-26 1991-02-26 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4853669A (en) * 1985-04-26 1989-08-01 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4744863A (en) * 1985-04-26 1988-05-17 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method of producing the same
US4776019A (en) * 1986-05-31 1988-10-04 Horiba, Ltd. Diaphragm for use in condenser microphone type detector
US4800758A (en) * 1986-06-23 1989-01-31 Rosemount Inc. Pressure transducer with stress isolation for hard mounting
US4872047A (en) * 1986-11-07 1989-10-03 Olin Corporation Semiconductor die attach system
US4948757A (en) * 1987-04-13 1990-08-14 General Motors Corporation Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures
US4740410A (en) * 1987-05-28 1988-04-26 The Regents Of The University Of California Micromechanical elements and methods for their fabrication
US4825335A (en) * 1988-03-14 1989-04-25 Endevco Corporation Differential capacitive transducer and method of making
US4918032A (en) * 1988-04-13 1990-04-17 General Motors Corporation Method for fabricating three-dimensional microstructures and a high-sensitivity integrated vibration sensor using such microstructures
US5067007A (en) * 1988-06-13 1991-11-19 Hitachi, Ltd. Semiconductor device having leads for mounting to a surface of a printed circuit board
US5146435A (en) * 1989-12-04 1992-09-08 The Charles Stark Draper Laboratory, Inc. Acoustic transducer
US5090254A (en) * 1990-04-11 1992-02-25 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers
US5188983A (en) * 1990-04-11 1993-02-23 Wisconsin Alumni Research Foundation Polysilicon resonating beam transducers and method of producing the same
US5314572A (en) * 1990-08-17 1994-05-24 Analog Devices, Inc. Method for fabricating microstructures
US5105258A (en) * 1990-11-21 1992-04-14 Motorola, Inc. Metal system for semiconductor die attach
US5241133A (en) * 1990-12-21 1993-08-31 Motorola, Inc. Leadless pad array chip carrier
US5207102A (en) * 1991-02-12 1993-05-04 Mitsubishi Denki Kabushiki Kaisha Semiconductor pressure sensor
US5113466A (en) * 1991-04-25 1992-05-12 At&T Bell Laboratories Molded optical packaging arrangement
US5172213A (en) * 1991-05-23 1992-12-15 At&T Bell Laboratories Molded circuit package having heat dissipating post
US5178015A (en) * 1991-07-22 1993-01-12 Monolithic Sensors Inc. Silicon-on-silicon differential input sensors
US5490220A (en) * 1992-03-18 1996-02-06 Knowles Electronics, Inc. Solid state condenser and microphone devices
US5315155A (en) * 1992-07-13 1994-05-24 Olin Corporation Electronic package with stress relief channel
US5515732A (en) * 1992-09-01 1996-05-14 Rosemount Inc. Capacitive pressure sensor and reference with stress isolating pedestal
US5336928A (en) * 1992-09-18 1994-08-09 General Electric Company Hermetically sealed packaged electronic system
US5317107A (en) * 1992-09-24 1994-05-31 Motorola, Inc. Shielded stripline configuration semiconductor device and method for making the same
US5303210A (en) * 1992-10-29 1994-04-12 The Charles Stark Draper Laboratory, Inc. Integrated resonant cavity acoustic transducer
US5608265A (en) * 1993-03-17 1997-03-04 Hitachi, Ltd. Encapsulated semiconductor device package having holes for electrically conductive material
US5633552A (en) * 1993-06-04 1997-05-27 The Regents Of The University Of California Cantilever pressure transducer
US5658710A (en) * 1993-07-16 1997-08-19 Adagio Associates, Inc. Method of making superhard mechanical microstructures
US5593926A (en) * 1993-10-12 1997-01-14 Sumitomo Electric Industries, Ltd. Method of manufacturing semiconductor device
US5468999A (en) * 1994-05-26 1995-11-21 Motorola, Inc. Liquid encapsulated ball grid array semiconductor device with fine pitch wire bonding
US5596222A (en) * 1994-08-12 1997-01-21 The Charles Stark Draper Laboratory, Inc. Wafer of transducer chips
US5452268A (en) * 1994-08-12 1995-09-19 The Charles Stark Draper Laboratory, Inc. Acoustic transducer with improved low frequency response
US5684324A (en) * 1994-08-12 1997-11-04 The Charles Draper Laboratory, Inc. Acoustic transducer chip
US5629566A (en) * 1994-08-15 1997-05-13 Kabushiki Kaisha Toshiba Flip-chip semiconductor devices having two encapsulants
US6169328B1 (en) * 1994-09-20 2001-01-02 Tessera, Inc Semiconductor chip assembly
US5828127A (en) * 1994-11-15 1998-10-27 Sumitomo Electric Industries, Ltd. Semiconductor substate with improved thermal conductivity
US5956292A (en) * 1995-04-13 1999-09-21 The Charles Stark Draper Laboratory, Inc. Monolithic micromachined piezoelectric acoustic transducer and transducer array and method of making same
US5692060A (en) * 1995-05-01 1997-11-25 Knowles Electronics, Inc. Unidirectional microphone
US6128961A (en) * 1995-12-24 2000-10-10 Haronian; Dan Micro-electro-mechanics systems (MEMS)
US6243474B1 (en) * 1996-04-18 2001-06-05 California Institute Of Technology Thin film electret microphone
US5740261A (en) * 1996-11-21 1998-04-14 Knowles Electronics, Inc. Miniature silicon condenser microphone
US5901046A (en) * 1996-12-10 1999-05-04 Denso Corporation Surface mount type package unit and method for manufacturing the same
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone
US5923995A (en) * 1997-04-18 1999-07-13 National Semiconductor Corporation Methods and apparatuses for singulation of microelectromechanical systems
US5939633A (en) * 1997-06-18 1999-08-17 Analog Devices, Inc. Apparatus and method for multi-axis capacitive sensing
US6084292A (en) * 1997-08-19 2000-07-04 Mitsubishi Denki Kabushiki Kaisha Lead frame and semiconductor device using the lead frame
US6505511B1 (en) * 1997-09-02 2003-01-14 Analog Devices, Inc. Micromachined gyros
US5994161A (en) * 1997-09-03 1999-11-30 Motorola, Inc. Temperature coefficient of offset adjusted semiconductor device and method thereof
US5945605A (en) * 1997-11-19 1999-08-31 Sensym, Inc. Sensor assembly with sensor boss mounted on substrate
US6309915B1 (en) * 1998-02-05 2001-10-30 Tessera, Inc. Semiconductor chip package with expander ring and method of making same
US5960093A (en) * 1998-03-30 1999-09-28 Knowles Electronics, Inc. Miniature transducer
US6552469B1 (en) * 1998-06-05 2003-04-22 Knowles Electronics, Llc Solid state transducer for converting between an electrical signal and sound
US6914992B1 (en) * 1998-07-02 2005-07-05 Sonion Nederland B.V. System consisting of a microphone and a preamplifier
US6816301B1 (en) * 1999-06-29 2004-11-09 Regents Of The University Of Minnesota Micro-electromechanical devices and methods of manufacture
US6522762B1 (en) * 1999-09-07 2003-02-18 Microtronic A/S Silicon-based sensor system
US6732588B1 (en) * 1999-09-07 2004-05-11 Sonionmems A/S Pressure transducer
US6249075B1 (en) * 1999-11-18 2001-06-19 Lucent Technologies Inc. Surface micro-machined acoustic transducers
US6401545B1 (en) * 2000-01-25 2002-06-11 Motorola, Inc. Micro electro-mechanical system sensor with selective encapsulation and method therefor
US6704427B2 (en) * 2000-02-24 2004-03-09 Knowles Electronics, Llc Acoustic transducer with improved acoustic damper
US6984886B2 (en) * 2000-03-02 2006-01-10 Micron Technology, Inc. System-on-a-chip with multi-layered metallized through-hole interconnection
US6384472B1 (en) * 2000-03-24 2002-05-07 Siliconware Precision Industries Co., Ltd Leadless image sensor package structure and method for making the same
US6384473B1 (en) * 2000-05-16 2002-05-07 Sandia Corporation Microelectronic device package with an integral window
US6535460B2 (en) * 2000-08-11 2003-03-18 Knowles Electronics, Llc Miniature broadband acoustic transducer
US6753583B2 (en) * 2000-08-24 2004-06-22 Fachhochschule Electrostatic electroacoustical transducer
US20020102004A1 (en) * 2000-11-28 2002-08-01 Minervini Anthony D. Miniature silicon condenser microphone and method for producing same
US20050018864A1 (en) * 2000-11-28 2005-01-27 Knowles Electronics, Llc Silicon condenser microphone and manufacturing method
US6741709B2 (en) * 2000-12-20 2004-05-25 Shure Incorporated Condenser microphone assembly
US20040184633A1 (en) * 2000-12-20 2004-09-23 Shure Incorporated Condenser microphone assembly
US6812620B2 (en) * 2000-12-22 2004-11-02 Bruel & Kjaer Sound & Vibration Measurement A/S Micromachined capacitive electrical component
US20040056337A1 (en) * 2000-12-28 2004-03-25 Hitachi, Ltd. And Hitachi Hokkai Semiconductor, Ltd. Semiconductor device
US6847090B2 (en) * 2001-01-24 2005-01-25 Knowles Electronics, Llc Silicon capacitive microphone
US6821819B1 (en) * 2001-02-21 2004-11-23 Sandia Corporation Method of packaging and assembling micro-fluidic device
US6548895B1 (en) * 2001-02-21 2003-04-15 Sandia Corporation Packaging of electro-microfluidic devices
US20020125559A1 (en) * 2001-03-06 2002-09-12 Mclellan Neil Enhanced leadless chip carrier
US6859542B2 (en) * 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US6857312B2 (en) * 2001-06-15 2005-02-22 Textron Systems Corporation Systems and methods for sensing an acoustic signal using microelectromechanical systems technology
US20030016839A1 (en) * 2001-07-20 2003-01-23 Loeppert Peter V. Raised microstructure of silicon based device
US6617683B2 (en) * 2001-09-28 2003-09-09 Intel Corporation Thermal performance in flip chip/integral heat spreader packages using low modulus thermal interface material
US20030133588A1 (en) * 2001-11-27 2003-07-17 Michael Pedersen Miniature condenser microphone and fabrication method therefor
US6677176B2 (en) * 2002-01-18 2004-01-13 The Hong Kong University Of Science And Technology Method of manufacturing an integrated electronic microphone having a floating gate electrode
US20030189222A1 (en) * 2002-04-01 2003-10-09 Matsushita Electric Industrial Co., Ltd. Semiconductor device
US6768196B2 (en) * 2002-09-04 2004-07-27 Analog Devices, Inc. Packaged microchip with isolation
US20040041254A1 (en) * 2002-09-04 2004-03-04 Lewis Long Packaged microchip
US7166911B2 (en) * 2002-09-04 2007-01-23 Analog Devices, Inc. Packaged microchip with premolded-type package
US6781231B2 (en) * 2002-09-10 2004-08-24 Knowles Electronics Llc Microelectromechanical system package with environmental and interference shield
US20050005421A1 (en) * 2002-09-13 2005-01-13 Knowles Electronics, Llc High performance silicon condenser microphone with perforated single crystal silicon backplate
US20040179705A1 (en) * 2002-09-13 2004-09-16 Zhe Wang High performance silicon condenser microphone with perforated single crystal silicon backplate
US20040184632A1 (en) * 2003-02-28 2004-09-23 Minervini Anthony D. Acoustic transducer module
US20050093117A1 (en) * 2003-04-11 2005-05-05 Dai Nippon Printing Co., Ltd. Plastic package and method of fabricating the same
US20050089188A1 (en) * 2003-10-24 2005-04-28 Feng Jen N. High performance capacitor microphone and manufacturing method thereof
US20070040231A1 (en) * 2005-08-16 2007-02-22 Harney Kieran P Partially etched leadframe packages having different top and bottom topologies

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9215519B2 (en) 2010-07-30 2015-12-15 Invensense, Inc. Reduced footprint microphone system with spacer member having through-hole
US8841738B2 (en) 2012-10-01 2014-09-23 Invensense, Inc. MEMS microphone system for harsh environments

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WO2008003051A2 (en) 2008-01-03
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