US20100017135A1 - Pressure measurement of a reservoir fluid in a microfluidic device - Google Patents
Pressure measurement of a reservoir fluid in a microfluidic device Download PDFInfo
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- US20100017135A1 US20100017135A1 US12/533,292 US53329209A US2010017135A1 US 20100017135 A1 US20100017135 A1 US 20100017135A1 US 53329209 A US53329209 A US 53329209A US 2010017135 A1 US2010017135 A1 US 2010017135A1
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- 239000012530 fluid Substances 0.000 title claims abstract description 133
- 238000009530 blood pressure measurement Methods 0.000 title description 3
- 239000012528 membrane Substances 0.000 claims abstract description 65
- 238000000034 method Methods 0.000 claims abstract description 36
- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 239000000758 substrate Substances 0.000 claims description 34
- 238000004891 communication Methods 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 5
- 230000007613 environmental effect Effects 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000000704 physical effect Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 15
- 238000004458 analytical method Methods 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000012071 phase Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 241000237858 Gastropoda Species 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000002706 hydrostatic effect Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 230000001747 exhibiting effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- 239000005388 borosilicate glass Substances 0.000 description 2
- 238000000708 deep reactive-ion etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000011780 sodium chloride Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000001124 body fluid Anatomy 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 235000012206 bottled water Nutrition 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000002301 combined effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000008398 formation water Substances 0.000 description 1
- -1 gas-oil-ratio Substances 0.000 description 1
- 239000007792 gaseous phase Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000010191 image analysis Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 210000003097 mucus Anatomy 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 210000003296 saliva Anatomy 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 210000002966 serum Anatomy 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 210000002700 urine Anatomy 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/26—Oils; viscous liquids; paints; inks
- G01N33/28—Oils, i.e. hydrocarbon liquids
- G01N33/2823—Oils, i.e. hydrocarbon liquids raw oil, drilling fluid or polyphasic mixtures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
- B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/02—Investigating or analyzing materials by the use of thermal means by investigating changes of state or changes of phase; by investigating sintering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/06—Auxiliary integrated devices, integrated components
- B01L2300/0627—Sensor or part of a sensor is integrated
- B01L2300/0654—Lenses; Optical fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2300/00—Additional constructional details
- B01L2300/08—Geometry, shape and general structure
- B01L2300/0887—Laminated structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0463—Hydrodynamic forces, venturi nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0475—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure
- B01L2400/0487—Moving fluids with specific forces or mechanical means specific mechanical means and fluid pressure fluid pressure, pneumatics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
- B01L9/52—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips
- B01L9/527—Supports specially adapted for flat sample carriers, e.g. for plates, slides, chips for microfluidic devices, e.g. used for lab-on-a-chip
Definitions
- This patent specification relates to an apparatus and method for measuring thermo-physical properties of a reservoir fluid. More particularly, the patent specification relates to an apparatus and method for measuring pressure of a reservoir fluid flowing in a microfluidic device.
- PVT pressure, volume, and temperature measurements
- One important use of PVT measurements is the construction of an equation of state describing the state of oil in the reservoir fluid.
- Other properties of interest include fluid viscosity, density, chemical composition, gas-oil-ratio, and the like.
- thermo-physical properties of a reservoir fluid can provide certain advantages including: (1) providing a way to measure thermo-physical properties of a reservoir fluid with small amounts of reservoir fluid; (2) providing a way to perform pressure-volume-temperature analyses of a reservoir fluid in a timely fashion; and (3) providing a way to measure thermo-physical properties of a reservoir fluid using image analysis.
- the microfluidic based measurements and analysis can benefit from pressure measurement at various points along the microchannel.
- a system for measuring fluid pressure in a microchannel includes a microchannel adapted to carry a fluid; a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member; and an optical sensing system adapted and positioned to detect deformation of the first flexible member.
- the flexible member is preferably a membrane partially defining a cavity that is in fluid communication with the microchannel at a first location such that deformation of the membrane is representative of the fluid pressure in the microchannel at the first location.
- second and third membranes also can be provided to provide detecting of pressure at second and third locations on the microchannel.
- a method for measuring fluid pressure in a microchannel includes providing a microchannel adapted to carry a fluid, and a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member. Fluid is introduced under pressure into the microchannel, thereby causing a deformation of the first flexible member, and deformation of the first flexible member is optically detected. A value can be determined representing the pressure at a location in the microchannel based at least in part on the optically detected deformation of the first flexible member.
- FIG. 1 is a stylized, exploded, perspective view of a first illustrative embodiment of a microfluidic device for measuring thermo-physical properties of a reservoir fluid;
- FIG. 2 is a stylized, schematic representation of a reaction of reservoir fluid as the reservoir fluid flows through the microfluidic device of FIG. 1 ;
- FIG. 3 is a top, plan view of the microfluidic device of FIG. 1 depicting three reservoir fluid flow regimes;
- FIG. 4 is a stylized, side, elevational view of a reservoir fluid measurement system, including the microfluidic device of FIG. 1 and a camera for generating images of the microfluidic device in use;
- FIG. 5 is a top, plan view of a second illustrative embodiment of a microfluidic device for measuring thermo-physical properties of a reservoir fluid
- FIG. 6 is a side, elevational view of the microfluidic device of FIG. 5 ;
- FIGS. 7-9 depict exemplary microchannel constrictions of the microfluidic device of FIG. 5 ;
- FIGS. 10A and 10B are schematic cross sections of an un-deformed and deformed membrane respectively, according to some embodiments.
- FIG. 11 is a stylized, schematic representation a membrane deformation measurement setup, according to some embodiments.
- FIG. 12 is a stylized, schematic representation a membrane deformation measurement setup having multiple optical sensors, according to some embodiments.
- FIG. 13 shows plots of exemplary measurements of a membrane in undeformed and deformed states, according to embodiments
- FIG. 14 shows a plot of repeated measured deformations as a function of hydrostatic pressure, according to embodiments.
- FIG. 15 shows plots of the measured pressures in cavities for different input pressures, according to embodiments.
- reservoir fluid means a fluid stored in or transmitted from a subsurface body of permeable rock.
- reservoir fluid may include, without limitation, hydrocarbon fluids, saline fluids such as saline water, as well as other formation water, and other fluids such as carbon dioxide in a supercritical phase.
- microfluidic means having a fluid-carrying channel exhibiting a width within a range of tens to hundreds of micrometers, but exhibiting a length that is many times longer than the width of the channel.
- microchannel means a fluid-carrying channel exhibiting a width within a range of tens to hundreds of micrometers.
- the cross section of a microchannel can be of any shape, including round, oval, ellipsoid, square, etc.
- FIG. 1 depicts a stylized, exploded, perspective view of a microfluidic device 101 in which pressure can be measured, according to some embodiments of the invention.
- microfluidic device 101 comprises a first substrate 103 defining a microchannel 105 , an entrance well 107 and an exit well 109 .
- Microchannel 105 extends between and is in fluid communication with entrance well 107 and exit well 109 .
- Microchannel 105 forms a serpentine pattern in first substrate 103 , thus allowing microchannel 105 to extend a significant length but occupy a relatively small area.
- microchannel 105 exhibits a length of one or more meters, a width of about 100 micrometers, and a depth of about 50 micrometers, although the present invention also contemplates other dimensions for microchannel 105 .
- Microfluidic device 101 further comprises a second substrate 111 having a lower surface 113 that is bonded to an upper surface 115 of first substrate 103 .
- microchannel 105 is sealed except for an inlet 117 at entrance well 107 and an outlet 119 at exit well 109 .
- Second substrate 111 defines an entrance passageway 121 and an exit passageway 123 therethrough, which are in fluid communication with entrance well 107 and exit well 109 , respectively, of first substrate 103 .
- each cavity such as cavity 150 is partially defined by a deformable membrane that allows for pressure measurement.
- substrate 103 is fabricated with circular openings and the cavities are defined on the sides by the walls of the openings in substrate 103 , on the bottom with the deformable membrane, and on the top by the second substrate 111 .
- first substrate 103 is preferably made of silicon and is approximately 500 micrometers thick
- second substrate 111 is made of glass, such as borosilicate glass, although the present invention contemplates other materials for first substrate 103 , as is discussed in greater detail herein.
- substrate 103 is a conventional silicon on insulator (SOI) wafer.
- SOI silicon on insulator
- Exemplary borosilicate glasses are manufactured by Schott North America, Inc. of Elmsford, N.Y., USA, and by Corning Incorporated of Corning, N.Y., USA.
- pressurized reservoir fluid is urged through entrance passageway 121 , entrance well 107 , and inlet 117 into microchannel 105 .
- the reservoir fluid exits microchannel 105 through outlet 119 , exit well 109 , and exit passageway 123 .
- Microchannel 105 provides substantial resistance to the flow of reservoir fluid therethrough because microchannel 105 is very small in cross-section in relation to the length of microchannel 105 .
- an input pressure e.g., reservoir pressure
- an output pressure e.g., atmospheric pressure
- the overall pressure drop between inlet 117 and outlet 119 depends upon the inlet pressure and the viscosity of the reservoir fluid. Fluid flow through microchannel 105 is laminar and, thus the pressure drop between inlet 117 and outlet 119 is linear when the reservoir fluid exhibits single-phase flow.
- PCT/IB09/50500 filed Feb. 7, 2009, which is incorporated by reference herein, and in co-pending U.S. Pat. No. ______, entitled “PHASE BEHAVIOR ANAYSIS USING A MICROFLUIDIC PLATFORM,” Attorney Docket No.
- FIG. 2 provides a stylized, schematic representation of the reaction of reservoir fluid 201 as the reservoir fluid flows through microchannel 105 in a direction generally corresponding to arrow 202 , according to some embodiments.
- the reservoir fluid enters inlet 117 of microchannel 105 , the reservoir fluid is at a pressure above the “bubble point pressure” of the reservoir fluid.
- the bubble point pressure of a fluid is the pressure at or below which the fluid begins to boil, i.e., bubble, at a given temperature.
- the reservoir fluid exits outlet 119 of microchannel 105 the reservoir fluid is at a pressure below the bubble point pressure of the reservoir fluid.
- a “first” bubble 203 forms in the reservoir fluid at some location, e.g., at 205 in FIG.
- microchannel 105 within microchannel 105 where the reservoir fluid is at the bubble point pressure.
- multi-phase flow e.g., gas and liquid flow
- of reservoir fluid 201 occurs in microchannel 105 .
- Previously-formed bubbles e.g. bubbles 207 , 209 , 211 , 213 , 215 , and the like, grow in size as reservoir fluid 201 flows within microchannel 105 beyond the location corresponding to the formation of the first bubble due to decreased pressure in this portion of microchannel 105 and more evaporation of the lighter components of reservoir fluid 201 .
- the bubbles are separated by slugs of liquid, such as slugs 217 , 219 , 221 , 223 , 225 , and the like.
- Expansion of the bubbles results in an increased flow velocity of the bubbles and liquid slugs, such as slugs 217 , 219 , 221 , 223 , 225 , within microchannel 105 .
- the mass flow rate of reservoir fluid 201 is substantially constant along microchannel 105 ; however, the volume flow rate of reservoir fluid 201 increases as reservoir fluid flows along microchannel 105 .
- the reservoir fluid also enters cavity 150 through small channel 152 .
- the width of small side channel 152 is approximately 50 micrometers, or about half of the width of microchannel 105 , and is about 50 micrometers deep.
- Thermo-physical properties of the reservoir fluid can be determined by measuring the size and concentration of bubbles within microchannel 105 .
- FIG. 3 the flow of the reservoir fluid through microchannel 105 is depicted in three regimes.
- a first bubble such as first bubble 203 of FIG. 2
- the pressure of the reservoir fluid is above the bubble point. No bubbles are observed within first region 303 .
- first region 303 the flow of the reservoir fluid is laminar due to a low Reynolds number and the pressure drops linearly therein. Once bubbles are formed, the bubbles move along within microchannel 105 toward outlet 119 and the volumes of the bubbles increases.
- the void fraction i.e., the volume of gas to total volume, of the reservoir fluid is less than one.
- a third region 307 the flow of the reservoir fluid is dominated by high-speed gas flow. The gas bubbles are separated by small droplets of liquid, such as water. The pressure of the reservoir fluid within third region 307 decreases rapidly. Gas bubbles flow within second region 305 at a slower rate than in third region 307 , where they are often nearly impossible to follow with the naked eye.
- a camera 401 is used to capture snapshots of the flow, as shown in FIG. 4 .
- the flow of reservoir fluid into inlet 117 (shown in FIGS. 1 and 3 ) is represented by an arrow 403 and that the flow of reservoir fluid from outlet 119 (shown in FIGS. 1 and 3 ) is represented by an arrow 405 .
- camera 401 is a charge-coupled device (CCD) type camera.
- the images produced by camera 401 are processed using image analysis software, such as ImageJ 1.38 ⁇ , available from the United States National Institutes of Health, of Bethesda, Md., USA, and ProAnalyst, available from Xcitex, Inc.
- thermo-physical properties of the reservoir fluid such as gas-oil-ratio, phase envelope, and equation of state, can be determined.
- FIGS. 5 and 6 depict a microfluidic device 501 , according to some embodiments.
- microfluidic device 501 comprises a first substrate 503 defining a microchannel 505 , an entrance well 507 , and an exit well 509 .
- Microchannel 505 extends between and is in fluid communication with entrance well 507 and exit well 509 .
- first substrate 503 is made from silicon; however, first substrate 503 may be made from glass.
- Microchannel 505 , entrance well 507 , and exit well 509 are, in one embodiment, first patterned onto first substrate 503 using a photolithography technique and then etched into first substrate 503 using a deep reactive ion etching technique.
- microchannel 505 exhibits a length of one or more meters, a width of about 100 micrometers, and a depth of about 50 micrometers, although the present invention also contemplates other dimensions for microchannel 505 .
- a number small side channels, such as side channels 552 and 556 lead from the main microchannel 505 to circular cavities such as cavities 550 and 554 .
- twelve cavities are spaced out along the length of microchannel 505 and each of the cavities are about 2 mm in diameter, although the present invention also contemplates other numbers of cavities and diameters for each cavity.
- Microfluidic device 501 further comprises a second substrate 511 defining an entrance passageway 513 and an exit passageway 515 in fluid communication with entrance well 507 and exit well 509 .
- Second substrate 511 is made from glass, as discussed herein concerning second substrate 111 (shown in FIG. 1 ).
- entrance passageway 513 and exit passageway 515 are generated in second substrate 511 using a water jet or abrasive water jet technique.
- First substrate 503 and second substrate 511 are preferably fused using an anodic bonding method after careful cleaning of the bonding surfaces of substrates 503 and 511 .
- the cavities can be fabricated using a verity of techniques. According to some embodiments, a deep ion reaction (DRIE) etching process is used.
- DRIE deep ion reaction
- microfluidic device 501 having any suitable size and/or shape needed for a particular implementation.
- microfluidic device 501 exhibits an overall length A of about 80 millimeters and an overall width B of about 15 millimeters.
- passageways 513 and 515 are spaced apart a distance C of about 72 millimeters
- cavities 558 and 550 are spaced apart a distance D of about 3 millimeters
- cavities along the serpentine section of microchannel 505 such as cavities 550 and 554 are spaced apart by a distance E of about 5 millimeters.
- microfluidic device 101 may also exhibit dimensions corresponding to microfluidic device 501 . However, the scope of the present invention is not so limited.
- micro-venturi 701 is incorporated into an inlet of microchannel 505 .
- Micro-venturi 701 includes a nozzle opening 801 having a width W 1 , which is smaller than a width W 2 of microchannel 505 .
- the contraction provided by micro-venturi 701 causes a substantial pressure drop in the reservoir fluid at nozzle opening 801 along with an increased velocity of reservoir fluid flow. The combined effect of the pressure drop and the increased velocity induces formation of bubble nuclei in the reservoir fluid.
- microchannel 505 further includes one or more additional constrictions 703 , as shown in FIGS. 7 and 9 .
- Constrictions 703 exhibit widths W 3 , which are smaller than a width W 4 of microchannel 505 .
- width W 1 of nozzle opening 801 and widths W 3 of constrictions 703 are about 20 micrometers, whereas the preferred width W 2 and W 4 of microchannel 505 is 100 micrometers. These restrictions increase the velocity of the reservoir fluid by up to about 500 percent.
- FIGS. 10A and 10B are schematic cross sections of an un-deformed and deformed membrane respectively, according to some embodiments.
- Cavity 554 is shown defined on the sides by the first substrate 503 , on the top by a second substrate 511 , and on the bottom by deformable membrane 570 .
- membrane 570 is micro-fabricated in the device 501 using conventional SOI (Silicon one insulator) wafers.
- the membranes, such as membrane 570 are not separate parts from the first substrate 503 . Rather they are formed the same material as substrate 503 .
- starting with substrate 503 is a 500 micrometer thick silicon wafer.
- the cavities, such as cavity 554 are etched down to about 400 micrometers. This leaves a 100 micrometer wall at the bottom of each cavity, which forms the flexible membrane, such as membrane 570 .
- membrane 570 is shown in a deformed state. Once the pressure inside the microchannel 505 (not shown) and inside cavity 554 exceeds that of the atmosphere, the membrane 570 will expand outward. Membrane 570 is designed such that deformation of the membrane 570 is linear within the expected pressure range for the device 501 . It has been found that for many downhole applications a membrane diameter of about 2 mm in diameter and about 100 micrometers in thickness, although other membrane dimensions, including thickness, are contemplated. According to some embodiments, modeling such as finite element modeling can be used to ensure the membrane will behave linearly within the expected range of pressures.
- FIG. 11 is a stylized, schematic representation a membrane deformation measurement setup, according to some embodiments.
- the setup includes a microfluidic device 501 , confocal sensor 1110 , spectrometer 1120 , and a computer system 1130 . Due to changing pressure inside the microchannel of device 501 , the pressure changes in cavity 554 and membrane 570 deforms. The deformation is detected and measured by the sensor 1110 .
- a confocal chromatic sensor, or an optical pen is used. Suitable sensors include the chromatic confocal distance sensors made by STIL (Sciences et Techniques Industrielles de la Lumiére) SA, of France.
- STIL Sciences et Techniques Industrielles de la Lumiére
- the confocal sensor uses the wide spectrum of the white light. It then disperses the white light into monochromatic light using a series of lenses. The distance of the object from the sensors is measured by spectroscopy of the reflected light using spectrometer 1120 which receives optical signals from the sensor via fiber optic connection 1112 . The setup is controlled by and the results are interpreted and displayed using computer system 1130 .
- Computer system 1130 includes a one or more processors, a storage system 1132 (which includes one or more removable storage devices that accept computer readable media), display 1136 , and one or more human input devices 1134 , such as a keyboard and/or a mouse. Computer system 1130 also includes a data acquisition system for collecting data from the spectrometer 1120 .
- the microfluidic device 501 is mounted on a chip holder perpendicular to the main axis of the confocal sensor 1110 .
- the sensor is also mounted on a holder that can move the sensor in two orthogonal directions using two micro-stages. In this way, the sensor 1110 can be focused, one at a time, on any of the other membranes of the other cavities located on device 501 .
- FIG. 12 is a stylized, schematic representation a membrane deformation measurement setup having multiple optical sensors, according to some embodiments.
- the setup includes a microfluidic device 501 , spectrometer 1120 , and a computer system 1130 .
- the setup in FIG. 12 includes a plurality of optical sensors 1210 with one optical sensor focused on each membrane of device 510 .
- sensor 1212 is focused on the membrane of cavity 558
- sensor 1214 is focused on the membrane of cavity 550 .
- the signals form the sensors 1210 that represent various states of deformation of the membranes are fed to spectrometer 1120 and then stored, evaluated and/or displayed by computer system 1130 .
- the senor 1210 are mounted on a micro-stage such that each optical sensor can be positioned to focus on several points with respect to the membrane.
- the micro-stage can be programmed such that each optical sensor focuses on three points corresponding to points A, B and C on the curves 1310 and 1320 of FIG. 13 , which is described more fully below.
- FIG. 13 shows plots of exemplary measurements of a membrane in undeformed and deformed states, according to embodiments.
- the optical sensor was moved across the membrane using a micro-stage.
- Curve 1310 is the membrane profile under no (i.e. atmospheric) pressure and curve 1320 is the membrane profile under 400 psi pressure. It can be seen that the flat membrane assumes a bell-shape under the applied pressure.
- Two reference points “A” and “B” were selected on either side of the membrane an the line 1312 represents the device plane in the case of curve 1310 and the line 1322 represents the device plane in the case of curve 1320 . From curve 1310 , it can be seen that approximately 1 micrometer offset exists between the device plane and the undeformed membrane surface.
- the deformation of the center point “C” of the membrane is used as a measure of the applied pressure. According to curve 1320 the deformation from the device plane is slightly more than 4 micrometers.
- FIG. 14 shows a plot of repeated measured deformations as a function of hydrostatic pressure, according to embodiments. As shown by curve 1410 , good linearity was achieved for the designed range. Reasonable repeatability and reproducibility is achieved as shown by the standard deviation bars at various points along curve 1410 . Thus curve 1410 indicates that the described techniques can be reliably used to measure pressure inside a microchannel.
- Q, ⁇ P, and R represent flow rate, pressure drop, and channels resistance respectively.
- Q, ⁇ P, and R represent flow rate, pressure drop, and channels resistance respectively.
- R For a rectangular microchannel R can be calculated using the teachings of D. J. Beebe, G. A. Mensing, G. M. Walker, Annual Review of Biomedical Engineering, 4, (2002), 261, which is incorporated herein by reference, namely:
- FIG. 15 shows plots of the measured pressures in the cavities for different input pressures, according to embodiments.
- the injected fluid is water. Each data point shows the pressure at the corresponding cavity.
- the input pressure was varied from 600 psi (curve 1510 ) down to 100 psi (curve 1520 ). From the curves, a linear pressure distribution is evident in the channel, which is in accord with the above analysis.
- analysis of one or more types of biomedical fluids including but not limited to bodily fluids such as blood, urine, serum, mucus, and saliva.
- analysis of one or more fluids is provided in relation to environmental monitoring, including by not limited to water purification, water quality, and waste water processing, and potable water and/or sea water processing and/or analysis.
- analysis of other fluid chemical compositions is provided.
Abstract
Methods and related systems are described for measuring fluid pressure in a microchannel. A number of flexible membranes are positioned at locations along the microchannel such that pressure of the fluid in the microchannel causes a deformation of the membranes. An optical sensing system adapted and positioned to detect deformation of the membranes that thereby determine the pressure of the fluid flowing in the microchannel at a number of locations along the microchannel.
Description
- This patent application is a continuation-in-part of International Patent Application No. PCT/IB09/50500, filed Feb. 7, 2009, which is incorporated by reference herein.
- 1. Field of the Invention
- This patent specification relates to an apparatus and method for measuring thermo-physical properties of a reservoir fluid. More particularly, the patent specification relates to an apparatus and method for measuring pressure of a reservoir fluid flowing in a microfluidic device.
- 2. Description of Related Art
- The measurement of reservoir fluid properties is a key step in the planning and development of a potential oilfield. It is often desirable to perform such measurements frequently on a producing well to provide an indication of the performance and behavior of the production process. Examples of such measurements are pressure, volume, and temperature measurements, often referred to as “PVT” measurements, which are instrumental in predicting complicated thermo-physical behavior of reservoir fluids. One important use of PVT measurements is the construction of an equation of state describing the state of oil in the reservoir fluid. Other properties of interest that may be determined using PVT measurements include fluid viscosity, density, chemical composition, gas-oil-ratio, and the like. Once a PVT analysis is complete, the equation of state and other parameters can be input into reservoir modeling software to predict the behavior of the oilfield formation.
- Conventional PVT measurements are performed using a cylinder containing the reservoir fluid. A piston disposed in the cylinder maintains the desired pressure on the fluid, while the heights of the liquid and gaseous phases are measured using, for example, a cathetometer. International Patent Application No. PCT/IB09/50500, filed Feb. 7, 2009, discusses microfluidic technique form measuring thermo-physical properties of a reservoir fluid. The microfluidic techniques can provide certain advantages including: (1) providing a way to measure thermo-physical properties of a reservoir fluid with small amounts of reservoir fluid; (2) providing a way to perform pressure-volume-temperature analyses of a reservoir fluid in a timely fashion; and (3) providing a way to measure thermo-physical properties of a reservoir fluid using image analysis. However, in some cases the microfluidic based measurements and analysis can benefit from pressure measurement at various points along the microchannel.
- Pressure sensors based on deformation of a membrane have long been developed. These membranes are usually micro-fabricated using SOI or silicone-on-insulator wafers. For example, see, U.S. Pat. Nos. 5,095,401, 5,155,061, 5,165,282, and 5,177,661, each of which is incorporated by reference herein. Numerous techniques have been used to correlate deformation of the membrane with pressure. These techniques include piezo-resistive element (see, e.g., U.S. Pat. Nos. 5,081,437, 5,172,205, and 6,843,121), optical fibers (See. e.g. U.S. Pat. Nos. 7,000,477, and 7,149,374; and U.S. Patent Publication Nos. 2005/0041905, and 2008/0175529), and capacitive sensors (See. e.g. U.S. Pat. Nos. 7,254,008, 5,470,797, and 6,945,116, and PCT Patent Publication Nos. WO 96/16319, and WO 98/23934). Each of the foregoing patents and patent publications are incorporated by reference herein.
- Most of these techniques have been developed for conventional pressure sensors. Incorporating such tools inside a microchannel is either too difficult or otherwise impractical. Practical and cost effective measurement techniques for microchannels are rare. To measure pressure inside a microfluidic channel, some techniques have been described. For example, R. Baviere, F. Ayela, Meas. Sci. Technol., 15, (2004), 377, incorporated by reference herein, discusses the use of piezo-resistive elements; and M. J. Kohl, S. I. Abdel-Khalik, S. M. Jeter, D. L. Sadowski, Sensors and Actuators a-Physical, 118, (2005), 212; and M. J. Kohl, S. I. Abdel-Khalik, S. M. Jeter, D. L. Sadowski, Int. J. Heat Mass Transfer, 48, (2005), 1518, both incorporated by reference herein, discuss the use of lasers.
- However, there remains a need for simple non-invasive techniques to measure pressure inside a microfluidic channel.
- According to embodiments, a system for measuring fluid pressure in a microchannel is provided. The system includes a microchannel adapted to carry a fluid; a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member; and an optical sensing system adapted and positioned to detect deformation of the first flexible member.
- The flexible member is preferably a membrane partially defining a cavity that is in fluid communication with the microchannel at a first location such that deformation of the membrane is representative of the fluid pressure in the microchannel at the first location. According to some embodiments, second and third membranes also can be provided to provide detecting of pressure at second and third locations on the microchannel.
- Additionally, according to some embodiments a method for measuring fluid pressure in a microchannel is provided. The method includes providing a microchannel adapted to carry a fluid, and a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member. Fluid is introduced under pressure into the microchannel, thereby causing a deformation of the first flexible member, and deformation of the first flexible member is optically detected. A value can be determined representing the pressure at a location in the microchannel based at least in part on the optically detected deformation of the first flexible member.
- Further features and advantages of the invention will become more readily apparent from the following detailed description when taken in conjunction with the accompanying drawings.
- The present invention is further described in the detailed description which follows, in reference to the noted plurality of drawings by way of non-limiting examples of exemplary embodiments of the present invention, in which like reference numerals represent similar parts throughout the several views of the drawings, and wherein:
-
FIG. 1 is a stylized, exploded, perspective view of a first illustrative embodiment of a microfluidic device for measuring thermo-physical properties of a reservoir fluid; -
FIG. 2 is a stylized, schematic representation of a reaction of reservoir fluid as the reservoir fluid flows through the microfluidic device ofFIG. 1 ; -
FIG. 3 is a top, plan view of the microfluidic device ofFIG. 1 depicting three reservoir fluid flow regimes; -
FIG. 4 is a stylized, side, elevational view of a reservoir fluid measurement system, including the microfluidic device ofFIG. 1 and a camera for generating images of the microfluidic device in use; -
FIG. 5 is a top, plan view of a second illustrative embodiment of a microfluidic device for measuring thermo-physical properties of a reservoir fluid; -
FIG. 6 is a side, elevational view of the microfluidic device ofFIG. 5 ; -
FIGS. 7-9 depict exemplary microchannel constrictions of the microfluidic device ofFIG. 5 ; -
FIGS. 10A and 10B are schematic cross sections of an un-deformed and deformed membrane respectively, according to some embodiments; -
FIG. 11 is a stylized, schematic representation a membrane deformation measurement setup, according to some embodiments; -
FIG. 12 is a stylized, schematic representation a membrane deformation measurement setup having multiple optical sensors, according to some embodiments; -
FIG. 13 shows plots of exemplary measurements of a membrane in undeformed and deformed states, according to embodiments; -
FIG. 14 shows a plot of repeated measured deformations as a function of hydrostatic pressure, according to embodiments; and -
FIG. 15 shows plots of the measured pressures in cavities for different input pressures, according to embodiments. - While the invention is susceptible to various modifications and alternative forms, specific embodiments thereof have been shown by way of example in the drawings and are herein described in detail. It should be understood, however, that the description herein of specific embodiments is not intended to limit the invention to the particular forms disclosed, but on the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the scope of the invention as defined by the appended claims.
- Illustrative embodiments of the invention are described below. In the interest of clarity, not all features of an actual implementation are described in this specification. It will be appreciated that in the development of any such actual embodiment, numerous implementation-specific decisions must be made to achieve the developer's specific goals, such as compliance with system-related and business-related constraints, which will vary from one implementation to another. Moreover, it will be appreciated that such a development effort might be complex and time-consuming but would nevertheless be a routine undertaking for those of ordinary skill in the art having the benefit of this disclosure. Further, like reference numbers and designations in the various drawings indicated like elements.
- According to embodiments, systems and methods for measuring pressure of a reservoir fluid in a microfluidic device are provided. For the purposes of this disclosure, the term “reservoir fluid” means a fluid stored in or transmitted from a subsurface body of permeable rock. Thus “reservoir fluid” may include, without limitation, hydrocarbon fluids, saline fluids such as saline water, as well as other formation water, and other fluids such as carbon dioxide in a supercritical phase. Moreover, for the purposes of this disclosure, the term “microfluidic” means having a fluid-carrying channel exhibiting a width within a range of tens to hundreds of micrometers, but exhibiting a length that is many times longer than the width of the channel. Similarly the term “microchannel” means a fluid-carrying channel exhibiting a width within a range of tens to hundreds of micrometers. Although many of the microchannels described herein are of rectangular cross section due to the practicalities of fabrication techniques, the cross section of a microchannel can be of any shape, including round, oval, ellipsoid, square, etc.
-
FIG. 1 depicts a stylized, exploded, perspective view of amicrofluidic device 101 in which pressure can be measured, according to some embodiments of the invention. In the illustrated embodiment,microfluidic device 101 comprises afirst substrate 103 defining amicrochannel 105, an entrance well 107 and anexit well 109.Microchannel 105 extends between and is in fluid communication with entrance well 107 and exit well 109.Microchannel 105 forms a serpentine pattern infirst substrate 103, thus allowingmicrochannel 105 to extend a significant length but occupy a relatively small area. According to one embodiment, microchannel 105 exhibits a length of one or more meters, a width of about 100 micrometers, and a depth of about 50 micrometers, although the present invention also contemplates other dimensions formicrochannel 105.Microfluidic device 101 further comprises asecond substrate 111 having alower surface 113 that is bonded to anupper surface 115 offirst substrate 103. Whensecond substrate 111 is bonded tofirst substrate 103,microchannel 105 is sealed except for aninlet 117 at entrance well 107 and anoutlet 119 at exit well 109.Second substrate 111 defines anentrance passageway 121 and anexit passageway 123 therethrough, which are in fluid communication with entrance well 107 and exit well 109, respectively, offirst substrate 103. Also shown inFIG. 1 are a number of cavities such ascavity 150, each connected to themain microchannel 105 using a small side channel. As is explained in further detail below, each cavity such ascavity 150 is partially defined by a deformable membrane that allows for pressure measurement. According topreferred embodiments substrate 103 is fabricated with circular openings and the cavities are defined on the sides by the walls of the openings insubstrate 103, on the bottom with the deformable membrane, and on the top by thesecond substrate 111. - In
FIG. 1 ,first substrate 103 is preferably made of silicon and is approximately 500 micrometers thick, andsecond substrate 111 is made of glass, such as borosilicate glass, although the present invention contemplates other materials forfirst substrate 103, as is discussed in greater detail herein. According somepreferred embodiments substrate 103 is a conventional silicon on insulator (SOI) wafer. Exemplary borosilicate glasses are manufactured by Schott North America, Inc. of Elmsford, N.Y., USA, and by Corning Incorporated of Corning, N.Y., USA. - In operation, pressurized reservoir fluid is urged through
entrance passageway 121, entrance well 107, andinlet 117 intomicrochannel 105. The reservoir fluid exits microchannel 105 throughoutlet 119, exit well 109, andexit passageway 123.Microchannel 105 provides substantial resistance to the flow of reservoir fluid therethrough becausemicrochannel 105 is very small in cross-section in relation to the length ofmicrochannel 105. When fluid flow is established betweeninlet 117 andoutlet 119 ofmicrochannel 105, the pressure of the reservoir fluid withinmicrochannel 105 drops from an input pressure, e.g., reservoir pressure, atinlet 117 to an output pressure, e.g., atmospheric pressure, atoutlet 119. The overall pressure drop betweeninlet 117 andoutlet 119 depends upon the inlet pressure and the viscosity of the reservoir fluid. Fluid flow throughmicrochannel 105 is laminar and, thus the pressure drop betweeninlet 117 andoutlet 119 is linear when the reservoir fluid exhibits single-phase flow. For further details of microfluidic devices and method for measuring thermo-physical properties of reservoir fluid, see e.g. International Patent Application No. PCT/IB09/50500, filed Feb. 7, 2009, which is incorporated by reference herein, and in co-pending U.S. Pat. No. ______, entitled “PHASE BEHAVIOR ANAYSIS USING A MICROFLUIDIC PLATFORM,” Attorney Docket No. 117.0043 US NP, filed on even date herewith, which is incorporated by reference herein. Once the flow is established, the membrane in each cavity, such ascavity 150, deforms due to the fluid pressure and the deformation can be optically detected, as is described more fully below. -
FIG. 2 provides a stylized, schematic representation of the reaction ofreservoir fluid 201 as the reservoir fluid flows throughmicrochannel 105 in a direction generally corresponding toarrow 202, according to some embodiments. When the reservoir fluid entersinlet 117 ofmicrochannel 105, the reservoir fluid is at a pressure above the “bubble point pressure” of the reservoir fluid. The bubble point pressure of a fluid is the pressure at or below which the fluid begins to boil, i.e., bubble, at a given temperature. When the reservoir fluid exitsoutlet 119 ofmicrochannel 105, the reservoir fluid is at a pressure below the bubble point pressure of the reservoir fluid. Thus, a “first”bubble 203 forms in the reservoir fluid at some location, e.g., at 205 inFIG. 2 , withinmicrochannel 105 where the reservoir fluid is at the bubble point pressure. Downstream oflocation 205, multi-phase flow, e.g., gas and liquid flow, ofreservoir fluid 201 occurs inmicrochannel 105. Previously-formed bubbles, e.g. bubbles 207, 209, 211, 213, 215, and the like, grow in size asreservoir fluid 201 flows withinmicrochannel 105 beyond the location corresponding to the formation of the first bubble due to decreased pressure in this portion ofmicrochannel 105 and more evaporation of the lighter components ofreservoir fluid 201. The bubbles are separated by slugs of liquid, such asslugs bubbles slugs microchannel 105. The mass flow rate ofreservoir fluid 201 is substantially constant alongmicrochannel 105; however, the volume flow rate ofreservoir fluid 201 increases as reservoir fluid flows alongmicrochannel 105. The reservoir fluid also enterscavity 150 throughsmall channel 152. According to some embodiments the width ofsmall side channel 152 is approximately 50 micrometers, or about half of the width ofmicrochannel 105, and is about 50 micrometers deep. - Thermo-physical properties of the reservoir fluid, such as
reservoir fluid 201 ofFIG. 2 , for example gas-oil-ratio, phase envelope, and equation of state, can be determined by measuring the size and concentration of bubbles withinmicrochannel 105. Referring now toFIG. 3 , the flow of the reservoir fluid throughmicrochannel 105 is depicted in three regimes. A first bubble, such asfirst bubble 203 ofFIG. 2 , is formed at 301 alongmicrochannel 105. Frominlet 117 ofmicrochannel 105 tolocation 301 of the first bubble, indicated inFIG. 3 as afirst region 303, the pressure of the reservoir fluid is above the bubble point. No bubbles are observed withinfirst region 303. Infirst region 303, the flow of the reservoir fluid is laminar due to a low Reynolds number and the pressure drops linearly therein. Once bubbles are formed, the bubbles move along withinmicrochannel 105 towardoutlet 119 and the volumes of the bubbles increases. In asecond region 305, the void fraction, i.e., the volume of gas to total volume, of the reservoir fluid is less than one. In athird region 307, the flow of the reservoir fluid is dominated by high-speed gas flow. The gas bubbles are separated by small droplets of liquid, such as water. The pressure of the reservoir fluid withinthird region 307 decreases rapidly. Gas bubbles flow withinsecond region 305 at a slower rate than inthird region 307, where they are often nearly impossible to follow with the naked eye. - Once a stabilized flow of reservoir fluid is established in
microchannel 105, acamera 401 is used to capture snapshots of the flow, as shown inFIG. 4 . Note that the flow of reservoir fluid into inlet 117 (shown inFIGS. 1 and 3 ) is represented by anarrow 403 and that the flow of reservoir fluid from outlet 119 (shown inFIGS. 1 and 3 ) is represented by anarrow 405. In one embodiment,camera 401 is a charge-coupled device (CCD) type camera. The images produced bycamera 401 are processed using image analysis software, such as ImageJ 1.38×, available from the United States National Institutes of Health, of Bethesda, Md., USA, and ProAnalyst, available from Xcitex, Inc. of Cambridge, Mass., USA, to measure the size and concentration of the bubbles in the reservoir fluid disposed inmicrochannel 105. Using this technique, many thermo-physical properties of the reservoir fluid, such as gas-oil-ratio, phase envelope, and equation of state, can be determined. -
FIGS. 5 and 6 depict amicrofluidic device 501, according to some embodiments. As inmicrofluidic device 101 ofFIG. 1 ,microfluidic device 501 comprises afirst substrate 503 defining amicrochannel 505, an entrance well 507, and anexit well 509.Microchannel 505 extends between and is in fluid communication with entrance well 507 and exit well 509. In the illustrated embodiment,first substrate 503 is made from silicon; however,first substrate 503 may be made from glass.Microchannel 505, entrance well 507, and exit well 509 are, in one embodiment, first patterned ontofirst substrate 503 using a photolithography technique and then etched intofirst substrate 503 using a deep reactive ion etching technique. As in the first embodiment shown inFIG. 1 , in a preferred embodiment, microchannel 505 exhibits a length of one or more meters, a width of about 100 micrometers, and a depth of about 50 micrometers, although the present invention also contemplates other dimensions formicrochannel 505. A number small side channels, such asside channels main microchannel 505 to circular cavities such ascavities side channel 560 that leads tocavity 558. According to some embodiments, twelve cavities are spaced out along the length ofmicrochannel 505 and each of the cavities are about 2 mm in diameter, although the present invention also contemplates other numbers of cavities and diameters for each cavity. -
Microfluidic device 501 further comprises asecond substrate 511 defining anentrance passageway 513 and anexit passageway 515 in fluid communication with entrance well 507 and exit well 509.Second substrate 511 is made from glass, as discussed herein concerning second substrate 111 (shown inFIG. 1 ). In one embodiment,entrance passageway 513 andexit passageway 515 are generated insecond substrate 511 using a water jet or abrasive water jet technique.First substrate 503 andsecond substrate 511 are preferably fused using an anodic bonding method after careful cleaning of the bonding surfaces ofsubstrates - The present invention contemplates
microfluidic device 501 having any suitable size and/or shape needed for a particular implementation. In one embodiment,microfluidic device 501 exhibits an overall length A of about 80 millimeters and an overall width B of about 15 millimeters. In such an embodiment,passageways cavities microchannel 505, such ascavities microfluidic device 101 may also exhibit dimensions corresponding tomicrofluidic device 501. However, the scope of the present invention is not so limited. - Referring to
FIG. 7 , one or more portions ofmicrochannel 505 include zones of reduced cross-sectional area to induce the formation of bubble nuclei in the reservoir fluid. For example, as shown inFIGS. 7 and 8 , a micro-venturi 701 is incorporated into an inlet ofmicrochannel 505.Micro-venturi 701 includes anozzle opening 801 having a width W1, which is smaller than a width W2 ofmicrochannel 505. The contraction provided by micro-venturi 701 causes a substantial pressure drop in the reservoir fluid atnozzle opening 801 along with an increased velocity of reservoir fluid flow. The combined effect of the pressure drop and the increased velocity induces formation of bubble nuclei in the reservoir fluid. Preferably,microchannel 505 further includes one or moreadditional constrictions 703, as shown inFIGS. 7 and 9 .Constrictions 703 exhibit widths W3, which are smaller than a width W4 ofmicrochannel 505. Preferably, width W1 ofnozzle opening 801 and widths W3 ofconstrictions 703 are about 20 micrometers, whereas the preferred width W2 and W4 ofmicrochannel 505 is 100 micrometers. These restrictions increase the velocity of the reservoir fluid by up to about 500 percent. -
FIGS. 10A and 10B are schematic cross sections of an un-deformed and deformed membrane respectively, according to some embodiments.Cavity 554 is shown defined on the sides by thefirst substrate 503, on the top by asecond substrate 511, and on the bottom bydeformable membrane 570. According to some embodiments,membrane 570 is micro-fabricated in thedevice 501 using conventional SOI (Silicon one insulator) wafers. According to some embodiments, the membranes, such asmembrane 570 are not separate parts from thefirst substrate 503. Rather they are formed the same material assubstrate 503. According to such embodiments, starting withsubstrate 503 is a 500 micrometer thick silicon wafer. The cavities, such ascavity 554 are etched down to about 400 micrometers. This leaves a 100 micrometer wall at the bottom of each cavity, which forms the flexible membrane, such asmembrane 570. - In
FIG. 10B ,membrane 570 is shown in a deformed state. Once the pressure inside the microchannel 505 (not shown) and insidecavity 554 exceeds that of the atmosphere, themembrane 570 will expand outward.Membrane 570 is designed such that deformation of themembrane 570 is linear within the expected pressure range for thedevice 501. It has been found that for many downhole applications a membrane diameter of about 2 mm in diameter and about 100 micrometers in thickness, although other membrane dimensions, including thickness, are contemplated. According to some embodiments, modeling such as finite element modeling can be used to ensure the membrane will behave linearly within the expected range of pressures. -
FIG. 11 is a stylized, schematic representation a membrane deformation measurement setup, according to some embodiments. The setup includes amicrofluidic device 501,confocal sensor 1110,spectrometer 1120, and acomputer system 1130. Due to changing pressure inside the microchannel ofdevice 501, the pressure changes incavity 554 andmembrane 570 deforms. The deformation is detected and measured by thesensor 1110. To measure deformation of themembrane 570, according to some embodiments, a confocal chromatic sensor, or an optical pen, is used. Suitable sensors include the chromatic confocal distance sensors made by STIL (Sciences et Techniques Industrielles de la Lumiére) SA, of France. The confocal sensor uses the wide spectrum of the white light. It then disperses the white light into monochromatic light using a series of lenses. The distance of the object from the sensors is measured by spectroscopy of the reflectedlight using spectrometer 1120 which receives optical signals from the sensor viafiber optic connection 1112. The setup is controlled by and the results are interpreted and displayed usingcomputer system 1130.Computer system 1130 includes a one or more processors, a storage system 1132 (which includes one or more removable storage devices that accept computer readable media),display 1136, and one or morehuman input devices 1134, such as a keyboard and/or a mouse.Computer system 1130 also includes a data acquisition system for collecting data from thespectrometer 1120. - According to one embodiment, the
microfluidic device 501 is mounted on a chip holder perpendicular to the main axis of theconfocal sensor 1110. The sensor is also mounted on a holder that can move the sensor in two orthogonal directions using two micro-stages. In this way, thesensor 1110 can be focused, one at a time, on any of the other membranes of the other cavities located ondevice 501. -
FIG. 12 is a stylized, schematic representation a membrane deformation measurement setup having multiple optical sensors, according to some embodiments. As in the case ofFIG. 11 , the setup includes amicrofluidic device 501,spectrometer 1120, and acomputer system 1130. The setup inFIG. 12 includes a plurality ofoptical sensors 1210 with one optical sensor focused on each membrane of device 510. For example,sensor 1212 is focused on the membrane ofcavity 558, andsensor 1214 is focused on the membrane ofcavity 550. The signals form thesensors 1210 that represent various states of deformation of the membranes are fed tospectrometer 1120 and then stored, evaluated and/or displayed bycomputer system 1130. According to some embodiments, thesensor 1210 are mounted on a micro-stage such that each optical sensor can be positioned to focus on several points with respect to the membrane. For example, the micro-stage can be programmed such that each optical sensor focuses on three points corresponding to points A, B and C on thecurves FIG. 13 , which is described more fully below. -
FIG. 13 shows plots of exemplary measurements of a membrane in undeformed and deformed states, according to embodiments. To measure the deformation of the membrane, the optical sensor was moved across the membrane using a micro-stage.Curve 1310 is the membrane profile under no (i.e. atmospheric) pressure andcurve 1320 is the membrane profile under 400 psi pressure. It can be seen that the flat membrane assumes a bell-shape under the applied pressure. Two reference points “A” and “B” were selected on either side of the membrane an theline 1312 represents the device plane in the case ofcurve 1310 and theline 1322 represents the device plane in the case ofcurve 1320. Fromcurve 1310, it can be seen that approximately 1 micrometer offset exists between the device plane and the undeformed membrane surface. The deformation of the center point “C” of the membrane is used as a measure of the applied pressure. According tocurve 1320 the deformation from the device plane is slightly more than 4 micrometers. - To calibrate membrane deformation, a series of hydrostatic tests were performed. The exit port of the microfluidic device was plugged to prevent any flow in the system. Then, the input pressure was varied from 0 psig up to 800 psig. This guaranteed a uniform hydrostatic pressure throughout the channel.
FIG. 14 shows a plot of repeated measured deformations as a function of hydrostatic pressure, according to embodiments. As shown bycurve 1410, good linearity was achieved for the designed range. Reasonable repeatability and reproducibility is achieved as shown by the standard deviation bars at various points alongcurve 1410. Thus curve 1410 indicates that the described techniques can be reliably used to measure pressure inside a microchannel. - The accuracy and reliability of the described techniques is further demonstrated by the following experiment. In a microchannel where Reynolds number is extremely low, the pressure drop is linear. In other words, if a fluid is injected at a give pressure and the output pressure is atmospheric, the pressure inside the channel maintains a linear relationship with the length of the channel. In such a system, flow rate is calculated using:
-
- where Q, ΔP, and R represent flow rate, pressure drop, and channels resistance respectively. For a rectangular microchannel R can be calculated using the teachings of D. J. Beebe, G. A. Mensing, G. M. Walker, Annual Review of Biomedical Engineering, 4, (2002), 261, which is incorporated herein by reference, namely:
-
- where ω is the channel width and h is the channel height. The above equations show that there is a linear relationship between pressure inside the channel and the length. Therefore, it can be expected that there is a linear pressure drop along the channels.
- The membranes were calibrated using the data shown in
FIG. 14 . Then the fluid (water) was injected into the channel. The injection pressure was varied from 600 psig down to 100 psig. The deformations of the membranes were measured at each pressure. Then, the deformations were converted into pressure using the calibration curve shown inFIG. 14 .FIG. 15 shows plots of the measured pressures in the cavities for different input pressures, according to embodiments. The injected fluid is water. Each data point shows the pressure at the corresponding cavity. The input pressure was varied from 600 psi (curve 1510) down to 100 psi (curve 1520). From the curves, a linear pressure distribution is evident in the channel, which is in accord with the above analysis. - Although many embodiments have been described herein with respect to analysis of reservoir fluids, the present invention is also applicable to the analysis of many other types of fluids. According to some embodiments analysis of one or more types of biomedical fluids is provided including but not limited to bodily fluids such as blood, urine, serum, mucus, and saliva. According to other embodiments analysis of one or more fluids is provided in relation to environmental monitoring, including by not limited to water purification, water quality, and waste water processing, and potable water and/or sea water processing and/or analysis. According to yet other embodiments, analysis of other fluid chemical compositions is provided.
- Whereas many alterations and modifications of the present invention will no doubt become apparent to a person of ordinary skill in the art after having read the foregoing description, it is to be understood that the particular embodiments shown and described by way of illustration are in no way intended to be considered limiting. Further, the invention has been described with reference to particular preferred embodiments, but variations within the spirit and scope of the invention will occur to those skilled in the art. It is noted that the foregoing examples have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present invention. While the present invention has been described with reference to exemplary embodiments, it is understood that the words, which have been used herein, are words of description and illustration, rather than words of limitation. Changes may be made, within the purview of the appended claims, as presently stated and as amended, without departing from the scope and spirit of the present invention in its aspects. Although the present invention has been described herein with reference to particular means, materials and embodiments, the present invention is not intended to be limited to the particulars disclosed herein; rather, the present invention extends to all functionally equivalent structures, methods and uses, such as are within the scope of the appended claims.
Claims (24)
1. A system for measuring fluid pressure in a microchannel comprising:
a microchannel adapted to carry a fluid;
a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member; and
an optical sensing system adapted and positioned to detect deformation of the first flexible member.
2. A system according to claim 1 , wherein the first flexible member is a first membrane.
3. A system according to claim 2 , further comprising a first cavity defined in part by the first membrane, wherein the first cavity is in fluid communication with the microchannel at a first location such that a fluid pressure within the first cavity corresponds to the fluid pressure in the microchannel at the first location, and the deformation of the first membrane is representative of the fluid pressure within the first cavity.
4. A system according to claim 3 , wherein the cavity and the microchannel are defined at least in part by a first substrate.
5. A system according to claim 4 , wherein the first substrate comprises silicon.
6. A system according to claim 3 , further comprising:
a second cavity defined in part by a second membrane and positioned to be in fluid communication with the microchannel at a second location such that a fluid pressure in the second cavity corresponds to the fluid pressure in the microchannel at the second location, and a deformation of the second membrane is representative of the fluid pressure within the second cavity; and
a third cavity defined in part by a third membrane and positioned to be in fluid communication with the microchannel at a third location such that a fluid pressure in the third cavity corresponds to the fluid pressure in the microchannel at the third location and the deformation of the third membrane is representative of the fluid pressure within the third cavity.
7. A system according to claim 6 , wherein the optical sensing system includes first, second and third optical sensors that are adapted and positioned to detect deformation of the first, second and third membranes respectively.
8. A system according to claim 1 , wherein the microchannel exhibits a serpentine shape and a length of at least one meter.
9. A system according to claim 1 , wherein the microchannel exhibits a width within a range of tens of micrometers to hundreds of micrometers.
10. A system according to claim 1 , wherein the optical sensing system comprises an optical sensor, a spectrometer and a computer system.
11. A system according to claim 9 , wherein the optical sensor is a confocal chromatic sensor.
12. A system according to claim 1 , wherein the microchannel is part of a microfluidic apparatus for measuring thermo-physical properties of a fluid that is of a type selected from the group consisting of: reservoir fluid, biomedical fluid, and a fluid being monitored in connection with environmental monitoring.
13. A system according to claim 1 , further comprising an optical sensing system adapted and positioned to detect phase states of the fluid at a plurality of locations along the microchannel.
14. A system according to claim 1 wherein the first flexible member is formed from the same material that at least partially defines the microchannel.
15. A system according to claim 14 wherein the material is silicon.
16. A method for measuring fluid pressure in a microchannel comprising:
providing a microchannel adapted to carry a fluid, and a first flexible member adapted and positioned such that pressure of the fluid in the microchannel causes a deformation of the first flexible member;
introducing fluid under pressure into the microchannel, thereby causing a deformation of the first flexible member; and
optically detecting the deformation of the first flexible member.
17. A method according to claim 16 , further comprising determining a value representing the pressure at a location in the microchannel based at least in part on the optically detected deformation of the first flexible member.
18. A method according to claim 16 , wherein the first flexible member is a first membrane.
19. A method according to claim 17 , wherein a first cavity is defined in part by the first membrane, and the first cavity is in fluid communication with the microchannel at a first location such that fluid pressure within the first cavity corresponds to the fluid pressure in the microchannel at the first location, and wherein the optically detected deformation of the first membrane is representative of the fluid pressure in the microchannel at the first location.
20. A method according to claim 19 , further comprising optically detecting deformation of a second membrane and a third membrane both being adapted and positioned to deform according to fluid pressures in the microchannel at second and third locations on the microchannel respectively.
21. A method according to claim 16 , wherein the microchannel exhibits a width within a range of tens of micrometers to hundreds of micrometers.
22. A method according to claim 16 , wherein the deformation is detected using a confocal chromatic sensor.
23. A method according to claim 16 , wherein the introduced fluid is of a type selected from the group consisting of: reservoir fluid, biomedical fluid, and a fluid being monitored in connection with environmental monitoring, and the method further comprises determining one or more thermo physical properties of the introduced fluid flowing through the microchannel.
24. A method according to claim 23 , further comprising optically sensing phase states of the fluid at a plurality of locations along the microchannel.
Priority Applications (1)
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PCT/IB2010/053982 WO2011013111A2 (en) | 2009-07-31 | 2010-09-03 | Pressure measurement of a reservoir fluid in a microfluidic device |
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CA2623793 | 2008-03-03 | ||
CA2623793A CA2623793C (en) | 2008-03-03 | 2008-03-03 | Microfluidic apparatus and method for measuring thermo-physical properties of a reservoir fluid |
PCT/IB2009/050500 WO2009109868A1 (en) | 2008-03-03 | 2009-02-07 | Microfluidic apparatus and method for measuring thermo-physical properties of a reservoir fluid |
Related Parent Applications (1)
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---|---|---|---|
PCT/IB2009/050500 Continuation-In-Part WO2009109868A1 (en) | 2008-03-03 | 2009-02-07 | Microfluidic apparatus and method for measuring thermo-physical properties of a reservoir fluid |
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US20100017135A1 true US20100017135A1 (en) | 2010-01-21 |
Family
ID=40638161
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/867,444 Active 2030-01-21 US8485026B2 (en) | 2008-03-03 | 2009-02-07 | Microfluidic method for measuring thermo-physical properties of a reservoir fluid |
US12/533,292 Abandoned US20100017135A1 (en) | 2008-03-03 | 2009-07-31 | Pressure measurement of a reservoir fluid in a microfluidic device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/867,444 Active 2030-01-21 US8485026B2 (en) | 2008-03-03 | 2009-02-07 | Microfluidic method for measuring thermo-physical properties of a reservoir fluid |
Country Status (10)
Country | Link |
---|---|
US (2) | US8485026B2 (en) |
EP (1) | EP2252888B1 (en) |
CN (1) | CN101971022B (en) |
AU (1) | AU2009220857B2 (en) |
BR (1) | BRPI0908452B1 (en) |
CA (1) | CA2623793C (en) |
MX (1) | MX2010009569A (en) |
MY (1) | MY155889A (en) |
RU (1) | RU2458344C2 (en) |
WO (1) | WO2009109868A1 (en) |
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Also Published As
Publication number | Publication date |
---|---|
AU2009220857A2 (en) | 2010-09-23 |
MY155889A (en) | 2015-12-15 |
WO2009109868A1 (en) | 2009-09-11 |
AU2009220857B2 (en) | 2013-08-29 |
EP2252888B1 (en) | 2014-10-08 |
US8485026B2 (en) | 2013-07-16 |
BRPI0908452B1 (en) | 2019-04-30 |
RU2458344C2 (en) | 2012-08-10 |
CA2623793C (en) | 2010-11-23 |
CA2623793A1 (en) | 2009-09-03 |
BRPI0908452A2 (en) | 2017-06-06 |
MX2010009569A (en) | 2010-09-24 |
US20110030466A1 (en) | 2011-02-10 |
EP2252888A1 (en) | 2010-11-24 |
CN101971022A (en) | 2011-02-09 |
CN101971022B (en) | 2014-01-29 |
AU2009220857A1 (en) | 2009-09-11 |
RU2010140426A (en) | 2012-04-10 |
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