US20130075059A1 - Apparatus for controlling a temperature of a loading chuck and methods of operating the same - Google Patents
Apparatus for controlling a temperature of a loading chuck and methods of operating the same Download PDFInfo
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- US20130075059A1 US20130075059A1 US13/591,253 US201213591253A US2013075059A1 US 20130075059 A1 US20130075059 A1 US 20130075059A1 US 201213591253 A US201213591253 A US 201213591253A US 2013075059 A1 US2013075059 A1 US 2013075059A1
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- Prior art keywords
- refrigerant
- temperature
- tank
- passageway
- line
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D17/00—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces
- F25D17/02—Arrangements for circulating cooling fluids; Arrangements for circulating gas, e.g. air, within refrigerated spaces for circulating liquids, e.g. brine
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D2400/00—General features of, or devices for refrigerators, cold rooms, ice-boxes, or for cooling or freezing apparatus not covered by any other subclass
- F25D2400/02—Refrigerators including a heater
Definitions
- the present inventive concept relates to an apparatus for controlling a temperature of a loading chuck and a method of controlling a temperature of a loading chuck. More particularly, example embodiments relate to an apparatus for controlling a temperature of a loading chuck for a semiconductor substrate and a method of controlling a temperature of a loading chuck.
- a temperature of the loading chuck may be controlled. After the temperature of the loading chuck reaches a set temperature, it may be required to maintain the set temperature of the loading chuck. Thus, an apparatus for controlling the temperature of the loading chuck may be required.
- the apparatus includes a first and second refrigerant tank and at least one switching valve.
- Thea first refrigerant tank is selectively coupled to a refrigerant passageway in thermal communication with the loading chuck.
- the first refrigerant tank includes a first refrigerant maintained at a first temperature.
- the second refrigerant tank is selectively coupled to the refrigerant passageway.
- the second refrigerant tank includes a second refrigerant maintained at a second temperature that is higher than the first temperature.
- the at least one switching valve selectively couples the first regrigerant tank or the second refrigerant tank to the refrigerant passageway responsive to selection of a set temperature for the loading chuck.
- the at least one switching valve is configured to selectively couple the second refrigerant tank to the refrigerant passageway responsive to selection of a first temperature of the loading chuck and to selectively couple the first refrigerant tank to the refrigerant passageway responsive to selection of a second temperature of the loading chuck, wherein the second temperature is lower than the first temperature.
- the first refrigerant and the second refrigerant may be a substantially same material.
- the first temperature may be between about ⁇ 80° and about 0° C. and the second temperature may be between about 20° C. and about 80° C.
- the apparatus further includes at least one heater coupled between the second refrigerant tank and the refrigerant passageway that maintains the second refrigerant at the second temperature and a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature.
- the at least one heater may include a first heat exchanger that heats the second refrigerant when the second refrigerant is returned from the refrigerant passageway to the second refrigerant tank and a second heat exchanger that heats the second refrigerant when the second refrigerant is sent to the refrigerant passageway from the second refrigerant tank.
- the apparatus further includes a heating member thermally coupled to the second refrigerant tank that maintains the second refrigerant at the second temperature and a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature.
- the loading chuck may further include a heater that is thermally coupled to the loading chuck. The heater is positioned proximate the refrigerant passageway and the heater is activated to raise the loading chuck from the second temperature to the first temperature of the loading chuck.
- the apparatus further includes an auxiliary refrigerant tank coupled to the first refrigerant tank and the second refrigerant tank.
- the auxiliary refrigerant tank includes an auxiliary refrigerant to be supplied to the first or second refrigerant tanks to maintain a desired level of refrigerant in the first and second refrigerant tanks.
- a method of controlling a temperature of a loading chuck includes circulating a first refrigerant at a first temperature through a refrigerant passageway of the loading chuck to cool the loading chuck to a first selected temperature.
- a second refrigerant at a second temperature is circulated through the refrigerant passageway of the loading chuck while heating the loading chuck with a heater thermally coupled thereto to heat the loading chuck to a second selected temperature higher than the first selected temperature.
- the second temperature is greater than the first temperature and the first refrigerant is from a first refrigerant tank and the second refrigerant is from a second refrigerant tank, different from the first refrigerant tank.
- FIGS. 1 to 9 represent non-limiting, example embodiments as described herein.
- FIG. 1 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with example embodiments
- FIG. 2 is a perspective view illustrating the loading chuck and a first temperature controller of the apparatus of FIG. 1 ;
- FIG. 3 is a perspective view illustrating a refrigerant passageway in a low temperature plate of the apparatus of FIG. 1 ;
- FIG. 4 is a flow chart illustrating a method of controlling a temperature of a loading chuck using the apparatus of FIG. 1 ;
- FIG. 5A is a block diagram illustrating flows of refrigerants when a chuck plate has a low temperature according to some embodiments
- FIG. 5B is a block diagram illustrating flows of refrigerants when a chuck plate is changed from a low temperature to a high temperature according to some embodiments;
- FIG. 6 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with some embodiments
- FIG. 7 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments.
- FIG. 8 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments.
- FIG. 9 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments.
- first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present inventive concept.
- spatially relative terms such as “beneath”, “below”, “lower”, “above”, “upper”, and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, the exemplary term “below” can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
- Embodiments are described herein with reference to cross-section illustrations that are schematic illustrations of idealized embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, these embodiments should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and/or a gradient of implant concentration at its edges rather than a binary change from implanted to non-implanted region. Likewise, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation takes place. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present inventive concept.
- FIG. 1 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with example embodiments.
- FIG. 2 is a perspective view illustrating the loading chuck and a first temperature controller of the apparatus of FIG. 1 .
- FIG. 3 is a perspective view illustrating a refrigerant passageway in a low temperature plate of the apparatus of FIG. 1 .
- the apparatus of these example embodiments may control the temperature of the loading chuck to maintain a set temperature of a semiconductor substrate on the loading chuck.
- the loading chuck may be referred to as a chuck plate.
- the apparatus may include a first temperature controlling member (controller) 60 and a second temperature controlling member (controller) 62 .
- the first temperature controlling member 60 may be attached to a lower surface of the chuck plate 10 .
- the second temperature controlling member 62 may be connected to the first temperature controlling member 60 .
- the first temperature controlling member 60 attached to the chuck plate 10 may control the temperature of the chuck plate 10 . Because the first temperature controlling member 60 may be combined with the chuck plate 10 , the first temperature controlling member 60 may correspond to a part of one loading chuck unit.
- the second temperature controlling member 62 may be connected to the first temperature controlling member 60 on the lower surface of the chuck plate 10 .
- the second temperature controlling member 62 may correspond to a chiller for decreasing the temperature of the chuck plate 10 .
- the first temperature controlling member 60 may include a low temperature plate 12 and a high temperature plate 18 , which may both be circular.
- the low temperature plate 12 may be stacked on the high temperature plate 18 . That is, the low temperature plate 12 may be positioned under the chuck plate 10 and the high temperature plate 18 may be positioned under the low temperature plate 12 as illustrated in FIG. 2 .
- the high temperature plate 18 may be stacked on the low temperature plate 12 (i.e., the high temperature plate 18 may be between the chuck plate 10 and the low temperature plate 12 ).
- a refrigerant passageway 14 may be formed in the low temperature plate 12 as shown in FIG. 3 .
- a refrigerant may flow through the refrigerant passageway 14 to decrease the temperature of the chuck plate 10 , thereby maintaining the low temperature of the chuck plate 10 .
- the refrigerant passageway 14 may be uniformly arranged throughout the low temperature plate 12 .
- the refrigerant passageway 14 may have an inlet 16 a and outlet 16 b formed at sides of the low temperature plate 12 .
- a circular heater 19 may be formed in the high temperature plate 18 as shown in FIG. 1 .
- the heater 19 may heat the chuck plate 10 to increase the temperature of the chuck plate 10 , thereby maintaining the high temperature of the chuck plate 10 .
- the second temperature controlling member 62 may be connected to the low temperature plate 12 to supply and circulate the refrigerant in the low temperature plate 12 .
- the second temperature controlling member 62 may be divided into a first part for supplying a first refrigerant having a lower temperature to the low temperature plate 12 , and a second part for supplying a second refrigerant having a higher temperature to the low temperature plate 12 .
- the references to higher and lower refrigerant temperatures refer to the relative temperature of the first and second refrigerant.
- the second temperature controlling member 62 may supply the first refrigerant to the refrigerant passageway 14 .
- the second temperature controlling member 62 may supply the second refrigerant to the refrigerant passageway 14 .
- the refrigerant passageway 14 may remain filled with the second refrigerant.
- the second temperature controlling member 62 may include a first refrigerant tank 20 , a second refrigerant tank 22 , an auxiliary refrigerant tank 24 , a first heat exchanger 42 , a second heat exchanger 44 , a first refrigerant line 30 , a second refrigerant line 32 , a third refrigerant line 34 , a fourth refrigerant line 36 , a first pump 46 , a second pump 48 , a third pump 52 , a cooling member 50 , a first switching valve 38 and a second switching valve 40 .
- the first refrigerant tank 20 may be filled with the first refrigerant having a first temperature.
- the cooling member 50 may be connected with the first refrigerant tank 20 to maintain the first temperature of the first refrigerant.
- the first temperature of the first refrigerant may be substantially the same as the set temperature of the chuck plate 10 .
- the first refrigerant may include a material maintained as a liquid at a temperature of about ⁇ 80° C.
- the first temperature of the first refrigerant may be about ⁇ 80° C. to about 0° C.
- the first refrigerant line 30 may be connected between the first refrigerant tank 20 and the inlet 16 a of the low temperature plate 12 .
- the first refrigerant may be supplied from the first refrigerant tank 20 to the refrigerant passageway 14 through the first refrigerant line 30 .
- the second refrigerant line 32 may be connected between the first refrigerant tank 20 and the outlet 16 b of the low temperature plate 12 .
- the first refrigerant may be returned from the refrigerant passageway 14 to the first refrigerant tank 20 through the second refrigerant line 32 .
- the first refrigerant may be circulated in the refrigerant passageway 14 .
- the first refrigerant in the first refrigerant tank 20 may be circulated through the refrigerant passageway 14 , the first refrigerant line 30 , and the second refrigerant line 32 to maintain the first temperature of the chuck plate 10 .
- the second refrigerant tank 22 may be filled with the second refrigerant having a second temperature higher than the first temperature.
- the second refrigerant may include a material substantially the same as that of the first refrigerant.
- the second temperature of the second refrigerant may be about 20° C. to about 80° C., which may allow the second refrigerant to be maintained as a liquid.
- a heating member may be provided to the second refrigerant tank 22 to maintain the second temperature of the second refrigerant in the second refrigerant tank 22 .
- the third refrigerant line 34 may be connected between the first refrigerant line 30 and the second refrigerant tank 22 . That is, the third refrigerant line 34 may be branched off from the first refrigerant line 30 .
- the first switching valve 38 may be installed in the branched portion between the first refrigerant line 30 and the third refrigerant line 34 .
- the first switching valve 38 may function to selectively supply any one of the first refrigerant and the second refrigerant to the refrigerant passageway 14 in the low temperature plate 12 .
- the third refrigerant line 34 may be opened by activating the first switching valve 38
- the second refrigerant in the second refrigerant tank 22 may be supplied to the refrigerant passageway 14 through the third refrigerant line 34 and the first refrigerant line 30 .
- the first refrigerant in the first refrigerant tank 20 may not be supplied to the refrigerant passageway 14 .
- the fourth refrigerant line 36 may be connected between the second refrigerant line 32 and the second refrigerant tank 22 . That is, the fourth refrigerant line 36 may be branched off from the second refrigerant line 32 .
- the second switching valve 40 may be installed in the branched portion between the second refrigerant line 32 and the fourth refrigerant line 36 .
- the second switching valve 40 may function to selectively return the first refrigerant or the second refrigerant in the refrigerant passageway 14 to any one of the first refrigerant tank 20 and the second refrigerant tank 22 .
- the fourth refrigerant line 36 may be opened by activating the second switching valve 40 , the second refrigerant in the refrigerant passageway 14 may be returned to the second refrigerant tank 22 through the second refrigerant line 32 and the fourth refrigerant line 36 .
- the first refrigerant or the second refrigerant in the second refrigerant line 32 may not be returned to the first refrigerant tank 20 .
- the first heat exchanger 42 and the second pump 48 may be coupled between the fourth refrigerant line 36 and the second refrigerant line 32 .
- the first heat exchanger 42 may rapidly heat the second refrigerant returned to the fourth refrigerant line 36 to maintain the higher temperature of the second refrigerant.
- the second pump 48 may circulate the second refrigerant.
- the first pump 46 may be installed on the second refrigerant line 32 between the second switching valve 40 and the first refrigerant tank 20 .
- the first pump 46 may circulate the first refrigerant.
- the second refrigerant in the second refrigerant tank 22 may be circulated through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 and the fourth refrigerant line 36 , so that the second refrigerant may be continuously supplied to the refrigerant passageway 14 .
- the second refrigerant may be circulated through the refrigerant passageway 14 in the low temperature plate 14 .
- the heater 19 in the high temperature plate 18 may increase the temperature of the chuck plate 10 .
- the temperature of the chuck plate 10 may be more rapidly increased compared to when the first refrigerant may be circulated through the refrigerant passageway 14 while the heater 19 is increasing the temperature of the chuck plate 10 .
- the second heat exchanger 44 for heating the second refrigerant may be installed at the third refrigerant line 34 .
- the second heat exchanger 44 may re-heat the second refrigerant supplied from the second refrigerant tank 22 .
- the auxiliary refrigerant tank 24 may be connected to the first refrigerant tank 20 and the second refrigerant tank 22 .
- the auxiliary refrigerant tank 24 may be filled with an auxiliary refrigerant having a material substantially the same as that of the first and the second refrigerants.
- the auxiliary refrigerant in the auxiliary refrigerant tank 24 may be supplied to the first refrigerant tank 20 and/or the second refrigerant tank 22 .
- the auxiliary refrigerant in the auxiliary refrigerant tank 24 may have a room temperature.
- a fifth refrigerant line 51 may be connected between the auxiliary refrigerant tank 24 and the first refrigerant tank 20 .
- a third pump 52 and a switching valve may be installed in the fifth refrigerant line 51 .
- a sixth refrigerant line 53 may be connected between the auxiliary refrigerant tank 24 and the second refrigerant tank 22 .
- a switching valve may be installed in the sixth refrigerant line 53 .
- the refrigerant passageway 14 When the refrigerant passageway 14 is filled with a refrigerant having an lower temperature, the refrigerant may hinder heating of the loading chuck using the heater 19 . Thus, a time for providing the loading chuck with a set high temperature may be too long.
- the apparatus may include the two tanks 20 and 22 configured to receive the two refrigerants, respectively, having different temperatures. Therefore, the refrigerants may be selectively supplied to the loading chuck in accordance with the set temperature of the loading chuck. As a result, the second refrigerant may be circulated through the refrigerant passageway 14 of the loading chuck during heating of the loading chuck from the low temperature to the high temperature, so that the time for heating the loading chuck to the set high temperature may be shortened.
- FIG. 4 is a flow chart illustrating a method of controlling a temperature of a loading chuck using the apparatus in FIG. 1 .
- FIG. 5A is a block diagram illustrating flows of refrigerants when a chuck plate has a low temperature.
- FIG. 5B is a block diagram illustrating flows of refrigerants when a chuck plate is changed from a low temperature to a high temperature.
- the first refrigerant may be circulated through the refrigerant passageway 14 of the chuck plate 10 to maintain the first temperature of the loading chuck.
- the first temperature may be no more than about 0° C., for example, about ⁇ 80° C. to about 0° C.
- the first refrigerant from the first refrigerant tank 20 may be supplied to the refrigerant passageway 14 of the low temperature plate 12 through the first refrigerant line 30 (See arrow A).
- the first refrigerant in the refrigerant passageway 14 may be returned to the first refrigerant tank 20 through the second refrigerant line 32 (See arrow A′).
- the first refrigerant may be circulated between the first refrigerant tank 20 and the refrigerant passageway 14 .
- the cooling member 50 may continuously cool the first refrigerant in the first refrigerant tank 20 to maintain the first temperature of the first refrigerant.
- the chuck plate 10 may have the set low temperature thereof maintained by circulating the first refrigerant through the refrigerant passageway 14 in the low temperature plate 12 .
- the heater 19 in the high temperature plate 18 may not be actuated.
- the heater 19 may be actuated. Further, the second refrigerant having the second temperature higher than the first temperature may be circulated through the refrigerant passageway 14 to increase a temperature of the refrigerant in the second passageway 14 coupled to the loading chuck to the second temperature.
- the second refrigerant may include a material substantially the same as that of the first refrigerant.
- the heater 19 may heat the high temperature plate 18 .
- the first switching valve 38 and the second switching valve 40 may be switched to connect the third refrigerant line 34 with the first refrigerant line 30 and the fourth refrigerant line 36 with the second refrigerant line 32 , thereby supplying the second refrigerant to the refrigerant passageway 14 (See arrow B).
- the second refrigerant in the refrigerant passageway 14 may be returned to the second refrigerant tank 22 through the second refrigerant line 32 and the fourth refrigerant line 36 (See arrow B′).
- the second refrigerant may be circulated between the second refrigerant tank 22 and the refrigerant passageway 14 through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 and the fourth refrigerant line 36 .
- the first heat exchanger 42 may rapidly heat the second refrigerant in the fourth refrigerant line 36 returned to the second refrigerant tank 22 .
- the second heat exchanger 44 may rapidly heat the second refrigerant in the third refrigerant line 34 supplied to the refrigerant passageway 14 . Therefore, the second refrigerant may be rapidly heated by the first heat exchanger 42 and the second heat exchanger 44 to still have the second temperature.
- the heating member in the second refrigerant tank 22 may continuously heat the second refrigerant in the second refrigerant tank 22 to maintain the second temperature of the second refrigerant.
- the second refrigerant may be supplied to the refrigerant passageway 14 to allow the temperature of the chuck plate 10 to be more rapidly increased.
- the chuck plate 10 may be provided with the set high temperature in a short time.
- the second refrigerant may serve as to shorten the time for increasing the chuck plate 10 using the heater 19 . That is, the second refrigerant may not be used for directly increasing and maintaining the temperature of the chuck plate 10 .
- the second temperature of the second refrigerant may not be necessarily equal to the set temperature of the chuck plate 10 . That is, it may be merely required that the second temperature of the second refrigerant may be higher than the first temperature of the first refrigerant.
- step ST 114 after maintaining the high temperature of the chuck plate 10 , the second refrigerant may not be circulated.
- the heater 19 may be continuously activated with the refrigerant passageway 14 being filled with the second refrigerant to maintain the second temperature of the chuck plate 10 .
- the chuck plate 10 may be maintained at the high temperature, it may not be required to continuously circulate the second refrigerant through the refrigerant passageway 14 in the low temperature plate 12 , because the high temperature of the chuck plate 10 may be maintained by the heater 19 .
- the second refrigerant may not be circulated through the refrigerant passageway 14
- the refrigerant passageway 14 may be filled with the second refrigerant.
- the second refrigerant when the chuck plate 10 may be over-heated, the second refrigerant may be temporarily circulated through the refrigerant passageway 14 in the low temperature plate 12 to decrease the temperature of the chuck plate 10 .
- the first refrigerant when the chuck plate 10 may be provided with the high temperature and/or maintained at the high temperature, the first refrigerant may not be used. Thus, when the chuck plate 10 may have the high temperature, the cooling member 50 for maintaining the low temperature of the first refrigerant in the first refrigerant tank 20 may not be activated.
- the operation of the heater 19 may be stopped.
- the first refrigerant in the first refrigerant tank 20 may be circulated through the refrigerant passageway 14 in the low temperature plate 12 .
- the time for changing the chuck plate from the low temperature to the high temperature may be shortened. Further, the time for changing the chuck plate from the low temperature to the high temperature may be substantially the same as a time for changing the chuck plate from the high temperature to the low temperature.
- the method of these example embodiments may be effectively used when processes may be performed on the semiconductor substrate on the chuck plate at the high temperature and the low temperature.
- a temperature of the EDS process may be accurately and rapidly controlled by the above-mentioned method.
- the EDS process may include changing the chuck plate between the low temperature and the high temperature.
- the time for changing the temperatures of the chuck plate may be significantly shortened using the method of these example embodiments, so that the EDS process may have a short time.
- FIG. 6 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments.
- the apparatus of these example embodiments may include features substantially the same as those of the apparatus in FIG. 1 except for including only one heat exchanger.
- the same reference numerals may refer to the same elements and any further description with respect to such features may be omitted herein for brevity.
- the apparatus of these example embodiments may include only the first heat exchanger 42 on the fourth refrigerant line 36 .
- the apparatus may not include the second heat exchanger 44 of FIG. 1 .
- the apparatus of FIG. 6 may include the second heat exchanger on the third refrigerant line and may not include the first heat exchanger on the fourth refrigerant line.
- a method of controlling a temperature of a loading chuck may be substantially the same as the method illustrated with reference to FIGS. 4 , 5 A and 5 B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature.
- the heater 19 may be activated to heat the chuck plate 10 .
- the second refrigerant in the second refrigerant tank 22 may be supplied to the refrigerant passageway 14 through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 and the fourth refrigerant line 36 .
- the first heat exchanger 42 may rapidly heat the second refrigerant returned to the second refrigerant tank 22 from the refrigerant passageway 14 to maintain the high temperature of the second refrigerant.
- the heating member in the second refrigerant tank 22 may heat the second refrigerant in the second refrigerant tank 22 to maintain the high temperature of the second refrigerant.
- FIG. 7 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments.
- the apparatus of these embodiments may include features substantially the same as those of the apparatus in FIG. 1 except for not including the heat exchangers.
- the same reference numerals may refer to the same features and any further discussion with respect to these features may be omitted herein for brevity.
- the heating member in the second refrigerant tank 22 may heat the second refrigerant in the second refrigerant tank 22 to maintain the high temperature of the second refrigerant.
- a method of controlling a temperature of a loading chuck is the apparatus of FIG. 7 may be substantially the same as the method illustrated with reference to FIGS. 4 , 5 A and 5 B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature.
- the heater 19 may be activated to heat the chuck plate 10 .
- the second refrigerant in the second refrigerant tank 22 may be supplied to the refrigerant passageway 14 through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 and the fourth refrigerant line 36 .
- the second refrigerant flowing through the first to the fourth refrigerant lines 30 , 32 , 34 and 36 may not be heated.
- the heating member in the second refrigerant tank 22 may heat the second refrigerant in the second refrigerant tank 22 to maintain the high temperature of the second refrigerant.
- the second refrigerant having the high temperature may flow through the first to the fourth refrigerant lines 30 , 32 , 34 and 36 .
- FIG. 8 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments.
- the apparatus of these example embodiments may include features substantially the same as those of the apparatus in FIG. 1 except for not including the heating member.
- the same reference numerals may refer to the same features and any further discussion with respect to these features may be omitted herein for brevity.
- the apparatus of these examples may not include the heating member in the second refrigerant tank 22 in FIG. 1 . Further, the apparatus of these example embodiments may not include the auxiliary refrigerant tank in FIG. 1 .
- the second refrigerant tank 22 may function as the auxiliary refrigerant tank. Particularly, when the first refrigerant in the first refrigerant tank 20 may be exhausted, the second refrigerant in the second refrigerant tank 22 may be supplied to the first refrigerant tank 20 . Thus, the second refrigerant tank 22 may be connected to the first refrigerant tank 20 . Because the second refrigerant tank 22 may not be provided with the heating member, the second refrigerant may have a room temperature.
- a method of controlling a temperature of a loading chuck using the apparatus of FIG. 8 may be substantially the same as the method illustrated with reference to FIGS. 4 , 5 A and 5 B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature.
- the heater 19 may be activated to heat the chuck plate 10 .
- the second refrigerant in the second refrigerant tank 22 may be supplied to the refrigerant passageway 14 through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 and the fourth refrigerant line 36 .
- the first heat exchanger 42 may rapidly heat the second refrigerant returned from the refrigerant passageway 14 to the second refrigerant tank 22 .
- the second heat exchanger 44 may rapidly heat the second refrigerant between the second refrigerant tank 22 and the refrigerant passageway 14 . Therefore, the second refrigerant may be heated by the first heat exchanger 42 and the second heat exchanger 44 to continuously have the high temperature.
- FIG. 9 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments.
- the apparatus of these example embodiments may include features substantially the same as those of the apparatus in FIG. 1 except for not including the heat exchangers.
- the same reference numerals may refer to the same features and any further discussions with respect to the same features may be omitted herein for brevity.
- the apparatus of this example may have a third refrigerant line 34 a and a fourth refrigerant line 36 a .
- the third refrigerant line 34 a and the fourth refrigerant line 36 a may function as a heating line for heating the refrigerants.
- a method of controlling a temperature of a loading chuck using the apparatus of FIG. 9 may be substantially the same as the method illustrated with reference to FIGS. 4 , 5 A and 5 B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature.
- the heater 19 may be activated to heat the chuck plate 10 .
- the second refrigerant in the second refrigerant tank 22 may be supplied to the refrigerant passageway 14 through the first refrigerant line 30 , the second refrigerant line 32 , the third refrigerant line 34 a and the fourth refrigerant line 36 a .
- the second refrigerant supplied from the second refrigerant tank 22 may be heated by the third refrigerant line 34 a .
- the second refrigerant flowing from the second refrigerant tank 22 to the refrigerant passageway 14 may be heated by the fourth refrigerant line 36 a . Therefore, the second refrigerant may be heated by the third refrigerant line 34 a and the fourth refrigerant line 36 a to continuously have the high temperature.
- the apparatus may rapidly change the temperature of the loading chuck.
- a temperature change time of the loading chuck may be significantly reduced.
- a time of a process using the loading chuck may be shortened.
- the apparatus may be applied to equipments including the loading chuck that may be used at the high temperature and the low temperature.
- example embodiments provide an apparatus for controlling a temperature of a loading chuck that may be capable of shortening a temperature change time of the loading chuck.
- Example embodiments also provide a method of controlling a temperature of the above-mentioned loading chuck.
- an apparatus for controlling a temperature of a loading chuck may include a first refrigerant tank, a second refrigerant tank, a first refrigerant line, a second refrigerant line, a third refrigerant line and a fourth refrigerant line.
- a refrigerant passageway may be formed in a chuck plate.
- a heater may be arranged under the chuck plate.
- the first refrigerant tank may store a first refrigerant.
- the second refrigerant tank may store a second refrigerant having a temperature higher than that of the first refrigerant.
- the first refrigerant line may be connected between the first refrigerant tank and the refrigerant passageway to supply the first refrigerant from the first refrigerant tank to the refrigerant passageway.
- the second refrigerant line may be connected between the first refrigerant tank and the refrigerant passageway to return the first refrigerant from the refrigerant passageway to the first refrigerant tank.
- the third refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to supply the second refrigerant from the second refrigerant tank to the refrigerant passageway.
- the fourth refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to return the second refrigerant from the refrigerant passageway to the second refrigerant tank.
- the third refrigerant line may correspond to a line branched off from the first refrigerant line.
- the fourth refrigerant line may correspond to a line branched off from the second refrigerant line.
- a first switching valve may be installed in a branched portion between the first refrigerant line and the third refrigerant line.
- a second switching valve may be installed in a branched portion between the second refrigerant line and the fourth refrigerant line.
- a heat exchanger for rapidly heating the second refrigerant may be arranged at least one of the third refrigerant line and the fourth refrigerant line.
- a heating member for heating the second refrigerant may be installed at the second refrigerant tank.
- the apparatus may further include an auxiliary tank connected with the first refrigerant tank and the second refrigerant tank to provide the first refrigerant tank and the second refrigerant tank with an auxiliary refrigerant.
- the second refrigerant tank may be connected with the first refrigerant tank.
- the second refrigerant tank may be used for an auxiliary tank for replenish the first refrigerant in the first refrigerant tank.
- the apparatus may further include a cooling member connected with the first refrigerant tank to decrease a temperature of the first refrigerant.
- the refrigerant passageway may be arranged over the heater.
- a method of controlling a temperature of a loading chuck In the method of controlling the temperature of the loading chuck, a first refrigerant may be circulated through a refrigerant passageway of the loading chuck to provide the loading chuck with a first temperature.
- the loading chuck may be directly heated and a second refrigerant may also be circulated through the refrigerant passageway to provide the loading chuck with a second temperature higher than the first temperature.
- the loading chuck may be continuously heated and the circulating of the second refrigerant may be stopped to maintain the second temperature of the loading chuck.
- the first refrigerant may be stored in a first refrigerant tank.
- the second refrigerant may be stored in a second refrigerant tank.
- the first refrigerant and the second refrigerant may include substantially the same material.
- continuously supplying the second refrigerant may include heating the second refrigerant to the second temperature.
- the second temperature may be about 20° to about 80°.
- the apparatus may rapidly change the temperature of the loading chuck.
- a temperature change time of the loading chuck may be remarkably reduced.
- a time of a process using the loading chuck may be shortened.
Abstract
An apparatus may include a first refrigerant tank, a second refrigerant tank, and first to fourth refrigerant lines. The first refrigerant tank may store a first refrigerant. The second refrigerant tank may store a second refrigerant. The first refrigerant line may be connected between the first refrigerant tank and a refrigerant passageway of a loading chuck to supply the first refrigerant to the refrigerant passageway. The second refrigerant line may be connected between the first refrigerant tank and the refrigerant passageway to return the first refrigerant to the first refrigerant tank. The third refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to supply the second refrigerant to the refrigerant passageway. The fourth refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to return the second refrigerant to the second refrigerant tank.
Description
- This application claims priority under 35 USC §119 to Korean Patent Application No. 10-2011-0095515, filed on Sep. 22, 2011 in the Korean Intellectual Property Office (KIPO), the contents of which are herein incorporated by reference in their entirety.
- The present inventive concept relates to an apparatus for controlling a temperature of a loading chuck and a method of controlling a temperature of a loading chuck. More particularly, example embodiments relate to an apparatus for controlling a temperature of a loading chuck for a semiconductor substrate and a method of controlling a temperature of a loading chuck.
- In order to provide a semiconductor substrate on a loading chuck with a set temperature, a temperature of the loading chuck may be controlled. After the temperature of the loading chuck reaches a set temperature, it may be required to maintain the set temperature of the loading chuck. Thus, an apparatus for controlling the temperature of the loading chuck may be required.
- Some embodiments provide an apparatus for controlling the temperature of a loading chuck. The apparatus includes a first and second refrigerant tank and at least one switching valve. Thea first refrigerant tank is selectively coupled to a refrigerant passageway in thermal communication with the loading chuck. The first refrigerant tank includes a first refrigerant maintained at a first temperature. The second refrigerant tank is selectively coupled to the refrigerant passageway. The second refrigerant tank includes a second refrigerant maintained at a second temperature that is higher than the first temperature. The at least one switching valve selectively couples the first regrigerant tank or the second refrigerant tank to the refrigerant passageway responsive to selection of a set temperature for the loading chuck.
- In other embodiments, the at least one switching valve is configured to selectively couple the second refrigerant tank to the refrigerant passageway responsive to selection of a first temperature of the loading chuck and to selectively couple the first refrigerant tank to the refrigerant passageway responsive to selection of a second temperature of the loading chuck, wherein the second temperature is lower than the first temperature. The first refrigerant and the second refrigerant may be a substantially same material. The first temperature may be between about −80° and about 0° C. and the second temperature may be between about 20° C. and about 80° C.
- In further embodiments,the apparatus further includes at least one heater coupled between the second refrigerant tank and the refrigerant passageway that maintains the second refrigerant at the second temperature and a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature. The at least one heater may include a first heat exchanger that heats the second refrigerant when the second refrigerant is returned from the refrigerant passageway to the second refrigerant tank and a second heat exchanger that heats the second refrigerant when the second refrigerant is sent to the refrigerant passageway from the second refrigerant tank.
- In other embodiments, the apparatus further includes a heating member thermally coupled to the second refrigerant tank that maintains the second refrigerant at the second temperature and a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature. The loading chuck may further include a heater that is thermally coupled to the loading chuck. The heater is positioned proximate the refrigerant passageway and the heater is activated to raise the loading chuck from the second temperature to the first temperature of the loading chuck.
- In further embodiments, the apparatus further includes an auxiliary refrigerant tank coupled to the first refrigerant tank and the second refrigerant tank. The auxiliary refrigerant tank includes an auxiliary refrigerant to be supplied to the first or second refrigerant tanks to maintain a desired level of refrigerant in the first and second refrigerant tanks.
- In yet other embodiments, a method of controlling a temperature of a loading chuck includes circulating a first refrigerant at a first temperature through a refrigerant passageway of the loading chuck to cool the loading chuck to a first selected temperature. A second refrigerant at a second temperature is circulated through the refrigerant passageway of the loading chuck while heating the loading chuck with a heater thermally coupled thereto to heat the loading chuck to a second selected temperature higher than the first selected temperature. The second temperature is greater than the first temperature and the first refrigerant is from a first refrigerant tank and the second refrigerant is from a second refrigerant tank, different from the first refrigerant tank.
- Example embodiments will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings.
FIGS. 1 to 9 represent non-limiting, example embodiments as described herein. -
FIG. 1 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with example embodiments; -
FIG. 2 is a perspective view illustrating the loading chuck and a first temperature controller of the apparatus ofFIG. 1 ; -
FIG. 3 is a perspective view illustrating a refrigerant passageway in a low temperature plate of the apparatus ofFIG. 1 ; -
FIG. 4 is a flow chart illustrating a method of controlling a temperature of a loading chuck using the apparatus ofFIG. 1 ; -
FIG. 5A is a block diagram illustrating flows of refrigerants when a chuck plate has a low temperature according to some embodiments; -
FIG. 5B is a block diagram illustrating flows of refrigerants when a chuck plate is changed from a low temperature to a high temperature according to some embodiments; -
FIG. 6 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with some embodiments; -
FIG. 7 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments; -
FIG. 8 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments; and -
FIG. 9 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments. - Advantages and features of the present inventive concept and methods of accomplishing the same may be understood more readily by reference to the following detailed description of preferred embodiments and the accompanying drawings. The present inventive concept may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present inventive concept will only be defined by the appended claims. Like reference numerals refer to like elements throughout the specification.
- The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the singular forms “a”, “an” and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms “comprises” and/or “comprising,” when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof.
- It will be understood that when an element or layer is referred to as being “on”, “connected to” or “coupled to” another element or layer, it can be directly on, connected or coupled to the other element or layer or intervening elements or layers may be present. In contrast, when an element is referred to as being “directly on”, “directly connected to” or “directly coupled to” another element or layer, there are no intervening elements or layers present. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms are only used to distinguish one element, component, region, layer or section from another region, layer or section. Thus, a first element, component, region, layer or section discussed below could be termed a second element, component, region, layer or section without departing from the teachings of the present inventive concept.
- Spatially relative terms, such as “beneath”, “below”, “lower”, “above”, “upper”, and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as “below” or “beneath” other elements or features would then be oriented “above” the other elements or features. Thus, the exemplary term “below” can encompass both an orientation of above and below. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
- Embodiments are described herein with reference to cross-section illustrations that are schematic illustrations of idealized embodiments (and intermediate structures). As such, variations from the shapes of the illustrations as a result, for example, of manufacturing techniques and/or tolerances, are to be expected. Thus, these embodiments should not be construed as limited to the particular shapes of regions illustrated herein but are to include deviations in shapes that result, for example, from manufacturing. For example, an implanted region illustrated as a rectangle will, typically, have rounded or curved features and/or a gradient of implant concentration at its edges rather than a binary change from implanted to non-implanted region. Likewise, a buried region formed by implantation may result in some implantation in the region between the buried region and the surface through which the implantation takes place. Thus, the regions illustrated in the figures are schematic in nature and their shapes are not intended to illustrate the actual shape of a region of a device and are not intended to limit the scope of the present inventive concept.
- Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which the present inventive concept belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and this specification and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
- Hereinafter, example embodiments will be explained in detail with reference to the accompanying drawings.
-
FIG. 1 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with example embodiments.FIG. 2 is a perspective view illustrating the loading chuck and a first temperature controller of the apparatus ofFIG. 1 .FIG. 3 is a perspective view illustrating a refrigerant passageway in a low temperature plate of the apparatus ofFIG. 1 . - The apparatus of these example embodiments may control the temperature of the loading chuck to maintain a set temperature of a semiconductor substrate on the loading chuck. Hereinafter, the loading chuck may be referred to as a chuck plate.
- Referring to
FIGS. 1 and 2 , the apparatus may include a first temperature controlling member (controller) 60 and a second temperature controlling member (controller) 62. The firsttemperature controlling member 60 may be attached to a lower surface of thechuck plate 10. The secondtemperature controlling member 62 may be connected to the firsttemperature controlling member 60. - In example embodiments, the first
temperature controlling member 60 attached to thechuck plate 10 may control the temperature of thechuck plate 10. Because the firsttemperature controlling member 60 may be combined with thechuck plate 10, the firsttemperature controlling member 60 may correspond to a part of one loading chuck unit. - The second
temperature controlling member 62 may be connected to the firsttemperature controlling member 60 on the lower surface of thechuck plate 10. The secondtemperature controlling member 62 may correspond to a chiller for decreasing the temperature of thechuck plate 10. - The first
temperature controlling member 60 may include alow temperature plate 12 and ahigh temperature plate 18, which may both be circular. In example embodiments, thelow temperature plate 12 may be stacked on thehigh temperature plate 18. That is, thelow temperature plate 12 may be positioned under thechuck plate 10 and thehigh temperature plate 18 may be positioned under thelow temperature plate 12 as illustrated inFIG. 2 . In other embodiments, thehigh temperature plate 18 may be stacked on the low temperature plate 12 (i.e., thehigh temperature plate 18 may be between thechuck plate 10 and the low temperature plate 12). - A
refrigerant passageway 14 may be formed in thelow temperature plate 12 as shown inFIG. 3 . A refrigerant may flow through therefrigerant passageway 14 to decrease the temperature of thechuck plate 10, thereby maintaining the low temperature of thechuck plate 10. Thus, as shown inFIG. 3 , in order to provide entire regions of thechuck plate 10 with a uniform temperature, therefrigerant passageway 14 may be uniformly arranged throughout thelow temperature plate 12. Therefrigerant passageway 14 may have aninlet 16 a andoutlet 16 b formed at sides of thelow temperature plate 12. - A
circular heater 19 may be formed in thehigh temperature plate 18 as shown inFIG. 1 . Theheater 19 may heat thechuck plate 10 to increase the temperature of thechuck plate 10, thereby maintaining the high temperature of thechuck plate 10. - The second
temperature controlling member 62 may be connected to thelow temperature plate 12 to supply and circulate the refrigerant in thelow temperature plate 12. In example embodiments, the secondtemperature controlling member 62 may be divided into a first part for supplying a first refrigerant having a lower temperature to thelow temperature plate 12, and a second part for supplying a second refrigerant having a higher temperature to thelow temperature plate 12. As used herein, the references to higher and lower refrigerant temperatures refer to the relative temperature of the first and second refrigerant. - In example embodiments, when it may be required to maintain the low temperature of the chuck plate 10 (i.e., to cool the plate 10), the second
temperature controlling member 62 may supply the first refrigerant to therefrigerant passageway 14. When it may be required to change thechuck plate 10 from the low temperature to the high temperature (i.e. to heat thechuck plate 10 with the high temperature plate 19), the secondtemperature controlling member 62 may supply the second refrigerant to therefrigerant passageway 14. When it may be required to maintain the high temperature of thechuck plate 10, therefrigerant passageway 14 may remain filled with the second refrigerant. - In example embodiments as illustrated in
FIG. 1 , the secondtemperature controlling member 62 may include afirst refrigerant tank 20, asecond refrigerant tank 22, anauxiliary refrigerant tank 24, afirst heat exchanger 42, asecond heat exchanger 44, a firstrefrigerant line 30, a secondrefrigerant line 32, a thirdrefrigerant line 34, a fourthrefrigerant line 36, afirst pump 46, asecond pump 48, athird pump 52, a coolingmember 50, afirst switching valve 38 and asecond switching valve 40. - The
first refrigerant tank 20 may be filled with the first refrigerant having a first temperature. The coolingmember 50 may be connected with thefirst refrigerant tank 20 to maintain the first temperature of the first refrigerant. In example embodiments, the first temperature of the first refrigerant may be substantially the same as the set temperature of thechuck plate 10. The first refrigerant may include a material maintained as a liquid at a temperature of about −80° C. The first temperature of the first refrigerant may be about −80° C. to about 0° C. - The first
refrigerant line 30 may be connected between thefirst refrigerant tank 20 and theinlet 16 a of thelow temperature plate 12. The first refrigerant may be supplied from thefirst refrigerant tank 20 to therefrigerant passageway 14 through the firstrefrigerant line 30. - The second
refrigerant line 32 may be connected between thefirst refrigerant tank 20 and theoutlet 16 b of thelow temperature plate 12. The first refrigerant may be returned from therefrigerant passageway 14 to thefirst refrigerant tank 20 through the secondrefrigerant line 32. Thus, the first refrigerant may be circulated in therefrigerant passageway 14. - The first refrigerant in the
first refrigerant tank 20 may be circulated through therefrigerant passageway 14, the firstrefrigerant line 30, and the secondrefrigerant line 32 to maintain the first temperature of thechuck plate 10. - The
second refrigerant tank 22 may be filled with the second refrigerant having a second temperature higher than the first temperature. In example embodiments, the second refrigerant may include a material substantially the same as that of the first refrigerant. The second temperature of the second refrigerant may be about 20° C. to about 80° C., which may allow the second refrigerant to be maintained as a liquid. - In example embodiments, a heating member may be provided to the
second refrigerant tank 22 to maintain the second temperature of the second refrigerant in thesecond refrigerant tank 22. - The third
refrigerant line 34 may be connected between the firstrefrigerant line 30 and thesecond refrigerant tank 22. That is, the thirdrefrigerant line 34 may be branched off from the firstrefrigerant line 30. - The
first switching valve 38 may be installed in the branched portion between the firstrefrigerant line 30 and the thirdrefrigerant line 34. Thefirst switching valve 38 may function to selectively supply any one of the first refrigerant and the second refrigerant to therefrigerant passageway 14 in thelow temperature plate 12. - When the third
refrigerant line 34 may be opened by activating thefirst switching valve 38, the second refrigerant in thesecond refrigerant tank 22 may be supplied to therefrigerant passageway 14 through the thirdrefrigerant line 34 and the firstrefrigerant line 30. In such a case, the first refrigerant in thefirst refrigerant tank 20 may not be supplied to therefrigerant passageway 14. - The fourth
refrigerant line 36 may be connected between the secondrefrigerant line 32 and thesecond refrigerant tank 22. That is, the fourthrefrigerant line 36 may be branched off from the secondrefrigerant line 32. - The
second switching valve 40 may be installed in the branched portion between the secondrefrigerant line 32 and the fourthrefrigerant line 36. Thesecond switching valve 40 may function to selectively return the first refrigerant or the second refrigerant in therefrigerant passageway 14 to any one of thefirst refrigerant tank 20 and thesecond refrigerant tank 22. - When the fourth
refrigerant line 36 may be opened by activating thesecond switching valve 40, the second refrigerant in therefrigerant passageway 14 may be returned to thesecond refrigerant tank 22 through the secondrefrigerant line 32 and the fourthrefrigerant line 36. In such a case, the first refrigerant or the second refrigerant in the secondrefrigerant line 32 may not be returned to thefirst refrigerant tank 20. - The
first heat exchanger 42 and thesecond pump 48 may be coupled between the fourthrefrigerant line 36 and the secondrefrigerant line 32. Thefirst heat exchanger 42 may rapidly heat the second refrigerant returned to the fourthrefrigerant line 36 to maintain the higher temperature of the second refrigerant. Thesecond pump 48 may circulate the second refrigerant. - The
first pump 46 may be installed on the secondrefrigerant line 32 between thesecond switching valve 40 and thefirst refrigerant tank 20. Thefirst pump 46 may circulate the first refrigerant. - In example embodiments, the second refrigerant in the
second refrigerant tank 22 may be circulated through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 and the fourthrefrigerant line 36, so that the second refrigerant may be continuously supplied to therefrigerant passageway 14. Thus, when thechuck plate 10 may be changed from the low temperature to the high temperature, the second refrigerant may be circulated through therefrigerant passageway 14 in thelow temperature plate 14. Theheater 19 in thehigh temperature plate 18 may increase the temperature of thechuck plate 10. As a result, the temperature of thechuck plate 10 may be more rapidly increased compared to when the first refrigerant may be circulated through therefrigerant passageway 14 while theheater 19 is increasing the temperature of thechuck plate 10. - The
second heat exchanger 44 for heating the second refrigerant may be installed at the thirdrefrigerant line 34. Thesecond heat exchanger 44 may re-heat the second refrigerant supplied from thesecond refrigerant tank 22. - The
auxiliary refrigerant tank 24 may be connected to thefirst refrigerant tank 20 and thesecond refrigerant tank 22. Theauxiliary refrigerant tank 24 may be filled with an auxiliary refrigerant having a material substantially the same as that of the first and the second refrigerants. When the first refrigerant in thefirst refrigerant tank 20 and/or the second refrigerant in thesecond refrigerant tank 22 may be exhausted, the auxiliary refrigerant in theauxiliary refrigerant tank 24 may be supplied to thefirst refrigerant tank 20 and/or thesecond refrigerant tank 22. In example embodiments, the auxiliary refrigerant in theauxiliary refrigerant tank 24 may have a room temperature. - A fifth
refrigerant line 51 may be connected between theauxiliary refrigerant tank 24 and thefirst refrigerant tank 20. Athird pump 52 and a switching valve may be installed in the fifthrefrigerant line 51. A sixthrefrigerant line 53 may be connected between theauxiliary refrigerant tank 24 and thesecond refrigerant tank 22. A switching valve may be installed in the sixthrefrigerant line 53. - When the
refrigerant passageway 14 is filled with a refrigerant having an lower temperature, the refrigerant may hinder heating of the loading chuck using theheater 19. Thus, a time for providing the loading chuck with a set high temperature may be too long. - In contrast, according to these example embodiments, the apparatus may include the two
tanks refrigerant passageway 14 of the loading chuck during heating of the loading chuck from the low temperature to the high temperature, so that the time for heating the loading chuck to the set high temperature may be shortened. -
FIG. 4 is a flow chart illustrating a method of controlling a temperature of a loading chuck using the apparatus inFIG. 1 .FIG. 5A is a block diagram illustrating flows of refrigerants when a chuck plate has a low temperature.FIG. 5B is a block diagram illustrating flows of refrigerants when a chuck plate is changed from a low temperature to a high temperature. - Referring to
FIG. 4 , the first refrigerant may be circulated through therefrigerant passageway 14 of thechuck plate 10 to maintain the first temperature of the loading chuck. In example embodiments, the first temperature may be no more than about 0° C., for example, about −80° C. to about 0° C. - Referring to
FIG. 5A , the first refrigerant from thefirst refrigerant tank 20 may be supplied to therefrigerant passageway 14 of thelow temperature plate 12 through the first refrigerant line 30 (See arrow A). The first refrigerant in therefrigerant passageway 14 may be returned to thefirst refrigerant tank 20 through the second refrigerant line 32 (See arrow A′). Thus, the first refrigerant may be circulated between thefirst refrigerant tank 20 and therefrigerant passageway 14. The coolingmember 50 may continuously cool the first refrigerant in thefirst refrigerant tank 20 to maintain the first temperature of the first refrigerant. - As a result, the
chuck plate 10 may have the set low temperature thereof maintained by circulating the first refrigerant through therefrigerant passageway 14 in thelow temperature plate 12. In example embodiments, when thechuck plate 10 may have the low temperature, theheater 19 in thehigh temperature plate 18 may not be actuated. - Referring again to
FIG. 4 , in step ST112, theheater 19 may be actuated. Further, the second refrigerant having the second temperature higher than the first temperature may be circulated through therefrigerant passageway 14 to increase a temperature of the refrigerant in thesecond passageway 14 coupled to the loading chuck to the second temperature. In example embodiments, the second refrigerant may include a material substantially the same as that of the first refrigerant. - Referring to
FIG. 5B , theheater 19 may heat thehigh temperature plate 18. Thefirst switching valve 38 and thesecond switching valve 40 may be switched to connect the thirdrefrigerant line 34 with the firstrefrigerant line 30 and the fourthrefrigerant line 36 with the secondrefrigerant line 32, thereby supplying the second refrigerant to the refrigerant passageway 14 (See arrow B). The second refrigerant in therefrigerant passageway 14 may be returned to thesecond refrigerant tank 22 through the secondrefrigerant line 32 and the fourth refrigerant line 36 (See arrow B′). - In example embodiments, the second refrigerant may be circulated between the
second refrigerant tank 22 and therefrigerant passageway 14 through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 and the fourthrefrigerant line 36. Thefirst heat exchanger 42 may rapidly heat the second refrigerant in the fourthrefrigerant line 36 returned to thesecond refrigerant tank 22. Further, thesecond heat exchanger 44 may rapidly heat the second refrigerant in the thirdrefrigerant line 34 supplied to therefrigerant passageway 14. Therefore, the second refrigerant may be rapidly heated by thefirst heat exchanger 42 and thesecond heat exchanger 44 to still have the second temperature. Further, the heating member in thesecond refrigerant tank 22 may continuously heat the second refrigerant in thesecond refrigerant tank 22 to maintain the second temperature of the second refrigerant. - Therefore, in order to change the
chuck plate 10 from the low temperature to the high temperature, the second refrigerant may be supplied to therefrigerant passageway 14 to allow the temperature of thechuck plate 10 to be more rapidly increased. As a result, thechuck plate 10 may be provided with the set high temperature in a short time. - In example embodiments, the second refrigerant may serve as to shorten the time for increasing the
chuck plate 10 using theheater 19. That is, the second refrigerant may not be used for directly increasing and maintaining the temperature of thechuck plate 10. Thus, the second temperature of the second refrigerant may not be necessarily equal to the set temperature of thechuck plate 10. That is, it may be merely required that the second temperature of the second refrigerant may be higher than the first temperature of the first refrigerant. - Referring again to
FIG. 4 , in step ST114, after maintaining the high temperature of thechuck plate 10, the second refrigerant may not be circulated. Theheater 19 may be continuously activated with therefrigerant passageway 14 being filled with the second refrigerant to maintain the second temperature of thechuck plate 10. - In example embodiments, after the
chuck plate 10 may be maintained at the high temperature, it may not be required to continuously circulate the second refrigerant through therefrigerant passageway 14 in thelow temperature plate 12, because the high temperature of thechuck plate 10 may be maintained by theheater 19. Although the second refrigerant may not be circulated through therefrigerant passageway 14, therefrigerant passageway 14 may be filled with the second refrigerant. - In example embodiments, when the
chuck plate 10 may be over-heated, the second refrigerant may be temporarily circulated through therefrigerant passageway 14 in thelow temperature plate 12 to decrease the temperature of thechuck plate 10. - As mentioned above, when the
chuck plate 10 may be provided with the high temperature and/or maintained at the high temperature, the first refrigerant may not be used. Thus, when thechuck plate 10 may have the high temperature, the coolingmember 50 for maintaining the low temperature of the first refrigerant in thefirst refrigerant tank 20 may not be activated. - In contrast, in order to change the
chuck plate 10 from the high temperature to the low temperature, the operation of theheater 19 may be stopped. The first refrigerant in thefirst refrigerant tank 20 may be circulated through therefrigerant passageway 14 in thelow temperature plate 12. - According to these example embodiments, the time for changing the chuck plate from the low temperature to the high temperature may be shortened. Further, the time for changing the chuck plate from the low temperature to the high temperature may be substantially the same as a time for changing the chuck plate from the high temperature to the low temperature.
- The method of these example embodiments may be effectively used when processes may be performed on the semiconductor substrate on the chuck plate at the high temperature and the low temperature. For example, in an electrical die sorting (EDS) process for testing chips of the semiconductor substrate on the chuck plate, a temperature of the EDS process may be accurately and rapidly controlled by the above-mentioned method. Particularly, because the EDS process may be performed at the low temperature and the high temperature, the EDS process may include changing the chuck plate between the low temperature and the high temperature. The time for changing the temperatures of the chuck plate may be significantly shortened using the method of these example embodiments, so that the EDS process may have a short time.
-
FIG. 6 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments. - The apparatus of these example embodiments may include features substantially the same as those of the apparatus in
FIG. 1 except for including only one heat exchanger. Thus, the same reference numerals may refer to the same elements and any further description with respect to such features may be omitted herein for brevity. - Referring to
FIG. 6 , the apparatus of these example embodiments may include only thefirst heat exchanger 42 on the fourthrefrigerant line 36. The apparatus may not include thesecond heat exchanger 44 ofFIG. 1 . - In some embodiments, the apparatus of
FIG. 6 may include the second heat exchanger on the third refrigerant line and may not include the first heat exchanger on the fourth refrigerant line. - In example embodiments using the apparatus of
FIG. 6 , a method of controlling a temperature of a loading chuck may be substantially the same as the method illustrated with reference toFIGS. 4 , 5A and 5B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature. - When the loading chuck may be changed from the low temperature to the high temperature, the
heater 19 may be activated to heat thechuck plate 10. The second refrigerant in thesecond refrigerant tank 22 may be supplied to therefrigerant passageway 14 through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 and the fourthrefrigerant line 36. Thefirst heat exchanger 42 may rapidly heat the second refrigerant returned to thesecond refrigerant tank 22 from therefrigerant passageway 14 to maintain the high temperature of the second refrigerant. Further, the heating member in thesecond refrigerant tank 22 may heat the second refrigerant in thesecond refrigerant tank 22 to maintain the high temperature of the second refrigerant. -
FIG. 7 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments. - The apparatus of these embodiments may include features substantially the same as those of the apparatus in
FIG. 1 except for not including the heat exchangers. Thus, the same reference numerals may refer to the same features and any further discussion with respect to these features may be omitted herein for brevity. - Referring to
FIG. 7 , the heating member in thesecond refrigerant tank 22 may heat the second refrigerant in thesecond refrigerant tank 22 to maintain the high temperature of the second refrigerant. - In example embodiments, a method of controlling a temperature of a loading chuck is the apparatus of
FIG. 7 may be substantially the same as the method illustrated with reference toFIGS. 4 , 5A and 5B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature. - When the loading chuck may be changed from the low temperature to the high temperature, the
heater 19 may be activated to heat thechuck plate 10. The second refrigerant in thesecond refrigerant tank 22 may be supplied to therefrigerant passageway 14 through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 and the fourthrefrigerant line 36. The second refrigerant flowing through the first to the fourthrefrigerant lines second refrigerant tank 22 may heat the second refrigerant in thesecond refrigerant tank 22 to maintain the high temperature of the second refrigerant. The second refrigerant having the high temperature may flow through the first to the fourthrefrigerant lines -
FIG. 8 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with other embodiments. - The apparatus of these example embodiments may include features substantially the same as those of the apparatus in
FIG. 1 except for not including the heating member. Thus, the same reference numerals may refer to the same features and any further discussion with respect to these features may be omitted herein for brevity. - Referring to
FIG. 8 , the apparatus of these examples may not include the heating member in thesecond refrigerant tank 22 inFIG. 1 . Further, the apparatus of these example embodiments may not include the auxiliary refrigerant tank inFIG. 1 . Thesecond refrigerant tank 22 may function as the auxiliary refrigerant tank. Particularly, when the first refrigerant in thefirst refrigerant tank 20 may be exhausted, the second refrigerant in thesecond refrigerant tank 22 may be supplied to thefirst refrigerant tank 20. Thus, thesecond refrigerant tank 22 may be connected to thefirst refrigerant tank 20. Because thesecond refrigerant tank 22 may not be provided with the heating member, the second refrigerant may have a room temperature. - In example embodiments, a method of controlling a temperature of a loading chuck using the apparatus of
FIG. 8 may be substantially the same as the method illustrated with reference toFIGS. 4 , 5A and 5B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature. - When the loading chuck may be changed from the low temperature to the high temperature, the
heater 19 may be activated to heat thechuck plate 10. The second refrigerant in thesecond refrigerant tank 22 may be supplied to therefrigerant passageway 14 through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 and the fourthrefrigerant line 36. In example embodiments, although the second refrigerant having the room temperature may flow from thesecond refrigerant tank 22 to the thirdrefrigerant line 34, thefirst heat exchanger 42 may rapidly heat the second refrigerant returned from therefrigerant passageway 14 to thesecond refrigerant tank 22. Further, thesecond heat exchanger 44 may rapidly heat the second refrigerant between thesecond refrigerant tank 22 and therefrigerant passageway 14. Therefore, the second refrigerant may be heated by thefirst heat exchanger 42 and thesecond heat exchanger 44 to continuously have the high temperature. -
FIG. 9 is a block diagram illustrating an apparatus for controlling a temperature of a loading chuck in accordance with further embodiments. - The apparatus of these example embodiments may include features substantially the same as those of the apparatus in
FIG. 1 except for not including the heat exchangers. Thus, the same reference numerals may refer to the same features and any further discussions with respect to the same features may be omitted herein for brevity. - Referring to
FIG. 9 , the apparatus of this example may have a thirdrefrigerant line 34 a and a fourthrefrigerant line 36 a. The thirdrefrigerant line 34 a and the fourthrefrigerant line 36 a may function as a heating line for heating the refrigerants. - In example embodiments, a method of controlling a temperature of a loading chuck using the apparatus of
FIG. 9 may be substantially the same as the method illustrated with reference toFIGS. 4 , 5A and 5B except for heating and circulating the second refrigerant when the loading chuck may be changed from the low temperature to the high temperature. - When the loading chuck may be changed from the low temperature to the high temperature, the
heater 19 may be activated to heat thechuck plate 10. The second refrigerant in thesecond refrigerant tank 22 may be supplied to therefrigerant passageway 14 through the firstrefrigerant line 30, the secondrefrigerant line 32, the thirdrefrigerant line 34 a and the fourthrefrigerant line 36 a. In example embodiments, the second refrigerant supplied from thesecond refrigerant tank 22 may be heated by the thirdrefrigerant line 34 a. Further, the second refrigerant flowing from thesecond refrigerant tank 22 to therefrigerant passageway 14 may be heated by the fourthrefrigerant line 36 a. Therefore, the second refrigerant may be heated by the thirdrefrigerant line 34 a and the fourthrefrigerant line 36 a to continuously have the high temperature. - According to some example embodiments, the apparatus may rapidly change the temperature of the loading chuck. Thus, a temperature change time of the loading chuck may be significantly reduced. As a result, a time of a process using the loading chuck may be shortened. The apparatus may be applied to equipments including the loading chuck that may be used at the high temperature and the low temperature.
- As described above, example embodiments provide an apparatus for controlling a temperature of a loading chuck that may be capable of shortening a temperature change time of the loading chuck.
- Example embodiments also provide a method of controlling a temperature of the above-mentioned loading chuck.
- According to example embodiments, there is provided an apparatus for controlling a temperature of a loading chuck. The apparatus may include a first refrigerant tank, a second refrigerant tank, a first refrigerant line, a second refrigerant line, a third refrigerant line and a fourth refrigerant line. A refrigerant passageway may be formed in a chuck plate. A heater may be arranged under the chuck plate. The first refrigerant tank may store a first refrigerant. The second refrigerant tank may store a second refrigerant having a temperature higher than that of the first refrigerant. The first refrigerant line may be connected between the first refrigerant tank and the refrigerant passageway to supply the first refrigerant from the first refrigerant tank to the refrigerant passageway. The second refrigerant line may be connected between the first refrigerant tank and the refrigerant passageway to return the first refrigerant from the refrigerant passageway to the first refrigerant tank. The third refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to supply the second refrigerant from the second refrigerant tank to the refrigerant passageway. The fourth refrigerant line may be connected between the second refrigerant tank and the refrigerant passageway to return the second refrigerant from the refrigerant passageway to the second refrigerant tank.
- In example embodiments, the third refrigerant line may correspond to a line branched off from the first refrigerant line. The fourth refrigerant line may correspond to a line branched off from the second refrigerant line.
- In example embodiments, a first switching valve may be installed in a branched portion between the first refrigerant line and the third refrigerant line. A second switching valve may be installed in a branched portion between the second refrigerant line and the fourth refrigerant line.
- In example embodiments, a heat exchanger for rapidly heating the second refrigerant may be arranged at least one of the third refrigerant line and the fourth refrigerant line.
- In example embodiments, a heating member for heating the second refrigerant may be installed at the second refrigerant tank.
- In example embodiments, the apparatus may further include an auxiliary tank connected with the first refrigerant tank and the second refrigerant tank to provide the first refrigerant tank and the second refrigerant tank with an auxiliary refrigerant.
- In example embodiments, the second refrigerant tank may be connected with the first refrigerant tank. The second refrigerant tank may be used for an auxiliary tank for replenish the first refrigerant in the first refrigerant tank.
- In example embodiments, the apparatus may further include a cooling member connected with the first refrigerant tank to decrease a temperature of the first refrigerant.
- In example embodiments, the refrigerant passageway may be arranged over the heater.
- According to example embodiments, there is provided a method of controlling a temperature of a loading chuck. In the method of controlling the temperature of the loading chuck, a first refrigerant may be circulated through a refrigerant passageway of the loading chuck to provide the loading chuck with a first temperature. The loading chuck may be directly heated and a second refrigerant may also be circulated through the refrigerant passageway to provide the loading chuck with a second temperature higher than the first temperature. The loading chuck may be continuously heated and the circulating of the second refrigerant may be stopped to maintain the second temperature of the loading chuck.
- In example embodiments, the first refrigerant may be stored in a first refrigerant tank. The second refrigerant may be stored in a second refrigerant tank.
- In example embodiments, the first refrigerant and the second refrigerant may include substantially the same material.
- In example embodiments, continuously supplying the second refrigerant may include heating the second refrigerant to the second temperature.
- In example embodiments, the second temperature may be about 20° to about 80°.
- According to some example embodiments, the apparatus may rapidly change the temperature of the loading chuck. Thus, a temperature change time of the loading chuck may be remarkably reduced. As a result, a time of a process using the loading chuck may be shortened.
- The foregoing is illustrative of the present inventive concept and is not to be construed as limiting thereof. Although a few embodiments of the present inventive concept have been described, those skilled in the art will readily appreciate that many modifications are possible in the embodiments without materially departing from the novel teachings and advantages of the present inventive concept. Accordingly, all such modifications are intended to be included within the scope of the present inventive concept as defined in the claims. Therefore, it is to be understood that the foregoing is illustrative of the present inventive concept and is not to be construed as limited to the specific embodiments disclosed, and that modifications to the disclosed embodiments, as well as other embodiments, are intended to be included within the scope of the appended claims. The present inventive concept is defined by the following claims, with equivalents of the claims to be included therein.
Claims (20)
1. An apparatus for controlling the temperature of a loading chuck, the apparatus comprising:
a first refrigerant tank selectively coupled to a refrigerant passageway in thermal communication with the loading chuck, the first refrigerant tank including a first refrigerant maintained at a first temperature;
a second refrigerant tank selectively coupled to the refrigerant passageway, the second refrigerant tank including a second refrigerant maintained at a second temperature that is higher than the first temperature; and
at least one switching valve that selectively couples the first refrigerant tank or the second refrigerant tank to the refrigerant passageway responsive to selection of a set temperature for the loading chuck.
2. The apparatus of claim 1 , wherein the at least one switching valve is configured to selectively couple the second refrigerant tank to the refrigerant passageway responsive to selection of a first temperature of the loading chuck and to selectively couple the first refrigerant tank to the refrigerant passageway responsive to selection of a second temperature of the loading chuck, wherein the second temperature is lower than the first temperature.
3. The apparatus of claim 2 , wherein the first refrigerant and the second refrigerant comprise a substantially same material.
4. The apparatus of claim 2 , further comprising:
at least one heater coupled between the second refrigerant tank and the refrigerant passageway that maintains the second refrigerant at the second temperature; and
a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature.
5. The apparatus of claim 4 , wherein the at least one heater comprises:
a first heat exchanger that heats the second refrigerant when the second refrigerant is returned from the refrigerant passageway to the second refrigerant tank; and
a second heat exchanger that heats the second refrigerant when the second refrigerant is sent to the refrigerant passageway from the second refrigerant tank.
6. The apparatus of claim 2 , further comprising:
a heating member thermally coupled to the second refrigerant tank that maintains the second refrigerant at the second temperature; and
a cooling member thermally coupled to the first refrigerant tank that maintains the first refrigerant at the first temperature.
7. The apparatus of claim 2 , wherein the loading chuck further comprises a heater that is thermally coupled to the loading chuck, wherein the heater is positioned proximate the refrigerant passageway and wherein the heater is activated to raise the loading chuck from the second temperature to the first temperature of the loading chuck.
8. The apparatus of claim 2 , further comprising an auxiliary refrigerant tank coupled to the first refrigerant tank and the second refrigerant tank, the auxiliary refrigerant tank including an auxiliary refrigerant to be supplied to the first or second refrigerant tanks to maintain a desired level of refrigerant in the first and second refrigerant tanks.
9. The apparatus of claim 2 , wherein the first temperature is between about −80° and about 0° C. and wherein the second temperature is between about 20° C. and about 80° C.
10. An apparatus for controlling a temperature of a loading chuck, the apparatus comprising:
a first refrigerant tank configured to receive a first refrigerant;
a second refrigerant tank configured to receive a second refrigerant having a temperature higher than a temperature of the first refrigerant;
a first refrigerant line connected between the first refrigerant tank and a refrigerant passageway of the loading chuck to supply the first refrigerant to the refrigerant passageway;
a second refrigerant line connected between the refrigerant passageway and the first refrigerant tank to return the first refrigerant to the first refrigerant tank;
a third refrigerant line connected between the second refrigerant tank and a refrigerant passageway of the loading chuck to supply the second refrigerant to the refrigerant passageway; and
a fourth refrigerant line connected between the refrigerant passageway and the second refrigerant tank to return the second refrigerant to the second refrigerant tank.
11. The apparatus of claim 10 , wherein the third refrigerant line corresponds to a line branched off from the first refrigerant line, and the fourth refrigerant line corresponds to a line branched off from the second refrigerant line.
12. The apparatus of claim 11 , further comprising:
a first switching valve installed in a branched portion between the first refrigerant line and the third refrigerant line; and
a second switching valve installed in a branched portion between the second refrigerant line and the fourth refrigerant line.
13. The apparatus of claim 10 , further comprising:
a heat exchanger installed in at least one of the third refrigerant line and the fourth refrigerant line to rapidly heat the second refrigerant.
14. The apparatus of claim 10 , further comprising:
a heating member thermally coupled to the second refrigerant tank to heat the second refrigerant.
15. The apparatus of claim 10 , further comprising:
an auxiliary refrigerant tank connected with the first refrigerant tank and the second refrigerant tank and configured to receive an auxiliary refrigerant to selectively supply the auxiliary refrigerant to the first refrigerant tank and/or the second refrigerant tank.
16. The apparatus of claim 10 , further comprising:
a cooling member connected to the first refrigerant tank to decrease the temperature of the first refrigerant in the first refrigerant tank.
17. The apparatus of claim 10 , wherein the second refrigerant tank is connected with the first refrigerant tank to selectively supply the second refrigerant to the first refrigerant tank.
18. The apparatus of claim 10 , wherein the loading chuck comprises a heater arranged under the refrigerant passageway.
19. A method of controlling a temperature of a loading chuck, the method comprising:
circulating a first refrigerant through a refrigerant passageway of the loading chuck to provide the loading chuck with a first temperature;
directly heating the loading chuck and circulating a second refrigerant having a second temperature higher than the first temperature through the refrigerant passageway to provide the loading chuck with the second temperature; and
directly heating the loading chuck with the circulation of the second refrigerant being stopped to maintain the second temperature of the loading chuck.
20. The method of claim 19 , further comprising:
heating the second refrigerant while it is circulated through the refrigerant passageway.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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KR10-2011-0095515 | 2011-09-22 | ||
KR1020110095515A KR20130031945A (en) | 2011-09-22 | 2011-09-22 | Apparatus for controlling temperature of loading chuck and method of controlling temperature |
Publications (1)
Publication Number | Publication Date |
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US20130075059A1 true US20130075059A1 (en) | 2013-03-28 |
Family
ID=47909952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US13/591,253 Abandoned US20130075059A1 (en) | 2011-09-22 | 2012-08-22 | Apparatus for controlling a temperature of a loading chuck and methods of operating the same |
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KR (1) | KR20130031945A (en) |
Cited By (1)
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KR20210020523A (en) * | 2019-08-16 | 2021-02-24 | 주식회사 에프에스티 | temperature-adjusting device for high temperature having an open or close adjusting valve system |
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KR101345410B1 (en) * | 2013-06-25 | 2014-01-10 | (주)테키스트 | Temperature control apparatus |
KR101352056B1 (en) * | 2013-06-25 | 2014-01-15 | (주)테키스트 | Temperature control apparatus |
KR101367086B1 (en) * | 2013-10-17 | 2014-02-24 | (주)테키스트 | Temperature control system for semiconductor manufacturing system |
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