US20130135002A1 - Test electronics to device under test interfaces, and methods and apparatus using same - Google Patents
Test electronics to device under test interfaces, and methods and apparatus using same Download PDFInfo
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- US20130135002A1 US20130135002A1 US13/742,183 US201313742183A US2013135002A1 US 20130135002 A1 US20130135002 A1 US 20130135002A1 US 201313742183 A US201313742183 A US 201313742183A US 2013135002 A1 US2013135002 A1 US 2013135002A1
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- dut
- test electronics
- probe card
- test
- interface
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
Definitions
- FIG. 1 illustrates a plan view of a probe card, a semiconductor wafer, and a plurality of sets of test electronics
- FIG. 2 illustrates a cross-sectional elevation of the probe card, wafer and test electronics shown in FIG. 1 ;
- FIG. 3 illustrates an exemplary chassis for holding at least some of the test electronics of a test system
- FIG. 4 illustrates the chassis shown in FIG. 3 , after a plurality of the test electronics assemblies shown in FIG. 3 have been installed on the chassis;
- FIG. 5 provides an exploded view of the probe card receiving platform and ring of DUT interfaces shown in FIG. 4 ;
- FIG. 6 illustrates an exemplary probe card, and in particular, the surface of the probe card that mates with the DUT interfaces and ZIF connectors shown in FIGS. 4 & 5 ;
- FIG. 7 illustrates the probe card shown in FIG. 6 after it has been positioned on the probe card receiving platform shown in FIG. 4 ;
- FIG. 8 illustrates a schematic plan view of the chassis shown in FIG. 7 , along with the test electronics assemblies and DUT interfaces installed thereon;
- FIG. 9 illustrates the apparatus shown in FIG. 4 , after a plurality of additional test electronics assemblies have been installed on its chassis, in between the test electronics assemblies shown in FIG. 4 ;
- FIG. 10 provides an exploded view of the probe card receiving platform and concentric rings of DUT interfaces shown in FIG. 9 ;
- FIG. 11 illustrates an exemplary probe card, and in particular, the surface of the probe card that mates with the DUT interfaces and ZIF connectors shown in FIGS. 9 & 10 ;
- FIG. 12 illustrates a schematic plan view of the chassis shown in FIG. 7 , after it has been upgraded to include the additional test electronics assemblies and corresponding DUT interfaces shown in FIG. 9 ;
- FIGS. 13 & 14 illustrate respective exploded views of the DUT interfaces and ZIF connector arrangements of 1) one of the test electronics assemblies shown in FIG. 4 , and 2) one of the additional test electronics assemblies shown in FIG. 9 ;
- FIG. 15 illustrates, in block form, an exemplary “test electronics to DUT interface” for electrically coupling one of the test electronics assemblies shown in FIG. 13 or 14 to a DUT;
- FIGS. 16-19 illustrate an exemplary more detailed implementation of the test electronics to DUT interface shown in FIG. 15 ;
- FIGS. 20 & 21 respectively illustrate how a plurality of the test electronics to DUT interfaces may be used to electrically couple a test electronics assembly to a set of ZIF connectors;
- FIGS. 22-28 illustrate how the test electronics interface of the “test electronics to DUT interface” shown in FIGS. 17-19 may be coupled to a test electronics board of one of the test electronics assemblies shown in FIG. 13 or 14 ;
- FIG. 29 provides a perspective view of the DUT interface shown in FIGS. 18 & 19 ;
- FIG. 30 shows how the DUT interposer may be affixed to the DUT interface as a whole
- FIGS. 31 & 32 illustrate an exemplary operation of a ZIF connector to DUT clamping mechanism.
- test electronics may be placed on boards (e.g., printed circuit board (PCBs)) that are oriented at right angles to a plane of a device or devices under test (a DUT or DUTs).
- PCBs printed circuit board
- an exemplary orientation between different sets of test electronics 102 , 104 , 106 , 108 , 110 , 112 , 114 , 116 and a plurality of DUTs on a wafer 118 is shown, generally, in FIGS. 1 & 2 .
- FIG. 1 illustrates a plan view of a probe card 120 , a semiconductor wafer 118 (i.e., a “wafer”), and a plurality of sets of test electronics 102 , 104 , 106 , 108 , 110 , 112 , 114 , 116 .
- the wafer 118 is positioned on, and is electrically coupled to, a first surface 122 of the probe card 120 .
- the sets of test electronics 102 , 104 , 106 , 108 , 110 , 112 , 114 , 116 are positioned at right angles to a second surface 124 of the probe card 120 , opposite the first surface 122 , and are electrically coupled to DUTs on the wafer 118 via the probe card 120 .
- FIG. 2 illustrates a cross-sectional elevation of the probe card 120 , wafer 118 and test electronics 102 shown in FIG. 1 .
- a probe card 120 is usually coupled to the sets of test electronics 102 , 104 , 106 , 108 , 110 , 112 , 114 , 116 via a plurality of “test electronics to DUT interfaces” 200 , 202 , as will be described herein.
- test electronics to DUT interfaces 200 , 202 more details of an exemplary wafer sort test system 100 in which the test electronics to DUT interfaces 200 , 202 may be used are provided.
- FIG. 3 illustrates an exemplary chassis 300 for holding at least some of the test electronics assemblies 302 of a test system.
- the chassis 300 is configured for a wafer sort application.
- the chassis 300 comprises a cylindrical hub 304 that is coupled between a chassis base 306 and a probe card receiving platform 308 .
- a clamping system 310 surrounds the cylindrical hub 304 and provides a means to clamp probe cards to (or release them from) the probe card receiving platform 308 .
- the clamping system 310 includes a plurality of clamping rods 312 , 314 , 316 that extend parallel to the cylindrical hub 304 and through the probe card receiving platform 308 .
- Each of the clamping rods 312 , 314 , 316 is movable in an axial direction, and is capable of 1) moving toward the chassis base 306 to clamp a probe card to the probe card receiving platform 308 , and 2) moving away from the chassis base 306 to release a probe card from the probe card receiving platform 308 .
- Each clamping rod 312 , 314 , 316 is also capable of rotating about its axis, to align (or alternately lock) a T-shaped end 318 , 320 , 322 of the clamping rod 312 , 314 , 316 with a corresponding hole in a probe card.
- FIG. 3 also illustrates an exemplary test electronics assembly 302 , as it is being installed on the chassis 300 .
- the particular manner in which the test electronics assembly 302 is installed on the chassis 300 is not relevant to this disclosure. However, as shown, the test electronics assembly 302 is installed at a right angle to the plane of the probe card receiving platform 308 (and thus, at a right angle to any probe card and wafer that are ultimately positioned on the probe card receiving platform 308 ).
- the core of the test electronics assembly 302 is a water block 324 that provides cooling for first and second test electronics boards mounted on opposite surfaces thereof. Only one of the test electronics boards 326 is viewable in FIG. 3 , with the other test electronics board being positioned opposite the one shown, on the back side of the water block 324 .
- Each test electronics board 326 comprises an input/output (I/O) connector 328 that facilitates communication with additional electronics in the test system, and a pair of connectors 330 , 332 that facilitate communication with one or more DUTs on a wafer.
- I/O connectors 330 , 332 couples a test electronics board 326 to a corresponding DUT interface 334 , which DUT interface 334 comprises a zero insertion force (ZIF) connector 336 .
- ZIF zero insertion force
- the bodies of the ZIF connectors 336 (four of which are shown in FIG. 3 ) are mounted to the water block 324 adjacent the probe card receiving platform 308 .
- the ZIF connectors 336 couple to the probe card to provide an electrical interface therebetween (and together with the probe card, the ZIF connectors 336 complete an electrical interface with the DUTs on a wafer).
- the water block 324 of a test electronics assembly 302 is coupled to inlet and outlet pipes 338 , 340 , which inlet and outlet pipes 338 , 340 couple the water block 324 to pipe fittings 342 , 344 of respective “cool in” and “hot out” water manifolds 346 , 348 on the chassis 300 .
- FIG. 4 illustrates the chassis 300 shown in FIG. 3 , after a plurality of the test electronics assemblies 302 shown in FIG. 3 have been installed on the chassis 300 .
- the DUT interfaces 334 (and ZIF connectors 336 ) corresponding to each test electronics assembly 302 are positioned adjacent the DUT interfaces 334 (and ZIF connectors 336 ) of adjacent test electronics assemblies 302 , thereby forming a ring of DUT interfaces 334 (and ZIF connectors 336 ) around the probe card receiving platform 308 .
- FIG. 5 provides an exploded view of the probe card receiving platform 308 and ring of DUT interfaces 334 shown in FIG. 4 (including the ZIF connectors 336 of the DUT interfaces 334 ).
- FIG. 6 illustrates an exemplary probe card 600 , and in particular, the surface 602 of the probe card 600 that mates with the DUT interfaces 334 (and their ZIF connectors 336 ) shown in FIGS. 4 & 5 .
- Attached to the surface 602 of the probe card 600 is a stiffening ring 604 .
- Formed in the stiffening ring 604 are the holes 606 , 608 , 610 that receive the T-shaped ends 318 , 320 , 322 of the clamping rods 312 , 314 , 316 shown in FIG. 3 .
- Patterned on the surface 602 of the probe card 600 are arrays of electrical contacts 612 to which similarly-oriented arrays of electrical contacts provided by the ZIF connectors 336 electrically couple.
- each array of electrical contacts 612 is shown as a single rectangle representing the many electrical contacts of the array 612 .
- each rectangle may comprise hundreds of individual electrical contacts.
- each array of electrical contacts 612 may comprise 418 contacts with an approximate 1 mm ⁇ 1 mm pitch (though more or less contacts could be provided, with a pitch that is larger or smaller than 1 mm ⁇ 1 mm).
- each ZIF connector 336 comprises a “ZIF connector to DUT clamping mechanism” that engages a corresponding pair of the latching pins 614 , 616 .
- the clamping mechanism When the clamping mechanism is placed in its clamping mode, the clamping mechanism 1) exerts a first set of orthogonal forces to the probe card 600 by pulling the latching pins 614 , 616 away from the surface 602 of the probe card 602 , and 2) applies a second orthogonal force to the probe card 600 by pressing a DUT interface 334 (including its ZIF connector 336 ) against the probe card 600 .
- the orthogonal force applied to the probe card 600 by a DUT interface 334 is equal to (or at least substantially equal to) the set of orthogonal forces applied to the probe card 600 by its “ZIF connector to DUT clamping mechanism” pulling the latching pins 614 , 616 away from the surface 602 of the probe card 600 .
- each ZIF connector 336 to the probe card 600 exerts a net zero force (or close to net zero force) on the probe card 600 .
- deflection of the surface 602 of the probe card 600 is minimized.
- Another advantage of the ZIF connector to DUT clamping mechanism is that it does not require any DUT connectors to be installed on the probe card 600 .
- FIG. 7 illustrates the probe card 600 after it has been positioned on the probe card receiving platform 308 .
- a wafer is positioned in the area of the probe card 600 denoted by the diameter “x”.
- FIG. 7 also illustrates how the chassis 300 may be coupled to a test head 700 of a test system.
- FIG. 8 illustrates a schematic plan view of the chassis 300 , along with the test electronics assemblies 302 and DUT interfaces 334 installed thereon. Also shown are a plurality of test electronics assemblies 800 in the test head on which the chassis 300 is mounted. The plurality of test electronics assemblies 302 may be respectively and electrically coupled to the electronics assemblies 800 .
- FIG. 9 illustrates the apparatus shown in FIG. 4 , after a plurality of additional test electronics assemblies 900 have been installed on the chassis 300 , in between the test electronics assemblies 302 shown in FIG. 4 .
- the DUT interfaces 902 of the additional test electronics assemblies 900 (including their ZIF connectors 904 ) form a second ring of DUT interfaces 902 (and ZIF connectors 904 ), concentric with and exterior to the ring of DUT interfaces 334 (and ZIF connectors 336 ) formed by the DUT interfaces 334 of the test electronics assemblies 302 shown in FIG. 4 .
- FIG. 10 provides an exploded view of the probe card receiving platform 308 and concentric rings of DUT interfaces 334 , 902 (and ZIF connectors 336 , 904 ).
- FIG. 11 illustrates an exemplary probe card 1100 , and in particular, the surface 1102 of the probe card 1100 that mates with the DUT interfaces 334 , 902 (and their respective ZIF connectors 336 , 904 ) shown in FIGS. 9 & 10 .
- Attached to the surface 1102 of the probe card 1100 is a stiffening ring 1104 .
- Formed in the stiffening ring 1104 are the holes 1106 , 1108 , 1110 that receive the T-shaped ends 318 , 320 , 322 of the clamping rods 312 , 314 , 316 (shown in FIG. 3 ).
- Patterned on the surface 1102 of the probe card 1100 are arrays of electrical contacts 1112 , 1114 to which similarly-oriented arrays of electrical contacts provided by the ZIF connectors 336 , 904 electrically couple. Note that, in FIG. 11 , each array of electrical contacts 1112 , 1114 is shown as a single rectangle representing the many electrical contacts of the array 1112 , 1114 . In reality, each rectangle may comprise hundreds of individual electrical contacts.
- each ZIF connector 336 , 904 comprises a “ZIF connector to DUT damping mechanism” that engages a corresponding pair of the latching pins 1116 , 1118 .
- FIG. 12 illustrates a schematic plan view of the chassis 300 shown in FIG. 7 , after it has been upgraded to include the additional test electronics assemblies 900 and corresponding DUT interfaces 902 shown in FIG. 9 . Also shown are additional electronic assemblies 1200 in the test head on which the chassis 300 is mounted. The additional test electronics assemblies 900 may be coupled to the additional electronic assemblies 1200 .
- FIGS. 9-12 show first and second subsets of DUT interfaces 334 , 902 positioned along the respective perimeters of first and second circles
- first and second subsets of DUT interfaces 334 , 902 could also be positioned along the perimeters of other concentric shapes, such as ovals, squares or rectangles (to name a few).
- First and second subsets of DUT interfaces 334 , 902 can also be positioned along the respective perimeters of different concentric shapes, such as a square that surrounds a circle. Such an arrangement might, in some cases, facilitate the use of both different sizes and different shapes of probe cards in a single test system (although it would also be possible to couple a circular ring of DUT interfaces to a square probe card, for example).
- the construction of the chassis 300 shown in FIG. 3 coupled with the modular nature of the test electronics assemblies 302 , 900 shown in FIGS. 4 & 9 , enables the I/O capacity of a “test electronics to DUT interface” to be doubled in a modular fashion. Doubling the I/O capacity does, however, require the use of a larger diameter probe card 1100 , which probe card 1100 provides arrays of electrical contacts 1112 , 1114 in first and second rings.
- the diameter of the probe card 600 accepted by the apparatus shown in FIG. 4 may be 450 millimeters (mm), and the diameter of the probe card 1100 accepted by the apparatus shown in FIG. 9 may be 560 mm.
- FIGS. 13 & 14 illustrate respective exploded views of the DUT interfaces 334 , 902 and ZIF connector arrangements of 1) one of the test electronics assemblies 302 shown in FIG. 4 , and 2) one of the additional test electronics assemblies 900 shown in FIG. 9 .
- the only difference between the FIG. 13 and FIG. 14 test electronics assemblies 302 , 900 is the position of the platforms 1300 , 1400 that support their respective ZIF connectors 336 , 904 . That is, the platform 1300 shown in FIG. 13 is configured to position its ZIF connectors 336 in the inner ring of ZIF connectors on the chassis 300 (see FIG. 9 ), and the platform 1400 shown in FIG. 14 is configured to position its ZIF connectors 904 in the outer ring of ZIF connectors on the chassis 300 .
- FIG. 13 shows the test electronics assembly 302 , its water block 324 , a test electronics board 326 , 1302 mounted on each side of the water block 324 , and one of the I/O connectors 330 on the test electronics board 326 .
- a pair of paddle board PCBs 1304 , 1306 sandwiching each I/O connector 330 , and an insulating bolster plate 1308 and two screws 1310 , 1312 that, along with a surface of the water block 324 , clamp the PCBs 1304 , 1306 to the I/O connector 330 .
- the PCBs 1304 , 1306 are coupled to the I/O connector 330 will be described in more detail later in this description.
- FIG. 13 also provides a detailed view of the DUT interfaces 334 positioned on the platform 1300 , which platform 1300 is mounted on the water block 324 .
- each DUT interface 334 comprises a DUT interposer 334 that provides a good quality connection between electrical contacts on the ZIF connector 336 and a probe card 600 .
- a pair of alignment pins, including pin 1314 is attached to the housing or frame of each ZIF connector 336 .
- FIG. 13 also shows the latching pins 614 , 616 of a probe card, aligned with the alignment pins. For example, latching pin 616 is aligned with, and receives, alignment pin 1314 .
- FIG. 15 illustrates, in block form, an exemplary “test electronics to DUT interface” 1500 for electrically coupling one of the test electronics assemblies 302 , 900 shown in FIG. 13 or 14 to a DUT.
- the test electronics to DUT interface 1500 couples a test electronics assembly 302 to a plurality of DUTs on a wafer, via a probe card 600 or 1100 .
- the interface 1500 comprises a test electronics interface 1502 , a DUT interface 1504 , and a means 1506 for coupling the test electronics and DUT interfaces 1502 , 1504 .
- the means 1506 for coupling the test electronics and DUT interfaces 1502 , 1504 may comprise a plurality of coaxial cables.
- the means 1506 for coupling the test electronics and DUT interfaces 1502 , 1504 may comprise a flex circuit or other electrical connection.
- FIGS. 16 & 17 illustrate an exemplary more detailed implementation 1600 of the test electronics to DUT interface 1500 shown in FIG. 15 .
- the test electronics interface 1502 comprises at least one printed circuit board (PCB) and at least one test electronics interposer.
- PCB printed circuit board
- FIGS. 16 & 17 show an interface comprised of first and second PCBs 1602 and first and second test electronics interposers 1604 .
- each PCB may be a multi-layer PCB.
- electrical paths on (or in) the PCBs 1602 may be constructed as controlled impedance transmission line paths, such as stripline paths.
- Each of the test electronics interposers 1604 has a first side and a second side.
- the first side of each test electronics interposer 1604 has a first plurality of electrical contacts thereon.
- the first plurality of electrical contacts is electrically coupled to a respective one of the PCBs 1602
- the second side of each test electronics interposer 1604 has a second plurality of electrical contacts thereon.
- the second plurality of contacts provides an electrical coupling to a test electronics assembly 302 or 900 .
- the DUT interface 1504 comprises a flex circuit 1606 and a DUT interposer 1608 .
- the flex circuit 1606 has 1) a plurality of electrical contacts on a surface thereof, and 2) a plurality of electrical signal paths that are coupled to the plurality of electrical contacts.
- the electrical signal paths may be formed on both sides of the flex circuit 1606 , and the flex circuit 1606 may be a multi-layer flex circuit.
- the electrical signal paths may be constructed as controlled impedance transmission line paths, such as stripline paths.
- the DUT interposer 1608 has a first side and a second side. The first side of the DUT interposer 1608 has a first plurality of electrical contacts thereon.
- the first plurality of electrical contacts is coupled to the plurality of electrical contacts of the flex circuit 1606 .
- the second side of the DUT interposer 1608 has a second plurality of electrical contacts thereon.
- the second plurality of electrical contacts is coupled to the first plurality of electrical contacts and provides an electrical coupling to a DUT (or probe card 600 or 1100 ).
- the means 1506 for coupling the test electronics and DUT interfaces 1502 , 1504 comprises a plurality of coaxial cables 1610 , coupled between the first and second PCBs 1602 and the electrical signal paths of the flex circuit 1606 .
- the first and second PCBs 1602 electrically couple the plurality of coaxial cables 1610 to the test electronics interposers 1604 .
- the coaxial cables 1610 provide controlled impedance transmission line paths between the test electronics interface 1502 and the DUT interface 1504 .
- FIG. 17 illustrates how the flex circuit 1606 may be looped around a flex circuit form 1700 (which flex circuit form may in some cases be a compliant flex circuit form).
- the flex circuit 1606 is looped around the flex circuit form 1700 with a first surface of the flex circuit 1606 facing the flex circuit form 1700 .
- a second surface of the flex circuit 1606 opposite the first surface, has the plurality of electrical contacts 1702 that interface with the DUT interposer 1608 thereon.
- At least part of the flex circuit 1606 may be encased within a connector housing 1708 .
- the connector 1710 may be a ZIF connector having an integrated “ZIF connector to DUT clamping mechanism”.
- the ZIF connector to DUT clamping mechanism may comprise a pneumatically actuated clamping system, which system is pneumatically activated via air received through a tube or pipe 1712 (see, FIGS. 17-19 ).
- First and subsets of the plurality of coaxial cables 1610 a , 1610 b may be respectively coupled to first and second opposing ends 1704 , 1706 of the flex circuit 1606 .
- FIG. 19 illustrates the test electronics to DUT interface 1600 after having bent one subset 1610 a of the coaxial cables to reveal the inside faces (and sets of electrical contacts 1900 , 1902 ) of the first and second PCBs 1602 a, 1602 b.
- each of the PCBs 1602 a, 1602 b may be coupled to 72 high speed pin electronics (PE) sub-channels on the test electronics assembly 302 or 900 , with different subsets of the PE sub-channels being derived from thirty-six primary PE channels (i.e., the test electronics assembly provides a 1:4 fan-out of primary PE channels to PE sub-channels).
- PE pin electronics
- Additional electrical contacts on the PCB 1602 a or 1602 b may be coupled to, for example, 44 signals comprised of low speed control channels, utility channels, DC power supply lines, DC sense lines, and 132 ground returns. All of these signals/channels may, in turn, be routed from one of the PCBs 1602 a to the ZIF connector 1710 ; and the other PCB 1602 b may route the same complement of signals to the ZIF connector 1710 . In this manner, each PCB 1602 a, 1602 b routes 116 signals plus 132 ground returns. The total number of signals routed to each ZIF connector 1710 is therefore 418 , including 232 signals (116 from each PCB) and a reduced number of ground returns (i.e., 186 ground returns). However, the number of signals routed through a PCB 1602 a, 1602 b or ZIF connector 1710 may vary, depending on the application.
- FIGS. 20 & 21 respectively illustrate how a plurality of the test electronics to DUT interfaces 1600 a, 1600 b, 1600 c, 1600 d for 1600 e, 1600 f , 1600 g, 1600 h ) may be used to electrically couple a test electronics assembly 302 or 900 to a set of ZIF connectors 336 or 904 .
- FIG. 20 illustrates how a plurality of test electronics to DUT interfaces 1600 a, 1600 b, 1600 c, 1600 d may be used to couple the test electronics assembly 302 and ZIF connectors 336 shown in FIG. 13 ; and
- FIG. 21 illustrates how a plurality of test electronics to DUT interfaces 1600 e, 1600 f, 1600 g, 1600 h may be used to couple the test electronics assembly 900 and ZIF connectors 904 shown in FIG. 14 .
- FIGS. 22-28 illustrate how the test electronics interface 1502 of the “test electronics to DUT interface” 1600 shown in FIGS. 17-19 may be coupled to a test electronics board 326 of one of the test electronics assemblies 302 shown in FIG. 13 or 14 .
- FIG. 22 illustrates a portion of a bare water block 324 of one of the test electronics assemblies 302 .
- the water block 324 may comprise a handle 2200 for grabbing hold of the test electronics assembly 1302 .
- the water block 324 may also comprise a plurality of holes 2202 , 2204 , 2206 , 2208 via which components may be bolted (or screwed) to the water block 324 , and a plurality of pins 2210 , 2212 , 2214 , 2216 for aligning components with the water block 324 .
- FIG. 23 illustrates the placement of two insulator pads 2300 , 2302 on the water block 324 .
- the use of insulator pads 2300 , 2302 is optional, but may be necessary to insulate PCB contacts (or traces) from a metallic water block 324 .
- Each of the insulator pads 2300 , 2302 may comprise holes for receiving corresponding alignment pins 2210 , 2212 , 2214 , 2216 on the water block 324 .
- FIG. 24 illustrates how the first PCBs 2400 , 2402 of two different “test electronics to DUT interfaces” 1600 a, 1600 b are aligned with, and positioned over, the two insulator pads 2300 , 2302 .
- Each of the PCBs 2400 , 2402 may comprise a plurality of holes for receiving the same alignment pins 2210 , 2212 , 2214 , 2216 that are used to align the insulator pads 2300 , 2302 .
- FIG. 25 illustrates the placement of test electronics interposers 2500 , 2502 on the first PCBs 2400 , 2402 of the “test electronics to DUT interfaces” 1600 a, 1600 b.
- Each of the test electronics interposers 2500 , 2502 may comprise a plurality of holes for receiving the same alignment pins 2210 , 2212 , 2214 , 2216 that are used to align the insulator pads 2300 , 2302 and first PCBs 2400 , 2402 .
- An enlarged view of a portion 2600 of one of the interposers 2502 is shown in FIG. 26 .
- the electrical contacts of the interposer may comprise a plurality of fixed or spring-loaded contacts 2602 , 2604 (e.g., pins).
- the electrical contacts 2602 , 2604 may comprise C-spring contacts, having a free length of 60 mils and a compressed length of 48 mils.
- the spring contacts ensure that good pressure is maintained between the electrical contacts of the first PCBs 2400 , 2402 , interposers 2500 , 2502 , and a test electronics board 326 .
- FIG. 27 illustrates the placement of a test electronics board 326 on the test electronics interposers 2500 , 2502 , as well as the placement of additional test electronics interposers 2700 , 2702 on the test electronics board 326 .
- each of the four test electronics interposers 2500 , 2502 , 2700 , 2702 comprises a plurality of electrical contacts that mates with a corresponding plurality of electrical contacts on the test electronics board 326 .
- FIG. 28 illustrates the placement of the second PCBs 2800 , 2802 of the “test electronics to DUT interfaces” 1600 a, 1600 b on the second set of test electronics interposers 2700 , 2702 , as well as the placement of insulating bolster plates 2804 , 2806 over the second PCBs 2800 , 2802 .
- Bolts or screws may then be inserted through corresponding holes 2808 , 2810 , 2812 , 2814 in all of the components shown in FIGS. 23-28 , and fastened to the holes 2202 , 2204 , 2206 , 2208 in the water block 324 .
- the holes 2202 . 2204 , 2206 , 2208 in the water block 324 are shown in FIG. 22 .
- test electronics interface 1502 of the “test electronics to DUT interface” 1600 may be coupled to a test electronics board 326
- a description of how the DUT interface 1504 of the “test electronics to DUT interface” 1600 may be coupled to a probe card 600 is now provided.
- FIG. 29 provides a perspective view of the DUT interface shown in FIGS. 18 & 19 .
- Thee DUT interface comprises a ZIF connector and a DUT interposer.
- the ZIF connector comprises a flex circuit that is looped around a compliant flex circuit form, as best shown in FIG. 17 .
- a portion of the flex circuit near a distal end of the compliant flex circuit form is visible in FIG. 29 .
- most of the flex circuit is obscured in FIG. 29 by the ZIF connector housing, and by a DUT interposer having contacts that are electrically coupled to a electrical contacts on the outer surface of the flex circuit.
- the alignment pins are sized and positioned to fit into axial holes in a pair of latching pins on a probe card.
- the ends of the alignment pins may be beveled or rounded.
- the caps of the latching pins may have beveled or rounded detente therein.
- Another pair of alignment pins is provided on the DUT interposer, and the ends of these alignment pins may also be beveled or rounded, When positioning a probe card adjacent the DUT interface, the holes in the latching pins are aligned with the longer alignment pins of the connector housing, and the probe card is moved toward the DUT interface. See, FIG. 30 .
- the alignment pins of the DUT interposer mate with corresponding holes in the surface of the probe card.
- the alignment pins of the DUT interposer may not mate with the holes in the probe card until the DUT interface is actually clamped to the probe card.
- FIG. 30 also shows how the DUT interposer may be affixed to the DUT interface as a whole. That is, a mounting plate may be positioned adjacent the compliant flex circuit form, opposite a side of the form that abuts the flex circuit. The mounting plate may then be screwed to the DUT interposer (or vice versa).
- FIGS. 31 & 32 illustrate an exemplary operation of a ZIF connector to DUT clamping mechanism.
- the clamping mechanism may be primarily contained within the connector housing.
- the clamping mechanism is actuated pneumatically, by regulating the air pressure supplied to the clamping mechanism via a tube or pipe.
- the clamping mechanism could be actuated hydraulically or electrically, for example.
- an increase in positive air pressure applied to the clamping mechanism causes the clamping mechanism to release the DUT interface from the probe card, allowing the DUT interface to move away from the probe card. See, FIG. 31 . This may result in a small gap being formed between the DUT interface and the probe card, or may simply result in a loose abutment of the DUT interface to the probe card.
- the clamping mechanism pulls on each of the latch pins, thereby exerting a first set of orthogonal forces in a direction away from the probe card.
- the DUT interface exerts a second orthogonal force on the probe card, in a direction opposite to the first set of orthogonal forces.
- the DUT interface when clamped to the probe card, applies a net zero force (or substantially net zero force) to the probe card.
- the offsetting of each DUT interface's localized orthogonal forces means that no (or little) net force is applied to the probe card. As a result, deflection of the probe card is minimized, and the electrical contacts on a wafer can be more reliably coupled with corresponding electrical contacts on the probe card.
- the clamping mechanism may engage and pull other types of latch pins (or other types of features) as it moves a DUT interface orthogonally towards a probe card or DUT.
- test electronics to DUT interfaces disclosed herein have been used to provide about 30% more signals in half the area of previous interface solutions, providing a more than 2 ⁇ increase in signal density.
- test electronics to DUT interfaces disclosed herein can typically be produced at a much lower cost than previous interface solutions.
- test electronics to DUT interfaces described herein may be employed in various test and interface applications, including other automated test equipment (ATE) applications, such as engineering and final test applications.
- ATE automated test equipment
- a method of coupling a test electronics to DUT interface between a test electronics assembly and a probe card (or DUT) may comprise: 1) providing a test electronics to DUT interface comprising a test electronics interface that is electrically coupled to a DUT interface; 2) coupling the test electronics interface to a test electronics assembly (e.g., via at least one PCB and test electronics interposer of the test electronics interface); and 3) coupling the DUT interface to a probe card or DUT by causing a ZIF connector to DUT clamping mechanism of the DUT interface to pull on one or more features of the probe card or DUT, thereby exerting at least one force (i.e., a pulling force) that is directed orthogonally away from the probe card or DUT; wherein 4) as the DUT interface is pressed against (or coupled to) the probe card or DUT, an orthogonal force is applied toward the probe card or DUT, the orthogonal forces offsetting one another.
- a method of configuring a test system may comprise installing test electronics assemblies of a first type in the test system, or installing test electronics of first and second types in the test system; the assemblies of the first type being coupled to a chassis to position their DUT interfaces along the perimeter of a first shape, and the assemblies of the second type being coupled to the chassis to position their DUT interfaces along the perimeter of a second shape, concentric with the first shape.
- a method of configuring a test system may also comprise providing test electronics assemblies having ZIF connectors mounted thereon, the test electronics assemblies including i) a first type of test electronics assembly having ZIF connectors mounted thereon in first positions, and ii) a second type of test electronics assembly having ZIF connectors mounted thereon in second positions, the second positions differing from the first positions.
- a first test system may then be configured by installing a plurality of the first type of test electronics assembly, but none of the second type of test electronics assembly, in the first test system. Installing only the first type of test electronics assembly in the first test system positions the ZIF connectors of the first type of test electronics assembly along a perimeter of a first shape.
- a second test system may be configured by installing a plurality of the first type of test electronics assembly and a plurality of the second type of test electronics assembly in the second test system. Installing both the first type of test electronics assembly and the second type of test electronics assembly in the second test system positions the ZIF connectors of the first type of test electronics assembly along a perimeter of a first shape and positions the ZIF connectors of the second type of test electronics assembly along a perimeter of a second shape.
Abstract
Description
- This application is a divisional application of U.S. patent application Ser. No. 12/626,506, filed Nov. 25, 2009, which claims the benefit of U.S. Provisional Application No. 61/200,418, filed Nov. 25, 2008, both of which are hereby incorporated by reference for all that they disclose.
- When testing electronic devices, it is often desirable to route a large number of high quality signals between the electronics of a test system and a device under test (DUT). One application where this need may be experienced most is in the test of semiconductor devices, and even more particularly, in the test of plural semiconductor devices on a semiconductor wafer (e.g., during “wafer sort”).
- Illustrative embodiments of the invention are illustrated in the drawings, in which:
-
FIG. 1 illustrates a plan view of a probe card, a semiconductor wafer, and a plurality of sets of test electronics; -
FIG. 2 illustrates a cross-sectional elevation of the probe card, wafer and test electronics shown inFIG. 1 ; -
FIG. 3 illustrates an exemplary chassis for holding at least some of the test electronics of a test system; -
FIG. 4 illustrates the chassis shown inFIG. 3 , after a plurality of the test electronics assemblies shown inFIG. 3 have been installed on the chassis; -
FIG. 5 provides an exploded view of the probe card receiving platform and ring of DUT interfaces shown inFIG. 4 ; -
FIG. 6 illustrates an exemplary probe card, and in particular, the surface of the probe card that mates with the DUT interfaces and ZIF connectors shown inFIGS. 4 & 5 ; -
FIG. 7 illustrates the probe card shown inFIG. 6 after it has been positioned on the probe card receiving platform shown inFIG. 4 ; -
FIG. 8 illustrates a schematic plan view of the chassis shown inFIG. 7 , along with the test electronics assemblies and DUT interfaces installed thereon; -
FIG. 9 illustrates the apparatus shown inFIG. 4 , after a plurality of additional test electronics assemblies have been installed on its chassis, in between the test electronics assemblies shown inFIG. 4 ; -
FIG. 10 provides an exploded view of the probe card receiving platform and concentric rings of DUT interfaces shown inFIG. 9 ; -
FIG. 11 illustrates an exemplary probe card, and in particular, the surface of the probe card that mates with the DUT interfaces and ZIF connectors shown inFIGS. 9 & 10 ; -
FIG. 12 illustrates a schematic plan view of the chassis shown inFIG. 7 , after it has been upgraded to include the additional test electronics assemblies and corresponding DUT interfaces shown inFIG. 9 ; -
FIGS. 13 & 14 illustrate respective exploded views of the DUT interfaces and ZIF connector arrangements of 1) one of the test electronics assemblies shown inFIG. 4 , and 2) one of the additional test electronics assemblies shown inFIG. 9 ; -
FIG. 15 illustrates, in block form, an exemplary “test electronics to DUT interface” for electrically coupling one of the test electronics assemblies shown inFIG. 13 or 14 to a DUT; -
FIGS. 16-19 illustrate an exemplary more detailed implementation of the test electronics to DUT interface shown inFIG. 15 ; -
FIGS. 20 & 21 respectively illustrate how a plurality of the test electronics to DUT interfaces may be used to electrically couple a test electronics assembly to a set of ZIF connectors; -
FIGS. 22-28 illustrate how the test electronics interface of the “test electronics to DUT interface” shown inFIGS. 17-19 may be coupled to a test electronics board of one of the test electronics assemblies shown inFIG. 13 or 14; -
FIG. 29 provides a perspective view of the DUT interface shown inFIGS. 18 & 19 ; -
FIG. 30 shows how the DUT interposer may be affixed to the DUT interface as a whole; and -
FIGS. 31 & 32 illustrate an exemplary operation of a ZIF connector to DUT clamping mechanism. - To increase the density of test electronics available at a particular “test site”, and to ensure that different sets of test electronics can be placed close to their respective test sites, the test electronics may be placed on boards (e.g., printed circuit board (PCBs)) that are oriented at right angles to a plane of a device or devices under test (a DUT or DUTs). In this regard, an exemplary orientation between different sets of
test electronics wafer 118 is shown, generally, inFIGS. 1 & 2 . - By way of example,
FIG. 1 illustrates a plan view of aprobe card 120, a semiconductor wafer 118 (i.e., a “wafer”), and a plurality of sets oftest electronics wafer 118 is positioned on, and is electrically coupled to, afirst surface 122 of theprobe card 120. The sets oftest electronics second surface 124 of theprobe card 120, opposite thefirst surface 122, and are electrically coupled to DUTs on thewafer 118 via theprobe card 120.FIG. 2 illustrates a cross-sectional elevation of theprobe card 120,wafer 118 andtest electronics 102 shown inFIG. 1 . - Because a wafer
sort test system 100 is typically used to test wafers carrying many types of DUTs, and because probe cards can degrade or fail, aprobe card 120 is usually coupled to the sets oftest electronics DUT interfaces sort test system 100 in which the test electronics toDUT interfaces -
FIG. 3 illustrates anexemplary chassis 300 for holding at least some of thetest electronics assemblies 302 of a test system. By way of example, thechassis 300 is configured for a wafer sort application. Thechassis 300 comprises acylindrical hub 304 that is coupled between achassis base 306 and a probecard receiving platform 308. Aclamping system 310 surrounds thecylindrical hub 304 and provides a means to clamp probe cards to (or release them from) the probecard receiving platform 308. Theclamping system 310 includes a plurality ofclamping rods cylindrical hub 304 and through the probecard receiving platform 308. Each of theclamping rods chassis base 306 to clamp a probe card to the probecard receiving platform 308, and 2) moving away from thechassis base 306 to release a probe card from the probecard receiving platform 308. Eachclamping rod shaped end clamping rod -
FIG. 3 also illustrates an exemplarytest electronics assembly 302, as it is being installed on thechassis 300. The particular manner in which thetest electronics assembly 302 is installed on thechassis 300 is not relevant to this disclosure. However, as shown, thetest electronics assembly 302 is installed at a right angle to the plane of the probe card receiving platform 308 (and thus, at a right angle to any probe card and wafer that are ultimately positioned on the probe card receiving platform 308). The core of thetest electronics assembly 302 is awater block 324 that provides cooling for first and second test electronics boards mounted on opposite surfaces thereof. Only one of thetest electronics boards 326 is viewable inFIG. 3 , with the other test electronics board being positioned opposite the one shown, on the back side of thewater block 324. Eachtest electronics board 326 comprises an input/output (I/O)connector 328 that facilitates communication with additional electronics in the test system, and a pair ofconnectors O connectors test electronics board 326 to acorresponding DUT interface 334, whichDUT interface 334 comprises a zero insertion force (ZIF)connector 336. Each DUT interface 334 (and its ZIF connector 336), in combination with 1) a set of cables, and 2) an additional connector that connect the ZIF connector to one of the I/O connectors 330, 332 (which cables and additional connector are not shown inFIG. 3 ), forms a “test electronics to DUT interface”. As shown the bodies of the ZIF connectors 336 (four of which are shown inFIG. 3 ) are mounted to thewater block 324 adjacent the probecard receiving platform 308. When a probe card is positioned on the probecard receiving platform 308, theZIF connectors 336 couple to the probe card to provide an electrical interface therebetween (and together with the probe card, theZIF connectors 336 complete an electrical interface with the DUTs on a wafer). - As further shown in
FIG. 3 , thewater block 324 of atest electronics assembly 302 is coupled to inlet andoutlet pipes outlet pipes water block 324 topipe fittings water manifolds chassis 300. -
FIG. 4 illustrates thechassis 300 shown inFIG. 3 , after a plurality of thetest electronics assemblies 302 shown inFIG. 3 have been installed on thechassis 300. Note that the DUT interfaces 334 (and ZIF connectors 336) corresponding to eachtest electronics assembly 302 are positioned adjacent the DUT interfaces 334 (and ZIF connectors 336) of adjacenttest electronics assemblies 302, thereby forming a ring of DUT interfaces 334 (and ZIF connectors 336) around the probecard receiving platform 308.FIG. 5 provides an exploded view of the probe card receivingplatform 308 and ring ofDUT interfaces 334 shown inFIG. 4 (including theZIF connectors 336 of the DUT interfaces 334). -
FIG. 6 illustrates anexemplary probe card 600, and in particular, thesurface 602 of theprobe card 600 that mates with the DUT interfaces 334 (and their ZIF connectors 336) shown inFIGS. 4 & 5 . Attached to thesurface 602 of theprobe card 600 is astiffening ring 604. Formed in thestiffening ring 604 are theholes shaped ends clamping rods FIG. 3 . Patterned on thesurface 602 of theprobe card 600 are arrays ofelectrical contacts 612 to which similarly-oriented arrays of electrical contacts provided by theZIF connectors 336 electrically couple. Note that, inFIG. 6 , each array ofelectrical contacts 612 is shown as a single rectangle representing the many electrical contacts of thearray 612. In reality, each rectangle may comprise hundreds of individual electrical contacts. For example, in some embodiments, each array ofelectrical contacts 612 may comprise 418 contacts with an approximate 1 mm×1 mm pitch (though more or less contacts could be provided, with a pitch that is larger or smaller than 1 mm×1 mm). - Positioned at opposite ends of each array of
electrical contacts 612 are first and second latching pins 614, 616, each of which may, in one embodiment, have a generally mushroom-like shape. As explained in more detail later in this description, eachZIF connector 336 comprises a “ZIF connector to DUT clamping mechanism” that engages a corresponding pair of the latching pins 614, 616. When the clamping mechanism is placed in its clamping mode, the clamping mechanism 1) exerts a first set of orthogonal forces to theprobe card 600 by pulling the latching pins 614, 616 away from thesurface 602 of theprobe card 602, and 2) applies a second orthogonal force to theprobe card 600 by pressing a DUT interface 334 (including its ZIF connector 336) against theprobe card 600. When fully clamped, the orthogonal force applied to theprobe card 600 by aDUT interface 334 is equal to (or at least substantially equal to) the set of orthogonal forces applied to theprobe card 600 by its “ZIF connector to DUT clamping mechanism” pulling the latching pins 614, 616 away from thesurface 602 of theprobe card 600. Thus, the clamping of eachZIF connector 336 to theprobe card 600 exerts a net zero force (or close to net zero force) on theprobe card 600. As a result, deflection of thesurface 602 of theprobe card 600 is minimized. Another advantage of the ZIF connector to DUT clamping mechanism is that it does not require any DUT connectors to be installed on theprobe card 600. -
FIG. 7 illustrates theprobe card 600 after it has been positioned on the probecard receiving platform 308. Typically, a wafer is positioned in the area of theprobe card 600 denoted by the diameter “x”.FIG. 7 also illustrates how thechassis 300 may be coupled to atest head 700 of a test system. -
FIG. 8 illustrates a schematic plan view of thechassis 300, along with thetest electronics assemblies 302 andDUT interfaces 334 installed thereon. Also shown are a plurality oftest electronics assemblies 800 in the test head on which thechassis 300 is mounted. The plurality oftest electronics assemblies 302 may be respectively and electrically coupled to theelectronics assemblies 800. -
FIG. 9 illustrates the apparatus shown inFIG. 4 , after a plurality of additionaltest electronics assemblies 900 have been installed on thechassis 300, in between thetest electronics assemblies 302 shown inFIG. 4 . Note that the DUT interfaces 902 of the additional test electronics assemblies 900 (including their ZIF connectors 904) form a second ring of DUT interfaces 902 (and ZIF connectors 904), concentric with and exterior to the ring of DUT interfaces 334 (and ZIF connectors 336) formed by the DUT interfaces 334 of thetest electronics assemblies 302 shown inFIG. 4 .FIG. 10 provides an exploded view of the probecard receiving platform 308 and concentric rings ofDUT interfaces 334, 902 (andZIF connectors 336, 904). -
FIG. 11 illustrates anexemplary probe card 1100, and in particular, thesurface 1102 of theprobe card 1100 that mates with the DUT interfaces 334, 902 (and theirrespective ZIF connectors 336, 904) shown inFIGS. 9 & 10 . Attached to thesurface 1102 of theprobe card 1100 is astiffening ring 1104. Formed in thestiffening ring 1104 are theholes rods FIG. 3 ). Patterned on thesurface 1102 of theprobe card 1100 are arrays ofelectrical contacts ZIF connectors FIG. 11 , each array ofelectrical contacts array - In contrast to the arrays of
electrical contacts 612 shown inFIG. 6 , the arrays ofelectrical contacts FIG. 11 are positioned along the perimeters of first and second concentric rings—for mating withrespective DUT interfaces FIGS. 9 & 10 . Positioned at opposite ends of each array ofelectrical contacts pins ZIF connector -
FIG. 12 illustrates a schematic plan view of thechassis 300 shown inFIG. 7 , after it has been upgraded to include the additionaltest electronics assemblies 900 and corresponding DUT interfaces 902 shown inFIG. 9 . Also shown are additionalelectronic assemblies 1200 in the test head on which thechassis 300 is mounted. The additionaltest electronics assemblies 900 may be coupled to the additionalelectronic assemblies 1200. - Although
FIGS. 9-12 show first and second subsets ofDUT interfaces DUT interfaces DUT interfaces - As one can appreciate after reading the above disclosure, the construction of the
chassis 300 shown inFIG. 3 , coupled with the modular nature of thetest electronics assemblies FIGS. 4 & 9 , enables the I/O capacity of a “test electronics to DUT interface” to be doubled in a modular fashion. Doubling the I/O capacity does, however, require the use of a largerdiameter probe card 1100, whichprobe card 1100 provides arrays ofelectrical contacts probe card 600 accepted by the apparatus shown inFIG. 4 may be 450 millimeters (mm), and the diameter of theprobe card 1100 accepted by the apparatus shown inFIG. 9 may be 560 mm. -
FIGS. 13 & 14 illustrate respective exploded views of the DUT interfaces 334, 902 and ZIF connector arrangements of 1) one of thetest electronics assemblies 302 shown inFIG. 4 , and 2) one of the additionaltest electronics assemblies 900 shown inFIG. 9 . For purposes of this disclosure, the only difference between theFIG. 13 andFIG. 14 test electronics assemblies platforms respective ZIF connectors platform 1300 shown inFIG. 13 is configured to position itsZIF connectors 336 in the inner ring of ZIF connectors on the chassis 300 (seeFIG. 9 ), and theplatform 1400 shown inFIG. 14 is configured to position itsZIF connectors 904 in the outer ring of ZIF connectors on thechassis 300. - Given the similarities of what is shown in
FIGS. 13 & 14 , only what is shown inFIG. 13 is described in further detail. One of ordinary skill in the art will readily understand how the description ofFIG. 13 applies to what is shown inFIG. 14 . That said,FIG. 13 shows thetest electronics assembly 302, itswater block 324, atest electronics board water block 324, and one of the I/O connectors 330 on thetest electronics board 326. Also shown is a pair ofpaddle board PCBs O connector 330, and an insulating bolsterplate 1308 and twoscrews water block 324, clamp thePCBs O connector 330. How thePCBs O connector 330 will be described in more detail later in this description. -
FIG. 13 also provides a detailed view of the DUT interfaces 334 positioned on theplatform 1300, whichplatform 1300 is mounted on thewater block 324. In addition to aZIF connector 336 having a “ZIF connector to DUT clamping mechanism” integrated therewith, eachDUT interface 334 comprises aDUT interposer 334 that provides a good quality connection between electrical contacts on theZIF connector 336 and aprobe card 600. A pair of alignment pins, includingpin 1314, is attached to the housing or frame of eachZIF connector 336.FIG. 13 also shows the latching pins 614, 616 of a probe card, aligned with the alignment pins. For example, latchingpin 616 is aligned with, and receives,alignment pin 1314. -
FIG. 15 illustrates, in block form, an exemplary “test electronics to DUT interface” 1500 for electrically coupling one of thetest electronics assemblies FIG. 13 or 14 to a DUT. In the wafer sort application described so far, the test electronics toDUT interface 1500 couples atest electronics assembly 302 to a plurality of DUTs on a wafer, via aprobe card interface 1500 comprises atest electronics interface 1502, aDUT interface 1504, and ameans 1506 for coupling the test electronics andDUT interfaces means 1506 for coupling the test electronics andDUT interfaces means 1506 for coupling the test electronics andDUT interfaces -
FIGS. 16 & 17 illustrate an exemplary moredetailed implementation 1600 of the test electronics toDUT interface 1500 shown inFIG. 15 . In the exemplary implementation, the test electronics interface 1502 comprises at least one printed circuit board (PCB) and at least one test electronics interposer. However, by way of example,FIGS. 16 & 17 show an interface comprised of first andsecond PCBs 1602 and first and second test electronics interposers 1604. To increase the density of signal routes through thePCBs 1602, each PCB may be a multi-layer PCB. To enable higher quality signal transmissions, electrical paths on (or in) thePCBs 1602 may be constructed as controlled impedance transmission line paths, such as stripline paths. - Each of the test electronics interposers 1604 has a first side and a second side. The first side of each
test electronics interposer 1604 has a first plurality of electrical contacts thereon. The first plurality of electrical contacts is electrically coupled to a respective one of thePCBs 1602 The second side of eachtest electronics interposer 1604 has a second plurality of electrical contacts thereon. The second plurality of contacts provides an electrical coupling to atest electronics assembly - In
FIG. 16 , theDUT interface 1504 comprises aflex circuit 1606 and aDUT interposer 1608. Theflex circuit 1606 has 1) a plurality of electrical contacts on a surface thereof, and 2) a plurality of electrical signal paths that are coupled to the plurality of electrical contacts. To achieve maximum density, the electrical signal paths may be formed on both sides of theflex circuit 1606, and theflex circuit 1606 may be a multi-layer flex circuit. To enable higher quality signal transmissions, the electrical signal paths may be constructed as controlled impedance transmission line paths, such as stripline paths. TheDUT interposer 1608 has a first side and a second side. The first side of theDUT interposer 1608 has a first plurality of electrical contacts thereon. The first plurality of electrical contacts is coupled to the plurality of electrical contacts of theflex circuit 1606. The second side of theDUT interposer 1608 has a second plurality of electrical contacts thereon. The second plurality of electrical contacts is coupled to the first plurality of electrical contacts and provides an electrical coupling to a DUT (orprobe card 600 or 1100). - The
means 1506 for coupling the test electronics andDUT interfaces coaxial cables 1610, coupled between the first andsecond PCBs 1602 and the electrical signal paths of theflex circuit 1606. The first andsecond PCBs 1602 electrically couple the plurality ofcoaxial cables 1610 to the test electronics interposers 1604. Thecoaxial cables 1610 provide controlled impedance transmission line paths between thetest electronics interface 1502 and theDUT interface 1504. -
FIG. 17 illustrates how theflex circuit 1606 may be looped around a flex circuit form 1700 (which flex circuit form may in some cases be a compliant flex circuit form). Theflex circuit 1606 is looped around theflex circuit form 1700 with a first surface of theflex circuit 1606 facing theflex circuit form 1700. A second surface of theflex circuit 1606, opposite the first surface, has the plurality ofelectrical contacts 1702 that interface with theDUT interposer 1608 thereon. At least part of theflex circuit 1606 may be encased within aconnector housing 1708. In some embodiments, theconnector 1710 may be a ZIF connector having an integrated “ZIF connector to DUT clamping mechanism”. An exemplary operation of such a “ZIF connector to DUT damping mechanism” is described later in this description. in some cases, the ZIF connector to DUT clamping mechanism may comprise a pneumatically actuated clamping system, which system is pneumatically activated via air received through a tube or pipe 1712 (see,FIGS. 17-19 ). First and subsets of the plurality ofcoaxial cables flex circuit 1606. -
FIG. 19 illustrates the test electronics toDUT interface 1600 after having bent onesubset 1610 a of the coaxial cables to reveal the inside faces (and sets ofelectrical contacts 1900, 1902) of the first andsecond PCBs 1602 a, 1602 b. In one embodiment, each of thePCBs 1602 a, 1602 b may be coupled to 72 high speed pin electronics (PE) sub-channels on thetest electronics assembly PCB 1602 a or 1602 b may be coupled to, for example, 44 signals comprised of low speed control channels, utility channels, DC power supply lines, DC sense lines, and 132 ground returns. All of these signals/channels may, in turn, be routed from one of thePCBs 1602 a to theZIF connector 1710; and the other PCB 1602 b may route the same complement of signals to theZIF connector 1710. In this manner, eachPCB 1602 a, 1602b routes 116 signals plus 132 ground returns. The total number of signals routed to eachZIF connector 1710 is therefore 418, including 232 signals (116 from each PCB) and a reduced number of ground returns (i.e., 186 ground returns). However, the number of signals routed through aPCB 1602 a, 1602 b orZIF connector 1710 may vary, depending on the application. -
FIGS. 20 & 21 respectively illustrate how a plurality of the test electronics toDUT interfaces test electronics assembly ZIF connectors FIG. 20 illustrates how a plurality of test electronics toDUT interfaces test electronics assembly 302 andZIF connectors 336 shown inFIG. 13 ; andFIG. 21 illustrates how a plurality of test electronics toDUT interfaces test electronics assembly 900 andZIF connectors 904 shown inFIG. 14 . -
FIGS. 22-28 illustrate how the test electronics interface 1502 of the “test electronics to DUT interface” 1600 shown inFIGS. 17-19 may be coupled to atest electronics board 326 of one of thetest electronics assemblies 302 shown inFIG. 13 or 14. To begin,FIG. 22 illustrates a portion of abare water block 324 of one of thetest electronics assemblies 302. As shown, thewater block 324 may comprise ahandle 2200 for grabbing hold of thetest electronics assembly 1302. Thewater block 324 may also comprise a plurality ofholes water block 324, and a plurality ofpins water block 324. -
FIG. 23 illustrates the placement of twoinsulator pads water block 324. The use ofinsulator pads metallic water block 324. Each of theinsulator pads corresponding alignment pins water block 324. -
FIG. 24 illustrates how thefirst PCBs insulator pads PCBs insulator pads -
FIG. 25 illustrates the placement of test electronics interposers 2500, 2502 on thefirst PCBs insulator pads first PCBs portion 2600 of one of theinterposers 2502 is shown inFIG. 26 . By way of example, the electrical contacts of the interposer may comprise a plurality of fixed or spring-loadedcontacts 2602, 2604 (e.g., pins). In one embodiment, theelectrical contacts first PCBs interposers test electronics board 326. -
FIG. 27 illustrates the placement of atest electronics board 326 on the test electronics interposers 2500, 2502, as well as the placement of additional test electronics interposers 2700, 2702 on thetest electronics board 326. Of note, each of the four test electronics interposers 2500, 2502, 2700, 2702 comprises a plurality of electrical contacts that mates with a corresponding plurality of electrical contacts on thetest electronics board 326. -
FIG. 28 illustrates the placement of thesecond PCBs plates second PCBs holes FIGS. 23-28 , and fastened to theholes water block 324. Theholes 2202. 2204, 2206, 2208 in thewater block 324 are shown inFIG. 22 . - Having described how a
test electronics interface 1502 of the “test electronics to DUT interface” 1600 may be coupled to atest electronics board 326, a description of how theDUT interface 1504 of the “test electronics to DUT interface” 1600 may be coupled to aprobe card 600 is now provided. -
FIG. 29 provides a perspective view of the DUT interface shown inFIGS. 18 & 19 . Thee DUT interface comprises a ZIF connector and a DUT interposer. The ZIF connector comprises a flex circuit that is looped around a compliant flex circuit form, as best shown inFIG. 17 . A portion of the flex circuit near a distal end of the compliant flex circuit form is visible inFIG. 29 . However, most of the flex circuit is obscured inFIG. 29 by the ZIF connector housing, and by a DUT interposer having contacts that are electrically coupled to a electrical contacts on the outer surface of the flex circuit. - Coupled to the connector housing is a pair of alignment pins. The alignment pins are sized and positioned to fit into axial holes in a pair of latching pins on a probe card. To facilitate seating of the alignment pins in the holes, the ends of the alignment pins may be beveled or rounded. Similarly, the caps of the latching pins may have beveled or rounded detente therein. Another pair of alignment pins is provided on the DUT interposer, and the ends of these alignment pins may also be beveled or rounded, When positioning a probe card adjacent the DUT interface, the holes in the latching pins are aligned with the longer alignment pins of the connector housing, and the probe card is moved toward the DUT interface. See,
FIG. 30 . Subsequently, the alignment pins of the DUT interposer mate with corresponding holes in the surface of the probe card. In some cases, the alignment pins of the DUT interposer may not mate with the holes in the probe card until the DUT interface is actually clamped to the probe card. -
FIG. 30 also shows how the DUT interposer may be affixed to the DUT interface as a whole. That is, a mounting plate may be positioned adjacent the compliant flex circuit form, opposite a side of the form that abuts the flex circuit. The mounting plate may then be screwed to the DUT interposer (or vice versa). -
FIGS. 31 & 32 illustrate an exemplary operation of a ZIF connector to DUT clamping mechanism. As shown by the hashed box, the clamping mechanism may be primarily contained within the connector housing. In the exemplary embodiment shown, the clamping mechanism is actuated pneumatically, by regulating the air pressure supplied to the clamping mechanism via a tube or pipe. In other embodiments, the clamping mechanism could be actuated hydraulically or electrically, for example. - In one embodiment, an increase in positive air pressure applied to the clamping mechanism, above a threshold, causes the clamping mechanism to release the DUT interface from the probe card, allowing the DUT interface to move away from the probe card. See,
FIG. 31 . This may result in a small gap being formed between the DUT interface and the probe card, or may simply result in a loose abutment of the DUT interface to the probe card. When the air pressure applied to the clamping mechanism is released, or when it falls below a threshold, the clamping mechanism pulls on each of the latch pins, thereby exerting a first set of orthogonal forces in a direction away from the probe card. However, as the DUT interface is pressed against the probe card, the DUT interface exerts a second orthogonal force on the probe card, in a direction opposite to the first set of orthogonal forces. Given that the opposed and localized orthogonal forces offset each other, the DUT interface, when clamped to the probe card, applies a net zero force (or substantially net zero force) to the probe card. When many of the DUT interfaces are clamped to a probe card, such as the probe card shown inFIG. 5 orFIG. 10 , the offsetting of each DUT interface's localized orthogonal forces means that no (or little) net force is applied to the probe card. As a result, deflection of the probe card is minimized, and the electrical contacts on a wafer can be more reliably coupled with corresponding electrical contacts on the probe card. - In some embodiments of the clamping mechanism described with respect to
FIGS. 31 & 32 , the clamping mechanism may engage and pull other types of latch pins (or other types of features) as it moves a DUT interface orthogonally towards a probe card or DUT. - Some embodiments of the test electronics to DUT interfaces disclosed herein have been used to provide about 30% more signals in half the area of previous interface solutions, providing a more than 2× increase in signal density. In addition, the test electronics to DUT interfaces disclosed herein can typically be produced at a much lower cost than previous interface solutions.
- Although the description provided herein has generally focused on a wafer sort application, the test electronics to DUT interfaces described herein may be employed in various test and interface applications, including other automated test equipment (ATE) applications, such as engineering and final test applications.
- A method of coupling a test electronics to DUT interface between a test electronics assembly and a probe card (or DUT) may comprise: 1) providing a test electronics to DUT interface comprising a test electronics interface that is electrically coupled to a DUT interface; 2) coupling the test electronics interface to a test electronics assembly (e.g., via at least one PCB and test electronics interposer of the test electronics interface); and 3) coupling the DUT interface to a probe card or DUT by causing a ZIF connector to DUT clamping mechanism of the DUT interface to pull on one or more features of the probe card or DUT, thereby exerting at least one force (i.e., a pulling force) that is directed orthogonally away from the probe card or DUT; wherein 4) as the DUT interface is pressed against (or coupled to) the probe card or DUT, an orthogonal force is applied toward the probe card or DUT, the orthogonal forces offsetting one another.
- A method of configuring a test system may comprise installing test electronics assemblies of a first type in the test system, or installing test electronics of first and second types in the test system; the assemblies of the first type being coupled to a chassis to position their DUT interfaces along the perimeter of a first shape, and the assemblies of the second type being coupled to the chassis to position their DUT interfaces along the perimeter of a second shape, concentric with the first shape.
- A method of configuring a test system may also comprise providing test electronics assemblies having ZIF connectors mounted thereon, the test electronics assemblies including i) a first type of test electronics assembly having ZIF connectors mounted thereon in first positions, and ii) a second type of test electronics assembly having ZIF connectors mounted thereon in second positions, the second positions differing from the first positions. A first test system may then be configured by installing a plurality of the first type of test electronics assembly, but none of the second type of test electronics assembly, in the first test system. Installing only the first type of test electronics assembly in the first test system positions the ZIF connectors of the first type of test electronics assembly along a perimeter of a first shape. A second test system may be configured by installing a plurality of the first type of test electronics assembly and a plurality of the second type of test electronics assembly in the second test system. Installing both the first type of test electronics assembly and the second type of test electronics assembly in the second test system positions the ZIF connectors of the first type of test electronics assembly along a perimeter of a first shape and positions the ZIF connectors of the second type of test electronics assembly along a perimeter of a second shape.
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US12/626,506 Active 2031-01-12 US8354853B2 (en) | 2008-11-25 | 2009-11-25 | Test electronics to device under test interfaces, and methods and apparatus using same |
US13/742,183 Abandoned US20130135002A1 (en) | 2008-11-25 | 2013-01-15 | Test electronics to device under test interfaces, and methods and apparatus using same |
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US12/626,506 Active 2031-01-12 US8354853B2 (en) | 2008-11-25 | 2009-11-25 | Test electronics to device under test interfaces, and methods and apparatus using same |
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US (2) | US8354853B2 (en) |
TW (1) | TWI511217B (en) |
WO (1) | WO2010062967A2 (en) |
Cited By (5)
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WO2015200066A1 (en) * | 2014-06-26 | 2015-12-30 | Teradyne, Inc. | Structure for transmitting signals in an application space between a device under test and test electronics |
US20160209443A1 (en) * | 2015-01-16 | 2016-07-21 | Modus Test Automation, LLC | Quick change small footprint testing system and method of use |
US20170192046A1 (en) * | 2015-01-16 | 2017-07-06 | Modus Test Automation, LLC | Force deflection and resistance testing system and method of use |
US9977052B2 (en) | 2016-10-04 | 2018-05-22 | Teradyne, Inc. | Test fixture |
US11385277B2 (en) | 2019-08-05 | 2022-07-12 | Modus Test, Llc | Modular electronic testing system with flexible test PCB format |
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JP4491513B1 (en) * | 2009-02-12 | 2010-06-30 | 株式会社アドバンテスト | Semiconductor wafer testing equipment |
US8749261B2 (en) * | 2011-02-11 | 2014-06-10 | Micron Technology, Inc. | Interfaces having a plurality of connector assemblies |
US9063170B2 (en) * | 2012-12-27 | 2015-06-23 | Teradyne, Inc. | Interface for a test system |
US9372227B2 (en) * | 2013-03-11 | 2016-06-21 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integrated circuit test system and method |
DE102016114144A1 (en) * | 2016-08-01 | 2018-02-01 | Endress+Hauser Flowtec Ag | Test system for testing electrical connections between components and a printed circuit board |
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US20160209443A1 (en) * | 2015-01-16 | 2016-07-21 | Modus Test Automation, LLC | Quick change small footprint testing system and method of use |
US20170192046A1 (en) * | 2015-01-16 | 2017-07-06 | Modus Test Automation, LLC | Force deflection and resistance testing system and method of use |
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US11385277B2 (en) | 2019-08-05 | 2022-07-12 | Modus Test, Llc | Modular electronic testing system with flexible test PCB format |
Also Published As
Publication number | Publication date |
---|---|
TW201030873A (en) | 2010-08-16 |
WO2010062967A3 (en) | 2010-08-26 |
US20100134134A1 (en) | 2010-06-03 |
US8354853B2 (en) | 2013-01-15 |
TWI511217B (en) | 2015-12-01 |
WO2010062967A2 (en) | 2010-06-03 |
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