US20140300001A1 - Printed circuit board and manufacturing method thereof, and semiconductor package including the printed circuit board - Google Patents

Printed circuit board and manufacturing method thereof, and semiconductor package including the printed circuit board Download PDF

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Publication number
US20140300001A1
US20140300001A1 US14/068,628 US201314068628A US2014300001A1 US 20140300001 A1 US20140300001 A1 US 20140300001A1 US 201314068628 A US201314068628 A US 201314068628A US 2014300001 A1 US2014300001 A1 US 2014300001A1
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US
United States
Prior art keywords
cavity
base substrate
circuit board
printed circuit
semiconductor package
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/068,628
Inventor
Seong Ryul Choi
Suk Chang HONG
Sang Kab PARK
Kwang Seop Youm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electro Mechanics Co Ltd
Original Assignee
Samsung Electro Mechanics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mechanics Co Ltd filed Critical Samsung Electro Mechanics Co Ltd
Assigned to SAMSUNG ELECTRO-MECHANICS CO., LTD. reassignment SAMSUNG ELECTRO-MECHANICS CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHOI, SEONG RYUL, HONG, SUK CHANG, PARK, SANG KAB, YOUM, KWANG SEOP
Publication of US20140300001A1 publication Critical patent/US20140300001A1/en
Priority to US15/014,059 priority Critical patent/US10342135B2/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/11—Printed elements for providing electric connections to or between printed circuits
    • H05K1/111—Pads for surface mounting, e.g. lay-out
    • H05K1/112—Pads for surface mounting, e.g. lay-out directly combined with via connections
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/18—Printed circuits structurally associated with non-printed electric components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
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    • H01L21/486—Via connections through the substrate with or without pins
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    • H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
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    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
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    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
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    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
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    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
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    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10431—Details of mounted components
    • H05K2201/10439—Position of a single component
    • H05K2201/10492—Electrically connected to another device
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10431—Details of mounted components
    • H05K2201/10507—Involving several components
    • H05K2201/10515—Stacked components
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10734—Ball grid array [BGA]; Bump grid array
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base
    • Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base

Definitions

  • the present invention relates to a printed circuit board (PCB), a manufacturing method thereof, and a semiconductor package including the printed circuit board. More specifically, the present invention relates to a printed circuit board in which a cavity for mounting an electronic component is formed on its upper surface so that a gap between upper and lower packages is obtained at the time of manufacturing a semiconductor package having a package on package (PoP) structure.
  • PCB printed circuit board
  • PoP package on package
  • a electronic component 122 e.g., AP chip
  • the ball pitch is reduced in order to increase the number of I/Os of the upper semiconductor package 110 , it is difficult to have a sufficient gap between the upper semiconductor package and the lower semiconductor package.
  • an electronic component 222 e.g., a IC chip
  • a PCB 221 As shown in FIG. 2 , a structure has been proposed in which an electronic component 222 (e.g., a IC chip) is embedded in a PCB 221 as shown in FIG. 2 .
  • an electronic component 222 e.g., a IC chip
  • PCB 221 As shown in FIG. 2 , reference numerals 210 and 220 denote the upper semiconductor and the lower semiconductor, respectively.
  • Patent Document 1 Korean Patent Laid-Open Publication No. 10-1997-7007576
  • Patent Document 2 Japanese Patent Laid-Open Publication No. 2005-512335
  • An object of the present invention is to provide a printed circuit board in which a cavity having a predetermined depth is formed in a base substrate of the printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure, a manufacturing method thereof, and a semiconductor package including the printed circuit board.
  • a printed circuit board including: a base substrate including a plurality of circuit patterns; a cavity formed above the base substrate; a pad embedded in the base substrate and being exposed through the substrate bottom surface of the cavity; and an electronic component mounted in the cavity and electrically connected to the pad.
  • top surfaces of the pads and the bottom surface of the cavity may be in the same plane.
  • An alignment pattern for forming the cavity may be formed at a lower portion of a sidewall of the cavity
  • the electronic component may include external terminals and may be mounted in a face-down position in which the external terminals face the pads.
  • the printed circuit board may further include a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pad.
  • a manufacturing method of a printed circuit board including: forming a first protective layer for protecting circuits on a predetermined region of an upper surface of a base substrate; forming insulating layers on the upper surface of the base substrate on which the first protective layer is formed, and on a lower surface of the base substrate; forming vias in the upper insulating layer and in the lower insulating layer and then forming circuits on an upper surface of the upper insulating layer and a lower surface of the lower insulating layer; forming second protective layers for protecting circuits gaps between the circuit patterns formed on the surfaces of the upper and lower insulating layers; and forming a cavity for mounting the electronic component in the upper insulating layer at a position corresponding to the first protective layer 601 .
  • the base substrate may have circuits formed on the upper surface, the lower surface and an inside thereof, and may have a via connecting the circuits on the upper surface and on the lower surface to each other.
  • the first protective layer embedded in the upper insulating layer may be removed so that the top surfaces of the circuit patterns exposed through the bottom surface of the cavity and the bottom surface are in the same plane with no difference in level.
  • a part of the first protective layer may remain at a lower portion of a sidewall of the cavity.
  • a semiconductor package having a PoP structure of which an upper semiconductor package is stacked on an lower semiconductor package comprising: a printed circuit board having a cavity of a predetermined size formed at a predetermined region of its upper surface; and an electronic component mounted in the cavity, wherein the printed circuit board includes a base substrate including a plurality of circuit patterns; a cavity formed above the base substrate; a pad embedded in the base substrate and being exposed through the substrate bottom surface of the cavity.
  • the top surfaces of the pads and the bottom surface of the cavity may be in the same plane.
  • An alignment pattern for forming the cavity may be formed at a lower portion of a sidewall of the cavity
  • the electronic component may include external terminals and may be mounted in a face-down position in which the external terminals face the pads.
  • the printed circuit board may further include a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pad.
  • FIG. 1 is a view illustrating an example of a typical semiconductor package having a PoP structure
  • FIG. 2 is a view illustrating another example of a typical semiconductor package having a PoP structure
  • FIG. 3 is a cross-sectional view showing a structure of a printed circuit board according to an exemplary embodiment of the present invention
  • FIG. 4 is a view of a semiconductor package including the printed circuit board according to the exemplary embodiment shown in FIG. 3 ;
  • FIG. 5 is a flowchart illustrating a manufacturing method of the printed circuit board according to the exemplary embodiment of the present invention.
  • FIGS. 6A to 6E are views sequentially illustrating the manufacturing processes according to the manufacturing method of the printed circuit board according to the exemplary embodiment of the present invention.
  • FIGS. 7A and 7B are partially enlarged views of portion A of FIG. 6 .
  • FIG. 3 is a view showing a structure of a printed circuit board according to an exemplary embodiment of the present invention.
  • the printed circuit board 320 ′ is configured to include a base substrate 321 , a cavity 321 c, pads 322 p and an electronic component 330 .
  • the printed circuit board 320 ′ including the electronic component 330 is substantially identical to a lower semiconductor package 320 of a semiconductor package to be described below.
  • the base substrate 321 includes a plurality of circuit patterns 322 , 606 and 607 .
  • the base substrate 321 may have a single layer or multi layer structure. In the exemplary embodiment, the base substrate 321 of a multi layer structure will be described. Further, the circuit patterns 322 , 606 and 607 are formed on at least one of the upper surface and the lower surface, or the inside of the base substrate 321 . As shown in the drawing, in the base substrate 321 employed in the present invention, the circuit patterns 322 , 606 and 607 are formed on all of the upper and lower surfaces and the inside of the base substrate 321 .
  • the cavity 321 c is formed above the base substrate 321 .
  • the cavity 321 c serves to mount an electronic component 330 (e.g., a semiconductor chip) therein.
  • an alignment pattern 601 may be formed on the lower portion of the sidewall of the cavity 321 c for forming the cavity (see FIG. 7A ).
  • the alignment pattern 601 is the remaining part of the protective layer 601 during the manufacturing process of the printed circuit board to be described below. The detailed description of which will be given below.
  • the dimensions of the cavity 321 c that is, the width and depth are variable depending on the width and depth of an electronic component 330 mounted therein and on the manufacturing specifications of a semiconductor package to be described below.
  • the pads 322 p are exposed through the substrate bottom surface of the cavity 321 c and are embedded in the base substrate 321 .
  • the pads 322 p exposed through the bottom surface of the substrate are the top surfaces of the respective circuit patterns 322 .
  • the upper surfaces of the pads 322 p and the bottom surface of the cavity 321 c are in the same plane. The detailed description of which will be given below.
  • the electronic component 330 is mounted in the cavity 321 c and is electrically connected to the pads 322 p.
  • the electronic component 330 includes external terminals and is mounted in a face-down position in which the external terminals face the pads 322 p.
  • the printed circuit board according to the exemplary embodiment the present invention is preferably formed in the inside of the base substrate 321 , and may further include vias 323 , 604 and 605 electrically connecting the circuit patterns 322 , 606 and 607 to each other and the pads 322 p to the circuit patterns 322 , 606 and 607 .
  • FIG. 4 which illustrates a semiconductor package will be described after FIG. 5 and FIGS. 6A to 6E are described, which relate to a manufacturing method of the printed circuit board.
  • FIG. 5 is a flowchart illustrating a manufacturing method of the printed circuit board according to the exemplary embodiment
  • FIGS. 6A to 6E are views sequentially illustrating the manufacturing processes of the manufacturing method of the printed circuit board according to the present invention.
  • a first protective layer 601 for protecting circuits is formed on a predetermined region of an upper surface of a base substrate 321 (S 501 , FIG. 6A ).
  • the base substrate 321 may have circuit patterns 322 formed on its upper and lower surfaces and its inside, and vias 323 connecting the upper and lower circuit patterns 322 formed therein.
  • the first protective layer 601 may be formed by removing the protective layer formed on both surfaces of a detach core used in the early process, leaving only a predetermined region for forming the cavity 321 c to be described. Alternatively, the first protective layer 601 may be formed only on a predetermined region where the cavity 321 c is to be formed, including the circuit patterns on the upper surface of the base substrate 321 and adjacent insulating portion.
  • a single metal or an alloy may be used. In some cases, non-metal material may also be used.
  • insulating layers 602 and 603 are formed on the upper surface where the first protective layer 601 is formed and on the lower surface, respectively (S 502 , FIG. 6B ).
  • synthetic resins epoxy resins, polyester resins, urea resins, phenolic resins
  • vias 604 and 605 are formed through the upper and lower insulators 602 and 603 , and then circuits 606 and 607 are formed on the upper surface of the upper insulator 602 and on the lower surface of the lower insulator 603 , respectively (S 503 , FIG. 6C ).
  • the vias 604 and 605 may be formed by forming holes in the upper and lower insulating layers 602 and 603 using a laser drill and then filling the holes with metal material (e.g., copper) by electrical plating.
  • the circuits 606 and 607 formed on the upper and lower surfaces of the insulating layers 602 and 603 may be formed by performing photolithography using a mask.
  • second protective layers 608 and 609 for protecting circuits may be formed, at the gaps between the circuits 606 and 607 , respectively (S 504 , FIG. 6D ).
  • solder resist may be used as the material for the second protective layers 608 and 609 .
  • photolithography using a mask may be used for forming the second protective layers 608 and 609 .
  • a cavity 321 c for mounting an electronic component 330 (shown in FIG. 3 ) is formed at a position in the upper insulating layer 602 where the first protective layer 601 has been formed (S 505 , FIG. 6E ). Any one of wet etching and dry etching, preferably dry etching may be used for forming the cavity 321 c.
  • the first protective layer 601 embedded in the upper insulating layer 602 is also removed, such that the top surfaces of the circuit patterns 322 exposed through the bottom of the cavity 321 c are in the same plane with the bottom surface of the cavity 321 c with no difference in level.
  • the plane of the circuits 322 exposed through the bottom of the cavity 321 c where the electronic component 330 is mounted is flat with the plane of the bottom of the cavity 321 c, an insulation distance may be formed high so that the electronic component 330 may be inserted into the cavity 321 c. Accordingly, it is easy to obtain the depth of the cavity 321 c with relatively wide ranges (e.g., 40 to 150 ⁇ m) in the upper insulating layer 602 .
  • a part of the first protective layer 601 may remain at the lower portion of the sidewall of the cavity 321 c.
  • the remaining part of the first protective layer 601 may be used as an alignment mark to allow the electronic component 330 to be accurately mounted when the electronic component 330 is mounted in the cavity 321 c in the process of manufacturing a semiconductor package.
  • the first protective layer 601 may be completely removed when the cavity 321 c is formed as shown in FIG. 7B .
  • FIG. 4 is a view of a semiconductor package including the printed circuit board according to the exemplary embodiment shown in FIG. 3 .
  • the semiconductor package including the printed circuit board according to the exemplary embodiment of the present invention has a PoP structure that an upper semiconductor package 310 is stacked on an lower semiconductor package 320 .
  • the lower semiconductor package 320 includes a printed circuit board 320 ′ having a cavity 321 c of a predetermined size formed on a part of the upper surface, and an electronic component 330 mounted in the cavity 321 c.
  • the printed circuit board 320 ′ is the one described above with reference to FIG. 3 .
  • the printed circuit board 320 ′ includes the base substrate 321 , the cavity 321 c and the pads 322 p.
  • the base substrate 321 includes a plurality of circuit patterns 322 , 606 and 607 .
  • the base substrate 321 may have a single layer or multi layer structure.
  • the circuit patterns 322 , 606 and 607 are formed on at least one of the upper surface and the lower surface, or the inside of the base substrate 321 .
  • the circuit patterns 322 , 606 and 607 are formed on all of the upper and lower surfaces and the inside of the base substrate 321 .
  • the cavity 321 c is formed above the base substrate 321 .
  • the cavity 321 c is formed to mount an electronic component 330 (e.g., a semiconductor chip) therein.
  • an alignment pattern 601 may be formed on the lower portion of the sidewall of the cavity 321 c for forming the cavity.
  • the alignment pattern 601 is the remaining part of the protective layer 601 during the manufacturing process of the printed circuit board.
  • the dimensions of the cavity 321 c, that is, the width and depth are variable depending on the width and depth of an electronic component 330 mounted therein and on the manufacturing specifications of a semiconductor package to be described below.
  • the pads 322 p are exposed through the substrate bottom surface of the cavity 321 c and embedded in the base substrate 321 .
  • the pads 322 p exposed through the bottom surface of the substrate are the top surfaces of the respective circuit patterns 322 .
  • the upper surfaces of the pads 322 p and the bottom surface of the cavity 321 c are in the same plane.
  • the electronic component 330 is mounted in the cavity 321 c and electrically connected to the pads 322 p.
  • the electronic component 330 includes external terminals and is mounted in a face-down position in which the external terminals face the pads 322 p.
  • the printed circuit board 320 ′ is preferably formed in the inside of the base substrate 321 , and may further include vias 323 , 604 and 605 electrically connecting the circuit patterns 322 , 606 and 607 to each other and the pads 322 p to the circuit patterns 322 , 606 and 607 .
  • a cavity having a predetermined depth is formed in a base substrate of a printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure.
  • a cavity having a predetermined depth is formed in a base substrate of a printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure.

Abstract

A printed circuit board, a manufacturing method thereof, and a semiconductor package including the printed circuit board. The printed circuit board includes a base substrate including a plurality of circuit patterns, a cavity formed above the base substrate, a pad embedded in the base substrate and being exposed through the substrate bottom surface of the cavity, and an electronic component mounted in the cavity and electrically connected to the pad. A cavity having a predetermined depth is formed in a base substrate of a printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure.

Description

    CROSS REFERENCE(S) TO RELATED APPLICATIONS
  • This application claims the benefit under 35 U.S.C. Section 119 of Korean Patent Application Serial No. 10-2013-0038654, entitled “Printed Circuit Board and Manufacturing Method thereof, and Semiconductor Package including the Printed Circuit Board” filed on Apr. 9, 2013, which is hereby incorporated by reference in its entirety into this application.
    • BACKGROUND OF THE INVENTION
  • 1. Technical Field
  • The present invention relates to a printed circuit board (PCB), a manufacturing method thereof, and a semiconductor package including the printed circuit board. More specifically, the present invention relates to a printed circuit board in which a cavity for mounting an electronic component is formed on its upper surface so that a gap between upper and lower packages is obtained at the time of manufacturing a semiconductor package having a package on package (PoP) structure.
  • 2. Description of the Related Art
  • Recently, as mobile products become thinned and highly functional, the number of inputs/outputs (I/O) of flip chips employed in the mobile products has been increased accordingly. Further, as the number of the I/Os increases, it is required to provide fine pitch solder bumps on a PCB.
  • As shown in FIG. 1, in a typical semiconductor package having a PoP structure, a electronic component 122 (e.g., AP chip) is mounted on the upper surface of the PCB 121 of the lower semiconductor package. In this structure, if the ball pitch is reduced in order to increase the number of I/Os of the upper semiconductor package 110, it is difficult to have a sufficient gap between the upper semiconductor package and the lower semiconductor package.
  • To cope with this, a structure has been proposed in which an electronic component 222 (e.g., a IC chip) is embedded in a PCB 221 as shown in FIG. 2. However, in this structure, costly IC chips in PCBs failed during the manufacturing process are discarded together with the boards, thereby causing the manufacturing cost to be increased. In FIG. 2, reference numerals 210 and 220 denote the upper semiconductor and the lower semiconductor, respectively.
    • RELATED ART DOCUMENTS Patent Documents
  • (Patent Document 1) Korean Patent Laid-Open Publication No. 10-1997-7007576
  • (Patent Document 2) Japanese Patent Laid-Open Publication No. 2005-512335
    • SUMMARY OF THE INVENTION
  • An object of the present invention is to provide a printed circuit board in which a cavity having a predetermined depth is formed in a base substrate of the printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure, a manufacturing method thereof, and a semiconductor package including the printed circuit board.
  • According to an exemplary embodiment of the present invention, there is provided a printed circuit board, including: a base substrate including a plurality of circuit patterns; a cavity formed above the base substrate; a pad embedded in the base substrate and being exposed through the substrate bottom surface of the cavity; and an electronic component mounted in the cavity and electrically connected to the pad.
  • The top surfaces of the pads and the bottom surface of the cavity may be in the same plane.
  • An alignment pattern for forming the cavity may be formed at a lower portion of a sidewall of the cavity
  • The electronic component may include external terminals and may be mounted in a face-down position in which the external terminals face the pads.
  • The printed circuit board may further include a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pad.
  • According to another exemplary embodiment of the present invention, there is provided a manufacturing method of a printed circuit board, the method including: forming a first protective layer for protecting circuits on a predetermined region of an upper surface of a base substrate; forming insulating layers on the upper surface of the base substrate on which the first protective layer is formed, and on a lower surface of the base substrate; forming vias in the upper insulating layer and in the lower insulating layer and then forming circuits on an upper surface of the upper insulating layer and a lower surface of the lower insulating layer; forming second protective layers for protecting circuits gaps between the circuit patterns formed on the surfaces of the upper and lower insulating layers; and forming a cavity for mounting the electronic component in the upper insulating layer at a position corresponding to the first protective layer 601.
  • The base substrate may have circuits formed on the upper surface, the lower surface and an inside thereof, and may have a via connecting the circuits on the upper surface and on the lower surface to each other.
  • In the forming of the cavity, the first protective layer embedded in the upper insulating layer may be removed so that the top surfaces of the circuit patterns exposed through the bottom surface of the cavity and the bottom surface are in the same plane with no difference in level.
  • Preferably, in the forming of the cavity, a part of the first protective layer may remain at a lower portion of a sidewall of the cavity.
  • According to yet another exemplary embodiment of the present invention, there is provided a semiconductor package having a PoP structure of which an upper semiconductor package is stacked on an lower semiconductor package, the lower semiconductor package comprising: a printed circuit board having a cavity of a predetermined size formed at a predetermined region of its upper surface; and an electronic component mounted in the cavity, wherein the printed circuit board includes a base substrate including a plurality of circuit patterns; a cavity formed above the base substrate; a pad embedded in the base substrate and being exposed through the substrate bottom surface of the cavity.
  • Preferably, the top surfaces of the pads and the bottom surface of the cavity may be in the same plane.
  • An alignment pattern for forming the cavity may be formed at a lower portion of a sidewall of the cavity
  • The electronic component may include external terminals and may be mounted in a face-down position in which the external terminals face the pads.
  • The printed circuit board may further include a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pad.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a view illustrating an example of a typical semiconductor package having a PoP structure;
  • FIG. 2 is a view illustrating another example of a typical semiconductor package having a PoP structure;
  • FIG. 3 is a cross-sectional view showing a structure of a printed circuit board according to an exemplary embodiment of the present invention;
  • FIG. 4 is a view of a semiconductor package including the printed circuit board according to the exemplary embodiment shown in FIG. 3;
  • FIG. 5 is a flowchart illustrating a manufacturing method of the printed circuit board according to the exemplary embodiment of the present invention;
  • FIGS. 6A to 6E are views sequentially illustrating the manufacturing processes according to the manufacturing method of the printed circuit board according to the exemplary embodiment of the present invention; and
  • FIGS. 7A and 7B are partially enlarged views of portion A of FIG. 6.
    •  DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Terms and words used in the present specification and claims are not to be construed as a general or dictionary meaning, but are to be construed as meaning and concepts meeting the technical ideas of the present invention based on a principle that the inventors can appropriately define the concepts of terms in order to describe their own inventions in the best mode.
  • Throughout the present specification, unless explicitly described to the contrary, “comprising” any components will be understood to imply the inclusion of other elements rather than the exclusion of any other elements. A term “part,” “module,” “device,” or the like, described in the specification means a unit of processing at least one function or operation and may be implemented by hardware or software or a combination of hardware and software.
  • Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
  • FIG. 3 is a view showing a structure of a printed circuit board according to an exemplary embodiment of the present invention.
  • Referring to FIG. 3, the printed circuit board 320′ according to the exemplary embodiment of the present invention is configured to include a base substrate 321, a cavity 321 c, pads 322 p and an electronic component 330. Here, the printed circuit board 320′ including the electronic component 330 is substantially identical to a lower semiconductor package 320 of a semiconductor package to be described below.
  • The base substrate 321 includes a plurality of circuit patterns 322, 606 and 607. The base substrate 321 may have a single layer or multi layer structure. In the exemplary embodiment, the base substrate 321 of a multi layer structure will be described. Further, the circuit patterns 322, 606 and 607 are formed on at least one of the upper surface and the lower surface, or the inside of the base substrate 321. As shown in the drawing, in the base substrate 321 employed in the present invention, the circuit patterns 322, 606 and 607 are formed on all of the upper and lower surfaces and the inside of the base substrate 321.
  • The cavity 321 c is formed above the base substrate 321. The cavity 321 c serves to mount an electronic component 330 (e.g., a semiconductor chip) therein. Further, an alignment pattern 601 may be formed on the lower portion of the sidewall of the cavity 321 c for forming the cavity (see FIG. 7A). The alignment pattern 601 is the remaining part of the protective layer 601 during the manufacturing process of the printed circuit board to be described below. The detailed description of which will be given below. The dimensions of the cavity 321 c, that is, the width and depth are variable depending on the width and depth of an electronic component 330 mounted therein and on the manufacturing specifications of a semiconductor package to be described below.
  • The pads 322 p are exposed through the substrate bottom surface of the cavity 321 c and are embedded in the base substrate 321. The pads 322 p exposed through the bottom surface of the substrate are the top surfaces of the respective circuit patterns 322. The upper surfaces of the pads 322 p and the bottom surface of the cavity 321 c are in the same plane. The detailed description of which will be given below.
  • The electronic component 330 is mounted in the cavity 321 c and is electrically connected to the pads 322 p. Here, the electronic component 330 includes external terminals and is mounted in a face-down position in which the external terminals face the pads 322 p.
  • The printed circuit board according to the exemplary embodiment the present invention is preferably formed in the inside of the base substrate 321, and may further include vias 323, 604 and 605 electrically connecting the circuit patterns 322, 606 and 607 to each other and the pads 322 p to the circuit patterns 322, 606 and 607.
  • Now, a manufacturing method of the printed circuit board according to the exemplary embodiment will be described.
  • For the sake of easy understating, FIG. 4 which illustrates a semiconductor package will be described after FIG. 5 and FIGS. 6A to 6E are described, which relate to a manufacturing method of the printed circuit board.
  • FIG. 5 is a flowchart illustrating a manufacturing method of the printed circuit board according to the exemplary embodiment, and FIGS. 6A to 6E are views sequentially illustrating the manufacturing processes of the manufacturing method of the printed circuit board according to the present invention.
  • Referring to FIG. 5 and FIGS. 6A to 6E, in a manufacturing method of a printed circuit board according to the present invention, firstly, a first protective layer 601 for protecting circuits is formed on a predetermined region of an upper surface of a base substrate 321 (S501, FIG. 6A). The base substrate 321 may have circuit patterns 322 formed on its upper and lower surfaces and its inside, and vias 323 connecting the upper and lower circuit patterns 322 formed therein.
  • The first protective layer 601 may be formed by removing the protective layer formed on both surfaces of a detach core used in the early process, leaving only a predetermined region for forming the cavity 321 c to be described. Alternatively, the first protective layer 601 may be formed only on a predetermined region where the cavity 321 c is to be formed, including the circuit patterns on the upper surface of the base substrate 321 and adjacent insulating portion. As the material for the protective layer, a single metal or an alloy may be used. In some cases, non-metal material may also be used.
  • After the first protective layer 601 is formed, insulating layers 602 and 603 are formed on the upper surface where the first protective layer 601 is formed and on the lower surface, respectively (S502, FIG. 6B). As the material for the insulating layers 602 and 603, synthetic resins (epoxy resins, polyester resins, urea resins, phenolic resins) may be used.
  • After the insulating layers 602 and 603 are formed, vias 604 and 605 are formed through the upper and lower insulators 602 and 603, and then circuits 606 and 607 are formed on the upper surface of the upper insulator 602 and on the lower surface of the lower insulator 603, respectively (S503, FIG. 6C). The vias 604 and 605 may be formed by forming holes in the upper and lower insulating layers 602 and 603 using a laser drill and then filling the holes with metal material (e.g., copper) by electrical plating. The circuits 606 and 607 formed on the upper and lower surfaces of the insulating layers 602 and 603 may be formed by performing photolithography using a mask.
  • After the circuits 606 and 607 are formed on the upper and lower surfaces of the insulators 602 and 603, second protective layers 608 and 609 for protecting circuits may be formed, at the gaps between the circuits 606 and 607, respectively (S504, FIG. 6D). As the material for the second protective layers 608 and 609, solder resist may be used. Again, photolithography using a mask may be used for forming the second protective layers 608 and 609.
  • After the second protective layers 608 and 609 are formed, a cavity 321 c for mounting an electronic component 330 (shown in FIG. 3) is formed at a position in the upper insulating layer 602 where the first protective layer 601 has been formed (S505, FIG. 6E). Any one of wet etching and dry etching, preferably dry etching may be used for forming the cavity 321 c.
  • In forming of the cavity 321 c, the first protective layer 601 embedded in the upper insulating layer 602 is also removed, such that the top surfaces of the circuit patterns 322 exposed through the bottom of the cavity 321 c are in the same plane with the bottom surface of the cavity 321 c with no difference in level.
  • Since the plane of the circuits 322 exposed through the bottom of the cavity 321 c where the electronic component 330 is mounted is flat with the plane of the bottom of the cavity 321 c, an insulation distance may be formed high so that the electronic component 330 may be inserted into the cavity 321 c. Accordingly, it is easy to obtain the depth of the cavity 321 c with relatively wide ranges (e.g., 40 to 150 μm) in the upper insulating layer 602.
  • Further, in forming the cavity 321 c, as shown in FIG. 7A, a part of the first protective layer 601 may remain at the lower portion of the sidewall of the cavity 321 c. The remaining part of the first protective layer 601 may be used as an alignment mark to allow the electronic component 330 to be accurately mounted when the electronic component 330 is mounted in the cavity 321 c in the process of manufacturing a semiconductor package. As appreciated, the first protective layer 601 may be completely removed when the cavity 321 c is formed as shown in FIG. 7B.
  • Now, a description will be made referring back to FIG. 4.
  • FIG. 4 is a view of a semiconductor package including the printed circuit board according to the exemplary embodiment shown in FIG. 3.
  • Referring to FIG. 4, the semiconductor package including the printed circuit board according to the exemplary embodiment of the present invention has a PoP structure that an upper semiconductor package 310 is stacked on an lower semiconductor package 320.
  • The lower semiconductor package 320 includes a printed circuit board 320′ having a cavity 321 c of a predetermined size formed on a part of the upper surface, and an electronic component 330 mounted in the cavity 321 c.
  • Further, the printed circuit board 320′ is the one described above with reference to FIG. 3.
  • That is, the printed circuit board 320′ includes the base substrate 321, the cavity 321 c and the pads 322 p.
  • The base substrate 321 includes a plurality of circuit patterns 322, 606 and 607. The base substrate 321 may have a single layer or multi layer structure. Further, the circuit patterns 322, 606 and 607 are formed on at least one of the upper surface and the lower surface, or the inside of the base substrate 321. As shown in the drawing, in the base substrate 321 employed in the present invention, the circuit patterns 322, 606 and 607 are formed on all of the upper and lower surfaces and the inside of the base substrate 321.
  • The cavity 321 c is formed above the base substrate 321. The cavity 321 c is formed to mount an electronic component 330 (e.g., a semiconductor chip) therein. Further, an alignment pattern 601 may be formed on the lower portion of the sidewall of the cavity 321 c for forming the cavity. The alignment pattern 601 is the remaining part of the protective layer 601 during the manufacturing process of the printed circuit board. The dimensions of the cavity 321 c, that is, the width and depth are variable depending on the width and depth of an electronic component 330 mounted therein and on the manufacturing specifications of a semiconductor package to be described below.
  • The pads 322 p are exposed through the substrate bottom surface of the cavity 321 c and embedded in the base substrate 321. The pads 322 p exposed through the bottom surface of the substrate are the top surfaces of the respective circuit patterns 322. The upper surfaces of the pads 322 p and the bottom surface of the cavity 321 c are in the same plane.
  • The electronic component 330 is mounted in the cavity 321 c and electrically connected to the pads 322 p. Here, the electronic component 330 includes external terminals and is mounted in a face-down position in which the external terminals face the pads 322 p.
  • The printed circuit board 320′ according to the exemplary embodiment the present invention is preferably formed in the inside of the base substrate 321, and may further include vias 323, 604 and 605 electrically connecting the circuit patterns 322, 606 and 607 to each other and the pads 322 p to the circuit patterns 322, 606 and 607.
  • As described above, according to the present invention, a cavity having a predetermined depth is formed in a base substrate of a printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure.
  • Further, since the plane of circuits exposed through the bottom surface of the cavity in which an electronic component is mounted is flat with the bottom surface of the cavity, an insulation distance may be formed high so that the electronic component may be inserted into the cavity. Accordingly, it is easy to obtain the depth of the cavity with relatively wide ranges in the upper insulating layer.
  • As stated above, according to the present invention, a cavity having a predetermined depth is formed in a base substrate of a printed circuit board so as to mount an electronic component therein, such that a gap between an upper semiconductor package and a lower semiconductor package may be obtained even if pitches between the balls are decreased for high density and high performance of the upper semiconductor package in the manufacturing of a semiconductor package having a PoP structure.
  • Although the exemplary embodiments of the present invention have been disclosed for illustrative purposes, the present invention is not limited thereto, but those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims. Therefore, the true scope of the present invention to be protected should be defined only by the appended claims and it is apparent to those skilled in the art that technical ideas equivalent thereto are within the scope of the present invention.

Claims (14)

What is claimed is:
1. A printed circuit board, comprising:
a base substrate including a plurality of circuit patterns;
a cavity formed above the base substrate;
pads embedded in the base substrate and being exposed through the substrate bottom surface of the cavity; and
an electronic component mounted in the cavity and electrically connected to the pads.
2. The printed circuit board according to claim 1, wherein the top surface of the pads and the bottom surface of the cavity are in the same plane.
3. The printed circuit board according to claim 1, wherein an alignment pattern for forming the cavity is formed at a lower portion of a sidewall of the cavity
4. The printed circuit board according to claim 1, wherein the electronic component includes external terminals and is mounted in a face-down position in which the external terminals face the pads.
5. The printed circuit board according to claim 1, further comprising a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pads.
6. A manufacturing method of a printed circuit board, the method comprising:
forming a first protective layer for protecting circuits on a predetermined region of an upper surface of a base substrate;
forming insulating layers on the upper surface of the base substrate on which the first protective layer is formed, and on a lower surface of the base substrate;
forming vias in the upper insulating layer and in the lower insulating layer and then forming circuits on an upper surface of the upper insulating layer and a lower surface of the lower insulating layer;
forming second protective layers for protecting circuits gaps between the circuit patterns formed on the surfaces of the upper and lower insulating layers; and
forming a cavity for mounting the electronic component in the upper insulating layer at a position corresponding to the first protective layer.
7. The method according to claim 6, wherein the base substrate has circuits formed on the upper surface, the lower surface and an inside thereof, and has a via connecting the circuits on the upper surface and on the lower surface to each other.
8. The method according to claim 6, wherein, in the forming of the cavity, the first protective layer embedded in the upper insulating layer is removed so that the top surfaces of the circuit patterns exposed through the bottom surface of the cavity and the bottom surface are in the same plane with no difference in level.
9. The method according to claim 6, wherein, in the forming of the cavity, a part of the first protective layer remains at a lower portion of a sidewall of the cavity.
10. A semiconductor package having a PoP structure of which an upper semiconductor package is stacked on an lower semiconductor package, the lower semiconductor package comprising:
a printed circuit board having a cavity of a predetermined size formed at a predetermined region of its upper surface; and
an electronic component mounted in the cavity,
wherein the printed circuit board includes:
a base substrate including a plurality of circuit patterns;
a cavity formed above the base substrate; and
pads embedded in the base substrate and being exposed through the substrate bottom surface of the cavity.
11. The semiconductor package according to claim 10, wherein the top surface of the pads and the bottom surface of the cavity are in the same plane.
12. The semiconductor package according to claim 10, wherein an alignment pattern for forming the cavity is formed at a lower portion of a sidewall of the cavity.
13. The semiconductor package according to claim 10, wherein the electronic component includes external terminals and is mounted in a face-down position in which the external terminals face the pads.
14. The semiconductor package according to claim 10, further comprising a via formed in the base substrate and electrically connecting the circuit patterns to each other and the circuit patterns to the pads.
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US20150364445A1 (en) * 2014-06-16 2015-12-17 Electronics And Telecommunications Research Institute Stack module package and method for manufacturing the same
US20160099205A1 (en) * 2014-10-06 2016-04-07 Heung Kyu Kwon Package on package and computing device including the same
CN110024111A (en) * 2016-12-30 2019-07-16 英特尔公司 With the package substrate having for being fanned out to the high density interconnection layer that the column of scaling is connected with via hole
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