US20150159958A1 - High-efficiency heat exchanger and high-efficiency heat exchange method - Google Patents
High-efficiency heat exchanger and high-efficiency heat exchange method Download PDFInfo
- Publication number
- US20150159958A1 US20150159958A1 US14/403,678 US201314403678A US2015159958A1 US 20150159958 A1 US20150159958 A1 US 20150159958A1 US 201314403678 A US201314403678 A US 201314403678A US 2015159958 A1 US2015159958 A1 US 2015159958A1
- Authority
- US
- United States
- Prior art keywords
- heat
- heat exchange
- conductors
- heat exchanger
- target fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/06—Constructions of heat-exchange apparatus characterised by the selection of particular materials of plastics material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
-
- F24J1/00—
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24V—COLLECTION, PRODUCTION OR USE OF HEAT NOT OTHERWISE PROVIDED FOR
- F24V30/00—Apparatus or devices using heat produced by exothermal chemical reactions other than combustion
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
- F25D5/00—Devices using endothermic chemical reactions, e.g. using frigorific mixtures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F1/00—Tubular elements; Assemblies of tubular elements
- F28F1/10—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses
- F28F1/40—Tubular elements and assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with projections, with recesses the means being only inside the tubular element
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F13/00—Arrangements for modifying heat-transfer, e.g. increasing, decreasing
- F28F13/18—Arrangements for modifying heat-transfer, e.g. increasing, decreasing by applying coatings, e.g. radiation-absorbing, radiation-reflecting; by surface treatment, e.g. polishing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
- F28F19/04—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of rubber; of plastics material; of varnish
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F19/00—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers
- F28F19/02—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings
- F28F19/06—Preventing the formation of deposits or corrosion, e.g. by using filters or scrapers by using coatings, e.g. vitreous or enamel coatings of metal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/02—Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0022—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for chemical reactors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0028—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for cooling heat generating elements, e.g. for cooling electronic components or electric devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/0042—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for foodstuffs
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
- F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
- F28D2021/005—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for medical applications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/02—Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F21/00—Constructions of heat-exchange apparatus characterised by the selection of particular materials
- F28F21/08—Constructions of heat-exchange apparatus characterised by the selection of particular materials of metal
- F28F21/089—Coatings, claddings or bonding layers made from metals or metal alloys
Definitions
- the present invention relates to heat exchange technology having no limitations in application fields.
- the present invention is useful not only for heat exchange of gases or liquids of corrosive substances, such as acids and alkalis, but also for temperature control of high-purity water, high-purity silicon compounds used in manufacturing semiconductors, etc.
- the present invention is effective in solving the problems with corrosion of devices, etc. and contamination of high-purity substances, which may occur during the heat exchange, and in realizing an improvement of a heat exchange rate.
- the present invention can provide a heat exchanger and a heat exchange method, which ensure high efficiency in general technical fields where temperature adjustment, such as cooling and heating, of substances are needed, while suppressing corrosion of devices and contamination caused by impurities.
- phase source not only an exothermic source, but also an endothermic source are called a “heat source” in some cases.
- fluid used in this Description involves a substance that causes a phase change (e.g., a phase change from liquid to gas) with heating or heat absorption.
- a heat exchanger is a device in which two objects having different temperatures are directly or indirectly contacted with each other to heat or cool one of the objects through heat transfer.
- the heat exchanger is used in cooling steps, heating steps, and refrigeration for industrial purposes in various fields including a boiler, a steam generator, food production, production of chemicals, cold storage, and so on.
- the heat exchanger has a structure depending on characteristics of a substance to be subjected to heat exchange (i.e., a heat exchange target substance).
- a heat exchange target substance i.e., a heat exchange target substance.
- highly-corrosive chemicals such as hydrofluoric acid, nitric acid, and sulfuric acid
- highly-corrosive fluids such as strong acids and alkalis need to be heated and cooled by employing a heat exchanger having resistance to the chemicals.
- heat exchange is typically performed by indirect heating in which a contact portion made of a resin material that is less affected by acids or alkalis is immersed in a heat medium.
- FIG. 1 is a schematic view illustrating typical indirect heat exchange. While a heat exchange target fluid (e.g., acid, alkali, or water) is conveyed through a resin-made pipe 1 from an inlet 2 to an outlet 3 , heat exchange is performed between the fluid and a heat medium 4 , of which temperature is adjusted by a heat source 5 , through the resin-made pipe 1 . Such a method can improve a heat exchange rate by increasing a surface area of the resin-made pipe 1 contacting with the heat medium 4 , e.g., by increasing a length of the pipe 1 immersed in the heat medium 4 .
- the cost of an apparatus including a device for adjusting a fluid temperature in the heat source, containers, etc., may be expensive in some cases.
- FIG. 1 is a schematic view illustrating typical indirect heat exchange. While a heat exchange target fluid (e.g., acid, alkali, or water) is conveyed through a resin-made pipe 1 from an inlet 2 to an outlet 3 , heat exchange is
- Direct heat exchange is performed by holding a heat source 5 in contact with a pipe 1 made of a material that has high resistance to the heat exchange target fluid and that has good temperature characteristics.
- apparatus components including the conveying pipe, are not corroded by the heat exchange target fluid or the heat exchange medium, the heat exchange fluid is not contaminated during a heat exchange step, and the heat exchange is performed at high efficiency.
- the conveying pipe is coated with a resin or a ceramic to protect the conveying pipe to be not affected, e.g., corroded, by the heat exchange target fluid or the heat exchange medium.
- Patent Document 1 a heat transfer pipe for heat exchange (Patent Document 1), which is disposed in an atmosphere of high-temperature gas and which performs heat exchange between a fluid to be heated, which flows through the heat transfer pipe, and the high-temperature gas, wherein the heat transfer pipe through which the fluid to be heated flows has a three-layer structure in which the pipe is made of a heat-resistant alloy and an outer surface of the heat-resistant heat pipe is covered with a cover member made of a ceramic-alloy composite material with a thermal expansion buffer interposed therebetween, and the ceramic-alloy composite material forming the cover member contains Al and AlN on condition that AlN is 1 wt % or more and 90 wt % or less, and a total rate of (Al+AlN+AlON) is 50 wt % or more and 100 wt % or less.
- Patent Document 1 a heat transfer pipe for heat exchange
- a fluorine-based resin has good corrosion resistance and heat resistance to various chemicals.
- the conveying pipe is made of only the fluorine-based resin, the following drawbacks are caused because the fluorine-based resin is a poor heat conductor in itself. Heat exchange efficiency is low, a longer time is taken to reach a predetermined temperature, and accuracy in temperature control at the predetermined temperature is poor.
- many proposals have been made in relation to, e.g., the technique of coating the fluorine-based resin over the surface of a metal having good thermal conductivity.
- a constituent member of equipment using gas in which at least two layers of coating films, containing a fluorine-based resin, are coated over a substrate (Patent Document 2).
- the constituent member of equipment using gas is employed in, e.g., a heat exchanger having those coating films in which contents of the fluorine-based resin are gradually increased and contents of inorganic filler are gradually reduced from the lowermost layer film, coated over the substrate, to the uppermost layer film.
- Patent Document 3 an aluminum alloy member having good corrosion resistance, and a plate-fin type heat exchanger or a plate type heat exchanger in which a heat transfer portion employing a corrosive fluid as a medium is formed using the aluminum alloy member.
- An underlying film made of organic phosphoric acid is coated over a surface of the aluminum alloy member used in the plate-fin type heat exchanger or the plate type heat exchanger including the heat transfer portion in which the corrosive fluid is used as the medium, and a coating film made of a fluorine-based resin paint having an average film thickness of 1 to 100 ⁇ m after drying is coated over the underlying film, whereby durability in adhesion of the coating films is improved and high corrosion resistance to a corrosive fluid, e.g., seawater, is obtained.
- a corrosive fluid e.g., seawater
- Carbon having good thermal conductivity and corrosion resistance is employed in some cases.
- a block type heat exchanger using a method that is able to heat or cool a large amount of an aqueous solution of hydrogen chloride, containing chlorine, by the heat exchanger without altering a heat transfer surface Patent Document 4
- the heat transfer surface of the heat exchanger is made of carbon impregnated with a fluorine-based resin
- the heat exchanger is constituted by a block made of the carbon impregnated with the fluorine-based resin and arranged within a housing, the block including a flow passage for the aqueous solution of hydrogen chloride through which the aqueous solution of hydrogen chloride flows, and a flow passage for a heat medium through which the heat medium flows.
- a heat exchanger made of stainless steel can be used for a heat exchange target substance that is adaptable for a liquid contact portion made of metal.
- a thermal conductivity of stainless steel is relatively low among metals, and a heat source having a large capacity needs to be used to obtain a certain level of heat exchange performance. This brings about the problem that the apparatus body is enlarged and power consumption is increased.
- Patent Document 1 Japanese Patent No. 3674401
- Patent Document 2 Japanese Patent Laid-Open Publication No. 2004-283699
- Patent Document 3 Japanese Patent Laid-Open Publication No. 2008-156748
- Patent Document 4 Japanese Patent Laid-Open Publication No. 2006-289799
- Patent Document 5 Japanese Patent Laid-Open Publication No. H9-280786
- the present invention provides a heat exchanger that has high heat exchange performance and high corrosion resistance with respect to a heat exchange target fluid.
- a prior-art heat exchanger generally employs a method of performing heat exchange by contacting a member, which is held in contact with a heat exchange target fluid during the heat exchange of the fluid, with a heat medium such as a heat source or a coolant.
- a material of the contact member is selected depending on characteristics the fluid.
- the selected material of the contact member does not always have good thermal conductivity.
- the disadvantage of the member having low thermal conductivity has to be compensated for by employing, e.g., many electric heaters as heat sources, or an electric heater having a large capacity. This often results in a decrease of energy efficiency in the heat exchange and an increase of the apparatus size.
- the present invention is featured in that heat exchange can be performed at high efficiency even when the material of the contact portion is selected with attention focused only to characteristics of the heat exchange target fluid.
- a compact product can be obtained at a relatively low cost without increasing the apparatus size.
- An object of the present invention is to provide a high-efficiency heat exchanger that can be applied to a wide range of fields regardless of the type of heat exchange target fluid.
- Another object of the present invention is to provide a heat exchanger in which corrosion of components caused by the heat exchange target fluid is avoided, and the fluid having been subjected to the heat exchange is not contaminated.
- the present invention is constituted by the following technical matters.
- a heat exchanger comprising a heat source, a heat transfer structure contacting with a heat exchange target fluid, and a heat transfer member that transfers heat from the heat source to the heat transfer structure, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid
- the heat transfer structure includes a body having an inlet, an outlet, and a flow passage for the heat exchange target fluid, and many heat conductors mounted to the body, an inner wall surface of the flow passage for the heat exchange target fluid, the inner wall surface defining a contact surface with the heat exchange target fluid, is made of a material stable against the heat exchange target fluid, the heat conductors are made of a material having a higher thermal conductivity than a material of the body, and the heat conductors are mounted near the flow passage for the heat exchange target fluid at positions where the heat conductors are not contacted with the heat exchange target fluid.
- the heat transfer member comprises two heat transfer members sandwiching the body, and one or more of the heat conductors extend from each of the two heat transfer members.
- the mode of extension of the heat conductors includes not only the case where the heat transfer member and the heat conductors are formed integrally with each other, but also the case where the heat conductors are mounted as separate components to the heat transfer member.
- a heat exchanger wherein the heat exchanger according to any one of [1] to [13] is stacked plural.
- the present invention is constituted by the following technical matters.
- a heat exchanger comprising a flow passage through which a heat exchange target fluid flows, and a heat transfer structure that is contacted with the heat exchange target fluid flowing through the flow passage, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein:
- a surface of the heat transfer structure is made of a material stable against the heat exchange target fluid
- heat conductors are mounted to the heat transfer structure, and are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- the heat exchanger according to (1) wherein the heat conductor has a pin-like configuration.
- the pin-like configuration involves, for example, not only a circular columnar shape and a polygonal pillar shape, but also the case where an outer surface of the heat conductor has a zigzag configuration.
- a surface of the heat transfer structure is made of a material stable against the heat exchange target fluid
- heat conductors are mounted to the heat transfer structure, and are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- a heat exchanger having high heat exchange efficiency and a compact structure can be provided. Furthermore, since reaction between the heat exchanger and the heat exchange target fluid, such as acid and alkali, is avoided, temperatures of high-purity acid, alkali, etc. can be adjusted without contamination by a trace ingredient. Moreover, the present invention can be applied to other substances, such as high-purity water, than the acids and the alkalis regardless of whether the substances are in a liquid or gaseous state.
- the present invention can further provide a heat exchange technique, which ensures savings in electric power and space, and high heat exchange efficiency even when the portion contacting with the heat exchange target fluid is entirely made of resin.
- heat exchange performance of 80% or more is realized with a configuration to directly perform the heat exchange on condition that the portion contacting with the heat exchange target fluid is metal-free.
- the present invention provides a heat exchanger having prominent performance in comparison with the prior art.
- FIG. 1 is a schematic view illustrating heat exchange by typical indirect heating according to prior art.
- FIG. 2 is a schematic view illustrating heat exchange by typical direct heating according to prior art.
- FIG. 3 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger using a plurality of independent heat conductors.
- FIG. 4 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger in which a plurality of heat conductors is integrated with a heat transfer plate.
- FIG. 5 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger using a heat conductor that has a zigzag surface configuration.
- FIG. 6 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger in which a flow passage for a heat exchange target fluid has a zigzag shape.
- FIG. 7 illustrates a sectional structure of a heat exchanger according to Embodiment 1 of the present invention; specifically, FIG. 7-1 illustrates a section taken along a vertical plane (vertical direction), and FIG. 7-2 illustrates a section taken along a horizontal plane (horizontal direction).
- FIG. 8 illustrates layout of an apparatus used for testing heat exchange performance.
- FIG. 9 illustrates a temperature distribution confirmed by thermography, and represents that temperature rises in darker regions where the heat conductors are mounted, in comparison with the ambient temperature.
- FIG. 10 illustrates a relationship between measured values of an outlet gas temperature and a setting temperature, the relationship being obtained from test results.
- FIG. 11 comparatively illustrates heat exchange performance obtained with heat exchange through resin and heat exchange through a metal surface according to the present invention.
- FIG. 12 is a schematic sectional view to explain a zigzag configuration of the flow passage for the heat exchange target fluid; specifically, FIG. 12( a ) is a sectional view to explain the case of doubling a surface area, and FIG. 12( b ) is a sectional view to explain adjustment of a pitch depth.
- FIG. 13 is a schematic sectional view illustrating layout variations of the heat conductors.
- FIG. 13( a ) illustrates a layout example in which two heat conductors sandwiching a flow passage for the heat exchange target fluid therebetween are disposed to extend from above.
- FIG. 13( b ) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 13( c ) illustrates a layout example in which four heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 13( d ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG.
- FIG. 13( a ) have zigzag configurations.
- FIG. 13( e ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG. 13( b ) have zigzag configurations.
- FIG. 13( f ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG. 13( c ) have zigzag configurations.
- FIG. 14 illustrates structural examples in which the heat transfer plate and the plural heat conductors in FIG. 13 are formed integrally with each other.
- FIG. 14( a ) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above.
- FIG. 14( b ) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 14( c ) illustrates a layout example in which four heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 14( a ) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 14( a ) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to
- FIG. 14( d ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG. 14( a ) have zigzag configurations.
- FIG. 14( e ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG. 14( b ) have zigzag configurations.
- FIG. 14( f ) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors in FIG. 14( c ) have zigzag configurations.
- FIG. 15 is an illustration to explain a temperature distribution when heat conductors made of different materials are arranged; specifically, FIG. 15( a ) depicts a plan view and a temperature distribution image when heat conductors of the same type are arranged, and FIG. 15( b ) depicts a plan view and a temperature distribution image when heat conductors made of different materials are mounted.
- FIG. 16 is a plan view of a heat exchanger in which heat conductors are arranged at different densities between the upstream side and the downstream side.
- FIG. 17 illustrates a sectional structure of a heat exchanger equipped with a shower head according to the present invention; specifically, FIG. 17( a ) illustrates a section taken along a horizontal plane (horizontal direction), and FIG. 17( b ) illustrates a section taken along a vertical plane (vertical direction).
- FIG. 18 is a side view of a multi-stage heat exchanger that is constituted by stacking the heat exchangers each illustrated in FIG. 7 .
- FIG. 19 illustrates a configuration of a temperature-controlled supply apparatus according to Embodiment 2 of the present invention.
- the present invention relates to a heat exchanger and a heat exchange method, the heat exchanger comprising a flow passage through which a heat exchange target fluid flows, and a heat transfer structure that is contacted with the heat exchange target fluid flowing through the flow passage, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein:
- a surface of the heat transfer structure is made of a material stable against the heat exchange target fluid
- the heat transfer structure includes heat conductors that are mounted to the heat transfer structure, and that are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- the heat conductors made of a material having a higher thermal conductivity than that of the heat transfer structure are mounted in the heat transfer structure, which is made of a substance (material) neither affecting nor affected by the heat exchange target fluid, at positions where the heat conductors are not contacted with the fluid.
- the heat exchange target fluid can be efficiently heated or cooled by heating or cooling the heat transfer structure and transferring heat from a heat source to the heat exchange target fluid.
- liquids and gases having various characteristics are employed as the heat exchange target fluids that are heated or cooled by heat exchangers.
- aqueous solutions of acids or alkalis are used in chemical reactions, etching processes, and so on.
- acids and alkalis vigorously react with metals, the metals cannot be used in a portion contacting with the acids and the alkalis in many cases.
- Resins are used in some products of heat exchangers that are used for heat exchange of those reactive heat exchange target fluids. However, because thermal conductivities of resins are low, heat exchange efficiency is poor, necessary electric power is increased, and shapes and structures of the heat exchangers are increased in size and complicacy in many cases.
- the heat exchanger according to the present invention employs the direct heating method and undergoes no limitations on materials of a surface of the heat transfer structure, the surface defining the contact surface with the heat exchange target fluid, insofar as the material is stable against the heat exchange target fluid.
- a heat exchanger ensuring savings in electric power and space and having good thermal efficiency of 80% or more can be provided regardless of that the portion contacting with the heat exchange target fluid is entirely made of resin.
- the heat exchange target fluid used in the present invention is not limited to particular one.
- the heat exchange target fluid are solutions or gases of corrosive acids such as hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, silicon fluoride acid, and boric acid, alkalis such as ammonia, potassium hydroxide, and sodium hydroxide, and metal salts such as silicon chloride, as well as high-purity water.
- Those heat exchange target fluids are used as materials to progress reactions with other substances, or chemicals, e.g., an etchant, employed in reaction steps, and they are used for intended purposes under control to proper temperatures by heat exchangers.
- the heat exchanger according to the present invention can perform heating, cooling, or temperature control of those heat exchange target fluids at high efficiency in a state free from contamination caused by trace impurities.
- the heat transfer structure used in the present invention has a surface defining the contact surface with the heat exchange target fluid, and heat conductors.
- the contact surface of the heat transfer structure with the heat exchange target fluid is made of a material stable against the heat exchange target fluid.
- the material of the contact surface is selected such that the surface of the heat transfer structure and the heat exchange target fluid will not react with each other in a temperature range where the heat exchange is performed, or that ingredients of the heat transfer structure will not elute from the surface in such a temperature range.
- Reactivity (corrosiveness) of the heat exchange target fluid is different depending on the material of the surface of the heat transfer structure, a contact temperature, etc.
- an allowable range of purity after the heat exchange is different depending on the use and properties of the heat exchange target fluid.
- the material of the heat transfer structure cannot be specified indiscriminately.
- metal halides and etchants used in manufacturing semiconductor devices for example, because high-purity substances are employed, a reduction of purity attributable to the heat exchange process is not allowed.
- heat exchangers for turbines a change in purity of the heat exchange target fluid attributable to the heat exchange process is insignificant in many cases.
- the substance (material) of a member forming the surface of the heat transfer structure, which is contacted with the heat exchange target fluid is optionally selected from metals such as iron, carbon steel, stainless steel, aluminum, and titanium, synthetic resins such as a fluorine-based resin and polyester, and ceramics.
- metals such as iron, carbon steel, stainless steel, aluminum, and titanium
- synthetic resins such as a fluorine-based resin and polyester
- ceramics When highly-corrosive acids are subjected to heat exchange, the fluorine-based resin is preferably used.
- fluorine-based resin examples include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polychlorotrifluoroethylene (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinylfluoride (PVF), fluorinated polypropylene (FLPP), and polyvinylidene fluoride (PVDF).
- PTFE polytetrafluoroethylene
- PFA tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer
- FEP tetrafluoroethylene-hexafluoropropylene copolymer
- PCTFE polychlorotrifluoroethylene
- ECTFE ethylene-chlorotri
- the heat transfer structure includes the heat conductors made of a material having a higher thermal conductivity than that of the heat transfer structure (particularly, its portion contacting with the heat exchange target fluid).
- the heat conductors are mounted near the contact surface of the heat transfer structure with the heat exchange target fluid (i.e., near a flow passage for the heat exchange target fluid) at the positions where the heat conductors are not contacted with the heat exchange target fluid.
- a heat exchanger 101 illustrated in FIG. 3 includes a heat transfer structure 6 having a body 61 , heat conductors 62 , a heater plate 51 serving as a heat source, heat transfer plates 52 a and 52 b , and a flow passage 7 for the heat exchange target fluid.
- Heat from the heater plate 51 is diffused into the heat transfer structure 6 (including the body 61 and the heat conductors 62 ) through the heat transfer plates 52 a and 52 b .
- the body 61 and the heat conductors 62 are heated by the diffused heat and, at the same time, the heat exchange target fluid passing through the flow passage 7 is also heated by the diffused heat through a contact surface 63 .
- Dotted-line arrows in FIG. 3 represent transfer of heat from the body 61 . Because the material of the heat conductors 62 has a higher thermal conductivity than that of the body 61 , temperatures of the heat conductors 62 rise more quickly than that of the body 61 , and the heat exchange with respect to the heat exchange target fluid can be performed efficiently.
- the heat conductors 62 are embedded in the body 61 in a state contacting with the heat transfer plate 52 a or the heater plate 51 .
- the heat conductors 62 and the flow passage 7 are preferably positioned as close as possible.
- An inner wall surface of the flow passage 7 is preferably a flat or curved surface having no irregularities from the viewpoint of maintenance, but it preferably has a zigzag configuration from the viewpoint of increasing heat exchange performance.
- the heat conductors 62 each having a columnar shape can be mounted by individually inserting the heat conductors 62 into holes formed in the body 61 .
- the heat transfer plate 52 and the plural heat conductors 62 may be formed integrally with each other, and the heat conductors 62 may be mounted by collectively inserting the heat conductors 62 into holes formed in the body 61 .
- the positions and the number of the mounted heat conductors 62 are determined in consideration of heat exchange efficiency, etc.
- each heat conductor 62 is preferably increased by forming the heat conductor 62 such that its outer surface has a zigzag configuration as illustrated in FIG. 5 .
- an outer surface of the heat conductor 62 is preferably formed to have a configuration that annular mountains are continuously arranged in the lengthwise direction of the heat conductor 62 (i.e., a configuration that mountains and valleys are alternately arranged in a continuous way).
- the “configuration that annular mountains are continuously arranged” involves the case where the mountains and the valleys are spirally formed like thread ridges and grooves.
- the zigzag configuration is formed such that a surface area of the outer surface of the heat conductor 62 is, e.g., 1.5 to 3 times a surface area of a column having the same diameter as the heat conductor 62 , but not including the mountains (protrusions).
- the heat conductor 62 having the zigzag configuration can be mounted in place by a method of mounting the heat conductor 62 in a state where the resin is still soft before hardening, and then hardening the resin, or a method of forming a hole in the hardened resin by, e.g., a drill, and then screwing the heat conductor having the zigzag configuration into the hole.
- the heat conductor 62 is mounted by forming a hole with drilling in most cases.
- FIG. 13 is a schematic sectional view illustrating layout variations of the heat conductors 62 .
- FIG. 13( a ) illustrates a layout example in which two heat conductors 62 sandwiching the flow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above.
- FIG. 13( b ) illustrates a layout example in which two heat conductors 62 sandwiching the flow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 13( c ) illustrates a layout example in which four heat conductors 62 sandwiching the flow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above and below.
- FIG. 13( d ) illustrates a structural example in which outer surfaces of the heat conductors 62 in the layout example of the heat conductors 62 in FIG.
- FIG. 13( a ) have zigzag configurations.
- FIG. 13( e ) illustrates a structural example in which outer surfaces of the heat conductors 62 in the layout example of the heat conductors 62 in FIG. 13( b ) have zigzag configurations.
- FIG. 13( f ) illustrates a structural example in which outer surfaces of the heat conductors 62 in the layout example of the heat conductors 62 in FIG. 13( c ) have zigzag configurations.
- the plural heat conductors 62 are arranged in opposing relation on both sides of the flow passage 7 for the heat exchange target fluid.
- a heat exchanger includes heater plates 51 a and 51 b , heat transfer plates 52 a and 52 b , a body 61 , and the flow passage 7 for the heat exchange target fluid. Because the above-mentioned components are similar to those in the heat exchanger 101 in FIGS. 3 and 5 except for including two heater plates, descriptions of those components are omitted here. It is to be noted that, in FIGS. 13( a ) to 13 ( d ), the lower heater plate 51 b may be dispensed with.
- FIG. 14 illustrates structural examples in which the heat transfer plate 52 and the plural heat conductors 62 in FIG. 13 are formed integrally with each other.
- the plural heat conductors 62 are arranged in opposing relation on both sides of the flow passage 7 for the heat exchange target fluid. Because the configuration illustrated in FIG. 14 is similar to that illustrated in FIGS. 4 and 13 except that the heat transfer plate 52 and the plural heat conductors 62 are formed integrally with each other, detailed description of the configuration illustrated in FIG. 14 is omitted here.
- FIG. 15 is an illustration to explain a temperature distribution when heat conductors made of different materials are arranged. Specifically, FIG. 15( a ) depicts a plan view and a temperature distribution image when the heat conductors 62 of the same type are arranged, and FIG. 15 ( b ) depicts a plan view and a temperature distribution image when the heat conductors 62 made of different materials are mounted.
- a number 135 of mount holes into which the heat conductors 62 are inserted are formed in the heat transfer plate 52 and the body 61 (not illustrated) substantially at equal intervals.
- the heat conductors 62 are each detachably mounted into the mount holes of the heat transfer plate 52 and the body 61 .
- each heat conductor 62 may be formed in the shape of a screw having a flat head, and may be mounted to the mount hole by screwing the heat conductor 62 .
- a large number of heat conductors 62 may be constituted as a combination of heat conductors 62 made of different materials.
- the heat conductors 62 made of different materials it is possible to eliminate variations in the temperature distribution, which occur between the upstream side and the downstream side of the flow passage 7 .
- a manufacturing cost can be reduced by arranging the heat conductors 62 made of an expensive material only at necessary places, and arranging the heat conductors 62 made of an inexpensive material at other places.
- FIG. 15( a ) all the heat conductors 62 are formed of aluminum pins.
- FIG. 15( b ) the heat conductors 62 until the fifth column counting from left are formed of aluminum pins, and the heat conductors 62 after the sixth column counting from left are formed of copper pins.
- a number 135 of aluminum pins are mounted as the heat conductors 62 in FIG. 15( a )
- a number 45 of copper pins are mounted as the heat conductors 62 on the upstream side and aluminum pins are mounted on the downstream side in FIG. 15( b ).
- FIGS. 15( a ) and 15 ( b ) temperature distribution images are depicted.
- temperature is relatively low in a left half and is relatively high in a right half.
- FIG. 15( b ) variations in the temperature distribution are eliminated considerably.
- variations in the temperature distribution between the upstream side and the downstream side can be reduced by arranging the heat conductors 62 made of a material having a high thermal conductivity on the upstream side, and the heat conductors 62 made of a material having a relatively low thermal conductivity on the downstream side.
- the heat conductors 62 made of a material having a high thermal conductivity on the upstream side
- the heat conductors 62 made of a material having a relatively low thermal conductivity on the downstream side.
- FIG. 16 is a plan view of a heat exchanger 104 in which heat conductors 62 are arranged at different densities between the upstream side and the downstream side.
- all the heat conductors 62 are formed of aluminum pins.
- the other configurations of the heat transfer plate 52 , the body 61 , etc. are similar to those in the heat exchanger 104 of FIG. 15 .
- nine heat conductors 62 are arranged in the up-and-down direction until the fifth column counting from left, and four or five heat conductors 62 are arranged in the up-and-down direction in the sixth to fifteenth columns counting from left.
- the variations in the temperature distribution between the upstream side and the downstream side can also be reduced by arranging the heat conductors 62 at a higher density on the upstream side, and the heat conductors 62 at a lower density on the downstream side.
- the heat conductors 62 made of materials having different thermal conductivities may be arranged on the upstream side and the downstream side such that the variations in the temperature distribution between the upstream side and the downstream side are adjusted more finely.
- FIG. 17 illustrates a sectional structure of a heat exchanger 105 equipped with a shower head.
- FIG. 17( a ) illustrates a section taken along a horizontal plane (horizontal direction)
- FIG. 17( b ) illustrates a section taken along a vertical plane (vertical direction).
- the heat exchanger 105 equipped with the shower head has a body 61 including a heater plate 51 , a heat transfer plate 52 , many heat conductors 62 , and a flow passage 7 for the heat exchange target fluid.
- Many discharge ports 75 communicating with the flow passage 7 are formed in the body 61 .
- the heat exchanger 105 equipped with the shower head further includes two inlets 83 a and 83 b .
- a heat exchange target fluid 73 having entered the flow passage 7 through the inlets is discharged from the discharge ports 75 after being heated.
- the discharge ports 75 communicating with the outside serve as outlets.
- the many heat conductors 62 are constituted by copper-made pin-like members arranged on the upstream side nearer to the inlets 83 a and 83 b , and aluminum-made pin-like members arranged on the downstream side, as in the configuration of FIG. 15( b ), such that variations in temperature distribution over the entire length of the flow passage 7 is minimized.
- the copper-made pin-like members are mainly arranged in regions closer to both the right and left sides of the body 61
- the aluminum-made pin-like members are mainly arranged in a central region of the body 61 .
- bent portions 71 are formed in the flow passage 7 such that the heat exchange target fluid strikes against a flow passage wall in the bent portions 71 to generate turbulent streams, thereby eliminating unevenness in heating. Accordingly, the fluids substantially at the same temperature are discharged from the many discharge ports 75 . While the heat exchanger 105 equipped with the shower head is mainly used to provide a gas shower for discharging gas, a liquid may be discharged in some cases.
- the heat exchanger 105 equipped with the shower head may be constituted in multiple stages by arranging one or a plurality of heat exchangers equipped with no shower heads in an upper stage, and by connecting two inlets of the heat exchanger 105 equipped with the shower head to an outlet of the heat exchanger in the upper stage through a branching pipe (see FIG. 18 described later).
- FIG. 6 is a schematic sectional view illustrating principal parts of a cylindrical heat exchanger 102 embodying the present invention.
- a heat transfer structure 6 including a heat conductor 62 and a body 61 is disposed on an inner surface of a cylindrical heat source 5 .
- the heat conductor 62 has a zigzag-shaped surface that is positioned on the side facing a flow passage, and a flat surface that is held in contact with the heat source 5 .
- the body 61 covers a surface of the heat conductor 62 to define the flow passage 7 , and it is contacted with the heat exchange target fluid.
- the body 61 is preferably provided as a thin film that is formed on the surface of the heat conductor 62 .
- a surface of the body 61 contacting with the heat exchange target fluid is preferably formed in a zigzag shape similar to that of the heat conductor 62 .
- the heat exchange efficiency at the body surface is improved by forming the body surface in a zigzag shape so as to increase a contact surface area.
- FIG. 12 is a schematic sectional view to explain a zigzag configuration of the flow passage for the heat exchange target fluid. Specifically, FIG. 12( a ) is a sectional view to explain the case of doubling a surface area, and FIG. 12( b ) is a sectional view to explain adjustment of a pitch depth.
- FIG. 12( a ) illustrates an example in which an inner surface of the heat transfer structure 6 contacting with the heat exchange target fluid 73 has such a zigzag configuration that regular triangles with one side being 2 mm are continuously arranged along its cross-section.
- the inner surface of the heat transfer structure 6 has a configuration that annular mountains are continuously arranged in the lengthwise direction of the heat transfer structure 6 .
- the surface area of the inner surface of the heat transfer structure 6 is increased twice that of a flat inner surface of the heat transfer structure not having the zigzag configuration.
- the zigzag configuration of the heat transfer structure 6 is not limited to that illustrated in FIG. 12 , and the present invention disclosed here involves the case of forming the zigzag configuration such that the surface area of the inner surface of the heat transfer structure 6 is increased 1.5 to 3 times, for example.
- FIG. 12( b ) illustrates a state where gaps 74 are generated between the inner surface of the heat transfer structure 6 and the fluid 73 .
- the heat exchange efficiency is reduced.
- the cylindrical heat exchanger 102 may be constituted in a detachable manner, and the plural cylindrical heat exchangers 102 having different pitches may be prepared.
- the heat conductor 62 is made of a material having a higher thermal conductivity than that of the body 61 .
- a higher thermal conductivity implies a relative value in terms of comparison between conductivities of both the materials, and it does not imply a specific absolute value.
- the thermal conductivity is usually given as about 0.2 W/m ⁇ k for plastic, about 0.25 for a fluorine-based resin, about 47 for carbon steel, about 15 for stainless steel, 237 for aluminum, 386 for pure copper, and about 1 for PYREX (registered trademark) glass, for example. From the above-mentioned materials, proper ones may be selected in consideration of relative thermal conductivities.
- the heat exchange efficiency is increased regardless of which one of those materials is selected as the heat conductor, when the body 61 is made of the fluorine-based resin.
- the material of the heat transfer structure 6 (body 61 ) is metal, specifically when the body is made of stainless steel, a metal having higher thermal conductivity than the material of the heat transfer structure 6 (body 61 ), e.g., carbon steel, aluminum, or pure copper, can be selected as the material of the heat conductor.
- the substance (material) of the heat conductor preferably has a thermal conductivity as high as possible.
- a heat exchanger in which the contact surface 63 of the heat transfer structure 6 with the heat exchange target fluid is coated with the fluorine-based resin, and the body 61 is made of stainless steel.
- a total heat transfer coefficient is measured as 1070 W/m 2 ⁇ k for the plate made of only the stainless steel, and 291 for the plate with the corrosion coating of 500 ⁇ m. This result shows that an amount of transferred heat is reduced to 1 ⁇ 3 in the latter plate. It is also reported that the heat transfer coefficient is 845 when the plate is coated with the corrosion coating of 50 ⁇ m.
- the distance between the heat conductor and the heat exchange target fluid is preferably as short as possible.
- a heat exchanger 103 illustrated in FIG. 7 has a parallelepiped shape with dimensions of 150 mm ⁇ 195 mm ⁇ 34 mm (height).
- the heat exchange target fluid is subjected to heat exchange during a process of entering the heat exchanger 103 through an inlet connector (inlet) 81 and passing through the flow passage 7 for the heat exchange target fluid, which includes many bent points (bent portions) 71 and 72 , until flowing out from an outlet connector (outlet) 82 .
- the flow passage 7 is provided by forming a groove-like space in a body 61 in the form of a block made of a fluorine-based resin.
- a number 172 of heat conductors 62 are mounted on both sides of the flow passage 7 at intervals of 600 ⁇ m.
- the heat conductors 62 are each formed of a cross-recessed flat head machine screw (i.e., a screw having a flat head) with a diameter of 3 mm and a length of 18 mm, and they are screwed into holes, which are formed in the body 61 of the heat transfer structure 6 , through a heat transfer plate 52 a . Because those screws have flat upper surfaces, an upper surface of the heat transfer plate 52 a can be made flush.
- a barrel portion of each screw where threads are formed preferably has a columnar shape that extends in the same diameter without tapering.
- the manufacturing cost of the heat exchanger can be reduced significantly.
- the present invention disclosed here involves the case of employing, e.g., a screw (copper) of M3 ⁇ 20 m with a pitch of 0.5 mm or a screw (aluminum) of M4 ⁇ 12 mm with a pitch of 0.7 mm in accordance with JIS standards.
- a heat source (not illustrated) is disposed in contact with at least a region of the heat transfer plate 52 a where the heat conductors 62 are disposed.
- the heat source is preferably disposed in contact with respective surfaces of both the heat transfer plates 52 a and 52 b .
- the heat source is constituted, for example, as a stainless plate using, as an exothermic source, a nichrome wire with a heater capacity of 1600 W, or a mica plate using, as an exothermic source, a nickel alloy with a heater capacity of 4000 W.
- An exposed surface of the heat source is preferably covered with a heat insulating material. More preferably, an outermost layer of the heat exchanger 103 is entirely covered with a heat insulating material.
- the heat transfer plate 52 b is physically coupled to the heat transfer plate 52 a , and heat from the heat source is transferred to the heat conductors 62 and the body 61 through the heat transfer plates 52 a and 52 b .
- the structural example of FIG. 7 employs a hollow parallelepiped structure in which the heat transfer plate 52 a forms an upper surface, the heat transfer plate 52 b forms a lower surface, and a frame couples both the heat transfer plates to each other.
- the heat transfer plates 52 a and 52 b (and the frame) may be made of the same material as that of the heat conductors 62 , or of a material having a higher thermal conductivity than that of the heat conductors 62 .
- the flow passage 7 through which the heat exchange target fluid passes has dimensions of 6 mm width, 20 mm depth, and 1795 mm length, and includes many bent points (bent portions) midway. In order to increase the number of bent portions, it is preferable to provide not only bent portions which turn the extending direction of the flow passage by 180 degrees, but also a bent portion that turns the extending direction of the flow passage to be returned. More specifically, in the structural example of FIG.
- a returning bent portion 72 for turning the extending direction of the flow passage by 90 degrees to be returned toward the inlet side (i.e., toward the side denoted by “IN”) is disposed to constitute two flow passage systems A and B with intent to easily increase the number of bent portions.
- the number of flow passage systems is not limited to two as in the case of FIG. 7 , and may be three or more.
- the heat exchange target fluid flowing through the flow passage strikes against a flow passage wall at the bent points (bent portions) to generate turbulent streams, thereby increasing the efficiency of heat exchange performed at the flow passage wall (contact surface).
- a plurality of heat conductors is disposed between two flow passages 7 arranged parallel to each other.
- two parallel flow passages implies two flow passages that are arranged in such a positional relationship as denoted by 7 and 7 in FIG. 7 .
- the flow passage 7 is preferably disposed to extend in a meander shape through gaps between the heat conductors 62 that are arranged substantially at equal intervals.
- the heat exchange efficiency can be increased by coupling the plural heat exchangers 103 , each illustrated in FIG. 7 , according to the present invention through connectors 81 and 82 .
- the positions and the number of layers of the mounted heat conductors 62 can be determined on the basis of practical studies on the heat exchange efficiency.
- holes for mounting of the heat conductors 62 may be newly formed in a corresponding region of the body 61 such that the heat conductors 62 can be additionally mounted in the relevant region.
- FIG. 18 is a side view of a multi-stage heat exchanger that is constituted by stacking the heat exchangers 103 each illustrated in FIG. 7 .
- a multi-stage configuration can be obtained by connecting the inlet connector 81 of the heat exchanger 103 in an upper stage and the outlet connector 82 of the heat exchanger 103 in a lower stage through pipes 83 a to 83 c . While an example of FIG. 18 illustrates a four-stage configuration, the multi-stage configuration is not limited to the illustrated example, and the number of stages may be set to two or more optional numeral.
- the flow passage 7 is heated by not only the heat source positioned on the upper side, but also by the heat source positioned on the lower side in the heat exchangers except for that in the lowermost layer.
- the heat transfer plate 52 b is heated by the heat source (heater plate) positioned on the lower side as well.
- a surface at which two stages are stacked is not covered with a heat insulating material such that the heat source positioned in the lower stage and the heat transfer plate positioned in the upper stage are directly contacted with each other.
- the length of the flow passage can be easily prolonged by employing the multi-stage configuration. Furthermore, the heat exchanger according to the present invention is adaptable for various flow rates ranging from a large to small rates by changing the diameter and the total length of the flow passage without modifying an internal structure to be matched with a flow rate of the heat exchange target fluid.
- the heat exchange performance of 80% or more can be obtained even with the body size being reduced to 1 ⁇ 2.
- the case of performing the heat exchange on condition of a flow rate of 50 L/min or more is also adaptable by increasing the body size.
- FIG. 19 illustrates a configuration of a temperature-controlled supply apparatus 110 according to Embodiment 2 of the present invention.
- the temperature-controlled supply apparatus 110 includes a cooling-type heat exchanger 106 , a cooling device 111 , and pipes 112 a , 112 b , 113 a and 113 b.
- the cooling-type heat exchanger 106 includes a heat transfer structure 6 , and cooler plates 54 a and 54 b .
- the heat transfer structure 6 may be the same one as that used in each of the heat exchangers 101 to 104 .
- Flow passages through which a coolant circulates are formed to spread over the entire insides of the cooler plates 54 a and 54 b .
- an antifreeze solution or a gaseous coolant is used as the coolant.
- the coolant cooled by the cooling device 111 is supplied to the cooling-type heat exchanger 106 through the pipe 112 a , and absorbs heat while passing through the cooling-type heat exchanger 106 .
- the coolant After passing through the pipe 112 b , the coolant is returned to the cooling device 111 and then supplied again to the cooling-type heat exchanger 106 through the pipe 112 a .
- a heat exchange target fluid 73 (e.g., pure water) is supplied to the cooling-type heat exchanger 106 through the pipe 113 a , and is cooled while passing through the cooling-type heat exchanger 106 . Thereafter, the coolant is discharged through the pipe 113 b.
- FIG. 8 A test was conducted using an apparatus arranged as illustrated in FIG. 8 . Air 9 controlled in flow rate by a flow rate controller 10 was supplied to a bubbling device 11 , thus causing water to be contained in the air 9 . Then, the air 9 was passed through the heat exchanger 12 .
- the heat exchanger 12 was provided with a temperature controller 13 for an electric heating panel, a device 14 for measuring an inner temperature of PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), and a device 15 for measuring an outlet gas temperature to monitor the heat exchange.
- a temperature distribution in the surface of the body 61 was measured by thermography.
- FIG. 9 indicates the result measured by thermography. In FIG. 9 , a darker region represents a region under higher temperature. It was confirmed that the region under higher temperature was coincident with the mounted region of the heat conductors 62 . It was also confirmed that a temperature distribution over the entire heat exchanger was not polarized and was uniform.
- Example 2 an outlet temperature was measured by conducting tests over respective wide ranges of setting temperature and flow rate, i.e., 40 to 160° C. and 10 to 50 L/min respectively, by employing the same apparatus as that used in Example 1.
- FIG. 10 depicts the measurement result. It was confirmed that the heat exchange efficiency was 80% or more over the wide ranges of setting temperature and flow rate. It was also confirmed that the heat exchanger according to the present invention was flexibly adaptable for the wide range of flow rate by employing the same configuration without modifications.
- Example 3 the performance of the heat exchanger according to the present invention in which heat transfer with respect to the heat exchange target fluid was performed through resin was compared with the performance of the prior-art heat exchanger in which the heat transfer was performed through stainless steel, by employing the electric heating panel used in Example 1.
- humidified air was subjected to heat exchange as in Example 1.
- dried nitrogen was subjected to heat exchange.
- FIG. 11 depicts the comparison result.
- Metal 30L represents the measurement result for the heat exchanger using stainless steel
- Resin 30L represents the measurement result for the heat exchanger according to the present invention.
- the heat exchanger according to the present invention exhibits, even though the contact portion is made of resin, the performance comparable to that of the prior-art heat exchanger using stainless steel.
- the tests were conducted on mist of H 2 O in the heat exchanger according to the present invention, whereas the tests were conducted on dried nitrogen in the prior-art heat exchanger. Because air containing water mist requires heat corresponding to latent heat of water, it is estimated that the heat exchanger according to the present invention has higher performance than the level depicted in FIG. 11 .
- the heat exchanger according to the present invention is superior in heat exchange performance, and it is able to prevent not only corrosion of the heat exchanger attributable to the heat exchange target fluid, but also contamination of the heat exchange target fluid caused by the corrosion.
- the heat exchanger according to the present invention is further able to efficiently execute heating, cooling, and temperature control of corrosive chemicals and high-purity substances through heat exchange without causing corrosion and reducing purility of the high-purity substances.
- the present invention is useful to heat and cool, e.g., chemicals used in a semiconductor manufacturing process where high-purity substances are treated.
- the heat exchanger and the heat exchange method according to the present invention can be applied to a wide range of fields as high-efficiency heat exchangers in heating and evaporating apparatuses, cooling and condensing apparatuses, etc., including chemical, pharmaceutical, food, textile, electric power, and nuclear power industries in which purity of products and corrosion resistance are required.
Abstract
Description
- The present invention relates to heat exchange technology having no limitations in application fields. In particular, the present invention is useful not only for heat exchange of gases or liquids of corrosive substances, such as acids and alkalis, but also for temperature control of high-purity water, high-purity silicon compounds used in manufacturing semiconductors, etc. Thus, the present invention is effective in solving the problems with corrosion of devices, etc. and contamination of high-purity substances, which may occur during the heat exchange, and in realizing an improvement of a heat exchange rate.
- In other words, the present invention can provide a heat exchanger and a heat exchange method, which ensure high efficiency in general technical fields where temperature adjustment, such as cooling and heating, of substances are needed, while suppressing corrosion of devices and contamination caused by impurities.
- It is to be noted that, in this Description, not only an exothermic source, but also an endothermic source are called a “heat source” in some cases. The term “fluid” used in this Description involves a substance that causes a phase change (e.g., a phase change from liquid to gas) with heating or heat absorption.
- A heat exchanger is a device in which two objects having different temperatures are directly or indirectly contacted with each other to heat or cool one of the objects through heat transfer. The heat exchanger is used in cooling steps, heating steps, and refrigeration for industrial purposes in various fields including a boiler, a steam generator, food production, production of chemicals, cold storage, and so on.
- Usually, the heat exchanger has a structure depending on characteristics of a substance to be subjected to heat exchange (i.e., a heat exchange target substance). For example, in a heat exchanger for chemicals where heat exchange is performed with respect to highly-corrosive chemicals such as hydrofluoric acid, nitric acid, and sulfuric acid, highly-corrosive fluids such as strong acids and alkalis need to be heated and cooled by employing a heat exchanger having resistance to the chemicals. In that case, heat exchange is typically performed by indirect heating in which a contact portion made of a resin material that is less affected by acids or alkalis is immersed in a heat medium.
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FIG. 1 is a schematic view illustrating typical indirect heat exchange. While a heat exchange target fluid (e.g., acid, alkali, or water) is conveyed through a resin-madepipe 1 from aninlet 2 to anoutlet 3, heat exchange is performed between the fluid and aheat medium 4, of which temperature is adjusted by aheat source 5, through the resin-madepipe 1. Such a method can improve a heat exchange rate by increasing a surface area of the resin-madepipe 1 contacting with theheat medium 4, e.g., by increasing a length of thepipe 1 immersed in theheat medium 4. However, the cost of an apparatus, including a device for adjusting a fluid temperature in the heat source, containers, etc., may be expensive in some cases.FIG. 2 illustrates a typical example of direct heating in which heat exchange is performed directly with respect to a heat source without intervention of a heat medium. Direct heat exchange is performed by holding aheat source 5 in contact with apipe 1 made of a material that has high resistance to the heat exchange target fluid and that has good temperature characteristics. - In any type of heat exchange, the following points are required; apparatus components, including the conveying pipe, are not corroded by the heat exchange target fluid or the heat exchange medium, the heat exchange fluid is not contaminated during a heat exchange step, and the heat exchange is performed at high efficiency.
- In consideration of those requirements, the conveying pipe is coated with a resin or a ceramic to protect the conveying pipe to be not affected, e.g., corroded, by the heat exchange target fluid or the heat exchange medium.
- For example, there is proposed a heat transfer pipe for heat exchange (Patent Document 1), which is disposed in an atmosphere of high-temperature gas and which performs heat exchange between a fluid to be heated, which flows through the heat transfer pipe, and the high-temperature gas, wherein the heat transfer pipe through which the fluid to be heated flows has a three-layer structure in which the pipe is made of a heat-resistant alloy and an outer surface of the heat-resistant heat pipe is covered with a cover member made of a ceramic-alloy composite material with a thermal expansion buffer interposed therebetween, and the ceramic-alloy composite material forming the cover member contains Al and AlN on condition that AlN is 1 wt % or more and 90 wt % or less, and a total rate of (Al+AlN+AlON) is 50 wt % or more and 100 wt % or less.
- It is known that a fluorine-based resin has good corrosion resistance and heat resistance to various chemicals. However, when the conveying pipe is made of only the fluorine-based resin, the following drawbacks are caused because the fluorine-based resin is a poor heat conductor in itself. Heat exchange efficiency is low, a longer time is taken to reach a predetermined temperature, and accuracy in temperature control at the predetermined temperature is poor. Aiming to overcome those drawbacks, many proposals have been made in relation to, e.g., the technique of coating the fluorine-based resin over the surface of a metal having good thermal conductivity. For example, a constituent member of equipment using gas is proposed in which at least two layers of coating films, containing a fluorine-based resin, are coated over a substrate (Patent Document 2). The constituent member of equipment using gas is employed in, e.g., a heat exchanger having those coating films in which contents of the fluorine-based resin are gradually increased and contents of inorganic filler are gradually reduced from the lowermost layer film, coated over the substrate, to the uppermost layer film.
- Furthermore, there are provided an aluminum alloy member having good corrosion resistance, and a plate-fin type heat exchanger or a plate type heat exchanger in which a heat transfer portion employing a corrosive fluid as a medium is formed using the aluminum alloy member (Patent Document 3). An underlying film made of organic phosphoric acid is coated over a surface of the aluminum alloy member used in the plate-fin type heat exchanger or the plate type heat exchanger including the heat transfer portion in which the corrosive fluid is used as the medium, and a coating film made of a fluorine-based resin paint having an average film thickness of 1 to 100 μm after drying is coated over the underlying film, whereby durability in adhesion of the coating films is improved and high corrosion resistance to a corrosive fluid, e.g., seawater, is obtained.
- As described above, a method of coating a resin over a metal having good thermal conductivity is generally proposed. However, because two types of materials have different coefficients of thermal expansion, the coating layers are less adaptable for expansion and contraction, and they may peel off in some cases. This brings about the problem of causing corrosion of metal portions and contamination by metals, etc. Moreover, in the above-described method, the target fluid permeates through pin holes in a resin coating portion, and the above-mentioned problem is similarly unavoidable.
- Carbon having good thermal conductivity and corrosion resistance is employed in some cases. For example, there is proposed a block type heat exchanger using a method that is able to heat or cool a large amount of an aqueous solution of hydrogen chloride, containing chlorine, by the heat exchanger without altering a heat transfer surface (Patent Document 4). The heat transfer surface of the heat exchanger is made of carbon impregnated with a fluorine-based resin, and the heat exchanger is constituted by a block made of the carbon impregnated with the fluorine-based resin and arranged within a housing, the block including a flow passage for the aqueous solution of hydrogen chloride through which the aqueous solution of hydrogen chloride flows, and a flow passage for a heat medium through which the heat medium flows.
- A heat exchanger made of stainless steel can be used for a heat exchange target substance that is adaptable for a liquid contact portion made of metal. However, a thermal conductivity of stainless steel is relatively low among metals, and a heat source having a large capacity needs to be used to obtain a certain level of heat exchange performance. This brings about the problem that the apparatus body is enlarged and power consumption is increased.
- Although, as described above, many proposals trying to use various materials in heat exchangers have been made with intent to obtain high corrosion resistance and to increase the heat exchange efficiency, there is still a demand for development of heat exchange technology that is adaptable particularly for a highly-corrosive substance to be subjected to heat exchange, and that ensures high efficiency of heat exchange.
- Patent Document 1: Japanese Patent No. 3674401
- Patent Document 2: Japanese Patent Laid-Open Publication No. 2004-283699
- Patent Document 3: Japanese Patent Laid-Open Publication No. 2008-156748
- Patent Document 4: Japanese Patent Laid-Open Publication No. 2006-289799
- Patent Document 5: Japanese Patent Laid-Open Publication No. H9-280786
- In consideration of the above-described prior art, the present invention provides a heat exchanger that has high heat exchange performance and high corrosion resistance with respect to a heat exchange target fluid.
- A prior-art heat exchanger generally employs a method of performing heat exchange by contacting a member, which is held in contact with a heat exchange target fluid during the heat exchange of the fluid, with a heat medium such as a heat source or a coolant. A material of the contact member is selected depending on characteristics the fluid. However, the selected material of the contact member does not always have good thermal conductivity. In some cases, the disadvantage of the member having low thermal conductivity has to be compensated for by employing, e.g., many electric heaters as heat sources, or an electric heater having a large capacity. This often results in a decrease of energy efficiency in the heat exchange and an increase of the apparatus size.
- The present invention is featured in that heat exchange can be performed at high efficiency even when the material of the contact portion is selected with attention focused only to characteristics of the heat exchange target fluid. In addition, according to the present invention, a compact product can be obtained at a relatively low cost without increasing the apparatus size. An object of the present invention is to provide a high-efficiency heat exchanger that can be applied to a wide range of fields regardless of the type of heat exchange target fluid. Another object of the present invention is to provide a heat exchanger in which corrosion of components caused by the heat exchange target fluid is avoided, and the fluid having been subjected to the heat exchange is not contaminated. Still another object of the present invention is to provide a heat exchanger which has superior heat conduction characteristics in heating or cooling highly-corrosive aqueous solutions and gases, e.g., hydrofluoric acid and hydrogen chloride, and alkaline aqueous solutions, e.g., sodium hydroxide. Still another object of the present invention is to provide a heat exchange technique that enables heat exchange to be performed at high efficiency while high purity of the heat exchange target fluid is maintained.
- The present invention is constituted by the following technical matters.
- [1] A heat exchanger comprising a heat source, a heat transfer structure contacting with a heat exchange target fluid, and a heat transfer member that transfers heat from the heat source to the heat transfer structure, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein the heat transfer structure includes a body having an inlet, an outlet, and a flow passage for the heat exchange target fluid, and many heat conductors mounted to the body, an inner wall surface of the flow passage for the heat exchange target fluid, the inner wall surface defining a contact surface with the heat exchange target fluid, is made of a material stable against the heat exchange target fluid, the heat conductors are made of a material having a higher thermal conductivity than a material of the body, and the heat conductors are mounted near the flow passage for the heat exchange target fluid at positions where the heat conductors are not contacted with the heat exchange target fluid.
- [2] The heat exchanger according to [1], wherein the many heat conductors involve a plurality of heat conductors arranged in opposing relation on both sides of the flow passage for the heat exchange target fluid.
- [3] The heat exchanger according to [1] or [2], wherein the heat transfer member comprises two heat transfer members sandwiching the body, and one or more of the heat conductors extend from each of the two heat transfer members. Here, the mode of extension of the heat conductors includes not only the case where the heat transfer member and the heat conductors are formed integrally with each other, but also the case where the heat conductors are mounted as separate components to the heat transfer member.
- [4] The heat exchanger according to any one of [1] to [3], wherein the heat conductor has a pin-like configuration.
- [5] The heat exchanger according to [4], wherein at least part of the many heat conductors is formed integrally with the heat transfer member having a plate-like shape.
- [6] The heat exchanger according to [4] or [5], wherein at least part of the many heat conductors has an outer surface of a zigzag configuration. Preferably, more than the half of the many heat conductors has the outer surface of the zigzag configuration.
- [7] The heat exchanger according to [6], wherein the zigzag configuration is formed such that a surface area of the outer surface is 1.5 to 3 times a surface area of the outer surface including no protrusions of the zigzag configuration.
- [8] The heat exchanger according to Claim [6] or [7], wherein the heat conductor having the outer surface of the zigzag configuration is a screw.
- [9] The heat exchanger according to [8], wherein the heat conductor having the outer surface of the zigzag configuration is a flat-head screw.
- [10] The heat exchanger according to any one of [1] to [9], wherein the flow passage for the heat exchange target fluid has a plurality of bent portions.
- [11] The heat exchanger according to [10], wherein the flow passage for the heat exchange target fluid has a returning bent portion for turning an extending direction of the flow passage to be returned toward an inlet side.
- [12] The heat exchanger according to any one of [1] to [11], wherein at least part of the heat conductors arranged on a side nearer to the inlet is made of a material having a higher thermal conductivity than a material of the heat conductors arranged on a side farther away from the inlet. Here, the side nearer to the inlet implies, for example, a region spanning ½, ⅓ or ¼ of an overall length of the flow passage from the inlet. The side farther away from the inlet implies a region similarly spanning from the outlet.
- [13] The heat exchanger according to any one of [1] to [12], wherein the heat conductors are arranged in a larger number and at a higher density on a side nearer to the inlet than on a side farther away from the inlet.
- [14] The heat exchanger according to [12] or [13], wherein the outlet is a discharge port in communication with outside.
- [15] A heat exchanger wherein the heat exchanger according to any one of [1] to [13] is stacked plural.
- [16] The heat exchanger according to any one of [1] to [15], wherein the inner wall surface of the flow passage for the heat exchange target fluid is made of resin.
- [17] The heat exchanger according to any one of [1] to [15], wherein the inner wall surface of the flow passage for the heat exchange target fluid is made of metal or carbon.
- [18] The heat exchanger according to any one of [1] to [17], wherein the many heat conductors involve heat conductors made of copper and heat conductors made of aluminum.
- [19] The heat exchanger according to any one of [1] to [18], wherein the heat source is an exothermic source.
- [20] The heat exchanger according to any one of [1] to [18], wherein the heat source is an endothermic source.
- [21] A heat exchange method wherein heat-transfer type heat exchange is performed with respect to a fluid by employing the heat exchanger according to any one of [1] to [20].
- [22] A heat exchange method of performing heat-transfer type heat exchange with respect to a fluid by employing the heat exchanger according to [12], wherein the method comprises the steps of the heat conductors, which are made of a material having a relatively higher thermal conductivity than those on a side farther away from the inlet, on a side nearer to the inlet, and arranging the heat conductors, which are made of a material having a relatively lower thermal conductivity than those on a side nearer to the inlet, on a side farther away from the inlet, thereby variations in temperature distribution occurred between an upstream side and a downstream side of the flow passage for the heat exchange target fluid are suppressed.
- [23] A heat exchange method of performing heat-transfer type heat exchange with respect to a fluid by employing the heat exchanger according to [13], wherein the method comprises the steps of the heat conductors, which are made of a material having a relatively higher thermal conductivity than those on a side farther away from the inlet, on a side nearer to the inlet, and arranging the heat conductors, which are made of a material having a relatively lower thermal conductivity than those on a side nearer to the inlet, on a side farther away from the inlet, thereby variations in temperature distribution occurred between an upstream side and a downstream side of the flow passage for the heat exchange target fluid are suppressed.
- [24] A heat exchange method of performing heat-transfer type heat exchange with respect to a corrosive fluid by employing the heat exchanger according to [16].
- From another aspect, the present invention is constituted by the following technical matters.
- (1) A heat exchanger comprising a flow passage through which a heat exchange target fluid flows, and a heat transfer structure that is contacted with the heat exchange target fluid flowing through the flow passage, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein:
- (a) a surface of the heat transfer structure, the surface defining the contact surface with the heat exchange target fluid, is made of a material stable against the heat exchange target fluid,
- (b) heat conductors are mounted to the heat transfer structure, and are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- (c) the heat conductors are mounted near the contact surface of the heat transfer structure with the heat exchange target fluid at positions where the heat conductors are not contacted with the heat exchange target fluid,
- whereby heat conduction efficiency is increased at the contact surface of the heat transfer structure with the heat exchange target fluid.
- (2) The heat exchanger according to (1), wherein the heat conductor has a pin-like configuration. Here, the pin-like configuration involves, for example, not only a circular columnar shape and a polygonal pillar shape, but also the case where an outer surface of the heat conductor has a zigzag configuration.
- (3) The heat exchanger according to (1) or (2), wherein the heat conductor has a surface of a zigzag configuration.
- (4) The heat exchanger according to any one of (1) to (3), wherein the contact surface of the heat transfer structure with the heat exchange target fluid has a zigzag configuration.
- (5) The heat exchanger according to any one of (1) to (4), wherein the flow passage for the heat exchange target fluid has a returning configuration to make the heat exchange target fluid turbulent and to increase efficiency of heat transfer.
- (6) The heat exchanger according to any one of (1) to (5), wherein the flow passage is constituted such that a diameter and/or an overall length of the flow passage is changeable.
- (7) The heat exchanger according to any one of (1) to (6), wherein the heat exchange target fluid is gas or a liquid.
- (8) The heat exchanger according to any one of (1) to (7), wherein a material of the heat transfer structure is resin or metal.
- (9) The heat exchanger according to any one of (1) to (8), wherein the heat conductor is made of metal having a higher thermal conductivity than a material of the heat transfer structure.
- (10) A heat exchange method of contacting a heat transfer structure with a heat exchange target fluid, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein:
- (a) a surface of the heat transfer structure, the surface defining the contact surface with the heat exchange target fluid, is made of a material stable against the heat exchange target fluid,
- (b) heat conductors are mounted to the heat transfer structure, and are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- (c) the heat conductors are mounted near the contact surface of the heat transfer structure with the heat exchange target fluid at positions where the heat conductors are not contacted with the heat exchange target fluid,
- whereby heat conduction efficiency is increased at the contact surface of the heat transfer structure with the heat exchange target fluid.
- (11) The heat exchange method according to (10), wherein the heat conductor has a pin-like configuration.
- (12) The heat exchange method according to (10) or (11), wherein the heat conductor has a surface of a zigzag configuration.
- (13) The heat exchange method according to any one of (10) to (12), wherein the contact surface of the heat transfer structure with the heat exchange target fluid has a zigzag configuration.
- (14) The heat exchange method according to any one of (10) to (13), wherein the flow passage for the heat exchange target fluid has a returning configuration to make the heat exchange target fluid turbulent and to increase efficiency of heat transfer.
- (15) The heat exchange method according to any one of (10) to (14), wherein the flow passage is constituted such that a diameter and/or an overall length of the flow passage is changeable.
- (16) The heat exchange method according to any one of (10) to (15), wherein the heat exchange target fluid is gas or a liquid.
- (17) The heat exchange method according to any one of (10) to (16), wherein a material of the heat transfer structure is resin or metal.
- (18) The heat exchange method according to any one of (10) to (17), wherein the heat conductor is made of metal having a higher thermal conductivity than a material of the heat transfer structure.
- The following advantageous effects are obtained with the present invention.
- Because acids and alkalis vigorously react with metals, the metals cannot be used in a portion contacting with the acids and the alkalis. For that reason, heat exchangers using resins in contact portions have been used so far. However, because thermal conductivities of resins are low, thermal efficiency is poor, and an apparatus structure is increased in size and complicacy. According to the present invention, a heat exchanger having high heat exchange efficiency and a compact structure can be provided. Furthermore, since reaction between the heat exchanger and the heat exchange target fluid, such as acid and alkali, is avoided, temperatures of high-purity acid, alkali, etc. can be adjusted without contamination by a trace ingredient. Moreover, the present invention can be applied to other substances, such as high-purity water, than the acids and the alkalis regardless of whether the substances are in a liquid or gaseous state.
- By utilizing fluid dynamics and thermodynamics and by employing the direct heating method, the present invention can further provide a heat exchange technique, which ensures savings in electric power and space, and high heat exchange efficiency even when the portion contacting with the heat exchange target fluid is entirely made of resin.
- In addition, heat exchange performance of 80% or more is realized with a configuration to directly perform the heat exchange on condition that the portion contacting with the heat exchange target fluid is metal-free. Thus, it can be said that the present invention provides a heat exchanger having prominent performance in comparison with the prior art.
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FIG. 1 is a schematic view illustrating heat exchange by typical indirect heating according to prior art. -
FIG. 2 is a schematic view illustrating heat exchange by typical direct heating according to prior art. -
FIG. 3 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger using a plurality of independent heat conductors. -
FIG. 4 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger in which a plurality of heat conductors is integrated with a heat transfer plate. -
FIG. 5 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger using a heat conductor that has a zigzag surface configuration. -
FIG. 6 is a schematic sectional view illustrating one example of a heat transfer-type heat exchanger in which a flow passage for a heat exchange target fluid has a zigzag shape. -
FIG. 7 illustrates a sectional structure of a heat exchanger according toEmbodiment 1 of the present invention; specifically,FIG. 7-1 illustrates a section taken along a vertical plane (vertical direction), andFIG. 7-2 illustrates a section taken along a horizontal plane (horizontal direction). -
FIG. 8 illustrates layout of an apparatus used for testing heat exchange performance. -
FIG. 9 illustrates a temperature distribution confirmed by thermography, and represents that temperature rises in darker regions where the heat conductors are mounted, in comparison with the ambient temperature. -
FIG. 10 illustrates a relationship between measured values of an outlet gas temperature and a setting temperature, the relationship being obtained from test results. -
FIG. 11 comparatively illustrates heat exchange performance obtained with heat exchange through resin and heat exchange through a metal surface according to the present invention. -
FIG. 12 is a schematic sectional view to explain a zigzag configuration of the flow passage for the heat exchange target fluid; specifically,FIG. 12( a) is a sectional view to explain the case of doubling a surface area, andFIG. 12( b) is a sectional view to explain adjustment of a pitch depth. -
FIG. 13 is a schematic sectional view illustrating layout variations of the heat conductors. Specifically,FIG. 13( a) illustrates a layout example in which two heat conductors sandwiching a flow passage for the heat exchange target fluid therebetween are disposed to extend from above.FIG. 13( b) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 13( c) illustrates a layout example in which four heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 13( d) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 13( a) have zigzag configurations.FIG. 13( e) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 13( b) have zigzag configurations.FIG. 13( f) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 13( c) have zigzag configurations. -
FIG. 14 illustrates structural examples in which the heat transfer plate and the plural heat conductors inFIG. 13 are formed integrally with each other. Specifically,FIG. 14( a) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above.FIG. 14( b) illustrates a layout example in which two heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 14( c) illustrates a layout example in which four heat conductors sandwiching the flow passage for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 14( d) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 14( a) have zigzag configurations.FIG. 14( e) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 14( b) have zigzag configurations.FIG. 14( f) illustrates a structural example in which outer surfaces of the heat conductors in the layout example of the heat conductors inFIG. 14( c) have zigzag configurations. -
FIG. 15 is an illustration to explain a temperature distribution when heat conductors made of different materials are arranged; specifically,FIG. 15( a) depicts a plan view and a temperature distribution image when heat conductors of the same type are arranged, andFIG. 15( b) depicts a plan view and a temperature distribution image when heat conductors made of different materials are mounted. -
FIG. 16 is a plan view of a heat exchanger in which heat conductors are arranged at different densities between the upstream side and the downstream side. -
FIG. 17 illustrates a sectional structure of a heat exchanger equipped with a shower head according to the present invention; specifically,FIG. 17( a) illustrates a section taken along a horizontal plane (horizontal direction), andFIG. 17( b) illustrates a section taken along a vertical plane (vertical direction). -
FIG. 18 is a side view of a multi-stage heat exchanger that is constituted by stacking the heat exchangers each illustrated inFIG. 7 . -
FIG. 19 illustrates a configuration of a temperature-controlled supply apparatus according toEmbodiment 2 of the present invention. - The present invention relates to a heat exchanger and a heat exchange method, the heat exchanger comprising a flow passage through which a heat exchange target fluid flows, and a heat transfer structure that is contacted with the heat exchange target fluid flowing through the flow passage, thus performing heat-transfer type heat exchange through a contact surface of the heat transfer structure with the heat exchange target fluid, wherein:
- (1) a surface of the heat transfer structure, the surface defining the contact surface with the heat exchange target fluid, is made of a material stable against the heat exchange target fluid,
- (2) the heat transfer structure includes heat conductors that are mounted to the heat transfer structure, and that are made of a material having a higher thermal conductivity than a material of the heat transfer structure, and
- (3) the heat conductors are mounted near the contact surface of the heat transfer structure with the heat exchange target fluid at positions where the heat conductors are not contacted with the heat exchange target fluid,
- whereby heat conduction efficiency is increased at the contact surface of the heat transfer structure with the heat exchange target fluid.
- In the present invention, the heat conductors made of a material having a higher thermal conductivity than that of the heat transfer structure (particularly, its portion contacting with the heat exchange target fluid) are mounted in the heat transfer structure, which is made of a substance (material) neither affecting nor affected by the heat exchange target fluid, at positions where the heat conductors are not contacted with the fluid. The heat exchange target fluid can be efficiently heated or cooled by heating or cooling the heat transfer structure and transferring heat from a heat source to the heat exchange target fluid.
- In general, liquids and gases having various characteristics are employed as the heat exchange target fluids that are heated or cooled by heat exchangers. For example, aqueous solutions of acids or alkalis are used in chemical reactions, etching processes, and so on. However, because acids and alkalis vigorously react with metals, the metals cannot be used in a portion contacting with the acids and the alkalis in many cases. Resins are used in some products of heat exchangers that are used for heat exchange of those reactive heat exchange target fluids. However, because thermal conductivities of resins are low, heat exchange efficiency is poor, necessary electric power is increased, and shapes and structures of the heat exchangers are increased in size and complicacy in many cases.
- The heat exchanger according to the present invention employs the direct heating method and undergoes no limitations on materials of a surface of the heat transfer structure, the surface defining the contact surface with the heat exchange target fluid, insofar as the material is stable against the heat exchange target fluid. For example, a heat exchanger ensuring savings in electric power and space and having good thermal efficiency of 80% or more can be provided regardless of that the portion contacting with the heat exchange target fluid is entirely made of resin.
- [Heat Exchange Target Fluid]
- The heat exchange target fluid used in the present invention is not limited to particular one. Examples of the heat exchange target fluid are solutions or gases of corrosive acids such as hydrochloric acid, sulfuric acid, nitric acid, chromic acid, phosphoric acid, hydrofluoric acid, acetic acid, perchloric acid, hydrobromic acid, silicon fluoride acid, and boric acid, alkalis such as ammonia, potassium hydroxide, and sodium hydroxide, and metal salts such as silicon chloride, as well as high-purity water. Those heat exchange target fluids are used as materials to progress reactions with other substances, or chemicals, e.g., an etchant, employed in reaction steps, and they are used for intended purposes under control to proper temperatures by heat exchangers. The heat exchanger according to the present invention can perform heating, cooling, or temperature control of those heat exchange target fluids at high efficiency in a state free from contamination caused by trace impurities.
- [Heat Transfer Structure]
- The heat transfer structure used in the present invention has a surface defining the contact surface with the heat exchange target fluid, and heat conductors. The contact surface of the heat transfer structure with the heat exchange target fluid is made of a material stable against the heat exchange target fluid. In other words, the material of the contact surface is selected such that the surface of the heat transfer structure and the heat exchange target fluid will not react with each other in a temperature range where the heat exchange is performed, or that ingredients of the heat transfer structure will not elute from the surface in such a temperature range. Reactivity (corrosiveness) of the heat exchange target fluid is different depending on the material of the surface of the heat transfer structure, a contact temperature, etc. Furthermore, an allowable range of purity after the heat exchange is different depending on the use and properties of the heat exchange target fluid. Therefore, the material of the heat transfer structure cannot be specified indiscriminately. In metal halides and etchants used in manufacturing semiconductor devices, for example, because high-purity substances are employed, a reduction of purity attributable to the heat exchange process is not allowed. On the other hand, in heat exchangers for turbines, a change in purity of the heat exchange target fluid attributable to the heat exchange process is insignificant in many cases.
- The substance (material) of a member forming the surface of the heat transfer structure, which is contacted with the heat exchange target fluid, is optionally selected from metals such as iron, carbon steel, stainless steel, aluminum, and titanium, synthetic resins such as a fluorine-based resin and polyester, and ceramics. When highly-corrosive acids are subjected to heat exchange, the fluorine-based resin is preferably used. Examples of the fluorine-based resin are polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), tetrafluoroethylene-hexafluoropropylene copolymer (FEP), polychlorotrifluoroethylene (PCTFE), ethylene-chlorotrifluoroethylene copolymer (ECTFE), tetrafluoroethylene-ethylene copolymer (ETFE), polyvinylfluoride (PVF), fluorinated polypropylene (FLPP), and polyvinylidene fluoride (PVDF).
- In the heat exchanger according to the present invention, the heat transfer structure includes the heat conductors made of a material having a higher thermal conductivity than that of the heat transfer structure (particularly, its portion contacting with the heat exchange target fluid). The heat conductors are mounted near the contact surface of the heat transfer structure with the heat exchange target fluid (i.e., near a flow passage for the heat exchange target fluid) at the positions where the heat conductors are not contacted with the heat exchange target fluid.
- One exemplary configuration of the heat transfer structure will be described below with reference to
FIG. 3 . Aheat exchanger 101 illustrated inFIG. 3 includes aheat transfer structure 6 having abody 61,heat conductors 62, aheater plate 51 serving as a heat source,heat transfer plates flow passage 7 for the heat exchange target fluid. Heat from theheater plate 51 is diffused into the heat transfer structure 6 (including thebody 61 and the heat conductors 62) through theheat transfer plates body 61 and theheat conductors 62 are heated by the diffused heat and, at the same time, the heat exchange target fluid passing through theflow passage 7 is also heated by the diffused heat through acontact surface 63. Dotted-line arrows inFIG. 3 represent transfer of heat from thebody 61. Because the material of theheat conductors 62 has a higher thermal conductivity than that of thebody 61, temperatures of theheat conductors 62 rise more quickly than that of thebody 61, and the heat exchange with respect to the heat exchange target fluid can be performed efficiently. Theheat conductors 62 are embedded in thebody 61 in a state contacting with theheat transfer plate 52 a or theheater plate 51. To increase efficiency of the heat exchange, theheat conductors 62 and theflow passage 7 are preferably positioned as close as possible. An inner wall surface of theflow passage 7 is preferably a flat or curved surface having no irregularities from the viewpoint of maintenance, but it preferably has a zigzag configuration from the viewpoint of increasing heat exchange performance. - As illustrated in
FIG. 3 , theheat conductors 62 each having a columnar shape can be mounted by individually inserting theheat conductors 62 into holes formed in thebody 61. Alternatively, as illustrated inFIG. 4 , theheat transfer plate 52 and theplural heat conductors 62 may be formed integrally with each other, and theheat conductors 62 may be mounted by collectively inserting theheat conductors 62 into holes formed in thebody 61. The positions and the number of the mountedheat conductors 62 are determined in consideration of heat exchange efficiency, etc. By increasing surface areas of theheat conductors 62, heat can be uniformly and efficiently diffused from theheat conductors 62. The surface area of eachheat conductor 62 is preferably increased by forming theheat conductor 62 such that its outer surface has a zigzag configuration as illustrated inFIG. 5 . Stated in another way, an outer surface of theheat conductor 62 is preferably formed to have a configuration that annular mountains are continuously arranged in the lengthwise direction of the heat conductor 62 (i.e., a configuration that mountains and valleys are alternately arranged in a continuous way). The “configuration that annular mountains are continuously arranged” involves the case where the mountains and the valleys are spirally formed like thread ridges and grooves. More preferably, the zigzag configuration is formed such that a surface area of the outer surface of theheat conductor 62 is, e.g., 1.5 to 3 times a surface area of a column having the same diameter as theheat conductor 62, but not including the mountains (protrusions). When thebody 61 is made of resin, theheat conductor 62 having the zigzag configuration can be mounted in place by a method of mounting theheat conductor 62 in a state where the resin is still soft before hardening, and then hardening the resin, or a method of forming a hole in the hardened resin by, e.g., a drill, and then screwing the heat conductor having the zigzag configuration into the hole. When thebody 61 is made of metal, theheat conductor 62 is mounted by forming a hole with drilling in most cases. -
FIG. 13 is a schematic sectional view illustrating layout variations of theheat conductors 62. -
FIG. 13( a) illustrates a layout example in which twoheat conductors 62 sandwiching theflow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above.FIG. 13( b) illustrates a layout example in which twoheat conductors 62 sandwiching theflow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 13( c) illustrates a layout example in which fourheat conductors 62 sandwiching theflow passage 7 for the heat exchange target fluid therebetween are disposed to extend from above and below.FIG. 13( d) illustrates a structural example in which outer surfaces of theheat conductors 62 in the layout example of theheat conductors 62 inFIG. 13( a) have zigzag configurations.FIG. 13( e) illustrates a structural example in which outer surfaces of theheat conductors 62 in the layout example of theheat conductors 62 inFIG. 13( b) have zigzag configurations.FIG. 13( f) illustrates a structural example in which outer surfaces of theheat conductors 62 in the layout example of theheat conductors 62 inFIG. 13( c) have zigzag configurations. In any of the configurations illustrated inFIGS. 13( a) to 13(f), theplural heat conductors 62 are arranged in opposing relation on both sides of theflow passage 7 for the heat exchange target fluid. - In any of the configurations illustrated in
FIGS. 13( a) to 13(f), a heat exchanger includesheater plates heat transfer plates body 61, and theflow passage 7 for the heat exchange target fluid. Because the above-mentioned components are similar to those in theheat exchanger 101 inFIGS. 3 and 5 except for including two heater plates, descriptions of those components are omitted here. It is to be noted that, inFIGS. 13( a) to 13(d), thelower heater plate 51 b may be dispensed with. -
FIG. 14 illustrates structural examples in which theheat transfer plate 52 and theplural heat conductors 62 inFIG. 13 are formed integrally with each other. In any of the configurations illustrated inFIGS. 14( a) to 14(f), theplural heat conductors 62 are arranged in opposing relation on both sides of theflow passage 7 for the heat exchange target fluid. Because the configuration illustrated inFIG. 14 is similar to that illustrated inFIGS. 4 and 13 except that theheat transfer plate 52 and theplural heat conductors 62 are formed integrally with each other, detailed description of the configuration illustrated inFIG. 14 is omitted here. -
FIG. 15 is an illustration to explain a temperature distribution when heat conductors made of different materials are arranged. Specifically,FIG. 15( a) depicts a plan view and a temperature distribution image when theheat conductors 62 of the same type are arranged, and FIG. 15(b) depicts a plan view and a temperature distribution image when theheat conductors 62 made of different materials are mounted. - In any of
heat exchangers 104 illustrated inFIGS. 15( a) and 15(b), a number 135 of mount holes into which theheat conductors 62 are inserted are formed in theheat transfer plate 52 and the body 61 (not illustrated) substantially at equal intervals. Theheat conductors 62 are each detachably mounted into the mount holes of theheat transfer plate 52 and thebody 61. For example, eachheat conductor 62 may be formed in the shape of a screw having a flat head, and may be mounted to the mount hole by screwing theheat conductor 62. A large number ofheat conductors 62 may be constituted as a combination ofheat conductors 62 made of different materials. By combining theheat conductors 62 made of different materials, it is possible to eliminate variations in the temperature distribution, which occur between the upstream side and the downstream side of theflow passage 7. In addition, a manufacturing cost can be reduced by arranging theheat conductors 62 made of an expensive material only at necessary places, and arranging theheat conductors 62 made of an inexpensive material at other places. - In
FIG. 15( a), all theheat conductors 62 are formed of aluminum pins. InFIG. 15( b), theheat conductors 62 until the fifth column counting from left are formed of aluminum pins, and theheat conductors 62 after the sixth column counting from left are formed of copper pins. Stated in another way, a number 135 of aluminum pins are mounted as theheat conductors 62 inFIG. 15( a), while a number 45 of copper pins are mounted as theheat conductors 62 on the upstream side and aluminum pins are mounted on the downstream side inFIG. 15( b). - On the right side of
FIGS. 15( a) and 15(b), temperature distribution images are depicted. InFIG. 15( a), temperature is relatively low in a left half and is relatively high in a right half. On the other hand, inFIG. 15( b), variations in the temperature distribution are eliminated considerably. Thus, variations in the temperature distribution between the upstream side and the downstream side can be reduced by arranging theheat conductors 62 made of a material having a high thermal conductivity on the upstream side, and theheat conductors 62 made of a material having a relatively low thermal conductivity on the downstream side. With a reduction of the variations in the temperature distribution, distortions of the body, the heat transfer plates, etc. can be suppressed, and shortening of the heater lifetime can be prevented. Furthermore, in the case of treating a fluid that causes thermal denaturation when a temperature difference (ΔT) between temperature of the fluid passing through an inlet and temperature of the fluid passing through an outlet increases, it has been needed so far to heat the fluid to such an extent that an output is reduced not to excessively increase ΔT. In contrast, high-efficiency heat exchange can be performed with the heat exchanger according to the present invention in which the variations in the temperature distribution are reduced. -
FIG. 16 is a plan view of aheat exchanger 104 in which heatconductors 62 are arranged at different densities between the upstream side and the downstream side. In theheat exchanger 104 ofFIG. 16 , all theheat conductors 62 are formed of aluminum pins. The other configurations of theheat transfer plate 52, thebody 61, etc. are similar to those in theheat exchanger 104 ofFIG. 15 . InFIG. 16 , nineheat conductors 62 are arranged in the up-and-down direction until the fifth column counting from left, and four or fiveheat conductors 62 are arranged in the up-and-down direction in the sixth to fifteenth columns counting from left. Thus, the variations in the temperature distribution between the upstream side and the downstream side can also be reduced by arranging theheat conductors 62 at a higher density on the upstream side, and theheat conductors 62 at a lower density on the downstream side. In theheat exchanger 104 ofFIG. 16 , theheat conductors 62 made of materials having different thermal conductivities may be arranged on the upstream side and the downstream side such that the variations in the temperature distribution between the upstream side and the downstream side are adjusted more finely. -
FIG. 17 illustrates a sectional structure of aheat exchanger 105 equipped with a shower head. Specifically,FIG. 17( a) illustrates a section taken along a horizontal plane (horizontal direction), andFIG. 17( b) illustrates a section taken along a vertical plane (vertical direction). Theheat exchanger 105 equipped with the shower head has abody 61 including aheater plate 51, aheat transfer plate 52,many heat conductors 62, and aflow passage 7 for the heat exchange target fluid.Many discharge ports 75 communicating with theflow passage 7 are formed in thebody 61. Theheat exchanger 105 equipped with the shower head further includes twoinlets exchange target fluid 73 having entered theflow passage 7 through the inlets is discharged from thedischarge ports 75 after being heated. Thus, in theheat exchanger 105 equipped with the shower head, thedischarge ports 75 communicating with the outside serve as outlets. - The
many heat conductors 62 are constituted by copper-made pin-like members arranged on the upstream side nearer to theinlets FIG. 15( b), such that variations in temperature distribution over the entire length of theflow passage 7 is minimized. Stated in another way, the copper-made pin-like members are mainly arranged in regions closer to both the right and left sides of thebody 61, and the aluminum-made pin-like members are mainly arranged in a central region of thebody 61. Furthermore, manybent portions 71 are formed in theflow passage 7 such that the heat exchange target fluid strikes against a flow passage wall in thebent portions 71 to generate turbulent streams, thereby eliminating unevenness in heating. Accordingly, the fluids substantially at the same temperature are discharged from themany discharge ports 75. While theheat exchanger 105 equipped with the shower head is mainly used to provide a gas shower for discharging gas, a liquid may be discharged in some cases. - The
heat exchanger 105 equipped with the shower head may be constituted in multiple stages by arranging one or a plurality of heat exchangers equipped with no shower heads in an upper stage, and by connecting two inlets of theheat exchanger 105 equipped with the shower head to an outlet of the heat exchanger in the upper stage through a branching pipe (seeFIG. 18 described later). -
FIG. 6 is a schematic sectional view illustrating principal parts of acylindrical heat exchanger 102 embodying the present invention. Aheat transfer structure 6 including aheat conductor 62 and abody 61 is disposed on an inner surface of acylindrical heat source 5. Theheat conductor 62 has a zigzag-shaped surface that is positioned on the side facing a flow passage, and a flat surface that is held in contact with theheat source 5. Thebody 61 covers a surface of theheat conductor 62 to define theflow passage 7, and it is contacted with the heat exchange target fluid. Here, thebody 61 is preferably provided as a thin film that is formed on the surface of theheat conductor 62. A surface of thebody 61 contacting with the heat exchange target fluid is preferably formed in a zigzag shape similar to that of theheat conductor 62. The heat exchange efficiency at the body surface is improved by forming the body surface in a zigzag shape so as to increase a contact surface area. -
FIG. 12 is a schematic sectional view to explain a zigzag configuration of the flow passage for the heat exchange target fluid. Specifically,FIG. 12( a) is a sectional view to explain the case of doubling a surface area, andFIG. 12( b) is a sectional view to explain adjustment of a pitch depth. -
FIG. 12( a) illustrates an example in which an inner surface of theheat transfer structure 6 contacting with the heatexchange target fluid 73 has such a zigzag configuration that regular triangles with one side being 2 mm are continuously arranged along its cross-section. In other words, the inner surface of theheat transfer structure 6 has a configuration that annular mountains are continuously arranged in the lengthwise direction of theheat transfer structure 6. With the zigzag configuration described above, the surface area of the inner surface of theheat transfer structure 6 is increased twice that of a flat inner surface of the heat transfer structure not having the zigzag configuration. As a result, the heat exchange efficiency can be doubled. The zigzag configuration of theheat transfer structure 6 is not limited to that illustrated inFIG. 12 , and the present invention disclosed here involves the case of forming the zigzag configuration such that the surface area of the inner surface of theheat transfer structure 6 is increased 1.5 to 3 times, for example. - While the heat exchange efficiency is increased as the surface area of the inner surface of the
heat transfer structure 6 increases, it is not always preferable to increase the surface area as far as possible depending on properties of the heat exchange target fluid, such as a flow rate and viscosity. The left side ofFIG. 12( b) illustrates a state wheregaps 74 are generated between the inner surface of theheat transfer structure 6 and the fluid 73. In that state, because non-contact portions are generated between the inner surface of theheat transfer structure 6 and the fluid 73, the heat exchange efficiency is reduced. Thus, when generation of the non-contact portions due to the presence of thegaps 74 is estimated, it is needed to make adjustment not to generate the non-contact portions by increasing the pitch (groove size) of the zigzag configuration. Thecylindrical heat exchanger 102 may be constituted in a detachable manner, and the pluralcylindrical heat exchangers 102 having different pitches may be prepared. - [Material of Heat Conductor and Distance Between Heat Conductor and Heat Exchange Target Fluid]
- The
heat conductor 62 is made of a material having a higher thermal conductivity than that of thebody 61. However, the expression “a higher thermal conductivity” implies a relative value in terms of comparison between conductivities of both the materials, and it does not imply a specific absolute value. The thermal conductivity is usually given as about 0.2 W/m·k for plastic, about 0.25 for a fluorine-based resin, about 47 for carbon steel, about 15 for stainless steel, 237 for aluminum, 386 for pure copper, and about 1 for PYREX (registered trademark) glass, for example. From the above-mentioned materials, proper ones may be selected in consideration of relative thermal conductivities. Because the fluorine-based resin has a minimum value, the heat exchange efficiency is increased regardless of which one of those materials is selected as the heat conductor, when thebody 61 is made of the fluorine-based resin. When the material of the heat transfer structure 6 (body 61) is metal, specifically when the body is made of stainless steel, a metal having higher thermal conductivity than the material of the heat transfer structure 6 (body 61), e.g., carbon steel, aluminum, or pure copper, can be selected as the material of the heat conductor. It is here to be noted that the substance (material) of the heat conductor preferably has a thermal conductivity as high as possible. - There is known, e.g., a heat exchanger in which the
contact surface 63 of theheat transfer structure 6 with the heat exchange target fluid is coated with the fluorine-based resin, and thebody 61 is made of stainless steel. For example, in the case of a plate made of stainless steel having a thickness of 8 mm with or without a corrosion-resistant coating of the fluorine-based resin, a total heat transfer coefficient is measured as 1070 W/m2·k for the plate made of only the stainless steel, and 291 for the plate with the corrosion coating of 500 μm. This result shows that an amount of transferred heat is reduced to ⅓ in the latter plate. It is also reported that the heat transfer coefficient is 845 when the plate is coated with the corrosion coating of 50 μm. - Accordingly, the distance between the heat conductor and the heat exchange target fluid is preferably as short as possible.
- The structure of a heat exchanger according to
Embodiment 1 of the present invention will be described in detail below. Aheat exchanger 103 illustrated inFIG. 7 has a parallelepiped shape with dimensions of 150 mm×195 mm×34 mm (height). The heat exchange target fluid is subjected to heat exchange during a process of entering theheat exchanger 103 through an inlet connector (inlet) 81 and passing through theflow passage 7 for the heat exchange target fluid, which includes many bent points (bent portions) 71 and 72, until flowing out from an outlet connector (outlet) 82. Theflow passage 7 is provided by forming a groove-like space in abody 61 in the form of a block made of a fluorine-based resin. A number 172 ofheat conductors 62 are mounted on both sides of theflow passage 7 at intervals of 600 μm. Theheat conductors 62 are each formed of a cross-recessed flat head machine screw (i.e., a screw having a flat head) with a diameter of 3 mm and a length of 18 mm, and they are screwed into holes, which are formed in thebody 61 of theheat transfer structure 6, through aheat transfer plate 52 a. Because those screws have flat upper surfaces, an upper surface of theheat transfer plate 52 a can be made flush. A barrel portion of each screw where threads are formed preferably has a columnar shape that extends in the same diameter without tapering. By employing a standard screw as theheat conductor 62, the manufacturing cost of the heat exchanger can be reduced significantly. The present invention disclosed here involves the case of employing, e.g., a screw (copper) of M3×20 m with a pitch of 0.5 mm or a screw (aluminum) of M4×12 mm with a pitch of 0.7 mm in accordance with JIS standards. - A heat source (not illustrated) is disposed in contact with at least a region of the
heat transfer plate 52 a where theheat conductors 62 are disposed. The heat source is preferably disposed in contact with respective surfaces of both theheat transfer plates heat exchanger 103 is entirely covered with a heat insulating material. - The
heat transfer plate 52 b is physically coupled to theheat transfer plate 52 a, and heat from the heat source is transferred to theheat conductors 62 and thebody 61 through theheat transfer plates FIG. 7 employs a hollow parallelepiped structure in which theheat transfer plate 52 a forms an upper surface, theheat transfer plate 52 b forms a lower surface, and a frame couples both the heat transfer plates to each other. Theheat transfer plates heat conductors 62, or of a material having a higher thermal conductivity than that of theheat conductors 62. - Because the
heat conductors 62 and the flow passage 7 (i.e., the heat exchange target fluid) are positioned close to each other through a spacing of 600 μm therebetween, good thermal transfer is obtained. Theflow passage 7 through which the heat exchange target fluid passes has dimensions of 6 mm width, 20 mm depth, and 1795 mm length, and includes many bent points (bent portions) midway. In order to increase the number of bent portions, it is preferable to provide not only bent portions which turn the extending direction of the flow passage by 180 degrees, but also a bent portion that turns the extending direction of the flow passage to be returned. More specifically, in the structural example ofFIG. 7 , a returningbent portion 72 for turning the extending direction of the flow passage by 90 degrees to be returned toward the inlet side (i.e., toward the side denoted by “IN”) is disposed to constitute two flow passage systems A and B with intent to easily increase the number of bent portions. The number of flow passage systems is not limited to two as in the case ofFIG. 7 , and may be three or more. The heat exchange target fluid flowing through the flow passage strikes against a flow passage wall at the bent points (bent portions) to generate turbulent streams, thereby increasing the efficiency of heat exchange performed at the flow passage wall (contact surface). Preferably, a plurality of heat conductors is disposed between twoflow passages 7 arranged parallel to each other. Here, the expression “two parallel flow passages” implies two flow passages that are arranged in such a positional relationship as denoted by 7 and 7 inFIG. 7 . Speaking from another viewpoint, theflow passage 7 is preferably disposed to extend in a meander shape through gaps between theheat conductors 62 that are arranged substantially at equal intervals. - The heat exchange efficiency can be increased by coupling the
plural heat exchangers 103, each illustrated inFIG. 7 , according to the present invention throughconnectors heat conductors 62 can be determined on the basis of practical studies on the heat exchange efficiency. In a region where the temperature of the heat exchange target fluid is lower than the specified value, holes for mounting of theheat conductors 62 may be newly formed in a corresponding region of thebody 61 such that theheat conductors 62 can be additionally mounted in the relevant region. -
FIG. 18 is a side view of a multi-stage heat exchanger that is constituted by stacking theheat exchangers 103 each illustrated inFIG. 7 . A multi-stage configuration can be obtained by connecting theinlet connector 81 of theheat exchanger 103 in an upper stage and theoutlet connector 82 of theheat exchanger 103 in a lower stage throughpipes 83 a to 83 c. While an example ofFIG. 18 illustrates a four-stage configuration, the multi-stage configuration is not limited to the illustrated example, and the number of stages may be set to two or more optional numeral. When the heat exchanger is of the multi-stage configuration as illustrated, theflow passage 7 is heated by not only the heat source positioned on the upper side, but also by the heat source positioned on the lower side in the heat exchangers except for that in the lowermost layer. In other words, in the example ofFIG. 18 , theheat transfer plate 52 b is heated by the heat source (heater plate) positioned on the lower side as well. When constituting the multi-stage configuration, a surface at which two stages are stacked is not covered with a heat insulating material such that the heat source positioned in the lower stage and the heat transfer plate positioned in the upper stage are directly contacted with each other. - Thus, in the heat exchanger according to the present invention, the length of the flow passage can be easily prolonged by employing the multi-stage configuration. Furthermore, the heat exchanger according to the present invention is adaptable for various flow rates ranging from a large to small rates by changing the diameter and the total length of the flow passage without modifying an internal structure to be matched with a flow rate of the heat exchange target fluid.
- For example, when heat exchange is performed on condition of a flow rate of 10 L/min in terms of nitrogen gas, the heat exchange performance of 80% or more can be obtained even with the body size being reduced to ½. The case of performing the heat exchange on condition of a flow rate of 50 L/min or more is also adaptable by increasing the body size.
-
FIG. 19 illustrates a configuration of a temperature-controlledsupply apparatus 110 according toEmbodiment 2 of the present invention. The temperature-controlledsupply apparatus 110 includes a cooling-type heat exchanger 106, acooling device 111, andpipes - The cooling-
type heat exchanger 106 includes aheat transfer structure 6, andcooler plates heat transfer structure 6 may be the same one as that used in each of theheat exchangers 101 to 104. Flow passages through which a coolant circulates are formed to spread over the entire insides of thecooler plates cooling device 111 is supplied to the cooling-type heat exchanger 106 through thepipe 112 a, and absorbs heat while passing through the cooling-type heat exchanger 106. After passing through thepipe 112 b, the coolant is returned to thecooling device 111 and then supplied again to the cooling-type heat exchanger 106 through thepipe 112 a. A heat exchange target fluid 73 (e.g., pure water) is supplied to the cooling-type heat exchanger 106 through thepipe 113 a, and is cooled while passing through the cooling-type heat exchanger 106. Thereafter, the coolant is discharged through thepipe 113 b. - Practical examples of the present invention will be described below as Examples. It is to be noted that the following Examples merely represent practical examples, and that the present invention is not restricted by the following Examples.
- The fact that the present invention can improve the heat exchange efficiency was proved by employing a
heat exchanger 12 having the same configuration as that of theheat exchanger 103 illustrated inFIG. 7 . - A test was conducted using an apparatus arranged as illustrated in
FIG. 8 .Air 9 controlled in flow rate by aflow rate controller 10 was supplied to a bubblingdevice 11, thus causing water to be contained in theair 9. Then, theair 9 was passed through theheat exchanger 12. Theheat exchanger 12 was provided with atemperature controller 13 for an electric heating panel, adevice 14 for measuring an inner temperature of PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), and adevice 15 for measuring an outlet gas temperature to monitor the heat exchange. Moreover, a temperature distribution in the surface of thebody 61 was measured by thermography.FIG. 9 indicates the result measured by thermography. InFIG. 9 , a darker region represents a region under higher temperature. It was confirmed that the region under higher temperature was coincident with the mounted region of theheat conductors 62. It was also confirmed that a temperature distribution over the entire heat exchanger was not polarized and was uniform. - In Example 2, an outlet temperature was measured by conducting tests over respective wide ranges of setting temperature and flow rate, i.e., 40 to 160° C. and 10 to 50 L/min respectively, by employing the same apparatus as that used in Example 1.
FIG. 10 depicts the measurement result. It was confirmed that the heat exchange efficiency was 80% or more over the wide ranges of setting temperature and flow rate. It was also confirmed that the heat exchanger according to the present invention was flexibly adaptable for the wide range of flow rate by employing the same configuration without modifications. - In Example 3, the performance of the heat exchanger according to the present invention in which heat transfer with respect to the heat exchange target fluid was performed through resin was compared with the performance of the prior-art heat exchanger in which the heat transfer was performed through stainless steel, by employing the electric heating panel used in Example 1. In the present invention, humidified air was subjected to heat exchange as in Example 1. On the other hand, in the prior-art heat exchanger, dried nitrogen was subjected to heat exchange.
FIG. 11 depicts the comparison result. “Metal 30L” represents the measurement result for the heat exchanger using stainless steel, and “Resin 30L” represents the measurement result for the heat exchanger according to the present invention. As seen fromFIG. 11 , the heat exchanger according to the present invention exhibits, even though the contact portion is made of resin, the performance comparable to that of the prior-art heat exchanger using stainless steel. - Additionally, the tests were conducted on mist of H2O in the heat exchanger according to the present invention, whereas the tests were conducted on dried nitrogen in the prior-art heat exchanger. Because air containing water mist requires heat corresponding to latent heat of water, it is estimated that the heat exchanger according to the present invention has higher performance than the level depicted in
FIG. 11 . - The heat exchanger according to the present invention is superior in heat exchange performance, and it is able to prevent not only corrosion of the heat exchanger attributable to the heat exchange target fluid, but also contamination of the heat exchange target fluid caused by the corrosion. The heat exchanger according to the present invention is further able to efficiently execute heating, cooling, and temperature control of corrosive chemicals and high-purity substances through heat exchange without causing corrosion and reducing purility of the high-purity substances. The present invention is useful to heat and cool, e.g., chemicals used in a semiconductor manufacturing process where high-purity substances are treated. The heat exchanger and the heat exchange method according to the present invention can be applied to a wide range of fields as high-efficiency heat exchangers in heating and evaporating apparatuses, cooling and condensing apparatuses, etc., including chemical, pharmaceutical, food, textile, electric power, and nuclear power industries in which purity of products and corrosion resistance are required.
-
-
- 1: resin pipe
- 2: inlet of heating target substance
- 3: outlet of heating target substance
- 4: heat medium
- 5: heat source
- 51: heater plate
- 52: heat transfer plate (heat transfer member)
- 53: heat insulating material
- 54: cooler plate
- 6: heat transfer structure
- 61: body
- 62: heat conductor
- 63: contact surface
- 7: flow passage for heat exchange target fluid
- 71: bent portion of flow passage for heat exchange target fluid
- 72: returning bent portion of flow passage for heat exchange target fluid
- 73: heat exchange target fluid
- 74: gap
- 75: discharge port
- 8: connector
- 81: inlet connector (inlet)
- 82: outlet connector (outlet)
- 83: pipe
- 9: air
- 10: flow rate controller
- 11: device for bubbling air into water
- 12: heat exchanger
- 13: device for controlling and measuring temperature of electric heating panel
- 14: device for measuring inner temperature
- 15: device for measuring outlet gas temperature
- 101 to 104: heat exchangers
- 105: heat exchanger equipped with shower head
- 106: cooling-type heat exchanger
- 110: temperature-controlled supply apparatus
- 111: cooling device
- 112 to 113: pipes
Claims (23)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-120876 | 2012-05-28 | ||
JP2012120876 | 2012-05-28 | ||
PCT/JP2013/064584 WO2013180047A1 (en) | 2012-05-28 | 2013-05-27 | High-efficiency heat exchanger and high-efficiency heat exchange method |
Publications (1)
Publication Number | Publication Date |
---|---|
US20150159958A1 true US20150159958A1 (en) | 2015-06-11 |
Family
ID=49673242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/403,678 Abandoned US20150159958A1 (en) | 2012-05-28 | 2013-05-27 | High-efficiency heat exchanger and high-efficiency heat exchange method |
Country Status (5)
Country | Link |
---|---|
US (1) | US20150159958A1 (en) |
JP (1) | JP5992518B2 (en) |
KR (1) | KR102100785B1 (en) |
TW (1) | TW201408983A (en) |
WO (1) | WO2013180047A1 (en) |
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US9609785B1 (en) | 2016-02-03 | 2017-03-28 | International Business Machines Corporation | Air-cooled heatsink for cooling integrated circuits |
US9655287B1 (en) | 2016-02-03 | 2017-05-16 | International Business Machines Corporation | Heat exchangers for cooling integrated circuits |
US20180076494A1 (en) * | 2015-03-19 | 2018-03-15 | Autonetworks Technologies, Ltd. | Cooling member and power storage module |
US20190107337A1 (en) * | 2016-06-27 | 2019-04-11 | Neo Corporation | Heat exchanger |
US20230022084A1 (en) * | 2019-12-26 | 2023-01-26 | M. Technique Co., Ltd. | Flow reactor |
US20230341187A1 (en) * | 2019-12-26 | 2023-10-26 | M. Technique Co., Ltd. | Heat exchanger |
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JP2016168780A (en) * | 2015-03-13 | 2016-09-23 | 富士フイルム株式会社 | Liquid supply device and image formation device |
GB2546507B (en) * | 2016-01-19 | 2022-03-02 | Kenwood Ltd | Food processing hub |
MX2021013148A (en) * | 2019-05-28 | 2021-12-10 | Mitsui Chemicals Inc | Cooling device and method for manufacturing cooling device. |
JP7454488B2 (en) | 2020-11-20 | 2024-03-22 | 三井化学株式会社 | Temperature control unit and temperature control unit manufacturing method |
KR102542478B1 (en) | 2021-05-28 | 2023-06-14 | 주식회사 카본가람 | Method of pfa impregnation for block type graphite heat exchanger |
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Also Published As
Publication number | Publication date |
---|---|
KR102100785B1 (en) | 2020-04-14 |
TW201408983A (en) | 2014-03-01 |
JPWO2013180047A1 (en) | 2016-01-21 |
JP5992518B2 (en) | 2016-09-14 |
WO2013180047A1 (en) | 2013-12-05 |
KR20150020578A (en) | 2015-02-26 |
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