US20150308537A1 - Instrumented Platform for Vibration-Sensitive Equipment - Google Patents
Instrumented Platform for Vibration-Sensitive Equipment Download PDFInfo
- Publication number
- US20150308537A1 US20150308537A1 US14/791,570 US201514791570A US2015308537A1 US 20150308537 A1 US20150308537 A1 US 20150308537A1 US 201514791570 A US201514791570 A US 201514791570A US 2015308537 A1 US2015308537 A1 US 2015308537A1
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- US
- United States
- Prior art keywords
- vibration
- tabletop
- plate
- actuator
- inner core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F7/00—Vibration-dampers; Shock-absorbers
- F16F7/10—Vibration-dampers; Shock-absorbers using inertia effect
- F16F7/1005—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass
- F16F7/1011—Vibration-dampers; Shock-absorbers using inertia effect characterised by active control of the mass by electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/005—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion using electro- or magnetostrictive actuation means
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B13/00—Details of tables or desks
- A47B13/08—Table tops; Rims therefor
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B37/00—Tables adapted for other particular purposes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/002—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion characterised by the control method or circuitry
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H13/00—Measuring resonant frequency
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B37/00—Tables adapted for other particular purposes
- A47B2037/005—Tables specially adapted for laboratories
Definitions
- the vibration isolators reduce the vibration transmitted to the tabletop from the floor.
- the tabletop top itself, however, has its own natural frequencies and corresponding flexural vibration modes that can be easily excited by residual vibration coming through the isolators or by other sources such as acoustical excitation, air turbulence and dynamic forces generated by the payload equipment installed on the table.
- the main flexural vibration modes usually have a global character, which means that an excitation at any point of the tabletop generates a vibration pattern encompassing the whole tabletop surface. Those natural vibrations are very lightly damped and therefore can reach high amplitudes unless special damping means are introduced into the tabletop structure.
- FIG. 6 shows an alternate embodiment of a tabletop 12 wherein a strip 80 is located between the top plate 20 and a hole sealing tile 82 .
- the hole sealing tile 82 may have a plurality of cups 84 that are located adjacent to the threaded apertures 30 to collect debris that fall through the apertures 30 .
- the strip 80 may be a piezoelectric device that functions as a sensor and/or an actuator. Alternatively, optical cables or other devices may be located between the plate 20 and tile 82 to provide sensing and/or actuating functions.
- the tile 82 can protect the strip 80 during the manufacturing process of constructing the tabletop 12 .
Abstract
Description
- The present application is a continuation application of U.S. patent application Ser. No. 10/693,222, filed Oct. 24, 2003, and entitled “Instrumented Platform for Vibration-Sensitive Equipment.”
- 1. Field of the Invention
- The subject matter disclosed generally relates to industrial tables such as optical tables.
- 2. Background Information
- There have been developed various tables for industrial use such as optical bench tables or vibration shaker tables. U.S. Pat. No. 5,154,963 issued to Terry discloses an industrial tabletop that has a top plate, a bottom plate and a honeycomb structure that separates the plates. The honeycomb structure allows for threaded apertures in the top plate. External vibration-sensitive payload devices such as an optical component of an optical system, or a device under test in a shaker system, can be attached to the threaded apertures of the table.
- In many experimental research and industrial applications it is desirable to isolate the tabletop from external vibration such as the natural tremor of the building structure. U.S. Pat. No. 6,209,841 issued to Houghton et al. discloses an active isolation module that can be placed between the building floor and a tabletop to dampen tabletop vibration. The isolator includes a vibration sensor and an actuator that are connected to a controller. The sensor senses vibration and provides an output signal to the controller. The controller then processes the output signal and provides a drive signal to excite the actuator and offset the vibration.
- The vibration isolators reduce the vibration transmitted to the tabletop from the floor. The tabletop top itself, however, has its own natural frequencies and corresponding flexural vibration modes that can be easily excited by residual vibration coming through the isolators or by other sources such as acoustical excitation, air turbulence and dynamic forces generated by the payload equipment installed on the table. The main flexural vibration modes usually have a global character, which means that an excitation at any point of the tabletop generates a vibration pattern encompassing the whole tabletop surface. Those natural vibrations are very lightly damped and therefore can reach high amplitudes unless special damping means are introduced into the tabletop structure.
- Passive dampers of various designs are widely used in construction of optical tables. The “Shock and Vibration Handbook”, ed. By C. M. Harris, 4th edition, 1996; 5th edition, 2001, Ch. 37, provides a survey of the state of the art in this field and a classification of dampers (damping treatments). According to it, the known types of damping treatments include:
-
- Free-layer damping treatments, where the energy is dissipated by means of extensional deformation of a damping layer (made of visco-elastic material) induced by flexural vibration of the base structure.
- Constrained-layer damping treatments, where the constraining layer helps induce relatively large shear deformations in the visco-elastic layer in response to flexural vibration of the base structure, thereby providing more effective energy dissipation mechanism.
- Integral damping treatments, including use of damped laminated sheets and/or damped joints in the construction assembly.
- Tuned dampers, which are essentially mass-spring systems having resonances matched (tuned) to the resonance frequency of the base structure. The application of the tuned damper replaces the resonance peak of the base structure, typically, by two peaks of lesser amplitude.
- Damping links, i.e., visco-elastic elements joining tow parts of the structure that experience large relative motion in the process of vibration.
- Some of cited damping techniques have found applications in optical tables. In particular, Newport Corporation (see “The Newport Resource” catalog by Newport Corporation, 2003) uses tuned dampers, constrained layer treatment of work surfaces and integral damping in its optical tabletop designs.
- Nevertheless, the growing demand for high precision and high throughput in optoelectronics and semiconductor industries, as well as the needs of modern scientific experimental instruments, require higher damping performance of optical tables than that achieved by the methods and devices known in the state of the art. Active vibration control means are known to be able to achieve superior performance compared to passive control.
- It is sometimes desirable to monitor the vibration level on the table. For example, in a precision measurement system the real-time vibration data could qualify or disqualify a certain measurement. In a precision manufacturing system, the real-time vibration data could indicate an increased probability of a particular manufactured item, such as a semiconductor wafer, being defective. Vibration monitoring is also necessary if the tabletop in question is part of a vibration test setup.
- The vibration signal may be used merely to indicate increased vibration levels on the platform during certain periods of time. In this case the vibration sensors can be placed at almost any point of the tabletop because of the global character of main vibration modes; the areas near the corners of the tabletop represent a good place for vibration sensors since these areas are responsive to all typical vibration modes of the tabletop top. In other cases, the exact value of vibration input at a critical vibration-sensitive equipment location is of interest. In this situation the sensors should be placed immediately adjacent to the attachment points of the vibration-sensitive equipment.
- Deployment of vibration measurement systems, including sensors and cables, on the working surface of the tabletop would detract from the valuable payload space. It may be impossible to place the sensors near the most vibration-sensitive pieces of equipment due to space restrictions. In a production environment it may be impractical due to required set-up time. Therefore, a system monitoring the vibration of the tabletop while leaving its surface clear and accessible to the user would be very desirable.
- The essentials of the optical tabletop design are disclosed in the U.S. Pat. No. 4,621,006, entitled “Honeycomb tabletop manufacture and clean-room compatible honeycomb tables” issued to Terry et al. and U.S. Pat. No. 5,500,269, entitled “Honeycomb tabletop manufacture and clean-room compatible honeycomb tables” issued to Terry. Additional details and variations can be found in U.S. Pat. No. 4,645,171, entitled “Honeycomb tabletop” issued to Heide, U.S. Pat. No. 5,061,541, entitled “Honeycomb tables” issued to Gertel, U.S. Pat. No. 5,626,157, entitled “Optical table” issued to Galpin et al. and U.S. Pat. No. 5,962,104, entitled “Optical Table” issued to Gertel et al. For an extensive general description of optical honeycomb tables, reference may be made to the 2000 Vibration Control Catalog and 2002-2003 “The Newport Resource” Catalogs by Newport Corporation. Catalogs of TMC, Kinetic Systems and other manufacturers also contain descriptions of optical tabletop designs. Although the main purpose of an optical tabletop is to provide a stabletop platform for vibration-sensitive equipment, none of the designs described in the aforementioned patents and catalogs include a built-in means for monitoring vibration, or a tabletop that includes active vibration control.
- A platform that includes a vibration sensor located within an inner core of a table.
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FIG. 1 is a perspective view of a platform; -
FIG. 2 is a side sectional view of the platform; -
FIG. 3 is a perspective view of the platform coupled to a monitor; -
FIG. 4 is a cross-sectional view of an embodiment of platform with a damper in a tabletop core; -
FIG. 5 is a schematic of a controllable damper in the tabletop core; -
FIG. 6 is a perspective view of an embodiment of the platform. - Disclosed is a platform that includes a vibration sensor located within an inner core of a tabletop. The tabletop may have a first plate that supports a vibration-sensitive payload. The first plate may be separated from a second plate by the inner core. The sensor can be located within the core directly below the device. The sensor can be connected to an electrical connector attached to an external surface of the tabletop. A monitor can be readily plugged into the electrical connector to obtain vibration data from the sensor. The platform may also include a damper located within the inner core to reduce vibration of the tabletop. The damper may be an active device that is connected to control circuits located within, or outside, the inner core.
- Referring to the drawings more particularly by reference numbers,
FIGS. 1 and 2 show aplatform 10. Theplatform 10 may include atabletop 12 that has afirst surface 14, asecond surface 16 and a plurality of side surfaces 18. Thefirst surface 14 may extend along afirst plate 20, thesecond surface 16 may extend along asecond plate 22 and the side surfaces 18 may extend along one ormore side plates 24. - The
first plate 20 is separated from thesecond plate 22 by aninner core 26. Thetabletop core 26 may contain ahoneycomb structure 28 to provide support for theplates first plate 20 may have a plurality of threadedapertures 30. An external vibration-sensitive payload 32 may be attached to one or more threadedapertures 30 of thetabletop 12. Thepayload 32 can be any type of device such as an optical component of an optical system, a device under test in a shaker machine, etc. Additionally, the tabletop may be a platform for equipment used to fabricate semiconductor wafers, integrated circuits, etc. In general thetabletop 12 may be any platform used to support a component, system or equipment used in manufacturing or laboratory environments. For purposes of claim interpretation the terms “platform” or “tabletop” do not include any structure of an airplane or building, including airplane wings, fuselage, building walls or foundations. - One or
more vibration sensors 34 may be located within theinner core 26 and attached to anunderlying surface 36 of thefirst plate 20. The vibration sensor(s) 34 may be any type of device, such as an accelerometer, a geophone or displacement sensor that can sense vibration. Although threevibration sensors 34 are shown, it is to be understood that any number ofsensors 34 can be located at any location of the table. The sensor(s) 34 can be connected to anelectrical connector 38 attached to one of theside plates 24 of thetabletop 12. Thesensor 34 may be connected to theconnector 38 bywire cables 40 that run through theinner core 26. The sensor(s) 34 can provide an output signal that is transmitted to theconnector 38 over thecables 40. - As shown in
FIG. 3 , amonitor 42 can be coupled to the sensor(s) 34 by pluggingcables 44 into theconnector 38. Themonitor 42 may record and/or display vibration information provided by the sensor(s) 34. By locating thevibration sensor 34 within theinner core 26, thesensor 34 can measure the vibration directly beneath theexternal device 32 thereby providing more accurate data. Theelectrical connector 38 allows themonitor 42 to be readily coupled to the sensor(s) 34 thereby minimizing set-up time for monitoring vibration in thetabletop 12. - Although
cables 40 and aconnector 38 are shown and described, it is to be understood that the sensor(s) 34 may have a wireless transmitter (not shown) that wirelessly transmits the output signal(s). -
FIG. 4 shows an embodiment of atabletop assembly 10′ with adamper 50 located within theinner core 26. Thedamper 50 may include anactuator 52 such as a voice coil that can be excited to induce a vibration that offsets and cancels the vibration within thetabletop 12. Theactuator 52 may include anelectrical coil 54 that is magnetically coupled to amagnet mass 56. - The
magnet mass 56 may be coupled to anactuator housing 57 by a pair offlexible diaphragms 58. Thehousing 57 is attached to theplates coil 54 generates a magnetic force that moves themass 56. Thecoil 54 can be excited in a manner to generate, together with the spring/mass assembly, a dynamic force to offset vibration in thetabletop 12. - The
vibration sensor 34 can be coupled to thetabletop 12 by ascrew 60 that extends through thetop plate 20 and is attached to asensor housing 62. Thesensor 60 is preferably coaxial and rigidly coupled to theactuator 52. Thesensor 60 provides an output signal to acontrol circuit 64. Thecontrol circuit 64 processes the signal and provides an excitation signal to thecoil 54 to generate an offsetting vibration that cancels the table vibration. Thecontrol circuit 64 can be located within theinner chamber 26 and connected to thesensor 60 andcoil 54 by cables 66. -
FIG. 5 is a schematic of a controllable damper integrated into thetabletop 10′. The signal from thevibration sensor 34 is transmitted to thecontroller 64. Thecontroller 64 may containamplifiers 75,compensators 76 and filters 77. Digital control or analog control can be employed. The transformed signal is fed into theactive element 54, such as a coil, of the actuator incorporated into the platform structure. The vibration actuator may further comprise thereaction mass 56, which may contain magnets, and theflexure 58 that provides elastic coupling between the mass and thetabletop 12. The amplification gains and other parameters of the controller modules are assigned and coordinated with the characteristics of the sensor, actuator and mechanical assembly so that a force Fa induced on the top face sheets of thetabletop 12 reduces the vibration at this point. - As control current flows through the
coil 54, the electromagnetic force acts on thereaction mass 56, and the equivalent reaction force is acting on the stationary coils fastened to the platform structure. The control loop is designed so that the phase and the amplitude of the summary force transmitted to the platform structure counteract the vibration of thetabletop 12. Methods for designing controller and actuators for vibration abatement are known in the art. - It is preferred that the locations represented by points A,B and C in
FIG. 5 be co-axial on the same vertical axis and rigidly connected. It is also preferable to design the control loop so that the active force acting on thetabletop 12 emulates the effect of a viscous damper in the frequency domain encompassing the main natural frequencies of the flexural vibration of thetabletop 12. This approach creates inherent stability and robustness with respect to the changes in the payload. To implement this strategy, the transfer function of the controller should be designed as: -
- Where;
- ω=2πf=a circular frequency.
- A(ω)=the actuator (shaker) transfer function, or ratio of the total force N exerted by the actuator on the structure to input voltage, N/V.
- S(ω)=the sensor transfer function, or the ratio of the sensor output voltage to the dynamic displacement, V/m.
- K(ω)=the controller transfer function, V/V.
- k=an adjustable gain.
- As a result, the force exerted by the active system on the table structure will equal iωku, where u is the dynamical displacement amplitude of the table, which is equivalent to the action of the viscous damping. Of course, other units can be used. The sensor may be an accelerometer, a velocimeter (such as a geophone) or a displacement sensor. Additional correcting filters may be used to improve the stability margins or other parameters.
-
FIG. 6 shows an alternate embodiment of atabletop 12 wherein a strip 80 is located between thetop plate 20 and ahole sealing tile 82. Thehole sealing tile 82 may have a plurality ofcups 84 that are located adjacent to the threadedapertures 30 to collect debris that fall through theapertures 30. The strip 80 may be a piezoelectric device that functions as a sensor and/or an actuator. Alternatively, optical cables or other devices may be located between theplate 20 andtile 82 to provide sensing and/or actuating functions. Thetile 82 can protect the strip 80 during the manufacturing process of constructing thetabletop 12. - While certain exemplary embodiments have been described and shown in the accompanying drawings, it is to be understood that such embodiments are merely illustrative of and not restrictive on the broad invention, and that this invention not be limited to the specific constructions and arrangements shown and described, since various other modifications may occur to those ordinarily skilled in the art.
- In particular, the structure referred to as a
platform assembly 10 may be any kind of a support structure, including multi-level platforms or cradle platforms. The working surface of this support structure may be horizontal, vertical or even inclined. Accordingly, the line of action of the sensors and active dampers can be vertical, horizontal or inclined; multidirectional sensors or active dampers are also possible as a modification of this invention. AlthoughFIG. 4 shows an actuator that is implemented as an electromagnetic shaker with a moving magnet and a stationary coil, other types of actuator designs can be used, in particular, electromagnetic designs with stationary magnets and moving coils, electrodynamic designs with one stationary and one moving coil, etc. Alternatively, stiff (e.g. piezoelectric) actuators can be employed to create a relative motion of the reactive mass and thetabletop 12.
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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US14/791,570 US20150308537A1 (en) | 2003-10-24 | 2015-07-06 | Instrumented Platform for Vibration-Sensitive Equipment |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US10/693,222 US7320455B2 (en) | 2003-10-24 | 2003-10-24 | Instrumented platform for vibration-sensitive equipment |
US14/791,570 US20150308537A1 (en) | 2003-10-24 | 2015-07-06 | Instrumented Platform for Vibration-Sensitive Equipment |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US10/693,222 Continuation US7320455B2 (en) | 2003-10-24 | 2003-10-24 | Instrumented platform for vibration-sensitive equipment |
Publications (1)
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US20150308537A1 true US20150308537A1 (en) | 2015-10-29 |
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ID=34522335
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US10/693,222 Expired - Lifetime US7320455B2 (en) | 2003-10-24 | 2003-10-24 | Instrumented platform for vibration-sensitive equipment |
US11/986,538 Active 2026-01-15 US8196891B2 (en) | 2003-10-24 | 2007-11-21 | Instrumented platform for vibration sensitive equipment |
US13/479,206 Expired - Lifetime US8807515B2 (en) | 2003-10-24 | 2012-05-23 | Instrumented platform for vibration sensitive equipment |
US14/328,188 Active US9086112B2 (en) | 2003-10-24 | 2014-07-10 | Instrumented platform for vibration-sensitive equipment |
US14/791,570 Abandoned US20150308537A1 (en) | 2003-10-24 | 2015-07-06 | Instrumented Platform for Vibration-Sensitive Equipment |
Family Applications Before (4)
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US10/693,222 Expired - Lifetime US7320455B2 (en) | 2003-10-24 | 2003-10-24 | Instrumented platform for vibration-sensitive equipment |
US11/986,538 Active 2026-01-15 US8196891B2 (en) | 2003-10-24 | 2007-11-21 | Instrumented platform for vibration sensitive equipment |
US13/479,206 Expired - Lifetime US8807515B2 (en) | 2003-10-24 | 2012-05-23 | Instrumented platform for vibration sensitive equipment |
US14/328,188 Active US9086112B2 (en) | 2003-10-24 | 2014-07-10 | Instrumented platform for vibration-sensitive equipment |
Country Status (7)
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US (5) | US7320455B2 (en) |
EP (3) | EP1682792B1 (en) |
JP (1) | JP2007510865A (en) |
CN (2) | CN102392866A (en) |
AT (1) | ATE505669T1 (en) |
DE (1) | DE602004032253D1 (en) |
WO (1) | WO2005040634A2 (en) |
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-
2003
- 2003-10-24 US US10/693,222 patent/US7320455B2/en not_active Expired - Lifetime
-
2004
- 2004-10-25 DE DE602004032253T patent/DE602004032253D1/en active Active
- 2004-10-25 CN CN2011102304968A patent/CN102392866A/en active Pending
- 2004-10-25 EP EP04817364A patent/EP1682792B1/en active Active
- 2004-10-25 AT AT04817364T patent/ATE505669T1/en not_active IP Right Cessation
- 2004-10-25 JP JP2006536927A patent/JP2007510865A/en active Pending
- 2004-10-25 WO PCT/US2004/035451 patent/WO2005040634A2/en active Application Filing
- 2004-10-25 EP EP11157087.5A patent/EP2333371B1/en active Active
- 2004-10-25 EP EP20120158773 patent/EP2530353A1/en not_active Withdrawn
- 2004-10-25 CN CN2004800312417A patent/CN101128694B/en active Active
-
2007
- 2007-11-21 US US11/986,538 patent/US8196891B2/en active Active
-
2012
- 2012-05-23 US US13/479,206 patent/US8807515B2/en not_active Expired - Lifetime
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2014
- 2014-07-10 US US14/328,188 patent/US9086112B2/en active Active
-
2015
- 2015-07-06 US US14/791,570 patent/US20150308537A1/en not_active Abandoned
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US8807515B2 (en) | 2014-08-19 |
EP1682792B1 (en) | 2011-04-13 |
EP1682792A2 (en) | 2006-07-26 |
ATE505669T1 (en) | 2011-04-15 |
EP2333371A1 (en) | 2011-06-15 |
US8196891B2 (en) | 2012-06-12 |
WO2005040634A3 (en) | 2007-02-01 |
US9086112B2 (en) | 2015-07-21 |
US7320455B2 (en) | 2008-01-22 |
EP2333371B1 (en) | 2014-06-11 |
CN101128694A (en) | 2008-02-20 |
CN101128694B (en) | 2011-11-16 |
WO2005040634A2 (en) | 2005-05-06 |
EP1682792A4 (en) | 2008-06-18 |
US20120235013A1 (en) | 2012-09-20 |
DE602004032253D1 (en) | 2011-05-26 |
EP2530353A1 (en) | 2012-12-05 |
US20140319313A1 (en) | 2014-10-30 |
JP2007510865A (en) | 2007-04-26 |
US20050109914A1 (en) | 2005-05-26 |
CN102392866A (en) | 2012-03-28 |
US20080121779A1 (en) | 2008-05-29 |
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