US20150319870A1 - Monolithic ltcc seal frame and lid - Google Patents
Monolithic ltcc seal frame and lid Download PDFInfo
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- US20150319870A1 US20150319870A1 US14/748,711 US201514748711A US2015319870A1 US 20150319870 A1 US20150319870 A1 US 20150319870A1 US 201514748711 A US201514748711 A US 201514748711A US 2015319870 A1 US2015319870 A1 US 2015319870A1
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- lid
- seal frame
- ceramic
- sidewall
- substrate
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/0091—Housing specially adapted for small components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/02—Containers; Seals
- H01L23/10—Containers; Seals characterised by the material or arrangement of seals between parts, e.g. between cap and base of the container or between leads and walls of the container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/0015—Orientation; Alignment; Positioning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/0004—Casings, cabinets or drawers for electric apparatus comprising several parts forming a closed casing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/0091—Housing specially adapted for small components
- H05K5/0095—Housing specially adapted for small components hermetically-sealed
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/03—Covers
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/066—Hermetically-sealed casings sealed by fusion of the joining parts without bringing material; sealed by brazing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/06—Hermetically-sealed casings
- H05K5/069—Other details of the casing, e.g. wall structure, passage for a connector, a cable, a shaft
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- Embodiments of the present invention relate to low temperature cofired ceramic microelectronic packaging.
- a microelectronic package may be formed from a low-temperature cofired ceramic (LTCC) circuit substrate, electronic circuitry, a seal frame, and a lid.
- the LTCC circuit substrate may be formed from a stack of ceramic material sheets, often with passive components and interconnects included between the sheets.
- the electronic circuitry may include integrated circuits and similar components that are placed on the top surface or in cavities of the LTCC substrate.
- the seal frame includes a plurality of sidewalls placed on the top surface that surrounds the electronic circuitry.
- the lid is placed on the seal frame such that the sidewalls contact the perimeter of the lid. In some instances, the seal frame and the lid may be a single unit.
- the seal frame and lid may have been constructed from metals or metal alloys, such as Kovar®, which are selected because their coefficient of thermal expansion (CTE) is close to that of the LTCC substrate.
- CTE coefficient of thermal expansion
- the seal frame and lid would be constructed from the same ceramic material as the LTCC substrate. But, previous attempts to form a ceramic seal frame and lid have been labor intensive and have suffered from difficulties relating to layer-to-layer alignment, lamination, and dimensional control during the cofiring process.
- Embodiments of the current invention solve the above-mentioned problems and provide a distinct advance in the art of low temperature cofired ceramic microelectronic packaging. More particularly, embodiments of the invention provide a method for forming a monolithic seal frame and lid that utilizes a mandrel constructed from ceramic material.
- a first embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry.
- the method comprises the steps of: forming a mandrel from a ceramic and glass based material, forming a seal frame and lid block from a ceramic and glass based material, creating a seal frame and lid by forming a compartment and a plurality of sidewalls in the seal frame and lid block, placing the seal frame and lid on the mandrel such that the mandrel fits within the compartment, and cofiring the seal frame and lid block.
- a second embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry.
- the method comprises the steps of: forming a mandrel from a ceramic and glass based material wherein the mandrel has roughly the same shape as the electronic circuitry with roughly the same length and width as the electronic circuitry and a greater height than the electronic circuitry, coating at least a portion of the upper surface of the mandrel with a high-temperature lubricant, forming a seal frame and lid block from a ceramic and glass based material, forming a seal frame and lid by routing ceramic and glass based material from the seal frame and lid block to create a compartment and a plurality of sidewalls, placing the seal frame and lid on the mandrel such that the mandrel fits within the compartment, cofiring the seal frame and lid, and coating at least a portion of the seal frame and lid with a layer of metal.
- a third embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry.
- the method comprises the steps of: forming a plurality of mandrels from a ceramic and glass based material, forming a seal frame and lid block from a ceramic and glass based material, creating a seal frame and lid by removing the ceramic and glass based material from the seal frame and lid block to a form plurality of sidewalls, a plurality of compartments, and at least one divider wall, placing the seal frame and lid on the mandrels such that one mandrel fits within each compartment, and cofiring the seal frame and lid.
- FIG. 1 is a perspective view of a microelectronic package comprising a low-temperature cofired ceramic (LTCC) circuit substrate, electronic circuitry, and a monolithic seal frame and lid, constructed in accordance with various embodiments of the current invention, wherein the seal frame and lid is removed from the LTCC substrate;
- LTCC low-temperature cofired ceramic
- FIG. 2 is a perspective view of the microelectronic package of FIG. 1 with the seal frame and lid bonded to the LTCC substrate;
- FIG. 3 is a perspective view of a plurality of sheets of ceramic and glass material used to form a plurality of mandrels
- FIG. 4 is a perspective view of the mandrels formed from the sheets
- FIG. 5 is a perspective view of a plurality of sheets of ceramic and glass material used to form a seal frame and lid;
- FIG. 6 is a perspective view of the ceramic and glass material used to form the seal frame and lid after a heated lamination process
- FIG. 7 is a perspective view of the seal frame and lid with a plurality of compartments that is formed by routing the ceramic and glass material of FIG. 6 ;
- FIG. 8 is a perspective view of the seal frame and lid with a mandrel positioned each compartment before a cofiring process
- FIG. 9 is a cross sectional view along the line 9 - 9 from FIG. 8 of the seal frame and lid positioned on the mandrel;
- FIG. 10 is a perspective view of the seal frame and lid after the cofiring process and after the exterior of the seal frame and lid is coated with a layer of metal, wherein a portion of the metal is cut away to reveal the ceramic and glass material underneath;
- FIG. 11 is a flow diagram of at least a portion of the steps of a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry.
- references to “one embodiment”, “an embodiment”, or “embodiments” mean that the feature or features being referred to are included in at least one embodiment of the technology.
- references to “one embodiment”, “an embodiment”, or “embodiments” in this description do not necessarily refer to the same embodiment and are also not mutually exclusive unless so stated and/or except as will be readily apparent to those skilled in the art from the description.
- a feature, structure, act, etc. described in one embodiment may also be included in other embodiments, but is not necessarily included.
- the current technology can include a variety of combinations and/or integrations of the embodiments described herein.
- a microelectronic package 10 formed from a ceramic circuit substrate 12 , electronic circuitry 14 , and a monolithic seal frame and lid 16 and constructed in accordance with various embodiments of the current invention is shown in FIGS. 1 and 2 .
- the electronic circuitry 14 may include analog, digital, or mixed-signal circuitry, radio frequency (RF) circuits—particularly high frequency transmitters and receivers, or other high performance circuits.
- RF radio frequency
- the ceramic circuit substrate 12 generally supports the electronic circuitry and may include integrated wiring and passive components.
- the ceramic circuit substrate 12 is formed from a plurality of layers of ceramic-based (Al 2 O 3 ) material, particularly ceramic or ceramic and glass material.
- the ceramic circuit substrate 12 may include low-temperate cofired ceramic (LTCC) substrates or high-temperature cofired ceramic (HTCC) substrates.
- LTCC low-temperate cofired ceramic
- HTCC high-temperature cofired ceramic
- An exemplary ceramic material, also known as green sheets or tape may include 951 P2, PT, or PX Green Tape from DuPont of Wilmington, Del., the CT products from Heraeus of Conshohocken, Pa., the A6 or L8 products from Ferro of Vista, Calif.
- Ceramic tape and powder products from other manufacturers may also be used to form the ceramic substrate 12 .
- Each layer may include printed traces and other features or passive components, while between the layers there may be vias or interconnects.
- an upper surface of the top layer may receive the electronic circuitry 14 in the form of one or more integrated circuits (ICs) chip which are wire bonded or flip-chip bonded to pads on the upper surface.
- the ceramic substrate 12 may additionally or alternatively include electronic circuitry 14 that is positioned on a lower surface of a bottom layer.
- a first seal frame and lid 16 may be attached to the top layer of the ceramic substrate 12 while a second seal frame and lid 16 may be attached to the bottom layer.
- the seal frame and lid 16 includes a seal frame 18 and a lid 20 that have been formed as a single unit, typically from the same ceramic material that is used to form the ceramic circuit substrate 12 .
- the seal frame and lid 16 may be bonded to the upper surface of the ceramic circuit substrate 12 in one of at least two ways.
- the seal frame and lid 16 may be epoxy bonded such that the seal frame 18 is attached to the ceramic substrate 12 using an epoxy or other adhesive or sealant.
- the seal frame and lid 16 may be solder bonded such that the seal frame 18 is soldered to the ceramic substrate 12 using known soldering techniques.
- the seal frame and lid 16 may further include a metal coating 22 on the outer surface thereof, as seen in FIG. 10 .
- the metal coating 22 may include titanium, copper, platinum, gold, or similar metals, or alloys thereof.
- the seal frame and lid 16 with the metal coating 22 on the outer surface may form a Faraday cage structure for purposes of electromagnetic interference (EMI) isolation of the electronic circuitry 14 which is covered by the seal frame and lid 16 .
- EMI electromagnetic interference
- the seal frame 18 generally surrounds the electronic circuitry 14 that is on the upper surface of the top layer of the ceramic circuit substrate 12 and may be sealed or coupled to the upper surface.
- the seal frame 18 may include four sidewalls 24 connected to one another generally forming a rectangular or square shape. Other shapes are also possible, such as circular, oval, L-shape, and the like. Other embodiments may have at least one or more sidewalls 24 that form the other shapes.
- the sidewalls 24 may have an interior surface with a draft angle which ranges from approximately 0° to approximately 45° from being normal to the lid 20 .
- the sidewalls 24 may form a compartment 26 or chamber within the seal frame 18 .
- the seal frame 18 may further include one or more divider walls 28 which may isolate or separate various electronic circuits from one another.
- the divider walls 28 may form multiple compartments 26 within the seal frame 18 .
- the shape and size of each compartment 26 may correspond to the shape and size of the electronic circuit which it isolates.
- the divider walls 28 may include one or more notches 30 along an edge of the divider wall 28 that contacts the upper surface of the top layer of the ceramic circuit substrate 12 .
- the notches 30 may allow components, interconnects, or other features of the electronic circuitry 14 on the ceramic circuit substrate 12 to pass from one compartment 26 of the seal frame 18 to another compartment 26 .
- the divider walls 28 may be positioned on the interior of the seal frame 18 , within the sidewalls 24 and may intersect the sidewalls 24 , although need not necessarily do so.
- the lid 20 generally provides a cover for the electronic circuitry 14 that is on the upper surface of the top layer of the ceramic circuit substrate 12 .
- the lid 20 may be coupled to the edges of the sidewalls 24 of the seal frame 18 , and thus the perimeter of the lid 20 may have the same shape as the seal frame 18 .
- FIG. 11 At least a portion of the steps of a method 100 for forming a monolithic seal frame and lid 16 , in accordance with other embodiments of the current invention, is shown in FIG. 11 .
- the steps of the method 100 may be performed in the order as shown in FIG. 11 , or they may be performed in a different order. Furthermore, some steps may be performed concurrently as opposed to sequentially. In addition, some steps may not be performed.
- a mandrel 32 may be formed from ceramic and glass based material.
- the mandrel 32 may serve as a mold in forming the seal frame and lid 16 , primarily providing support to the lid 20 portion. Since the seal frame and lid 16 covers and protects the electronic circuitry 14 that is on the upper surface of the top layer of the ceramic circuit substrate 12 , the seal frame and lid 16 must be formed to include one or more compartments 26 , as discussed above, to accommodate the circuitry 14 .
- there may be one or more mandrels 32 one mandrel 32 for each compartment 26 . In the exemplary embodiment shown in the figures, there are three mandrels 32 A, 32 B, 32 C.
- the mandrels 32 A, 32 B, 32 C may have roughly the same footprint or shape as the electronic circuitry 14 and, in turn, the compartments 26 which they will help form. In some embodiments, the mandrels 32 A, 32 B, 32 C may have roughly the same area (X, Y) dimensions as the electronic circuitry 14 , while in other embodiments, the area of the mandrels 32 A, 32 B, 32 C may be greater than that of the electronic circuitry 14 .
- the mandrels 32 A, 32 B, 32 C may have a height or thickness (Z) dimension that is greater than the height of the seal frame 18 .
- each mandrel 32 may have draft angle sidewalls 33 , as seen in FIG. 9 , whose angle varies from approximately 0° to approximately 45° from being normal to the upper and lower surfaces of the mandrel 32 .
- the mandrels 32 A, 32 B, 32 C may be formed by stacking a plurality of sheets 34 (green sheets) of ceramic and glass based material one on another, as seen in FIG. 3 , to achieve the correct thickness.
- the stack of sheets 34 may be cut or trimmed to the basic shape of the mandrels 32 A, 32 B, 32 C, as seen in FIG. 4 .
- FIG. 4 Although the figures depict one set of mandrels 32 A, 32 B, 32 C being formed from the sheets 34 , multiple sets of mandrels 32 , or multiple mandrels 32 for designs requiring only one mandrel 32 , may be formed from a stack of sheets 34 .
- the trimmed stack of sheets 34 may be subjected to a heated lamination process as is generally known.
- the sheets 34 may be heated to a temperature of approximately 70 degrees Celsius at a certain pressure.
- the heating may activate binders within the ceramic and glass based material that make the sheets 34 adhere to one another such that the stack becomes relatively monolithic.
- the mandrel 32 is cofired.
- the mandrel 32 may be cofired or heated using known firing techniques.
- a plurality of mandrels 32 may be cofired. This step is optional because, as discussed below, a prefired mandrel 32 or a cofired mandrel 32 may be used in later steps.
- a seal frame and lid block 36 is formed from ceramic and glass based material.
- the size of the seal frame and lid block 36 may be based on the area and height of the circuitry 14 that needs to be covered on the upper surface of the top layer of the ceramic circuit substrate 12 .
- the seal frame and lid block 36 may be formed by stacking a plurality of sheets 34 of ceramic and glass based material one on another, as seen in FIG. 5 .
- the stack of sheets 34 may be cut or trimmed to the basic shape of the seal frame and lid 16 .
- the stack of sheets 34 may be subjected to the low temperature heating process mentioned above to create the seal frame and lid block 36 , as seen in FIG. 6 .
- At least one divider wall 28 is formed in the seal frame and lid block 36 , as seen in FIG. 7 .
- the divider wall 28 may be formed by removing the appropriate ceramic and glass based material from the interior portion of the seal frame and lid block 36 .
- the material is generally removed from a bottom surface of the seal frame and lid block 36 , as a top surface of the seal frame and lid block 36 forms the lid 20 .
- the material may be removed by drilling, milling, machining, routing, cutting, or otherwise modifying the seal frame and lid block 36 .
- the divider walls 28 may have surfaces with a draft angle which ranges from approximately 0° to approximately 45° from being normal to the lid 20 .
- divider walls 28 may also form a plurality of compartments 26 within the seal frame and lid block 36 .
- a seal frame and lid 16 is created by forming at least one sidewall 24 in the seal frame and lid block 36 , as seen in FIG. 7 . If the seal frame and lid 16 has a circular or oval shape, then only one sidewall 24 needs to be formed. Otherwise, a plurality of sidewalls 24 are formed.
- the sidewalls 24 which define the seal frame 18 , are generally formed by removing the appropriate ceramic and glass based material from the seal frame and lid block 36 . The material may be removed by drilling, milling, machining, routing, cutting, or otherwise modifying the seal frame and lid block 36 .
- a high speed driller/router such as the MX1-160 DH CCD from Schmoll Maschinen of Rödermark, Germany, is used to remove the ceramic and glass based material in order to form the sidewalls 24 .
- a compartment 26 within the seal frame and lid 16 may be formed as well.
- the interior surfaces of the sidewalls 24 may have a draft angle which ranges from approximately 0° to approximately 45° from being normal to the lid 20 , as seen in FIG. 9 .
- At least one notch 30 is formed in at least one divider wall 28 , as seen in FIG. 7 .
- the notch 30 may be formed along an edge of the divider wall 28 that contacts the upper surface of the top layer of the ceramic circuit substrate 12 .
- the notch 30 may be formed by drilling, milling, machining, routing, cutting, or otherwise modifying the divider wall 28 . This step is optional, as notches 30 are not always required in the seal frame and lid 16 .
- a portion of an upper surface and sides of the mandrel 32 is coated with a high-temperature lubricant.
- the mandrel 32 may be prefired or cofired.
- the lubricant may ease the removal of the seal frame and lid 16 from the mandrel 32 that occurs in later steps of the method 100 .
- An exemplary high-temperature lubricant is boron nitride, which may be used in temperatures ranging from 850° Celsius (C.) to 1000° C. or higher.
- the seal frame and lid 16 is coupled with the mandrel 32 . If there is only one mandrel 32 , then the seal frame and lid 16 may be placed on the mandrel 32 . If there is a plurality of mandrels 32 , then it may be advantageous to turn the seal frame and lid 16 over and place each mandrel 32 in its corresponding compartment 26 . In the exemplary embodiment shown in FIG. 8 , there are three mandrels 32 A, 32 B, 32 C placed in three compartments 26 A, 26 B, 26 C.
- the seal frame and lid 16 with the mandrels 32 A, 32 B, 32 C in their compartments 26 A, 26 B, 26 C, may be turned over again, such that the seal frame and lid 16 rests on top of the mandrels 32 A, 32 B, 32 C, before the next step.
- the seal frame and lid 16 and the mandrel 32 are cofired.
- the seal frame and lid 16 may be cofired or heated using known firing techniques.
- step 110 at least a portion of the seal frame and lid 16 is coated or covered with a layer of metal to form a metal coating 22 , as seen in FIG. 9 , wherein a portion of the metal coating 22 is cut away to reveal the seal frame and lid 16 underneath.
- the seal frame 18 may be coated.
- An exemplary metal may include titanium, copper, platinum, gold, or similar metals, or alloys thereof. This step is optional, depending on the method of attachment of the seal frame and lid 16 to the ceramic circuit substrate 12 . If the seal frame and lid 16 is solder bonded to the ceramic circuit substrate 12 , then the step is performed. If the seal frame and lid 16 is epoxy bonded to the ceramic circuit substrate 12 , then the step may or may not be performed depending on whether the electronic circuitry 14 requires EMI shielding.
- the seal frame and lid 16 After the seal frame and lid 16 is formed, in some embodiments, it may be solder bonded to the ceramic circuit substrate 12 in order to form the microelectronic package 10 of FIG. 2 . In other embodiments, the seal frame and lid 16 is epoxy bonded to the ceramic circuit substrate 12 .
- the seal frame and lid 16 may be constructed using additive material manufacturing processes that generate the seal frame and lid 16 from ceramic stock material.
- a feed stock material comprising polymers and ceramic and glass powders may be heated and flowed through a nozzle.
- the heated composite material may then be deposited onto a work surface in a layerwise manner to build up the seal frame and lid 16 with component features such as the lid 20 , the sidewalls 24 , and the divider walls 28 without requiring support structures, such as mandrels 32 , to remain after post processing.
Abstract
A method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry comprises the steps of forming a mandrel from a ceramic and glass based material, forming a seal frame and lid block from a ceramic and glass based material, creating a seal frame and lid by forming a compartment and a plurality of sidewalls in the seal frame and lid block, placing the seal frame and lid on the mandrel such that the mandrel fits within the compartment, and cofiring the seal frame and lid block.
Description
- The current patent application is a continuation patent application which claims priority benefit, with regard to all common subject matter, of U.S. patent application Ser. No. 14/091,578, titled “MONOLITHIC LTCC SEAL FRAME AND LID”, filed Nov. 27, 2013. The earlier-filed patent application is hereby incorporated by reference in its entirety into the current application.
- This invention was developed with government support under Contract DE-NA0000622 with Honeywell Federal Manufacturing & Technologies, LLC and the U.S. Department of Energy, and under Contract DE-AC04-94AL85000 between Sandia Corporation and the U.S. Department of Energy. The U.S. Government has certain rights in this invention.
- 1. Field of the Invention
- Embodiments of the present invention relate to low temperature cofired ceramic microelectronic packaging.
- 2. Description of the Related Art
- A microelectronic package may be formed from a low-temperature cofired ceramic (LTCC) circuit substrate, electronic circuitry, a seal frame, and a lid. The LTCC circuit substrate may be formed from a stack of ceramic material sheets, often with passive components and interconnects included between the sheets. The electronic circuitry may include integrated circuits and similar components that are placed on the top surface or in cavities of the LTCC substrate. The seal frame includes a plurality of sidewalls placed on the top surface that surrounds the electronic circuitry. The lid is placed on the seal frame such that the sidewalls contact the perimeter of the lid. In some instances, the seal frame and the lid may be a single unit.
- Traditionally, the seal frame and lid may have been constructed from metals or metal alloys, such as Kovar®, which are selected because their coefficient of thermal expansion (CTE) is close to that of the LTCC substrate. However, as the size of the microelectronic package increases, even a small mismatch in the CTE can pose a problem for long term reliability. During normal operation of the microelectronic package and its usage in harsh environments, the package may experience wide swings in temperature. With a CTE mismatch between the LTCC substrate and the seal frame, these temperature swings can lead to degradation or failure of the attachment of the seal frame to the LTCC substrate. Ideally, the seal frame and lid would be constructed from the same ceramic material as the LTCC substrate. But, previous attempts to form a ceramic seal frame and lid have been labor intensive and have suffered from difficulties relating to layer-to-layer alignment, lamination, and dimensional control during the cofiring process.
- Embodiments of the current invention solve the above-mentioned problems and provide a distinct advance in the art of low temperature cofired ceramic microelectronic packaging. More particularly, embodiments of the invention provide a method for forming a monolithic seal frame and lid that utilizes a mandrel constructed from ceramic material.
- A first embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry. The method comprises the steps of: forming a mandrel from a ceramic and glass based material, forming a seal frame and lid block from a ceramic and glass based material, creating a seal frame and lid by forming a compartment and a plurality of sidewalls in the seal frame and lid block, placing the seal frame and lid on the mandrel such that the mandrel fits within the compartment, and cofiring the seal frame and lid block.
- A second embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry. The method comprises the steps of: forming a mandrel from a ceramic and glass based material wherein the mandrel has roughly the same shape as the electronic circuitry with roughly the same length and width as the electronic circuitry and a greater height than the electronic circuitry, coating at least a portion of the upper surface of the mandrel with a high-temperature lubricant, forming a seal frame and lid block from a ceramic and glass based material, forming a seal frame and lid by routing ceramic and glass based material from the seal frame and lid block to create a compartment and a plurality of sidewalls, placing the seal frame and lid on the mandrel such that the mandrel fits within the compartment, cofiring the seal frame and lid, and coating at least a portion of the seal frame and lid with a layer of metal.
- A third embodiment of the current invention provides a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry. The method comprises the steps of: forming a plurality of mandrels from a ceramic and glass based material, forming a seal frame and lid block from a ceramic and glass based material, creating a seal frame and lid by removing the ceramic and glass based material from the seal frame and lid block to a form plurality of sidewalls, a plurality of compartments, and at least one divider wall, placing the seal frame and lid on the mandrels such that one mandrel fits within each compartment, and cofiring the seal frame and lid.
- This summary is provided to introduce a selection of concepts in a simplified form that are further described below in the detailed description. This summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. Other aspects and advantages of the current invention will be apparent from the following detailed description of the embodiments and the accompanying drawing figures.
- Embodiments of the current invention are described in detail below with reference to the attached drawing figures, wherein:
-
FIG. 1 is a perspective view of a microelectronic package comprising a low-temperature cofired ceramic (LTCC) circuit substrate, electronic circuitry, and a monolithic seal frame and lid, constructed in accordance with various embodiments of the current invention, wherein the seal frame and lid is removed from the LTCC substrate; -
FIG. 2 is a perspective view of the microelectronic package ofFIG. 1 with the seal frame and lid bonded to the LTCC substrate; -
FIG. 3 is a perspective view of a plurality of sheets of ceramic and glass material used to form a plurality of mandrels; -
FIG. 4 is a perspective view of the mandrels formed from the sheets; -
FIG. 5 is a perspective view of a plurality of sheets of ceramic and glass material used to form a seal frame and lid; -
FIG. 6 is a perspective view of the ceramic and glass material used to form the seal frame and lid after a heated lamination process; -
FIG. 7 is a perspective view of the seal frame and lid with a plurality of compartments that is formed by routing the ceramic and glass material ofFIG. 6 ; -
FIG. 8 is a perspective view of the seal frame and lid with a mandrel positioned each compartment before a cofiring process; -
FIG. 9 is a cross sectional view along the line 9-9 fromFIG. 8 of the seal frame and lid positioned on the mandrel; -
FIG. 10 is a perspective view of the seal frame and lid after the cofiring process and after the exterior of the seal frame and lid is coated with a layer of metal, wherein a portion of the metal is cut away to reveal the ceramic and glass material underneath; and -
FIG. 11 is a flow diagram of at least a portion of the steps of a method for forming a monolithic seal frame and lid for use with a substrate and electronic circuitry. - The drawing figures do not limit the current invention to the specific embodiments disclosed and described herein. The drawings are not necessarily to scale, emphasis instead being placed upon clearly illustrating the principles of the invention.
- The following detailed description of the invention references the accompanying drawings that illustrate specific embodiments in which the invention can be practiced. The embodiments are intended to describe aspects of the invention in sufficient detail to enable those skilled in the art to practice the invention. Other embodiments can be utilized and changes can be made without departing from the scope of the present invention. The following detailed description is, therefore, not to be taken in a limiting sense. The scope of the present invention is defined only by the appended claims, along with the full scope of equivalents to which such claims are entitled.
- In this description, references to “one embodiment”, “an embodiment”, or “embodiments” mean that the feature or features being referred to are included in at least one embodiment of the technology. Separate references to “one embodiment”, “an embodiment”, or “embodiments” in this description do not necessarily refer to the same embodiment and are also not mutually exclusive unless so stated and/or except as will be readily apparent to those skilled in the art from the description. For example, a feature, structure, act, etc. described in one embodiment may also be included in other embodiments, but is not necessarily included. Thus, the current technology can include a variety of combinations and/or integrations of the embodiments described herein.
- A
microelectronic package 10 formed from aceramic circuit substrate 12,electronic circuitry 14, and a monolithic seal frame andlid 16 and constructed in accordance with various embodiments of the current invention is shown inFIGS. 1 and 2 . Theelectronic circuitry 14 may include analog, digital, or mixed-signal circuitry, radio frequency (RF) circuits—particularly high frequency transmitters and receivers, or other high performance circuits. - The
ceramic circuit substrate 12, as seen inFIGS. 1 and 2 , generally supports the electronic circuitry and may include integrated wiring and passive components. Typically, theceramic circuit substrate 12 is formed from a plurality of layers of ceramic-based (Al2O3) material, particularly ceramic or ceramic and glass material. Theceramic circuit substrate 12 may include low-temperate cofired ceramic (LTCC) substrates or high-temperature cofired ceramic (HTCC) substrates. An exemplary ceramic material, also known as green sheets or tape, may include 951 P2, PT, or PX Green Tape from DuPont of Wilmington, Del., the CT products from Heraeus of Conshohocken, Pa., the A6 or L8 products from Ferro of Vista, Calif. Ceramic tape and powder products from other manufacturers may also be used to form theceramic substrate 12. Each layer may include printed traces and other features or passive components, while between the layers there may be vias or interconnects. Often, an upper surface of the top layer may receive theelectronic circuitry 14 in the form of one or more integrated circuits (ICs) chip which are wire bonded or flip-chip bonded to pads on the upper surface. Furthermore, although not shown in the figures, theceramic substrate 12 may additionally or alternatively includeelectronic circuitry 14 that is positioned on a lower surface of a bottom layer. Thus, a first seal frame andlid 16 may be attached to the top layer of theceramic substrate 12 while a second seal frame andlid 16 may be attached to the bottom layer. - The seal frame and
lid 16, as seen inFIGS. 1 , 2, and 7-10, includes aseal frame 18 and alid 20 that have been formed as a single unit, typically from the same ceramic material that is used to form theceramic circuit substrate 12. The seal frame andlid 16 may be bonded to the upper surface of theceramic circuit substrate 12 in one of at least two ways. In a first embodiment, the seal frame andlid 16 may be epoxy bonded such that theseal frame 18 is attached to theceramic substrate 12 using an epoxy or other adhesive or sealant. In a second embodiment, the seal frame andlid 16 may be solder bonded such that theseal frame 18 is soldered to theceramic substrate 12 using known soldering techniques. To render the seal frame andlid 18 solderable, the seal frame andlid 16 may further include ametal coating 22 on the outer surface thereof, as seen inFIG. 10 . Themetal coating 22 may include titanium, copper, platinum, gold, or similar metals, or alloys thereof. Furthermore, the seal frame andlid 16 with themetal coating 22 on the outer surface may form a Faraday cage structure for purposes of electromagnetic interference (EMI) isolation of theelectronic circuitry 14 which is covered by the seal frame andlid 16. - The
seal frame 18 generally surrounds theelectronic circuitry 14 that is on the upper surface of the top layer of theceramic circuit substrate 12 and may be sealed or coupled to the upper surface. Theseal frame 18 may include foursidewalls 24 connected to one another generally forming a rectangular or square shape. Other shapes are also possible, such as circular, oval, L-shape, and the like. Other embodiments may have at least one or more sidewalls 24 that form the other shapes. Furthermore, in some embodiments, thesidewalls 24 may have an interior surface with a draft angle which ranges from approximately 0° to approximately 45° from being normal to thelid 20. Thesidewalls 24 may form a compartment 26 or chamber within theseal frame 18. Theseal frame 18 may further include one or more divider walls 28 which may isolate or separate various electronic circuits from one another. The divider walls 28 may form multiple compartments 26 within theseal frame 18. The shape and size of each compartment 26 may correspond to the shape and size of the electronic circuit which it isolates. In some embodiments, the divider walls 28 may include one or more notches 30 along an edge of the divider wall 28 that contacts the upper surface of the top layer of theceramic circuit substrate 12. The notches 30 may allow components, interconnects, or other features of theelectronic circuitry 14 on theceramic circuit substrate 12 to pass from one compartment 26 of theseal frame 18 to another compartment 26. The divider walls 28 may be positioned on the interior of theseal frame 18, within thesidewalls 24 and may intersect thesidewalls 24, although need not necessarily do so. - The
lid 20 generally provides a cover for theelectronic circuitry 14 that is on the upper surface of the top layer of theceramic circuit substrate 12. Thelid 20 may be coupled to the edges of thesidewalls 24 of theseal frame 18, and thus the perimeter of thelid 20 may have the same shape as theseal frame 18. - At least a portion of the steps of a
method 100 for forming a monolithic seal frame andlid 16, in accordance with other embodiments of the current invention, is shown inFIG. 11 . The steps of themethod 100 may be performed in the order as shown inFIG. 11 , or they may be performed in a different order. Furthermore, some steps may be performed concurrently as opposed to sequentially. In addition, some steps may not be performed. - Referring to step 101, a
mandrel 32 may be formed from ceramic and glass based material. Themandrel 32, either before firing or after firing as discussed below, may serve as a mold in forming the seal frame andlid 16, primarily providing support to thelid 20 portion. Since the seal frame andlid 16 covers and protects theelectronic circuitry 14 that is on the upper surface of the top layer of theceramic circuit substrate 12, the seal frame andlid 16 must be formed to include one or more compartments 26, as discussed above, to accommodate thecircuitry 14. Thus, there may be one ormore mandrels 32—onemandrel 32 for each compartment 26. In the exemplary embodiment shown in the figures, there are threemandrels mandrels electronic circuitry 14 and, in turn, the compartments 26 which they will help form. In some embodiments, themandrels electronic circuitry 14, while in other embodiments, the area of themandrels electronic circuitry 14. Themandrels seal frame 18. The increased height of themandrels seal frame 18 may enhance the ease of removal of themandrels seal frame 18 in subsequent steps. Themandrels mandrel 32 may have draft angle sidewalls 33, as seen inFIG. 9 , whose angle varies from approximately 0° to approximately 45° from being normal to the upper and lower surfaces of themandrel 32. - The
mandrels FIG. 3 , to achieve the correct thickness. The stack ofsheets 34 may be cut or trimmed to the basic shape of themandrels FIG. 4 . Although the figures depict one set ofmandrels sheets 34, multiple sets ofmandrels 32, ormultiple mandrels 32 for designs requiring only onemandrel 32, may be formed from a stack ofsheets 34. Then, the trimmed stack ofsheets 34 may be subjected to a heated lamination process as is generally known. Thesheets 34 may be heated to a temperature of approximately 70 degrees Celsius at a certain pressure. The heating may activate binders within the ceramic and glass based material that make thesheets 34 adhere to one another such that the stack becomes relatively monolithic. - Referring to step 102, the
mandrel 32 is cofired. Themandrel 32 may be cofired or heated using known firing techniques. In certain embodiments, a plurality ofmandrels 32 may be cofired. This step is optional because, as discussed below, aprefired mandrel 32 or acofired mandrel 32 may be used in later steps. - Referring to step 103, a seal frame and
lid block 36 is formed from ceramic and glass based material. The size of the seal frame andlid block 36 may be based on the area and height of thecircuitry 14 that needs to be covered on the upper surface of the top layer of theceramic circuit substrate 12. The seal frame andlid block 36 may be formed by stacking a plurality ofsheets 34 of ceramic and glass based material one on another, as seen inFIG. 5 . In some embodiments, the stack ofsheets 34 may be cut or trimmed to the basic shape of the seal frame andlid 16. The stack ofsheets 34 may be subjected to the low temperature heating process mentioned above to create the seal frame andlid block 36, as seen inFIG. 6 . - Referring to step 104, at least one divider wall 28 is formed in the seal frame and
lid block 36, as seen inFIG. 7 . The divider wall 28 may be formed by removing the appropriate ceramic and glass based material from the interior portion of the seal frame andlid block 36. The material is generally removed from a bottom surface of the seal frame andlid block 36, as a top surface of the seal frame andlid block 36 forms thelid 20. The material may be removed by drilling, milling, machining, routing, cutting, or otherwise modifying the seal frame andlid block 36. In some embodiments, the divider walls 28 may have surfaces with a draft angle which ranges from approximately 0° to approximately 45° from being normal to thelid 20. The forming of divider walls 28 may also form a plurality of compartments 26 within the seal frame andlid block 36. In the exemplary embodiment shown in the figures, there are twodivider walls compartments lid 16. - Referring to step 105, a seal frame and
lid 16 is created by forming at least onesidewall 24 in the seal frame andlid block 36, as seen inFIG. 7 . If the seal frame andlid 16 has a circular or oval shape, then only onesidewall 24 needs to be formed. Otherwise, a plurality ofsidewalls 24 are formed. Thesidewalls 24, which define theseal frame 18, are generally formed by removing the appropriate ceramic and glass based material from the seal frame andlid block 36. The material may be removed by drilling, milling, machining, routing, cutting, or otherwise modifying the seal frame andlid block 36. In an exemplary embodiment, a high speed driller/router, such as the MX1-160 DH CCD from Schmoll Maschinen of Rödermark, Germany, is used to remove the ceramic and glass based material in order to form thesidewalls 24. In forming thesidewalls 24, a compartment 26 within the seal frame andlid 16 may be formed as well. In addition, in some embodiments, the interior surfaces of thesidewalls 24 may have a draft angle which ranges from approximately 0° to approximately 45° from being normal to thelid 20, as seen inFIG. 9 . - Referring to step 106, at least one notch 30 is formed in at least one divider wall 28, as seen in
FIG. 7 . In the exemplary embodiment shown in the figures, there are twonotches ceramic circuit substrate 12. The notch 30 may be formed by drilling, milling, machining, routing, cutting, or otherwise modifying the divider wall 28. This step is optional, as notches 30 are not always required in the seal frame andlid 16. - Referring to step 107, at least a portion of an upper surface and sides of the
mandrel 32 is coated with a high-temperature lubricant. Themandrel 32 may be prefired or cofired. The lubricant may ease the removal of the seal frame andlid 16 from themandrel 32 that occurs in later steps of themethod 100. An exemplary high-temperature lubricant is boron nitride, which may be used in temperatures ranging from 850° Celsius (C.) to 1000° C. or higher. - Referring to step 108, the seal frame and
lid 16 is coupled with themandrel 32. If there is only onemandrel 32, then the seal frame andlid 16 may be placed on themandrel 32. If there is a plurality ofmandrels 32, then it may be advantageous to turn the seal frame andlid 16 over and place eachmandrel 32 in its corresponding compartment 26. In the exemplary embodiment shown inFIG. 8 , there are threemandrels compartments lid 16, with themandrels compartments lid 16 rests on top of themandrels - Referring to step 109, the seal frame and
lid 16 and themandrel 32 are cofired. The seal frame andlid 16 may be cofired or heated using known firing techniques. - Referring to step 110, at least a portion of the seal frame and
lid 16 is coated or covered with a layer of metal to form ametal coating 22, as seen inFIG. 9 , wherein a portion of themetal coating 22 is cut away to reveal the seal frame andlid 16 underneath. After removal from themandrel 32, theseal frame 18 may be coated. In some embodiments, just the lower edges of thesidewalls 24 of the seal frame andlid 16 may be coated. An exemplary metal may include titanium, copper, platinum, gold, or similar metals, or alloys thereof. This step is optional, depending on the method of attachment of the seal frame andlid 16 to theceramic circuit substrate 12. If the seal frame andlid 16 is solder bonded to theceramic circuit substrate 12, then the step is performed. If the seal frame andlid 16 is epoxy bonded to theceramic circuit substrate 12, then the step may or may not be performed depending on whether theelectronic circuitry 14 requires EMI shielding. - After the seal frame and
lid 16 is formed, in some embodiments, it may be solder bonded to theceramic circuit substrate 12 in order to form themicroelectronic package 10 ofFIG. 2 . In other embodiments, the seal frame andlid 16 is epoxy bonded to theceramic circuit substrate 12. - In other embodiments of the current invention, the seal frame and
lid 16 may be constructed using additive material manufacturing processes that generate the seal frame andlid 16 from ceramic stock material. As an example, a feed stock material comprising polymers and ceramic and glass powders may be heated and flowed through a nozzle. The heated composite material may then be deposited onto a work surface in a layerwise manner to build up the seal frame andlid 16 with component features such as thelid 20, thesidewalls 24, and the divider walls 28 without requiring support structures, such asmandrels 32, to remain after post processing. - Although the invention has been described with reference to the embodiments illustrated in the attached drawing figures, it is noted that equivalents may be employed and substitutions made herein without departing from the scope of the invention as recited in the claims.
Claims (10)
1. A microelectronic circuit package comprising:
a substrate configured to retain one or more electronic circuits, the substrate formed from ceramic and glass material; and
a seal frame and lid attached to an upper surface of the substrate, the seal frame and lid comprising:
at least one sidewall with an inner surface and an outer surface, the inner surface defining a compartment, and
a lid with a top surface and a bottom surface, wherein the at least one sidewall is monolithically connected to the bottom surface at the perimeter thereof and the at least one sidewall and the lid are each formed from ceramic and glass material.
2. The microelectronic circuit package of claim 1 , wherein the at least one sidewall and the lid of the seal frame and lid include a layer of metal applied to exterior surfaces thereof.
3. The microelectronic circuit package of claim 2 , wherein the seal frame and lid is attached to the upper surface of the substrate with a solder bond.
4. The microelectronic circuit package of claim 1 , wherein the seal frame and lid is attached to the upper surface of the substrate with an epoxy bond.
5. The microelectronic circuit package of claim 1 , wherein the inner surface of the at least one sidewall of the seal frame and lid has a draft angle which ranges from approximately 0 degrees to approximately 45 degrees.
6. The microelectronic circuit package of claim 1 , wherein the seal frame and lid includes one or more divider walls positioned in the compartment, wherein the one or more divider walls are monolithically connected to the at least one sidewall and the lid.
7. A microelectronic circuit package comprising:
a substrate configured to retain one or more electronic circuits, the substrate formed from ceramic and glass material; and
a seal frame and lid attached to an upper surface of the substrate with a solder bond, the seal frame and lid comprising:
at least one sidewall with an inner surface and an outer surface, the inner surface defining a compartment and the outer surface including a layer of metal applied thereto, and
a lid with a top surface and a bottom surface, the bottom surface including a layer of metal applied thereto, wherein the at least one sidewall is monolithically connected to the bottom surface at the perimeter thereof and the at least one sidewall and the lid are each formed from ceramic and glass material.
8. The microelectronic circuit package of claim 7 , wherein the inner surface of the at least one sidewall of the seal frame and lid has a draft angle which ranges from approximately 0 degrees to approximately 45 degrees.
9. The microelectronic circuit package of claim 7 , wherein the seal frame and lid includes one or more divider walls positioned in the compartment, wherein the one or more divider walls are monolithically connected to the at least one sidewall and the lid.
10. A microelectronic circuit package comprising:
a substrate configured to retain one or more electronic circuits, the substrate formed from ceramic and glass material; and
a seal frame and lid attached to an upper surface of the substrate with a solder bond, the seal frame and lid comprising:
at least one sidewall with an inner surface and an outer surface, the inner surface defining a compartment and the outer surface including a layer of metal applied thereto,
a lid with a top surface and a bottom surface, the bottom surface including a layer of metal applied thereto, wherein the at least one sidewall is monolithically connected to the bottom surface at the perimeter thereof and the at least one sidewall and the lid are each formed from ceramic and glass material, and
one or more divider walls positioned in the compartment, wherein the one or more divider walls are monolithically connected to the at least one sidewall and the lid.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/748,711 US20150319870A1 (en) | 2013-11-27 | 2015-06-24 | Monolithic ltcc seal frame and lid |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/091,578 US9374923B2 (en) | 2013-11-27 | 2013-11-27 | Monolithic LTCC seal frame and lid |
US14/748,711 US20150319870A1 (en) | 2013-11-27 | 2015-06-24 | Monolithic ltcc seal frame and lid |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US14/091,578 Continuation US9374923B2 (en) | 2013-11-27 | 2013-11-27 | Monolithic LTCC seal frame and lid |
Publications (1)
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US20150319870A1 true US20150319870A1 (en) | 2015-11-05 |
Family
ID=53182060
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US14/091,578 Active 2034-03-13 US9374923B2 (en) | 2013-11-27 | 2013-11-27 | Monolithic LTCC seal frame and lid |
US14/748,711 Abandoned US20150319870A1 (en) | 2013-11-27 | 2015-06-24 | Monolithic ltcc seal frame and lid |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
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US14/091,578 Active 2034-03-13 US9374923B2 (en) | 2013-11-27 | 2013-11-27 | Monolithic LTCC seal frame and lid |
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US (2) | US9374923B2 (en) |
Cited By (3)
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USD750574S1 (en) * | 2014-07-08 | 2016-03-01 | SpeedTech Lights Inc. | Small emergency vehicle switch box |
USD750573S1 (en) * | 2014-07-08 | 2016-03-01 | SpeedTech Lights Inc. | Emergency vehicle switch box |
CN107835581A (en) * | 2017-11-06 | 2018-03-23 | 上海航天科工电器研究院有限公司 | A kind of encapsulating method of printed board sensitizing range |
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CN108370463B (en) * | 2015-10-30 | 2020-12-15 | 横向技术有限公司 | Audio loudspeaker casing |
CN110753486B (en) * | 2018-07-24 | 2024-02-20 | 广东美的制冷设备有限公司 | High-integration intelligent power module and air conditioner |
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Also Published As
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US20150145385A1 (en) | 2015-05-28 |
US9374923B2 (en) | 2016-06-21 |
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