US2366935A - Vacuum work holder - Google Patents

Vacuum work holder Download PDF

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Publication number
US2366935A
US2366935A US496070A US49607043A US2366935A US 2366935 A US2366935 A US 2366935A US 496070 A US496070 A US 496070A US 49607043 A US49607043 A US 49607043A US 2366935 A US2366935 A US 2366935A
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US
United States
Prior art keywords
work
muff
thin
work holder
receiving surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US496070A
Inventor
Schmid Rene
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Individual
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Individual
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Publication of US2366935A publication Critical patent/US2366935A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B31/00Chucks; Expansion mandrels; Adaptations thereof for remote control
    • B23B31/02Chucks
    • B23B31/24Chucks characterised by features relating primarily to remote control of the gripping means
    • B23B31/30Chucks characterised by features relating primarily to remote control of the gripping means using fluid-pressure means in the chuck
    • B23B31/307Vacuum chucks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25BTOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005Vacuum work holders
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00Metal working
    • Y10S29/044Vacuum
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00Chucks or sockets
    • Y10T279/11Vacuum
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T409/00Gear cutting, milling, or planing
    • Y10T409/30Milling
    • Y10T409/30868Work support
    • Y10T409/309016Work support with work holder or guide

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Description

Jan. 9, 1945.
R. scHMlD VACUUM WORK HOLDER Filed July 24,1945
l 2 sheets-sneu 1 .PLV //A. i Il BBBEEEBEEEBEYDWD Fl o *Y c A ,1,
Jan. 9,- 1945. R. scHMlD VACUUM WORK HOLDER Filed July 24. 194s z 4sheets-sheet 2 V//M l Z4.
tieulany pieces1 tome PatentedjJan. 9,.,1945 r UNITED #STAT Home RenSchnidaLansanne, Switzerland f I. l Arpf geminis. (c1. '5i-:235i A `The.invention@. c)rrsists of aprocessfof attach# wing, objects' to beworled, .more particularly ,those ,whosaweslit is 'smell `in .winparislo.11. .with their en theatre. thin, .there ist a danger f deformgthe ,piece :through such `methods of vattaching them aree@ ian lmown,` and thea iiiekng thegrineine senseless. 1 The-,Only
` iiriculties can, incertain circumstanceaarise Iirifattechnespietato be werked, and moremr- I ,ground `When,"ffor ex I amplefthe weight ef. these pieces Smelliri` Clem- `paris-on fvvithqtheir dimensions, that is to `say method, known.` so far of` maintaining a piece in place without it being under Astrain The device according totheirsternbodiment ofFigs. 1 and 2,` consists ,ofa circular rotary table l, revolving in a bearing: ziqThis table is hollow, itsyupper `face perforated withholes 3 `and its cavity4 communie ate `byanaxial open-` ing with `conduit 5. I
` `The piecetombe gro nd is averythin round washerV s. The drawings show it in Fig. ewan `a piece partlallytorn off `3.of table I.
, in order `to "showholes `This table being iirstlyground, the washer is` placed on it and by conduit 5,l all` or some of the air contained in cavity 4=is drawn off. Fromzthen ofytension, `flexion or pressure, is the magnetic block. This is applicable in certain conditions only, i. e. the piece to be worked must not be paramagnetic and it must offer a suicient pas- I sage to the magnetic flux, which is not the case I for pieces` of small weight in comparison with their dimensions. l i l The difference between the present invention and the procedures hitherto known, is the use of" atmospheric pressure for attaching the piece to be worked to its `support by articiallycreating a vacuum on the surface-of the said piece in contact with the said support. Y
The device used according to `the present` invention for the execution of this procedure con` sists therefore of a support so shaped as to t the piece to be worked and perforated by a certain number of holes, these holes being connectedwith means allowing suction. C
The `annexed drawings yshow three embodiments of the above mentioned device, given by way of example. I
Fig. 1 is a View of the device according tothe first embodiment, showing itin axial cross-section. It serves to attach `very thin disks.
Fig. 2 is a corresponding plane view.
on, ,atmosphericy pressure willIv ensure'the adl Alierence of the washer .to thel tablegwliich, revolving opposite t0 arglndtenenot Hshowlfl here,
allows grinding. of, trailer` `witinput the aachlatter causing it.. the: slightest distortion `in the course of work.
Toremove the washer, it suiices to allow air to enter cavity 4.
.I In the embodiment of a device according to I the present invention shown by Figs. 3 and 4,
the same` principle `as described before is applied I to a cylindrical piece 'I put on a ground muff 8. Thesaidzpiece has thin walls, it is slit its whole possesses moreover an opening length in `9 and The mun s being attached between point II and counterpoint I2 of` a grinding machine, it is set in motion by adriver` I3.
The muff being hollow, cavity I4 communicates with theexterior by a large number of radial holes I5, through its wall.
" cular inside grooved ring I1, of which the `groove Fig. 3Ais a view of a` device, according toV the second embodiment, seen in longitudinal crosssection and usable for attaching cylindrical thin walledobjects, split lengthways and to be ground exteriorly. Such objects would be,` for instance, the operating sleeve of sleeve valve type internal combustion engines. "l
Fig. 4 shows in perspective such a sleeve in place on its cylindrical support. l
Fig. 5 is aview of a device, according to the third embodiment, seen in longitudinal section and applicable to the interiorl grinding of internal combustion engine sleeves. I
coincides with the path followed by theexitoriiices of radial `canals I8. These parts: are not shown in Fig. 4 which has been intentionally simplified.
It is obvious that once cylinder I is put over muli` 8,it will sufce to rarify the air`in cavity i4 by extracting the air throughconduit Iiito` ensure the perfect application of the cylinder to the muiT. A rotary movement of the whole al.
lows exterior grinding of the cylinder. l
As Fig. 4 shows, the perforations of muff 8` must naturally be adapted in shape and size to j the form of the cylinder to be worked, that is:
there 'mustbe no perforations opposite opening I0 asfor instance there were none opposite to central hole of washer 6 in Figs. 1` and 2.
If necessary, it would be possible to conceive supports,` muifs, etc. "with completely perforated surfaces, like a sieve, and which, if desired could I Itis also in communication with a xed conduit I6 by means of a cirbe tapped in order to allow the introduction of small screws with countersunk heads, in view to obturate at will some of said perforations.
The embodiment of the device according to present invention, as shown by Fig. 5, serves for interior grinding of the thin cylinder exteriorly y I -ground by means of the device according to Figs.
3 and 4. The principle is the same. A muff I9, hollow inside to allow for introduction of cylinder 1, has radial openings20 communicating its central opening with a ring-shaped cavity 2l itself communicating, as :has already been explained, with a conduit 22. The muff revolves in bearings 23 and 24, its rotation allows interior grinding of cylinder 1, after being attached by rarifying the air in cavity 2l.
It is obvious that the process of fixing'peculiar .to this invention, as also the device for its execution, can be used for attaching light weight pieces in, comparison with their dimensions, on no matter what machine tool, for example a lathe or a milling machine.
What I claim is:
1.. A device for holding thin split sleeves, whose weight is small in comparison with their dimensions, while being ground to exact size, comprising an elongated, rotatable mui having a continuous cylindrical interior, work-receiving surface accessible through one end of the muff, said Y muff having a hollow space between said interior work-receiving surface and the exterior of the mui and having perforations extending from said work-receiving surface to saidhollow space, and means for applying suction to the hollow space of the mui and to a thin sleeve in place against the work-receiving surface to cause it to be held against such surface, said work-receiving surface having an imperforate area extending in` a straight line opposite which the split in the sleeve may be located, the perforations extending from said interior work-receiving surface to the hollow spaceof the muff being of sufficiently small size and spaced suniciently close to one another, that very thin sleeves placed on the work-receiving surface, over the perforations, will not be deformed by the suction applied to the space within the mui.
2. A device for holding thin split sleeves, whose weight is small in comparison with their dimensions, While being ground to exact size, comprising an elongated, hollow, rotatable muif, said muff having a continuous, cylindrical, work-re.- ceiving `surface having perforations extending therethrough to the space within the muff, an annular member extending around a hollow portion of the mul beyond the work-receiving sur' face thereof, and means connected to said annular member for applying suction thereto, the portion ofthe mui surrounded by said annular member having at least one opening extending therethrough, so that suction applied to the annular member will be' transmitted to the hollow interior of the muff and to a thin sleeve in place against the Work-receiving surface to cause it to be held against such surface, said work-receiving surface having an imperforate area extending in a straight line opposite which'the split in the sleeve may be located, the perforations in said cylindrical Work-receiving surface being of sumciently small size and spaced sufficiently close to one another that very thin sleeves placed on said surface over the perforations'will not be deformed by the suctionapplied to the interior of the muff.
REN scHMiD.
US496070A 1942-06-26 1943-07-24 Vacuum work holder Expired - Lifetime US2366935A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH226065T 1942-06-26

Publications (1)

Publication Number Publication Date
US2366935A true US2366935A (en) 1945-01-09

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US496070A Expired - Lifetime US2366935A (en) 1942-06-26 1943-07-24 Vacuum work holder

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US (1) US2366935A (en)
BE (1) BE450756A (en)
CA (1) CA432923A (en)
CH (1) CH226065A (en)
FR (1) FR894251A (en)
GB (1) GB569505A (en)

Cited By (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2458302A (en) * 1946-02-08 1949-01-04 Polaroid Corp Method and chuck for assembling mold walls
US2753181A (en) * 1953-05-14 1956-07-03 Powers Chemico Inc Feed mechanism for web material
US2807180A (en) * 1953-11-30 1957-09-24 Adams Jesse Wallace Vacuum holding fixture for power machine tools
US2955829A (en) * 1958-07-16 1960-10-11 George F Brewster Work holding chuck
US3018540A (en) * 1957-11-18 1962-01-30 Sealed Air Corp Methods for making embossing rollers
US3025590A (en) * 1957-06-14 1962-03-20 Ind Schaefller O H G Method and device for arranging roller elements in cages, races or temporary holdingmeans for the assembly of a bearing
US3064345A (en) * 1959-08-27 1962-11-20 Northrop Corp Process for chucking porous materials
DE1148480B (en) * 1961-07-13 1963-05-09 Siemens Ag Device for sawing bodies made of Sproedem material into wafers, in particular rod-shaped semiconductor crystals
US3103738A (en) * 1959-09-30 1963-09-17 Rca Corp Method of assembling a heater mount
US3170428A (en) * 1954-11-26 1965-02-23 Rohr Corp Fixture for making honeycomb panel
US3184359A (en) * 1961-06-16 1965-05-18 Lissac Georges Hector Emile Apparatus for the assembly of ophthalmic lenses in spectacle frames
US3207503A (en) * 1962-07-03 1965-09-21 Martin Marietta Corp Holding or clamping apparatus
US3224106A (en) * 1961-05-31 1965-12-21 David G Way Method and apparatus for use in assembling ring sections about a shaft with their end faces co-planar
US3293739A (en) * 1965-01-28 1966-12-27 Bliss E W Co Method of holding deformable objects
US3316127A (en) * 1965-02-12 1967-04-25 Bright Star Ind Inc Method and apparatus for manufacture of dry cells
US3389682A (en) * 1966-03-14 1968-06-25 Bell Telephone Labor Inc High speed vacuum chuck
US3426727A (en) * 1965-10-21 1969-02-11 Council Scient Ind Res Vacuum whirler for applying thin and uniform coating of an emulsion on a wafer
US3443308A (en) * 1967-03-30 1969-05-13 Du Pont Method of lubricating blind holes
US3536594A (en) * 1968-07-05 1970-10-27 Western Electric Co Method and apparatus for rapid gold plating integrated circuit slices
US4006909A (en) * 1975-04-16 1977-02-08 Rca Corporation Semiconductor wafer chuck with built-in standoff for contactless photolithography
US4183545A (en) * 1978-07-28 1980-01-15 Advanced Simiconductor Materials/America Rotary vacuum-chuck using no rotary union
US4194324A (en) * 1978-01-16 1980-03-25 Siltec Corporation Semiconductor wafer polishing machine and wafer carrier therefor
US4288905A (en) * 1977-12-23 1981-09-15 Milton Kessler Method of fabricating vacuum sizing apparatus
US4983093A (en) * 1982-05-24 1991-01-08 Proconics International, Inc. Wafer transfer apparatus
US5053791A (en) * 1990-04-16 1991-10-01 Eastman Kodak Company Thermal transfer print medium drum system
US5062384A (en) * 1989-11-13 1991-11-05 Mfm Technology, Inc. Vacuum chuck rotary seal
FR2687804A1 (en) * 1992-02-20 1993-08-27 Gerber Systems Corp DRUM FOR PHOTOTRACER AND METHODS FOR MANUFACTURING AND ALIGNING IT.
US5435482A (en) * 1994-02-04 1995-07-25 Lsi Logic Corporation Integrated circuit having a coplanar solder ball contact array
US5749999A (en) * 1994-02-04 1998-05-12 Lsi Logic Corporation Method for making a surface-mount technology plastic-package ball-grid array integrated circuit
US6148519A (en) * 1998-09-18 2000-11-21 Donaldson Company, Inc. Apparatus for installing a packing material in a muffler assembly; and methods thereof
US20060082791A1 (en) * 2002-06-25 2006-04-20 Fuji Photo Film Co., Ltd. Inspection device of a tape reel
US20090057267A1 (en) * 2007-09-05 2009-03-05 Asml Netherlands B.V. Imprint lithography
CN102896601A (en) * 2012-11-01 2013-01-30 昆山允可精密工业技术有限公司 Vacuum adsorption carrier
CN102896600A (en) * 2012-11-01 2013-01-30 昆山允可精密工业技术有限公司 Vacuum adsorption carrier
CN103214176A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Multifunctional glass support platform
CN103214177A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Glass fixing method for multifunctional glass support platform
CN103386660A (en) * 2013-07-19 2013-11-13 太仓伟利达铭板科技有限公司 Nameplate adsorbing device
US20140159321A1 (en) * 2011-08-12 2014-06-12 Ev Group E. Thallner Gmbh Holding device for holding a patterned wafer
CN104209779A (en) * 2014-09-15 2014-12-17 北京理工大学 Vacuum adsorption clamp for guided missile heatproof sleeve
US20180229312A1 (en) * 2017-02-10 2018-08-16 Spy Eye, Llc Method for achieving length accuracy of diamond turned parts
US10468290B2 (en) 2016-11-02 2019-11-05 Ultratech, Inc. Wafer chuck apparatus with micro-channel regions
CN112797434A (en) * 2020-12-08 2021-05-14 浙江大学 Vacuum generator based on flame

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE951123C (en) * 1949-10-11 1956-10-25 Josef Anton Knecht Pneumatic clamping plate for holding thin-walled, especially flat workpieces during welding
DE1108708B (en) * 1955-01-19 1961-06-15 Jorgen Bech Vacuum clamping device for semi-cylindrical stereotype plates on machines for processing stereotype plates
DE1045766B (en) * 1956-05-02 1958-12-04 Albert Fezer Suction plate for clamping thin-walled workpieces, especially thin sheets
DE1164937B (en) * 1962-07-31 1964-03-05 Ernst Heinkel Flugzeugbau G M Method for holding metallic workpieces consisting of one piece with thin-walled parts during machining, in particular during milling
US3537830A (en) * 1968-09-10 1970-11-03 Crucible Inc Apparatus for grinding
CH522466A (en) * 1971-03-31 1972-06-30 Charmilles Sa Ateliers Device for guiding and holding a filiform electrode

Cited By (53)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2458302A (en) * 1946-02-08 1949-01-04 Polaroid Corp Method and chuck for assembling mold walls
US2753181A (en) * 1953-05-14 1956-07-03 Powers Chemico Inc Feed mechanism for web material
US2807180A (en) * 1953-11-30 1957-09-24 Adams Jesse Wallace Vacuum holding fixture for power machine tools
US3170428A (en) * 1954-11-26 1965-02-23 Rohr Corp Fixture for making honeycomb panel
US3025590A (en) * 1957-06-14 1962-03-20 Ind Schaefller O H G Method and device for arranging roller elements in cages, races or temporary holdingmeans for the assembly of a bearing
US3018540A (en) * 1957-11-18 1962-01-30 Sealed Air Corp Methods for making embossing rollers
US2955829A (en) * 1958-07-16 1960-10-11 George F Brewster Work holding chuck
US3064345A (en) * 1959-08-27 1962-11-20 Northrop Corp Process for chucking porous materials
US3103738A (en) * 1959-09-30 1963-09-17 Rca Corp Method of assembling a heater mount
US3224106A (en) * 1961-05-31 1965-12-21 David G Way Method and apparatus for use in assembling ring sections about a shaft with their end faces co-planar
US3184359A (en) * 1961-06-16 1965-05-18 Lissac Georges Hector Emile Apparatus for the assembly of ophthalmic lenses in spectacle frames
DE1148480B (en) * 1961-07-13 1963-05-09 Siemens Ag Device for sawing bodies made of Sproedem material into wafers, in particular rod-shaped semiconductor crystals
US3207503A (en) * 1962-07-03 1965-09-21 Martin Marietta Corp Holding or clamping apparatus
US3293739A (en) * 1965-01-28 1966-12-27 Bliss E W Co Method of holding deformable objects
US3316127A (en) * 1965-02-12 1967-04-25 Bright Star Ind Inc Method and apparatus for manufacture of dry cells
US3426727A (en) * 1965-10-21 1969-02-11 Council Scient Ind Res Vacuum whirler for applying thin and uniform coating of an emulsion on a wafer
US3389682A (en) * 1966-03-14 1968-06-25 Bell Telephone Labor Inc High speed vacuum chuck
US3443308A (en) * 1967-03-30 1969-05-13 Du Pont Method of lubricating blind holes
US3536594A (en) * 1968-07-05 1970-10-27 Western Electric Co Method and apparatus for rapid gold plating integrated circuit slices
US4006909A (en) * 1975-04-16 1977-02-08 Rca Corporation Semiconductor wafer chuck with built-in standoff for contactless photolithography
US4288905A (en) * 1977-12-23 1981-09-15 Milton Kessler Method of fabricating vacuum sizing apparatus
US4194324A (en) * 1978-01-16 1980-03-25 Siltec Corporation Semiconductor wafer polishing machine and wafer carrier therefor
US4183545A (en) * 1978-07-28 1980-01-15 Advanced Simiconductor Materials/America Rotary vacuum-chuck using no rotary union
US4983093A (en) * 1982-05-24 1991-01-08 Proconics International, Inc. Wafer transfer apparatus
US5062384A (en) * 1989-11-13 1991-11-05 Mfm Technology, Inc. Vacuum chuck rotary seal
US5053791A (en) * 1990-04-16 1991-10-01 Eastman Kodak Company Thermal transfer print medium drum system
FR2687804A1 (en) * 1992-02-20 1993-08-27 Gerber Systems Corp DRUM FOR PHOTOTRACER AND METHODS FOR MANUFACTURING AND ALIGNING IT.
US5435482A (en) * 1994-02-04 1995-07-25 Lsi Logic Corporation Integrated circuit having a coplanar solder ball contact array
US5749999A (en) * 1994-02-04 1998-05-12 Lsi Logic Corporation Method for making a surface-mount technology plastic-package ball-grid array integrated circuit
US5753070A (en) * 1994-02-04 1998-05-19 Lsi Logic Corporation Vacuum chuck tool for a making a plastic-package ball-grid array integrated circuit, and combination
US5989937A (en) * 1994-02-04 1999-11-23 Lsi Logic Corporation Method for compensating for bottom warpage of a BGA integrated circuit
US6088914A (en) * 1994-02-04 2000-07-18 Lsi Logic Corporation Method for planarizing an array of solder balls
US6148519A (en) * 1998-09-18 2000-11-21 Donaldson Company, Inc. Apparatus for installing a packing material in a muffler assembly; and methods thereof
US20060082791A1 (en) * 2002-06-25 2006-04-20 Fuji Photo Film Co., Ltd. Inspection device of a tape reel
US20090057267A1 (en) * 2007-09-05 2009-03-05 Asml Netherlands B.V. Imprint lithography
US8144309B2 (en) * 2007-09-05 2012-03-27 Asml Netherlands B.V. Imprint lithography
US20120153538A1 (en) * 2007-09-05 2012-06-21 Asml Netherlands B.V. Imprint lithography
US8323541B2 (en) * 2007-09-05 2012-12-04 Asml Netherlands B.V. Imprint lithography
US9378996B2 (en) * 2011-08-12 2016-06-28 EV Group W. Thallner GmbH Holding device for holding a patterned wafer
TWI569359B (en) * 2011-08-12 2017-02-01 Ev集團E塔那有限公司 Mounting apparatus for mounting of a structured wafer
US20140159321A1 (en) * 2011-08-12 2014-06-12 Ev Group E. Thallner Gmbh Holding device for holding a patterned wafer
CN103214176A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Multifunctional glass support platform
CN103214177A (en) * 2012-01-19 2013-07-24 昆山思拓机器有限公司 Glass fixing method for multifunctional glass support platform
CN103214176B (en) * 2012-01-19 2017-11-07 昆山思拓机器有限公司 Multifunctional glass plummer
CN102896600A (en) * 2012-11-01 2013-01-30 昆山允可精密工业技术有限公司 Vacuum adsorption carrier
CN102896601A (en) * 2012-11-01 2013-01-30 昆山允可精密工业技术有限公司 Vacuum adsorption carrier
CN103386660A (en) * 2013-07-19 2013-11-13 太仓伟利达铭板科技有限公司 Nameplate adsorbing device
CN104209779A (en) * 2014-09-15 2014-12-17 北京理工大学 Vacuum adsorption clamp for guided missile heatproof sleeve
US10468290B2 (en) 2016-11-02 2019-11-05 Ultratech, Inc. Wafer chuck apparatus with micro-channel regions
US20180229312A1 (en) * 2017-02-10 2018-08-16 Spy Eye, Llc Method for achieving length accuracy of diamond turned parts
US10213842B2 (en) * 2017-02-10 2019-02-26 Spy Eye, Llc Method for achieving length accuracy of diamond turned parts
CN112797434A (en) * 2020-12-08 2021-05-14 浙江大学 Vacuum generator based on flame
CN112797434B (en) * 2020-12-08 2022-05-17 浙江大学 Vacuum generator based on flame

Also Published As

Publication number Publication date
GB569505A (en) 1945-05-28
FR894251A (en) 1944-12-19
CH226065A (en) 1943-03-15
CA432923A (en) 1946-02-05
BE450756A (en)

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