|
| US4844780 | 17 févr. 1988 | 4 juil. 1989 | Maclee Chemical Company, Inc. | Brightener and aqueous plating bath for tin and/or lead |
| US5750017 | 21 août 1996 | 12 mai 1998 | Lucent Technologies Inc. | Tin electroplating process |
| US7056806 | 17 sept. 2003 | 6 juin 2006 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| US7235138 | 21 août 2003 | 26 juin 2007 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for batch deposition of materials on microfeature workpieces |
| US7258892 | 10 déc. 2003 | 21 août 2007 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, e.g., CVD deposition |
| US7279398 | 6 janv. 2006 | 9 oct. 2007 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
| US7282239 | 18 sept. 2003 | 16 oct. 2007 | Micron Technology, Inc. | Systems and methods for depositing material onto microfeature workpieces in reaction chambers |
| US7323231 | 9 oct. 2003 | 29 janv. 2008 | Micron Technology, Inc. | Apparatus and methods for plasma vapor deposition processes |
| US7335396 | 24 avr. 2003 | 26 févr. 2008 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
| US7344755 | 21 août 2003 | 18 mars 2008 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces; methods for conditioning ALD reaction chambers |
| US7387685 | 2 sept. 2004 | 17 juin 2008 | Micron Technology, Inc. | Apparatus and method for depositing materials onto microelectronic workpieces |
| US7422635 | 28 août 2003 | 9 sept. 2008 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
| US7481887 | 29 déc. 2004 | 27 janv. 2009 | Micron Technology, Inc. | Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces |
| US7581511 | 10 oct. 2003 | 1 sept. 2009 | Micron Technology, Inc. | Apparatus and methods for manufacturing microfeatures on workpieces using plasma vapor processes |
| US7584942 | 31 mars 2004 | 8 sept. 2009 | Micron Technology, Inc. | Ampoules for producing a reaction gas and systems for depositing materials onto microfeature workpieces in reaction chambers |
| US7588804 | 19 août 2004 | 15 sept. 2009 | Micron Technology, Inc. | Reactors with isolated gas connectors and methods for depositing materials onto micro-device workpieces |
| US7647886 | 15 oct. 2003 | 19 janv. 2010 | Micron Technology, Inc. | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
| US7699932 | 2 juin 2004 | 20 avr. 2010 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
| US7771537 | 4 mai 2006 | 10 août 2010 | Micron Technology, Inc. | Methods and systems for controlling temperature during microfeature workpiece processing, E.G. CVD deposition |
| US7906393 | 28 janv. 2004 | 15 mars 2011 | Micron Technology, Inc. | Methods for forming small-scale capacitor structures |
| US8133554 | 6 mai 2004 | 13 mars 2012 | Micron Technology, Inc. | Methods for depositing material onto microfeature workpieces in reaction chambers and systems for depositing materials onto microfeature workpieces |
