|
| US4014779 | 17 déc. 1975 | 29 mars 1977 | Coulter Information Systems, Inc. | Sputtering apparatus |
| US4026787 | 12 sept. 1975 | 31 mai 1977 | Coulter Information Systems, Inc. | Thin film deposition apparatus using segmented target means |
| US4080281 | 22 sept. 1976 | 21 mars 1978 | | Apparatus for making metal films |
| US4151064 | 27 déc. 1977 | 24 avr. 1979 | Coulter Stork U.S.A., Inc. | Apparatus for sputtering cylinders |
| US4261762 | 14 sept. 1979 | 14 avr. 1981 | Eaton Corporation | Method for conducting heat to or from an article being treated under vacuum |
| US4478247 | 25 janv. 1982 | 23 oct. 1984 | | Fluid coupling for hollow rotary member |
| US4514636 | 13 août 1984 | 30 avr. 1985 | Eaton Corporation | Ion treatment apparatus |
| US4534312 | 30 août 1983 | 13 août 1985 | Ricoh Company, Ltd. | Vacuum evaporation apparatus |
| US4576622 | 28 nov. 1983 | 18 mars 1986 | | Manufacture of preforms for energy transmitting fibers |
| US4680061 | 7 avr. 1982 | 14 juil. 1987 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
| US4724300 | 30 juin 1987 | 9 févr. 1988 | United Kingdom Atomic Energy Authority | Temperature control in vacuum |
| US4743570 | 10 juil. 1987 | 10 mai 1988 | Varian Associates, Inc. | Method of thermal treatment of a wafer in an evacuated environment |
| US4747368 | 6 avr. 1987 | 31 mai 1988 | Mitel Corp. | Chemical vapor deposition apparatus with manifold enveloped by cooling means |
| US4832781 | 7 janv. 1988 | 23 mai 1989 | Varian Associates, Inc. | Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum |
| US4909314 | 16 avr. 1987 | 20 mars 1990 | Varian Associates, Inc. | Apparatus for thermal treatment of a wafer in an evacuated environment |
| US4938992 | 25 oct. 1989 | 3 juil. 1990 | Varian Associates, Inc. | Methods for thermal transfer with a semiconductor |
| US4949783 | 18 mai 1988 | 21 août 1990 | Veeco Instruments, Inc. | Substrate transport and cooling apparatus and method for same |
| US4997606 | 10 oct. 1989 | 5 mars 1991 | Varian Associates, Inc. | Methods and apparatus for fabricating a high purity thermally-conductive polymer layer |
| US5182093 | 8 janv. 1990 | 26 janv. 1993 | Celestech, Inc. | Diamond deposition cell |
| US6193801 | 3 sept. 1999 | 27 févr. 2001 | Semi-Alloys Company | Apparatus for coating lenticular articles |
| US6241005 | 30 mars 1999 | 5 juin 2001 | Veeco Instruments, Inc. | Thermal interface member |
| US7000418 | 14 mai 2004 | 21 févr. 2006 | Intevac, Inc. | Capacitance sensing for substrate cooling |
