|
| US4205226 | 1 sept. 1978 | 27 mai 1980 | The Perkin-Elmer Corporation | Auger electron spectroscopy |
| US4310759 | 10 avr. 1980 | 12 janv. 1982 | | System for removal of material from the surface of a sample |
| US4426577 | 17 févr. 1981 | 17 janv. 1984 | International Precision Incorporated | Electron microscope of scanning type |
| US4491735 | 15 déc. 1983 | 1 janv. 1985 | The Perkin-Elmer Corporation | Restricted ion source of high current density |
| US4551599 | 22 août 1983 | 5 nov. 1985 | Max-Planck-Gesellschaft zur Furderung der Wissenschaften e.V. | Combined electrostatic objective and emission lens |
| US4556794 | 30 janv. 1985 | 3 déc. 1985 | Hughes Aircraft Company | Secondary ion collection and transport system for ion microprobe |
| US4683376 | 9 sept. 1985 | 28 juil. 1987 | ICT Integrated Circuit Testing Gesellschaft, fuer Halbleiterpruftechnik mbH | Opposing field spectrometer for electron beam mensuration technology |
| US4694170 | 24 déc. 1985 | 15 sept. 1987 | Office National d'Etudes et de Recherches Aerospatiales
Universite de Parissud | Instrument for very high resolution ionic micro-analysis of a solid sample |
| US4727250 | 28 janv. 1987 | 23 févr. 1988 | Leybold-Heraeus GmbH | Apparatus for measuring the angular distribution of charged particles scattered by a sample surface |
| US4733075 | 18 août 1986 | 22 mars 1988 | Kabushiki Kaisha Toshiba | Stroboscopic scanning electron microscope |
| US4818872 | 11 mai 1987 | 4 avr. 1989 | Microbeam Inc. | Integrated charge neutralization and imaging system |
| US4855596 | 5 mai 1987 | 8 août 1989 | ARCH Development Corp. | Photo ion spectrometer |
| US4896036 | 29 janv. 1988 | 23 janv. 1990 | Siemens Aktiengesellschaft | Detector objective for scanning microscopes |
| US4973842 | 4 mai 1987 | 27 nov. 1990 | Arch Development Corp. | Lens system for a photo ion spectrometer |
| US4978855 | 7 févr. 1990 | 18 déc. 1990 | Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V. | Electron microscope for investigation of surfaces of solid bodies |
| US4983830 | 29 juin 1989 | 8 janv. 1991 | Seiko Instruments Inc. | Focused ion beam apparatus having charged particle energy filter |
| US4983831 | 9 déc. 1988 | 8 janv. 1991 | Cameca | Time-of-flight analysis method with continuous scanning and analyzer to implement this method |
| US5146089 | 20 déc. 1990 | 8 sept. 1992 | ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH | Ion beam device and method for carrying out potential measurements by means of an ion beam |
| US5149974 | 29 oct. 1990 | 22 sept. 1992 | International Business Machines Corporation | Gas delivery for ion beam deposition and etching |
| US5578821 | 11 janv. 1995 | 26 nov. 1996 | KLA Instruments Corporation | Electron beam inspection system and method |
| US6900447 | 6 août 2003 | 31 mai 2005 | FEI Company | Focused ion beam system with coaxial scanning electron microscope |
| US7045791 | 19 mars 2001 | 16 mai 2006 | Credence Systems Corporation
Orsay-Physics, S.A. | Column simultaneously focusing a partilce beam and an optical beam |
| US7259373 | 10 juil. 2006 | 21 août 2007 | NexGenSemi Holdings Corporation | Apparatus and method for controlled particle beam manufacturing |
| US7297948 | 6 déc. 2005 | 20 nov. 2007 | Credence Systems Corporation | Column simultaneously focusing a particle beam and an optical beam |
| US7488960 | 20 août 2007 | 10 févr. 2009 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7495242 | 20 août 2007 | 24 févr. 2009 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7495244 | 20 août 2007 | 24 févr. 2009 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7495245 | 20 août 2007 | 24 févr. 2009 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7501644 | 20 août 2007 | 10 mars 2009 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7573050 | 31 oct. 2007 | 11 août 2009 | DCG Systems, Inc. | Column simultaneously focusing a particle beam and an optical beam |
| US7589322 | 28 juin 2006 | 15 sept. 2009 | Horiba, Ltd. | Sample measuring device |
| US7659526 | 20 août 2007 | 9 févr. 2010 | NexGen Semi Holding, Inc. | Apparatus and method for controlled particle beam manufacturing |
| US7714285 | 27 oct. 2006 | 11 mai 2010 | Thermo Fisher Scientific Inc. | Spectrometer for surface analysis and method therefor |
| US7993813 | 21 nov. 2007 | 9 août 2011 | NexGen Semi Holding, Inc. | Apparatus and method for conformal mask manufacturing |
