US4701013A - Optical source with optical fiber carrier - Google Patents
Optical source with optical fiber carrier Download PDFInfo
- Publication number
- US4701013A US4701013A US06/797,548 US79754885A US4701013A US 4701013 A US4701013 A US 4701013A US 79754885 A US79754885 A US 79754885A US 4701013 A US4701013 A US 4701013A
- Authority
- US
- United States
- Prior art keywords
- fiber
- base
- carrier
- optical source
- intermediary part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
- G02B6/4238—Soldering
Definitions
- the present invention concerns optical telecommunications. It relates to an optical source comprising a light-emitting component, more specifically a laser diode coupled to the end of an optical fiber and intended in particular for monomode submarine links.
- the optical fiber is glued to the fiber-carrier and the fiber-carrier is glued to the U-shaped base.
- This method of fixing using glue has disadvantages. Specifically, it entails the risk of degassing and pollution of the active optical surfaces, and does not procure sufficient long-term stability and reliability, by virtue of the strong tendency of the organic materials used for such fixings to creep. Also, this fixing method is found to be difficult to employ in practice in the case where the fiber is a monomode fiber the core diameter of which is very small, of the order of a few microns.
- U.S. Pat. No. 4,296,998 also describes a method of coupling a laser diode to a fiber.
- the position of the fiber relative to the laser diode is also adjusted dynamically in three dimensions, firstly the direction Z, then the direcitons X and Y; the fixing of the fiber in order to immobilize it in the direction Z and then in the directions X and Y makes use of a gas laser soldering technique.
- the laser diode is mounted on a base featuring a plinth carrying a mass of solder facing the laser diode. An opening through the mass of solder has a diameter which is large relative to the diameter of the fiber, which is inserted into it and can move within it.
- the appropriate areas of the fiber are previously coated with a layer of metal, to facilitate the adhesion of the solder to these areas. After the position of the fiber is adjusted dynamically, the mass of solder is melted using a gas laser and, on subsequently resolidifying, immobilizes the fiber.
- This laser soldering fixing method necessitates appropriate tooling. This operation is also very delicate to implement, because of the proximity of the active surfaces of the laser diode and of the fiber; moreover, this fixing method does not eliminate a slight inaccuracy as to the final positioning of the fiber, due to the expansion and then contraction of the mass of solder during the process of embedding the fiber.
- the present invention is directed towards the implementation of an optical source in which the adjustment of the position of the fiber relative to the laser diode is also effected dynamically in three dimensions and in which the relative fixing of the fiber and of the laser diode, while using soldering techniques, requires only very simple tooling and enables the aforementioned disadvantages to be avoided.
- An object of the present invention is an optical source comprising a base, a light-emitting component mounted on said base, a fiber-carrier in the form of a slab fastened to said base, an optical fiber mounted on said fiber-carrier and having an end optically coupled to said light-emitting component and an intermediary part in the form of a narrow slab with plane surfaces attached to said base and to which said fiber-carrier is spot soldered using an electrical resistance soldering process.
- soldered joints between said fiber-carrier and said intermediary part are situated on their contacting surfaces, in areas of these parts projecting laterally to each side of the base.
- the fiber carrier features two outwardly open blind holes enabling the thickness of this part to be reduced in the soldered areas and receiving the mobile soldering electrodes.
- said fiber is secured on said fiber-carrier by a resilient tang and partially embedded with said resilient tang in a mass of solder.
- FIG. 1 is a view in elevation of the optical source in accordance with the invention.
- FIG. 2 shows the same optical source seen from above.
- FIG. 3 is a view of the optical source from the side, in the direction of the arrow III in FIG. 1.
- FIG. 4 is a view of the optical source in cross-section on the line IV--IV in FIG. 3.
- optical source shown in the drawings comprises three sub-assemblies disposed side-by-side and assembled to one another:
- a base 1 carrying on its top surface a light-emitting component 2, advantageously a laser diode,
- a fiber-carrier 3 in the form of a small slab carrying on one if its smaller sides, called the top surface, an optical fiber pigtail 4, and
- an auxiliary part 5 also in the form of a small slab, narrower than the fiber-carrier, disposed between the base and the fiber-carrier to assemble them together and referred to as the intermediary part.
- the base 1 forms a plinth 10 surmounted by a parallelepipedal pedestal 11 carrying the laser diode, the pedestal being set back from the edge of the plinth on three of its four sides.
- the laser diode is mounted on the pedestal so as to have its emission surface coupled to the fiber pigtail 4 disposed substantially in the plane defined by the plane lateral surface of the base 1.
- the laser diode is mounted on a fine rib 12 formed between this plane lateral surface and the top surface of the pedestal.
- the base also carries a small insulative block 15, of alumina, for example.
- This block 15 is attached to the top surface of the pedestal 11.
- the block 15 has its two opposite larger surfaces metalized; one of them is fixed by brazing to the top surface of the pedestal (as an alternative it may not be metalized and may then be glued to the top surface of the pedestal), and the other, designed to provide for electrical interconnections with the laser diode, receives a gold wire 16 connected to the laser diode and a thicker exterior conductor wire 17.
- the base further features two threaded holes 13 and 14 parallel to one another at substantially the mid-height of the pedestal 11 and opening into the plane surface of the base and the opposite side.
- the base 1 is of a material which is a very good conductor of heat. It is made of copper.
- the intermediary part 5 forms a small, narrow parallelepipedal slab. Its height is substantially equal to that of the base, including the rib 12; one of its two larger lateral surfaces is applied against the plane lateral surface of the base, projecting beyond the pedestal 11 on each side.
- This intermediary part features two holes 53, 54 opening into its lateral larger surfaces and in corresponding relationship with the threaded holes 13 and 14 in the base.
- the fiber-carrier 3 is also in the form of a small parallelepipedal slab, of substantially the same size as the intermediary part although slightly thicker than it. It is fixed to the other lateral larger surface of the intermediary part 5 by masses of solder 31 and 32.
- the fiber-carrier 3 also features, in corresponding relationship to the threaded holes 13 and 14 in the base 1 and the holes 53 and 54 in the intermediary part 5, two holes 33 and 34. These holes open onto the two larger surfaces of the fiber-carrier; they serve to accommodate the heads 61, 71 of the screws 6 and 7 and make them accessible from the outside. To either side of these two through holes 33 and 34, it also features two blind holes 35 and 36 formed in the portions which, with the corresponding ones in the intermediary part 5, project laterally relative to the pedestal 11. The blind holes open into the lateral larger surface of the fiber-carrier, on the outside of the resulting final assembly. As shown in dashed line in FIG.
- This fiber-carrier 3 also features on its top surface (in the final assembly) a V-shaped groove 40 machined across its full width and substantially at its center.
- This V-shaped groove provides an easy way of positioning the fiber pigtail 4.
- On this same top surface it also carries a resilient tang 41 an end part 42 of which is arcuate and forms a spring whereas the other, substantially linear part 43 is used to fix it by means of an electric resistance solder joint 44 at its end.
- the arcuate part 42 has its convex surface extending transversely to the groove 4 on which it is centered and comes into substantial bearing engagement with its edges.
- the portions 42 and 43 of this resilient tang define between them a sharp bent edge 45 on the outside.
- This resilient tang 41 forms a means of temporarily securing the fiber pigtail 4 for adjusting its position relative to the emitting surface of the laser diode 2, before its final fixing achieved, during dynamic adjustment of its position, by a mass of solder 46 between the fiber-carrier 3, the fiber pigtail 4 and the resilient tang 41.
- the fiber pigtail 4 initially receives for this purpose a surface metal coating in this area, where it is stripped, its plastics sheath being removed over a length substantially greater than the thickness of the combination of the fiber-carrier 3 and the intermediary part 5 when assembled together.
- the fiber-carrier 3 and the intermediary part 5 assembled together by electric resistance soldering are both carefully machined so as to have very flat surfaces, in particular, their larger surfaces in contact. Both are of a material chosen to be compatible with this assembly method without requiring high electrical power, but also easily machinable and further featuring a coefficient of thermal expansion comparable with that of the material of the base 1.
- these two parts are in a stain-resistant alloy of nickel-copper-zinc, such as that commercially available under the designation Arcap.
- This method of assembly is quick and easy. It causes only minimal heating of the outside surfaces of the parts to solder so that very little heat is transmitted to the base 1. Moreover, the volume of metal heated for this soldering without external heat input is minimized; no deformation or internal tension occurs.
- the optical head is made in the following consecutive stages:
- This method of producing the optical head in accordance with the invention has numerous advantages. Apart from those resulting from the electrical resistance soldering of the intermediary part rather than the base 1 directly, using simple tooling, it is possible after the operation to solder the fiber-carrier to the intermediary part to compensate any slight misalignment occurring on insertion under pressure of the mobile electrodes into the fiber-carrier and detected during the final stage of inspecting the quality of the coupling obtained. This compensation is obtained using the screws fixing the intermediary part to the base 1, the heads of which are accessible through the fiber-carrier and the shanks of which pass through the intermediary part with the possibility of a slight clearance in the holes passing through this intermediary part.
- This method of indirectly fixing the fiber-carrier to the base also makes it possible, in the case of excessive misalignment, to recover the assembly comprising the base and the laser diode, which will not have been subjected to any deterioration, in particular of the surface, during the assembly of the optical source concerned, which is in this case defective, in order to reutilize it in a new optical source.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8417297 | 1984-11-13 | ||
FR8417297A FR2573220B1 (en) | 1984-11-13 | 1984-11-13 | OPTICAL SOURCE |
Publications (1)
Publication Number | Publication Date |
---|---|
US4701013A true US4701013A (en) | 1987-10-20 |
Family
ID=9309545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US06/797,548 Expired - Fee Related US4701013A (en) | 1984-11-13 | 1985-11-13 | Optical source with optical fiber carrier |
Country Status (5)
Country | Link |
---|---|
US (1) | US4701013A (en) |
EP (1) | EP0183124B1 (en) |
CA (1) | CA1257678A (en) |
DE (1) | DE3576216D1 (en) |
FR (1) | FR2573220B1 (en) |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4747657A (en) * | 1987-06-15 | 1988-05-31 | American Telephone And Telegraph Company | Achieving improved radial alignment in an optical package |
US4767174A (en) * | 1983-05-17 | 1988-08-30 | L'etat Francais Represente Par Le Ministre Des P.Tt. | Process and device for connecting an optical fibre and an integrated optical component comprising a wave guide |
US4787696A (en) * | 1987-12-18 | 1988-11-29 | Gte Laboratories Incorporated | Mounting apparatus for optical fibers and lasers |
US4887882A (en) * | 1988-02-04 | 1989-12-19 | Societe Anonyme Dite : Alcatel Cit | Alignment method, in particular for optical components |
EP0358592A2 (en) * | 1988-09-08 | 1990-03-14 | Honeywell Inc. | Metallic bond for mounting of optical fibers to integrated optical chips |
EP0358593A2 (en) * | 1988-09-08 | 1990-03-14 | Honeywell Inc. | Method for and apparatus made by interfacing an optical fiber to an optical source |
US5026134A (en) * | 1988-03-01 | 1991-06-25 | Kabushiki Kaisha Toshiba | Optical communication apparatus with base for fixing elements |
US5097109A (en) * | 1990-02-20 | 1992-03-17 | General Motors Corporation | Insulated aluminum weld fixture and a method of making same |
US5111522A (en) * | 1991-02-19 | 1992-05-05 | At&T Bell Laboratories | Optical package with reduced deflection of the optical signal path |
US5521999A (en) * | 1994-03-17 | 1996-05-28 | Eastman Kodak Company | Optical system for a laser printer |
US5553182A (en) * | 1995-02-14 | 1996-09-03 | Mcdonnell Douglas Corporation | Alignment fixture and associated method for controllably positioning on optical fiber |
US5602955A (en) * | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5606635A (en) * | 1995-06-07 | 1997-02-25 | Mcdonnell Douglas Corporation | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5881198A (en) * | 1995-06-07 | 1999-03-09 | Mcdonnell Douglas Corporation | Microactuator for precisely positioning an optical fiber and an associated method |
US6438461B1 (en) | 1999-02-23 | 2002-08-20 | Newport Corporation | Method and device for displacing a moving body on a base mounted elastically with respect to the ground |
US6511035B1 (en) | 1999-08-03 | 2003-01-28 | Newport Corporation | Active vibration isolation systems with nonlinear compensation to account for actuator saturation |
US6516130B1 (en) | 1998-12-30 | 2003-02-04 | Newport Corporation | Clip that aligns a fiber optic cable with a laser diode within a fiber optic module |
US6568666B2 (en) | 2001-06-13 | 2003-05-27 | Newport Corporation | Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload |
US6601524B2 (en) | 2001-03-28 | 2003-08-05 | Newport Corporation | Translation table with a spring biased dovetail bearing |
US6614601B2 (en) | 1998-08-17 | 2003-09-02 | Newport Corporation | Gimballed optical mount |
US6619611B2 (en) | 2001-07-02 | 2003-09-16 | Newport Corporation | Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration |
US6655840B2 (en) | 2001-02-13 | 2003-12-02 | Newport Corporation | Stiff cross roller bearing configuration |
US6791058B2 (en) | 2001-04-25 | 2004-09-14 | Newport Corporation | Automatic laser weld machine for assembling photonic components |
US6966535B2 (en) | 2002-05-07 | 2005-11-22 | Newport Corporation | Snubber for pneumatically isolated platforms |
US6996506B2 (en) | 1999-02-23 | 2006-02-07 | Newport Corporation | Process and device for displacing a moveable unit on a base |
US7320455B2 (en) | 2003-10-24 | 2008-01-22 | Newport Corporation | Instrumented platform for vibration-sensitive equipment |
US8231098B2 (en) | 2004-12-07 | 2012-07-31 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2311325A1 (en) * | 1975-05-14 | 1976-12-10 | Philips Nv | DEVICE FOR COUPLING A LIGHT SOURCE TO AN OPTICAL FIBER |
FR2372444A1 (en) * | 1976-11-29 | 1978-06-23 | Northern Telecom Ltd | Alignment of optical fibre with opto-electronic device - uses ring and cup supports, actuator and light detector |
US4167744A (en) * | 1978-03-23 | 1979-09-11 | Rca Corporation | Electroluminescent semiconductor device having optical fiber window |
JPS5536930A (en) * | 1978-09-06 | 1980-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
FR2446497A1 (en) * | 1979-01-09 | 1980-08-08 | Thomson Csf | Opto-electronic coupling head - mounted in transistor type housing for accurate orientation w.r.t. fibre=optic cable |
US4237474A (en) * | 1978-10-18 | 1980-12-02 | Rca Corporation | Electroluminescent diode and optical fiber assembly |
US4296998A (en) * | 1979-12-17 | 1981-10-27 | Bell Telephone Laboratories, Incorporated | Encapsulated light source with coupled fiberguide |
FR2488699A1 (en) * | 1980-08-13 | 1982-02-19 | Thomson Csf | Connector for optical fibre, with adjusting mechanism - uses two contacting blocks having hollow sections, forming cavity, receiving sealing material, and permits sliding contact |
EP0104882A1 (en) * | 1982-09-29 | 1984-04-04 | THE GENERAL ELECTRIC COMPANY, p.l.c. | Optical fibre coupling assemblies |
JPS5994725A (en) * | 1982-11-22 | 1984-05-31 | Fujitsu Ltd | Coupling method between photosemiconductor device and optical parts |
DE3307669A1 (en) * | 1983-03-04 | 1984-09-06 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Coupling arrangement between an electrooptical and/or optoelectric semiconductor component and an optical fibre |
US4523802A (en) * | 1981-02-19 | 1985-06-18 | Kokusai Denshin Denwa Kabushiki Kaisha | Unitary mounting structure for semiconductor laser and optical fiber |
-
1984
- 1984-11-13 FR FR8417297A patent/FR2573220B1/en not_active Expired
-
1985
- 1985-11-08 CA CA000494887A patent/CA1257678A/en not_active Expired
- 1985-11-12 DE DE8585114348T patent/DE3576216D1/en not_active Expired - Fee Related
- 1985-11-12 EP EP85114348A patent/EP0183124B1/en not_active Expired - Lifetime
- 1985-11-13 US US06/797,548 patent/US4701013A/en not_active Expired - Fee Related
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2311325A1 (en) * | 1975-05-14 | 1976-12-10 | Philips Nv | DEVICE FOR COUPLING A LIGHT SOURCE TO AN OPTICAL FIBER |
FR2372444A1 (en) * | 1976-11-29 | 1978-06-23 | Northern Telecom Ltd | Alignment of optical fibre with opto-electronic device - uses ring and cup supports, actuator and light detector |
US4167744A (en) * | 1978-03-23 | 1979-09-11 | Rca Corporation | Electroluminescent semiconductor device having optical fiber window |
JPS5536930A (en) * | 1978-09-06 | 1980-03-14 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor laser device |
US4237474A (en) * | 1978-10-18 | 1980-12-02 | Rca Corporation | Electroluminescent diode and optical fiber assembly |
FR2446497A1 (en) * | 1979-01-09 | 1980-08-08 | Thomson Csf | Opto-electronic coupling head - mounted in transistor type housing for accurate orientation w.r.t. fibre=optic cable |
US4296998A (en) * | 1979-12-17 | 1981-10-27 | Bell Telephone Laboratories, Incorporated | Encapsulated light source with coupled fiberguide |
FR2488699A1 (en) * | 1980-08-13 | 1982-02-19 | Thomson Csf | Connector for optical fibre, with adjusting mechanism - uses two contacting blocks having hollow sections, forming cavity, receiving sealing material, and permits sliding contact |
US4523802A (en) * | 1981-02-19 | 1985-06-18 | Kokusai Denshin Denwa Kabushiki Kaisha | Unitary mounting structure for semiconductor laser and optical fiber |
EP0104882A1 (en) * | 1982-09-29 | 1984-04-04 | THE GENERAL ELECTRIC COMPANY, p.l.c. | Optical fibre coupling assemblies |
JPS5994725A (en) * | 1982-11-22 | 1984-05-31 | Fujitsu Ltd | Coupling method between photosemiconductor device and optical parts |
DE3307669A1 (en) * | 1983-03-04 | 1984-09-06 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Coupling arrangement between an electrooptical and/or optoelectric semiconductor component and an optical fibre |
Cited By (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4767174A (en) * | 1983-05-17 | 1988-08-30 | L'etat Francais Represente Par Le Ministre Des P.Tt. | Process and device for connecting an optical fibre and an integrated optical component comprising a wave guide |
US4747657A (en) * | 1987-06-15 | 1988-05-31 | American Telephone And Telegraph Company | Achieving improved radial alignment in an optical package |
US4787696A (en) * | 1987-12-18 | 1988-11-29 | Gte Laboratories Incorporated | Mounting apparatus for optical fibers and lasers |
US4887882A (en) * | 1988-02-04 | 1989-12-19 | Societe Anonyme Dite : Alcatel Cit | Alignment method, in particular for optical components |
US5026134A (en) * | 1988-03-01 | 1991-06-25 | Kabushiki Kaisha Toshiba | Optical communication apparatus with base for fixing elements |
US4946553A (en) * | 1988-09-08 | 1990-08-07 | United Technologies Corporation | Apparatus for interfacing an optical fiber to an optical source |
EP0358593A2 (en) * | 1988-09-08 | 1990-03-14 | Honeywell Inc. | Method for and apparatus made by interfacing an optical fiber to an optical source |
EP0358592A2 (en) * | 1988-09-08 | 1990-03-14 | Honeywell Inc. | Metallic bond for mounting of optical fibers to integrated optical chips |
EP0358592A3 (en) * | 1988-09-08 | 1991-07-17 | Honeywell Inc. | Metallic bond for mounting of optical fibers to integrated optical chips |
EP0358593A3 (en) * | 1988-09-08 | 1991-07-17 | Honeywell Inc. | Method for and apparatus made by interfacing an optical fiber to an optical source |
US5097109A (en) * | 1990-02-20 | 1992-03-17 | General Motors Corporation | Insulated aluminum weld fixture and a method of making same |
US5111522A (en) * | 1991-02-19 | 1992-05-05 | At&T Bell Laboratories | Optical package with reduced deflection of the optical signal path |
US5521999A (en) * | 1994-03-17 | 1996-05-28 | Eastman Kodak Company | Optical system for a laser printer |
US5553182A (en) * | 1995-02-14 | 1996-09-03 | Mcdonnell Douglas Corporation | Alignment fixture and associated method for controllably positioning on optical fiber |
US5881198A (en) * | 1995-06-07 | 1999-03-09 | Mcdonnell Douglas Corporation | Microactuator for precisely positioning an optical fiber and an associated method |
US5606635A (en) * | 1995-06-07 | 1997-02-25 | Mcdonnell Douglas Corporation | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
US5602955A (en) * | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
US6614601B2 (en) | 1998-08-17 | 2003-09-02 | Newport Corporation | Gimballed optical mount |
US6516130B1 (en) | 1998-12-30 | 2003-02-04 | Newport Corporation | Clip that aligns a fiber optic cable with a laser diode within a fiber optic module |
US6608959B2 (en) | 1998-12-30 | 2003-08-19 | Newport Corporation | Apparatus and process for welding a fiber optic cable |
US6996506B2 (en) | 1999-02-23 | 2006-02-07 | Newport Corporation | Process and device for displacing a moveable unit on a base |
US6438461B1 (en) | 1999-02-23 | 2002-08-20 | Newport Corporation | Method and device for displacing a moving body on a base mounted elastically with respect to the ground |
US6511035B1 (en) | 1999-08-03 | 2003-01-28 | Newport Corporation | Active vibration isolation systems with nonlinear compensation to account for actuator saturation |
US6655840B2 (en) | 2001-02-13 | 2003-12-02 | Newport Corporation | Stiff cross roller bearing configuration |
US6601524B2 (en) | 2001-03-28 | 2003-08-05 | Newport Corporation | Translation table with a spring biased dovetail bearing |
US6791058B2 (en) | 2001-04-25 | 2004-09-14 | Newport Corporation | Automatic laser weld machine for assembling photonic components |
US6568666B2 (en) | 2001-06-13 | 2003-05-27 | Newport Corporation | Method for providing high vertical damping to pneumatic isolators during large amplitude disturbances of isolated payload |
US6619611B2 (en) | 2001-07-02 | 2003-09-16 | Newport Corporation | Pneumatic vibration isolator utilizing an elastomeric element for isolation and attenuation of horizontal vibration |
US6966535B2 (en) | 2002-05-07 | 2005-11-22 | Newport Corporation | Snubber for pneumatically isolated platforms |
US7320455B2 (en) | 2003-10-24 | 2008-01-22 | Newport Corporation | Instrumented platform for vibration-sensitive equipment |
US8231098B2 (en) | 2004-12-07 | 2012-07-31 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
US8651447B2 (en) | 2004-12-07 | 2014-02-18 | Newport Corporation | Methods and devices for active vibration damping of an optical structure |
Also Published As
Publication number | Publication date |
---|---|
DE3576216D1 (en) | 1990-04-05 |
EP0183124A1 (en) | 1986-06-04 |
CA1257678A (en) | 1989-07-18 |
FR2573220B1 (en) | 1987-01-16 |
EP0183124B1 (en) | 1990-02-28 |
FR2573220A1 (en) | 1986-05-16 |
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Legal Events
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AS | Assignment |
Owner name: SOCIETE ANONYME DITE : COMPAGNIE INDUSTRIELLE, DES Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNORS:JURCZYSZYN, MICHEL;MARCHAND, MICHEL;REEL/FRAME:004737/0633 Effective date: 19851023 Owner name: SOCIETE ANONYME DITE : COMPAGNIE INDUSTRIELLE, DES Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:JURCZYSZYN, MICHEL;MARCHAND, MICHEL;REEL/FRAME:004737/0633 Effective date: 19851023 |
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Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
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