US4952834A - Circuitry for driving ultrasonic motor - Google Patents

Circuitry for driving ultrasonic motor Download PDF

Info

Publication number
US4952834A
US4952834A US07/321,993 US32199389A US4952834A US 4952834 A US4952834 A US 4952834A US 32199389 A US32199389 A US 32199389A US 4952834 A US4952834 A US 4952834A
Authority
US
United States
Prior art keywords
signal
pulses
driving
pulse
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US07/321,993
Inventor
Junji Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Assigned to OLYMPUS OPTICAL CO., LTD., A CORP. OF JAPAN reassignment OLYMPUS OPTICAL CO., LTD., A CORP. OF JAPAN ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: OKADA, JUNJI
Application granted granted Critical
Publication of US4952834A publication Critical patent/US4952834A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/142Small signal circuits; Means for controlling position or derived quantities, e.g. speed, torque, starting, stopping, reversing
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14Drive circuits; Control arrangements or methods
    • H02N2/145Large signal circuits, e.g. final stages
    • H02N2/147Multi-phase circuits

Definitions

  • the present invention relates to a circuitry for driving an ultrasonic motor and in particular to circuitry for driving an ultrasonic motor in which a rotor is driven by travelling waves which are generated by a piezoelectric effect.
  • the driving frequency should be preset to a frequency in the vicinity of a resonant frequency inherent to the USM.
  • the resonant frequency of the USM is gradually and slightly deviated due to changes in load, biasing force between a rotor and a stator of the USM, and environmental conditions such as temperature and applied voltage. Accordingly it is necessary to cause the driving frequency to automatically track an optimal frequency for driving the motor.
  • the present inventors have proposed an apparatus for driving an ultrasonic motor in which a driving frequency is automatically tracked by a PLL (Phase Locked Loop) system as is disclosed in Japanese Patent Application Sho 62-66750 (Japanese Laid-Open Patent Application Sho 63-234881).
  • PLL Phase Locked Loop
  • FIG. 6 shows a relation between a rotational speed and a driving frequency when the voltage which is applied to a driving electrode of the USM is constant.
  • the rotational speed is a maximum at a frequency fI in the vicinity of a resonant frequency fr.
  • the rotational speed is exponentially lowered as is shown by a solid line l 3a if the driving frequency is shifted to a higher frequency as is shown, for example, fII. This means that lowering of the efficiency of the motor and the driving circuit causes lowering of the rotational speed of the motor.
  • the driving condition of the USM is so unstable that the rotation of the USM is stopped (this is referred to as "locked") as shown by a dotted line l 3b .
  • the driving frequency is made constant and the voltage applied to the USM is made variable, the range of changes in rotational speed is narrow as shown by solid line l 4a at a driving frequency fI in the vicinity of resonant frequency as shown in FIG. 7.
  • an increase in applied voltage causes the rotational voltage to saturate as shown by a dotted line l 4b .
  • lowering the applied voltage causes the USM to lock as shown by a dotted line l 4c .
  • FIG. 1 is a schematic block diagram showing circuitry for driving an ultrasonic motor in accordance with the present invention
  • FIG. 2 is a block diagram showing an embodiment of circuitry for driving an ultrasonic motor of the present invention
  • FIG. 3 is a wiring diagram showing a saw-tooth-wave generator of FIG. 2 in detail
  • FIG. 4 is a timing chart showing waveforms of signals at different positions FIG. 2;
  • FIG. 5 is a graph showing the relation between the pulse width of a driving signal applied to driving electrodes of an ultrasonic motor and the rotational speed of the motor.
  • FIG. 6 is a graph showing the relation between the frequency of the driving signal and the rotational speed of a conventional motor.
  • FIG. 7 is a graph showing the relation between the applied voltage and the rotational speed of a conventional motor.
  • circuitry for driving an ultrasonic motor (not shown) in which a moving member which is in a frictional contact relationship with the surface of an elastic member is forcedly moved by applying an alternating voltage to a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member.
  • the circuitry for driving an ultrasonic motor comprises a voltage controlled oscillator 1 for generating rectangular waves having a frequency of 4n times (where n is an integer) as high as that of the alternating voltage to be applied to the piezoelectric element; a distributor 2 for separating and distributing the rectangular waves into four phase pulse waves ( ⁇ 0 , ⁇ 1 , ⁇ 2 , ⁇ 3 wherein ⁇ 0 and ⁇ 1 ; ⁇ 2 and ⁇ 3 are 180° out of phase with each other; ⁇ 0 and ⁇ 2 , ⁇ 1 and ⁇ 3 being 90° out of phase with each other) as shown in FIG.
  • a saw-tooth-wave generator 5 for generating saw-tooth-waves which are in synchronization with said rectangular waves; a pulse width modulating comparator 6 for comparing the level of said saw-tooth-wave signals with that of a reference voltage; a driving pulse width changing circuit 3 for changing the width of the four phase pulses in response to the output from said pulse width modulating comparator 6; output circuits 4a, 4b which combine 180° out-of phase pulses ( ⁇ 0 with ⁇ 1 , ⁇ 2 with ⁇ 3 , the pulse width of which have been changed by said driving pulse width changing circuit 3 and amplify the combined pulses to apply them to said piezoelectric element as two 90° out-of-phase alternating voltages; a feed-back piezoelectric element secured to said elastic member for generating a feed back signal due to piezoelectric effect on driving of the ultrasonic motor; and a driving frequency automatically tracking circuit 7 responsive to said feed back signal for outputting to said voltage controlled oscillator 1 a voltage signal representative of
  • FIG. 2 there is shown an embodiment of the circuitry for driving an ultrasonic motor of the present invention.
  • a voltage controlled oscillator 11 (hereinafter referred to as a VCO) is controlled by an error amplifier 12 so that the oscillator 11 outputs a rectangular signal A having a frequency of 4 times that of a driving voltage signal for USM 81.
  • the error amplifier 12 has an inverting input, to which an oscilation frequency controlling reference voltage V ref2 from a variable power supply 13 is applied.
  • the frequency f 0 is adjusted by adjusting the reference voltage V ref2.
  • the oscillator may generate a signal whose frequency is 4n times that of the driving signal. In this case, the signal is divided by 4n by a suitable frequency divider which is provided at a following stage.
  • the rectangular signal A having a frequency f 0 is applied to a distributor 24 as a clock pulse and is applied to a flip-flop circuit 21 (hereinafter referred to as F/F).
  • F/F flip-flop circuit 21
  • the output signal from the F/F 21, the frequency of which has been divided by 2 is applied to one input of an AND gate 23 and is applied to F/F 22.
  • the signal is furthermore divided by 2 by F/F 22.
  • a signal divided by 4 is applied to another input of the AND gate 23. Since a data signal C is obtained from the output of the AND gate 23, the data signal C is applied to a distributor 24 as a D input.
  • the distributor 24 comprises a 4-bit shift register having four outputs.
  • Four phase signals ⁇ 0 , ⁇ 2 , ⁇ 1 and ⁇ 3 which are successively spaced at 90° phase intervals are outputted from the outputs of the register through a switching circuit 25.
  • the waveforms D, E, F, G and timing relationship of the signals are shown in FIG. 4. Turning ON and OFF signals which control the operation and stop of USM81 respectively and a rotational direction changing signal K which controls the direction of the rotation of USM are applied to terminals T 2 and T 1 respectively.
  • signals ⁇ 0 and ⁇ 1 which are 180° out of phase with each other are applied through AND gates 31 and 32, which will be described hereafter, to a push-pull amplifying circuit comprising a pair of transistors 41 and 42 and a step-up transformer 43 for driving the amplifying circuit.
  • signals ⁇ 2 and ⁇ 3 drive via AND gates 33 and 34 a push-pull amplifying circuit comprising transistors 44 and 45 and a step-up transformer 46.
  • a power supply voltage V M is supplied to center taps of the step-up transformers 43 and 46.
  • driving voltages having a 90° phase difference are applied to driving terminals 81a and 81b of the USM81.
  • An elastic member of USM81 causes expansion and contraction thereof to generate travelling waves. The expansion and contraction of the elastic member causes a monitor piezoelectric element on the USM 81 to generate a feed-back signal L at the electrode 81c of the element due to the piezoelectric effect.
  • a reference frequency signal H which has been obtained by waveshaping the feedback signal in a comparator 71 is compared in phase with a comparison signal B output from the F/F22 by a phase comparison circuit 72 to detect a phase error between the VCO oscillation frequency divided by four and a resonant frequency.
  • the phase error signal is smoothed by a LPF 73 (Low pass filter) and is fed back to a voltage control terminal of VCO 11 through an error amplifier 12 for accomplishing automatic frequency tracking. If an automatic frequency tracking is carried out in such a manner, driving can always be carried out efficiently at an optimum frequency point.
  • the rectangular signals A outputted from VCO 11 are applied to a monostable multivibrator 51 (hereinafter referred to as M/M).
  • M/M monostable multivibrator 51
  • the multivibrator provides a trigger signal having a pulse width which is determined by a time constant of M/M51.
  • the trigger signal is supplied to a saw-tooth-wave generator 52 as shown in FIG. 3.
  • a transistor 55 is turned off so that an integrating capacitor 51 is charged with a constant current I 0 from a constant current source 53. Accordingly, the potential across the capacitor 54 linearly increases as shown by a line l 1 of the waveform shown in FIG. 3.
  • the trigger signal from M/M51 When the trigger signal from M/M51 is rendered active, the trigger signal is differentiated by a differentiating circuit comprising a capacitor 56, resistor 57 and diode 58 and is applied upon a base electrode of the transistor 55. Then the charge which has been accumulated by the integrating capacitor 54 is discharged through the transistor 55 as shown by a line l 2 of waveform in FIG. 3 so that the potential level across the capacitor 54 is returned to a ground level. In such a manner, a saw-tooth-wave signal J which is in synchronization with the oscillation output of VCO 11 is obtained across the integrating capacitor 54 and is outputted via a voltage follower connected operational amplifier 59 to a non-inverting input of the PWM (pulse width modulating) comparator 61.
  • a differentiating circuit comprising a capacitor 56, resistor 57 and diode 58 and is applied upon a base electrode of the transistor 55. Then the charge which has been accumulated by the integrating capacitor 54 is discharge
  • Data which are supplied in a bit-serial manner from an external device (not shown) such as microcomputor connected to a speed control terminal T 3 are converted into parallel data by a serial/parallel convertor 65.
  • the parallel output is applied to a D/A convertor 66, the output of which is in turn applied to a non-inverting input of an error amplifier 62 as an analog speed control reference voltage V ref1.
  • Output pulses from a rotary encoder of USM (not shown) connected to a terminal T 4 are smoothed by a F/V converting circuit comprising M/M63 and LPF 64 and are then applied to a non-inverting input of the error amplifier 62 as a d.c. voltage.
  • the error amplifier 62 provides a pulse width modulating signal M to a non-inverting input of a PWM comparator 61 which compares the level of the pulse width modulating signal M with that of the saw-tooth-wave signal J to output a signal S having a pulse width variable in accordance with the change in output from the rotary encoder of USM81 at an output of PWM comparator 61.
  • the signal having a variable pulse width S is applied to one input of each of the four two-input type AND gates 31, 32, 33 and 34 which form a driving pulse width changing circuit.
  • These two-input AND gates 31, 32, 33 and 34 determine a logical product between a pulse S and each of the four phase signals ⁇ 0 , ⁇ 1 , ⁇ 2 and ⁇ 3 applied to another input of the gates 31, 32, 33 and 34 from the distributor 24 to provide four phase signals N, P, Q and R, the pulse width of which has been changed, to output transistors 41, 42, 44 and 45 respectively to control the driving time thereof. Accordingly, the collector current of each output transistor 41, 42, 44 and 45 is switched, resulting in that the electric power introduced to USM81 is changed.
  • power control of a USM with a PWM makes it possible to provide driving circuitry in which a desired motor speed can be obtained by the entry of speed control data. It is possible to provide a constant rotational motor speed by feeding back an encoder output representative of the rotational motor speed.

Abstract

Circuitry for driving an ultrasonic motor in which a rotor is driven by travelling waves generated by a piezoelectric effect, which circuitry includes a pulse generator for generating pulses applied to the ultrasonic motor for driving the same, a driving pulse width changing circuit for changing the width of the driving pulse to change the rotational speed of the motor, a feed-back piezoelectric element provided on the motor for generating a feed-back signal in response to the rotational speed of motor, and a driving frequency automatic tracking circuit responsive to the feed back signal from the motor for generating a voltage signal to control the pulse generator.

Description

FIELD OF THE INVENTION AND RELATED ART STATEMENT
The present invention relates to a circuitry for driving an ultrasonic motor and in particular to circuitry for driving an ultrasonic motor in which a rotor is driven by travelling waves which are generated by a piezoelectric effect.
Recently an ultrasonic motor has been proposed in which a movable member (rotor) which is in frictional contact relationship with the surface of an elastic member is forcedly moved by applying an alternating voltage to a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member as is different from a conventional electromagnetically driven motor. This motor is also referred to as vibration motor (hereinafter abbreviated to as USM) and is simple in structure and may be made compact. This motor attracts attention as a new actuator since direct drive is possible without using any reduction gear due to its high torque and low rotational speed. Such a motor has already been used as an actuator for automatic focussing in the field of camera.
Driving of a USM is carried out by applying two alternating voltages having similar amplitude and frequency, π/2(=90°) phase shift to a polarization treated piezoelectric element at two positions which are in a spatial relationship π/4+nλ (n is an integer and λ is a wave length of a travelling wave) with each other. At this time, the driving frequency should be preset to a frequency in the vicinity of a resonant frequency inherent to the USM. However the resonant frequency of the USM is gradually and slightly deviated due to changes in load, biasing force between a rotor and a stator of the USM, and environmental conditions such as temperature and applied voltage. Accordingly it is necessary to cause the driving frequency to automatically track an optimal frequency for driving the motor. The present inventors have proposed an apparatus for driving an ultrasonic motor in which a driving frequency is automatically tracked by a PLL (Phase Locked Loop) system as is disclosed in Japanese Patent Application Sho 62-66750 (Japanese Laid-Open Patent Application Sho 63-234881).
In order to use a USM as an actuator, it is essential to enable to adjust the rotational speed of the USM.
FIG. 6 shows a relation between a rotational speed and a driving frequency when the voltage which is applied to a driving electrode of the USM is constant. As is apparent from FIG. 6, the rotational speed is a maximum at a frequency fI in the vicinity of a resonant frequency fr. The rotational speed is exponentially lowered as is shown by a solid line l3a if the driving frequency is shifted to a higher frequency as is shown, for example, fII. This means that lowering of the efficiency of the motor and the driving circuit causes lowering of the rotational speed of the motor. At a driving frequency lower than the resonant frequency fr, the driving condition of the USM is so unstable that the rotation of the USM is stopped (this is referred to as "locked") as shown by a dotted line l3b. On the other hand, if the driving frequency is made constant and the voltage applied to the USM is made variable, the range of changes in rotational speed is narrow as shown by solid line l4a at a driving frequency fI in the vicinity of resonant frequency as shown in FIG. 7. Furthermore an increase in applied voltage causes the rotational voltage to saturate as shown by a dotted line l4b. Conversely, lowering the applied voltage causes the USM to lock as shown by a dotted line l4c. Smooth rotation over a range from a still condition to a maximum speed may not be obtained. It is considered that this is due to the fact that lowering the applied voltage shifts the resonant frequency to a higher frequency so that the USM ceases rotation when the driving frequency fI became lower than the resonant frequency fr.
At a driving frequency fII far from the resonant frequency fr, the maximum rotational speed is suppressed low although smooth rotation may be obtained from a still condition as shown by a linear line l5. The range of changes in rotational speed is also narrow. This is due to the fact that lowering of the efficiency of the USM and the driving circuit causes the motor speed to lower.
Such a speed control by shifting the driving frequency from the resonant frequency of USM is contradictory to an automatic frequency tracking for driving the USM as efficiently as possible.
An approach has been proposed that changing phase the difference between two phase signals (generally π/2) which drive the USM to decrease the travelling wave component of the elastic member surface and to increase the standing wave component for lowering the rotational speed of the USM. However this approach also lowers the efficiency of the USM and the driving circuit to lower the motor's rotational speed.
OBJECT AND SUMMARY OF THE INVENTION
It is an object of the present invention to provide circuitry for driving an ultrasonic motor in which speed control can be linearly made over a wide range from a still condition to a maximum speed of rotation at a high efficiency without lowering the efficiency of motor and driving circuit while maintaining the driving frequency at a constant frequency in the vicinity of a resonant frequency.
The following remarkable effects are exhibited in accordance with the present invention. Comparison of the phase of a control signal which drives and controls an ultrasonic motor with the phase of a feed-back signal generated due to a piezoelectric effect by a driving voltage is carried out to provide an error signal to control an oscillation frequency of a voltage controlled oscillator for automatically tracking an optimum driving frequency of the ultrasonic motor. Simultaneously the pulse width of four phase signals which are successively 90° phase shifted with each other to drive an output circuit for driving a motor is changed with time by a pulse width modulation. Accordingly, circuitry for driving an ultrasonic motor in which the rotational speed of the motor can be linearly changed from a still condition to a maximum high speed as shown in FIG. 5 without lowering the efficiency of motor and circuit can be provided.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic block diagram showing circuitry for driving an ultrasonic motor in accordance with the present invention;
FIG. 2 is a block diagram showing an embodiment of circuitry for driving an ultrasonic motor of the present invention;
FIG. 3 is a wiring diagram showing a saw-tooth-wave generator of FIG. 2 in detail;
FIG. 4 is a timing chart showing waveforms of signals at different positions FIG. 2;
FIG. 5 is a graph showing the relation between the pulse width of a driving signal applied to driving electrodes of an ultrasonic motor and the rotational speed of the motor.
FIG. 6 is a graph showing the relation between the frequency of the driving signal and the rotational speed of a conventional motor; and
FIG. 7 is a graph showing the relation between the applied voltage and the rotational speed of a conventional motor.
DETAILED DESCRIPTION OF DREFERRED EMBODIMENTS
Referring now to FIG. 1, there is shown circuitry for driving an ultrasonic motor (not shown) in which a moving member which is in a frictional contact relationship with the surface of an elastic member is forcedly moved by applying an alternating voltage to a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member. The circuitry for driving an ultrasonic motor comprises a voltage controlled oscillator 1 for generating rectangular waves having a frequency of 4n times (where n is an integer) as high as that of the alternating voltage to be applied to the piezoelectric element; a distributor 2 for separating and distributing the rectangular waves into four phase pulse waves (φ0, φ1, φ2, φ3 wherein φ0 and φ1 ; φ2 and φ3 are 180° out of phase with each other; φ0 and φ2, φ1 and φ3 being 90° out of phase with each other) as shown in FIG. 4; a saw-tooth-wave generator 5 for generating saw-tooth-waves which are in synchronization with said rectangular waves; a pulse width modulating comparator 6 for comparing the level of said saw-tooth-wave signals with that of a reference voltage; a driving pulse width changing circuit 3 for changing the width of the four phase pulses in response to the output from said pulse width modulating comparator 6; output circuits 4a, 4b which combine 180° out-of phase pulses (φ0 with φ1, φ2 with φ3, the pulse width of which have been changed by said driving pulse width changing circuit 3 and amplify the combined pulses to apply them to said piezoelectric element as two 90° out-of-phase alternating voltages; a feed-back piezoelectric element secured to said elastic member for generating a feed back signal due to piezoelectric effect on driving of the ultrasonic motor; and a driving frequency automatically tracking circuit 7 responsive to said feed back signal for outputting to said voltage controlled oscillator 1 a voltage signal representative of a difference between an optimum driving freqency and the current driving frequency.
Referring now to FIG. 2, there is shown an embodiment of the circuitry for driving an ultrasonic motor of the present invention.
A voltage controlled oscillator 11 (hereinafter referred to as a VCO) is controlled by an error amplifier 12 so that the oscillator 11 outputs a rectangular signal A having a frequency of 4 times that of a driving voltage signal for USM 81. The error amplifier 12 has an inverting input, to which an oscilation frequency controlling reference voltage V ref2 from a variable power supply 13 is applied. The frequency f0 is adjusted by adjusting the reference voltage V ref2. The oscillator may generate a signal whose frequency is 4n times that of the driving signal. In this case, the signal is divided by 4n by a suitable frequency divider which is provided at a following stage. The rectangular signal A having a frequency f0 is applied to a distributor 24 as a clock pulse and is applied to a flip-flop circuit 21 (hereinafter referred to as F/F). The output signal from the F/F 21, the frequency of which has been divided by 2 is applied to one input of an AND gate 23 and is applied to F/F 22. The signal is furthermore divided by 2 by F/F 22. As a result, a signal divided by 4 is applied to another input of the AND gate 23. Since a data signal C is obtained from the output of the AND gate 23, the data signal C is applied to a distributor 24 as a D input.
The distributor 24 comprises a 4-bit shift register having four outputs. Four phase signals φ0, φ2, φ1 and φ3 which are successively spaced at 90° phase intervals are outputted from the outputs of the register through a switching circuit 25. The waveforms D, E, F, G and timing relationship of the signals are shown in FIG. 4. Turning ON and OFF signals which control the operation and stop of USM81 respectively and a rotational direction changing signal K which controls the direction of the rotation of USM are applied to terminals T2 and T1 respectively. The signals φ0 and φ1 which are 180° out of phase with each other are applied through AND gates 31 and 32, which will be described hereafter, to a push-pull amplifying circuit comprising a pair of transistors 41 and 42 and a step-up transformer 43 for driving the amplifying circuit. Similarly, signals φ2 and φ3 drive via AND gates 33 and 34 a push-pull amplifying circuit comprising transistors 44 and 45 and a step-up transformer 46. A power supply voltage VM is supplied to center taps of the step-up transformers 43 and 46.
As a result of this, driving voltages having a 90° phase difference are applied to driving terminals 81a and 81b of the USM81. An elastic member of USM81 causes expansion and contraction thereof to generate travelling waves. The expansion and contraction of the elastic member causes a monitor piezoelectric element on the USM 81 to generate a feed-back signal L at the electrode 81c of the element due to the piezoelectric effect. Since the feed-back signal L represents the vibration of the elastic member per se, a reference frequency signal H which has been obtained by waveshaping the feedback signal in a comparator 71 is compared in phase with a comparison signal B output from the F/F22 by a phase comparison circuit 72 to detect a phase error between the VCO oscillation frequency divided by four and a resonant frequency. The phase error signal is smoothed by a LPF 73 (Low pass filter) and is fed back to a voltage control terminal of VCO 11 through an error amplifier 12 for accomplishing automatic frequency tracking. If an automatic frequency tracking is carried out in such a manner, driving can always be carried out efficiently at an optimum frequency point.
On the other hand, the rectangular signals A outputted from VCO 11 are applied to a monostable multivibrator 51 (hereinafter referred to as M/M). The multivibrator provides a trigger signal having a pulse width which is determined by a time constant of M/M51. The trigger signal is supplied to a saw-tooth-wave generator 52 as shown in FIG. 3. In the saw-tooth-wave generator 52, when the trigger signal is non-active, a transistor 55 is turned off so that an integrating capacitor 51 is charged with a constant current I0 from a constant current source 53. Accordingly, the potential across the capacitor 54 linearly increases as shown by a line l1 of the waveform shown in FIG. 3. When the trigger signal from M/M51 is rendered active, the trigger signal is differentiated by a differentiating circuit comprising a capacitor 56, resistor 57 and diode 58 and is applied upon a base electrode of the transistor 55. Then the charge which has been accumulated by the integrating capacitor 54 is discharged through the transistor 55 as shown by a line l2 of waveform in FIG. 3 so that the potential level across the capacitor 54 is returned to a ground level. In such a manner, a saw-tooth-wave signal J which is in synchronization with the oscillation output of VCO 11 is obtained across the integrating capacitor 54 and is outputted via a voltage follower connected operational amplifier 59 to a non-inverting input of the PWM (pulse width modulating) comparator 61. Data which are supplied in a bit-serial manner from an external device (not shown) such as microcomputor connected to a speed control terminal T3 are converted into parallel data by a serial/parallel convertor 65. The parallel output is applied to a D/A convertor 66, the output of which is in turn applied to a non-inverting input of an error amplifier 62 as an analog speed control reference voltage V ref1. Output pulses from a rotary encoder of USM (not shown) connected to a terminal T4 are smoothed by a F/V converting circuit comprising M/M63 and LPF 64 and are then applied to a non-inverting input of the error amplifier 62 as a d.c. voltage. The error amplifier 62 provides a pulse width modulating signal M to a non-inverting input of a PWM comparator 61 which compares the level of the pulse width modulating signal M with that of the saw-tooth-wave signal J to output a signal S having a pulse width variable in accordance with the change in output from the rotary encoder of USM81 at an output of PWM comparator 61. The signal having a variable pulse width S is applied to one input of each of the four two-input type AND gates 31, 32, 33 and 34 which form a driving pulse width changing circuit. These two-input AND gates 31, 32, 33 and 34 determine a logical product between a pulse S and each of the four phase signals φ0, φ1, φ2 and φ3 applied to another input of the gates 31, 32, 33 and 34 from the distributor 24 to provide four phase signals N, P, Q and R, the pulse width of which has been changed, to output transistors 41, 42, 44 and 45 respectively to control the driving time thereof. Accordingly, the collector current of each output transistor 41, 42, 44 and 45 is switched, resulting in that the electric power introduced to USM81 is changed.
In such a manner, power control of a USM with a PWM makes it possible to provide driving circuitry in which a desired motor speed can be obtained by the entry of speed control data. It is possible to provide a constant rotational motor speed by feeding back an encoder output representative of the rotational motor speed.
Having described a method of setting data for speed control in the afore-mentioned embodiment, it is apparent that the rotational speed of a motor can be changed by changing a voltage applied to a non-inverting input of the PWM comparator 61.

Claims (19)

What is claimed is:
1. Circuitry for driving an ultrasonic motor in which a movable member which is in a frictional contact relationship with the surface of an elastic member is forcedly moved by applying an alternating voltage to a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member, comprising;
a voltage controlled oscillator for generating rectangular waves having a frequency 4n times (where n is an integer) greater than that of said applied alternating voltage;
a distributor for separating said rectangular waves into four phase pulse wave (φ0, φ1, φ2 and φ3 wherein φ0 and φ1 ; φ2 and φ3 are 180° out-of-phase with each other, φ0 and φ2, φ1 and φ3 being 90° out-of-phase with each other);
a saw-tooth-wave generator for generating saw-tooth-wave signals which are in synchronization with said rectangular waves;
a pulse width modulating comparator for comparing the level of said saw-tooth-wave signals with that of a reference voltage;
a reference voltage adjusting means for changing said reference voltage in response to an external operation;
a driving pulse width changing circuit for changing the width of said four phase pulses in response to the output from said pulse width modulating comparator;
an output circuit which combines 180° out-of-phase pulses φ0 with φ1 ; φ2 with φ3, the pulse width of which have been changed by said driving pulse width changing circuit and amplifies the combined pulses to apply them to said piezoelectric element as two 90° out-of-phase alternating voltages;
a feed-back piezoelectric element secured to said elastic member for generating a feed back signal developed due to the piezoelectric effect on driving of the ultrasonic motor; and
a driving frequency automatic tracking circuit responsive to said feed back signal for outputting to said voltage controlled oscillator a voltage signal representative of a difference between an optimum driving frequency and a current driving frequency.
2. Circuitry as defined in claim 1 in which said pulse width modulating comparator has an inverting input to which an output from said saw-tooth-wave generator is applied, a non-inverting input to which a pulse-width modulating signal is applied as a reference voltage and an output for outputting a pulse-width adjustable signal to said driving pulse width changing circuit.
3. Circuitry as defined in claim 2 in which said pulse width modulating signal is outputted from an error amplifier having an inverting input to which a d.c. voltage depending upon the output from a rotary encoder of said ultrasonic motor is applied, and a non-inverting input to which a speed controlling reference voltage depending upon external speed controlling data is applied.
4. Circuitry as defined in claim 3 in which said means for generating said pulse width modulating signal comprises a circuit for frequency-to-voltage converting the pulses from the rotary encoder of the ultrasonic motor, said frequency-to-voltage converting circuit having a monostable multivibrator, a low pass filter which smoothes the output from said multivibrator for outputting the smoothed signals to the inverting output of the error amplifier, a serial/parallel convertor for serial/parallel converting the speed controlling data supplied in a bit serial manner from an external device and a D/A convertor which digital-to-analog converts said parallel output and provides the converted analog output to the non-inverting input of the error amplifier as a controlling reference voltage.
5. A circuitry defined in claim 1 in which a monostable multivibrator which outputs to the saw-tooth-wave generator a trigger signal having a predetermined pulse width in synchronization with the VCO output is provided between the output of the voltage controlled oscillator and the saw-tooth-wave generator.
6. Circuitry as defined in claim 1 in which said saw-tooth-wave generator comprises a differential circuit to which is applied a trigger signal which is in synchronization with the output from the voltage controlled oscillator, an integrating circuit in which charging is carried out with a constant current from a constant current source, a switching element which controls the charging and discharging of said integrating circuit and an operational amplifier which provides an output from said integration circuit to an inverting output of the pulse width modulating comparator.
7. Circuitry for driving an ultrasonic motor in which a movable member which is in a frictional contact relationship with the surface of an elastic member is forcedly moved by applying an alternating voltage to a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member, comprising;
a pulse generator for generating rectangular pulses having a given width and a frequency which is 4n times (where n is an integer) greater than that of said alternating voltage to be applied to the ultrasonic motor;
means for setting the rotational speed of the ultrasonic motor; and
means for changing the width of the rectangular pulses in response to said setting means.
8. Circuitry for driving an ultrasonic motor comprising;
a voltage controlled oscillator for generating rectangular waves having a frequency 4n times (where n is an integer) greater than the alternating voltage to be applied to the ultrasonic motor;
a distributor for separating said rectangular waves into four phase pulse waves (φ0, φ1, φ2 and φ3) which occur at 90° phase intervals;
a saw-tooth-wave generator responsive to said oscillator for generating saw-tooth-wave signals which are synchronized with said rectangular waves;
a pulse width modulating comparator for comparing the level of said saw-tooth-wave signals with that of a reference voltage;
reference voltage adjusting means for changing said reference voltage;
a driving pulse width changing circuit for selectively changing the width of said four phase pulses in response to the output from said pulse width modulating comparator;
an output circuit which combines 180° out-of-phase pulses φ0 with φ1 ; φ2 with φ3, the pulse widths of which have been changed by said driving pulse width changing circuit, and amplifies the combined pulses to apply them to said motor as two 90° out-of-phase alternating signals;
feed-back means for generating a feed back signal responsive to the driving of said motor; and
a driving frequency automatic tracking circuit responsive to said feed back signal for outputting to said voltage controlled oscillator a voltage signal representative of a difference between an optimum driving frequency and a current driving frequency.
9. A method for driving an ultrasonic motor in which a movable member is moved by applying an alternating voltage signals to inputs of a piezoelectric element secured to the elastic member to generate travelling vibration waves upon the surface of the elastic member, said method comprising the steps of:
generating a train of rectangular pulses occurring at a frequency 4 times greater than that of the aforesaid applied alternating voltage;
separating said pulse train into four pulse waves whose pulses occur at 90° phase intervals;
generating a saw-tooth-wave signal synchronized with said rectangular pulses;
generating pulses from said saw-tooth-wave signal whose pulse widths vary in accordance with an adjustable reference voltage;
altering the pulse widths of the pulses in each of said four pulse waves according to the pulse widths of said varying pulse width pulses;
combining the pulses of two of said separated pulse waves to form a first alternating voltage signal;
combining the two remaining pulses of said separated pulse waves for forming a second alternating signal;
applying said first and second alternating signals to respective inputs of said motor;
generating a feed-back signal responsive to the piezoelectric effect on the driving of the ultrasonic motor; and
adjusting the oscillator output according to the difference between the current driving frequency and an optimum driving frequency.
10. The method of claim 9 wherein said optimum driving frequency is obtained by dividing the oscillator frequency signal by four and comparing it with the current driving frequency.
11. A method for driving an ultrasonic motor in which a movable member which is in a frictional contact relationship with the surface of an elastic member is moved by applying alternating voltages to inputs of a piezoelectric element secured to said elastic member to generate travelling vibration waves upon the surface of the elastic member, said method comprising the steps of:
generating rectangular pulses having a given width and frequency, which frequency is 4n times greater than said alternating voltage, where n is a real integer;
utilizing at least certain of said pulses for developing an alternating voltage;
selecting the rotational speed of the ultrasonic motor; and
changing the width of at least said certain pulses responsive to the rotational setting speed.
12. A circuit for generating an alternating voltage signal for operating an ultrasonic motor, comprising:
a voltage controlled oscillator for generating a pulse train having a frequency which is 4n times greater than the frequency of said alternating voltage signal, where n is a real integer;
means for separating said pulses of said pulse train into four separate pulse trains comprising pulses which are spaced at 90° intervals;
means responsive to said voltage controlled oscillator and a settable reference signal for generating pulses of varying pulse width according to said settable signal;
means for regulating the pulse width of the pulses in said separated pulse trains responsive to said variable pulse width signals;
means for combining two of said separated pulse trains for generating a first alternating voltage;
means for combining the two remaining separated pulse trains for producing a second alternating voltage;
said motor having first and second inputs for receiving said first and second alternating voltage signals.
13. The circuitry of claim 12 further including a feedback circuit applied to said motor for developing a feedback signal representative of the operating speed of said motor;
means for comparing said feedback signal with a signal derived from said voltage controlled oscillator for adjusting the output frequency of said voltage controlled oscillator according to the difference between said feedback signal and said derived signal.
14. The circuitry according to claim 13 wherein said means for deriving a signal from said voltage controlled oscillator comprises means for dividing the output of said voltage controlled oscillator signal by four.
15. The circuitry according to claim 12 further comprising means for generating an analog signal responsive to the output from the motor;
said analog signal comprising said setting signal.
16. The circuitry according to claim 15 further comprising means for developing a speed control signal from a control source;
means for combining said setting signal and said speed control signal.
17. The circuitry according to claim 16 wherein the control source is the output of a motor.
18. Circuitry for driving an ultrasonic motor with an alternating signal, comprising:
an ultrasonic motor having input means and output means;
a pulse generator for generating rectangular pulses having a given width and a frequency which is 4n times greater than the alternating signal applied to the ultrasonic motor (where n is an integer);
means for combining selected ones of said pulses;
means for applying said combined pulses to said input means;
means for setting the rotational speed of said motor; and
means for changing the width of said rectangular pulses responsive to said setting means.
19. The circuitry of claim 18 further comprising:
means for adjusting the output frequency of said pulse generator responsive to the signal developed at the output means of said motor.
US07/321,993 1988-03-14 1989-03-10 Circuitry for driving ultrasonic motor Expired - Lifetime US4952834A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63059583A JPH01234073A (en) 1988-03-14 1988-03-14 Drive circuit for vibration wave motor
JP63-059583 1988-03-14

Publications (1)

Publication Number Publication Date
US4952834A true US4952834A (en) 1990-08-28

Family

ID=13117394

Family Applications (1)

Application Number Title Priority Date Filing Date
US07/321,993 Expired - Lifetime US4952834A (en) 1988-03-14 1989-03-10 Circuitry for driving ultrasonic motor

Country Status (2)

Country Link
US (1) US4952834A (en)
JP (1) JPH01234073A (en)

Cited By (57)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5010469A (en) * 1990-05-09 1991-04-23 Albar Uninterruptible power supply with dual level voltage input
US5032753A (en) * 1989-02-28 1991-07-16 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer and an ultrasonic motor using the piezoelectric transducer
DE4107802A1 (en) * 1990-12-26 1992-07-02 Kubota Kk DRIVE CONTROL UNIT FOR AN ULTRASONIC MOTOR
US5140231A (en) * 1987-10-20 1992-08-18 Canon Kabushiki Kaisha Drive circuit for vibratory-wave motor
US5146143A (en) * 1988-07-26 1992-09-08 Canon Kabushiki Kaisha Vibration wave driven motor
US5229678A (en) * 1989-10-20 1993-07-20 Seiko Epson Corporation Drive control unit for an ultrasonic step motor
US5247220A (en) * 1989-10-20 1993-09-21 Seiko Epson Corporation Ultrasonic motor
US5258694A (en) * 1989-12-15 1993-11-02 Alps Electric Co., Ltd. Control device for ultrasonic motor
US5336958A (en) * 1990-12-19 1994-08-09 Nikon Corporation Ultrasonic motor unit
US5355047A (en) * 1992-01-16 1994-10-11 Olympus Optical Co., Ltd. Circuit for driving an oscillatory-wave motor
US5376855A (en) * 1990-02-14 1994-12-27 Nikon Corporation Driving device for ultrasonic wave motor
US5436521A (en) * 1992-06-12 1995-07-25 Canon Kabushiki Kaisha Vibration type actuator apparatus
US5457362A (en) * 1991-10-22 1995-10-10 Robert Bosch Gmbh Process and device for controlling the frequency of a traveling wave motor
US5459370A (en) * 1992-04-24 1995-10-17 Canon Kabushiki Kaisha Vibration type motor device
US5477100A (en) * 1990-03-01 1995-12-19 Canon Kabushiki Kaisha Vibration type motor system
US5479380A (en) * 1989-10-20 1995-12-26 Seiko Epson Corporation Ultrasonic motor for driving an analog electronic watch
US5523818A (en) * 1991-06-05 1996-06-04 Olympus Optical Co., Ltd. Camera system
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
US5625263A (en) * 1989-06-15 1997-04-29 Nikon Corporation Driving device for ultrasonic wave motor
EP0823680A2 (en) * 1996-08-07 1998-02-11 Ykk Corporation Method and apparatus for controlling piezoelectric vibration
US5731652A (en) * 1995-03-08 1998-03-24 Nec Corporation Power source unit employing piezoelectric transformer frequency-controlled and voltage-controlled to operate at a maximum efficiency
US5744897A (en) * 1988-10-19 1998-04-28 Nikon Corporation Driving control device for vibration wave motor
US5763980A (en) * 1996-12-17 1998-06-09 Li; Tsan Kuang Bicycle driving motor structure
US5886483A (en) * 1994-06-08 1999-03-23 Moulinex S.A. Circuit for supplying a piezo-electric motor
US5917267A (en) * 1996-01-04 1999-06-29 Minolta Co., Ltd. Linear drive mechanism using electromechanical conversion element
US5917266A (en) * 1996-10-11 1999-06-29 Aisan Kogyo Kabushiki Kaisha Control apparatus for intermittently driving actuator, powder feeder and servo system utilizing thereof
US5939851A (en) * 1996-12-27 1999-08-17 Canon Kabushiki Kaisha Position control device
US6031316A (en) * 1990-10-25 2000-02-29 Canon Kabushiki Kaisha Vibration actuator apparatus
US6084363A (en) * 1997-01-17 2000-07-04 Minolta Co., Ltd. Drive pulse generating apparatus for drive device using electromechanical transducer
US6121714A (en) * 1996-11-13 2000-09-19 Canon Kabushiki Kaisha Vibration type motor device
US6171063B1 (en) * 1997-07-31 2001-01-09 Sawafuji Electric Co., Ltd. Control circuit for vibrating compressors for protecting against excessive voltage and temperature
US6175180B1 (en) 1998-03-27 2001-01-16 Optikon 2000 S.P.A. Method for optimizing the drive of a piezoelectric actuator, in particular for phacoemulsifier devices, by dynamic detection of its eletromechanical characteristics and devices based thereupon
US6215224B1 (en) * 1997-12-12 2001-04-10 Canon Kabushiki Kaisha Control device for vibration type actuator
US6222301B1 (en) * 1997-11-17 2001-04-24 Canon Kabushiki Kaisha Motor control apparatus and image forming apparatus
US20030049023A1 (en) * 2001-01-30 2003-03-13 Gebr. Maerklin & Cie. Gmbh Method and apparatus for controlling the speed of rotation of a direct current motor for model vehicles
US20060195077A1 (en) * 2002-10-21 2006-08-31 Advanced Medical Optics Inc. System and method for pulsed ultrasonic power delivery employing cavitational effects
US20060200068A1 (en) * 2002-10-21 2006-09-07 Advanced Medical Optics, Inc. Novel enhanced microburst ultrasonic power delivery system and method
US20070073309A1 (en) * 1997-01-22 2007-03-29 Advanced Medical Optics, Inc. Control of pulse duty cycle based upon footswitch displacement
US20080074767A1 (en) * 2006-09-26 2008-03-27 Industrial Technology Research Institute Piezoelectric-Driving Optical Lens
US20080085110A1 (en) * 2006-10-04 2008-04-10 Industrial Technology Research Institute Auto-Focus Optical Lens Module
US20080088946A1 (en) * 2006-10-14 2008-04-17 Industrial Technology Research Institute Piezoelectrically driven optical lens
US20080231330A1 (en) * 2007-03-20 2008-09-25 Masayoshi Takahashi Ramp generator and circuit pattern inspection apparatus using the same ramp generator
US20100114009A1 (en) * 2006-08-01 2010-05-06 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US7857783B2 (en) 1997-01-22 2010-12-28 Abbott Medical Optics Inc. Micro-burst ultrasonic power delivery
US8020565B2 (en) 2002-10-21 2011-09-20 Abbott Medical Optics, Inc. Modulated pulsed ultrasonic power delivery system and method
US8575779B2 (en) 2010-02-18 2013-11-05 Alpha Technologies Inc. Ferroresonant transformer for use in uninterruptible power supplies
US9030045B2 (en) 2011-01-23 2015-05-12 Alpha Technologies Inc. Switching systems and methods for use in uninterruptible power supplies
US9050627B2 (en) 2011-09-02 2015-06-09 Abbott Medical Optics Inc. Systems and methods for ultrasonic power measurement and control of phacoemulsification systems
US20150270790A1 (en) * 2014-03-24 2015-09-24 Vital Biomedical Technologies Inc. Ultrasonic motor control system and method
US9234916B2 (en) 2012-05-11 2016-01-12 Alpha Technologies Inc. Status monitoring cables for generators
CN105450084A (en) * 2015-12-29 2016-03-30 哈尔滨工业大学 Tracking control system and control method for optimal frequency of ultrasonic motor on premise of maintaining minimum input power
US10074981B2 (en) 2015-09-13 2018-09-11 Alpha Technologies Inc. Power control systems and methods
US10381867B1 (en) 2015-10-16 2019-08-13 Alpha Technologeis Services, Inc. Ferroresonant transformer systems and methods with selectable input and output voltages for use in uninterruptible power supplies
US10635122B2 (en) 2017-07-14 2020-04-28 Alpha Technologies Services, Inc. Voltage regulated AC power supply systems and methods
EP3836390A1 (en) * 2019-12-13 2021-06-16 Miniswys Sa Method for operating a drive unit and drive unit
CN113890411A (en) * 2021-09-28 2022-01-04 哈尔滨工业大学 Multi-mode combined control method and system of standing wave linear ultrasonic motor based on Koopman state observer
US11877953B2 (en) 2019-12-26 2024-01-23 Johnson & Johnson Surgical Vision, Inc. Phacoemulsification apparatus

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02119586A (en) * 1988-10-27 1990-05-07 Seiko Instr Inc Ultrasonic motor unit

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4277710A (en) * 1979-04-30 1981-07-07 Dukane Corporation Control circuit for piezoelectric ultrasonic generators
JPS6273793A (en) * 1985-09-27 1987-04-04 山水電気株式会社 Printed circuit board
JPS6286685A (en) * 1985-10-11 1987-04-21 株式会社日立製作所 Cable connector insertion device
US4794294A (en) * 1986-06-12 1988-12-27 Canon Kabushiki Kaisha Vibration wave motor
US4833358A (en) * 1985-10-09 1989-05-23 Canon Kabushiki Kaisha Vibration wave motor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4277710A (en) * 1979-04-30 1981-07-07 Dukane Corporation Control circuit for piezoelectric ultrasonic generators
JPS6273793A (en) * 1985-09-27 1987-04-04 山水電気株式会社 Printed circuit board
US4833358A (en) * 1985-10-09 1989-05-23 Canon Kabushiki Kaisha Vibration wave motor
JPS6286685A (en) * 1985-10-11 1987-04-21 株式会社日立製作所 Cable connector insertion device
US4794294A (en) * 1986-06-12 1988-12-27 Canon Kabushiki Kaisha Vibration wave motor

Cited By (97)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5140231A (en) * 1987-10-20 1992-08-18 Canon Kabushiki Kaisha Drive circuit for vibratory-wave motor
US5146143A (en) * 1988-07-26 1992-09-08 Canon Kabushiki Kaisha Vibration wave driven motor
US5744897A (en) * 1988-10-19 1998-04-28 Nikon Corporation Driving control device for vibration wave motor
US5032753A (en) * 1989-02-28 1991-07-16 Brother Kogyo Kabushiki Kaisha Piezoelectric transducer and an ultrasonic motor using the piezoelectric transducer
US5625263A (en) * 1989-06-15 1997-04-29 Nikon Corporation Driving device for ultrasonic wave motor
US5521455A (en) * 1989-10-20 1996-05-28 Seiko Epson Corporation Ultrasonic motor
US5479380A (en) * 1989-10-20 1995-12-26 Seiko Epson Corporation Ultrasonic motor for driving an analog electronic watch
US5229678A (en) * 1989-10-20 1993-07-20 Seiko Epson Corporation Drive control unit for an ultrasonic step motor
US5247220A (en) * 1989-10-20 1993-09-21 Seiko Epson Corporation Ultrasonic motor
US5258694A (en) * 1989-12-15 1993-11-02 Alps Electric Co., Ltd. Control device for ultrasonic motor
US5376855A (en) * 1990-02-14 1994-12-27 Nikon Corporation Driving device for ultrasonic wave motor
US5477100A (en) * 1990-03-01 1995-12-19 Canon Kabushiki Kaisha Vibration type motor system
US5010469A (en) * 1990-05-09 1991-04-23 Albar Uninterruptible power supply with dual level voltage input
US6031316A (en) * 1990-10-25 2000-02-29 Canon Kabushiki Kaisha Vibration actuator apparatus
US5336958A (en) * 1990-12-19 1994-08-09 Nikon Corporation Ultrasonic motor unit
US5130619A (en) * 1990-12-26 1992-07-14 Kubota Corporation Drive control apparatus for an ultrasonic motor
DE4107802A1 (en) * 1990-12-26 1992-07-02 Kubota Kk DRIVE CONTROL UNIT FOR AN ULTRASONIC MOTOR
US5523818A (en) * 1991-06-05 1996-06-04 Olympus Optical Co., Ltd. Camera system
US5457362A (en) * 1991-10-22 1995-10-10 Robert Bosch Gmbh Process and device for controlling the frequency of a traveling wave motor
US5355047A (en) * 1992-01-16 1994-10-11 Olympus Optical Co., Ltd. Circuit for driving an oscillatory-wave motor
US5459370A (en) * 1992-04-24 1995-10-17 Canon Kabushiki Kaisha Vibration type motor device
US5436521A (en) * 1992-06-12 1995-07-25 Canon Kabushiki Kaisha Vibration type actuator apparatus
US5563464A (en) * 1993-02-09 1996-10-08 Olympus Optical Co., Ltd. Circuit for rotating ultrasonic motor
US5886483A (en) * 1994-06-08 1999-03-23 Moulinex S.A. Circuit for supplying a piezo-electric motor
US5731652A (en) * 1995-03-08 1998-03-24 Nec Corporation Power source unit employing piezoelectric transformer frequency-controlled and voltage-controlled to operate at a maximum efficiency
US5917267A (en) * 1996-01-04 1999-06-29 Minolta Co., Ltd. Linear drive mechanism using electromechanical conversion element
EP0823680A2 (en) * 1996-08-07 1998-02-11 Ykk Corporation Method and apparatus for controlling piezoelectric vibration
EP0823680A3 (en) * 1996-08-07 1998-04-22 Ykk Corporation Method and apparatus for controlling piezoelectric vibration
US5910698A (en) * 1996-08-07 1999-06-08 Ykk Corporation Method and apparatus for controlling piezoelectric vibration
US5917266A (en) * 1996-10-11 1999-06-29 Aisan Kogyo Kabushiki Kaisha Control apparatus for intermittently driving actuator, powder feeder and servo system utilizing thereof
US6121714A (en) * 1996-11-13 2000-09-19 Canon Kabushiki Kaisha Vibration type motor device
US5763980A (en) * 1996-12-17 1998-06-09 Li; Tsan Kuang Bicycle driving motor structure
US5939851A (en) * 1996-12-27 1999-08-17 Canon Kabushiki Kaisha Position control device
US6084363A (en) * 1997-01-17 2000-07-04 Minolta Co., Ltd. Drive pulse generating apparatus for drive device using electromechanical transducer
US8876747B2 (en) 1997-01-22 2014-11-04 Abbott Medical Optics Inc. Micro-burst ultrasonic power delivery
US8197436B2 (en) 1997-01-22 2012-06-12 Abbott Medical Optics Inc. Micro-burst ultrasonic power delivery
US8195286B2 (en) * 1997-01-22 2012-06-05 Abbott Medical Optics Inc. Control of pulse duty cycle based upon footswitch displacement
US20110160646A1 (en) * 1997-01-22 2011-06-30 Abbott Medical Optics Inc. Micro-burst ultrasonic power delivery
US7857783B2 (en) 1997-01-22 2010-12-28 Abbott Medical Optics Inc. Micro-burst ultrasonic power delivery
US20070073309A1 (en) * 1997-01-22 2007-03-29 Advanced Medical Optics, Inc. Control of pulse duty cycle based upon footswitch displacement
US9788998B2 (en) 1997-01-22 2017-10-17 Abbott Medical Optics Inc. Control of pulse duty cycle based upon footswitch displacement
US6171063B1 (en) * 1997-07-31 2001-01-09 Sawafuji Electric Co., Ltd. Control circuit for vibrating compressors for protecting against excessive voltage and temperature
US6222301B1 (en) * 1997-11-17 2001-04-24 Canon Kabushiki Kaisha Motor control apparatus and image forming apparatus
US6215224B1 (en) * 1997-12-12 2001-04-10 Canon Kabushiki Kaisha Control device for vibration type actuator
US6175180B1 (en) 1998-03-27 2001-01-16 Optikon 2000 S.P.A. Method for optimizing the drive of a piezoelectric actuator, in particular for phacoemulsifier devices, by dynamic detection of its eletromechanical characteristics and devices based thereupon
US6654548B2 (en) * 2001-01-30 2003-11-25 Gebr. Maerklin & Cie. Gmbh Method and apparatus for controlling the speed of rotation of a direct current motor for model vehicles
US20030049023A1 (en) * 2001-01-30 2003-03-13 Gebr. Maerklin & Cie. Gmbh Method and apparatus for controlling the speed of rotation of a direct current motor for model vehicles
US20110077583A1 (en) * 2002-10-21 2011-03-31 Abbott Medical Optics Inc. System and method for pulsed ultrasonic power delivery employing cavitational effects
US10245179B2 (en) 2002-10-21 2019-04-02 Johnson & Johnson Surgical Vision, Inc. System and method for pulsed ultrasonic power delivery employing cavitation effects
US8887735B2 (en) 2002-10-21 2014-11-18 Abbott Medical Optics Inc. Modulated pulsed ultrasonic power delivery system and method
US8945162B2 (en) 2002-10-21 2015-02-03 Abbott Medical Optics Inc. System and method for pulsed ultrasonic power delivery employing cavitational effects
US8852138B2 (en) 2002-10-21 2014-10-07 Abbott Medical Optics Inc. Modulated pulsed ultrasound power delivery system and method
US8231564B2 (en) 2002-10-21 2012-07-31 Abbott Medical Optics Inc. Modulated pulsed ultrasonic power delivery system and method
US9642745B2 (en) 2002-10-21 2017-05-09 Abbott Medical Optics Inc. Modulated pulsed ultrasonic power delivery system and method
US7842005B2 (en) 2002-10-21 2010-11-30 Abbott Medical Optics, Inc. System and method for pulsed ultrasonic power delivery employing cavitational effects
US20060195077A1 (en) * 2002-10-21 2006-08-31 Advanced Medical Optics Inc. System and method for pulsed ultrasonic power delivery employing cavitational effects
US20060200068A1 (en) * 2002-10-21 2006-09-07 Advanced Medical Optics, Inc. Novel enhanced microburst ultrasonic power delivery system and method
US7938120B2 (en) 2002-10-21 2011-05-10 Abbott Medical Optics, Inc. Enhanced microburst ultrasonic power delivery system and method
US9707127B2 (en) 2002-10-21 2017-07-18 Abbott Medical Optics Inc. Modulated pulsed ultrasonic power delivery system and method
US10765557B2 (en) 2002-10-21 2020-09-08 Johnson & Johnson Surgical Vision, Inc. Modulated pulsed ultrasonic power delivery system and method
US8020565B2 (en) 2002-10-21 2011-09-20 Abbott Medical Optics, Inc. Modulated pulsed ultrasonic power delivery system and method
US8034067B2 (en) 2006-08-01 2011-10-11 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US7998156B2 (en) 2006-08-01 2011-08-16 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US8202287B2 (en) 2006-08-01 2012-06-19 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US20100114010A1 (en) * 2006-08-01 2010-05-06 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US8366728B2 (en) 2006-08-01 2013-02-05 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US9226849B2 (en) 2006-08-01 2016-01-05 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US20100114009A1 (en) * 2006-08-01 2010-05-06 Abbott Medical Optics Inc. Vacuum sense control for phaco pulse shaping
US20080074767A1 (en) * 2006-09-26 2008-03-27 Industrial Technology Research Institute Piezoelectric-Driving Optical Lens
US20100073787A1 (en) * 2006-09-26 2010-03-25 Industrial Technology Research Institute Piezoelectric-driving optical lens
US7643232B2 (en) 2006-09-26 2010-01-05 Industrial Technology Research Institute Piezoelectric-driving optical lens
US7587135B2 (en) 2006-10-04 2009-09-08 Industrial Technology Research Institute Auto-focus optical lens module
US20080085110A1 (en) * 2006-10-04 2008-04-10 Industrial Technology Research Institute Auto-Focus Optical Lens Module
US20080088946A1 (en) * 2006-10-14 2008-04-17 Industrial Technology Research Institute Piezoelectrically driven optical lens
US7511904B2 (en) 2006-10-14 2009-03-31 Industrial Technology Research Institute Piezoelectrically driven optical lens
US7816955B2 (en) * 2007-03-20 2010-10-19 Hitachi, Ltd. Ramp generator and circuit pattern inspection apparatus using the same ramp generator
US20080231330A1 (en) * 2007-03-20 2008-09-25 Masayoshi Takahashi Ramp generator and circuit pattern inspection apparatus using the same ramp generator
US8575779B2 (en) 2010-02-18 2013-11-05 Alpha Technologies Inc. Ferroresonant transformer for use in uninterruptible power supplies
US9633781B2 (en) 2010-02-18 2017-04-25 Alpha Technologies Inc. Ferroresonant transformer for use in uninterruptible power supplies
US10819144B2 (en) 2010-02-18 2020-10-27 Alpha Technologies Services, Inc. Ferroresonant transformer for use in uninterruptible power supplies
US9812900B2 (en) 2011-01-23 2017-11-07 Alpha Technologies Inc. Switching systems and methods for use in uninterruptible power supplies
US9030045B2 (en) 2011-01-23 2015-05-12 Alpha Technologies Inc. Switching systems and methods for use in uninterruptible power supplies
US10355521B2 (en) 2011-01-23 2019-07-16 Alpha Technologies Services, Inc. Switching systems and methods for use in uninterruptible power supplies
US9050627B2 (en) 2011-09-02 2015-06-09 Abbott Medical Optics Inc. Systems and methods for ultrasonic power measurement and control of phacoemulsification systems
US9234916B2 (en) 2012-05-11 2016-01-12 Alpha Technologies Inc. Status monitoring cables for generators
US9513620B2 (en) * 2014-03-24 2016-12-06 Vital Biomedical Technologies Inc. Ultrasonic motor control system and method
US20150270790A1 (en) * 2014-03-24 2015-09-24 Vital Biomedical Technologies Inc. Ultrasonic motor control system and method
US10074981B2 (en) 2015-09-13 2018-09-11 Alpha Technologies Inc. Power control systems and methods
US10790665B2 (en) 2015-09-13 2020-09-29 Alpha Technologies Services, Inc. Power control systems and methods
US10381867B1 (en) 2015-10-16 2019-08-13 Alpha Technologeis Services, Inc. Ferroresonant transformer systems and methods with selectable input and output voltages for use in uninterruptible power supplies
CN105450084A (en) * 2015-12-29 2016-03-30 哈尔滨工业大学 Tracking control system and control method for optimal frequency of ultrasonic motor on premise of maintaining minimum input power
US10635122B2 (en) 2017-07-14 2020-04-28 Alpha Technologies Services, Inc. Voltage regulated AC power supply systems and methods
EP3836390A1 (en) * 2019-12-13 2021-06-16 Miniswys Sa Method for operating a drive unit and drive unit
WO2021116263A1 (en) 2019-12-13 2021-06-17 Miniswys Sa Method for operating a drive unit and drive unit
US11877953B2 (en) 2019-12-26 2024-01-23 Johnson & Johnson Surgical Vision, Inc. Phacoemulsification apparatus
CN113890411A (en) * 2021-09-28 2022-01-04 哈尔滨工业大学 Multi-mode combined control method and system of standing wave linear ultrasonic motor based on Koopman state observer
CN113890411B (en) * 2021-09-28 2022-06-14 哈尔滨工业大学 Multi-mode combined control method and system of standing wave linear ultrasonic motor based on Koopman state observer

Also Published As

Publication number Publication date
JPH01234073A (en) 1989-09-19

Similar Documents

Publication Publication Date Title
US4952834A (en) Circuitry for driving ultrasonic motor
EP0602635B1 (en) A method and an apparatus for controlling a moving velocity of an ultrasonic motor
EP0404023B1 (en) Control apparatus for vibration driven motor
US4833358A (en) Vibration wave motor
JPH03145976A (en) Drive unit for ultrasonic motor
US5130619A (en) Drive control apparatus for an ultrasonic motor
US4794294A (en) Vibration wave motor
US4692672A (en) Vibration wave motor
US4625156A (en) Control device
US4804900A (en) Control apparatus for synchronous motors
JPH06237584A (en) Speed control method and speed controller for ultrasonic motor
US5159223A (en) Driving apparatus for ultrasonic motor
KR0151596B1 (en) Control circuit
US5625263A (en) Driving device for ultrasonic wave motor
EP0366496A3 (en) Ultra-sonic motor driving circuit
US4605901A (en) Frequency-voltage converter
JP3164239B2 (en) Drive circuit for vibration wave motor
US5459369A (en) Control apparatus for travelling wave driven motor
JP2683237B2 (en) Ultrasonic motor drive circuit
JP2669023B2 (en) Ultrasonic motor drive circuit
US6005328A (en) Driving device and method for ultrasonic wave motor
JPH04222476A (en) Driving and controlling device for ultrasonic motor
JP2597390B2 (en) Vibration wave motor drive circuit
JP2877314B2 (en) Motor speed control device
SU1203586A1 (en) Device for controlling position of video head with respect to record line

Legal Events

Date Code Title Description
AS Assignment

Owner name: OLYMPUS OPTICAL CO., LTD., A CORP. OF JAPAN, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:OKADA, JUNJI;REEL/FRAME:005031/0504

Effective date: 19890222

STCF Information on status: patent grant

Free format text: PATENTED CASE

CC Certificate of correction
FEPP Fee payment procedure

Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12