US5909280A - Method of monolithically fabricating a microspectrometer with integrated detector - Google Patents
Method of monolithically fabricating a microspectrometer with integrated detector Download PDFInfo
- Publication number
- US5909280A US5909280A US08/197,112 US19711294A US5909280A US 5909280 A US5909280 A US 5909280A US 19711294 A US19711294 A US 19711294A US 5909280 A US5909280 A US 5909280A
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Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/10—Arrangements of light sources specially adapted for spectrometry or colorimetry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
Abstract
Description
______________________________________ Layer Index Absorption Thickness ______________________________________ Silicon 3.85 0.02 Substrate Silicon Dioxide 1.45 0.0 1/4 wave Silicon 3.85 0.02 1/4 wave Air 1.0 0.0 1/2 wave Silicon 3.85 0.02 1/4 wave Silicon Dioxide 1.45 0.0 1/4 wave Silicon 3.85 0.02 1/4 wave ______________________________________
m=2*19.3 gm/cm3*10 μm*(10 μm).sup.2 *10.sup.-12 cm3/μm3,=3.86×10.sup.-8 gm.
ω=(4k/m).sup.1/2 ˜8.91×10.sup.5 radians/second,
f=ω/2π˜142 KHz.
V=(2kx/ε.sub.0 A).sup.1/2 *(d-x),
F=1/2εAV.sup.2 /d.sup.2 =1/2εAV.sup.2.sub.AC /d.sup.2 *sin.sup.2 ωt
V.sub.3 =30d+1.35 Kvolts
Claims (19)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/197,112 US5909280A (en) | 1992-01-22 | 1994-02-16 | Method of monolithically fabricating a microspectrometer with integrated detector |
US09/626,678 US6381022B1 (en) | 1992-01-22 | 2000-07-27 | Light modulating device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US82483492A | 1992-01-22 | 1992-01-22 | |
US08/197,112 US5909280A (en) | 1992-01-22 | 1994-02-16 | Method of monolithically fabricating a microspectrometer with integrated detector |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US82483492A Continuation-In-Part | 1992-01-22 | 1992-01-22 | |
US07356352 Continuation-In-Part | 1992-01-22 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US1290298A Continuation-In-Part | 1992-01-22 | 1998-01-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
US5909280A true US5909280A (en) | 1999-06-01 |
Family
ID=33491090
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/197,112 Expired - Fee Related US5909280A (en) | 1992-01-22 | 1994-02-16 | Method of monolithically fabricating a microspectrometer with integrated detector |
Country Status (1)
Country | Link |
---|---|
US (1) | US5909280A (en) |
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US11696388B2 (en) * | 2019-05-07 | 2023-07-04 | Transient Plasma Systems, Inc. | Pulsed non-thermal atmospheric pressure plasma processing system |
GB2596537A (en) * | 2020-06-29 | 2022-01-05 | Ams Sensors Singapore Pte Ltd | Integrated detector on Fabry-Perot interfer-ometer system |
WO2022002798A1 (en) * | 2020-06-30 | 2022-01-06 | Ams International Ag | Spectral sensor |
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