US5938811A - Method for altering the temperature dependence of optical waveguides devices - Google Patents
Method for altering the temperature dependence of optical waveguides devices Download PDFInfo
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- US5938811A US5938811A US08/862,557 US86255797A US5938811A US 5938811 A US5938811 A US 5938811A US 86255797 A US86255797 A US 86255797A US 5938811 A US5938811 A US 5938811A
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
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- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
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- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
- G02B6/12028—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence based on a combination of materials having a different refractive index temperature dependence, i.e. the materials are used for transmitting light
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- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
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- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29304—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by diffraction, e.g. grating
- G02B6/29316—Light guides comprising a diffractive element, e.g. grating in or on the light guide such that diffracted light is confined in the light guide
- G02B6/29317—Light guides of the optical fibre type
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- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29398—Temperature insensitivity
Definitions
- This invention relates to methods for making optical waveguide devices and, in particular, to a method for making such devices having enhanced temperature stability.
- broadband optical multiplexers are needed for delivering voice and video signals to the home, for combining pump and communications signals in an optical amplifier, and for adding monitoring signals to optical fibers.
- Dense wavelength-division multiplexing (WDM) systems need multiplexers to combine and separate channels of different wavelengths and need add-drop filters to alter the traffic.
- Low speed optical switches are needed for network reconfiguration.
- optical waveguide devices such as integrated optical silica waveguide circuits formed on planar silicon substrates.
- Such waveguides are typically formed by depositing base, core and cladding layers on a silicon substrate.
- the base layer can be made of undoped silica. It isolates the fundamental optical mode from the silicon substrate and thereby prevents optical loss at the silica substrate interface.
- the core layer is typically silica doped with phosphorus or germanium to increase its refractive index and thereby achieve optical confinement.
- the cladding is typically silica doped with both boron and phosphorus to facilitate fabrication and provide an index matching that of the base.
- the cores can be economically configured into a wide variety of compact configurations capable of performing useful functions. See, for example, Y. P. Li and C. H. Henry, "Silicon Optical Bench Waveguide Technology", Ch. 8, Optical Fiber Telecommunications, Vol. IIIB, p. 319-375 (Academic Press, 1997).
- Optical fibers typically comprise a higher index core, which can be doped silica, and a surrounding cladding of a lower index glass.
- a variety of all-fiber devices are made by providing one or more Bragg gratings in the fiber core. Such gratings are conventionally made by providing the core with a photosensitive dopant such as germanium and side-writing a grating using ultraviolet light.
- optical waveguide devices are based upon optical interference between beams of light propagated down different paths. Depending on the phase relationship between the beams at the point of recombination, light will either be transmitted or reflected back. Spectrally narrow, high contrast resonances can be readily designed, enabling high performance wavelength division multiplexers and blocking filters.
- variable ambient temperature has a perceptible and disadvantageous effect on the performance of such devices.
- the refractive index of the composite glass structure through which the light travels depends on temperature. Thus the spectral positions of critical resonances shift with temperature.
- Bragg gratings are critically dependent on the path lengths between successive index perturbations. But these path lengths change due to the temperature dependence of the refractive index, shifting the operating wavelength of the gratings.
- glass waveguide devices are provided with enhanced temperature stability by incorporating within appropriate lengths of the waveguides a transparent compensating material having a refractive index variation with temperature that differs substantially from that of the waveguide.
- the compensating material can be a non-glass material, such as a liquid, driven into the glass by heat and pressure.
- D 2 O is incorporated into waveguides for optical communications.
- the D 2 O is transparent to the preferred communications wavelengths centered at about 1.55 ⁇ m and has a dn/dT opposite in polarity to the dn/dT of glass.
- the resulting structure exhibits enhanced temperature stability with reduced magnitude of dn/dT.
- the technique is particularly useful in devices based on interference between multiple waveguides, as it is not necessary to reduce dn/dT to zero in the respective waveguides. It suffices to compensate the differences. Such compensation can be achieved by compensating materials having dn/dT of either the same polarity as the dn/dT of the waveguides or the opposite polarity.
- Preferred embodiments include routers, Fourier filters and Bragg filters. In single waveguide devices such as gratings, compensating materials of opposite polarity can substantially enhance the temperature stability.
- FIG. 1 is a flow diagram of the steps in controllably altering the temperature dependence of a glass waveguide device in accordance with the invention.
- FIGS. 2A, 2B and 2C illustrate a waveguide device at various stages of the FIG. 1 process.
- FIGS. 3A and 3B are graphical illustrations comparing the thermal stability of a waveguide processed in accordance with FIG. 1 to that of an unprocessed waveguide.
- FIG. 4 shows a waveguide router device having enhanced thermal stability.
- FIG. 5 illustrates a waveguide Fourier filter having enhanced thermal stability
- FIG. 6 shows a waveguide Bragg filter having enhanced thermal stability.
- FIG. 1 is a block diagram of the steps involved in enhancing the thermal stability of a waveguide device.
- the first step as illustrated in block A, is to provide a glass waveguide device to be improved.
- the waveguide device can be either a planar waveguide device, a fiber waveguide device or a combination of the two.
- Exemplary devices include routers, Fourier filters and Bragg gratings.
- FIG. 2A is a cross sectional view of an exemplary waveguide device (here a planar device) comprising a substrate 10, such as silicon, a base layer 11, such as undoped silica, one or more waveguide defined by one or more cores 12, 13, 14 and a cladding 15.
- the cladding can be doped with boron and phosphorus to achieve both a lowered flow temperature and an index preferably equal to the base layer.
- FIG. 2B is a plan view of the device of FIG. 2A.
- the cores 12, 13, 14 define optical waveguides of different lengths that extend between a common input 15 and a common output 16. Variations in temperature will produce different absolute thermal pathlength changes in the two waveguides.
- the methods for fabricating such waveguides are well known in the art and are described in further detail in C. H. Henry et al. "Glass Waveguides on Silicon for Hybrid Optical Packaging, J. Lightwave Technol., 1539 (1989).
- the next step is to mask the waveguide, leaving exposed those regions where the refractive index variation with temperature (dn/dT) is to be altered. Where dn/dT is to be altered for the full length of the waveguide, masking is not required. But in applications where it is desired to equalize the effect of temperature variation among plural waveguides, different length waveguides will generally require masking to provide exposed regions of different length.
- the masking material should be impermeable to the treatment material. Silicon nitride films having a thickness on the order of 1 ⁇ m is preferred for masking devices to be treated with D 2 O. Such films can be deposited by plasma CVD.
- the third step is to incorporate into the exposed regions of the waveguides a thermal compensating material which is transparent to the operating wavelength and which has a dn/dT different from that of the waveguide material.
- Typical waveguide glasses have a positive dn/dT, so the material incorporated into glass should have a negative dn/dT or a positive dn/dT substantially different from that of glass.
- Suitable negative dn/dT compensating materials include D 2 O, ethanol and methanol. The amount of material should exceed 1 weight percent of the glass and preferably should exceed 10%. D 2 O is preferred for glass communications devices operating at 1.55 ⁇ m.
- D 2 O can be incorporated in glass by exposing the glass to D 2 O steam at elevated temperature (100-300° C.) and pressure (15-1500 psi) for a period typically 1-20 hr.
- FIG. 2C shows the device of FIG. 2B after treatment with D 2 O in an exposed region such as triangle 20.
- Waveguide 12 is not exposed.
- Longer waveguide 13 is exposed over a first length, and the longest waveguide 14 is exposed over a second length longer than the first.
- the resulting device has enhanced temperature stability.
- the constitutive waveguides are processed so that their optical pathlengths are affected equally by changes in temperature.
- a compensating material having a positive dn/dT greater than glass were used, then the shorter waveguides would be treated over longer lengths to achieve compensation.
- the final steps are to remove the mask (block D) and to seal the incorporated material into the glass (block E). Sealing can be done by applying a thin coating of metal such as a few hundred nanometers of chromium or gold over the treated region 20.
- Sample 1 is a 2 cm length planar waveguide treated with D 2 O at 300° C. for 15 hrs.
- Sample 2 is a 2 cm length of similar, untreated planar waveguide. 1.5 micrometer laser light was launched into each of the two samples and the temperature was raised approximately 40° C. from room temperature to about 62° C. The interference between the front (entrance face) and back (exit face) reflections were monitored.
- FIG. 3A shows the interference fringes plotted against temperature for the treated sample and
- FIG. 3B shows the infringes for the untreated sample. As can be seen, the treated sample has fewer fringes corresponding to a lower magnitude dn/dT.
- the magnitude of dn/dT for the treated sample is 9/16 that of the untreated sample for an enhancement factor e ⁇ 0.56 (56%).
- the process of FIG. 1 permits the fabrication of a wide variety of glass waveguide devices with enhanced temperature stability.
- the device is fabricated in the usual fashion, and the process of FIG. 1 is then applied after fabrication to alter the temperature coefficient of refractive index for one or more of the glass waveguides.
- this alteration can be applied in a spatially selective manner to equalize the temperature effects on different waveguides and thereby making the overall device temperature insensitive.
- the reduction in temperature sensitivity is proportional to minimization of dn/dT.
- Three important device applications will be illustrated: 1) temperature compensation of a multiwaveguide router, 2) temperature compensation of a multiwaveguide filter, and 3) reduction in temperature dependence of a single waveguide Bragg grating.
- FIG. 4 schematically illustrates an improved form of a device known as a waveguide grating router.
- the conventional portion of the device 40 comprises a pair of star couplers 41, 42 connected by an array 43 of waveguides that act like a grating, specifically there is a constant pathlength difference between adjacent waveguides in the array.
- the two star couplers 41, 42 are mirror images, except the number of inputs and outputs can be different.
- the lightwave from an input waveguide 44 couples into the waveguide grating array 43 by input star coupler 41. If there were no differential phase shift in the grating region, the lightwave propagation to the output coupler 42 would appear as if it were the reciprocal propagation in the input coupler.
- the input waveguide would thus be imaged at the interface between the output coupler and the output waveguides.
- the imaged input waveguide would be coupled to one of the output waveguides.
- the linear length difference in the grating array results in a wavelength-dependent tilt of the wavefront in the grating waveguides and thus shifts the input waveguide image to a wavelength-dependent position. As the wavelength changes, the input waveguide image sweeps across and couples light onto different output waveguides.
- the structure and operation of the conventional device is described in greater detail in U.S. Pat. No. 5,467,418 issued to C. Dragone on Nov. 14, 1995 which is incorporated herein by reference.
- the temperature stability of the device is enhanced by introducing a region of altered dn/dT in the waveguide grating to compensate the thermal response of the constituent waveguides.
- This may be conveniently accomplished using the process of FIG. 1 by introducing D 2 O into a triangular region 45 of the array.
- the base b of the triangle is located so that the longer waveguides have longer treated segments in the triangular region.
- a triangle for a typical grating array would have a base on the order of 1 cm.
- FIG. 5 is a schematic top view of a simple form of a monolithic optical waveguide filter 10 known as a Fourier filter.
- the conventional Fourier filter comprises a pair of optical waveguides 51 and 52 on a substrate 53 configured to form a plurality N of optical couplers 54, 55 and 56 alternately connected by a plurality of N-1 delay paths 57 and 58.
- Each coupler is comprised of a region of close adjacency of the two waveguides where the exponential tail of light transmitted on each of waveguides 51 and 52 interacts with the other, coupling light from one waveguide to the other.
- the amount of power coupled from one waveguide to the other is characterized by the effective length of the coupler.
- Each delay path comprises a pair of waveguide segments between two couplers, for example segments 57A and 57B between couplers 54 and 55.
- the segments are configured to provide unequal optical path lengths between the two couplers, thereby providing a differential delay.
- an optical input signal is presented at an input coupler, e.g. along waveguide 51 at coupler 54, and a filtered output is presented at an output coupler, e.g. along waveguide 52 at coupler 56.
- the sequence of couplers and delays provide light at the input with a plurality of paths to the output. In general there will be 2 N-1 paths where N is the number of couplers.
- Each of the optical paths of the filter provide light corresponding to a harmonic component in a Fourier series whose summation constitutes the transmission function of the filter.
- the proper operation of the Fourier filter depends upon precise control of the differential delay between coupled waveguides. Variation of this differential delay due to different effects of temperature change adversely affects performance of the filter.
- this device can be temperature compensated by forming one or more regions 59A, 59B of altered dn/dT in accordance with the method of FIG. 1.
- the regions 59A, 59B are formed in the longer waveguides e.g. 57B and 58B.
- compensation for typical Fourier filters could be achieved in rectangular regions having lengths of approximately twice the pathlength difference.
- Such Bragg gratings have found use in a variety of applications including filtering, stabilization of semiconductor lasers, reflection of fiber amplifier pump energy and compensation for fiber dispersion.
- the temperature sensitivity of the Bragg resonance depends in important part on dn/dT of the waveguide in which it is written.
- the temperature stability is enhanced by reducing the thermal sensitivity of the waveguide in accordance with the method of FIG. 1.
- optional masking could selectively expose a waveguide portion 65 where the grating is written.
- a different cladding such as P, B doped silica, to permit introduction of D 2 O. No change in typical cladding composition is needed for Bragg gratings in planar waveguide Bragg gratings.
Abstract
Description
Claims (12)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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US08/862,557 US5938811A (en) | 1997-05-23 | 1997-05-23 | Method for altering the temperature dependence of optical waveguides devices |
EP98303701A EP0880036B1 (en) | 1997-05-23 | 1998-05-12 | Method for altering the temperature dependence of optical waveguide devices |
DE69810697T DE69810697T2 (en) | 1997-05-23 | 1998-05-12 | Method for changing the temperature dependency of optical waveguide devices |
JP14341198A JP3411818B2 (en) | 1997-05-23 | 1998-05-25 | Method for manufacturing optical waveguide device |
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US08/862,557 US5938811A (en) | 1997-05-23 | 1997-05-23 | Method for altering the temperature dependence of optical waveguides devices |
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US5938811A true US5938811A (en) | 1999-08-17 |
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US08/862,557 Expired - Lifetime US5938811A (en) | 1997-05-23 | 1997-05-23 | Method for altering the temperature dependence of optical waveguides devices |
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Cited By (34)
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US20010021293A1 (en) * | 2000-02-22 | 2001-09-13 | Hikaru Kouta | Method for modifying refractive index in optical wave-guide device |
EP1136848A2 (en) * | 2000-03-15 | 2001-09-26 | Agere Systems Guardian Corporation | Using crystalline materials to control the thermo-optic behaviour of an optical path |
US6377723B1 (en) | 1999-01-13 | 2002-04-23 | The Furukawa Electric Co., Ltd | Optical waveguide circuit, and method for compensating the light transmission wavelength |
US6466707B1 (en) | 2000-08-21 | 2002-10-15 | Corning Incorporated | Phasar athermalization using a slab waveguide |
US20020158046A1 (en) * | 2001-04-27 | 2002-10-31 | Chi Wu | Formation of an optical component |
US20020158047A1 (en) * | 2001-04-27 | 2002-10-31 | Yiqiong Wang | Formation of an optical component having smooth sidewalls |
US20020159698A1 (en) * | 2001-04-30 | 2002-10-31 | Wenhua Lin | Tunable filter |
US20020181869A1 (en) * | 2001-06-01 | 2002-12-05 | Wenhua Lin | Tunable dispersion compensator |
US20030007250A1 (en) * | 2001-06-11 | 2003-01-09 | Ingwall Richard T. | Temperature compensation of Bragg reflection gratings |
US20030012537A1 (en) * | 2001-07-11 | 2003-01-16 | Chi Wu | Method of forming an optical component |
US6519380B2 (en) | 2000-01-11 | 2003-02-11 | Corning Incorporated | Athermalized integrated optical waveguide devices |
EP1293814A2 (en) * | 2001-09-14 | 2003-03-19 | Tsunami Optics, Inc. | Cascaded optical multiplexer |
US20030074193A1 (en) * | 1996-11-07 | 2003-04-17 | Koninklijke Philips Electronics N.V. | Data processing of a bitstream signal |
US20030086677A1 (en) * | 2001-11-05 | 2003-05-08 | Wenhua Lin | Compact optical equalizer |
US6563997B1 (en) | 2000-11-28 | 2003-05-13 | Lighteross, Inc. | Formation of a surface on an optical component |
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US20030123799A1 (en) * | 2001-12-13 | 2003-07-03 | Alcatel | Athermal arrayed waveguide grating |
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Families Citing this family (2)
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---|---|---|---|---|
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3104041A1 (en) * | 1981-02-02 | 1982-08-26 | Martin Prof. Dr. 1000 Berlin Wenzel | Optical fibres having reduced attenuation |
US4515612A (en) * | 1982-04-19 | 1985-05-07 | At&T Bell Laboratories | Method for optical fiber fabrication including deuterium/hydrogen exchange |
JPS60145924A (en) * | 1984-01-05 | 1985-08-01 | Fujikura Ltd | Production of base material for optical fiber |
US4676820A (en) * | 1982-10-05 | 1987-06-30 | Compagnie Lyonnaise De Transmissions | Optical waveguide fabrication method |
US4900115A (en) * | 1989-01-31 | 1990-02-13 | University Of Colorado Foundation, Inc. | Optical logic circuit useful for bit serial optic computing |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5478371A (en) * | 1992-05-05 | 1995-12-26 | At&T Corp. | Method for producing photoinduced bragg gratings by irradiating a hydrogenated glass body in a heated state |
EP0673895A3 (en) * | 1994-03-24 | 1996-01-03 | At & T Corp | Glass optical waveguides passivated against hydrogen-induced loss increases. |
JPH0933742A (en) * | 1995-07-18 | 1997-02-07 | Oki Electric Ind Co Ltd | Production of optical waveguide |
-
1997
- 1997-05-23 US US08/862,557 patent/US5938811A/en not_active Expired - Lifetime
-
1998
- 1998-05-12 DE DE69810697T patent/DE69810697T2/en not_active Expired - Lifetime
- 1998-05-12 EP EP98303701A patent/EP0880036B1/en not_active Expired - Lifetime
- 1998-05-25 JP JP14341198A patent/JP3411818B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3104041A1 (en) * | 1981-02-02 | 1982-08-26 | Martin Prof. Dr. 1000 Berlin Wenzel | Optical fibres having reduced attenuation |
US4515612A (en) * | 1982-04-19 | 1985-05-07 | At&T Bell Laboratories | Method for optical fiber fabrication including deuterium/hydrogen exchange |
US4676820A (en) * | 1982-10-05 | 1987-06-30 | Compagnie Lyonnaise De Transmissions | Optical waveguide fabrication method |
JPS60145924A (en) * | 1984-01-05 | 1985-08-01 | Fujikura Ltd | Production of base material for optical fiber |
US4900115A (en) * | 1989-01-31 | 1990-02-13 | University Of Colorado Foundation, Inc. | Optical logic circuit useful for bit serial optic computing |
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US20030074193A1 (en) * | 1996-11-07 | 2003-04-17 | Koninklijke Philips Electronics N.V. | Data processing of a bitstream signal |
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US6563997B1 (en) | 2000-11-28 | 2003-05-13 | Lighteross, Inc. | Formation of a surface on an optical component |
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US20020159698A1 (en) * | 2001-04-30 | 2002-10-31 | Wenhua Lin | Tunable filter |
US6853773B2 (en) | 2001-04-30 | 2005-02-08 | Kotusa, Inc. | Tunable filter |
US6614965B2 (en) | 2001-05-11 | 2003-09-02 | Lightcross, Inc. | Efficient coupling of optical fiber to optical component |
US20020181869A1 (en) * | 2001-06-01 | 2002-12-05 | Wenhua Lin | Tunable dispersion compensator |
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US7463799B2 (en) * | 2001-06-11 | 2008-12-09 | Stx, Aprilis, Inc. | Temperature compensation of Bragg reflection gratings |
US20030012537A1 (en) * | 2001-07-11 | 2003-01-16 | Chi Wu | Method of forming an optical component |
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US6871022B2 (en) | 2001-09-14 | 2005-03-22 | Stratos International, Inc. | Cascaded optical multiplexer |
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US6853797B2 (en) | 2001-11-05 | 2005-02-08 | Kotura, Inc. | Compact optical equalizer |
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US20030091291A1 (en) * | 2001-11-15 | 2003-05-15 | Sam Keo | Smoothing facets on an optical component |
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US20030179981A1 (en) * | 2002-03-22 | 2003-09-25 | Lnl Technologies,Inc. | Tunable inorganic dielectric microresonators |
US6810168B1 (en) | 2002-05-30 | 2004-10-26 | Kotura, Inc. | Tunable add/drop node |
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Also Published As
Publication number | Publication date |
---|---|
EP0880036A2 (en) | 1998-11-25 |
EP0880036B1 (en) | 2003-01-15 |
DE69810697D1 (en) | 2003-02-20 |
JP3411818B2 (en) | 2003-06-03 |
DE69810697T2 (en) | 2003-08-21 |
EP0880036A3 (en) | 1999-12-15 |
JPH10332957A (en) | 1998-12-18 |
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