US6222604B1 - Display device and method of manufacturing the same - Google Patents

Display device and method of manufacturing the same Download PDF

Info

Publication number
US6222604B1
US6222604B1 US08/798,289 US79828997A US6222604B1 US 6222604 B1 US6222604 B1 US 6222604B1 US 79828997 A US79828997 A US 79828997A US 6222604 B1 US6222604 B1 US 6222604B1
Authority
US
United States
Prior art keywords
soda
lime glass
glass substrate
thickness
display device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US08/798,289
Inventor
Mitsuru Suginoya
Kazuo Shimada
Sachiko Kumai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Beijing Metis Technology Service Center (llp)
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Assigned to SEIKO INSTRUMENTS INC. reassignment SEIKO INSTRUMENTS INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KUMAI, SACHIKO, SHIMADA, KAZUO, SUGINOYA, MITSURU
Priority to US09/819,481 priority Critical patent/US20010046026A1/en
Application granted granted Critical
Publication of US6222604B1 publication Critical patent/US6222604B1/en
Assigned to BEIJING METIS TECHNOLOGY SERVICE CENTER (LLP) reassignment BEIJING METIS TECHNOLOGY SERVICE CENTER (LLP) ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SEIKO INSTRUMENTS INC.
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • C03C21/001Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions
    • C03C21/002Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface in liquid phase, e.g. molten salts, solutions to perform ion-exchange between alkali ions
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133302Rigid substrates, e.g. inorganic substrates
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/133345Insulating layers

Definitions

  • the present invention relates to a display device and a method of manufacturing the same, and more particularly, to a display device which has been improved in the strength of impact-resistant properties or the like and a method of manufacturing the same.
  • a schematic structure of a conventional display device will be described below.
  • a sodium passivation film made of SiO 2 is formed on the surface of a glass substrate made of soda-lime glass, borosilicate glass, or the like, and further a transparent electrode made of film-like ITO grown by a method such as evaporation or sputtering is formed thereon while being patterned.
  • Two glass substrates, on the surface of each of which the sodium passivation film and the transparent electrode are sequentially formed as described above, are bonded to each other with a sealing agent so that they are opposite to each other, and a display material such as a liquid crystal or an electrochromic material is enclosed in the gap between the glass substrates to form the display device.
  • Such a display device is excellent in portability and consumes little electric power, contrary to a CRT or the like, it is widely used at present for a digital watch, a display for a computer, and so on.
  • a glass substrate is used in the existing circumstances.
  • the glass substrate has a defect that it is liable to break because it is made of glass.
  • the flat panel display is often used for a portable electric equipment, it is required to be strong against impact of drop.
  • the portable electric equipment is desired to be light, thin, short, and small, the thickness of the glass substrate is required to be thin, which results in deterioration in the strength. That is, the display device has such a contradictory problem.
  • a chemically reinforced layer having a thickness of not larger than 20 ⁇ m is formed on the surface of at least one of the glass substrates.
  • a method of manufacturing the display device comprises a chemical reinforcing treatment step of immersing a glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium to form a chemically reinforced layer having a thickness of not larger than 20 ⁇ m on the glass substrate.
  • a method of manufacturing the display device comprises the steps of immersing a glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium, forming a chemically reinforced layer having a thickness of not larger than 20 ⁇ m on the glass substrate, forming a plurality of cells composed of a pair of glass substrates using the glass substrate on which the chemically reinforced layer is formed, scratching the surface of the glass substrate on which the chemically reinforced layer is formed, and cutting the glass substrate to divide the cells into individual ones.
  • sodium atoms on the surface of the glass substrate are replaced with atoms having an ion radius larger than that of sodium, so that the substrate is chemically reinforced and has an improved mechanical strength.
  • the strength of the glass of the display device can be improved by merely adding a step of immersing the glass substrate in the solution or molten solution containing the positive ions having an ion radius larger than that of sodium, which is very simple.
  • the thickness of the chemically reinforced layer can be easily controlled by adjusting an immersion time or the like, and the device can be formed under such a condition that working of glass cutting or the like can be carried out even after reinforcement of the substrate.
  • the display device having sufficient mechanical strength can be easily obtained without extremely complicating a conventional step of glass cutting or the like.
  • FIG. 1 is a sectional view showing a display device according to the present invention.
  • FIGS. 2 (A) to 2 (F) are views depicting manufacturing steps of the display device according to the present invention.
  • Glass has originally considerable strength in theory. However, in practice, it is easily broken because of its brittleness. The reason is that since tensile stress exists on the surface of glass, if some kind of defects are distributed on the surface, the stress is concentrated to the defects and they become break starting points so that the glass is broken at a level considerably lower than theoretical strength. In view of such breaking mechanism of glass, there are proposed reinforced glass such as wind-cooled tempered glass, low expansion glass, high elasticity glass, crystallized glass, and chemically reinforced glass.
  • the wind-cooled tempered glass has strength against breakage, which is improved by converting tensile stress existing on the surface of glass to compressive stress.
  • jets of air are blown to the surface of a glass plate heated up to about 700° C., and the glass plate is cooled while keeping the temperature difference between the interior and the surface.
  • distortion remains as compressive stress on the surface and as tensile stress in the interior according to the temperature difference, so that the strength of the glass is improved.
  • the compressive stress on the surface reaches 900-1500 kg/cm 2
  • the tensile stress in the interior becomes 300-500 kg/cm 2 .
  • the thickness of a practical reinforced layer is one sixth of the thickness of the glass or not less than 100 ⁇ m.
  • the low expansion glass is devised to prevent glass from breaking due to thermal stress generated when the glass is heated or cooled.
  • the high elasticity glass is made by introducing nitrogen, which has strong bonding force, into conventional oxide glass to reinforce the mesh of the glass.
  • the elasticity thereof is much improved to the degree of 30 to 50 percent, and therefore the strength is improved.
  • the crystallized glass is a kind of composite material in which crystal grains are dispersed into the matrix by reheating glass, and the progress of crack from breakage is blocked by the crystal grains.
  • the chemically reinforced glass has, like the wind-cooled tempered glass, improved strength against breakage by converting the tensile stress existing on the glass surface to the compressive stress.
  • glass containing alkaline ions (Li, Na, etc.) having a small ion radius is immersed in alkaline molten salt having a large ion radius at a temperature (for example, 400° C.) within a range not higher than the glass transition point, so that ion exchange between both is carried out on the surface of the glass.
  • a temperature for example, 400° C.
  • the compressive stress of about 100 Kg/mm 2 can be obtained.
  • the wind-cooled tempered glass, low expansion glass, high elasticity glass, and crystallized glass are difficult to be applied to a display device since they have such restriction that their glass compositions themselves are changed or the reinforcing treatment is carried out during the production of glass so that it can not be carried out at a post working step.
  • the chemically reinforced glass can be included in manufacturing steps of a display device since the chemical reinforcing treatment can be carried out at a relatively low temperature. That is, even after a step (polishing step, etc.) peculiar to a display device is carried out, the chemical reinforcing treatment can be carried out, so that the use of the chemically reinforced glass does not largely change and complicate conventional manufacturing steps of a display device.
  • a flat panel display for a liquid crystal display device or the like When a flat panel display for a liquid crystal display device or the like is fabricated, there are adopted steps in which a large number of display device cells are formed on two large glass substrates, the two large glass substrates are bonded to each other, and then the substrates are cut to divide the display device cells into individual ones.
  • This cutting is generally carried out by scratching the surface of the glass by a hard blade of diamond or the like and then applying a pressure to the glass to break it.
  • the glass is chemically reinforced, if the chemically reinforced layer is too thick, the scratch is hard to be transmitted into the interior of the glass, so that the cutting and dividing can not be carried out well and end faces of the divided cells do not become linear.
  • the chemical reinforcement is selected as a method of reinforcing glass, and the chemical reinforcing step is made to be carried out in manufacturing steps of a display device so that the cutting and dividing step can be carried out like a conventional method.
  • a glass substrate having a thickness of not larger than 2 mm is immersed in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium, so that a chemically reinforced layer having a thickness of not larger than 20 ⁇ m is formed on the surface of the glass substrate.
  • the glass substrate contains alkaline ions even if the quantity thereof is extremely small.
  • Lead glass, borosilicate glass and the like can be used, not to mention soda glass.
  • FIG. 1 is a schematic sectional view showing an example of a display device according to the present invention.
  • the surfaces of glass substrates 1 and 4 made of soda glass are chemically reinforced.
  • Sodium passivation films 2 and 5 made of SiO 2 are formed on the chemically reinforced glass substrates, and further transparent electrodes 3 and 6 made of film-like ITO grown by a method such as evaporation or sputtering are formed on the upper surfaces of the passivation films while being patterned.
  • the thus formed glass substrates 1 and 4 are made opposite to each other and bonded with a sealing agent 7 , and a display material 8 made of an STN liquid crystal is enclosed in the gap between the substrates to form the display device.
  • FIGS. 2 (A) to 2 (F) depict a method of manufacturing a display device, including a chemical reinforcing step of the present invention.
  • a soda glass 31 having a thickness of 0.55 mm is prepared.
  • the soda glass is polished until the flatness of the surface sufficient for a display device can be obtained.
  • the soda glass is immersed in a reinforcing solution 32 made of a mixed molten salt of 50% KNO 3 and 50% KNO 2 with a temperature of 430° C., so that a chemically reinforced glass substrate 33 is obtained. This immersion time was adjusted so that the thickness of a chemically reinforced layer was 8 ⁇ m from the surface.
  • a reinforcing solution 32 made of a mixed molten salt of 50% KNO 3 and 50% KNO 2 with a temperature of 430° C.
  • a sodium passivation film 37 and a plurality of transparent electrodes 38 are formed on a glass substrate 36 , the surface of which is chemically reinforced like the glass substrate 33 .
  • the glass substrate 36 is made opposite to the glass substrate 33 and both are bonded with sealing agents 39 , so that a plurality of cells are formed from the same glass substrates.
  • linear scratches 40 are made on the glass substrates by a diamond blade at positions where the substrates are expected to be divided. Thereafter, the vicinities of the scratches 40 are pressurized to cut and divide the glass.
  • a display material made of an STN liquid crystal is enclosed in the gap of individually divided cells to form the display device.
  • a display device was fabricated under the same conditions as example 1 except that a time of chemical reinforcement treatment in example 1 was prolonged so that the thickness of the chemically reinforced layer was 25 ⁇ m from the surface thereof. In the cutting and dividing step, the broken surface of glass become sawlike and a large number of cracks were observed. Further, when the display device was dropped from the height of 2 m, it was broken from the cracks.
  • a glass substrate was a soda glass having a thickness of 0.7 mm, which was immersed in a reinforcement solution 42 made of KNO 3 molten salt heated up to 400° C. so that it was chemically reinforced.
  • a display device was fabricated under the same conditions as example 1 except that an immersion time at the chemical reinforcement was adjusted so that the thickness of a chemically reinforced layer was 15 ⁇ m from the surface thereof. Also in this example, the same effects as example 1 were obtained.
  • a glass substrate was a soda glass having a thickness of 1.1 mm, and an immersion time for chemical reinforcement was adjusted so that the thickness of a chemically reinforced layer was 20 ⁇ m from the surface thereof.
  • a display device was fabricated under the same conditions as example 1 except the above. Also in this example, the same effects as example 1 were obtained.
  • a glass substrate was a lead glass and a display device was fabricated under the same conditions as example 1 except the above. Also in this example, the same effects as example 1 were obtained.
  • a glass substrate was a borosilicate glass, and a display device was fabricated under the same conditions as Example 1 except the above. Also in this example, the same effects as Example 1 were obtained.
  • sodium atoms on the surface of the glass are replaced with atoms having an ion radius larger than that of sodium so that the chemical reinforcement was carried out. Accordingly, even if the thickness of the glass substrate is made thin, sufficient strength can be kept. Further, since the chemical reinforcing treatment can be carried out after polishing of the surface of the glass substrate, the reinforced glass having high precision of surface roughness can be easily obtained.
  • the glass substrate having a thickness of not larger than 2 mm if the thickness of the chemically reinforced layer is made not larger than 20 ⁇ m, sufficient mechanical strength can be obtained, and further a conventional step such as glass cutting is not complicated. That is, a portable display device improved in strength against impact of drop can be easily obtained.
  • a glass substrate especially effective in the present invention is a soda glass substrate containing a large amount of sodium.

Abstract

A display device comprises a pair of opposed soda-lime glass substrates. A chemically reinforced layer having a thickness of 20 μm or less is disposed on the surface of at least one of the opposing soda-lime glass substrates. An electrode is disposed on opposed surfaces of the soda-lime glass substrates, and a display material is disposed between the pair of opposing soda-lime glass substrates.

Description

BACKGROUND OF THE INVENTION
The present invention relates to a display device and a method of manufacturing the same, and more particularly, to a display device which has been improved in the strength of impact-resistant properties or the like and a method of manufacturing the same.
A schematic structure of a conventional display device will be described below. A sodium passivation film made of SiO2 is formed on the surface of a glass substrate made of soda-lime glass, borosilicate glass, or the like, and further a transparent electrode made of film-like ITO grown by a method such as evaporation or sputtering is formed thereon while being patterned. Two glass substrates, on the surface of each of which the sodium passivation film and the transparent electrode are sequentially formed as described above, are bonded to each other with a sealing agent so that they are opposite to each other, and a display material such as a liquid crystal or an electrochromic material is enclosed in the gap between the glass substrates to form the display device.
Since such a display device is excellent in portability and consumes little electric power, contrary to a CRT or the like, it is widely used at present for a digital watch, a display for a computer, and so on.
However, since a highly transparent substrate is desired for such a flat panel display, a glass substrate is used in the existing circumstances. However, the glass substrate has a defect that it is liable to break because it is made of glass.
Especially, since the flat panel display is often used for a portable electric equipment, it is required to be strong against impact of drop. On the other hand, since the portable electric equipment is desired to be light, thin, short, and small, the thickness of the glass substrate is required to be thin, which results in deterioration in the strength. That is, the display device has such a contradictory problem.
SUMMARY OF THE INVENTION
It is therefore an object of the present invention to realize a display device which has sufficient strength even if the thickness of a glass substrate is made thin.
In order to solve the problem, according to the present invention, in a display device in which a pair of glass substrates, on the surface of each of which an electrode is formed, are opposite to each other, and a display material is enclosed in the gap between the substrates, a chemically reinforced layer having a thickness of not larger than 20 μm is formed on the surface of at least one of the glass substrates. Further, a method of manufacturing the display device comprises a chemical reinforcing treatment step of immersing a glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium to form a chemically reinforced layer having a thickness of not larger than 20 μm on the glass substrate.
Still further, a method of manufacturing the display device comprises the steps of immersing a glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium, forming a chemically reinforced layer having a thickness of not larger than 20 μm on the glass substrate, forming a plurality of cells composed of a pair of glass substrates using the glass substrate on which the chemically reinforced layer is formed, scratching the surface of the glass substrate on which the chemically reinforced layer is formed, and cutting the glass substrate to divide the cells into individual ones.
In the display device according to the present invention, sodium atoms on the surface of the glass substrate are replaced with atoms having an ion radius larger than that of sodium, so that the substrate is chemically reinforced and has an improved mechanical strength.
Further, the strength of the glass of the display device can be improved by merely adding a step of immersing the glass substrate in the solution or molten solution containing the positive ions having an ion radius larger than that of sodium, which is very simple. Further, according to this method, the thickness of the chemically reinforced layer can be easily controlled by adjusting an immersion time or the like, and the device can be formed under such a condition that working of glass cutting or the like can be carried out even after reinforcement of the substrate.
Still further, in the case where glass having a thickness of not larger than 2 mm, if the thickness of the chemically reinforced layer is not larger than 20 μm, the display device having sufficient mechanical strength can be easily obtained without extremely complicating a conventional step of glass cutting or the like.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a sectional view showing a display device according to the present invention; and
FIGS. 2(A) to 2(F) are views depicting manufacturing steps of the display device according to the present invention.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Glass has originally considerable strength in theory. However, in practice, it is easily broken because of its brittleness. The reason is that since tensile stress exists on the surface of glass, if some kind of defects are distributed on the surface, the stress is concentrated to the defects and they become break starting points so that the glass is broken at a level considerably lower than theoretical strength. In view of such breaking mechanism of glass, there are proposed reinforced glass such as wind-cooled tempered glass, low expansion glass, high elasticity glass, crystallized glass, and chemically reinforced glass.
The wind-cooled tempered glass has strength against breakage, which is improved by converting tensile stress existing on the surface of glass to compressive stress. Concretely, jets of air are blown to the surface of a glass plate heated up to about 700° C., and the glass plate is cooled while keeping the temperature difference between the interior and the surface. As a result, in the solidified state, distortion remains as compressive stress on the surface and as tensile stress in the interior according to the temperature difference, so that the strength of the glass is improved. At this time, the compressive stress on the surface reaches 900-1500 kg/cm2, and the tensile stress in the interior becomes 300-500 kg/cm2. It is said that the thickness of a practical reinforced layer is one sixth of the thickness of the glass or not less than 100 μm.
The low expansion glass is devised to prevent glass from breaking due to thermal stress generated when the glass is heated or cooled.
The high elasticity glass is made by introducing nitrogen, which has strong bonding force, into conventional oxide glass to reinforce the mesh of the glass. The elasticity thereof is much improved to the degree of 30 to 50 percent, and therefore the strength is improved.
The crystallized glass is a kind of composite material in which crystal grains are dispersed into the matrix by reheating glass, and the progress of crack from breakage is blocked by the crystal grains.
The chemically reinforced glass has, like the wind-cooled tempered glass, improved strength against breakage by converting the tensile stress existing on the glass surface to the compressive stress. Concretely, glass containing alkaline ions (Li, Na, etc.) having a small ion radius is immersed in alkaline molten salt having a large ion radius at a temperature (for example, 400° C.) within a range not higher than the glass transition point, so that ion exchange between both is carried out on the surface of the glass. As a result, the volume is increased in the layer of glass surface, where the compressive stress exists after cooling. The compressive stress of about 100 Kg/mm2 can be obtained.
Among these reinforced glasses, the wind-cooled tempered glass, low expansion glass, high elasticity glass, and crystallized glass are difficult to be applied to a display device since they have such restriction that their glass compositions themselves are changed or the reinforcing treatment is carried out during the production of glass so that it can not be carried out at a post working step. On the other hand, the chemically reinforced glass can be included in manufacturing steps of a display device since the chemical reinforcing treatment can be carried out at a relatively low temperature. That is, even after a step (polishing step, etc.) peculiar to a display device is carried out, the chemical reinforcing treatment can be carried out, so that the use of the chemically reinforced glass does not largely change and complicate conventional manufacturing steps of a display device.
When a flat panel display for a liquid crystal display device or the like is fabricated, there are adopted steps in which a large number of display device cells are formed on two large glass substrates, the two large glass substrates are bonded to each other, and then the substrates are cut to divide the display device cells into individual ones. This cutting is generally carried out by scratching the surface of the glass by a hard blade of diamond or the like and then applying a pressure to the glass to break it. In the case where the glass is chemically reinforced, if the chemically reinforced layer is too thick, the scratch is hard to be transmitted into the interior of the glass, so that the cutting and dividing can not be carried out well and end faces of the divided cells do not become linear.
Accordingly, in the present invention, the chemical reinforcement is selected as a method of reinforcing glass, and the chemical reinforcing step is made to be carried out in manufacturing steps of a display device so that the cutting and dividing step can be carried out like a conventional method.
That is, a glass substrate having a thickness of not larger than 2 mm is immersed in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium, so that a chemically reinforced layer having a thickness of not larger than 20 μm is formed on the surface of the glass substrate.
According to this method, since sodium atoms on the surface of the glass substrate are replaced with atoms having an ion radius larger than that of sodium so that the glass substrate is chemically reinforced, even if the thickness of the glass substrate is made thin, sufficient strength can be kept. Further, this method does not complicate conventional steps such as glass cutting.
Here, it is sufficient that the glass substrate contains alkaline ions even if the quantity thereof is extremely small. Lead glass, borosilicate glass and the like can be used, not to mention soda glass.
Hereinafter, examples of the present invention will be concretely described with reference to FIGS. 1 and 2.
EXAMPLE 1
FIG. 1 is a schematic sectional view showing an example of a display device according to the present invention. Although the basic structure thereof is similar to that of a conventional display device, the surfaces of glass substrates 1 and 4 made of soda glass are chemically reinforced. Sodium passivation films 2 and 5 made of SiO2 are formed on the chemically reinforced glass substrates, and further transparent electrodes 3 and 6 made of film-like ITO grown by a method such as evaporation or sputtering are formed on the upper surfaces of the passivation films while being patterned. The thus formed glass substrates 1 and 4 are made opposite to each other and bonded with a sealing agent 7, and a display material 8 made of an STN liquid crystal is enclosed in the gap between the substrates to form the display device.
FIGS. 2(A) to 2(F) depict a method of manufacturing a display device, including a chemical reinforcing step of the present invention. In FIG. 2(A), a soda glass 31 having a thickness of 0.55 mm is prepared. In FIG. 2(B), the soda glass is polished until the flatness of the surface sufficient for a display device can be obtained. In FIG. 2(C), the soda glass is immersed in a reinforcing solution 32 made of a mixed molten salt of 50% KNO3 and 50% KNO2 with a temperature of 430° C., so that a chemically reinforced glass substrate 33 is obtained. This immersion time was adjusted so that the thickness of a chemically reinforced layer was 8 μm from the surface. In FIG. 2(D), a sodium passivation film 34 made of SiO2, and transparent electrodes 35 made of film-like ITO grown by a method such as evaporation or sputtering, the number of which is equal to that of a plurality of display devices to be formed and the patterns of which are equal to each other, are formed on the glass substrate. In FIG. 2(E), a sodium passivation film 37 and a plurality of transparent electrodes 38 are formed on a glass substrate 36, the surface of which is chemically reinforced like the glass substrate 33. The glass substrate 36 is made opposite to the glass substrate 33 and both are bonded with sealing agents 39, so that a plurality of cells are formed from the same glass substrates. In FIG. 2(F), linear scratches 40 are made on the glass substrates by a diamond blade at positions where the substrates are expected to be divided. Thereafter, the vicinities of the scratches 40 are pressurized to cut and divide the glass. A display material made of an STN liquid crystal is enclosed in the gap of individually divided cells to form the display device.
In such an STN liquid crystal device, to realize the uniform thickness of a liquid crystal layer, the precision of 0.05 μm is required for the flatness of the surface of the substrate. Thus, polishing of the glass surface is an indispensable step. However, if the reinforced glass is used as a raw material from the first, polishing of the surface is hard to be performed and causes an extreme difficulty. However, as in this example, if the chemical reinforcing treatment is carried out at a relatively low temperature after polishing, the flatness of the glass surface can be easily obtained, and the warp and undulation of the glass can be avoided even in the subsequent reinforcing treatment, so that the display device improved in the strength can be realized without degrading the display performance.
Further, in spite of the reinforced glass, cutting and dividing was able to be carried out almost without changing a conventional step, so that the display device was able to be fabricated very simply. Nevertheless, when the display device according to this example was dropped from the height of 2 m, no damage was observed, which showed that the device is superior in mechanical strength.
COMPARATIVE EXAMPLE
A display device was fabricated under the same conditions as example 1 except that a time of chemical reinforcement treatment in example 1 was prolonged so that the thickness of the chemically reinforced layer was 25 μm from the surface thereof. In the cutting and dividing step, the broken surface of glass become sawlike and a large number of cracks were observed. Further, when the display device was dropped from the height of 2 m, it was broken from the cracks.
EXAMPLE 2
A glass substrate was a soda glass having a thickness of 0.7 mm, which was immersed in a reinforcement solution 42 made of KNO3 molten salt heated up to 400° C. so that it was chemically reinforced. A display device was fabricated under the same conditions as example 1 except that an immersion time at the chemical reinforcement was adjusted so that the thickness of a chemically reinforced layer was 15 μm from the surface thereof. Also in this example, the same effects as example 1 were obtained.
EXAMPLE 3
A glass substrate was a soda glass having a thickness of 1.1 mm, and an immersion time for chemical reinforcement was adjusted so that the thickness of a chemically reinforced layer was 20 μm from the surface thereof. A display device was fabricated under the same conditions as example 1 except the above. Also in this example, the same effects as example 1 were obtained.
EXAMPLE 4
A glass substrate was a lead glass and a display device was fabricated under the same conditions as example 1 except the above. Also in this example, the same effects as example 1 were obtained.
EXAMPLE 5
A glass substrate was a borosilicate glass, and a display device was fabricated under the same conditions as Example 1 except the above. Also in this example, the same effects as Example 1 were obtained.
According to these methods, sodium atoms on the surface of the glass are replaced with atoms having an ion radius larger than that of sodium so that the chemical reinforcement was carried out. Accordingly, even if the thickness of the glass substrate is made thin, sufficient strength can be kept. Further, since the chemical reinforcing treatment can be carried out after polishing of the surface of the glass substrate, the reinforced glass having high precision of surface roughness can be easily obtained.
Further, in the case where the glass substrate having a thickness of not larger than 2 mm, if the thickness of the chemically reinforced layer is made not larger than 20 μm, sufficient mechanical strength can be obtained, and further a conventional step such as glass cutting is not complicated. That is, a portable display device improved in strength against impact of drop can be easily obtained.
A glass substrate especially effective in the present invention is a soda glass substrate containing a large amount of sodium.

Claims (16)

What is claimed is:
1. A display device comprising: a pair of opposing soda-lime glass substrates having opposed surfaces; a chemically reinforced layer having a thickness of 20 μm or less disposed on at least one of the opposed surfaces of the soda-lime glass substrates, the chemically reinforced layer having a compressive stress of 100 Kg/mm2; electrodes disposed over the opposed surfaces of the soda-lime glass substrates; and a display material disposed between the pair of opposing soda-lime glass substrates.
2. A display device according to claim 1; wherein the thickness of the chemically reinforced layer is 3-20 μm.
3. A display device according to claim 1; wherein the thickness of the chemically reinforced layer is 8 μm.
4. A display device according to claim 1; wherein a chemically reinforced layer having a thickness of 20 μm or less is disposed on the surface of the other of the opposing soda-lime glass substrates.
5. A display device according to claim 4; wherein the thickness of the chemically reinforced layer disposed on the surface of the other of the opposing soda-lime glass substrates is 3-20 μm.
6. A display device according to claim 4; wherein the thickness of the chemically reinforced layer disposed on the surface of the other of the opposing soda-lime glass substrates is 8 μm.
7. A display device according to claim 1; wherein each of the opposing soda-lime glass substrates has a thickness of 2 mm or less.
8. In a method of manufacturing a display device having a soda-lime glass substrate, the improvement comprising:
a chemical reinforcing treatment step of immersing the soda-lime glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium to form on the soda-lime glass substrate a chemically reinforced layer having a thickness of 20 μm or less and a compressive stress of 100 Kg/mm2.
9. A method of manufacturing a display device, comprising the steps of:
immersing a soda-lime glass substrate having a thickness of 2 mm or less in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium;
forming a chemically reinforced layer having a thickness of 20 μm or less on the soda-lime glass substrate and a compressive stress of 100 Kg/mm2;
fabricating a plurality of cells made of a pair of glass substrates by using the soda-lime glass substrate on which the chemically reinforced layer has been formed;
marking the surface of the soda-lime glass substrate on which the chemically reinforced layer has been formed to form division lines; and
cutting the soda-lime glass substrate at the division lines to form individual cells.
10. A method of manufacturing a display device, comprising the steps of:
immersing a first soda-lime glass substrate in a solution of salt containing positive ions having an ion radius greater than that of sodium to form on a surface of the first soda-lime glass substrate a reinforcement layer having a thickness of 20 μm or less and a compressive stress of 100 Kg/mm2;
forming an electrode on the reinforcement layer of the first soda-lime glass substrate;
immersing a second soda-lime glass substrate in a solution of salt containing positive ions having an ion radius greater than that of sodium to form on a surface of the second soda-lime glass substrate a reinforcement layer having a thickness of 20 μm or less and a compressive stress of 100 Kg/mm2;
forming an electrode on the reinforcement layer of the second soda-lime glass substrate;
disposing the surface of the first soda-lime glass substrate in confronting and spaced-apart relation to the surface of the second soda-lime glass substrate to define a gap therebetween; and
disposing a liquid crystal display material in the gap defined between the surfaces of the first and second soda-lime glass substrates.
11. A method according to claim 10; wherein the thickness of each of the reinforcement layers is 3-20 μm.
12. A method according to claim 10; wherein the thickness of each of the reinforcement layers is 8 μm.
13. A method according to claim 10; wherein the thickness of each of the reinforcement layers is 3-20 μm.
14. A method according to claim 10; wherein the thickness of each of the reinforcement layers is 8 μm.
15. A display device comprising: a pair of opposing soda-lime glass substrates having opposed surfaces; a chemically reinforced layer having a compressive stress of 100 Kg/mm2 disposed on at least one of the opposed surfaces of the soda-lime glass substrates; electrodes disposed over the opposed surfaces of the soda-lime glass substrates; and a display material disposed between the pair of opposing soda-lime glass substrates.
16. In a method of manufacturing a display device having a soda-lime glass substrate, the improvement comprising:
a chemical reinforcing treatment step of immersing the soda-lime glass substrate in a solution or a molten solution of salt containing positive ions having an ion radius larger than that of sodium to form on the soda-lime glass substrate a chemically reinforced layer having a compressive stress of 100 Kg/mm2.
US08/798,289 1996-02-29 1997-02-07 Display device and method of manufacturing the same Expired - Lifetime US6222604B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US09/819,481 US20010046026A1 (en) 1996-02-29 2001-03-28 Method of manufacturing a display device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP04352296A JP3271691B2 (en) 1996-02-29 1996-02-29 Display device manufacturing method
JP8-043522 1996-02-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US09/819,481 Division US20010046026A1 (en) 1996-02-29 2001-03-28 Method of manufacturing a display device

Publications (1)

Publication Number Publication Date
US6222604B1 true US6222604B1 (en) 2001-04-24

Family

ID=12666089

Family Applications (2)

Application Number Title Priority Date Filing Date
US08/798,289 Expired - Lifetime US6222604B1 (en) 1996-02-29 1997-02-07 Display device and method of manufacturing the same
US09/819,481 Abandoned US20010046026A1 (en) 1996-02-29 2001-03-28 Method of manufacturing a display device

Family Applications After (1)

Application Number Title Priority Date Filing Date
US09/819,481 Abandoned US20010046026A1 (en) 1996-02-29 2001-03-28 Method of manufacturing a display device

Country Status (5)

Country Link
US (2) US6222604B1 (en)
EP (1) EP0793132B1 (en)
JP (1) JP3271691B2 (en)
CN (1) CN1096002C (en)
DE (1) DE69723896T2 (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050025980A1 (en) * 2001-04-24 2005-02-03 Anoop Agrawal Electrochromic safety glazing
US20060098288A1 (en) * 2004-11-10 2006-05-11 Coretronic Corporation Diffuser plate of backlight module
US20090068455A1 (en) * 2007-09-06 2009-03-12 Bernd Albrecht Protective glass against ionizing radiation
US20110127244A1 (en) * 2009-11-30 2011-06-02 Xinghua Li Methods for laser scribing and separating glass substrates
US20120210749A1 (en) * 2011-02-22 2012-08-23 Jiangwei Feng Ion exchange using nitrates and nitrites to prevent optical degradation of glass
US20130199241A1 (en) * 2007-03-02 2013-08-08 Nippon Electric Glass Co., Ltd. Reinforced plate glass and method for manufacturing the same
US8720228B2 (en) 2010-08-31 2014-05-13 Corning Incorporated Methods of separating strengthened glass substrates
US20140152950A1 (en) * 2012-11-30 2014-06-05 Kao-Ming Yeh Method of changing the physical shape of a display panel
US8943855B2 (en) 2009-08-28 2015-02-03 Corning Incorporated Methods for laser cutting articles from ion exchanged glass substrates
US9533910B2 (en) 2009-08-28 2017-01-03 Corning Incorporated Methods for laser cutting glass substrates
US9610653B2 (en) 2012-09-21 2017-04-04 Electro Scientific Industries, Inc. Method and apparatus for separation of workpieces and articles produced thereby
US9802854B2 (en) 2010-03-19 2017-10-31 Corning Incorporated Mechanical scoring and separation of strengthened glass
US9938180B2 (en) 2012-06-05 2018-04-10 Corning Incorporated Methods of cutting glass using a laser
US10351460B2 (en) 2012-05-22 2019-07-16 Corning Incorporated Methods of separating strengthened glass sheets by mechanical scribing

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69711577T2 (en) 1996-12-26 2002-09-26 Canon Kk Electron source substrate, electron source, image forming apparatus with such substrate and manufacturing method
FR2768857B1 (en) * 1997-09-23 1999-12-03 Thomson Tubes Electroniques METHOD FOR PRODUCING A VISUALIZATION PANEL COMPRISING A SLAB WITH IMPROVED DIMENSIONAL STABILITY
JP2002174810A (en) * 2000-12-08 2002-06-21 Hoya Corp Glass substrate for display, manufacturing method for the same and display using the same
JP2003021818A (en) * 2001-07-05 2003-01-24 Toshiba Corp Method for manufacturing flat panel display element
GB2383419B (en) * 2001-12-21 2004-07-07 Motorola Inc Display devices
JP4256724B2 (en) * 2003-06-05 2009-04-22 三星ダイヤモンド工業株式会社 Method and apparatus for scribing brittle material substrate
JP2008044834A (en) * 2006-07-19 2008-02-28 Asahi Glass Co Ltd Glass substrate for flat panel display, method of manufacturing the same and display panel using the same
JP5467490B2 (en) 2007-08-03 2014-04-09 日本電気硝子株式会社 Method for producing tempered glass substrate and tempered glass substrate
US8327666B2 (en) * 2009-02-19 2012-12-11 Corning Incorporated Method of separating strengthened glass
US8341976B2 (en) 2009-02-19 2013-01-01 Corning Incorporated Method of separating strengthened glass
US8432603B2 (en) * 2009-03-31 2013-04-30 View, Inc. Electrochromic devices
US8864005B2 (en) 2010-07-16 2014-10-21 Corning Incorporated Methods for scribing and separating strengthened glass substrates
EP2645208A4 (en) * 2010-11-25 2014-08-20 Optsol Co Ltd Tempered glass sheet for a touch panel, and method for manufacturing same
US20140248495A1 (en) * 2011-09-29 2014-09-04 Central Glass Company, Limited Chemically strengthened glass and method for producing same

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4024613A (en) * 1975-01-02 1977-05-24 Owens-Illinois, Inc. Method of permanently attaching metallic spacers in gaseous discharge display panels
JPS5644405B2 (en) * 1974-03-14 1981-10-19
US4538158A (en) * 1982-04-21 1985-08-27 Bernard Warszawski Electrosensitive media and recording process
JPS61251541A (en) * 1985-04-30 1986-11-08 Asahi Glass Co Ltd Electro-optical element
US4846868A (en) * 1986-09-05 1989-07-11 Central Glass Company, Limited Chemically strengthened glass article and method of producing same
US4993810A (en) * 1989-04-14 1991-02-19 Ford Motor Company Electrochromic devices comprising metal salts in an ion conductive material
US5285517A (en) * 1983-06-24 1994-02-08 Canyon Materials, Inc. High energy beam sensitive glasses
US5410423A (en) * 1992-02-21 1995-04-25 Canon Kabushiki Kaisha Method of fabricating a liquid crystal panel using a dummy seal which is closed after hardening
US5681609A (en) * 1994-12-28 1997-10-28 Hoya Corporation Method of manufacturing a magnetic recording disk
US5684548A (en) * 1991-03-14 1997-11-04 Hitachi, Ltd. Liquid crystal display element and micro-lens arrangement and a display using the same
US5764318A (en) * 1991-09-26 1998-06-09 Canon Kabushiki Kaisha Liquid crystal display panel and projector utilizing the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3396075A (en) * 1962-09-17 1968-08-06 Pittsburgh Plate Glass Co Glass articles
JPS583212B2 (en) * 1978-06-02 1983-01-20 株式会社日立製作所 Manufacturing method of liquid crystal display element
JPS58115043A (en) * 1981-12-28 1983-07-08 Konishiroku Photo Ind Co Ltd Ion exchange of plate glass
JPS62209414A (en) * 1986-03-10 1987-09-14 Alps Electric Co Ltd Liquid crystal display element
JPH08160405A (en) * 1994-12-09 1996-06-21 Seiko Instr Inc Display device and its production

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5644405B2 (en) * 1974-03-14 1981-10-19
US4024613A (en) * 1975-01-02 1977-05-24 Owens-Illinois, Inc. Method of permanently attaching metallic spacers in gaseous discharge display panels
US4538158A (en) * 1982-04-21 1985-08-27 Bernard Warszawski Electrosensitive media and recording process
US5285517A (en) * 1983-06-24 1994-02-08 Canyon Materials, Inc. High energy beam sensitive glasses
JPS61251541A (en) * 1985-04-30 1986-11-08 Asahi Glass Co Ltd Electro-optical element
US4846868A (en) * 1986-09-05 1989-07-11 Central Glass Company, Limited Chemically strengthened glass article and method of producing same
US4993810A (en) * 1989-04-14 1991-02-19 Ford Motor Company Electrochromic devices comprising metal salts in an ion conductive material
US5684548A (en) * 1991-03-14 1997-11-04 Hitachi, Ltd. Liquid crystal display element and micro-lens arrangement and a display using the same
US5764318A (en) * 1991-09-26 1998-06-09 Canon Kabushiki Kaisha Liquid crystal display panel and projector utilizing the same
US5410423A (en) * 1992-02-21 1995-04-25 Canon Kabushiki Kaisha Method of fabricating a liquid crystal panel using a dummy seal which is closed after hardening
US5681609A (en) * 1994-12-28 1997-10-28 Hoya Corporation Method of manufacturing a magnetic recording disk

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6995891B2 (en) * 2001-04-24 2006-02-07 Schott North America Inc. Electrochromic safety glazing
US20050025980A1 (en) * 2001-04-24 2005-02-03 Anoop Agrawal Electrochromic safety glazing
US20060098288A1 (en) * 2004-11-10 2006-05-11 Coretronic Corporation Diffuser plate of backlight module
US20130199241A1 (en) * 2007-03-02 2013-08-08 Nippon Electric Glass Co., Ltd. Reinforced plate glass and method for manufacturing the same
US9102566B2 (en) * 2007-03-02 2015-08-11 Nippon Electric Glass Co., Ltd. Reinforced plate glass and method for manufacturing the same
US20090068455A1 (en) * 2007-09-06 2009-03-12 Bernd Albrecht Protective glass against ionizing radiation
US8187682B2 (en) * 2007-09-06 2012-05-29 Schott Ag Protective glass against ionizing radiation
US8943855B2 (en) 2009-08-28 2015-02-03 Corning Incorporated Methods for laser cutting articles from ion exchanged glass substrates
US9533910B2 (en) 2009-08-28 2017-01-03 Corning Incorporated Methods for laser cutting glass substrates
US8946590B2 (en) 2009-11-30 2015-02-03 Corning Incorporated Methods for laser scribing and separating glass substrates
US20110127244A1 (en) * 2009-11-30 2011-06-02 Xinghua Li Methods for laser scribing and separating glass substrates
US10358374B2 (en) 2009-11-30 2019-07-23 Corning Incorporated Methods for laser scribing and separating glass substrates
US9802854B2 (en) 2010-03-19 2017-10-31 Corning Incorporated Mechanical scoring and separation of strengthened glass
US8720228B2 (en) 2010-08-31 2014-05-13 Corning Incorporated Methods of separating strengthened glass substrates
US20120210749A1 (en) * 2011-02-22 2012-08-23 Jiangwei Feng Ion exchange using nitrates and nitrites to prevent optical degradation of glass
US10351460B2 (en) 2012-05-22 2019-07-16 Corning Incorporated Methods of separating strengthened glass sheets by mechanical scribing
US9938180B2 (en) 2012-06-05 2018-04-10 Corning Incorporated Methods of cutting glass using a laser
US9610653B2 (en) 2012-09-21 2017-04-04 Electro Scientific Industries, Inc. Method and apparatus for separation of workpieces and articles produced thereby
US20140152950A1 (en) * 2012-11-30 2014-06-05 Kao-Ming Yeh Method of changing the physical shape of a display panel
US8947628B2 (en) * 2012-11-30 2015-02-03 Kao-Ming Yeh Method of changing the physical shape of a display panel

Also Published As

Publication number Publication date
DE69723896T2 (en) 2004-02-12
US20010046026A1 (en) 2001-11-29
EP0793132B1 (en) 2003-08-06
DE69723896D1 (en) 2003-09-11
JP3271691B2 (en) 2002-04-02
EP0793132A1 (en) 1997-09-03
CN1096002C (en) 2002-12-11
CN1160924A (en) 1997-10-01
JPH09236792A (en) 1997-09-09

Similar Documents

Publication Publication Date Title
US6222604B1 (en) Display device and method of manufacturing the same
TWI394731B (en) Reinforced plate glass and manufacturing method thereof
US6050870A (en) Display device and method of manufacturing the same
KR102047017B1 (en) Surface-modified glass substrate
KR101493762B1 (en) Hardened glass substrate and method for manufacturing the same
JP2008007384A (en) Method for manufacturing glass substrate
CN1816768A (en) Glass product for use in ultra-thin glass display applications
JP2008007360A (en) Mother glass substrate, glass substrate and method for manufacturing the glass substrate
TW201514128A (en) A method of analyzing a sapphire article background of the invention
JP2001192240A (en) Display device and method for manufacturing the same
KR20230107437A (en) Glass composition, glass article prepared therefrom and display device
KR20230136837A (en) Glass composition, glass article prepared therefrom and display device
TW201513188A (en) A method of reducing the thickness of a sapphire layer
CN114524626A (en) Glass product manufacturing device

Legal Events

Date Code Title Description
AS Assignment

Owner name: SEIKO INSTRUMENTS INC., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:SUGINOYA, MITSURU;SHIMADA, KAZUO;KUMAI, SACHIKO;REEL/FRAME:011556/0116

Effective date: 20010112

STCF Information on status: patent grant

Free format text: PATENTED CASE

FPAY Fee payment

Year of fee payment: 4

FPAY Fee payment

Year of fee payment: 8

FPAY Fee payment

Year of fee payment: 12

AS Assignment

Owner name: BEIJING METIS TECHNOLOGY SERVICE CENTER (LLP), CHI

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SEIKO INSTRUMENTS INC.;REEL/FRAME:038593/0418

Effective date: 20150918