US6568992B1 - Method for controlling MRE stripe height - Google Patents
Method for controlling MRE stripe height Download PDFInfo
- Publication number
- US6568992B1 US6568992B1 US09/828,489 US82848901A US6568992B1 US 6568992 B1 US6568992 B1 US 6568992B1 US 82848901 A US82848901 A US 82848901A US 6568992 B1 US6568992 B1 US 6568992B1
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- United States
- Prior art keywords
- slider
- lapping
- stripe height
- shear
- magneto
- Prior art date
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- Expired - Fee Related, expires
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Classifications
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3173—Batch fabrication, i.e. producing a plurality of head structures in one batch
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/048—Lapping machines or devices; Accessories designed for working plane surfaces of sliders and magnetic heads of hard disc drives or the like
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/10—Structure or manufacture of housings or shields for heads
- G11B5/102—Manufacture of housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3169—Working or finishing the interfacing surface of heads, e.g. lapping of heads
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/1871—Shaping or contouring of the transducing or guiding surface
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/4902—Electromagnet, transformer or inductor
- Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
- Y10T29/49032—Fabricating head structure or component thereof
- Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
- Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
Definitions
- Provisional Patent Application Serial No. 60/197,226 filed on Apr. 14, 2000, for “A Method for Controlling MRE Stripe Height” by James E. Angelo and Zine-Eddine Boutaghou. Provisional Patent Application No. 60/197,226 is incorporated by reference herein.
- the present invention relates generally to the field of magnetic data storage and retrieval systems. Specifically, the present invention relates to a method of controlling the stripe height of a magnetoresistive (MR) element.
- MR magnetoresistive
- Disc drives are well known in the art and comprise several discs, each disc having several concentric data tracks for storing data.
- a magnetic read/write transducing head carried by a slider is used to read from or write to a data track on a disc.
- Such sliders, as well as the transducing heads, are typically produced by using thin film deposition techniques.
- an array of sliders are formed on a common substrate or wafer. The wafer is typically inspected, and is then sliced to produce bars, with a row of sliders in a side-by-side pattern on each bar. The bars are then lapped at the surface that will eventually face the recording medium to obtain the desired magnetoresistive (MR) element height (also referred to as thee specified stripe height).
- MR magnetoresistive
- a fixture for holding the bar above the lapping mechanism.
- the fixture and thus the bar, can be moved relative to the lapping mechanism.
- the fixture is controlled based on the feedback from the lapping sensors to move the bar and allow the lapping mechanism to remove an amount of material during lapping corresponding to a given resistence of the lapping sensor.
- the desired resistance of the lapping sensor it is estimated that the desired stripe heights of the sliders on the bar are also achieved.
- the fixture can be controlled to remove the bar from the lapping device.
- the present invention is a method for lapping the MR element on a slider having a shear based transducer.
- the slider's shear based transducer is used during the lapping process to more precisely position the portion of the slider carrying the MR element relative to the lapping mechanism.
- Each slider likewise has a sensor for sensing the stripe height during the lapping process. Based on the sensed stripe height, the shear based transducer can be actuated to move the MR element to a desired position relative to a lapping device. By monitoring the sensed stipe height, the shear based transducer can be controlled to ensure the MR element is precisely lapped to the desired stripe height.
- FIG. 1 is a perspective view of a disc drive actuation system for positioning a slider over tracks of a disc.
- FIG. 2 is a greatly enlarged perspective view of a disc drive slider having a shear based transducer as the slider is positioned over a disc.
- FIG. 3 is a cross sectional side view of the slider having a shear based transducer as the slider is positioned over a disc.
- FIG. 4 is a bottom view of a slider illustrating the surface to be lapped.
- FIG. 5 is a plan view of a bar of sliders having shear based transducers.
- FIG. 6 is an illustration of a control system for use with the present invention.
- FIG. 1 is a perspective view of a disc drive actuation system 10 for positioning a slider 12 over a selected data track 14 of a magnetic storage medium 16 , such as a disc.
- the actuation system 10 includes a voice coil motor (VCM) 18 arranged to rotate an actuator arm 20 around an axis 22 on a spindle.
- VCM voice coil motor
- the slider suspension includes a load beam 24 connected to the actuator arm 20 at a slider mounting block 26 .
- a flexure 28 is connected to the end of the load beam 24 , and carries the slider 12 .
- the slider 12 carries a magneto-resistive (MR) element (not shown) for reading and/or writing data on the concentric tracks 14 of the disc 16 .
- the disc 16 rotates around an axis 30 , which keeps the slider 12 aloft a small distance above the surface of the disc 16 as described in greater detail below.
- MR magneto-resistive
- FIG. 2 is a greatly enlarged perspective view of the disc drive slider 12 disclosed in U.S. patent application Ser. No. 09/472,262.
- Application Ser. No. 09/472,262 discloses a slider 12 having a shear based transducer 40 for positioning a portion of the slider 12 above the surface of the disc 16 .
- the slider 12 includes a trailing edge surface 42 , an air bearing surface 44 , and bond pads 46 .
- the MR element (not shown) is carried by the slider 12 at the trailing edge surface 42 for reading and writing data to and from the disc 16 .
- the bond pads 46 on the trailing edge surface 42 provide an area for electronic leads to be attached to the slider 12 , thus allowing electronic signals to pass to and from the MR element.
- the shear transducer 40 allows the portion of the slider 12 carrying the MR element (near the trailing edge surface 42 ) to be adjusted so that it more closely follows the surface of the disc 16 as the slider 12 moves over the disc 16 surface. Specifically, it is possible to apply a voltage across the shear transducer 40 to cause a portion of the slider near the trailing edge surface 42 to shear, or move closer to or further away from the surface of the disc 16 .
- FIG. 3 is a cross-sectional view of a portion of the slider 12 showing the shear based transducer 40 in more detail. Also shown is the read/write pole location which corresponds to the MR element 48 .
- the shear transducer 40 comprises a first insulating layer 50 , a second insulating layer 52 , conductive metallic layers 54 , and a piezoelectric layer 56 .
- a voltage is applied across shear transducer 40 via conductive metallic layers 54 .
- the applied voltage causes the portion of the slider near the trailing edge surface 42 to move in a direction normal to the surface of disc 16 , as illustrated by arrow 58 . Because the MR element 48 is deposited in the layer 50 near the trailing edge surface 42 , the MR element 48 is moved as well.
- the MR element 48 is shown at the bottom of first insulating layer 50 proximal to air bearing surface 44 .
- the MR element 48 represents the portion of magnetic read/write head which contains the read sensor and write poles.
- the MR element 48 has a height h, which is greatly exaggerated relative to the total height of slider 12 as illustrated in FIG. 3 .
- the height h of the MR element 48 is on the order of microns.
- the height of the slider 12 is approximately 0.3 millimeter. Thus, the height of the MR element 48 is roughly 300 times smaller than the height of the slider 12 .
- the direction in which the MR element 48 moves depends upon the polarity of the voltage applied to the shear transducer 40 at the conductive metallic layers 54 . Similarly, the amount of voltage applied to the shear transducer 40 controls the distance that the MR element 48 moves toward or away from the disc 16 . Generally, a voltage of 40 volts will displace the shear transducer 40 approximately one micro-inch.
- the shear transducers 40 are formed at the wafer level using a variety of, for instance, deposition and photolithography techniques. Multiple sliders, up to as many as 40,000, may be formed on one wafer. The wafer is then sliced into bars, each bar having up to 60-70 sliders. The bars are lapped to finish or polish the surface what will eventually become the air bearing surface. As part of the lapping process, the MR element 48 is lapped until it reaches the desired stripe height h.
- FIG. 4 is a bottom view of a single slider 12 having a piezoelectric shear based transducer 40 .
- the bottom view shown in FIG. 4 corresponds to what eventually becomes the air bearing surface 44 of the slider 12 and is the surface of the slider 12 which is lapped by a lapping device. Visible on the air bearing surface 44 is the pole area 48 containing the read/write element and shields which will be polished to achieve the desired stripe height of the MR element during the lapping process.
- Methods of lapping the surface 44 of the slider 12 may include, for instance, a slurry process, a polishing plate using free abrasives such as alumina or diamond dust, or a polishing plate having an abrasive embedded in the plate.
- the lapping process may begin by performing a more coarse lapping step which removes a larger amount of material from the entire surface 44 , followed by a fine lapping step focusing on the trailing edge surface 42 , and in particular on the pole area 48 to achieve the desired stripe height of the MR element.
- FIG. 5 Shown in FIG. 5 is a bar 60 which consists of several individual sliders 62 . Visible on the individual sliders 62 are a first insulating layer 50 , a second insulating layer 52 , conductive metallic layers 54 , and a piezoelectric layer 56 . An outline of read/write head 64 is illustrated showing its location in first insulating layer 50 . On the top side of each individual slider 62 are connective leads 66 and 68 . Connective leads 66 and 68 are attached to conductive metallic layers 54 , which are layered along both sides of piezoelectric layer 56 . Piezoelectric layer 56 is actuated by applying a voltage to the connective leads 66 and 68 , which moves the portion of the slider 12 carrying the MR element 64 in a manner previously described.
- connections 66 , 68 on the bar allow for testing of the shear transducers 40 during manufacturing, either at the wafer level or at the bar level. These same connections 66 , 68 can be used during the lapping process to actuate the shear transducers 40 to aid in the final stripe height formation of each stripe associated with the MR elements 64 on the bar 60 .
- the lapping sensors 69 are lapped at the same time the bar 60 is lapped and provide a measurement of the stripe height as the lapping proceeds.
- the MR element 48 itself to sense the stripe height.
- the MR element 48 is typically comprised of a permalloy material, or other similar suitable material, having a known resistance per unit thickness.
- the measured resistance directly correlates to the height of MR element 48 As such, the resistance of the MR element 48 can be determined based on a voltage across the MR element 48 and the current through the element 48 .
- other suitable methods of determining and monitoring the stripe height during the lapping process may be used with the present invention. As described above, it is highly desirable that accurate and precise control of the stripe height be achieved when manufacturing the slider.
- FIG. 6 is a diagrammatic illustration of a lapping system which may be used to achieve a reduced stripe height, as well as high tolerance control of the lapping process, during lapping of bars of sliders having shear based transducers.
- the lapping system 70 comprises a control system 72 and a lapping mechanism 74 suitable for use with the present invention.
- the lapping mechanism 74 comprises a fixture 76 holding a carrier 78 to which is mounted a bar 80 .
- the bar 80 is mounted in the fixture so that the surface on which the MR stripes appear, which corresponds to the surfaces which eventually will become the air bearing surfaces of the sliders, is facing a lapping surface 102 .
- Attached to the fixture 76 is an elongated arm 82 which is coupled to a fulcrum 84 . Also attached to the arm 82 is a balancing actuator 86 which is positioned opposite the carrier 78 relative to the fulcrum 84 .
- the control system 72 comprises a controller 90 and driver 92 . Also included as part of the control system 72 is a user input 94 and a display 96 .
- the controller 90 may further include a memory 98 .
- the controller 90 directs the driver 92 to control the balancing actuator 86 which serves to control the balancing arm 82 about fulcrum 84 such that the entire fixture 76 , carrier 78 , and thus bar 80 can be moved relative to the lapping surface 102 .
- the control system 72 is configured so that the controller 90 is capable of directing the driver 92 to actuate the shear based transducers of each slider on the bar 80 , as illustrated by connections 104 .
- Connections 104 are diagrammatic illustrations and do not represent the actual number of connections made to the bar 80 .
- the control system 72 comprises a lapping sensor input 100 .
- each slider has an associated sensor for sensing the height of the stripe.
- a feedback connection 106 is in electrical connection with the sensors on each slider, and provides data relating to the sensed stripe height on each slider on the bar to the sensor input 100 .
- the controller 90 retrieves instructions and parameters from memory 98 , as well as instructions and information from user input 94 .
- the status of the lapping process may be displayed on the display 96 .
- Feedback from the sensors on each slider regarding the progress of the lapping operation is received through the feedback connection 106 and is provided to the controller 90 by the input 100 .
- the controller 90 responsively controls the balancing actuator 86 and the shear based transducers 40 on each slider 12 on the bar 80 in response to the data from the input 100 .
- the lapping system 72 provides a closed loop control system in which the output from the lapping sensors on each slider is used as feedback by the controller 90 to control the shear transducers on each slider from which the feedback originated.
- a beginning height of each stripe must first be determined.
- the beginning stripe height is determined using the sensor on the bar corresponding to each MR element on each slider.
- the lapping process starts.
- material is removed from the surface of the bar 80 .
- the stripe height is monitored using the stripe height sensor.
- a separate sensor may be provided on each slider to indicate the stripe height.
- the resistance of the MR element can be monitored as the lapping proceeds to determine the stripe height.
- the control system 72 can actuate the shear transducer of each slider on the bar to ensure each MR element on each slider is lapped to the desired stripe height.
- a voltage is applied to conductive metallic layers 60 on the individual sliders 72 located on the bar 70 .
- the applied voltage actuates piezoelectric layer 62 , causing the stripe to be moved either toward or away from the lapping surface.
- the voltage across the piezoelectric layer of that slider can be controlled so that the slider is removed from the lapping surface.
- the present invention provides a method of achieving a desired stripe height for each slider on the bar.
- Each slider on the bar can be individually controlled so that even though one slider has been lapped to achieve the desired stripe height, an adjacent slider continues to be lapped until it likewise reaches the desired stripe height.
- the bar 80 can be removed from the lapping surface 102 using the balancing actuator 86 .
Abstract
Description
Claims (18)
Priority Applications (1)
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US09/828,489 US6568992B1 (en) | 2000-04-14 | 2001-04-06 | Method for controlling MRE stripe height |
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US19722600P | 2000-04-14 | 2000-04-14 | |
US09/828,489 US6568992B1 (en) | 2000-04-14 | 2001-04-06 | Method for controlling MRE stripe height |
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Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030220050A1 (en) * | 2002-05-24 | 2003-11-27 | Bunch Richard D. | Removable lapping guide for magnetic recording haed and method of use |
US20040097173A1 (en) * | 2002-11-19 | 2004-05-20 | International Business Machines Corporation | Onboard multiphase electronic lapping guide design for MR heads |
US20050071986A1 (en) * | 2003-05-13 | 2005-04-07 | Veeco Aii | Apparatus and method for closed loop feedback during lapping of magnetic heads |
US7551406B1 (en) | 2005-07-01 | 2009-06-23 | Western Digital (Fremont), Llc | Dual electrical lapping guides with common bonding pad |
US7554767B1 (en) * | 2005-07-01 | 2009-06-30 | Western Digital (Fremont), Llc | Electrical lapping guide disposed laterally relative to a shield pedestal |
US20100279586A1 (en) * | 2009-04-30 | 2010-11-04 | First Principles LLC | Array of abrasive members with resilient support |
US20110073915A1 (en) * | 2008-06-10 | 2011-03-31 | Panasonic Corporation | Semiconductor integrated circuit |
US20110104989A1 (en) * | 2009-04-30 | 2011-05-05 | First Principles LLC | Dressing bar for embedding abrasive particles into substrates |
US8077418B1 (en) | 2009-03-31 | 2011-12-13 | Western Digital (Fremont), Llc | Reducing thermal protrusion of a near field transducer in an energy assisted magnetic recording head |
US9017139B2 (en) | 2013-03-12 | 2015-04-28 | Seagate Technology Llc | Lapping carrier having hard and soft properties, and methods |
US9221148B2 (en) | 2009-04-30 | 2015-12-29 | Rdc Holdings, Llc | Method and apparatus for processing sliders for disk drives, and to various processing media for the same |
US9881639B2 (en) | 2016-06-23 | 2018-01-30 | Western Digital Technologies, Inc. | Within-row wedge angle control for magnetic recording read-write heads |
US10010996B2 (en) | 2016-04-20 | 2018-07-03 | Seagate Technology Llc | Lapping plate and method of making |
US10105813B2 (en) | 2016-04-20 | 2018-10-23 | Seagate Technology Llc | Lapping plate and method of making |
US10702969B2 (en) | 2016-06-23 | 2020-07-07 | Western Digital Technologies, Inc. | Actuator tilt interposer for within-row lapping mount tool for magnetic recording read-write heads |
US10850364B2 (en) | 2016-06-23 | 2020-12-01 | Western Digital Technologies, Inc. | Within-row stripe height and wedge angle control for magnetic recording read-write heads |
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US6358123B1 (en) * | 1998-09-23 | 2002-03-19 | Seagate Technology Llc | Apparatus and method for reducing disc surface asperities to sub-microinch height |
US6174218B1 (en) * | 1999-04-21 | 2001-01-16 | International Business Machines Corporation | Bow compensated lapping |
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