|Numéro de publication||US7450245 B2|
|Type de publication||Octroi|
|Numéro de demande||US 11/436,267|
|Date de publication||11 nov. 2008|
|Date de dépôt||17 mai 2006|
|Date de priorité||29 juin 2005|
|État de paiement des frais||Payé|
|Autre référence de publication||US20070002328, WO2007136681A2, WO2007136681A3|
|Numéro de publication||11436267, 436267, US 7450245 B2, US 7450245B2, US-B2-7450245, US7450245 B2, US7450245B2|
|Inventeurs||Gary Woods, Steven Kasapi, Kenneth Wilsher|
|Cessionnaire d'origine||Dcg Systems, Inc.|
|Exporter la citation||BiBTeX, EndNote, RefMan|
|Citations de brevets (68), Citations hors brevets (51), Référencé par (10), Classifications (5), Événements juridiques (3)|
|Liens externes: USPTO, Cession USPTO, Espacenet|
This application is a continuation-in-part of, and claims the benefit of priority from, U.S. patent application Ser. No. 11/169,423, filed on Jun. 29, 2005, the entire disclosure of which is relied upon and incorporated by reference herein. This application is also a continuation-in-part of, and claims the benefit of priority from, U.S. patent application Ser. No. 11/261,996, filed on Oct. 27, 2005, which claims the benefit of priority from Provisional Patent Application No. 60/711,998 filed on Aug. 26, 2005, the entire disclosures of which are relied upon and incorporated by reference herein.
1. Field of the Invention
The present invention relates to an apparatus and method for probing integrated circuits using laser illumination.
2. Description of the Related Art
Probing systems have been used in the art for testing and debugging integrated circuit (IC) designs and layouts. Various laser-based systems for probing IC's are known in the prior art. While some description of the prior art is provided herein, the reader is encouraged to also review U.S. Pat. Nos. 5,208,648, 5,220,403 and 5,940,545, which are incorporated herein by reference in their entirety. Additional related information can be found in Yee, W. M., et al. Laser Voltage Probe (LVP): A Novel Optical Probing Technology for Flip-Chip Packaged Microprocessors, in International Symposium for Testing and Failure Analysis (ISTFA), 2000, p 3-8; Bruce, M. et al. Waveform Acquisition from the Backside of Silicon Using Electro-Optic Probing, in International Symposium for Testing and Failure Analysis (ISTFA), 1999, p 19-25; Kolachina, S. et al. Optical Waveform Probing—Strategies for Non-Flipchip Devices and Other Applications, in International Symposium for Testing and Failure Analysis (ISTFA), 2001, p 51-57; Soref, R. A. and B. R. Bennett, Electrooptical Effects in Silicon. IEEE Journal of Quantum Electronics, 1987. QE-23(1): p. 123-9; Kasapi, S., et al., Laser Beam Backside Probing of CMOS Integrated Circuits. Microelectronics Reliability, 1999. 39: p. 957; Wilsher, K., et al. Integrated Circuit Waveform Probing Using Optical Phase Shift Detection, in International Symposium for Testing and Failure Analysis (ISTFA), 2000, p 479-85; Heinrich, H. K., Picosecond Noninvasive Optical Detection of Internal Electrical Signals in Flip-Chip-Mounted Silicon Integrated Circuits. IBM Journal of Research and Development, 1990. 34(2/3): p. 162-72; Heinrich, H. K., D. M. Bloom, and B. R. Hemenway, Noninvasive sheet charge density probe for integrated silicon devices. Applied Physics Letters, 1986. 48(16): p. 1066-1068; Heinrich, H. K., D. M. Bloom, and B. R. Hemenway, Erratum to Noninvasive sheet charge density probe for integrated silicon devices. Applied Physics Letters, 1986. 48(26): p. 1811; Heinrich, H. K., et al., Measurement of real-time digital signals in a silicon bipolar junction transistor using a noninvasive optical probe. IEEE Electron Device Letters, 1986. 22(12): p. 650-652; Hemenway, B. R., et al., Optical detection of charge modulation in silicon integrated circuits using a multimode laser-diode probe. IEEE Electron Device Letters, 1987. 8(8): p. 344-346; A. Black, C. Courville, G Schultheis, H. Heinrich, Optical Sampling of GHz Charge Density Modulation in Silicon Bipolar Junction Transistors Electronics Letters, 1987, Vol. 23, No. 15, p. 783-784, which are incorporated herein by reference in their entirety.
As is known, during debug and testing of an IC, a commercially available Automated Testing Equipment, also known as an Automated Testing and Evaluation (ATE) tester, is used to generate test patterns (also referred to as test vectors) to be applied to the IC device under test (DUT). When a laser-based system is used for probing, the DUT is illuminated by the laser and the light reflected from the DUT is collected by the probing system. As the laser beam strikes the DUT, the laser beam is modulated by the response of various elements of the DUT to the test vectors. This has been ascribed to the electrical modulation of the free carrier density, and the resultant perturbation of the index of refraction, of the material. Accordingly, analysis of the reflected light provides information about the operation of various devices in the DUT.
The various elements of probe system 100 will now be described in more detail. Since temporal resolution is of high importance in testing DUT's, the embodiment of
For probing the DUT 160, the ATE 140 sends stimulus signals 142 to the DUT, in synchronization with the trigger and clock signals provided to the phase-locked loop on the time-base board 155. The phase-lock loop controls the MLL 104 to synchronize its output pulses to the stimulus signals 142 to the DUT. MLL 104 emits laser pulses that illuminate a particular device of interest on the DUT that is being stimulated. The reflected light from the DUT is collected by the beam optics 125, and is transmitted to photodetector 138 via fiber optic cable 134. The reflected beam changes character depending on the reaction of the device to the stimulus signal. To monitor incident laser power, for purposes of compensating for laser power fluctuations, for example, optical bench 112 provides means to divert a portion of MLL 104 incident pulse to photodetector 136 via fiber optic cable 13. The output signal of the photosensors 132, 134 is sent to signal acquisition board 150, which, in turn, sends the signal to the controller 170. By manipulation of the phase lock loop on the time-base board 155, controller 170 controls the precise time position of MLL 104 pulses with respect to DUT 160 stimulus signals 142. By changing this time position and monitoring the photosensors signals, the controller 170 can analyze the temporal response of the DUT to the stimulus signals 142. The temporal resolution of the analysis is dependent upon the width of the MLL 104 pulse.
While the arrangement depicted in
A major difficulty encountered by all laser-base probe systems is deciphering the weak modulation in the reflected signal, which is caused by the response of the DUT to the stimulus. Another difficulty is noise introduced into the signal by the DUT's vibrations. Various beam manipulation optic, 135, designs have been used in the art in an attempt to solve these difficulties.
The DUT interaction with the laser beam may cause changes mostly in the phase of the reflected laser beam, not its amplitude. Consequently, the signal strength may be too weak for pure amplitude detection. Various phase detection schemes have been developed for the beam manipulation optics 135.
While this arrangement helps detect phase variations caused by the DUT, using this optical arrangement exposes the system to additional noise source from phase variations caused by DUT vibrations. The DUT vibrations still modulate reflected DUT beam amplitude, but now also modulate the DUT beam phase, which generates larger resultant beam 365 amplitude modulations. To compensate for this phase noise, a modified dual-laser noise rejection scheme is used. In this modified scheme, the CWL resultant signal is used in a feedback loop to control reference arm mirror 330 position. By striving to maintain constant CWL resultant signal, the feedback loop drives reference arm mirror 330 to track DUT vibrations in order to maintain a constant quiescent phase offset value between DUT and reference arms. Fine control of mirror 330 position for the feedback loop is provided via a piezo electric transducer element (not shown). Additional adjustments (not shown) that are required in order to get best performance include reference arm power control and coarse reference arm mirror position control. Reference arm power control allows the reflected power from the DUT and reference arm mirror to be matched. Coarse reference arm mirror position control allows DUT and reference arm optical path lengths to be nominally equalized, a necessity for the operation of the modified dual-laser noise reduction scheme due to wavelength differences between MLL and CWL used in the prior art. Means to align optics to ensure overlap of reflected DUT and reference arm beams are also necessary for best performance.
As can be understood, various IC's have different layouts, and different devices within an IC's have different dimensions and surroundings. Therefore, using this embodiment, for each device to be probed the user needs to decide where to place each beam within the chip. Moreover, since the beam needs to be placed at various locations in the chip, the system needs to be designed so that the beam separation is adjustable, which complicates the optics design. Additionally, the intensity ratio of the beams must be variable since the reflectivity of the regions where they are placed can differ. Power matching between the two beams is required for best results.
Experience with devices as depicted in
In addition to the difficulties introduced by the faint signal, another difficulty is caused by the advancement of the clock signal of modern circuits. That is, since modern circuits operate at high clock speeds, probing also needed to be performed at high clock speeds. Consequently, while cost and operations considerations dictate for simplifying the system and preferably simplifying the laser source, the high frequency operation of the modern circuit dictate for even higher complexity. Therefore, a solution is needed to enable obviating the mode-lock laser source, while providing the ability to detect signals at high operating frequency.
Accordingly, there is a need in the art for a system that will allow improved laser probing of a DUT at high frequency, while simplifying operation and minimizing the system's complexity and cost.
Various embodiments of the present invention provide apparatus and method for laser probing of a DUT at very high temporal resolution, while enabling use of a conventional tunable or continuous wave (CW) laser source.
In one aspect of the invention, a system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics.
In another aspect of the invention, a system for probing a DUT is provided, the system comprising a CW laser source, a modulator for modulating the output of the laser source, the modulator modulating the laser output at the same frequency of the DUT clock frequency, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics.
In yet another aspect of the invention, a system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, the modulator modulating the laser output at the same frequency of the DUT clock frequency and in phase with the DUT, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics.
In a further aspect of the invention, a system for probing a DUT is provided, the system comprising a tunable or CW laser source, a modulator for modulating the output of the laser source, the modulator modulating the laser output at the same frequency of the DUT clock frequency, but out of phase with the DUT, a beam optics designed to point a probing beam at a designated location on the DUT, optical detector for detecting the reflected beam, and collection and signal processing electronics.
In various illustrative implementations the beam optics comprise a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization—one beam simulating a reference beam while the other simulating a probing beam. Both reference and probing beams are pointed to the same location on the DUT. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the reference and probing beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
Various embodiments of the invention also provide for a Laser Scanning Microscope (LSM) operable in a scanning mode and a vector-pointing mode. The scanning mode is used to obtain an image of an area of the DUT for navigation purposes, while the vector-pointing mode is used to park the beam on a specific device for probing.
In another embodiment of the invention, a system for testing an integrated circuit (IC) stimulated to simulate operating conditions is provided. The system includes a navigation light path and a probing light path. A first illumination source is used in the navigation mode to obtain an image of a specified area of the DUT via the navigation light path. Then, the light path is switched to the probing mode and a second light source is used to probe the DUT. The second light source is a laser light source providing a modulated laser beam, and the probing light path may include the common-path PDP optics. The probing light path may further include a solid immersion lens (SIL).
According to one aspect of the invention, a system for testing an integrated circuit microchip using laser probing is provided, which comprises a laser source providing a modulated laser beam; a beam optics receiving the modulated laser beam and providing a first and a second orthogonally polarized beams; a beam pointing optics receiving the first and second orthogonally polarized beams and pointing the first and second orthogonally polarized beams onto the same point on the microchip; a first photodetector receiving reflected laser light that is reflected from the microchip and providing an electrical signal; collection electronics receiving the electrical signal from the photodetector and providing an output signal; and an analysis system receiving and analyzing the output signal.
According to another aspect of the invention, a method of testing an integrated circuit microchip is provided, the method comprising generating a modulated laser beam; transferring the modulated laser beam through optical elements so as to point the modulated beam at a selected area on the microchip; and collecting and analyzing reflected light that is reflected from the selected area.
According to yet another aspect of the invention, an interferometer system is provided, comprising a laser source providing a modulated laser beam; a polarizer polarizing the modulated laser beam in a first direction; a Faraday rotator rotating the beam to align the polarization in a second direction, so as to effectively produce a first polarized beam aligned in said first direction and a second polarized beam aligned in a third direction that is orthogonal to the first direction; an optical retarder, retarding one of the first and second polarized beams; and an objective lens directing the first and second polarized beams onto a common point on a specimen.
Other aspects and features of the invention will become apparent from the description of various embodiments described herein, and which come within the scope and spirit of the invention as claimed in the appended claims.
The invention is described herein with reference to particular embodiments thereof, which are exemplified in the drawings. It should be understood, however, that the various embodiments depicted in the drawings are only exemplary and may not limit the invention as defined in the appended claims.
Various embodiments of the present invention provide apparatus and method for high bandwidth electrical signals using modulated laser in an optical probing system. These embodiments simplify the prior art system by eliminating the need for a mode-locked laser source. Consequently, the complexity and cost of the system is reduced, while its operation is simplified and adaptable to various testing environments. On the other hand, the embodiments enable probing of modern circuit devices operating at high frequencies.
An embodiment of the invention will now be described in details with reference to
The modulated beam is then shaped and focused onto a selected place on the DUT 660 by beam optics 625. The DUT operates at a designed clock speed and is provided with test vectors 642, generated by the ATE 640. The operating voltage in the DUT is represented by a frequency fv, as illustrated by callout 643. The response of the devices in the DUT to the test vectors 642 causes changes or perturbations in the laser beam as it reflects from the DUT. This reflection is collected by the optics 625 and sent to the photosensor 636. The output signal of the photosensor is acquired by the signal acquisition board 650 and is provided to the computer 670 for analysis.
As can be understood by those skilled in the art, the operational frequency, fv, of the DUT may be higher than the bandwidth of photosensor 636. This is why a simple CW laser source cannot be used to probe the DUT operating at high frequencies. Therefore, according to this embodiment of the invention, the CW laser source is modulated. In this way, a DUT operating at a frequency higher than the bandwidth of the photosensor 636 can be probed. That is, the laser source is modulated so as to provide, say a sine-shaped beam intensity at a given frequency. When the beam bounces off of the DUT, it is perturbed according to the DUT's response to the test vectors. This causes a frequency modulation, Δf, in the sine wave shape of the laser beam. The frequency modulation, Δf, is in a much lower frequency than the operating frequency of the DUT and is within the bandwidth of, and can be detected by the, the photosensor. This can be analogized to FM radio transmission, wherein the signal is composed of a carrier wave modulated by an amount corresponding to the information of interest, i.e., the radio program. The radio receiver is engineered to decipher the modulation amount so as to extract the information of interest from the carrier wave. In the embodiment described herein, the carrier wave is the laser beam modulated at a carrier frequency, fI, and the information of interest is the modulation, Δf, caused by the response of the DUT to the ATE test vectors. The photosensor detects the signal and the computer 670 extracts the information by extracting the modulation, Δf, from the carrier wave, fI.
In mathematical terms, the signal, S, is a product of the DUT voltage, Vt, and the laser beam's intensity It. The DUT voltage is a sum of the clock frequency and the test vector, i.e., Vt=cos [(f0+Δf)t]; while the laser beam's intensity is given by It=cos [f0t]. The product then results in:
S=V t *I t=cos[(2f 0 +Δf)t]+cos[Δf 0t] Eqn 1.
As can be understood, the first term of Eqn 1 may be outside the bandwidth of the photosensor; however, the second term is of much lower frequency and can be sensed by the photosensor. In this manner, the embodiment of the present invention enables the use of an inexpensive and simplified CW laser source, while facilitating probing of DUT's operating at a frequency beyond the bandwidth of the photosensor.
As shown in the callout 607 of
As is also shown in
In this particular embodiment, the laser beam is polarized in polarizer 706 and transferred to the beam optics 725 via fiber optics 715. Of course, free-space coupling can be used instead; however, if fiber optics coupling is used, it is expected to be polarization-maintaining fiber optics. In this particular embodiment, the output of the laser source arrangement is monitored by diverting part of the light using light path 733 and inputting the diverted light to photosensor 737. The output of the photosensor 737 is analyzed by computer 770 to ensure proper output of laser beam.
Beam optics 725 needs to deliver the laser beam to selected points within the DUT. While any optical system for pointing a beam can be used, in this embodiment this is achieved by utilizing a Laser Scanning Microscope (LSM 730). An objective lens (not shown) is typically used to generate a focused spot in the DUT. The objective can be a normal air-gap objective, a liquid immersion objective, or a solid-immersion lens (SIL) objective.
In this embodiment beam optics 725 also includes a common-path polarization differential optics PDP 735. While other arrangement can be used, the common-path PDP 735 is expected to provide performance improvement and better ease-of-use compared to alternatives. The common-path PDP optics is described in more details below and its principle is illustrated in the broken-line callout in
Light reflected from the DUT is collected and applied to fiber optics 732, 734. As before, fiber coupling is optional and free-space coupling can also be used. If fibers are used, they can be single mode fiber, multimode fiber variety, for maximum coupling efficiency, or they may be fiber amplifier type, to provide optical gain so as to reduce electronic noise. Other optical amplifiers may also be used. The fiber optics 732, 734, deliver the reflected light to photosensors 736, 738. The photosensors can be any conventional light detectors, such as PIN diode, avalanche photo diode (APD), etc. For example, an InGaAs APD with 6 GHz bandwidth, conventionally used by the telecom industry, can be used. APD's have internal gain and can be used so as to reduce the overall system electronic noise. The internal gain of APD's can be changed by varying the applied reverse bias voltage. The output signal of the photosensors 736, 738 is collected by signal acquisition board 750, and the output of the board 740 is applied to computer 770. Optionally, the signal from photosensors 736, 738 can be applied to an oscilloscope 756, or to both the computer 770 and oscilloscope 756.
Various embodiments of the signal acquisition board 750 will be described below. On the other hand, the oscilloscope 756 may be a conventional off-the-shelf instrument, or may be replaced with other conventional testers such as, e.g., spectrum analyzer, edge discriminator (for jitter investigations), a lock-in amplifier, etc. For an improved ease-of-use, the oscilloscope 756 may be controlled by computer 770. Specifically, computer 770 can be programmed to enable better control by providing a simpler and programmable user interface. For optimal system performance the oscilloscope 756 should be chosen to have certain capabilities, such as high memory capacity and high memory access speed. In this embodiment, the oscilloscope's memory is segmented to provide enhanced capability.
The system of
During data acquisition operation, the laser source LS704 is operated in a modulated mode and the modulated laser beam is pointed to a particular point on the DUT, while the DUT is stimulated using various stimulus signals 742. When the test signal is applied to the illuminated device, the laser light reflected from that device is further modulated by the reaction of the device to the stimulating signal. The reflected laser light is then collected and analyzed by the system. When the output signal obtained by the system is faint, the stimulus signal 742 should be designed to drive the DUT in a repetitive manner so as to obtain several measurements for each desired location/device, and the resulting measurements may be averaged. The signals 742 may be as simple as power and ground plus a test signal delivered via conventional probes (not shown). Of course, for more complex ICs and more elaborate testing, an ATE tester 740 can be used to deliver complex and programmable signals 742, or the DUT can be running test signals internally and independently. Regardless of the stimulus applied, a trigger signal 744 may also be provided to synchronize the modulator 705, the computer 770, and/or the oscilloscope 756, depending on the information sought. For example, if the DUT is being tested for temporal response to the stimulating signal, then a synchronizing signal should be provided to the oscilloscope. However, for other investigations, e.g., when a spectrum analyzer is used, no synchronization signal is needed.
The optical bench 712 may include a conventional vibration isolation system (not shown) to isolate the DUT 760 and the beam optics 725 from ambient or vibrations noise or mechanical noise generated by the DUT stimulus. The use of vibration isolation system may be avoided by proper optical system design. The goal is to minimize unwanted movement of the DUT 760 relative to the beam optics 725 during imaging and signal acquisition. Relative movement can cause return laser intensity variations (due to defocusing effects, for example) that degrade the signal to noise ratio (SNR) of the measurement and degrade image quality.
As can be understood, the inventive system is advantageous over the prior art system in that it uses mostly inexpensive and conventionally available components in an arrangement that produces superior results to prior systems using specifically designed components. For example, the described embodiment uses a conventional tunable laser source, rather than the complex mode-locked laser source. Similarly, a commercially available oscilloscope can be used, rather than complex and custom high-speed timing electronics. The photosensors can be InGaAs APD's which are conventionally used by the telecom industry, while the DUT testing can be done at frequencies beyond the bandwidth of the photosensors. Additionally, the common-path PDP optics provides ease-of-use benefits over previous schemes, especially since both the reference and probing beams are aimed at the same location. The common-path PDP optics also reduces the sensitivity of the system to vibrations, as both the reference and probing beams traverse the identical path.
Prior to explaining the PDP optics and its operation in details, another embodiment of the testing system is provided, by way of illustrating that either or both the modulated laser feature and the PDP optics may be used in various optical systems.
The image obtained can be used for navigation and correct placement of the laser beam for probing. That is, depending on the particular test to be run, one may wish to select any particular section or device on the DUT for laser probing. Using information about the chip design and layout stored in CAD software 780′, such as, for example, Cadence™, and using navigation software 780′, such as, for example, Merlin's Framework™ available from Knights Technology (www.electroglass.com), one may select a particular device for any particular test and use computer 780 to place the beam at the correct location for the test.
To switch to laser probing mode, mirror 860 is flipped into the position illustrated in solid lines. In this position light source 830 is turned off and the laser source 840 is turned on. Laser source 840 is any of the examples of modulated laser source described above, e.g., a tunable laser source driven by a modulator. Light from the laser source 840 passes through the common patch PDP optics, 835, as described herein, and is reflected by mirror 860, so as to enter beam optics 820 and SIL 890. The laser beam is reflected by the DUT and the reflection is collected by SIL 890, the beam optics 820, deflected by mirror 860, deflected by the common path PDP optics 835, and detected by detectors 850, 851. As explained before, the reflected light is further modulated by the DUT according to its response to the test signals. The output of the detectors 850, 851 are collected by the electronics 855 and sent to computer 880. For that purpose, electronics 855 includes the necessary elements as described herein, such as, e.g., differential amplifiers, balanced receiver, gated integrators, sample-and-hold electronics, analog-to-digital converters, variable gain and offset electronics, etc. The utilization of these elements will depend on the application. Additionally, as with the other embodiments described herein, if temporal resolution is needed, a synchronization signal may also be provided from the test signal generating equipment.
The beam from the modulated laser source enters the first polarizing beam splitter PBS1 so that part of the beam is deflected towards light sensor 1110. This deflection may be set at 5% or so. The output of the sensor 1110 is used to monitor the beam's intensity and is not part of the PDP optics, but rather an optional intensity monitor. The remaining part of the beam that passes through the first PBS cube (PBS1) enters the second polarizing beam splitters PBS2, which is oriented to pass only a vertically oriented beam. The beam's polarization state is rotated a predetermined amount so as to generate a rotated polarized beam that is an equivalent of a superposition of a vertically polarized beam and a horizontally polarized beam. In this example, the beam is rotated 45 degrees from the vertical by the action of the Faraday rotator (FR) and the third PBS cube (PBS3) is oriented to transmit the rotated beam. Consequently, at this stage the beam is the equivalent of a superposition of a vertically polarized beam and a horizontally polarized beam, both beams equal in amplitude and in phase with each other. If the amplitude of the beam should not be set to equal, the rotation should be to a different angle. The dashed callout circles in the incident beam path, between PBS3 and VR, indicate the equivalence between a 45-degree polarized beam and two in-phase, equal amplitude beams, one polarized vertically and the other horizontally. As can be understood, for certain application the rotation may be to other than 45 degrees, in which case the equivalence would be of two, in-phase beams, one polarized vertically and the other horizontally, but having different amplitude.
The two beams then enter the variable retarder VR. The fast and slow axes of the variable-retarder (VR) are aligned along these vertical and horizontal polarization directions. Thus, after passage through the VR, the beam consists of two spatially coincident, equal-amplitude, orthogonally polarized beams that are phase-shifted (retarded) with respect to each other by a small amount (nominally, π/4). This is indicated in the illustration by the dot being slightly behind the vertical arrow, representing a retardation of the horizontally polarized beam relative to the vertically polarized beam. The two beams are then focused onto the same point on the DUT by the objective lens OL. The DUT is oriented such that the polarization directions of these two beams are aligned with the length and width directions of the transistor gates. Interaction with the DUT phase modulates one of the beams relative to the other by a small amount. In this manner, the beam being modulated by the DUT may be thought of as the probing beam, while the other beam may be thought of as the reference beam. Of course, unlike prior art interferometers, here none of the beams traverses a reference optical path, but rather both beams traverse the identical path to the probing location. Therefore, as noted before, in this sense there is no reference beam and probing beam, but for convenience one may refer to one beam as the reference beam and the other as the probing beam.
After the beams are reflected by the DUT (
An analysis of the interference condition shows that the intensity of the reflected-A signal is given by:
R(A)∝(E x/√2)2+(E y/√2)2−2[(E x/√2)(E y/√2)]Cos(θ+δ) Eqn 1.
Here the θ term accounts for the static phase shift introduced by the double-pass through the variable rotator, VR, while the δ term is the small varying relative phase shift of the two beams resulting from the interaction with the DUT as it undergoes testing. Similar analysis for the reflected-B signal results in:
R(B)∝(E x/√2)2+(E y/√2)2+2[(E x/√2) (E y/√2)]Cos(θ+δ) Eqn. 2.
Eqn. 1 and Eqn. 2 are plotted in
R(A)∝(1/2)E x 2+(1/2)E y 2 +E x E y Sin(δ) Eqn. 3.
R(A)∝(1/2)E x 2+(1/2)E y 2 −E x E y Sin(δ) Eqn. 4.
R(A)−R(B)∝2E x E y Sin(δ) Eqn. 5.
Thus, in principle, subtracting the two reflected signals eliminates their large DC component along with any noise it carries, such as from laser power variations, while doubling the signal modulation. Consequently an improved signal to noise ratio (SNR) is provided when using this differential signal detection mode. In practice, digitally dividing one signal by the other instead of subtracting them is performed because it is more tolerant of unbalanced reflected signals.
As can be understood, since both reference and probing beams traverse the identical optical path and are pointed to the same location on the DUT at nominally the same time, it means that this scheme has better phase noise immunity then prior art interferometric systems. Notably, both beams are subject to the same vibrations and optical losses. This eliminates or reduces the need for active vibration compensation, path length matching, and power matching of the two arms of the interferometer. Additionally, there is no need to find a second location for the reference beam for each location tested. Rather, both beams are always pointed at the location to be tested. Accordingly, there is also no need to introduce separate spatial control of the reference and probing beams. There is also no need for complicated beam time-shifting and unshifting optics and no coupling of signal strength with time resolution. Consequently, the inventive common-path PDP arrangement can be used in multiple applications where phase detection is needed and provides drastic reductions in vibration noise, reduces the system complexity, and simplifies the setup of the system.
On the other hand,
In any of the disclosed embodiments, it is advantageous to make the cutoff of the amplifier low, otherwise the low frequency component of the signal of interest would be almost completely attenuated. In an ideal situation, to capture the signal with good fidelity the response of the amplifier should extend down in frequency to the DC. However, in practice the reflected beam will carry a low frequency noise, mostly at about 10-200 Hz, due to DUT vibrations relative to the incident beam. The noise introduced by the DUT vibration can be very large as compared to the beam modulation, which is the signal of interest. Therefore, a cutoff in the amplifier's response should be introduced so as to remove this noise. The cutoff may be set at, say 100 KHz or below.
The signal from APD 1440 is applied to amplifier 1420, while the signal from APD 1450 is applied to amplifier 1410. The output of both amplifiers are applied to a simple resistive summing junction 1430 to effectively add the two APD signals together and provide a probing signal Vout. The probing signal is sent to a digitizer for data storage and processing. In this embodiment filters 1445 and 1455 have been introduced to remove vibration and other noise appearing at below about 2 KHz.
During navigation, signal from only one APD is required to obtain an image of the DUT. As is shown, the signal from APD 1440 is also sent to amplifier 1460 and therefrom to video amplifier 1470, which provides a video out signal for processing and display. Other imaging methods may be performed with the resulting advantageous features as follows. In order to provide contrast control, the variable retarder may be varied to tune the retardation so that the image contrast is varied to the desired result. Additionally, imaging may be performed using both APD's and the resulting images subtracted from each other so as to obtain a difference image.
In the various embodiments disclosed where two APD's are used, the APD's gain may be advantageously controlled to, first, balance the APD's response and, second, to improve the imaging. Using a controllable variable power supply that is manually or automatically controlled, the voltage/gain response of each APD can be determined. Then, using the learned voltage/gain response, the gain of each APD can be controlled to a desired value by selecting the appropriate voltage on the corresponding power supply. For balancing the system, the following procedure may be used. First, the voltage of the power supplies of each APD is set to result in the same gain provided by both APD's, thereby balancing the output of the APD's. Then, the variable wave plate is adjusted until the current output of both ADP's is the same, thereby balancing the optical path. The variable gain can also be used for improved imaging. For example, when the image scan goes from a relatively dark area to a relatively bright area, the gain of the APD's may be reduced so as not to saturate the image. Conversely, when moving from a bright area to a dark area, the gain may be increased to provide improved contrast and detail.
As can be understood from the above, the PDP optics is advantageous over the prior art systems having a reference beam and a probing beam traversing two separate paths. However, any of these prior art system can be used with the inventive modulated laser so as to obtain the beneficial results of simplified and lower cost laser source, while probing a DUT at a frequency higher than the bandwidth capacity of the photosensor used.
In the embodiment of
As is shown in
As can be understood from the above description, the various embodiments described so far are based on modulating the intensity of the probing CW laser at some frequency and then looking at the reflected beam for the low frequency beat frequency between this modulation and the signal on the DUT. A similar effect, i.e., a low frequency beat signal can be obtained by using an unmodulated CW laser beam, but modulating the gain of the detector instead. This is shown by the embodiment of FIG. 16. In
While the invention has been described with reference to particular embodiments thereof, it is not limited to those embodiments. Specifically, various variations and modifications may be implemented by those of ordinary skill in the art without departing from the invention's spirit and scope, as defined by the appended claims. Additionally, all of the above-cited prior art references are incorporated herein by reference.
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|17 mai 2006||AS||Assignment|
Owner name: CREDENCE SYSTEMS CORPORATION, CALIFORNIA
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