|Numéro de publication||US8170225 B2|
|Type de publication||Octroi|
|Numéro de demande||US 12/030,806|
|Date de publication||1 mai 2012|
|Date de dépôt||13 févr. 2008|
|Date de priorité||14 févr. 2007|
|État de paiement des frais||Payé|
|Autre référence de publication||EP1959158A1, US20080197550|
|Numéro de publication||030806, 12030806, US 8170225 B2, US 8170225B2, US-B2-8170225, US8170225 B2, US8170225B2|
|Cessionnaire d'origine||Integrated Dynamics Engineering Gmbh|
|Exporter la citation||BiBTeX, EndNote, RefMan|
|Citations de brevets (45), Citations hors brevets (1), Référencé par (2), Classifications (13), Événements juridiques (2)|
|Liens externes: USPTO, Cession USPTO, Espacenet|
The invention relates to a method for adapting a vibration isolation system as well as to a vibration isolation system.
Vibration isolation systems are known. Thus for example, DE 698 17 750 T2 (Inventors Erik Loopstra, Peter Heiland) shows a vibration isolation system, which is designed for supporting a lithography device. Therein, the load to be supported, which typically comprises a table and components like production equipment placed thereon, is mounted on air bearings.
For improving the vibration isolation, so-called active vibration isolation systems provide sensors and actuators, by which a selective counteracting control is made possible. In doing so, actuators of the vibration isolation system are energized and act against vibrations, which may act on to the system from exterior or may be generated by the load to be supported.
Especially in the semiconductor industry, with increasing miniaturisation of the components, the requirements for such vibration isolation systems are steadily increasing.
It is particularly a matter of low-frequency adjusted (<1 Hz) vibration isolation systems to be used in the lithography, with steppers, immersion systems and the like, particularly also such which have a very low horizontal stiffness.
According to methods known from practical experience for designing vibration isolation systems, the features of the system are characterized independently from external conditions by measuring certain system parameters and features with defined mechanical scenarios. The feature being most important for a vibration isolation system is the isolation, thus the transfer function between floor vibration and mass vibration.
But also, impacts of sound waves on material are known (Casimir effect, see “An acoustic Casimir effect”, Andres Larraza and Bruce Denardo, Phys. Lett. A 348, 151-155 !998)), which are of importance for vibration isolation systems.
These impacts are not or not sufficiently taken into consideration in case of known vibration isolation systems and of methods for designing vibration isolation systems respectively.
It is an object of the invention to provide a method for adapting a vibration isolation system, with which the isolation effect is improved.
Particularly, it is an object of the invention to reduce vibrations induced by environmental noise.
It is a further object of the invention to reduce perturbing effects, such as occurring from amplification of induced vibrations by adjoining walls.
The object of the invention is already achieved by a method for adapting a vibration isolation system as well as by a vibration isolation system according to one of the independent claims.
Pursuant to a method according to the invention for adapting a vibration isolation system, the environment, into which the vibration isolation system is or will be brought, is identified. In doing so, particularly, shape, material, mass and/or distance of the compounds, like walls, floors or sound sources, surrounding the vibration isolation system are determined.
On base of the determined boundary conditions, constructive measures for the vibration isolation system and/or the environment to reduce environmental impacts are identified and carried out. Therefore, the environment is taken into account, when designing the vibration isolation system. In doing so, the constructive measures may relate to the vibration isolation system as well as to the environment.
Particularly, it is provided to furnish the compounds surrounding the vibration isolation system, especially walls, at least in sections with soundproof material. By doing so, resonance effects, which affect the properties of the vibration isolation system, may be reduced.
When doing so, resonance volumes, which are particularly generated by plane-parallel surface areas, are detected and appropriate measures such as structuring the walls or furnishing with sound-proof material are carried out, in order to eliminate the resonance volumes.
It became clear that in a lot of cases the very application of a structure, for example a comb-shaped structure, is sufficient to reduce resonance effects to a level, which does not cause a noteworthy affect on the vibration isolation system.
Furthermore, the constructive measures comprise the elimination of plane-parallel surface-areas in the room itself and/or between the vibration isolation system and the room. It became clear that particularly a resonance volume, which is formed between the lower side of a vibration isolated mounted table and the floor, causes perturbing effects. Such a resonance volume may be eliminated in a particularly easy manner by structuring the floor and/or the table to be mounted vibration isolated.
It is further provided to furnish at least one component of the vibration isolation system with a structured surface for reducing any flow resistance. By doing so, particularly disturbances caused by air motions, for example by air conditioning, may be reduced. It is particularly provided to structure the base stage, on which for example a component to be isolated is arranged.
Furthermore, for reducing the disturbances by sound, it is provided that at least one loudspeaker is arranged in the surrounding of the vibration isolation system, which loudspeaker has an active control. Preferably, the active control is connected with at least one vibration sensor, which detects vibrations of a load to be isolated. By doing so, sound waves due to vibrations of the systems may be reduced by means of the active control of the loudspeaker.
Additionally or alternatively, the active control may be designed for reducing environmental sound.
Furthermore, the number of plane-parallel surface areas, which may cause resonance effects, may be reduced by roundings and/or openings in the base stage or in further components of the vibration isolation system.
It can be measured that the behaviour of vibration isolation systems depends on the surrounding geometry. Particularly, the isolation effect may be affected, if unfavourable factors of “external” components or items exist. Therefore, it became clear that a vibration isolation system is not exclusively characterized by factors inherent to the system. In fact, it depends on how the moving masses and surface areas act with respect to each other. A system near to a wall will act in another manner than one in a large room. But also the arrangement of surface areas of the vibration isolation system itself, relatively to fixed surface areas may induce forces (Casimir effect) in case of a noisy environment (semi-conductor production plants).
In case of motions of a system, the air space 5 between the base mass and the floor becomes larger and smaller depending how and with which frequency the system moves. If base mass and floor are plane-parallel, outwards only the path to the edge of the mass is left to the air. The construction of the lower side of the base mass has decisive influence on the air flow direction and intensity. When doing so, one should better stay with sound particle velocity variations or pressure variations and the analogy to acoustics. But the likeness of flow obtrude itself due to the low frequencies (<300 Hz).
Therefore, in the usual case of plane-parallel surface areas (base mass and floor), the property of the surface areas, as well as their distance from each other as well as the borders matter. In analogy to a Helmholtz resonator in acoustics (with which air oscillates in a bottleneck and the volume of the bottle acts as stiffness), here the frictional losses at the surface areas, as well as the involved volumes (at the exit surface areas and in the interior) may lead to an additional stiffness, which considerably affects the isolation properties of the system. Though, clear resonance-like effects may arise, which destroy or considerably lower the isolation effect. If the distance of the surface areas is large compared to the surface area itself, this effect becomes less meaningful. By using constructive measures in the base mass, this effect may be avoided. Additional openings in the middle of the surfaces or lowering the flow resistance. minimize the impact of this effect.
In other cases, the volume of the mass to be isolated itself is the source of air displacements. Since those masses may be quite voluminous, the masses of air moved together with the mass to be isolated are also not small. Therefore, the constructive forms in the surrounding of the system (and of the moved mass) become more important, because they may hinder the air flow.
This effect as well as the effect mentioned above may also be argued by means of the radiation resistance. If one imagines the plane-parallel tables and the mass of the system respectively (the assembly) to be a source of acoustic radiation, this sees a radiation impedance. This affects the source so that the source is affected in its movement. Therefore, it can be shown by means of this argumentation that the behaviour of the system may be influenced by constructive design of the environment.
So for example,
Furthermore, the invention relates to minimizing the Casimir effect by constructive changes of surface areas against each other to minimize the directed induction of forces.
When qualifying and designing vibration isolation systems, the environment is involved.
The invention shows constructive measures around an existing isolation system (or in its proximate vicinity), which measures lead to the result that the feedback effect on it is minimized by
Or by a vibration isolation system, taking into account the above mentioned measures.
Furthermore, the invention shows constructive measure to lower force induction in case of noisy environments (Casimir effect), by minimizing plane-parallel surface areas with the environment.
Particularly, the invention relates to:
The invention shall be explained in more detail by means of the drawings
With the vibration isolation system 10 according to
With the vibration isolation system 10 according to
|Brevet cité||Date de dépôt||Date de publication||Déposant||Titre|
|US2994400 *||29 déc. 1955||1 août 1961||Heller Aaron||Anechoic tank lining|
|US3132715 *||18 mai 1962||12 mai 1964||Ferranti Ltd||Noise reducing enclosures|
|US4146112 *||31 oct. 1977||27 mars 1979||General Electric Company||Sound reducing baffle for electrical apparatus|
|US4527371 *||15 juin 1982||9 juil. 1985||Ifm-Akustikbyran Ab||Structural damping|
|US4733750 *||11 févr. 1987||29 mars 1988||Kohler Co.||Acoustic enclosure for marine engine generator set|
|US5117642 *||14 déc. 1990||2 juin 1992||Kabushiki Kaisha Toshiba||Low noise refrigerator and noise control method thereof|
|US5130948 *||16 mars 1990||14 juil. 1992||Gunther Laukien||Method and apparatus for reducing acoustic emission from submerged submarines|
|US5135079 *||28 févr. 1991||4 août 1992||Kabushiki Kaisha Toshiba||Noise prevention apparatus for a cable winch elevator|
|US5151018 *||31 juil. 1990||29 sept. 1992||Copeland Corporation||Sound attenuation chamber|
|US5251863 *||12 août 1992||12 oct. 1993||Noise Cancellation Technologies, Inc.||Active force cancellation system|
|US5331567 *||22 août 1991||19 juil. 1994||The University Of Colorado Foundation, Inc.||Pyramidal absorber having multiple backing layers providing improved low frequency response|
|US5407330 *||14 sept. 1993||18 avr. 1995||Mangar International Limited||Air pump apparatus with vibration and sound reducing housing means|
|US5414775 *||26 mai 1993||9 mai 1995||Noise Cancellation Technologies, Inc.||Noise attenuation system for vibratory feeder bowl|
|US5502869 *||27 oct. 1994||2 avr. 1996||Noise Cancellation Technologies, Inc.||High volume, high performance, ultra quiet vacuum cleaner|
|US5508518||3 mai 1995||16 avr. 1996||International Business Machines Corporation||Lithography tool with vibration isolation|
|US5692053 *||8 oct. 1992||25 nov. 1997||Noise Cancellation Technologies, Inc.||Active acoustic transmission loss box|
|US5710533 *||31 juil. 1995||20 janv. 1998||General Electric Company||Electrical transformer with reduced fan noise|
|US5734246 *||16 mai 1995||31 mars 1998||The Aerospace Corporation||Active piezo-electric vibration isolation and directional systems|
|US5811821 *||9 août 1996||22 sept. 1998||Park Scientific Instruments||Single axis vibration reducing system|
|US5823467 *||1 avr. 1997||20 oct. 1998||Mcdonnell Douglas Corp||Passive damping wedge|
|US5881990 *||11 juil. 1997||16 mars 1999||Isuzu Ceramics Research Institute Co., Ltd.||Vibration and sound isolation device for a cogeneration system with an engine|
|US5917919||3 déc. 1996||29 juin 1999||Rosenthal; Felix||Method and apparatus for multi-channel active control of noise or vibration or of multi-channel separation of a signal from a noisy environment|
|US6002987||26 mars 1997||14 déc. 1999||Nikon Corporation||Methods to control the environment and exposure apparatus|
|US6119808 *||19 août 1998||19 sept. 2000||Steedman; James B.||Transportable acoustic screening chamber for testing sound emitters|
|US6132183 *||23 nov. 1998||17 oct. 2000||Carrier Corporation||Compressor mounting|
|US6226075 *||6 juil. 1998||1 mai 2001||Asm Lithography||Supporting device provided with a gas spring with a gas bearing, and lithographic device provided with such supporting devices|
|US6371240 *||23 mai 2000||16 avr. 2002||Austin Acoustic Systems, Inc.||Anechoic chamber|
|US6375147 *||13 sept. 1999||23 avr. 2002||General Electric Company||Vibration isolation apparatus for MR imaging system|
|US6449934 *||19 mai 2000||17 sept. 2002||Ransomes America Corporation||Electric riding mower with motor generator set and noise abatement|
|US6450288||28 juil. 2000||17 sept. 2002||Nikon Corporation||Air-conditioning apparatus, partition and exposure apparatus|
|US6477908||7 juil. 2000||12 nov. 2002||Canon Kabushiki Kaisha||Pedestal with vibration sensor, and exposure apparatus having the same|
|US6543741 *||26 déc. 2001||8 avr. 2003||Carrier Corporation||Vibration isolation for a transversely mounted compressor|
|US6810989 *||15 nov. 2000||2 nov. 2004||Bosch Rexroth Ag||System for insulating the sound emanating from a motor/pump unit|
|US6825635 *||22 mars 2002||30 nov. 2004||Canon Kabushiki Kaisha||Vibration isolator, device manufacturing apparatus and method, semiconductor manufacturing plant and method of maintaining device manufacturing apparatus|
|US6845841 *||5 juil. 2002||25 janv. 2005||Aluralex Acoustics||Acoustic isolator|
|US7726452 *||2 juin 2005||1 juin 2010||Technical Manufacturing Corporation||Systems and methods for active vibration damping|
|US7783055 *||30 nov. 2006||24 août 2010||Silentium Ltd.||Soundproof climate controlled rack|
|US7942379 *||17 mai 2007||17 mai 2011||Integrated Dynamics Engineering Gmbh||Active vibration isolation system with a combined position actuator|
|US20030058417||7 nov. 2002||27 mars 2003||Nikon Corporation||Environmental control chamber|
|US20030168574 *||12 juil. 2001||11 sept. 2003||Katsuhide Watanabe||Vibration isolation apparatus using magnetic levitation devices|
|US20040079173 *||28 oct. 2002||29 avr. 2004||The Curators Of The University Of Missouri||Torque ripple sensor and mitigation mechanism|
|US20070235276 *||5 avr. 2007||11 oct. 2007||Integrated Dynamics Engineering Gmbh||Active vibration isolation system|
|US20070284794 *||5 juin 2007||13 déc. 2007||Integrated Dynamics Engineering Gmbh||Active vibration isolation system which is more effective against seismic vibration|
|US20080106015 *||5 nov. 2007||8 mai 2008||Aisin Seiki Kabushiki Kaisha||Active vibration reduction system|
|JP2001023881A||Titre non disponible|
|1||"European Office Action for International Application No. EP 08002729.5-1264", May 26, 2011, Publisher: European Patent Office, Published in: EP.|
|Brevet citant||Date de dépôt||Date de publication||Déposant||Titre|
|US9644698 *||8 mars 2013||9 mai 2017||Fraunhofer-Gesellschaft Zur Forderlung Der Angewandten Forschung E.V.||Device for the purpose of influencing the transfer of vibration between two units|
|US20130233998 *||8 mars 2013||12 sept. 2013||Hochschule Darmstadt, University Of Applied Sciences||Device for the purpose of influencing the transfer of vibration between two units|
|Classification aux États-Unis||381/71.1, 381/71.3, 181/207, 248/638|
|Classification internationale||F16F15/03, G10K11/178, G10K1/00, F16F15/00, G10K11/16|
|Classification coopérative||G03F7/709, F16F15/02|
|Classification européenne||F16F15/02, G03F7/70P6F|
|1 mai 2008||AS||Assignment|
Owner name: INTEGRATED DYNAMICS ENGINEERING GMBH, GERMANY
Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:HEILAND, PETER;REEL/FRAME:020888/0634
Effective date: 20080317
|26 oct. 2015||FPAY||Fee payment|
Year of fee payment: 4