US8962483B2 - Interconnection designs using sidewall image transfer (SIT) - Google Patents
Interconnection designs using sidewall image transfer (SIT) Download PDFInfo
- Publication number
- US8962483B2 US8962483B2 US13/799,539 US201313799539A US8962483B2 US 8962483 B2 US8962483 B2 US 8962483B2 US 201313799539 A US201313799539 A US 201313799539A US 8962483 B2 US8962483 B2 US 8962483B2
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- United States
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31144—Etching the insulating layers by chemical or physical means using masks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B10/00—Static random access memory [SRAM] devices
Abstract
Description
Claims (16)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/799,539 US8962483B2 (en) | 2013-03-13 | 2013-03-13 | Interconnection designs using sidewall image transfer (SIT) |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/799,539 US8962483B2 (en) | 2013-03-13 | 2013-03-13 | Interconnection designs using sidewall image transfer (SIT) |
Publications (2)
Publication Number | Publication Date |
---|---|
US20140273474A1 US20140273474A1 (en) | 2014-09-18 |
US8962483B2 true US8962483B2 (en) | 2015-02-24 |
Family
ID=51528985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/799,539 Expired - Fee Related US8962483B2 (en) | 2013-03-13 | 2013-03-13 | Interconnection designs using sidewall image transfer (SIT) |
Country Status (1)
Country | Link |
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US (1) | US8962483B2 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9876017B2 (en) * | 2014-12-03 | 2018-01-23 | Qualcomm Incorporated | Static random access memory (SRAM) bit cells with wordline landing pads split across boundary edges of the SRAM bit cells |
US9806083B2 (en) * | 2014-12-03 | 2017-10-31 | Qualcomm Incorporated | Static random access memory (SRAM) bit cells with wordlines on separate metal layers for increased performance, and related methods |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060024940A1 (en) * | 2004-07-28 | 2006-02-02 | International Business Machines Corporation | Borderless contact structures |
US20070048674A1 (en) * | 2005-09-01 | 2007-03-01 | Wells David H | Methods for forming arrays of small, closely spaced features |
US20090130852A1 (en) * | 2006-04-25 | 2009-05-21 | Micron Technology, Inc. | Process for improving critical dimension uniformity of integrated circuit arrays |
US20130196508A1 (en) * | 2012-01-26 | 2013-08-01 | Globalfoundries Inc. | Methods of Forming SRAM Devices Using Sidewall Image Transfer Techniques |
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2013
- 2013-03-13 US US13/799,539 patent/US8962483B2/en not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060024940A1 (en) * | 2004-07-28 | 2006-02-02 | International Business Machines Corporation | Borderless contact structures |
US20070048674A1 (en) * | 2005-09-01 | 2007-03-01 | Wells David H | Methods for forming arrays of small, closely spaced features |
US20090130852A1 (en) * | 2006-04-25 | 2009-05-21 | Micron Technology, Inc. | Process for improving critical dimension uniformity of integrated circuit arrays |
US20130196508A1 (en) * | 2012-01-26 | 2013-08-01 | Globalfoundries Inc. | Methods of Forming SRAM Devices Using Sidewall Image Transfer Techniques |
Also Published As
Publication number | Publication date |
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US20140273474A1 (en) | 2014-09-18 |
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