US9820056B2 - Acoustic galvanic isolation device - Google Patents
Acoustic galvanic isolation device Download PDFInfo
- Publication number
- US9820056B2 US9820056B2 US14/849,964 US201514849964A US9820056B2 US 9820056 B2 US9820056 B2 US 9820056B2 US 201514849964 A US201514849964 A US 201514849964A US 9820056 B2 US9820056 B2 US 9820056B2
- Authority
- US
- United States
- Prior art keywords
- substrate
- porous silicon
- silicon portion
- lateral dimension
- along
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active, expires
Links
Images
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/02—Details
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Signal Processing (AREA)
- Mechanical Engineering (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Description
n being an integer, and c designating the velocity of acoustic waves in the material(s) of the substrate.
n being an integer and c designating the velocity of sound in the material or the assembly of materials of the substrate in a direction from one transducer network to another. As an example, for fmin=11 MHz, fmax=13 MHz, n=2 and a
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1462598 | 2014-12-17 | ||
FR1462598A FR3030943B1 (en) | 2014-12-17 | 2014-12-17 | ACOUSTIC DEVICE FOR GALVANIC ISOLATION |
Publications (2)
Publication Number | Publication Date |
---|---|
US20160183007A1 US20160183007A1 (en) | 2016-06-23 |
US9820056B2 true US9820056B2 (en) | 2017-11-14 |
Family
ID=52737250
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/849,964 Active 2036-06-21 US9820056B2 (en) | 2014-12-17 | 2015-09-10 | Acoustic galvanic isolation device |
Country Status (4)
Country | Link |
---|---|
US (1) | US9820056B2 (en) |
EP (1) | EP3034183B1 (en) |
CN (2) | CN205566631U (en) |
FR (1) | FR3030943B1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3030943B1 (en) * | 2014-12-17 | 2017-07-21 | St Microelectronics Tours Sas | ACOUSTIC DEVICE FOR GALVANIC ISOLATION |
CN111347221B (en) * | 2020-03-09 | 2021-08-27 | 中科绿谷(深圳)医疗科技有限公司 | Manufacturing process of ultrasonic transducer and ultrasonic transducer |
Citations (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3321648A (en) * | 1964-06-04 | 1967-05-23 | Sonus Corp | Piezoelectric filter element |
US4045767A (en) * | 1972-09-20 | 1977-08-30 | Hitachi, Ltd. | Method of ultrasonic data communication and apparatus for carrying out the method |
US4281299A (en) * | 1979-11-23 | 1981-07-28 | Honeywell Inc. | Signal isolator |
US5361077A (en) * | 1992-05-29 | 1994-11-01 | Iowa State University Research Foundation, Inc. | Acoustically coupled antenna utilizing an overmoded configuration |
US5594705A (en) * | 1994-02-04 | 1997-01-14 | Dynamotive Canada Corporation | Acoustic transformer with non-piezoelectric core |
US6127942A (en) * | 1998-10-27 | 2000-10-03 | The Aerospace Corporation | Ultrasonic power sensory system |
US6625084B1 (en) * | 2002-08-20 | 2003-09-23 | The United States Of America As Represented By The Secretary Of The Navy | System for acoustically passing electrical signals through a hull |
US6791240B2 (en) | 2001-03-20 | 2004-09-14 | Vermon | Ultrasonic transducer apparatus |
US6903578B2 (en) * | 2000-02-14 | 2005-06-07 | Analog Devices, Inc. | Logic isolator |
US20060087199A1 (en) * | 2004-10-22 | 2006-04-27 | Larson John D Iii | Piezoelectric isolating transformer |
US20070085632A1 (en) * | 2005-10-18 | 2007-04-19 | Larson John D Iii | Acoustic galvanic isolator |
US20070164631A1 (en) * | 2004-06-07 | 2007-07-19 | Olympus Corporation | Capacitive micromachined ultrasonic transducer |
US7737807B2 (en) * | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US7791900B2 (en) * | 2006-08-28 | 2010-09-07 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Galvanic isolator |
US7902943B2 (en) * | 2007-04-23 | 2011-03-08 | California Institute Of Technology | Wireless acoustic-electric feed-through for power and signal transmission |
FR2954014A1 (en) | 2009-12-11 | 2011-06-17 | St Microelectronics Tours Sas | Acoustic galvanic insulating device, has medium permitting transmission of acoustic waves and placed between transformation units comprising ultrasonic transducers, where medium comprises insulator |
US8237534B2 (en) * | 2007-05-10 | 2012-08-07 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Miniature transformers adapted for use in galvanic isolators and the like |
US20130135970A1 (en) | 2011-11-25 | 2013-05-30 | Universite Francois Rabelais | Galvanically-Isolated Data Transmission Device |
US20130148472A1 (en) * | 2011-12-07 | 2013-06-13 | Daniel James Kovach | Systems and methods for communicating data through an electromagnetic barrier |
FR2965991B1 (en) * | 2010-10-12 | 2013-07-12 | St Microelectronics Tours Sas | ACOUSTIC DEVICE FOR GALVANIC ISOLATION |
EP3034183A1 (en) * | 2014-12-17 | 2016-06-22 | STMicroelectronics (Tours) SAS | Acoustic device for galvanic isolation |
US9450420B1 (en) * | 2013-06-10 | 2016-09-20 | United States Of America, As Represented By The Secretary Of The Navy | Energy conveyance device |
US9662679B2 (en) * | 2012-05-09 | 2017-05-30 | Kolo Technologies, Inc. | CMUT assembly with acoustic window |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619476A (en) * | 1994-10-21 | 1997-04-08 | The Board Of Trustees Of The Leland Stanford Jr. Univ. | Electrostatic ultrasonic transducer |
US7615834B2 (en) * | 2006-02-28 | 2009-11-10 | The Board Of Trustees Of The Leland Stanford Junior University | Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane |
CN101499512B (en) * | 2009-03-03 | 2010-10-06 | 北京信息科技大学 | Piezoelectric composite material of wide-band transducer |
WO2010122982A1 (en) * | 2009-04-21 | 2010-10-28 | 株式会社日立メディコ | Ultrasonic probe and ultrasonic imaging apparatus |
-
2014
- 2014-12-17 FR FR1462598A patent/FR3030943B1/en not_active Expired - Fee Related
-
2015
- 2015-09-10 US US14/849,964 patent/US9820056B2/en active Active
- 2015-12-15 EP EP15200208.5A patent/EP3034183B1/en active Active
- 2015-12-16 CN CN201521055292.5U patent/CN205566631U/en not_active Withdrawn - After Issue
- 2015-12-16 CN CN201510945487.5A patent/CN105721990B/en active Active
Patent Citations (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3321648A (en) * | 1964-06-04 | 1967-05-23 | Sonus Corp | Piezoelectric filter element |
US4045767A (en) * | 1972-09-20 | 1977-08-30 | Hitachi, Ltd. | Method of ultrasonic data communication and apparatus for carrying out the method |
US4281299A (en) * | 1979-11-23 | 1981-07-28 | Honeywell Inc. | Signal isolator |
US5361077A (en) * | 1992-05-29 | 1994-11-01 | Iowa State University Research Foundation, Inc. | Acoustically coupled antenna utilizing an overmoded configuration |
US5594705A (en) * | 1994-02-04 | 1997-01-14 | Dynamotive Canada Corporation | Acoustic transformer with non-piezoelectric core |
US6127942A (en) * | 1998-10-27 | 2000-10-03 | The Aerospace Corporation | Ultrasonic power sensory system |
US6903578B2 (en) * | 2000-02-14 | 2005-06-07 | Analog Devices, Inc. | Logic isolator |
US6791240B2 (en) | 2001-03-20 | 2004-09-14 | Vermon | Ultrasonic transducer apparatus |
US6625084B1 (en) * | 2002-08-20 | 2003-09-23 | The United States Of America As Represented By The Secretary Of The Navy | System for acoustically passing electrical signals through a hull |
US20070164631A1 (en) * | 2004-06-07 | 2007-07-19 | Olympus Corporation | Capacitive micromachined ultrasonic transducer |
US20060087199A1 (en) * | 2004-10-22 | 2006-04-27 | Larson John D Iii | Piezoelectric isolating transformer |
US7737807B2 (en) * | 2005-10-18 | 2010-06-15 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Acoustic galvanic isolator incorporating series-connected decoupled stacked bulk acoustic resonators |
US20070085632A1 (en) * | 2005-10-18 | 2007-04-19 | Larson John D Iii | Acoustic galvanic isolator |
US7791900B2 (en) * | 2006-08-28 | 2010-09-07 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Galvanic isolator |
US8385028B2 (en) * | 2006-08-28 | 2013-02-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Galvanic isolator |
US7902943B2 (en) * | 2007-04-23 | 2011-03-08 | California Institute Of Technology | Wireless acoustic-electric feed-through for power and signal transmission |
US8237534B2 (en) * | 2007-05-10 | 2012-08-07 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Miniature transformers adapted for use in galvanic isolators and the like |
FR2954014A1 (en) | 2009-12-11 | 2011-06-17 | St Microelectronics Tours Sas | Acoustic galvanic insulating device, has medium permitting transmission of acoustic waves and placed between transformation units comprising ultrasonic transducers, where medium comprises insulator |
FR2965991B1 (en) * | 2010-10-12 | 2013-07-12 | St Microelectronics Tours Sas | ACOUSTIC DEVICE FOR GALVANIC ISOLATION |
US8791624B2 (en) | 2010-10-12 | 2014-07-29 | Stmicroelectronics (Tours) Sas | Acoustic galvanic isolation device |
US20130135970A1 (en) | 2011-11-25 | 2013-05-30 | Universite Francois Rabelais | Galvanically-Isolated Data Transmission Device |
FR2983349B1 (en) * | 2011-11-25 | 2013-12-13 | St Microelectronics Tours Sas | DEVICE FOR TRANSMITTING GALVANIC ISOLATION INFORMATION |
US9537582B2 (en) * | 2011-11-25 | 2017-01-03 | Stmicroelectronics (Tours) Sas | Galvanically-isolated data transmission device |
US20130148472A1 (en) * | 2011-12-07 | 2013-06-13 | Daniel James Kovach | Systems and methods for communicating data through an electromagnetic barrier |
US9662679B2 (en) * | 2012-05-09 | 2017-05-30 | Kolo Technologies, Inc. | CMUT assembly with acoustic window |
US9450420B1 (en) * | 2013-06-10 | 2016-09-20 | United States Of America, As Represented By The Secretary Of The Navy | Energy conveyance device |
EP3034183A1 (en) * | 2014-12-17 | 2016-06-22 | STMicroelectronics (Tours) SAS | Acoustic device for galvanic isolation |
Also Published As
Publication number | Publication date |
---|---|
EP3034183A1 (en) | 2016-06-22 |
CN105721990B (en) | 2019-07-05 |
FR3030943A1 (en) | 2016-06-24 |
CN205566631U (en) | 2016-09-07 |
FR3030943B1 (en) | 2017-07-21 |
EP3034183B1 (en) | 2019-02-06 |
CN105721990A (en) | 2016-06-29 |
US20160183007A1 (en) | 2016-06-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10576500B2 (en) | Piezoelectric micro-machined ultrasonic transducer (PMUT) and method for manufacturing the PMUT | |
US11292097B2 (en) | Support structure and method of forming a support structure | |
US10560065B2 (en) | Piezoelectric resonator manufacturing method and piezoelectric resonator | |
US7646133B2 (en) | Asymmetric membrane cMUT devices and fabrication methods | |
US7612483B2 (en) | Harmonic cMUT devices and fabrication methods | |
US10700262B2 (en) | Piezoelectric device and production method for piezoelectric device | |
Atalar et al. | Rayleigh–Bloch waves in CMUT arrays | |
US9820056B2 (en) | Acoustic galvanic isolation device | |
KR20110025447A (en) | High power ultrasonic transducer | |
US7800189B2 (en) | Microfabricated capacitive ultrasonic transducer | |
JP2009082612A (en) | Ultrasonic probe and piezoelectric transducer | |
US20130016587A1 (en) | Ultrasonic transducer unit and ultrasonic probe | |
Cetin et al. | Diamond-based capacitive micromachined ultrasonic transducers in immersion | |
US10099253B2 (en) | Transducer with mesa | |
Anisimkin et al. | Aspects of using acoustic plate modes of higher orders for acoustoelectronic sensors | |
JP6833544B2 (en) | Capacitive transducer and its manufacturing method | |
McLean et al. | Interdigital capacitive micromachined ultrasonic transducers for sensing and pumping in microfluidic applications | |
JP2022546388A (en) | Optimization of acoustic membrane arrays | |
Bassignot et al. | New radio-frequency resonators based on periodically poled lithium niobate thin film and ridge structures | |
US20220280971A1 (en) | Ultrasound transducer manufacturing method | |
LaMura et al. | An Ultrasonic Flextensional Array for Acoustic Emission Techniques on Concrete Structures | |
JP2012165308A (en) | Ultrasonic transducer | |
Mansoori et al. | Electrode Design Based on Strain Mode Shapes for Configurable PMUTs | |
RU114382U1 (en) | ACOUSTOPTIC BREGG ELEMENT | |
JP6471242B2 (en) | MEMS device and manufacturing method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: STMICROELECTRONICS (TOURS) SAS, FRANCE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:NGO, SOPHIE;REEL/FRAME:036531/0629 Effective date: 20150818 Owner name: UNIVERSITE FRANCOIS RABELAIS, FRANCE Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:CERTON, DOMINIQUE;ALQUIER, DANIEL;REEL/FRAME:036531/0695 Effective date: 20150908 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 4 |