USD403334S - Shield and cover for target of sputter coating apparatus - Google Patents
Shield and cover for target of sputter coating apparatus Download PDFInfo
- Publication number
- USD403334S USD403334S US29/082,713 US8271398F USD403334S US D403334 S USD403334 S US D403334S US 8271398 F US8271398 F US 8271398F US D403334 S USD403334 S US D403334S
- Authority
- US
- United States
- Prior art keywords
- shield
- target
- cover
- coating apparatus
- sputter coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a perspective view of a shield and cover for target of sputter coating apparatus embodying the design of the invention;
FIG. 2 is a top plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;
FIG. 3 is a bottom plan view of the shield and cover for target of sputter coating apparatus of FIG. 1;
FIG. 4 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the bottom of FIG. 2;
FIG. 5 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the top of FIG. 2;
FIG. 6 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the left side of FIG. 2;
FIG. 7 is a side elevation view of the shield and cover for target of sputter coating apparatus as seen from the right side of FIG. 2;
FIG. 8 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 8--8 of FIG. 2; and,
FIG. 9 is a cross-sectional view of the shield and cover for target of sputter coating apparatus taken along the line 9--9 of FIG. 2.
Claims (1)
- The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/082,713 USD403334S (en) | 1998-01-27 | 1998-01-27 | Shield and cover for target of sputter coating apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/082,713 USD403334S (en) | 1998-01-27 | 1998-01-27 | Shield and cover for target of sputter coating apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD403334S true USD403334S (en) | 1998-12-29 |
Family
ID=71606801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/082,713 Expired - Lifetime USD403334S (en) | 1998-01-27 | 1998-01-27 | Shield and cover for target of sputter coating apparatus |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USD403334S (en) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040251130A1 (en) * | 2003-06-12 | 2004-12-16 | Applied Materials, Inc. | Method and apparatus for controlling darkspace gap in a chamber |
| US7772860B2 (en) | 1999-05-27 | 2010-08-10 | Nanonexus, Inc. | Massively parallel interface for electronic circuit |
| US7872482B2 (en) | 2000-05-23 | 2011-01-18 | Verigy (Singapore) Pte. Ltd | High density interconnect system having rapid fabrication cycle |
| US7952373B2 (en) * | 2000-05-23 | 2011-05-31 | Verigy (Singapore) Pte. Ltd. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
| US20160033070A1 (en) * | 2014-08-01 | 2016-02-04 | Applied Materials, Inc. | Recursive pumping member |
| USD904066S1 (en) * | 2019-09-19 | 2020-12-08 | Georgia-Pacific LLC | Core plug |
| USD933726S1 (en) * | 2020-07-31 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a semiconductor processing chamber |
| USD933725S1 (en) * | 2019-02-08 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a substrate processing chamber |
| USD934315S1 (en) * | 2020-03-20 | 2021-10-26 | Applied Materials, Inc. | Deposition ring for a substrate processing chamber |
| USD941371S1 (en) * | 2020-03-20 | 2022-01-18 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| USD941372S1 (en) * | 2020-03-20 | 2022-01-18 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| USD942516S1 (en) * | 2019-02-08 | 2022-02-01 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| US11581166B2 (en) | 2020-07-31 | 2023-02-14 | Applied Materials, Inc. | Low profile deposition ring for enhanced life |
-
1998
- 1998-01-27 US US29/082,713 patent/USD403334S/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7772860B2 (en) | 1999-05-27 | 2010-08-10 | Nanonexus, Inc. | Massively parallel interface for electronic circuit |
| US7884634B2 (en) | 1999-05-27 | 2011-02-08 | Verigy (Singapore) Pte, Ltd | High density interconnect system having rapid fabrication cycle |
| US7872482B2 (en) | 2000-05-23 | 2011-01-18 | Verigy (Singapore) Pte. Ltd | High density interconnect system having rapid fabrication cycle |
| US7952373B2 (en) * | 2000-05-23 | 2011-05-31 | Verigy (Singapore) Pte. Ltd. | Construction structures and manufacturing processes for integrated circuit wafer probe card assemblies |
| US20040251130A1 (en) * | 2003-06-12 | 2004-12-16 | Applied Materials, Inc. | Method and apparatus for controlling darkspace gap in a chamber |
| US7097744B2 (en) | 2003-06-12 | 2006-08-29 | Applied Materials, Inc. | Method and apparatus for controlling darkspace gap in a chamber |
| US20160033070A1 (en) * | 2014-08-01 | 2016-02-04 | Applied Materials, Inc. | Recursive pumping member |
| USD933725S1 (en) * | 2019-02-08 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a substrate processing chamber |
| USD942516S1 (en) * | 2019-02-08 | 2022-02-01 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| USD904066S1 (en) * | 2019-09-19 | 2020-12-08 | Georgia-Pacific LLC | Core plug |
| USD934315S1 (en) * | 2020-03-20 | 2021-10-26 | Applied Materials, Inc. | Deposition ring for a substrate processing chamber |
| USD941371S1 (en) * | 2020-03-20 | 2022-01-18 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| USD941372S1 (en) * | 2020-03-20 | 2022-01-18 | Applied Materials, Inc. | Process shield for a substrate processing chamber |
| USD933726S1 (en) * | 2020-07-31 | 2021-10-19 | Applied Materials, Inc. | Deposition ring for a semiconductor processing chamber |
| US11581166B2 (en) | 2020-07-31 | 2023-02-14 | Applied Materials, Inc. | Low profile deposition ring for enhanced life |
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