USD496008S1 - Exhaust ring for manufacturing semiconductors - Google Patents

Exhaust ring for manufacturing semiconductors Download PDF

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Publication number
USD496008S1
USD496008S1 US29/183,538 US18353803F USD496008S US D496008 S1 USD496008 S1 US D496008S1 US 18353803 F US18353803 F US 18353803F US D496008 S USD496008 S US D496008S
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manufacturing semiconductors
exhaust ring
view
ring
exhaust
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US29/183,538
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Syuichi Takahashi
Yasuharu Sasaki
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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FIG. 1: is a front/top/left-side perspective view of an exhaust ring for manufacturing semiconductors showing our new design;
FIG. 2: is a front elevational view thereof;
FIG. 3: is a cross-sectional view taken along line 3—3 in FIG. 2;
FIG. 4: is an enlarged, partial, cross-sectional view taken along line 4—4 in FIG. 3;
FIG. 5: is a rear elevational view thereof;
FIG. 6: is a top plan view thereof;
FIG. 7: is a bottom plan view thereof; and,
FIG. 8: is a right-side elevational view thereof, the left-side elevational view being a mirror image and, therefore, not shown.
The exhaust ring for manufacturing semiconductors is used in a vacuum vessel for manufacturing semiconductors. The through holes in the central band of the exhaust ring for manufacturing semiconductors shown in the front view are passageways for gas. The cross-sectional design of the ring shows that the holes reduce as much as possible the occurrence of a decline in gas flow caused by the adherence of deposits during use. The outer diameter of the exhaust ring for manufacturing semiconductors is about 580 millimeters and the internal diameter is about 400 millimeters It is made of anodized aluminum and other materials.

Claims (1)

  1. We claim the ornamental design for exhaust ring for manufacturing semiconductors, as shown and described.
US29/183,538 2002-12-12 2003-06-12 Exhaust ring for manufacturing semiconductors Expired - Lifetime USD496008S1 (en)

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JP2002034494 2002-12-12
JP2002-034494 2002-12-12

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USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
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