USRE27289E - Magnetic positioning device - Google Patents

Magnetic positioning device Download PDF

Info

Publication number
USRE27289E
USRE27289E US27289DE USRE27289E US RE27289 E USRE27289 E US RE27289E US 27289D E US27289D E US 27289DE US RE27289 E USRE27289 E US RE27289E
Authority
US
United States
Prior art keywords
magnets
axis
along
members
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xynetics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of USRE27289E publication Critical patent/USRE27289E/en
Assigned to XYNETICS, INC. reassignment XYNETICS, INC. ASSIGNMENT OF ASSIGNORS INTEREST. Assignors: SAWYER BRUCE A
Expired legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R17/00Measuring arrangements involving comparison with a reference value, e.g. bridge
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B43WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
    • B43LARTICLES FOR WRITING OR DRAWING UPON; WRITING OR DRAWING AIDS; ACCESSORIES FOR WRITING OR DRAWING
    • B43L13/00Drawing instruments, or writing or drawing appliances or accessories not otherwise provided for
    • B43L13/02Draughting machines or drawing devices for keeping parallelism
    • B43L13/022Draughting machines or drawing devices for keeping parallelism automatic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B43WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
    • B43LARTICLES FOR WRITING OR DRAWING UPON; WRITING OR DRAWING AIDS; ACCESSORIES FOR WRITING OR DRAWING
    • B43L13/00Drawing instruments, or writing or drawing appliances or accessories not otherwise provided for
    • B43L13/02Draughting machines or drawing devices for keeping parallelism
    • B43L13/022Draughting machines or drawing devices for keeping parallelism automatic
    • B43L13/024Drawing heads therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B43WRITING OR DRAWING IMPLEMENTS; BUREAU ACCESSORIES
    • B43LARTICLES FOR WRITING OR DRAWING UPON; WRITING OR DRAWING AIDS; ACCESSORIES FOR WRITING OR DRAWING
    • B43L5/00Drawing boards
    • B43L5/005Drawing boards with magnetic action
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K15/00Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers
    • G06K15/22Arrangements for producing a permanent visual presentation of the output data, e.g. computer output printers using plotters
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K2201/00Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18Machines moving with multiple degrees of freedom

Definitions

  • ABSTRACT OF THE DISCLOSURE A magnetic system for moving a marking tool over a surface for plotting curves, graphs and other data.
  • a head incorporating two parallel sets of magnets along each of two perpendicular axes.
  • a plate having a grid of zones of magnetic material.
  • Driving circuitry for selectively energizing magnet coils in response to input stepping signals for moving the head over the plate along each axis.
  • This invention relates to plotters and to drive systems suitable for use with plotters and other positioning devices, and is an improvement on the system of my co-pending application entitled Magnetic Positioning Device, Ser. No. 554,181, filed May 31, 1966, now Patent No. 3,376,578.
  • My aforesaid co-pending application discloses a magnetic stepping system incorporating a head for moving along a plate and carrying a marker for plotting data on a sheet of paper or the like disposed on the plate.
  • Sets of magnets are disposed in the head and each set includes a plurality of individual magnets, typically three, providing what can be referred to as a three-phase system. It is the object of the present invention to provide a twophase polarized system which appears to have a number of advantages over three-phase and higher phase systems.
  • a two-phase system utilizes two magnets in each set and, with bidirectional currents in each coil, operates as a four-phase system.
  • the two-phase system of the present invention permits a simple coil and core arrangement.
  • the two-phase system utilizes a permanent polarizing or bias flux such as can be supplied by permanent magnets, resulting in a constant holding force. Smaller coil losses can be obtained because the permanent magnets supply a portion of the energy required in the stepping operation. A shorter time constant can be obtained because the quadrature or transverse fiux paths in the cores can be designed to operate well into saturation thereby lowering the incremental inductance.
  • the two-phase system permits utilization of acceleration and braking currents in the otherwise nonenergized coils during a stepping operation so that all coils are working substantially all of the time.
  • FIGURE 1 is a top view of a chart plotter incorporating a preferred embodiment of the invention
  • FIGURE 2 is a perspective view from the bottom of the head of FIGURE 1, with the marking pen omitted;
  • FIGURE 3 is a perspective view from the top of the head, with the top cover removed;
  • FIGURE 4 is an enlarged sectional view taken along the line 44 of FIGURE 2;
  • FIGURE 5 is a perspective view of a frame shown inverted
  • FIGURE 6 is a perspective view of a coil and pole piece assembly
  • FIGURE 7 is a perspective view of a portion of the housing
  • FIGURE 8 is an enlarged partial sectional view taken along the line 8-8 of FIGURE 1;
  • FIGURE 9 is an enlarged top view of the marking pen of FIGURE 1;
  • FIGURE 10 is a sectional view taken along the line- 1010 of FIGURE 9';
  • FIGURE 11 is a diagrammatical view similar to that of FIGURE 4 illustrating the operation of the system
  • FIGURE 12 is a view similar to that of FIGURE 11 illustrating an alternative construction for obtaining the bias flux
  • FIGURE 13 is an electrical schematic of a preferred circuitry for driving the system.
  • FIGURE 14 is a timing diagram of the operation of the circuitry of FIGURE 13.
  • the system includes a plate member 20 and a head member 21.
  • the upper surface of the plate member carries a grid of nonmagnetic material enclosing zones of magnetic material, with the grid defining first and second axes which normally are orthogonal. These axes are sometimes referred to as the x-axis and the y-axis.
  • the plate member 20 may be a sheet 24 of ferromagnetic material such as iron, having a plurality of parallel grooves 25 formed therein, with one set of grooves normal to the x-axis and another set of grooves normal to the y-axis (FIGURE 11). Zones or teeth of magnetic material 26 project upwardly between the grooves.
  • the grooves are at right angles to each other and are equally spaced along both axes, leaving the projecting zones of magnetic material of square cross section.
  • the grooves or slot 25 are .020 inch Wide and .020 inch deep and are spaced .040 inch apart between center lines along both axes.
  • the grooves may be left open with the air serving as a nonmagnetic material, but it is preferred to fill the grooves with a plastic or other nonmagnetic solids to provide a smooth upper surface for the plate member.
  • a sheet of paper 28 rests on the plate member 20 and the head member moves over the sheet 28.
  • Means may be provided for holding the paper in position on the plate member and one such means is illustrated in my aforesaid co-pending application.
  • the head member includes four sets of magnets 30, 31, 32, 33 mounted in a housing or base 34 with the pole faces of the magnets at the surface of the base.
  • the base 34 is an aluminum or plastic plate having four apertures 35 therein for receiving the magnet sets and a central aperture 36 for an air bearing screw, to be described herein below.
  • the magnet sets 30, 32 are disposed parallel to one of the axes of the grid, say the x-axis, and are utilized to propel and position the head member along the x-axis.
  • the sets 31 and 33 are utilized to propel and position the head member along the other axis, typically the y-axis.
  • Each set comprises two magnets and each magnet has two pole pieces.
  • the magnet set 30 includes a frame 40 and pole pieces 41, 42, 43, 44 (FIGURE 4).
  • Each of the pole pieces 4144 comprises a stack of lamination stampings and two pole pieces 41, 42 with a coil 46 therein are shown in FIGURE 6.
  • the top view of the frame 40 is shown in FIGURE 3 and a bottom view in FIGURE 5.
  • Each of the pole pieces 41, 42 with a coil 46 therein are shown in upper corner for slidably engaging corresponding grooves in the frame 40.
  • a U-shaped yoke 47 is afiixed to a rib 48 of the frame 40 by a screw and a similar yoke 49 is affixed to a rib 50 of the frame 40.
  • the frame 40 is made of a nonmagnetic material such as aluminum and in the preferred embodiment of the yokes 47 and 49 are permanent magnets which provides a bias or polarizing flux in the associated pole pieces.
  • each of the pole pieces 41-44 has One or more ridges of magnetic material and preferably is provided with a plurality of ridges of the same width and spacing as the zones 26 of magnetic material in the plate member 24.
  • the magnet sets are positioned in the corresponding apertures in the base 34 and are held in place by screws 52.
  • the openings 53 in the frame 40 (FIGURE and the channel or relieved section 54 in the frame 40 (-FIG- UR-E 8) provide space for wiring.
  • Filler blocks 56 may be disposed at the four corners of the head to provide a regular outline with the blocks held in place by a band 57 and screws (not shown).
  • a top cover plate 58 may be positioned over the magnet sets for appearance and :leanliness.
  • Means may be provided for spacing the head member from the plate member to prevent direct contact between the members or between the head member and the paper resting on the plate member and thereby eliminate fric- :ion forces between the two members.
  • Various arrangements may be used including fluid bearings, wheels or )alls, and the air bearing described in my aforesaid copending application is utilized in the head member dis- :losed in this application.
  • a conduit for a supply of air mder pressure and a cable for the electrical connection may be included in a control line 60 connected to the head member 21.
  • the air conduit of the control line terninates on a tube 61 held in place by a screw 62 posizioned in the aperture 36 of the base 34 (FIGURE 8).
  • passage 63 in the screw 62 provides communication with four passages 64 radiating outward from the screw :hrough the base 34 and terminating in outlet openings 55 (FIGURE 2).
  • a gasket 66 provides a seal between he tube 61 and the base, and another gasket 67 provides 1 seal between the screw 62 and the base.
  • a tool or marker carrier 70 nay be mounted on the head member 21 at one corner hereof by screws 71.
  • a variety of tools and markers, 1nd a variety of carriers may be utilized and a preferred :mbodiment is illustrated in FIGURES 9 and 10.
  • An arm 72 is supported within a body 73 on a spring 74, with the apring attached to the body by a screw 75.
  • a pen 76 is hreadedly inserted into an opening in the outer end of he arm 72.
  • An electromagnet 77 is disposed within the )OdY 73 and, when energized, attracts the arm 72 and ifts the tip of the pen 76 from the sheet 28 resting on he plate member 20.
  • a ring 78 is affixed to the body if the pen 76 and cooperates with pins 79 to provide a ocking adjustment and to provide a guide for vertical novement of the pen.
  • the pins 79 are mounted in a 4 plate 80 carried in a boss 81 of the body 73.
  • a spring 82 urges the plate 80 upward and a button 83 provides for manual compression of the spring 82 for disengaging the pins 79 from openings 85 of the ring 78.
  • the body of the pen may be rotated to adjust the vertical position of the tip by depressing a button 83 and disengaging the pins 79 from the ring 78. After the desired adjustment is achieved, the button 83 is released permitting the pins 79 to enter openings 85 of the ring 78 thereby locking the ring in place.
  • the pins 79 are made sufiiciently long so that the pen may be moved up and down by the magnet 77 while remaining in engagement with the openings 85, thereby providing a guide and support for the upper portion of the pen 76.
  • the pole piece 41 has two pole faces a and c.
  • Each pole face may comprise a single ridge substantially the width of a zone 26 of the plate member 24, as illustrated in FIGURE 11.
  • each pole face may comprise a plurality of spaced ridges, as illustrated in FIGURE 4.
  • the pole faces a and c are spaced such that when one is over a zone of magnetic material 26 of the plate member, the other is over the nonmagnetic material.
  • the spacing between the center lines of the pole faces a and c is p(niVz) where n is any whole number and p is the pitch of the grid or the distance from a center line of one groove or one tooth to the center line of the next groove or tooth of the plate member.
  • the pole pieces 42, 43, and 44 are similarly constructed.
  • the two pole pieces 41, 42 of the magnet 47 are spaced so that the pole faces a and a are at magnetic zones or teeth at the same time. That is to say, the spacing between the center lines of the pole pieces is up.
  • the magnet 49 is constructed the same as the magnet 47.
  • the two magnets of the set are spaced so that when the pole faces of one magnet are directly over a tooth or a groove, the pole faces of the other magnet are midway between the tooth and groove. Thus, the center lines of corresponding pole faces of the two magnets are spaced p(ni, A).
  • the two magnets of a set are designated the A phase and B phase magnets.
  • the magnets of one set, here the set 30 are arranged with the A phase to the left and the B phase to the right
  • the magnets of the other set, here the set 32 are arranged with the B phase to the left and the A phase to the right.
  • the current i is full on, thereby adding to the bias flux produced by the ermanent magnet in the pole faces a and a and reducing the flux in the pole faces c and c to near zero.
  • the current i in the coil of the magnets 49 is zero and the flux in the pole faces d, d, b and b are nearly identical and that of the order of /2 that in a and a.
  • the phasors corresponding to -b-b' and d-d' have magnitudes approximately those of a-a'.
  • the d-d' phasors are angularly displaced from the b-b' phasors by so the net result is that b-b and dd' contribute no first order tangential forces between the head and plate in the horizontal direction. Under these conditions, the head remains in the position of FIGURE 11.
  • the A phase current is turned off and the B phase is turned on with a polarity such that the current is leaving the paper at pole piece 43 and entering the paper at pole piece 44.
  • the magnetic flux at d and d goes to zero and the flux at b and b goes to a maximum, thus producing a positive force moving the head to the right.
  • Another step to the right is made by turning the B phase current ofl and turning the A phase current on with a polarity opposite that shown in FIGURE 11.
  • the head will move to the right another step with the pole faces and c positioned over the teeth or magnetic zones of the plate 24.
  • the A phase current is turned off and the B phase current is turned on with the polarity opposite that previously mentioned.
  • More rapid operation can be achieved by utilizing accelerating and/or braking currents in the normally unenergized coil.
  • a current pulse of polarity opposite that used in the A phase coil may be applied to the A phase coil.
  • This current pulse reduces the flux in the a and a" pole faces and increases the flux in the e and c pole faces to provide an additional component of force thereby providing acceleration of movement.
  • another current pulse of opposite polarity may be applied to the A phase coil to provide a component of force opposing the movement and thereby braking the movement to reduce overshoot.
  • FIGURE 12 An alternative arrangement utilizing continuously energized coils in place of the permanent magnet is illustrated in FIGURE 12, where components corresponding to those of FIGURE 11 are identified by the same reference numerals.
  • the yokes 47, 49' may have the same shape as the permanent magnet yokes 47, 49 and may be installed in the same manner. However, they are made of a magnetic material rather than being permanently magnetized and preferably are formed of laminations with overlapping joints and integral with the pole pieces. Coils 90, 91, 92, 93 are mounted on the yokes and are energized with appropriate currents to provide the same bias fluxes as the permanent magnets 47, 49.
  • a circuit for energizing the coils of the magnets is illustrated in FIGURE 13 and includes a timing pulse generator 100 and A+ logic unit 101, an A logic unit 102, a B+ logic unit 103, and a B logic unit 104.
  • An A phase driver amplifier 105 provides the current for coils 106, 107 of the A phase magnets.
  • a B phase driver amplifier 108 provides current for the coils 109, 110 of the B phase magnets.
  • An acceleration and braking timing circuit 111 provides the acceleration and braking control. This latter circuit is a desirable but not a necessary feature of the system.
  • the circuit of FIGURE 13 provides control for one axis. A similar circuit will be utilized for the other axis.
  • a step-up signal is applied to input line 113 for moving the head in one direction and a step-down signal is applied to line 114 for moving the head in the opposite direction.
  • the timing generator 100 provides timing pulses for operation of the circuit on four output lines indicated clock 1, clock 2, clock 3 and clock 4 in response to step signals on line 115. The operation of the timing generator is illustrated in the bottom four lines of the timing diagram of FIGURE 14.
  • the timing generator includes two flip flops 116, four gates 117, and four output amplifiers 118.
  • the step signals on lines 113 and 114 are connected to line 115 via a gate 119 and a gate 120.
  • the gate 119 provides for combining the up and down signals and the gate 120 prevents operation of the circuit unless there is a signal on an ON line indicating that the system has been turned on. This is desirable, since step signals may come from remote sources not necessarily under the control of the operator of the plotter.
  • a reset line provides for a resetting of the timing generator to its initial state.
  • An inhibit line povides for inhibiting operation of the circuit when certain criteria are not met, such as air pump not on.
  • Each of the sequence logic units has six gates 125 with the outputs of these gates combined at another gate 126 to provide the coil signal as an input to a driver amplifier.
  • a signal from the A+ logic unit produces a positive current in the A phase coil and a signal from the A- logic unit provides a negative current in the A phase coil.
  • the B phase units operate in similar fashion.
  • the outputs of the timing generator are connected to the gates of the sequence logic units in the pattern indicated.
  • the step-up and step-down signals are connected through gates 127 and 128, respectively, and a flip flop 131, which provides a continuous output Acceleration and brake signals are provided on lines 129 and 130, respectively.
  • the acceleration and brake timing unit 111 may comprise three monostable flip flops or one shot blocking oscillators 133, 134, 135, connected in series and driven from the step line 115.
  • the flip flop 133 is set by a step signal.
  • the flip flop 134 is set when the flip flop 133 resets, initiating the acceleration signal.
  • the flip flop 135 is set when the flip flop 134 resets, initiating the brake signal.
  • FIGURE 14 the diagram of FIGURE 11 illustrates the status at the end of a clock 1 time.
  • a stepup signal will initiate clock 2 time bringing the A+ coil signal to zero and generating B+ coil signal.
  • the A coil current will go to zero and a positive current will be produced in the B coil.
  • the acceleration signal on line 129 will produce an A- coil signal resulting in a negative current in coil A.
  • the brake signal on line will produce an A+ coil signal causing a positive current in coil A.
  • Another step-up signal will initiate clock 3 time with the same sequence of operation occurring with difierent coil signals and coil currents, as illustrated in FIGURE 14.
  • a plate member having at one surface thereof a grid of nonmagnetic material enclosing zones of magnetic material, said grid defining a first axis and a second axis in the plane of said surface;
  • a head member having a first set of magnets aligned with said first axis, a second set of magnets aligned with said second axis, a third set of magnets disposed parallel with said first set, and a fourth set of magnets disposed parallel with said second set;
  • each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof up, where n is any whole number and p is the pitch of said grid, each of said pole pieces having first and second pole faces with the spacing between center lines thereof p(ni /2 with the magnets of each of said sets having a spacing between center lines of corresponding pole faces of p(ni%); each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux; means for selectively energizing corresponding coils of said first and third sets for producing relative movement between said members along said first axis; and
  • a system as defined in claim 1 in which said means defining a flux path and for establishing a bias flux comprises a permanent magnet.
  • a system as defined in claim 1 in which said means defining a flux path and for establishing a bias flux comprises a yoke of magnetic material bridging the pole pieces and current conductor means positioned adjacent said yoke.
  • each of said pole faces extends over a plurality of said zones of said plate member, with each pole face having a plurality of rows of magnetic material spaced by nonmagnetic material, with the spacing of said rows substantially the same as the spacing of said zones.
  • each of said sets of magnets includes a frame and each of said pole pieces comprises a stack of laminations, with said stacks slidably inserted in said frame along an axis perpendicularly to said pole faces, and in which said means defining a flux path includes a yoke mounted to said frame and bridging said pole pieces.
  • a system as defined in claim 7 including a housing having an apertured surface with each frame mounted in an aperture, with the pole faces flush with said housing.
  • each of said means for energizing includes:
  • first and second inputs for receiving first and second opposite direction stepping signals
  • a four phase timing generator for generating timing signals sequentially on four timing lines in response to step signals at said inputs
  • a first step logic circuit having said timing and stepping signals as inputs for generating a positive coil current signal for one magnet of a set;
  • a second step logic circuit having said timing and stepping signals as inputs for generating a negative coil current signal for said one magnet of a set;
  • a third step logic circuit having said timing and stepping signals as inputs for generating a positive coil current for the other magnet of the set;
  • a fourth step logic circuit having said timing and stepping signals as inputs for generating a negative coil current signals for said other magnet of the set;
  • a system as defined in claim 9 including:
  • an acceleration and brake circuit for sequentially generating an acceleration signal and a brake signal in response to step signals at said inputs, which said acceleration and brake signals occurring within the duration of timing signal, and with said acceleration and brake signals connected as inputs into each of said step logic circuits to provide acceleration and brake current in the coil of one magnet of a set while the coil of the other magnet of the set is energized for a step.
  • a plate member having at one surface thereof an alternating pattern of nonmagnetic material and magnetic material
  • a head member having first and second parallel sets of magnets aligned with said pattern
  • each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof np, where n is any whole number and p is the pitch of said pattern, each of said pole pieces having first and second pole faces with the spacing between center fl es thereof p(ni' /z with the magnets of said sets having a spacing between center lines of corresponding pole faces of p(n:%);
  • each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux;
  • a plate member having at one surface thereof a grid of nonmagnetic material and enclosing zones of magnetic material, said grid defining a first axis and a second axis in the plane of said surface;
  • a head member having a first set of magnets aligned with said first axis and a second set of magnets aligned with said second axis;
  • each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with spacing between center lines thereof up, where n is any whole number and p is the pitch of said grid, each of said magnets having two pole pieces with the faces with the spacing between center lines thereof P( with the magnets of said first set and of said second set having a spacing between center lines of corresponding pole faces of p(ni%);
  • each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux;
  • a plate member having at one surface thereof an alternating pattern of nonmagnetic material and magnetic material
  • a head member having a set of magnets aligned with said pattern and comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof np, where n is any whole number and p is the pitch of said pattern, each of said pole pieces having first and second pole faces with the spacing between center lines thereof Phi /z);
  • each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein.
  • each of 9 said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux;
  • first and second means operatively coupled to a particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the first variable signals for providing progressive and arbitrary displacements between the first and second members along the first coordinate axis in accordance with the variations in the first variable signals, each of the first and second means respectively having first and second elements disposed in phasedisplaced relationship to each other and to the first and second elements in the other one of the first and second means,
  • third and fourth means operatively coupled to the particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the second variable signals for providing progressive and arbitrary displacements between the first and second members along the second coordinate axis in accordance with the variations in the second variable signals, each of the third and fourth means respectively having first and second elements disposed in phase-displaced relationship to each other and to the first and second elements in the other one of the third and fourth means.
  • the other one of the first and second members having magnetic properties and the first and second means being provided with magnetic properties for cooperating with the other one of the first and second members to produce a relative displacement between the first and second members along the first axis in accordance with the characteristics of the first variable signals and the third and fourth means being provided with magnetic properties for co-operating with the other one of the first and second members to produce a relative displacement between the first and second member along the second axis in accordance with the characteristics of the second variable signals.
  • the first and second means having properties of becoming selectively energized and of producing magnetic lines of force, when energized, for cooperating with the other one of the first and second members to produce displacements between the first and second members along the first coordinate axis and the third and fourth means having properties of becoming selectively energized and of producing magnetic lines of force, when energized, for cooperating with the other one of the first and second members to produce displacements between the first and second members along the second coordinate axis.
  • first and second members being planar and being disposed in contiguous relationship to each other.
  • first means provided in the first member at spaced positions along the first and second coordinate axes to define a grid
  • pairs of second means provided in the second member at spaced positions along the first coordinate axis, the pairs of second means being selectively energized, in accordance with variations in the first variable signals, the pairs of second means being disposed in a particular relationship to the first means to have phase-displaced positions relative to the first means in the first member, each of the second means in each pair being disposed relative to the other one of the second means in each pair and to the first means to have phase-displaced positions relative to each other, the pairs of second means being cooperative with the first means, when selectively energized, to interact with the first means for producing displacements between the first means and the second means along the first coordinate axis in accordance with variations in the first variable signals, and
  • pairs of third means provided in the second member at spaced positions along the second coordinate axis, the pairs of third means being selectively energized in accordance with variations in the second variable signals and being disposed inv a particular relationship to the first means to have phase-displaced positions relative to the first member, each of the third means in each pair being disposed relative to the other one of the third means in each pair and to the first means to have phase-displaced positions relative to each other, the pairs of second means being cooperative with the first means, when. selectively energized, to interact with the first means to produce displacements between the first means and the third means along the second coordinate axis in accordance with variations in the second variable signals.
  • the first member defining a grid structure and each of the second means in each pair respectively having at least one element for co-operation with the grid structure of the first member to provide a displacement of the first member relative to the second member along the first axis, the elements in each pair of the second means being displaced relative to each other and to the other pairs of the second means and to the grid structure of the first member to provide for the displacement of the second member relative to the first member along the first axis in accordance with the variations in the first variable signals, each of the third means in each pair respectively having at least one element for cooperation with the grid structure of the first member to provide a displacement of the first member relative to the second member along the second axis, the elements in each pair of the third means being displaced relative to each other and to the other pairs of the third means to the grid structure of the first member to provide for the displacement of the second member relative to the first member along the second axis in accordance with the variations in the second variable signals, each of the third means in each pair respectively having at least one element for cooperation with the grid structure of
  • first and second members being planar and being disposed in contiguous relationship to each other.
  • the grid structure of the first member having magnetic properties and the second means having magnetic characteristics for cooperating with the first member to produce a force for displacements between the first and second members along the first axis when selectively energized and the pairs of third means having magnetic characteristics for cooperating with the first member to produce a force for displacements between the first and second members along the second axis when selectively energized.
  • a second member spaced from the first member and movable relative to the first member along first and second coordinate axes and including a plurality of first means for interacting with the first member to drive the second member relative to the first member along the first axis and to simultaneously determine the position of the second member relative to the first member along the first axis and further including a plurality of second means for interacting with the first member to drive the second member relative to the first member along the second axis and to simultaneously determine the position of the second member relative to the first member along the second axis,
  • the plurality of first means being disposed in phasedisplaced relationship to one another and being selectively operable on a cyclic basis in accordance with variations in the first variable signals to obtain progressive displacements of the second member relative to the first member along the first axis, the first means in the plurality being paired, with the first means in each pair being disposed in phasedisplaced relationship to each other and to the first means in the other pairs,
  • the plurality of second means being disposed in phasedisplaced relationship to one another and being selectively operable on a cyclic basis in accordance with the variations in the second variable signals to obtain progressive displacements of the second member relative to the first member along the second axis, the second means in the plurality being paired, with the second means in each pair being disposed in phasedisplaced relationship to each other and to the second means in the other pairs,
  • third means responsive to the first variable signals for providing for a selective energizing of the first means in the plurality on a cyclic basis to obtain a selective and progressive driving of the second member relative to the first member along the first axis in accordance with such variations
  • fourth means responsive to variations in the second variable signals for providing for a selective energizing of the second means in the plurality on a cyclic basis to obtain a selective and progressive driving of the second member relative to the first member along the second axis in accordance with such variations.
  • the first and second members being constructed to provide independent and progressive movements of the first member relative to the second member along the first and second coordinate axes and the first means interacting with the first member about an axis substantially normal to a surface defined by the first and second axes.
  • the first member being in the form of a magnetic grid structure and the pairs of the first means and the pairs of the second means being provided with magnetic properties and being disposed for magnetic interaction with the first member to provide displacements of the second member relative to the first member along the first and second axes.
  • first and second members being planar and being disposed in contiguous relationship to each other.
  • first and second members being constructed for interaction to provide an indication of the position of the first and second members relative to each other along the first and second coordinate axes in accordance with the displacement of the first member relative to the second member along the first and second coordinate axes
  • first means in each pair being oppositely disposed from the other means in each pair relative to the first member and each pair of first means being displaced in phase from the other pairs of first means relative to the first member, and
  • pairs of second means disposed on the second member and selectively energizable for producing a force between the first and second members to provide an independent and arbitrary displacement of the second member relative to the first member along the second axis
  • each pair being oppositely disposed from the other means in each pair relative to the first member and each pair of second means being displaced in phase from the other pairs of second means relative to the first member.
  • first and second members being constructed relative to each other to provide discrete displacements of the second member relative to the first member along the first and second axes.
  • the first and second members having magnetic characteristics and the first means including first windings, each associated with a difierent pair of the first means and each energiza'ble to produce a magnetic force between the first and second members for providing a displacement of the second member relative to the first member along the first axis, and second means including second windings, each asso ciated with a difierent pair of the second means and each energizable to produce a magnetic force between; the first and second members for providing a displacement of the second member relative to the first member along the second axis.
  • the first means being constructed to inhibit rotation of the second member relative to the first member about an axis substantially normal to a surface defined by the first and second axes.
  • first and second members being planar and being disposed in contiguous relationship to each other.
  • variable signals controllably haw ing first and second opposite polarities
  • first and second means operatively coupled to a particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the variations in the variable signals for providing progressive displacements between the first and second members along the particular axis in accordance with such variations, each of the first and second means respectively having first and second ele'ments disposed in phase-displaced relationship to each other and to the first and second elements in the other one of the first and second means.
  • the other one of the first and second members having maglnetic properties and the first and second means being provided with magnetic properties for interacting with the other one of the first and second members to produce a relative displacement between the first and second members.
  • a second member disposed relative to the first member for displacement relative to the first membe r along the particular axis, the first member being constructed to interact with the second member to provide an indication of the position of the first and second members relative to each other along the particular axis in accordance with the displacement of the first member relative to the second member along the particular axis, and
  • first means in each pair being disposed in opposed phase relationship to the other means in each pair relative to the first member and each pair of first means being displaced in phase from the other pairs of first means relative to the first member.
  • the first member being in the form: of a grid structure and the pairs of first means being constructed to interact with the grid structure to provide progressive displacements of the second member relative to the first member along the particular axis.

Abstract

A MAGNETIC SYSTEM FOR MOVING A MARKING TOOL OVER A SURFACE FOR PLOTTING CURVES, GRAPHS AND OTHER DATA. A HEAD INCORPORATING TWO PARALLEL SETS OF MAGNETS ALONG EACH OF TWO PERPENDICULAR AXES. A PLATE HAVING A GRID OF ZONES OF MAGNETIC MATERIAL. DRIVING CIRCUITRY FOR SELECTIVELY ENERGIZING MAGNET COILS IN RESPONSE TO INPUT STEPPING SIGNALS FOR MOVING THE HEAD OVER THE PLATE ALONG EACH AXIS.

Description

Feb. 15, 1972 a SAWYER Re.
. MAGNETIC POSITIONING DEVICE Original Filed Oct. 30, 1967 5 Sheets-Sheet 1 FIG. 9.
Wyn/70R BRUCE A. 5A WYER 42 43 av H/S ATTOEA/EYS Mae/5, Mac/y, Pass & KER/V Feb. 15, 1972 a SAWYER MAGNETIC POSITIONING DEVICE Original Filed Oct. 30, 1967 5 Shgets-Sheet z //v I/EN TOE BRUCE A. 5A wne'z a Y HAS A 7702A/E Y5 #412249, M501, E0555 6: Ksm/ Feb. 15, 1972 a SAWYER R0. 27,289
MAGNETIC POSITIONING DEVICE Orig inal Filed Oct. 50, 1967 5 Sheets-Sheet s @R &
@J? \r v 74 N a; w
Q Q) I, Q Q SR Q a i f (Q {Q1 (Q QQ ts g 3 w Q l\\ v 3? g i Q n 5; .9 Q N: f Q 2 Q: B Yu Q M a f? 5% a g \s N Q x w & Q
k'i w w v: g M INVENTOR BRUCE A. 5AWYER 5y ms Afiozusrs HARE/S, M504 RUSSELL & KER/v Feb. 15, 1972 SAWYER Re. 27,289
MAGNETIC POSITIONING DEVICE Original Filed 0st. 50, 1967 5 ShGBIZS-ShGGt 5 CLK4 I I I I I I I I I I o I I I I I I o I I I I I I I I I I I o I I I I I I I I I I I I I I I I I I I I I M m m +o 0o +0 +o.oa a w M KKK T T T T MLLL AW H ABAM BWMBAB 6 MW mm m m M m m m M m CC CC CCCC CC CC 6666 I II 33.9% v m IN I/EA/ 7'02 BRUCE A. 5A WVER 5y /-//5 A rive/vars Mme/s, K/ECH, Posse/.1. & KERN United States Patent 27,289 MAGNETIC POSITIONING DEVICE Bruce A. Sawyer, 20120 Allentown Drive, Woodland Hills, Calif. 91364 Original No. 3,457,482, dated July 22, 1969, Ser. No. 678,842, Oct. 30, 1967. Application for reissue Apr. 9, 1970, Ser. No. 31,434
Int. Cl. H02p 1/54, 7/68, 7/74 U.S. Cl. 318-38 34 Claims Matter enclosed in heavy brackets appears in the original patent but forms no part of this reissue specification; matter printed in italics indicates the additions made by reissue.
ABSTRACT OF THE DISCLOSURE A magnetic system for moving a marking tool over a surface for plotting curves, graphs and other data. A head incorporating two parallel sets of magnets along each of two perpendicular axes. A plate having a grid of zones of magnetic material. Driving circuitry for selectively energizing magnet coils in response to input stepping signals for moving the head over the plate along each axis.
This invention relates to plotters and to drive systems suitable for use with plotters and other positioning devices, and is an improvement on the system of my co-pending application entitled Magnetic Positioning Device, Ser. No. 554,181, filed May 31, 1966, now Patent No. 3,376,578.
My aforesaid co-pending application discloses a magnetic stepping system incorporating a head for moving along a plate and carrying a marker for plotting data on a sheet of paper or the like disposed on the plate. Sets of magnets are disposed in the head and each set includes a plurality of individual magnets, typically three, providing what can be referred to as a three-phase system. It is the object of the present invention to provide a twophase polarized system which appears to have a number of advantages over three-phase and higher phase systems. A two-phase system utilizes two magnets in each set and, with bidirectional currents in each coil, operates as a four-phase system.
The two-phase system of the present invention permits a simple coil and core arrangement. The two-phase system utilizes a permanent polarizing or bias flux such as can be supplied by permanent magnets, resulting in a constant holding force. Smaller coil losses can be obtained because the permanent magnets supply a portion of the energy required in the stepping operation. A shorter time constant can be obtained because the quadrature or transverse fiux paths in the cores can be designed to operate well into saturation thereby lowering the incremental inductance. Further, the two-phase system permits utilization of acceleration and braking currents in the otherwise nonenergized coils during a stepping operation so that all coils are working substantially all of the time.
Other objects, advantages, features and results will more fully appear in the course of the following description. The drawings merely show and the description merely describes preferred embodiments of the present invention which are given by way of illustration or example.
In the drawings:
FIGURE 1 is a top view of a chart plotter incorporating a preferred embodiment of the invention;
FIGURE 2 is a perspective view from the bottom of the head of FIGURE 1, with the marking pen omitted;
FIGURE 3 is a perspective view from the top of the head, with the top cover removed;
Re. 27,289 Reissued Feb. 15, 1972 FIGURE 4 is an enlarged sectional view taken along the line 44 of FIGURE 2;
FIGURE 5 is a perspective view of a frame shown inverted;
FIGURE 6 is a perspective view of a coil and pole piece assembly;
FIGURE 7 is a perspective view of a portion of the housing;
FIGURE 8 is an enlarged partial sectional view taken along the line 8-8 of FIGURE 1;
FIGURE 9 is an enlarged top view of the marking pen of FIGURE 1;
FIGURE 10 is a sectional view taken along the line- 1010 of FIGURE 9';
FIGURE 11 is a diagrammatical view similar to that of FIGURE 4 illustrating the operation of the system;
FIGURE 12 is a view similar to that of FIGURE 11 illustrating an alternative construction for obtaining the bias flux;
FIGURE 13 is an electrical schematic of a preferred circuitry for driving the system; and
FIGURE 14 is a timing diagram of the operation of the circuitry of FIGURE 13.
The system includes a plate member 20 and a head member 21. The upper surface of the plate member carries a grid of nonmagnetic material enclosing zones of magnetic material, with the grid defining first and second axes which normally are orthogonal. These axes are sometimes referred to as the x-axis and the y-axis.
Typically the plate member 20 may be a sheet 24 of ferromagnetic material such as iron, having a plurality of parallel grooves 25 formed therein, with one set of grooves normal to the x-axis and another set of grooves normal to the y-axis (FIGURE 11). Zones or teeth of magnetic material 26 project upwardly between the grooves. In the preferred structure illustrated in the drawings, the grooves are at right angles to each other and are equally spaced along both axes, leaving the projecting zones of magnetic material of square cross section. In a typical structure, the grooves or slot 25 are .020 inch Wide and .020 inch deep and are spaced .040 inch apart between center lines along both axes. The grooves may be left open with the air serving as a nonmagnetic material, but it is preferred to fill the grooves with a plastic or other nonmagnetic solids to provide a smooth upper surface for the plate member.
In a typical plotter, a sheet of paper 28 rests on the plate member 20 and the head member moves over the sheet 28. Means may be provided for holding the paper in position on the plate member and one such means is illustrated in my aforesaid co-pending application.
The head member includes four sets of magnets 30, 31, 32, 33 mounted in a housing or base 34 with the pole faces of the magnets at the surface of the base. Typically the base 34 is an aluminum or plastic plate having four apertures 35 therein for receiving the magnet sets and a central aperture 36 for an air bearing screw, to be described herein below.
The magnet sets 30, 32, are disposed parallel to one of the axes of the grid, say the x-axis, and are utilized to propel and position the head member along the x-axis. Similarly, the sets 31 and 33 are utilized to propel and position the head member along the other axis, typically the y-axis.
The construction of the four sets of magnets may be the same and one will be described in detail. Each set comprises two magnets and each magnet has two pole pieces. The magnet set 30 includes a frame 40 and pole pieces 41, 42, 43, 44 (FIGURE 4). Each of the pole pieces 4144 comprises a stack of lamination stampings and two pole pieces 41, 42 with a coil 46 therein are shown in FIGURE 6. The top view of the frame 40 is shown in FIGURE 3 and a bottom view in FIGURE 5. Each of the pole pieces 41, 42 with a coil 46 therein are shown in upper corner for slidably engaging corresponding grooves in the frame 40. A U-shaped yoke 47 is afiixed to a rib 48 of the frame 40 by a screw and a similar yoke 49 is affixed to a rib 50 of the frame 40. The frame 40 is made of a nonmagnetic material such as aluminum and in the preferred embodiment of the yokes 47 and 49 are permanent magnets which provides a bias or polarizing flux in the associated pole pieces.
The face of each of the pole pieces 41-44 has One or more ridges of magnetic material and preferably is provided with a plurality of ridges of the same width and spacing as the zones 26 of magnetic material in the plate member 24.
The magnet sets are positioned in the corresponding apertures in the base 34 and are held in place by screws 52. The openings 53 in the frame 40 (FIGURE and the channel or relieved section 54 in the frame 40 (-FIG- UR-E 8) provide space for wiring. Filler blocks 56 may be disposed at the four corners of the head to provide a regular outline with the blocks held in place by a band 57 and screws (not shown). A top cover plate 58 may be positioned over the magnet sets for appearance and :leanliness.
Means may be provided for spacing the head member from the plate member to prevent direct contact between the members or between the head member and the paper resting on the plate member and thereby eliminate fric- :ion forces between the two members. Various arrangements may be used including fluid bearings, wheels or )alls, and the air bearing described in my aforesaid copending application is utilized in the head member dis- :losed in this application. A conduit for a supply of air mder pressure and a cable for the electrical connection may be included in a control line 60 connected to the head member 21. The air conduit of the control line terninates on a tube 61 held in place by a screw 62 posizioned in the aperture 36 of the base 34 (FIGURE 8). passage 63 in the screw 62 provides communication with four passages 64 radiating outward from the screw :hrough the base 34 and terminating in outlet openings 55 (FIGURE 2). A gasket 66 provides a seal between he tube 61 and the base, and another gasket 67 provides 1 seal between the screw 62 and the base.
With this arrangement, there is a constant flow of air :hrough the conduit of the control line 60 into the head nember, through the passages 64 and openings 65, and Jutward to the atmosphere between the bottom surface )f the head member and the surface of the plate mem- Jer. This air flow provides an air bearing between the vwo members. The attraction force provided by the magretic coupling between the members and the repulsion Force provided by the air bearing are balanced by appropriate adjustment of the air bearing orifice characteristics 1nd the air supply pressure to maintain the head mem- )CI at a substantially constant spacing above the plate nember, typically in the order of one to a few thou- :andths of an inch.
Feferring to FIGURE 1, a tool or marker carrier 70 nay be mounted on the head member 21 at one corner hereof by screws 71. A variety of tools and markers, 1nd a variety of carriers may be utilized and a preferred :mbodiment is illustrated in FIGURES 9 and 10. An arm 72 is supported within a body 73 on a spring 74, with the apring attached to the body by a screw 75. A pen 76 is hreadedly inserted into an opening in the outer end of he arm 72. An electromagnet 77 is disposed within the )OdY 73 and, when energized, attracts the arm 72 and ifts the tip of the pen 76 from the sheet 28 resting on he plate member 20. A ring 78 is affixed to the body if the pen 76 and cooperates with pins 79 to provide a ocking adjustment and to provide a guide for vertical novement of the pen. The pins 79 are mounted in a 4 plate 80 carried in a boss 81 of the body 73. A spring 82 urges the plate 80 upward and a button 83 provides for manual compression of the spring 82 for disengaging the pins 79 from openings 85 of the ring 78.
The body of the pen may be rotated to adjust the vertical position of the tip by depressing a button 83 and disengaging the pins 79 from the ring 78. After the desired adjustment is achieved, the button 83 is released permitting the pins 79 to enter openings 85 of the ring 78 thereby locking the ring in place. The pins 79 are made sufiiciently long so that the pen may be moved up and down by the magnet 77 while remaining in engagement with the openings 85, thereby providing a guide and support for the upper portion of the pen 76.
The operation of the system will be described in conjunction with the diagram of FIGURE 11. The pole piece 41 has two pole faces a and c. Each pole face may comprise a single ridge substantially the width of a zone 26 of the plate member 24, as illustrated in FIGURE 11. Alternatively, each pole face may comprise a plurality of spaced ridges, as illustrated in FIGURE 4. The pole faces a and c are spaced such that when one is over a zone of magnetic material 26 of the plate member, the other is over the nonmagnetic material. That is to say, the spacing between the center lines of the pole faces a and c is p(niVz) where n is any whole number and p is the pitch of the grid or the distance from a center line of one groove or one tooth to the center line of the next groove or tooth of the plate member. The pole pieces 42, 43, and 44 are similarly constructed.
The two pole pieces 41, 42 of the magnet 47 are spaced so that the pole faces a and a are at magnetic zones or teeth at the same time. That is to say, the spacing between the center lines of the pole pieces is up.
The magnet 49 is constructed the same as the magnet 47. The two magnets of the set are spaced so that when the pole faces of one magnet are directly over a tooth or a groove, the pole faces of the other magnet are midway between the tooth and groove. Thus, the center lines of corresponding pole faces of the two magnets are spaced p(ni, A). The two magnets of a set are designated the A phase and B phase magnets. In the preferred arrangement, using two parallel sets of magnets as illustrated in FIGURE 2, the magnets of one set, here the set 30, are arranged with the A phase to the left and the B phase to the right, and the magnets of the other set, here the set 32, are arranged with the B phase to the left and the A phase to the right. This arrangement provides an improved balancing of forces as discussed in my aforesaid application. With this arrangement, the magnets of one set are spaced p(n+%) and the magnets on the other set are spaced p(n% Where the A phase of both sets are to the left or to the right, the spacing for both sets will be the same, that is either both are or both are %a.
In FIGURE 11, the current i is full on, thereby adding to the bias flux produced by the ermanent magnet in the pole faces a and a and reducing the flux in the pole faces c and c to near zero. At this time, the current i in the coil of the magnets 49 is zero and the flux in the pole faces d, d, b and b are nearly identical and that of the order of /2 that in a and a. The phasors corresponding to -b-b' and d-d' have magnitudes approximately those of a-a'. The d-d' phasors are angularly displaced from the b-b' phasors by so the net result is that b-b and dd' contribute no first order tangential forces between the head and plate in the horizontal direction. Under these conditions, the head remains in the position of FIGURE 11.
In order to step the head to the right, the A phase current is turned off and the B phase is turned on with a polarity such that the current is leaving the paper at pole piece 43 and entering the paper at pole piece 44. The magnetic flux at d and d goes to zero and the flux at b and b goes to a maximum, thus producing a positive force moving the head to the right. Another step to the right is made by turning the B phase current ofl and turning the A phase current on with a polarity opposite that shown in FIGURE 11. The head will move to the right another step with the pole faces and c positioned over the teeth or magnetic zones of the plate 24. For the next step, the A phase current is turned off and the B phase current is turned on with the polarity opposite that previously mentioned. The next step is made by returning the currents to the condition shown in FIGURE 11. Stepping in the opposite direction is achieved by switching currents in the opposite sequence. Thus, it is seen that a four phase stepping operation is obtained with the two phase construction of the device. When two sets of magnets are utilized in parallel, the A phase coils of both sets are energized at the same time and the B phase coils of both sets are energized at the same time.
More rapid operation can be achieved by utilizing accelerating and/or braking currents in the normally unenergized coil. For example, after the B phase coil has been energized and the A phase coil has been turned off and after the head has moved a small distance, a current pulse of polarity opposite that used in the A phase coil may be applied to the A phase coil. This current pulse reduces the flux in the a and a" pole faces and increases the flux in the e and c pole faces to provide an additional component of force thereby providing acceleration of movement. Subsequently, another current pulse of opposite polarity may be applied to the A phase coil to provide a component of force opposing the movement and thereby braking the movement to reduce overshoot.
An alternative arrangement utilizing continuously energized coils in place of the permanent magnet is illustrated in FIGURE 12, where components corresponding to those of FIGURE 11 are identified by the same reference numerals. The yokes 47, 49' may have the same shape as the permanent magnet yokes 47, 49 and may be installed in the same manner. However, they are made of a magnetic material rather than being permanently magnetized and preferably are formed of laminations with overlapping joints and integral with the pole pieces. Coils 90, 91, 92, 93 are mounted on the yokes and are energized with appropriate currents to provide the same bias fluxes as the permanent magnets 47, 49.
A circuit for energizing the coils of the magnets is illustrated in FIGURE 13 and includes a timing pulse generator 100 and A+ logic unit 101, an A logic unit 102, a B+ logic unit 103, and a B logic unit 104. An A phase driver amplifier 105 provides the current for coils 106, 107 of the A phase magnets. A B phase driver amplifier 108 provides current for the coils 109, 110 of the B phase magnets. An acceleration and braking timing circuit 111 provides the acceleration and braking control. This latter circuit is a desirable but not a necessary feature of the system.
The circuit of FIGURE 13 provides control for one axis. A similar circuit will be utilized for the other axis. A step-up signal is applied to input line 113 for moving the head in one direction and a step-down signal is applied to line 114 for moving the head in the opposite direction. The timing generator 100 provides timing pulses for operation of the circuit on four output lines indicated clock 1, clock 2, clock 3 and clock 4 in response to step signals on line 115. The operation of the timing generator is illustrated in the bottom four lines of the timing diagram of FIGURE 14. The timing generator includes two flip flops 116, four gates 117, and four output amplifiers 118. The step signals on lines 113 and 114 are connected to line 115 via a gate 119 and a gate 120. The gate 119 provides for combining the up and down signals and the gate 120 prevents operation of the circuit unless there is a signal on an ON line indicating that the system has been turned on. This is desirable, since step signals may come from remote sources not necessarily under the control of the operator of the plotter. A reset line provides for a resetting of the timing generator to its initial state. An inhibit line povides for inhibiting operation of the circuit when certain criteria are not met, such as air pump not on.
Each of the sequence logic units has six gates 125 with the outputs of these gates combined at another gate 126 to provide the coil signal as an input to a driver amplifier.
A signal from the A+ logic unit produces a positive current in the A phase coil and a signal from the A- logic unit provides a negative current in the A phase coil. The B phase units operate in similar fashion. The outputs of the timing generator are connected to the gates of the sequence logic units in the pattern indicated. The step-up and step-down signals are connected through gates 127 and 128, respectively, and a flip flop 131, which provides a continuous output Acceleration and brake signals are provided on lines 129 and 130, respectively.
The acceleration and brake timing unit 111 may comprise three monostable flip flops or one shot blocking oscillators 133, 134, 135, connected in series and driven from the step line 115. The flip flop 133 is set by a step signal. The flip flop 134 is set when the flip flop 133 resets, initiating the acceleration signal. The flip flop 135 is set when the flip flop 134 resets, initiating the brake signal.
Referring to FIGURE 14, the diagram of FIGURE 11 illustrates the status at the end of a clock 1 time. A stepup signal will initiate clock 2 time bringing the A+ coil signal to zero and generating B+ coil signal. The A coil current will go to zero and a positive current will be produced in the B coil. Shortly thereafter, the acceleration signal on line 129 will produce an A- coil signal resulting in a negative current in coil A. Then the brake signal on line will produce an A+ coil signal causing a positive current in coil A. Another step-up signal will initiate clock 3 time with the same sequence of operation occurring with difierent coil signals and coil currents, as illustrated in FIGURE 14.
Although exemplary embodiments of the invention have been disclosed and discussed, it will be understood that other applications of the invention are possible and that the embodiments disclosed may be subjected to various changes, modifications and substitutions, including those discussed in my aforesaid co-pending application, without necessarily departing from the spirit of the invention. The invention has been disclosed used as a chart plotter with a pen, but other tools such as light sources, heat sources, cutting edges and the like may be driven for a variety of positioning purposes.
I claim:
1. In a system for relative movement of two members along two axes the combination of:
a plate member having at one surface thereof a grid of nonmagnetic material enclosing zones of magnetic material, said grid defining a first axis and a second axis in the plane of said surface;
a head member having a first set of magnets aligned with said first axis, a second set of magnets aligned with said second axis, a third set of magnets disposed parallel with said first set, and a fourth set of magnets disposed parallel with said second set;
each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof up, where n is any whole number and p is the pitch of said grid, each of said pole pieces having first and second pole faces with the spacing between center lines thereof p(ni /2 with the magnets of each of said sets having a spacing between center lines of corresponding pole faces of p(ni%); each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux; means for selectively energizing corresponding coils of said first and third sets for producing relative movement between said members along said first axis; and
means for selectively energizing corresponding coils of said second and fourth sets for producing relative movement between said members along said second axis.
2. A system as defined in claim 1 with the magnets of one of said first and third sets and one of said second and fourth sets having a spacing between center lines of corresponding pole faces of p(n+%) and with the magnets of the other of said first and third sets and of the other of said second and fourth sets having a spacing between center lines of corresponding pole faces of p(n%).
3. A system as defined in claim 1 with the spacing of the magnets of said first and third sets such that the sign is the same for each in the spacing expression p(ni% and with the spacing of the magnets of said second and fourth sets such that the sign is the same for each in the spacing expression.
4. A system as defined in claim 1 in which said means defining a flux path and for establishing a bias flux comprises a permanent magnet.
5. A system as defined in claim 1 in which said means defining a flux path and for establishing a bias flux comprises a yoke of magnetic material bridging the pole pieces and current conductor means positioned adjacent said yoke.
6. A system as defined in claim 1 wherein each of said pole faces extends over a plurality of said zones of said plate member, with each pole face having a plurality of rows of magnetic material spaced by nonmagnetic material, with the spacing of said rows substantially the same as the spacing of said zones.
7. A system as defined in claim 1 in which each of said sets of magnets includes a frame and each of said pole pieces comprises a stack of laminations, with said stacks slidably inserted in said frame along an axis perpendicularly to said pole faces, and in which said means defining a flux path includes a yoke mounted to said frame and bridging said pole pieces.
8. A system as defined in claim 7 including a housing having an apertured surface with each frame mounted in an aperture, with the pole faces flush with said housing.
9. A system as defined in claim 1 in which each of said means for energizing includes:
first and second inputs for receiving first and second opposite direction stepping signals;
a four phase timing generator for generating timing signals sequentially on four timing lines in response to step signals at said inputs;
a first step logic circuit having said timing and stepping signals as inputs for generating a positive coil current signal for one magnet of a set;
a second step logic circuit having said timing and stepping signals as inputs for generating a negative coil current signal for said one magnet of a set;
a third step logic circuit having said timing and stepping signals as inputs for generating a positive coil current for the other magnet of the set;
a fourth step logic circuit having said timing and stepping signals as inputs for generating a negative coil current signals for said other magnet of the set; and
amplifier means actuated by said coil current signals for driving said coils.
10. A system as defined in claim 9 including:
an acceleration and brake circuit for sequentially generating an acceleration signal and a brake signal in response to step signals at said inputs, which said acceleration and brake signals occurring within the duration of timing signal, and with said acceleration and brake signals connected as inputs into each of said step logic circuits to provide acceleration and brake current in the coil of one magnet of a set while the coil of the other magnet of the set is energized for a step.
11. In a system for relative movement of two members, the combination of:
a plate member having at one surface thereof an alternating pattern of nonmagnetic material and magnetic material;
a head member having first and second parallel sets of magnets aligned with said pattern;
each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof np, where n is any whole number and p is the pitch of said pattern, each of said pole pieces having first and second pole faces with the spacing between center fl es thereof p(ni' /z with the magnets of said sets having a spacing between center lines of corresponding pole faces of p(n:%);
each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux; and
means for selectively energizing corresponding coils of said sets for producing relative movement between said members along said pattern.
12. In a system for relative movement of two members along two axes, the combination of a plate member having at one surface thereof a grid of nonmagnetic material and enclosing zones of magnetic material, said grid defining a first axis and a second axis in the plane of said surface;
a head member having a first set of magnets aligned with said first axis and a second set of magnets aligned with said second axis;
each of said sets of magnets comprising two magnets, each of said magnets having two pole pieces with spacing between center lines thereof up, where n is any whole number and p is the pitch of said grid, each of said magnets having two pole pieces with the faces with the spacing between center lines thereof P( with the magnets of said first set and of said second set having a spacing between center lines of corresponding pole faces of p(ni%);
each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein, each of said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux;
means for selectively energizing the coils of said first set for producing relative movement between said members along said first axis; and
means for selectively energizing the coils of said second set for producing relative movement between said members along said second axis.
13. In a system for relative movement of two members, the combination of:
a plate member having at one surface thereof an alternating pattern of nonmagnetic material and magnetic material;
a head member having a set of magnets aligned with said pattern and comprising two magnets, each of said magnets having two pole pieces with the spacing between center lines thereof np, where n is any whole number and p is the pitch of said pattern, each of said pole pieces having first and second pole faces with the spacing between center lines thereof Phi /z);
with the magnets of said set having a spacing between center lines of corresponding pole faces of p(n:%
each of said magnets having means defining a magnetic flux path between the pole pieces thereof and means for establishing a bias flux therein. each of 9 said magnets having a driving coil for producing a flux at one pole face of each pole piece aiding the bias flux and a flux at the other pole face opposing the bias flux; and
means for selectively energizing the coils of said set for producing relative movement between said members along said pattern.
14. In a system for providing a controlled relative movement between two members along first and second coordinate axes, the combination of:
a first member,
a second member disposed relative to the first member for independent displacement between the first and second members along each of the first and second coordinate axes,
means for providing first variable signals controllably having first and second opposite polarities,
means for providing second variable signals controllably having first and second opposite polarities,
first and second means operatively coupled to a particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the first variable signals for providing progressive and arbitrary displacements between the first and second members along the first coordinate axis in accordance with the variations in the first variable signals, each of the first and second means respectively having first and second elements disposed in phasedisplaced relationship to each other and to the first and second elements in the other one of the first and second means,
third and fourth means operatively coupled to the particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the second variable signals for providing progressive and arbitrary displacements between the first and second members along the second coordinate axis in accordance with the variations in the second variable signals, each of the third and fourth means respectively having first and second elements disposed in phase-displaced relationship to each other and to the first and second elements in the other one of the third and fourth means.
15. In the system set forth in claim 14: the other one of the first and second members having magnetic properties and the first and second means being provided with magnetic properties for cooperating with the other one of the first and second members to produce a relative displacement between the first and second members along the first axis in accordance with the characteristics of the first variable signals and the third and fourth means being provided with magnetic properties for co-operating with the other one of the first and second members to produce a relative displacement between the first and second member along the second axis in accordance with the characteristics of the second variable signals.
16. In the system set forth in claim 15: the first and second means having properties of becoming selectively energized and of producing magnetic lines of force, when energized, for cooperating with the other one of the first and second members to produce displacements between the first and second members along the first coordinate axis and the third and fourth means having properties of becoming selectively energized and of producing magnetic lines of force, when energized, for cooperating with the other one of the first and second members to produce displacements between the first and second members along the second coordinate axis.
17. In the system set forth in claim 14: the first and second members being planar and being disposed in contiguous relationship to each other.
18. In a system for providing a controlled relative movement between two members along first and second coordinate axes, the combination of:
a first member,
a second member disposed in contiguous relationship to the first member for independent displacement between the first and second members along each of the first and second coordinate axes,
means for providing first variable signals controllably having first and second opposite polarities,
means for providing second variable signal controllably having first and second opposite polarities,
a plurality of first means provided in the first member at spaced positions along the first and second coordinate axes to define a grid,
pairs of second means provided in the second member at spaced positions along the first coordinate axis, the pairs of second means being selectively energized, in accordance with variations in the first variable signals, the pairs of second means being disposed in a particular relationship to the first means to have phase-displaced positions relative to the first means in the first member, each of the second means in each pair being disposed relative to the other one of the second means in each pair and to the first means to have phase-displaced positions relative to each other, the pairs of second means being cooperative with the first means, when selectively energized, to interact with the first means for producing displacements between the first means and the second means along the first coordinate axis in accordance with variations in the first variable signals, and
pairs of third means provided in the second member at spaced positions along the second coordinate axis, the pairs of third means being selectively energized in accordance with variations in the second variable signals and being disposed inv a particular relationship to the first means to have phase-displaced positions relative to the first member, each of the third means in each pair being disposed relative to the other one of the third means in each pair and to the first means to have phase-displaced positions relative to each other, the pairs of second means being cooperative with the first means, when. selectively energized, to interact with the first means to produce displacements between the first means and the third means along the second coordinate axis in accordance with variations in the second variable signals.
19. In the system set forth in claim 18: the first member defining a grid structure and each of the second means in each pair respectively having at least one element for co-operation with the grid structure of the first member to provide a displacement of the first member relative to the second member along the first axis, the elements in each pair of the second means being displaced relative to each other and to the other pairs of the second means and to the grid structure of the first member to provide for the displacement of the second member relative to the first member along the first axis in accordance with the variations in the first variable signals, each of the third means in each pair respectively having at least one element for cooperation with the grid structure of the first member to provide a displacement of the first member relative to the second member along the second axis, the elements in each pair of the third means being displaced relative to each other and to the other pairs of the third means to the grid structure of the first member to provide for the displacement of the second member relative to the first member along the second axis in accordance with the variations in the second variable signals.
20. In the system set forth in claim 18: the first and second members being planar and being disposed in contiguous relationship to each other.
21. In the system set forth in claim 19: the grid structure of the first member having magnetic properties and the second means having magnetic characteristics for cooperating with the first member to produce a force for displacements between the first and second members along the first axis when selectively energized and the pairs of third means having magnetic characteristics for cooperating with the first member to produce a force for displacements between the first and second members along the second axis when selectively energized.
22. In a system for providing a controlled relative movement between two members along first and second coordinate axes, the combination of:
a first member,
means for providing first variable signals controllably having first and second opposite polarities,
means for providing second variable signals controllably having first and second opposite polarities,
a second member spaced from the first member and movable relative to the first member along first and second coordinate axes and including a plurality of first means for interacting with the first member to drive the second member relative to the first member along the first axis and to simultaneously determine the position of the second member relative to the first member along the first axis and further including a plurality of second means for interacting with the first member to drive the second member relative to the first member along the second axis and to simultaneously determine the position of the second member relative to the first member along the second axis,
the plurality of first means being disposed in phasedisplaced relationship to one another and being selectively operable on a cyclic basis in accordance with variations in the first variable signals to obtain progressive displacements of the second member relative to the first member along the first axis, the first means in the plurality being paired, with the first means in each pair being disposed in phasedisplaced relationship to each other and to the first means in the other pairs,
the plurality of second means being disposed in phasedisplaced relationship to one another and being selectively operable on a cyclic basis in accordance with the variations in the second variable signals to obtain progressive displacements of the second member relative to the first member along the second axis, the second means in the plurality being paired, with the second means in each pair being disposed in phasedisplaced relationship to each other and to the second means in the other pairs,
third means responsive to the first variable signals for providing for a selective energizing of the first means in the plurality on a cyclic basis to obtain a selective and progressive driving of the second member relative to the first member along the first axis in accordance with such variations, and
fourth means responsive to variations in the second variable signals for providing for a selective energizing of the second means in the plurality on a cyclic basis to obtain a selective and progressive driving of the second member relative to the first member along the second axis in accordance with such variations.
23. In the system set forth in claim 22: the first and second members being constructed to provide independent and progressive movements of the first member relative to the second member along the first and second coordinate axes and the first means interacting with the first member about an axis substantially normal to a surface defined by the first and second axes.
24. In the system set forth in claim 22: the first member being in the form of a magnetic grid structure and the pairs of the first means and the pairs of the second means being provided with magnetic properties and being disposed for magnetic interaction with the first member to provide displacements of the second member relative to the first member along the first and second axes.
25. In the system set forth in claim 23: the first and second members being planar and being disposed in contiguous relationship to each other.
26. In a system for providing a controlled relative movement between two members along first and second coordinate axes, the combination of:
a first member,
a second member disposed relative to the first member for independent movement relative to the first member along the first and second coordinate axes, the first and second members being constructed for interaction to provide an indication of the position of the first and second members relative to each other along the first and second coordinate axes in accordance with the displacement of the first member relative to the second member along the first and second coordinate axes,
pairs of first means disposed on the second member and selectively energizable for producing a force between the first and second members to provide an independent and arbitrary displacement of the second member relative to the first member along the first axis,
the first means in each pair being oppositely disposed from the other means in each pair relative to the first member and each pair of first means being displaced in phase from the other pairs of first means relative to the first member, and
pairs of second means disposed on the second member and selectively energizable for producing a force between the first and second members to provide an independent and arbitrary displacement of the second member relative to the first member along the second axis,
the second means in each pair being oppositely disposed from the other means in each pair relative to the first member and each pair of second means being displaced in phase from the other pairs of second means relative to the first member.
27. In the system set forth in claim 26: the first and second members being constructed relative to each other to provide discrete displacements of the second member relative to the first member along the first and second axes.
28. In the system set forth in claim 26: the first and second members having magnetic characteristics and the first means including first windings, each associated with a difierent pair of the first means and each energiza'ble to produce a magnetic force between the first and second members for providing a displacement of the second member relative to the first member along the first axis, and second means including second windings, each asso ciated with a difierent pair of the second means and each energizable to produce a magnetic force between; the first and second members for providing a displacement of the second member relative to the first member along the second axis.
29. In the system set forth in claim 26: the first means being constructed to inhibit rotation of the second member relative to the first member about an axis substantially normal to a surface defined by the first and second axes.
30. In the system set forth in claim 26: the first and second members being planar and being disposed in contiguous relationship to each other.
31. In a system for providing a controlled relative movement between two members along a particular axis,
a first member,
a second member disposed relative to the first member for displacement between the first and second members along the particular axis,
means for providing variable signals controllably haw ing first and second opposite polarities, and
first and second means operatively coupled to a particular one of the first and second members and interacting with the other one of the first and second members and disposed in phase-displaced relationship to each other and respectively responsive to the variations in the variable signals for providing progressive displacements between the first and second members along the particular axis in accordance with such variations, each of the first and second means respectively having first and second ele'ments disposed in phase-displaced relationship to each other and to the first and second elements in the other one of the first and second means.
32. In the system set forth in claim 31, the other one of the first and second members having maglnetic properties and the first and second means being provided with magnetic properties for interacting with the other one of the first and second members to produce a relative displacement between the first and second members.
33. In a system for providing a controlled relative movement between two members along a particular axis,
a first member,
a second member disposed relative to the first member for displacement relative to the first membe r along the particular axis, the first member being constructed to interact with the second member to provide an indication of the position of the first and second members relative to each other along the particular axis in accordance with the displacement of the first member relative to the second member along the particular axis, and
pairs of first means disposed on the second member and selectively energizable for producing an inter- 14 action between the first and second members to provide a displacement of the second member relative to the first member along the particular axis,
the first means in each pair being disposed in opposed phase relationship to the other means in each pair relative to the first member and each pair of first means being displaced in phase from the other pairs of first means relative to the first member.
34. In a system set forth in claim 33, the first member being in the form: of a grid structure and the pairs of first means being constructed to interact with the grid structure to provide progressive displacements of the second member relative to the first member along the particular axis.
References Cited The following references, cited by the Examiner, are of record in the patented file of this patent or the original patent.
UNITED STATES PATENTS 2,833,941 5/1958 Rosenberg et a1 309149 3,146,386 8/1964 Gerber 3188 3,268,747 8/1966 Snowdon 318 X 3,273,727 9/1966 Rogers et a1. 310-43 X 3,357,511 12/1967 Mackie 31013 X 3,449,754 6/1969 StutZ.
DONOVAN F. DUGGAN, Primary Examiner US. Cl. X.R.
US27289D 1967-10-30 1970-04-09 Magnetic positioning device Expired USRE27289E (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67884267A 1967-10-30 1967-10-30
US3143470A 1970-04-09 1970-04-09

Publications (1)

Publication Number Publication Date
USRE27289E true USRE27289E (en) 1972-02-15

Family

ID=26707239

Family Applications (2)

Application Number Title Priority Date Filing Date
US678842A Expired - Lifetime US3457482A (en) 1967-10-30 1967-10-30 Magnetic positioning device
US27289D Expired USRE27289E (en) 1967-10-30 1970-04-09 Magnetic positioning device

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US678842A Expired - Lifetime US3457482A (en) 1967-10-30 1967-10-30 Magnetic positioning device

Country Status (1)

Country Link
US (2) US3457482A (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001342A1 (en) * 1978-12-21 1980-06-26 R Barton Stepper motor
US4622609A (en) * 1984-05-04 1986-11-11 Barton R E Read/write head positioning apparatus
US5247608A (en) * 1991-04-01 1993-09-21 At&T Bell Laboratories Method and apparatus for achieving dynamic path control of multiple robots
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
US5874820A (en) * 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6188147B1 (en) 1998-10-02 2001-02-13 Nikon Corporation Wedge and transverse magnet arrays
US6208045B1 (en) 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6252234B1 (en) 1998-08-14 2001-06-26 Nikon Corporation Reaction force isolation system for a planar motor
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6798089B1 (en) * 2001-07-05 2004-09-28 Anorad Corporation Forcer and associated three phase linear motor system
US20050002009A1 (en) * 1994-04-01 2005-01-06 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
USRE40774E1 (en) 1995-05-30 2009-06-23 Asml Netherlands B.V. Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
USRE41232E1 (en) 2000-04-24 2010-04-20 Nikon Corporation Wafer positioner with planar motor and mag-lev fine stage

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU437395B2 (en) * 1968-06-25 1973-06-28 Lukey Mufflers Pty. Limited Improvements in apparatus for moving a work piece
US3643195A (en) * 1969-11-17 1972-02-15 Bruce A Sawyer Magnetic takeup device for umbilical cable or the like
US3575650A (en) * 1970-01-08 1971-04-20 Werner H Fengler Linear high-torque electric stepping motor system
US4009428A (en) * 1970-05-11 1977-02-22 Sawyer Bruce A Control system for magnetic positioning device
US3771035A (en) * 1970-05-28 1973-11-06 Teletype Corp Plural lineal movement system and process
US3771034A (en) * 1970-05-28 1973-11-06 Teletype Corp Linear electric motor and displacement process
FR2094545A5 (en) * 1970-06-24 1972-02-04 Lelandais Gilbert
US3875489A (en) * 1971-02-10 1975-04-01 Brimer Joe W Von Linear self synchronous electromagnetic drive system for a sewing machine
US3656014A (en) * 1971-04-08 1972-04-11 Gerber Scientific Instr Co Damping apparatus for a linear step motor having two translational degrees of freedom
US3836835A (en) 1971-04-19 1974-09-17 B Sawyer Multi axes linear movement positioning system
US3857078A (en) * 1971-06-28 1974-12-24 B Sawyer Actuating system
US3857075A (en) * 1971-07-19 1974-12-24 B Sawyer Positioning device
CA959105A (en) * 1971-07-19 1974-12-10 Bruce A. Sawyer Positioning device
US3878411A (en) * 1972-06-21 1975-04-15 Xynetics Inc Compensating positioning system
JPS5136441B2 (en) * 1972-09-08 1976-10-08
JPS5413551B2 (en) * 1973-04-26 1979-05-31
EP0055703A1 (en) * 1980-07-11 1982-07-14 SCHMIDT, Günther Electrodynamic driving device
JPS58186364A (en) * 1982-04-21 1983-10-31 Matsushita Electric Ind Co Ltd X-y linear motor apparatus
US4509001A (en) * 1983-03-04 1985-04-02 Matsushita Electric Industrial Co., Ltd. Brushless linear servomotor
US4509002A (en) * 1983-12-20 1985-04-02 International Business Machines Corporation Precision X-Y positioner
EP0145958B1 (en) * 1983-12-20 1990-01-17 International Business Machines Corporation Positioning apparatus
US4514674A (en) * 1983-12-22 1985-04-30 International Business Machines Corporation Electromagnetic X-Y-Theta precision positioner
US4535260A (en) * 1984-10-15 1985-08-13 Teleflex Incorporated Magnetic linear motor
US4706007A (en) * 1985-06-25 1987-11-10 Kabushiki Kaisha Yaskawa Denki Seisakusho Surface pulse motor
US4963809A (en) * 1988-05-25 1990-10-16 Fuji Electric Co., Ltd. Linear step motor type driving apparatus for driving a longitudinally movable body
US5099216A (en) * 1988-11-04 1992-03-24 Ron Pelrine Magnetically levitated apparatus
US5434504A (en) * 1993-10-01 1995-07-18 International Business Machines Corporation Position sensors for linear motors including plural symmetrical fluxes generated by a planar drive coil and received by planar sense coils being colinear along an axis of motion
AT409043B (en) * 2000-02-07 2002-05-27 Heinz Peter Dipl Brandstetter DEVICE AND METHOD FOR DETERMINING TWO-DIMENSIONAL POSITIONS
US7135827B1 (en) 2004-04-15 2006-11-14 Lampson Clark E Sawyer motor forcer with integrated drive electronics
US7148590B1 (en) 2004-07-23 2006-12-12 Lampson Clark E Polyphase sawyer motor forcer
DE102004045303A1 (en) * 2004-09-18 2006-04-06 Pasim Direktantriebe Gmbh Air bearing planar direct drive for linear direct current motor, has pole teeth on prismatic cut stator and rotor in tooth pitch period, which ranges between certain millimeters, where period is sum of tooth width and tooth base width
DE102006016503A1 (en) * 2006-04-07 2007-10-18 Siemens Ag Encoder device for an electrical machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3273727A (en) * 1966-09-20 Load handling apparatus
US2833941A (en) * 1955-11-02 1958-05-06 Gen Dynamics Corp Automation system
US3146386A (en) * 1963-07-10 1964-08-25 Gerber Scientific Instr Co Stepping motor drive
US3268747A (en) * 1964-02-28 1966-08-23 Superior Electric Co Linear electric motor
US3357511A (en) * 1965-10-11 1967-12-12 Gen Motors Corp Air cushion supported, omnidirectionally steerable, traveling magnetic field propulsion device

Cited By (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980001342A1 (en) * 1978-12-21 1980-06-26 R Barton Stepper motor
US4622609A (en) * 1984-05-04 1986-11-11 Barton R E Read/write head positioning apparatus
US5247608A (en) * 1991-04-01 1993-09-21 At&T Bell Laboratories Method and apparatus for achieving dynamic path control of multiple robots
US6927840B2 (en) 1994-04-01 2005-08-09 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5528118A (en) * 1994-04-01 1996-06-18 Nikon Precision, Inc. Guideless stage with isolated reaction stage
US20050002009A1 (en) * 1994-04-01 2005-01-06 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US5744924A (en) * 1994-04-01 1998-04-28 Nikon Corporation Guideless stage with isolated reaction frame
US6841965B2 (en) 1994-04-01 2005-01-11 Nikon Corporation Guideless stage with isolated reaction stage
US7365513B1 (en) 1994-04-01 2008-04-29 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6989647B1 (en) 1994-04-01 2006-01-24 Nikon Corporation Positioning device having dynamically isolated frame, and lithographic device provided with such a positioning device
US6281654B1 (en) 1994-04-01 2001-08-28 Nikon Corporation Method for making apparatus with dynamic support structure isolation and exposure method
US6271640B1 (en) 1994-04-01 2001-08-07 Nikon Corporation Exposure apparatus having reaction frame
US7573225B2 (en) 1994-06-27 2009-08-11 Nikon Corporation Electromagnetic alignment and scanning apparatus
US20050280390A1 (en) * 1994-06-27 2005-12-22 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6252370B1 (en) 1994-06-27 2001-06-26 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6844695B2 (en) 1994-06-27 2005-01-18 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6255796B1 (en) 1994-06-27 2001-07-03 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6255795B1 (en) 1994-06-27 2001-07-03 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6969966B2 (en) 1994-06-27 2005-11-29 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6246204B1 (en) 1994-06-27 2001-06-12 Nikon Corporation Electromagnetic alignment and scanning apparatus
US7012398B2 (en) 1994-06-27 2006-03-14 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6323935B1 (en) 1994-06-27 2001-11-27 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6329780B1 (en) 1994-06-27 2001-12-11 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6844696B2 (en) 1994-06-27 2005-01-18 Nikon Corporation Electromagnetic alignment and scanning apparatus
US6693402B2 (en) 1994-06-27 2004-02-17 Nikon Corporation Electromagnetic alignment and scanning apparatus
US20030184253A1 (en) * 1994-06-27 2003-10-02 Nikon Corporation Electromagnetic alignment and scanning apparatus
US5623853A (en) * 1994-10-19 1997-04-29 Nikon Precision Inc. Precision motion stage with single guide beam and follower stage
US6316901B2 (en) 1995-04-04 2001-11-13 Nikon Corporation Exposure apparatus and method utilizing isolated reaction frame
US6188195B1 (en) 1995-04-04 2001-02-13 Nikon Corporation Exposure method, and method of making exposure apparatus having dynamically isolated support structure
US5874820A (en) * 1995-04-04 1999-02-23 Nikon Corporation Window frame-guided stage mechanism
US6683433B2 (en) 1995-04-04 2004-01-27 Nikon Corporation Exposure apparatus and method utilizing isolated reaction frame
US6175404B1 (en) 1995-04-04 2001-01-16 Nikon Corporation Exposure apparatus having dynamically isolated reaction frame
US6747732B1 (en) 1995-04-04 2004-06-08 Nikon Corporation Method of making exposure apparatus with dynamically isolated reaction frame
US6246202B1 (en) 1995-04-04 2001-06-12 Nikon Corporation Method of making exposure apparatus with dynamically isolated reaction frame
USRE40774E1 (en) 1995-05-30 2009-06-23 Asml Netherlands B.V. Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
US5760564A (en) * 1995-06-27 1998-06-02 Nikon Precision Inc. Dual guide beam stage mechanism with yaw control
US6252234B1 (en) 1998-08-14 2001-06-26 Nikon Corporation Reaction force isolation system for a planar motor
US6188147B1 (en) 1998-10-02 2001-02-13 Nikon Corporation Wedge and transverse magnet arrays
US6208045B1 (en) 1998-11-16 2001-03-27 Nikon Corporation Electric motors and positioning devices having moving magnet arrays and six degrees of freedom
USRE41232E1 (en) 2000-04-24 2010-04-20 Nikon Corporation Wafer positioner with planar motor and mag-lev fine stage
US6445093B1 (en) 2000-06-26 2002-09-03 Nikon Corporation Planar motor with linear coil arrays
US6452292B1 (en) 2000-06-26 2002-09-17 Nikon Corporation Planar motor with linear coil arrays
US6798089B1 (en) * 2001-07-05 2004-09-28 Anorad Corporation Forcer and associated three phase linear motor system

Also Published As

Publication number Publication date
US3457482A (en) 1969-07-22

Similar Documents

Publication Publication Date Title
USRE27289E (en) Magnetic positioning device
US3376578A (en) Magnetic positioning device
USRE27436E (en) Magnetic positioning device
US3466518A (en) Rotary stepping motors and control systems therefor
US3268747A (en) Linear electric motor
US3829746A (en) Linear motor with electro-magnetic control
DE69634768T2 (en) Apparatus for controlling the position of a support table, and support table apparatus, exposure apparatus and manufacturing method using the same
US4555650A (en) Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus
US3895281A (en) Linear motor positioning device with position detent means
US7148590B1 (en) Polyphase sawyer motor forcer
JPH0461588B2 (en)
US3881139A (en) 3-Axis pulse operated linear motor
US4230978A (en) Impulse drive system
US4835424A (en) Platen laminated in mutually perpendicular direction for use with linear motors and the like
WO2001091204A3 (en) Displacement device
GB988819A (en) Rotary electromagnetic actuators
US3140403A (en) Matrix type switch arrangement
EP0207353A1 (en) Surface pulse motor
GB2024266A (en) Electromagnetic selection device for the needles of a knitting machine
FR2584328B1 (en) MAGNETIC TRAY WITH PERMANENT MAGNETS, WITH ON-OFF CONTROL
US4224589A (en) Low energy magnetic actuator
US10186914B2 (en) Input amplitude modulation control for a multi-degree of freedom electromagnetic machine
US3465334A (en) Rotary electromagnetic indicator device
US3612241A (en) Keyboard switch construction
US3142788A (en) Reciprocating electromagnetic actu-

Legal Events

Date Code Title Description
AS Assignment

Owner name: XYNETICS, INC. 2901 CORONADO DR. SANTA CLARA, CA.

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST.;ASSIGNOR:SAWYER BRUCE A;REEL/FRAME:003831/0332

Effective date: 19810224

STCK Information on status: patent revival

Free format text: ABANDONED - RESTORED