USRE37960E1 - Method for forming an oxynitride film in a semiconductor device - Google Patents
Method for forming an oxynitride film in a semiconductor device Download PDFInfo
- Publication number
- USRE37960E1 USRE37960E1 US08/824,879 US82487997A USRE37960E US RE37960 E1 USRE37960 E1 US RE37960E1 US 82487997 A US82487997 A US 82487997A US RE37960 E USRE37960 E US RE37960E
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- US
- United States
- Prior art keywords
- containing gas
- temperature
- oxidation
- ammonia
- nitrous oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02321—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer
- H01L21/02323—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment introduction of substances into an already existing insulating layer introduction of oxygen
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
- H01L21/02233—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of the semiconductor substrate or a semiconductor layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02337—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a gas or vapour
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/3143—Inorganic layers composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides, e.g. formation of oxinitride by oxidation of nitride layers
- H01L21/3144—Inorganic layers composed of alternated layers or of mixtures of nitrides and oxides or of oxinitrides, e.g. formation of oxinitride by oxidation of nitride layers on silicon
Definitions
- the present invention relates to a method for forming an oxide film in a semiconductor device, more particularly to a method for forming an oxide film, which can obtain an oxide film of good quality by growing an oxide film under environment of mixed gas of N 2 O gas and NH 3 gas during a main oxidation process and by using N 2 O gas during a pre-oxidation process and a post-oxidation process.
- N 2 O gas is resolved into 64.3% of N 2 , 31.0% of O 2 gas and 4.7% of NO gas in the oxidation chamber under a temperature of 950 degree Celsius.
- a method for forming an oxide film comprises the steps of:
- the FIGURE is a flow chart illustrating the method of oxidation according to the present invention.
- a wafer is loaded in an oxidation chamber containing N 2 gas at a temperature of 700 degree Celsius. Temperature in the oxidation chamber is increased to 900 degree Celsius and then stabilized. Then a pre-oxidation process, main oxidation process and post-oxidation process are executed successively in the oxidation chamber in order to form an oxide film on the surface of the wafer.
- the pre-oxidation process is executed with N 2 O gas
- the main oxidation process is performed with a mixed gas of N 2 O gas and NH 3 gas
- the post-oxidation process is done with N 2 O gas.
- the temperature of interior of the oxidation chamber is dropped to 700 degree Celsius, and N 2 gas is supplied in the oxidation chamber.
- the oxidation process is completed, and the wafer is unloaded from the oxidation chamber.
- temperature in the oxidation chamber pressure and flow rate of process gases(N 2 O gas and NH 3 gas) are varied according to the condition(thickness) of the oxide film.
- the pre-oxidation and post-oxidation processes using N 2 O gas are performed prior to and after the main oxidation process using the mixed gas of N 2 O gas and NH 3 gas.
- the post-oxidation process is undertaken so as to prevent a nitridation of the surface of the wafer.
- the post-oxidation process is done to prevent penetration of any remaining NH 3 to the oxide film and to prevent degeneration of the interface characteristic by hydrogen.
- NH 3 gas is mixed with N 2 O gas, the proper ratio of NH 3 gas in the mixed gas is 0.5-20%. Because of the lower activation energy of NH 3 gas, the influx of nitrogen depends upon amount of NH 3 gas. Therefore, enough nitrogen can be introduced in the oxide film by the mixed gas of a small quantity of NH 3 gas and N2 O, and the incorporated amount of nitrogen can be controlled by a rate of NH 3 gas. Also, hydrogen is acted upon oxygen which is resolved into N 2 O gas, and then is made OH as a wet oxidizer, OH accelerates the oxidation process.
- the insulation characteristics of an oxide film is increased by an introducing nitrogen
- the amount of nitrogen can be regulated by controlling of the amount of NH 3 gas.
- the present invention can solve the problems encountered when NH 3 gas and N 2 O gas are used separately for the oxidation process, by using of the mixed gas of NH 3 gas and N 2 O gas.
Abstract
Description
Claims (40)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/824,879 USRE37960E1 (en) | 1995-02-27 | 1997-03-26 | Method for forming an oxynitride film in a semiconductor device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/394,607 US5541141A (en) | 1995-02-27 | 1995-02-27 | Method for forming an oxynitride film in a semiconductor device |
US08/824,879 USRE37960E1 (en) | 1995-02-27 | 1997-03-26 | Method for forming an oxynitride film in a semiconductor device |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/394,607 Reissue US5541141A (en) | 1995-02-27 | 1995-02-27 | Method for forming an oxynitride film in a semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
USRE37960E1 true USRE37960E1 (en) | 2003-01-07 |
Family
ID=23559680
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/394,607 Ceased US5541141A (en) | 1995-02-27 | 1995-02-27 | Method for forming an oxynitride film in a semiconductor device |
US08/824,879 Expired - Lifetime USRE37960E1 (en) | 1995-02-27 | 1997-03-26 | Method for forming an oxynitride film in a semiconductor device |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/394,607 Ceased US5541141A (en) | 1995-02-27 | 1995-02-27 | Method for forming an oxynitride film in a semiconductor device |
Country Status (1)
Country | Link |
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US (2) | US5541141A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080299780A1 (en) * | 2007-06-01 | 2008-12-04 | Uv Tech Systems, Inc. | Method and apparatus for laser oxidation and reduction |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3660391B2 (en) * | 1994-05-27 | 2005-06-15 | 株式会社東芝 | Manufacturing method of semiconductor device |
KR100187674B1 (en) * | 1994-07-07 | 1999-06-01 | 김주용 | Quartz for fabricating semiconductor device and method of forming gate oxide using the same |
US6362114B1 (en) * | 1996-11-12 | 2002-03-26 | Micron Technology, Inc. | Semiconductor processing methods of forming an oxynitride film on a silicon substrate |
US5821172A (en) * | 1997-01-06 | 1998-10-13 | Advanced Micro Devices, Inc. | Oxynitride GTE dielectrics using NH3 gas |
US5851888A (en) * | 1997-01-15 | 1998-12-22 | Advanced Micro Devices, Inc. | Controlled oxide growth and highly selective etchback technique for forming ultra-thin oxide |
US5840610A (en) * | 1997-01-16 | 1998-11-24 | Advanced Micro Devices, Inc. | Enhanced oxynitride gate dielectrics using NF3 gas |
US5877057A (en) * | 1997-01-17 | 1999-03-02 | Advanced Micro Devices, Inc. | Method of forming ultra-thin oxides with low temperature oxidation |
JPH10209168A (en) * | 1997-01-24 | 1998-08-07 | Nec Corp | Manufacture of semiconductor device |
US5851892A (en) * | 1997-05-07 | 1998-12-22 | Cypress Semiconductor Corp. | Fabrication sequence employing an oxide formed with minimized inducted charge and/or maximized breakdown voltage |
US6147011A (en) | 1998-02-28 | 2000-11-14 | Micron Technology, Inc. | Methods of forming dielectric layers and methods of forming capacitors |
US6316316B1 (en) * | 1998-03-06 | 2001-11-13 | Texas Instruments-Acer Incorporated | Method of forming high density and low power flash memories with a high capacitive-coupling ratio |
US6114258A (en) * | 1998-10-19 | 2000-09-05 | Applied Materials, Inc. | Method of oxidizing a substrate in the presence of nitride and oxynitride films |
KR100682190B1 (en) * | 1999-09-07 | 2007-02-12 | 동경 엘렉트론 주식회사 | Method and apparatus for forming insulating film containing silicon oxy-nitride |
US6211045B1 (en) * | 1999-11-30 | 2001-04-03 | Vlsi Technology, Inc. | Incorporation of nitrogen-based gas in polysilicon gate re-oxidation to improve hot carrier performance |
KR100933835B1 (en) * | 2007-11-12 | 2009-12-24 | 주식회사 하이닉스반도체 | Manufacturing Method of Flash Memory Device |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3422321A (en) * | 1966-06-20 | 1969-01-14 | Sperry Rand Corp | Oxygenated silicon nitride semiconductor devices and silane method for making same |
US4363868A (en) * | 1979-12-26 | 1982-12-14 | Fujitsu Limited | Process of producing semiconductor devices by forming a silicon oxynitride layer by a plasma CVD technique which is employed in a selective oxidation process |
US4438157A (en) * | 1980-12-05 | 1984-03-20 | Ncr Corporation | Process for forming MNOS dual dielectric structure |
US4532022A (en) * | 1979-09-14 | 1985-07-30 | Fujitsu Limited | Process of producing a semiconductor device |
US4543707A (en) * | 1983-06-30 | 1985-10-01 | Kabushiki Kaisha | Method of forming through holes by differential etching of stacked silicon oxynitride layers |
US4960727A (en) * | 1987-11-17 | 1990-10-02 | Motorola, Inc. | Method for forming a dielectric filled trench |
US5264396A (en) * | 1993-01-14 | 1993-11-23 | Micron Semiconductor, Inc. | Method for enhancing nitridation and oxidation growth by introducing pulsed NF3 |
US5296411A (en) * | 1993-04-28 | 1994-03-22 | Advanced Micro Devices, Inc. | Method for achieving an ultra-reliable thin oxide using a nitrogen anneal |
US5338954A (en) * | 1991-10-31 | 1994-08-16 | Rohm Co., Ltd. | Semiconductor memory device having an insulating film and a trap film joined in a channel region |
US5397720A (en) * | 1994-01-07 | 1995-03-14 | The Regents Of The University Of Texas System | Method of making MOS transistor having improved oxynitride dielectric |
US5403786A (en) * | 1987-07-31 | 1995-04-04 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for fabricating the same |
US5631199A (en) * | 1994-07-07 | 1997-05-20 | Hyundai Electronics Industries Co., Ltd. | Furnace for manufacturing a semiconductor device, and a method of forming a gate oxide film by utilizing the same |
-
1995
- 1995-02-27 US US08/394,607 patent/US5541141A/en not_active Ceased
-
1997
- 1997-03-26 US US08/824,879 patent/USRE37960E1/en not_active Expired - Lifetime
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3422321A (en) * | 1966-06-20 | 1969-01-14 | Sperry Rand Corp | Oxygenated silicon nitride semiconductor devices and silane method for making same |
US4532022A (en) * | 1979-09-14 | 1985-07-30 | Fujitsu Limited | Process of producing a semiconductor device |
US4581622A (en) * | 1979-09-14 | 1986-04-08 | Fujitsu Limited | UV erasable EPROM with UV transparent silicon oxynitride coating |
US4363868A (en) * | 1979-12-26 | 1982-12-14 | Fujitsu Limited | Process of producing semiconductor devices by forming a silicon oxynitride layer by a plasma CVD technique which is employed in a selective oxidation process |
US4438157A (en) * | 1980-12-05 | 1984-03-20 | Ncr Corporation | Process for forming MNOS dual dielectric structure |
US4543707A (en) * | 1983-06-30 | 1985-10-01 | Kabushiki Kaisha | Method of forming through holes by differential etching of stacked silicon oxynitride layers |
US5403786A (en) * | 1987-07-31 | 1995-04-04 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method for fabricating the same |
US4960727A (en) * | 1987-11-17 | 1990-10-02 | Motorola, Inc. | Method for forming a dielectric filled trench |
US5338954A (en) * | 1991-10-31 | 1994-08-16 | Rohm Co., Ltd. | Semiconductor memory device having an insulating film and a trap film joined in a channel region |
US5264396A (en) * | 1993-01-14 | 1993-11-23 | Micron Semiconductor, Inc. | Method for enhancing nitridation and oxidation growth by introducing pulsed NF3 |
US5296411A (en) * | 1993-04-28 | 1994-03-22 | Advanced Micro Devices, Inc. | Method for achieving an ultra-reliable thin oxide using a nitrogen anneal |
US5397720A (en) * | 1994-01-07 | 1995-03-14 | The Regents Of The University Of Texas System | Method of making MOS transistor having improved oxynitride dielectric |
US5631199A (en) * | 1994-07-07 | 1997-05-20 | Hyundai Electronics Industries Co., Ltd. | Furnace for manufacturing a semiconductor device, and a method of forming a gate oxide film by utilizing the same |
Non-Patent Citations (3)
Title |
---|
Arakawa, T. et al., "Effect of NH3 nitridation on time-dependent dielectric breaddown characteristics of heavily oxynitride tunnel oxide films", Electronics Letters, vol. 30, No. 4, Feb. 17, 1994.* * |
S. Wolf and R. N. Tauber, Silicon Processing for the VLSI Era, Volume I, Process Technology, Lattice Press (eds.). See Chapter 6, "Chemical Vapor Deposition of Amorphous and Polycrystalline Thin Films," specifically p. 195, "Silicon Oxynitrides" (1986). |
Yoon et al., "MOS characteristic of NH3 nitrided N2O grown oxides", IEEE Electron Device Letters, vol. 14, No. 4, Apr. 1993.* * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080299780A1 (en) * | 2007-06-01 | 2008-12-04 | Uv Tech Systems, Inc. | Method and apparatus for laser oxidation and reduction |
Also Published As
Publication number | Publication date |
---|---|
US5541141A (en) | 1996-07-30 |
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