USRE39426E1 - Thermally enhanced flip chip package and method of forming - Google Patents
Thermally enhanced flip chip package and method of forming Download PDFInfo
- Publication number
- USRE39426E1 USRE39426E1 US09/379,985 US37998599A USRE39426E US RE39426 E1 USRE39426 E1 US RE39426E1 US 37998599 A US37998599 A US 37998599A US RE39426 E USRE39426 E US RE39426E
- Authority
- US
- United States
- Prior art keywords
- flip chip
- thermally conductive
- planar member
- substrate
- chip package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims abstract description 40
- 239000003989 dielectric material Substances 0.000 claims abstract description 14
- 238000004891 communication Methods 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims description 7
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000004519 grease Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004593 Epoxy Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000008393 encapsulating agent Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
- H01L23/4334—Auxiliary members in encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73253—Bump and layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
Definitions
- This invention relates generally to encapsulated flip chips and more particularly to a flip chip package having a thermally conductive member encapsulated with the flip chip.
- Flip chips are small semiconductor dies having terminations all on one side in the form of solder pads or bump contacts. Typically, the surface of the chip has been passivated or otherwise treated. The flip chip derives its name from the practice of flipping, or turning, the chip over after manufacture, prior to attaching the chip to a matching substrate.
- Thermally conductive caps have also been provided for flip chips.
- a capped chip has a thin layer of a thermally conductive grease between the chip and the cap.
- the present invention is directed to overcoming the problems set forth above. It is desirable to have a flip chip package that provides low thermal resistance, and is economical to manufacture. It is also desirable to have such a flip chip package and method of manufacture that uses conventional transfer mold techniques. It is also desirable to have such a flip chip package that does not require the presence of a thermally conductive grease between the chip and a heat conducting member.
- a flip chip package includes a substrate having a plurality of electrical circuits disposed within the substrate, a flip chip mounted on the substrate in electrical communication with predefined ones of the electrical circuits disposed in the substrate, and a thermally conductive planar member disposed in thermally conductive contact with an upper surface of the flip chip.
- the flip chip package also includes the substantially rigid dielectric material that surrounds the edge surfaces of the thermally conductive planar member, the edge surfaces of the flip chip, and at least a portion of the substrate.
- the flip chip package embodying the present invention includes include the thermally conductive planar member having a thickness selected to provide a composite structure with the flip chip that extends a predetermined distance above the substrate.
- a method of forming a thermally enhanced flip chip package includes providing a substrate and a flip chip which are connected together such that the electrical contacts on the flip chip are in electrical communication with predetermined ones of the electrical contacts on the substrate.
- the method also includes providing a thermally conductive planar member which is placed on the upper surface of the flip chip in thermally conductive communication with the upper surface.
- the assembled planar member, flip chip and substrate are placed in a mold cavity wherein a predefined portion of the substrate cooperates to form a substantially closed cavity.
- the moldable dielectric material is injected into the closed mold cavity and, after curing, forms a substantially rigid covering about the edges of the thermally conductive planar member, the flip chip, and the predefined portion of the substrate.
- thermally enhanced flip chip package includes selecting a thermally conductive planar member having a thickness that is selected so that when the thermally conductive planar member is placed on the flip chip, the combined thickness of the planar member and the distance that the flip chip extends above the surface of the substrate, are substantially equal to the height of the aforementioned mold cavity.
- FIG. 1 is a schematic sectional view of a flip chip package embodying the present invention, showing the flip chip and substrate components of the package in elevation;
- FIG. 2 is a flow diagram of the principal steps carried out in forming a flip chip package, in accordance with the method embodying the present invention.
- the flip chip package 10 includes a flip chip 12 that has a plurality of electrical contacts 14 that are electronically connected, for example by soldered joints, to corresponding contacts associated with one or more electrical circuits disposed in a substrate member.
- the substrate member 16 is typically a laminated circuit board having a number of electrical circuits defined within the member and is adapted for interconnection with other components of an electronic assembly.
- the flip chip 12 has a planar upper surface 12 18 that is spaced from the substrate 16 by a predefined distance, and a plurality of edge surfaces 20 that extend around a defined perimeter of the planar surface 18 and are disposed in substantially perpendicular relationship with the planar surface 18 .
- the thermally enhanced flip chip package 10 embodying the present invention includes a thermally conductive planar member 22 that is disposed in thermally conductive communication with the planar upper surface 18 of the flip chip 12 .
- the thermally conductive planar member 22 has a plurality of edge surfaces 24 that extend around the periphery of the planar member 22 .
- the thermally enhanced flip chip package embodying the present invention also includes a substantially rigid dielectric material 26 , such as Toshiba XK6000 thermoset plastic, that surrounds, in intimate bonded contact, the edge surfaces 24 of the thermally conductive planar member 22 , the edge surfaces 20 of the flip chip 12 , and at least a portion of the laminated substrate 16 .
- the dielectric material 26 effectively encapsulates the flip chip 12 , and a portion of the planar member 22 and the substrate 16 , without covering the upper exposed surface of the thermally conductive planar member 22 .
- the thermally conductive planar members 22 may be formed by stamping from sheets, in a variety of thicknesses, and at very low cost. By using the appropriate thickness of planar member 22 , various thicknesses of chips may be accommodated within a single mold. For that purpose, it is desirable that the thermally conductive planar member 22 have a thickness that is selected to provide a composite structure, when mounted on top of the flip chip 12 , that extends a fixed predetermined distance above the substrate member 16 . Thus, by simply varying the thickness of the planar member 22 , the same mold cavity may be used for variously sized chips.
- the thermally conducted conductive planar member 22 is placed in the mold cavity prior to inserting the flip chip 12 attached to the substrate member 16 into the mold cavity, after which the dielectric material 26 is injected into the cavity.
- the thermally conductive planar member 22 may be prebonded to the planar upper surface 18 of the flip chip 12 by a thermally conductive adhesive material 28 prior to placing the bonded assembly into the mold cavity and injecting the dielectric material 26 into the cavity.
- the thermally conductive planar material is formed of copper, which has a thermal coefficient of expansion substantially equal to that of laminated glass-epoxy printed wiring boards.
- the method of forming an enhanced flip chip package 10 embodying the present invention includes providing a substrate member 16 having a plurality of electrical contacts disposed on an upper surface of the substrate member, as indicated at block 30 in FIG. 2 , and also providing a flip chip 12 having a plurality of electrical contacts 14 disposed on a lower surface, as indicated at block 32 .
- the flip chip 12 is attached to the substrate member 16 , as indicated at block 34 , typically by a heating cycle in which solder interconnections are formed.
- an underfill material such as Dexter's HYSOLTM 4511 epoxy may be used to provide electrical isolation between the connected contacts.
- a thermally conductive planar member 22 preferably a copper plate, is provided as indicated at block 36 , and then placed on the upper surface 18 of the flip chip 12 so that the planar member 22 is in thermal communication with the upper surface of the flip chip 12 , as indicated at block 38 , either by intimate contact or by an adhesive bond to the upper surface 18 .
- the aligned thermally conductive planar member 22 , the flip chip 12 , and the substrate member 16 are then placed in a mold cavity, as indicated at block 40 .
- a portion of the substrate member 16 i.e., the immediate area surrounding the mounted flip chip 12 , cooperates with other predefined surfaces of the mold cavity to form a substantially closed cavity.
- a moldable dielectric material such as a highly-filled epoxy, is then injected into the transfer mold, as indicated at block 42 , and surrounds the edge surfaces 24 of the planar member 22 and the flip chip 12 . As can be seen in FIG.
- the dielectric material 26 also is forced into intimate contact against a portion of a lower surface of the thermally conductive member 22 and the surrounding area of the surface of the substrate member 16 , thus essentially providing effective encapsulation of the flip chip 12 and the thermally conductive planar member 22 with the substrate member 16 .
- a substantially rigid dielectric covering is thereby formed over the thermally conductive planar member 22 , the flip chip 12 , and the predefined portion of the substrate member 16 , providing an integral, essentially inseparable, package 10 .
- the formed package 10 is removed from the mold, as indicated at block 46 .
- a single mold cavity may be advantageously used for a variety of differently sized flip chips 12 by varying the thickness of the planar member 22 . If accurately sized, there will be no dielectric material over the top exposed surface of the planar member 22 . This is desirable so that the heat conductive path from the flip chip 12 has a minimum number of interfacial resistances in the path of heat flow. Thus, it is desirable to control the thickness of the planar member 22 so that its upper surface is flush with the surface of the mold compound on the finished part. In this arrangement, no adhesive material would be required between the thermally conductive planar member 22 and the flip chip 12 , although a thermally conductive adhesive material as may be used, if desired, as an assembly aid.
- the flip chip package arrangement and method of forming provides a flip chip package 10 that is reliable in performance and easy to manufacture. These objectives are accomplished by using the transfer mold technique to encapsulate the chip, along with a thermally conductive planar member 22 that is used as an insert during molding. Alternatively, the insert 22 maybe may be attached to the top of the flip chip 12 by use of a small amount of a thermally conductive adhesive material.
- the planar member 22 may be stamped from sheets, of varying thicknesses, at very low cost. By using the appropriate thickness of insert, any thickness chip can be accommodated within a single mold.
- the thickness of the planar member 22 should be selected to match the height of the cavity in the mold, when combined with the flip chip 12 , to avoid excessive loads on the chip-to-substrate interconnection when the mold is clamped.
- the thermal performance of a flip chip package 10 embodying the present invention will be substantially identical to that of a capped chip, using thermal grease.
- the flip chip package 10 embodying the present invention has the advantage of avoiding any possibility of pumping which may deplete the grease layer and increase the thermal resistance, as may occur with capped chips.
- the performance of the flip chip package 10 embodying the present invention is significantly better than that of any package which uses overmold without the thermally conductive planar member 22 .
- bending of the package 10 is reduced as a result of balancing the expansion of the substrate member 16 and the planar member 22 , providing high reliability and improved coplanarity when embodied in a Ball Grid Array (BGA) package.
- BGA Ball Grid Array
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/379,985 USRE39426E1 (en) | 1996-06-19 | 1999-08-24 | Thermally enhanced flip chip package and method of forming |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66615596A | 1996-06-19 | 1996-06-19 | |
US08/715,212 US5726079A (en) | 1996-06-19 | 1996-09-17 | Thermally enhanced flip chip package and method of forming |
US09/379,985 USRE39426E1 (en) | 1996-06-19 | 1999-08-24 | Thermally enhanced flip chip package and method of forming |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/715,212 Reissue US5726079A (en) | 1996-06-19 | 1996-09-17 | Thermally enhanced flip chip package and method of forming |
Publications (1)
Publication Number | Publication Date |
---|---|
USRE39426E1 true USRE39426E1 (en) | 2006-12-12 |
Family
ID=27099394
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/379,985 Expired - Lifetime USRE39426E1 (en) | 1996-06-19 | 1999-08-24 | Thermally enhanced flip chip package and method of forming |
Country Status (1)
Country | Link |
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US (1) | USRE39426E1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090218703A1 (en) * | 2008-02-29 | 2009-09-03 | Soo Gil Park | Lamination Tape for Reducing Chip Warpage and Semiconductor Device Containing Such Tape |
US20140335655A1 (en) * | 2008-09-27 | 2014-11-13 | Rui Huang | Integrated circuit package system with mounting structure |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5289346A (en) * | 1991-02-26 | 1994-02-22 | Microelectronics And Computer Technology Corporation | Peripheral to area adapter with protective bumper for an integrated circuit chip |
US5359768A (en) * | 1992-07-30 | 1994-11-01 | Intel Corporation | Method for mounting very small integrated circuit package on PCB |
US5404273A (en) | 1993-03-23 | 1995-04-04 | Shinko Electric Industries Co., Ltd. | Semiconductor-device package and semiconductor device |
US5405809A (en) * | 1992-10-02 | 1995-04-11 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device, an image sensor device, and methods for producing the same |
US5410451A (en) * | 1993-12-20 | 1995-04-25 | Lsi Logic Corporation | Location and standoff pins for chip on tape |
JPH07202064A (en) | 1993-12-28 | 1995-08-04 | Toshiba Corp | Semiconductor device |
US5471027A (en) * | 1994-07-22 | 1995-11-28 | International Business Machines Corporation | Method for forming chip carrier with a single protective encapsulant |
JPH07321248A (en) | 1994-05-26 | 1995-12-08 | Nec Corp | Ball grid array semiconductor device and manufacture thereof |
US5490324A (en) * | 1993-09-15 | 1996-02-13 | Lsi Logic Corporation | Method of making integrated circuit package having multiple bonding tiers |
US5510956A (en) | 1993-11-24 | 1996-04-23 | Fujitsu Limited | Electronic part unit or assembly having a plurality of electronic parts enclosed within a metal enclosure member mounted on a wiring layer |
US5625226A (en) | 1994-09-19 | 1997-04-29 | International Rectifier Corporation | Surface mount package with improved heat transfer |
US5672548A (en) | 1994-07-11 | 1997-09-30 | International Business Machines Corporation | Method for attaching heat sinks directly to chip carrier modules using flexible-epoxy |
-
1999
- 1999-08-24 US US09/379,985 patent/USRE39426E1/en not_active Expired - Lifetime
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5289346A (en) * | 1991-02-26 | 1994-02-22 | Microelectronics And Computer Technology Corporation | Peripheral to area adapter with protective bumper for an integrated circuit chip |
US5359768A (en) * | 1992-07-30 | 1994-11-01 | Intel Corporation | Method for mounting very small integrated circuit package on PCB |
US5405809A (en) * | 1992-10-02 | 1995-04-11 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device, an image sensor device, and methods for producing the same |
US5404273A (en) | 1993-03-23 | 1995-04-04 | Shinko Electric Industries Co., Ltd. | Semiconductor-device package and semiconductor device |
US5490324A (en) * | 1993-09-15 | 1996-02-13 | Lsi Logic Corporation | Method of making integrated circuit package having multiple bonding tiers |
US5510956A (en) | 1993-11-24 | 1996-04-23 | Fujitsu Limited | Electronic part unit or assembly having a plurality of electronic parts enclosed within a metal enclosure member mounted on a wiring layer |
US5410451A (en) * | 1993-12-20 | 1995-04-25 | Lsi Logic Corporation | Location and standoff pins for chip on tape |
JPH07202064A (en) | 1993-12-28 | 1995-08-04 | Toshiba Corp | Semiconductor device |
US5619070A (en) | 1993-12-28 | 1997-04-08 | Kabushiki Kaisha Toshiba | Semiconductor device which radiates heat and applies substrate potential from rear surface of semiconductor chip |
JPH07321248A (en) | 1994-05-26 | 1995-12-08 | Nec Corp | Ball grid array semiconductor device and manufacture thereof |
US5989940A (en) * | 1994-05-26 | 1999-11-23 | Nec Corporation | Semiconductor device capable of accomplishing a high moisture proof |
US5672548A (en) | 1994-07-11 | 1997-09-30 | International Business Machines Corporation | Method for attaching heat sinks directly to chip carrier modules using flexible-epoxy |
US5471027A (en) * | 1994-07-22 | 1995-11-28 | International Business Machines Corporation | Method for forming chip carrier with a single protective encapsulant |
US5625226A (en) | 1994-09-19 | 1997-04-29 | International Rectifier Corporation | Surface mount package with improved heat transfer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090218703A1 (en) * | 2008-02-29 | 2009-09-03 | Soo Gil Park | Lamination Tape for Reducing Chip Warpage and Semiconductor Device Containing Such Tape |
US20140335655A1 (en) * | 2008-09-27 | 2014-11-13 | Rui Huang | Integrated circuit package system with mounting structure |
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