WO1989000337A1 - Encapsulation barrier for thick-film hybrid circuits - Google Patents
Encapsulation barrier for thick-film hybrid circuits Download PDFInfo
- Publication number
- WO1989000337A1 WO1989000337A1 PCT/US1988/002058 US8802058W WO8900337A1 WO 1989000337 A1 WO1989000337 A1 WO 1989000337A1 US 8802058 W US8802058 W US 8802058W WO 8900337 A1 WO8900337 A1 WO 8900337A1
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- WIPO (PCT)
- Prior art keywords
- encapsulant
- barrier
- electronic device
- substrate
- curable material
- Prior art date
Links
- 230000004888 barrier function Effects 0.000 title claims abstract description 49
- 238000005538 encapsulation Methods 0.000 title 1
- 239000008393 encapsulating agent Substances 0.000 claims abstract description 55
- 239000000463 material Substances 0.000 claims abstract description 30
- 238000000034 method Methods 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000000151 deposition Methods 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims description 13
- 238000007650 screen-printing Methods 0.000 claims description 5
- 239000012780 transparent material Substances 0.000 claims 2
- 239000004020 conductor Substances 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 238000001723 curing Methods 0.000 description 6
- 239000000919 ceramic Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000013007 heat curing Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001029 thermal curing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010073306 Exposure to radiation Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000003847 radiation curing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01046—Palladium [Pd]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
- Y10T29/49146—Assembling to base an electrical component, e.g., capacitor, etc. with encapsulating, e.g., potting, etc.
Definitions
- the present invention relates generally to encapsulating electronic devices, and more particularly to encapsulating electronic devices with radiatively curable materials BACKGROUND ART
- U.S. Patent No. 3,381,071 to C. W. Logan et al shows an electronic circuit encapsulated in a thermally cured encapsulant such as an epoxy resin.
- the encapsulant is formed by first screen-printing a barrier wall comprising a thermally curable material such as glass onto a ceramic substrate.
- the barrier wall is thermally cured, and the electronic device is mounted on the substrate within the barrier.
- the epoxy resin is deposited, in liquid form, over the electronic device and is contained within the barrier wall.
- the encapsulant is then cured through a second application of heat.
- U.S. Patent No. 4,203,792 to Thompson shows a method for encapsulating electronic devices using a multicomponent polymer material comprising a mixture of a minor amount of a radiation curable material with a major amount of a thermally curable material. After depositing the encapsulant over the electronic device, the encapsulant is radiatively cured for a short period of time to establish its shape. The encapsulant is subsequently heat cured to form the finished device.
- the process shown in Thompson suffers from the disadvantage of requiring a complex curing process including both a radiation curing stage and a heat curing stage.
- U.S. Patent No. 4,635,356 to Ohuchi et al shows a method of encapsulating an electronic device wherein a large, preformed spacer is used as a barrier wall to surround electronic components mounted on a radiation-transparent support board.
- the area within the barrier wall is filled with an encapsulant comprising a radiatively curable material.
- the encapsulant is cured by exposure to radiation through the support board, and the barrier is removed to form the finished device.
- Ohuchi et al suffers from the disadvantage that the preformed barrier wall is time consuming to place and remove, and requires a substantial amount of space.
- a new and improved method of encapsulating an electronic device on a substrate wherein a barrier comprising a radiatively curable material is deposited about a predetermined location on the substrate. Suitable radiation is used to. cure the barrier, and the electronic device is placed within the barrier. An encapsulant is then deposited over the electronic device within the barrier.
- the barrier is deposited using a thick-film deposition technique.
- the barrier and encapsulant preferably comprise ultraviolet (UV) curable materials.
- the encapsulant can comprise an optically clear material when the electronic device comprises a photoelectric device.
- a method of encapsulating an electronic device on a substrate comprises depositing an encapsulant comprising a majority of radiatively curable material over the electronic device in the absence of a barrier.
- the encapsulant is then cured using suitable radiation.
- the encapsulant preferably comprises a UV curable material.
- FIGS. 1-5 illustrate consecutive steps in manufacturing an encapsulated electronic device in accordance with a first embodiment of the present invention.
- FIG. 6 illustrates an encapsulated electronic device constructed in accordance with a second embodiment of the invention.
- FIG. 1 shows a substrate 10 supporting a pattern of two electrical conductors indicated at 12, 13, respectively.
- Substrate 10 comprises a suitable electrically insulating material such as a glass-epoxy resin, typically used to construct printed-circuit boards, or a ceramic such as alumina, typically used to construct hybrid circuits.
- Electrical conductors 12, 13 each comprise an electrically conductive metal such as copper or palladium silver.
- Electrical conductors 12, 13 are formed on substrate 10 using any suitable process, for example by thick-film deposition when substrate 10 comprises a ceramic, or by etching when the substrate comprises a printed circuit board.
- a circular barrier 14 of radiatively curable material is disposed about a predetermined region 16 of substrate 10.
- electrical conductors 12 and 13 each include portions, indicated at 12A and 13A, which extend inside of barrier 14 within region 16.
- Barrier 14 preferably comprises an ultraviolet (UV) curable material such as the dielectric polymer CERMALLOY UV 5270T available from the Hercules Corp., and is preferably deposited on substrate 10 (and over conductor portions 12A, 13A) using a thick- film deposition process such as screen-printing.
- a thick-film deposition process provides barrier 14 with a height A of approximately 4-5 mils. The exact height of barrier 14 is not, however, critical.
- the barrier may be formed using any suitable method for depositing a radiatively curable material on a substrate. After barrier 14 is deposited on substrate 10, the barrier is exposed to a source 18 of suitable curing radiation 19. When barrier 14 comprises a UV curable material, source 18 is selected to be a source of UV radiation 19.
- an electronic device 20 is placed on region 16 of substrate 10 using, for example, a suitable adhesive 22.
- Electronic device 20 includes a pair of electrical terminals 24, 26, connected to electrical conductor portions 12A, 13A by electrically conductive wires 28, 30, respectively.
- wires 28, 30 comprise any suitable electrical conductors connected with any suitable bond.
- conductors 28, 30 can comprise ultrasonically bonded wires, or soldered Tape Automated Bonding (TAB) leads.
- TAB Tape Automated Bonding
- Encapsulant 32 being deposited on substrate 10 while in a viscous state, in this embodiment of the invention the flow of the encapsulant is naturally contained within barrier 14.
- Encapsulant 32 can comprise any curable material which exhibits qualities suitable for encapsulating electronic components, such as: being electrically insulating; moisture resistant; adhesive to substrate 10; and exhibiting a coefficient of thermal expansion substantially matching that of substrate 10.
- encapsulant 32 comprises a UV curable material. After deposition of encapsulant 32 on substrate 10, the encapsulant is exposed to curing radiation 19 for a time sufficient to cause adequate cross-linking and hence hardening. A top view of the finished hybrid circuit 40 is shown in FIG. 5.
- barrier 14 can be quickly and economically cured using radiation. This speed of curing permits the shape and extent of the periphery of encapsulant 32, which is essentially the same as the periphery of barrier 14, to be closely controlled. The method can thus be applied to densely packed electronic components such as are found in modern hybrid circuits.
- encapsulant 32 comprises an optically clear, UV curable material such as the optical polymer NORLAND 63 available from NORLAND Products, Inc.
- Electronic device 20 comprises a photoelectric device, such as a photodiode, including a light-sensing surface 20A (shown in FIG. 3) facing away from substrate 10 and into the encapsulant.
- This preferred embodiment of the invention provides encapsulant 32 with a functional, concave lens-like cross-sectional shape. This lens ⁇ like shape, visible in FIG. 4, is believed to provide focusing of light onto surface 20A of photodiode 20 and enhance the operation of the photodiode.
- the lens-like shape of encapsulant 32 is markedly and unexpectedly uniform amongst the completed devices.
- the screen-printing process provides the ability to form many such encapsulated devices of uniform characteristics in relatively few and economical steps.
- Hybrid circuit 40' is identical to hybrid circuit 40 (FIGS. 1-5) with the exception that it does not include a barrier 14, and that encapsulant 32* must comprise a majority of radiately curable material.
- Hybrid circuit 40' is fabricated identically to hybrid circuit 40, with the exception that the steps of depositing and curing barrier 14 are not performed.
- encapsulant 32' comprises a material which is substantially entirely radiatively curable such as the optical polymer Norland 63.
- encapsulant 32* comprises an optically clear, UV curable material.
- an encapsulant provides excellent operational characteristics, including durability and flexibility.
- the encapsulant is relatively straightforward and economical to apply and cure. Further, because the encapsulant is optically clear, it is excellent for applications where it is desirable to view or inspect the encapsulated device during or after operation.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
A method of encapsulating an electronic device (20) on a substrate (10) comprises depositing a radiatively curable barrier wall (14) to contain a subsequently deposited encapsulant (32). Alternatively, an encapsulant comprising a majority of radiatively curable material is used in the absence of a barrier wall.
Description
ENCAPSULATION BARRIER FOR
THICK-FILM HYBRID CIRCUITS
TECHNICAL FIELD OF THE INVENTION
The present invention relates generally to encapsulating electronic devices, and more particularly to encapsulating electronic devices with radiatively curable materials BACKGROUND ART
Current methods of encapsulating electronic devices exhibit one or more disadvantages, including; 1) the inability of predictably define the outer perimeter of the encapsulant, 2) the use of a time-consuming thermal hardening process, or 3) the inability to meet the dimensional packaging requirements of todays small, densely packed hybrid circuits.
U.S. Patent No. 3,381,071 to C. W. Logan et al shows an electronic circuit encapsulated in a thermally cured encapsulant such as an epoxy resin. The encapsulant is formed by first screen-printing a barrier wall comprising a thermally curable material such as glass onto a ceramic substrate. The barrier wall is thermally cured, and the electronic device is mounted on the substrate within the barrier. The epoxy resin is deposited, in liquid form, over the electronic device and is contained within the barrier wall. The encapsulant is then cured through a second application of heat.
The process shown in C. W. Logan et al suffers from several disadvantages, the first being that the heat curing of the barrier wall necessarily results in some spreading of the wall, decreasing the compactness of the resulting encapsulated
device. The second disadvantage is that the thermal curing of the encapsulant is very time consuming, taking, as described in the patent, 24 hours.
U.S. Patent No. 4,203,792 to Thompson shows a method for encapsulating electronic devices using a multicomponent polymer material comprising a mixture of a minor amount of a radiation curable material with a major amount of a thermally curable material. After depositing the encapsulant over the electronic device, the encapsulant is radiatively cured for a short period of time to establish its shape. The encapsulant is subsequently heat cured to form the finished device. The process shown in Thompson suffers from the disadvantage of requiring a complex curing process including both a radiation curing stage and a heat curing stage.
U.S. Patent No. 4,635,356 to Ohuchi et al shows a method of encapsulating an electronic device wherein a large, preformed spacer is used as a barrier wall to surround electronic components mounted on a radiation-transparent support board. The area within the barrier wall is filled with an encapsulant comprising a radiatively curable material. The encapsulant is cured by exposure to radiation through the support board, and the barrier is removed to form the finished device. Ohuchi et al suffers from the disadvantage that the preformed barrier wall is time consuming to place and remove, and requires a substantial amount of space. It would thus be desirable to provide an encapsulated electronic device, and a method of forming the same, wherein the outer perimeter of the encapsulant and hence the shape of the encapsulant could be closely controlled. It would be further desirable if the process of forming such a device
could be performed relatively faster than the thermal curing processes described in the background above.
DISCLOSURE OF THE INVENTION In accordance with a first embodiment of the present invention, a new and improved method of encapsulating an electronic device on a substrate is provided wherein a barrier comprising a radiatively curable material is deposited about a predetermined location on the substrate. Suitable radiation is used to. cure the barrier, and the electronic device is placed within the barrier. An encapsulant is then deposited over the electronic device within the barrier. In a preferred embodiment of the invention, the barrier is deposited using a thick-film deposition technique. The barrier and encapsulant preferably comprise ultraviolet (UV) curable materials. The encapsulant can comprise an optically clear material when the electronic device comprises a photoelectric device.
In accordance with another embodiment of the present invention, a method of encapsulating an electronic device on a substrate comprises depositing an encapsulant comprising a majority of radiatively curable material over the electronic device in the absence of a barrier. The encapsulant is then cured using suitable radiation. The encapsulant preferably comprises a UV curable material.
BRIEF DESCRIPTION OF THE DRAWINGS While the specification concludes with claims defining the features of the invention that are regarded as novel, it is believed that the invention, together with further objects thereof,
will be better understood from a consideration of the following description in conjunction with the drawing figures, in which like reference numerals are carried forward, and in which: FIGS. 1-5 illustrate consecutive steps in manufacturing an encapsulated electronic device in accordance with a first embodiment of the present invention; and
FIG. 6 illustrates an encapsulated electronic device constructed in accordance with a second embodiment of the invention.
BEST MODE OF CARRYING OUT THE INVENTION Referring now to the drawings, FIG. 1 shows a substrate 10 supporting a pattern of two electrical conductors indicated at 12, 13, respectively. Substrate 10 comprises a suitable electrically insulating material such as a glass-epoxy resin, typically used to construct printed-circuit boards, or a ceramic such as alumina, typically used to construct hybrid circuits. Electrical conductors 12, 13 each comprise an electrically conductive metal such as copper or palladium silver. Electrical conductors 12, 13 are formed on substrate 10 using any suitable process, for example by thick-film deposition when substrate 10 comprises a ceramic, or by etching when the substrate comprises a printed circuit board.
Referring now to FIG. 2, a circular barrier 14 of radiatively curable material is disposed about a predetermined region 16 of substrate 10. (The circular shape of barrier 14 is best shown in FIG. 5). As shown, electrical conductors 12 and 13 each include portions, indicated at 12A and 13A, which extend inside of barrier 14 within region 16. Barrier 14 preferably comprises an ultraviolet (UV)
curable material such as the dielectric polymer CERMALLOY UV 5270T available from the Hercules Corp., and is preferably deposited on substrate 10 (and over conductor portions 12A, 13A) using a thick- film deposition process such as screen-printing. Such a thick-film deposition process provides barrier 14 with a height A of approximately 4-5 mils. The exact height of barrier 14 is not, however, critical. So long as it is sufficient to contain the flow of an encapsulant (described below), the barrier may be formed using any suitable method for depositing a radiatively curable material on a substrate. After barrier 14 is deposited on substrate 10, the barrier is exposed to a source 18 of suitable curing radiation 19. When barrier 14 comprises a UV curable material, source 18 is selected to be a source of UV radiation 19.
Referring now to FIG. 3, an electronic device 20 is placed on region 16 of substrate 10 using, for example, a suitable adhesive 22.
Electronic device 20 includes a pair of electrical terminals 24, 26, connected to electrical conductor portions 12A, 13A by electrically conductive wires 28, 30, respectively. It will be understood that wires 28, 30 comprise any suitable electrical conductors connected with any suitable bond. For example, conductors 28, 30 can comprise ultrasonically bonded wires, or soldered Tape Automated Bonding (TAB) leads. Referring now to FIG. 4, an encapsulant 32 is deposited within barrier 14 over electronic device 20, wires 28, 30, and electrical conductor portions 12A, 13A. Encapsulant 32 is deposited into region 16 while in a viscous state, for example using a syringe (not shown). It will be appreciated
that, encapsulant 32 being deposited on substrate 10 while in a viscous state, in this embodiment of the invention the flow of the encapsulant is naturally contained within barrier 14. Encapsulant 32 can comprise any curable material which exhibits qualities suitable for encapsulating electronic components, such as: being electrically insulating; moisture resistant; adhesive to substrate 10; and exhibiting a coefficient of thermal expansion substantially matching that of substrate 10. In a preferred embodiment of the invention, encapsulant 32 comprises a UV curable material. After deposition of encapsulant 32 on substrate 10, the encapsulant is exposed to curing radiation 19 for a time sufficient to cause adequate cross-linking and hence hardening. A top view of the finished hybrid circuit 40 is shown in FIG. 5.
There is thus provided a method of encapsulating an electronic device wherein barrier 14 can be quickly and economically cured using radiation. This speed of curing permits the shape and extent of the periphery of encapsulant 32, which is essentially the same as the periphery of barrier 14, to be closely controlled. The method can thus be applied to densely packed electronic components such as are found in modern hybrid circuits.
In a preferred embodiment of the invention described above, encapsulant 32 comprises an optically clear, UV curable material such as the optical polymer NORLAND 63 available from NORLAND Products, Inc. Electronic device 20 comprises a photoelectric device, such as a photodiode, including a light-sensing surface 20A (shown in FIG. 3) facing away from substrate 10 and into the encapsulant. This preferred embodiment of the
invention provides encapsulant 32 with a functional, concave lens-like cross-sectional shape. This lens¬ like shape, visible in FIG. 4, is believed to provide focusing of light onto surface 20A of photodiode 20 and enhance the operation of the photodiode. Further, when using the preferred screen-printing process for depositing barrier 14, the lens-like shape of encapsulant 32 is markedly and unexpectedly uniform amongst the completed devices. Thus, the screen-printing process provides the ability to form many such encapsulated devices of uniform characteristics in relatively few and economical steps.
Referring now to FIG. 6, a hybrid circuit 40" is shown wherein like elements to those in FIGS. 1-5 are indicated by like reference numerals. Hybrid circuit 40' is identical to hybrid circuit 40 (FIGS. 1-5) with the exception that it does not include a barrier 14, and that encapsulant 32* must comprise a majority of radiately curable material. Hybrid circuit 40' is fabricated identically to hybrid circuit 40, with the exception that the steps of depositing and curing barrier 14 are not performed. In a preferred embodiment of the invention, encapsulant 32' comprises a material which is substantially entirely radiatively curable such as the optical polymer Norland 63.
Because no barrier wall is situated to contain and shape encapsulant 32', the circumferential edge thereof is irregular in shape. However, the use of the majority radiatively curable material permits sufficiently fast curing so as to provide a substantial improvement over the essentially uncontrollable shape and flow of prior art, thermally cured encapsulants.
In another preferred embodiment of the invention, encapsulant 32* comprises an optically clear, UV curable material. In contrast to the teachings of the Thompson patent (cited above), such an encapsulant provides excellent operational characteristics, including durability and flexibility. The encapsulant is relatively straightforward and economical to apply and cure. Further, because the encapsulant is optically clear, it is excellent for applications where it is desirable to view or inspect the encapsulated device during or after operation.
There are thus provided multiple methods for encapsulating electronic devices, and the subsequently formed encapsulated electronic devices, which provide substantial improvements and advantages over the prior art.
While preferred embodiments of the invention have been illustrated and described, it will be clear that the invention is not so limited. Numerous modifications, changes, variations, substitutions, and equivalents will occur to those skilled in the art without departing from the spirit and scope of the present invention.
Claims
1. A method of encapsulating an electronic device on a substrate comprising the steps of: depositing a barrier comprising a radiatively curable material about a predetermined location on said substrate; curing said barrier using suitable radiation; placing said electronic device within said barrier; and depositing an encapsulant over said electronic device within said barrier.
2. The method of claim 1 wherein: said encapsulant comprises a radiatively curable material; and further including the step of curing said encapsulant using suitable radiation.
3. The method of claim 2 wherein said barrier and said encapsulant each comprise an ultraviolet radiation curable material.
4. The method of claim 1 wherein said step of depositing said barrier is performed by screen printing said barrier onto said substrate.
5. The method of claim 1 wherein said encapsulant comprises a substantially optically transparent material.
6. The method of claim 5 wherein said electrical component comprises a photoelectrical device.
7. A method of encapsulating an electronic device on a substrate comprising the steps of: placing said electronic device at a predetermined location on said substrate; depositing an encapsulant comprising a majority of radiatively curable material over said electronic device in the absence of a barrier wall; and curing said encapsulant using suitable radiation.
8. A method in accordance with claim 7 wherein said encapsulant comprises an ultraviolet radiation curable material.
9. The method of claim 8 wherein said encapsulant is substantially optically transparent.
10. The method of claim 9 wherein said electronic device comprises a photoelectrical device.
11. An encapsulated electronic device comprising: an electrically insulative substrate; a barrier comprising a radiatively cured material disposed about a predetermined location on said substrate; an electronic device disposed within said barrier; and a concave lens-shaped encapsulant disposed over said electronic device within said barrier.
12. The apparatus of claim 11 wherein said encapsulant comprises a radiatively cured material.
13. The apparatus of claim 12 wherein said barrier and said encapsulant each comprise an ultraviolet radiation curable material.
14. The apparatus of claim 11 wherein said encapsulant comprises a substantially optically transparent material.
15. The apparatus of claim 14 wherein said electronic device comprises a photoelectrical device.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/067,743 US4843036A (en) | 1987-06-29 | 1987-06-29 | Method for encapsulating electronic devices |
US067,743 | 1987-06-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1989000337A1 true WO1989000337A1 (en) | 1989-01-12 |
Family
ID=22078098
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1988/002058 WO1989000337A1 (en) | 1987-06-29 | 1988-06-20 | Encapsulation barrier for thick-film hybrid circuits |
Country Status (4)
Country | Link |
---|---|
US (1) | US4843036A (en) |
EP (1) | EP0356465A1 (en) |
JP (1) | JPH02501692A (en) |
WO (1) | WO1989000337A1 (en) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1992010856A1 (en) * | 1990-12-12 | 1992-06-25 | Eastman Kodak Company | Optoelectronic device component package and method of making the same |
US5422163A (en) * | 1991-02-13 | 1995-06-06 | Nippon Steel Corporation | Flexible substrate with projections to block resin flow |
EP0681334A1 (en) * | 1994-04-29 | 1995-11-08 | Eastman Kodak Company | Packaging medical image sensors |
WO1999013515A1 (en) * | 1997-09-09 | 1999-03-18 | Amkor Technology, Inc. | Integrated circuit package employing a transparent encapsulant and a method of making the package |
US7479653B2 (en) | 2003-12-04 | 2009-01-20 | Henkel Ag & Co Kgaa | UV curable protective encapsulant |
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US9337446B2 (en) | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
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Families Citing this family (42)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3782201T2 (en) * | 1986-07-16 | 1993-04-15 | Canon Kk | SEMICONDUCTOR PHOTOSENSOR AND METHOD FOR THE PRODUCTION THEREOF. |
US4916519A (en) * | 1989-05-30 | 1990-04-10 | International Business Machines Corporation | Semiconductor package |
JPH0322543A (en) * | 1989-06-05 | 1991-01-30 | Siemens Ag | Method and device for coating electronic device |
US5075759A (en) * | 1989-07-21 | 1991-12-24 | Motorola, Inc. | Surface mounting semiconductor device and method |
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US5218759A (en) * | 1991-03-18 | 1993-06-15 | Motorola, Inc. | Method of making a transfer molded semiconductor device |
US5218234A (en) * | 1991-12-23 | 1993-06-08 | Motorola, Inc. | Semiconductor device with controlled spread polymeric underfill |
US5311059A (en) * | 1992-01-24 | 1994-05-10 | Motorola, Inc. | Backplane grounding for flip-chip integrated circuit |
US5265792A (en) * | 1992-08-20 | 1993-11-30 | Hewlett-Packard Company | Light source and technique for mounting light emitting diodes |
US5302778A (en) * | 1992-08-28 | 1994-04-12 | Eastman Kodak Company | Semiconductor insulation for optical devices |
US5438216A (en) * | 1992-08-31 | 1995-08-01 | Motorola, Inc. | Light erasable multichip module |
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US5436203A (en) * | 1994-07-05 | 1995-07-25 | Motorola, Inc. | Shielded liquid encapsulated semiconductor device and method for making the same |
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US5987739A (en) * | 1996-02-05 | 1999-11-23 | Micron Communications, Inc. | Method of making a polymer based circuit |
US6067709A (en) * | 1996-02-23 | 2000-05-30 | Mpm Corporation | Applying encapsulating material to substrates |
US5895976A (en) * | 1996-06-03 | 1999-04-20 | Motorola Corporation | Microelectronic assembly including polymeric reinforcement on an integrated circuit die, and method for forming same |
US5936310A (en) * | 1996-11-12 | 1999-08-10 | Micron Technology, Inc. | De-wetting material for glob top applications |
US5973337A (en) * | 1997-08-25 | 1999-10-26 | Motorola, Inc. | Ball grid device with optically transmissive coating |
US6138349A (en) | 1997-12-18 | 2000-10-31 | Vlt Corporation | Protective coating for an electronic device |
US6246123B1 (en) | 1998-05-04 | 2001-06-12 | Motorola, Inc. | Transparent compound and applications for its use |
US6251211B1 (en) | 1998-07-22 | 2001-06-26 | Micron Technology, Inc. | Circuitry interconnection method |
US6188527B1 (en) * | 1999-04-12 | 2001-02-13 | Hewlett-Packard Company | LED array PCB with adhesive rod lens |
US6379991B2 (en) * | 1999-07-26 | 2002-04-30 | Micron Technology, Inc. | Encapsulation methods for semiconductive die packages |
US7198832B2 (en) * | 1999-10-25 | 2007-04-03 | Vitex Systems, Inc. | Method for edge sealing barrier films |
US6413645B1 (en) | 2000-04-20 | 2002-07-02 | Battelle Memorial Institute | Ultrabarrier substrates |
US6623861B2 (en) | 2001-04-16 | 2003-09-23 | Battelle Memorial Institute | Multilayer plastic substrates |
US6242283B1 (en) * | 1999-12-30 | 2001-06-05 | Siliconware Precision Industries Co., Ltd. | Wafer level packaging process of semiconductor |
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US6531335B1 (en) | 2000-04-28 | 2003-03-11 | Micron Technology, Inc. | Interposers including upwardly protruding dams, semiconductor device assemblies including the interposers, and methods |
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US7648925B2 (en) | 2003-04-11 | 2010-01-19 | Vitex Systems, Inc. | Multilayer barrier stacks and methods of making multilayer barrier stacks |
US7510913B2 (en) | 2003-04-11 | 2009-03-31 | Vitex Systems, Inc. | Method of making an encapsulated plasma sensitive device |
US7332797B2 (en) * | 2003-06-30 | 2008-02-19 | Intel Corporation | Wire-bonded package with electrically insulating wire encapsulant and thermally conductive overmold |
US20050009239A1 (en) * | 2003-07-07 | 2005-01-13 | Wolff Larry Lee | Optoelectronic packaging with embedded window |
US7767498B2 (en) | 2005-08-25 | 2010-08-03 | Vitex Systems, Inc. | Encapsulated devices and method of making |
DE102006014247B4 (en) * | 2006-03-28 | 2019-10-24 | Robert Bosch Gmbh | Image recording system and method for its production |
JP2008071859A (en) * | 2006-09-13 | 2008-03-27 | Shin Etsu Chem Co Ltd | Sealing method of minute electronic component |
CN102246262A (en) * | 2008-11-17 | 2011-11-16 | 派希斯系统整合私人有限公司 | Method for encapsulating semiconductor dies |
US8624364B2 (en) * | 2010-02-26 | 2014-01-07 | Stats Chippac Ltd. | Integrated circuit packaging system with encapsulation connector and method of manufacture thereof |
DE102021213165A1 (en) | 2021-11-23 | 2023-05-25 | Zf Friedrichshafen Ag | Process for component protection of a printed circuit board |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4143456A (en) * | 1976-06-28 | 1979-03-13 | Citizen Watch Commpany Ltd. | Semiconductor device insulation method |
CH619333A5 (en) * | 1977-11-01 | 1980-09-15 | Faselec Ag | Process for covering a flat component with a polymer |
FR2592221A1 (en) * | 1985-12-20 | 1987-06-26 | Radiotechnique Compelec | METHOD OF ENCAPSULATING AN ELECTRONIC COMPONENT BY MEANS OF A SYNTHETIC RESIN |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3178621A (en) * | 1962-05-01 | 1965-04-13 | Mannes N Glickman | Sealed housing for electronic elements |
US3381071A (en) * | 1965-04-12 | 1968-04-30 | Nat Semiconductor Corp | Electrical circuit insulation method |
US4027383A (en) * | 1974-01-24 | 1977-06-07 | Massachusetts Institute Of Technology | Integrated circuit packaging |
US4054938A (en) * | 1974-05-13 | 1977-10-18 | American Microsystems, Inc. | Combined semiconductor device and printed circuit board assembly |
US4410874A (en) * | 1975-03-03 | 1983-10-18 | Hughes Aircraft Company | Large area hybrid microcircuit assembly |
US4372037A (en) * | 1975-03-03 | 1983-02-08 | Hughes Aircraft Company | Large area hybrid microcircuit assembly |
JPS52137279A (en) * | 1976-05-12 | 1977-11-16 | Hitachi Ltd | Semiconductor device for optical coupling |
JPS53103659U (en) * | 1977-01-25 | 1978-08-21 | ||
US4203792A (en) * | 1977-11-17 | 1980-05-20 | Bell Telephone Laboratories, Incorporated | Method for the fabrication of devices including polymeric materials |
CH625381A5 (en) * | 1977-12-02 | 1981-09-15 | Standard Telephon & Radio Ag | |
NL7713758A (en) * | 1977-12-13 | 1979-06-15 | Philips Nv | SEMI-GUIDE DEVICE. |
JPS5726379Y2 (en) * | 1978-09-21 | 1982-06-08 | ||
US4508758A (en) * | 1982-12-27 | 1985-04-02 | At&T Technologies, Inc. | Encapsulated electronic circuit |
US4533975A (en) * | 1983-12-27 | 1985-08-06 | North American Philips Corporation | Radiation hardenable coating and electronic components coated therewith |
US4590667A (en) * | 1984-08-22 | 1986-05-27 | General Instrument Corporation | Method and apparatus for assembling semiconductor devices such as LEDs or optodetectors |
US4635356A (en) * | 1984-12-28 | 1987-01-13 | Kabushiki Kaisha Toshiba | Method of manufacturing a circuit module |
JPS61184834A (en) * | 1985-02-13 | 1986-08-18 | Toshiba Chem Corp | Manufacture of resin-molded semiconductor device |
-
1987
- 1987-06-29 US US07/067,743 patent/US4843036A/en not_active Expired - Fee Related
-
1988
- 1988-06-20 EP EP88906412A patent/EP0356465A1/en not_active Withdrawn
- 1988-06-20 WO PCT/US1988/002058 patent/WO1989000337A1/en not_active Application Discontinuation
- 1988-06-20 JP JP63505641A patent/JPH02501692A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4143456A (en) * | 1976-06-28 | 1979-03-13 | Citizen Watch Commpany Ltd. | Semiconductor device insulation method |
CH619333A5 (en) * | 1977-11-01 | 1980-09-15 | Faselec Ag | Process for covering a flat component with a polymer |
FR2592221A1 (en) * | 1985-12-20 | 1987-06-26 | Radiotechnique Compelec | METHOD OF ENCAPSULATING AN ELECTRONIC COMPONENT BY MEANS OF A SYNTHETIC RESIN |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
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WO1992010856A1 (en) * | 1990-12-12 | 1992-06-25 | Eastman Kodak Company | Optoelectronic device component package and method of making the same |
USRE35069E (en) * | 1990-12-12 | 1995-10-24 | Eastman Kodak Company | Optoelectronic device component package |
US5422163A (en) * | 1991-02-13 | 1995-06-06 | Nippon Steel Corporation | Flexible substrate with projections to block resin flow |
EP0681334A1 (en) * | 1994-04-29 | 1995-11-08 | Eastman Kodak Company | Packaging medical image sensors |
WO1999013515A1 (en) * | 1997-09-09 | 1999-03-18 | Amkor Technology, Inc. | Integrated circuit package employing a transparent encapsulant and a method of making the package |
US5962810A (en) * | 1997-09-09 | 1999-10-05 | Amkor Technology, Inc. | Integrated circuit package employing a transparent encapsulant |
US6143588A (en) * | 1997-09-09 | 2000-11-07 | Amkor Technology, Inc. | Method of making an integrated circuit package employing a transparent encapsulant |
US8955217B2 (en) | 1999-10-25 | 2015-02-17 | Samsung Display Co., Ltd. | Method for edge sealing barrier films |
US8900366B2 (en) | 2002-04-15 | 2014-12-02 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US9839940B2 (en) | 2002-04-15 | 2017-12-12 | Samsung Display Co., Ltd. | Apparatus for depositing a multilayer coating on discrete sheets |
US7479653B2 (en) | 2003-12-04 | 2009-01-20 | Henkel Ag & Co Kgaa | UV curable protective encapsulant |
US10950821B2 (en) | 2007-01-26 | 2021-03-16 | Samsung Display Co., Ltd. | Method of encapsulating an environmentally sensitive device |
US9184410B2 (en) | 2008-12-22 | 2015-11-10 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US9337446B2 (en) | 2008-12-22 | 2016-05-10 | Samsung Display Co., Ltd. | Encapsulated RGB OLEDs having enhanced optical output |
US9362530B2 (en) | 2008-12-22 | 2016-06-07 | Samsung Display Co., Ltd. | Encapsulated white OLEDs having enhanced optical output |
US8904819B2 (en) | 2009-12-31 | 2014-12-09 | Samsung Display Co., Ltd. | Evaporator with internal restriction |
Also Published As
Publication number | Publication date |
---|---|
EP0356465A1 (en) | 1990-03-07 |
JPH02501692A (en) | 1990-06-07 |
US4843036A (en) | 1989-06-27 |
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