WO1994010559A3 - Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation - Google Patents

Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation Download PDF

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Publication number
WO1994010559A3
WO1994010559A3 PCT/US1993/010261 US9310261W WO9410559A3 WO 1994010559 A3 WO1994010559 A3 WO 1994010559A3 US 9310261 W US9310261 W US 9310261W WO 9410559 A3 WO9410559 A3 WO 9410559A3
Authority
WO
WIPO (PCT)
Prior art keywords
controlled
temperature
chemical sensor
sensor fabrication
micromachined
Prior art date
Application number
PCT/US1993/010261
Other languages
French (fr)
Other versions
WO1994010559A9 (en
WO1994010559A2 (en
Inventor
Stephen Semancik
Richard E Cavicchi
Michael Gaitan
John S Suehle
Original Assignee
Us Army
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Us Army filed Critical Us Army
Priority to AU61202/94A priority Critical patent/AU6120294A/en
Publication of WO1994010559A2 publication Critical patent/WO1994010559A2/en
Publication of WO1994010559A9 publication Critical patent/WO1994010559A9/en
Publication of WO1994010559A3 publication Critical patent/WO1994010559A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L7/00—Heating or cooling apparatus; Heat insulating devices
    • B01L7/54—Heating or cooling apparatus; Heat insulating devices using spatial temperature gradients
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/18—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by changes in the thermal conductivity of a surrounding material to be tested
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1805—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks
    • B01L2300/1827—Conductive heating, heat from thermostatted solids is conducted to receptacles, e.g. heating plates, blocks using resistive heater
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/18—Means for temperature control
    • B01L2300/1883—Means for temperature control using thermal insulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00178—Special arrangements of analysers
    • G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks

Abstract

Planar forms of chemically-sensitive materials have been combined, under temperature control, with the pixels of a specially-designed micro-hotplate array to produce a miniature device capable of analyzing chemical mixtures. The device uses integrated multiple elements having different adsorption properties and temperatures to collectively achieve chemical selectivity in sensing. The method of making and using the device of the present invention can be readily adapted for commercial production to manufacture a range of devices with improved sensing performance.
PCT/US1993/010261 1992-10-26 1993-10-26 Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation WO1994010559A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU61202/94A AU6120294A (en) 1992-10-26 1993-10-26 Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/965,949 US5345213A (en) 1992-10-26 1992-10-26 Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation
US965,949 1992-10-26

Publications (3)

Publication Number Publication Date
WO1994010559A2 WO1994010559A2 (en) 1994-05-11
WO1994010559A9 WO1994010559A9 (en) 1994-07-07
WO1994010559A3 true WO1994010559A3 (en) 1994-08-04

Family

ID=25510717

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1993/010261 WO1994010559A2 (en) 1992-10-26 1993-10-26 Temperature-controlled, micromachined arrays for chemical sensor fabrication and operation

Country Status (3)

Country Link
US (1) US5345213A (en)
AU (1) AU6120294A (en)
WO (1) WO1994010559A2 (en)

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Also Published As

Publication number Publication date
AU6120294A (en) 1994-05-24
US5345213A (en) 1994-09-06
WO1994010559A2 (en) 1994-05-11

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