WO1995007425A1 - Valve, especially for fluid handling bodies with microflowchannels - Google Patents

Valve, especially for fluid handling bodies with microflowchannels Download PDF

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Publication number
WO1995007425A1
WO1995007425A1 PCT/SE1994/000824 SE9400824W WO9507425A1 WO 1995007425 A1 WO1995007425 A1 WO 1995007425A1 SE 9400824 W SE9400824 W SE 9400824W WO 9507425 A1 WO9507425 A1 WO 9507425A1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
valve
sealing surface
valve seat
valve according
Prior art date
Application number
PCT/SE1994/000824
Other languages
French (fr)
Inventor
Thord Hansson
Stefan SJÖLANDER
Original Assignee
Pharmacia Biosensor Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pharmacia Biosensor Ab filed Critical Pharmacia Biosensor Ab
Priority to DE69424883T priority Critical patent/DE69424883T2/en
Priority to EP94926446A priority patent/EP0775277B1/en
Priority to AT94926446T priority patent/ATE193759T1/en
Priority to US08/605,166 priority patent/US5593130A/en
Priority to JP50863095A priority patent/JP3420241B2/en
Publication of WO1995007425A1 publication Critical patent/WO1995007425A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C3/00—Circuit elements having moving parts
    • F15C3/04—Circuit elements having moving parts using diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/126—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm the seat being formed on a rib perpendicular to the fluid line

Definitions

  • V alve especially for fluid handling bodies with microflowchannels.
  • the present invention relates to a valve of the type that employs a flexible membrane to close or open the valve, particularly a valve that is included in fluid networks for handling various types of fluids, gaseous as well as liquid.
  • a known type of membrane valve consists of a valve body and a flexible membrane. Two liquid flow channels formed in the surface of the valve body are separated by a land portion, or valve seat, having a contact surface for the membrane, which can be actuated so that the membrane surface in a first position sealingly contacts the land portion to block the flow between the two channels, and in a second position is spaced from the land portion to allow liquid flow between the channels.
  • the land portion is flat and coincident with the rest of the surface of the valve body, and the membrane is flexed mechanically between the two positions by means of a solenoid operated rod member attached to the membrane, and more particularly such that the membrane in the state of rest contacts the land portion and to open the valve is pulled downwardly into, an aperture below the membrane.
  • the land portion is replaced by a spherically concave recess in the valve body, in which recess the two flow channels terminate.
  • valve construction according to US-A-4,858,883 is therefore provided with a groove or a channel in the bottom of the concave recess, which channel in the closed position of the valve is also sealed by the membrane, but which when the valve is opening is rapidly uncovered by the membrane to connect the two flow channels so that liquid flow is allowed almost immediately and before a larger gap or void has been created between the membrane and the valve seat.
  • the response time of the valve is reduced to a considerable extent.
  • US-A-4 , 852 , 851 describes a similar construction in which, however, a reduced continuous flow is maintained through the valve by means of a flow through channel formed in the concave surface and having such a depth that it can not be sealed by the membrane.
  • the present invention relates to a further improved valve construction of the above-mentioned type which provides for better sealing with low actuating pressure, quicker valve opening and valve closing, more reproducible control of the valve position states, and minimised material fatigue of the valve membrane as well as of the valve seat.
  • a membrane valve of the mentioned pneumatic type where the valve seat surface is divided into a, preferably smaller, primary sealing surface, or top sealing surface, and a, preferably larger, secondary sealing surface, so that opening and closing, respectively, of the valve takes place in two steps, and more particularly such that when the valve is closing, the membrane first rapidly seals against the top sealing surface, and then provides further ensured sealing by contact with the (preferably enlarged) secondary sealing surface, while inversely, when the valve is opening, the membrane is first separated from the (preferably larger) secondary sealing surface and is then substantially momentarily separated from the top sealing surface.
  • Fig. 1 shows a transparent top plan view of the valve
  • Fig. 2 shows a longitudinal section along A-A in Fig. 1 of the valve in its opening state and closing state, respectively,
  • Fig. 3 shows a cross-section along B-B in Fig. 1
  • Fig. 4 shows a cross-section along C-C in Fig. 1.
  • the valve construction illustrated in Figs. 1 to 4 is designed to be integratable into a fluid handling block comprising several such valves and microfluidic channels, e.g. a fluid handling block of the type that is included in the optical biosensor system described in US-A-5,313,264.
  • the fluid handling block is essentially constructed from an upper support plate 1, a first, harder (say about 75° shore A) elastomeric layer 2, e.g. silicone rubber, a second, softer (say about 30° shore A) elastomeric layer 3, e.g. also silicone rubber, and a lower support plate 4.
  • the first elastomeric layer has the appropriate flow channel system formed therein so that flow channels 5, 5' are defined between the first elastomeric layer 2 and the second elastomeric layer 3.
  • Each valve in this block construction is constituted by a land portion, or valve seat, 6 formed in the first elastomeric layer 2 between two flow channels 5, 5', and an opposed portion of the second elastomeric layer 3 mounted over a cylindrical pressure duct 8 connected to a source of compressed air (not shown) , the elastomeric layer 3 here being thinned to form a flexible valve membrane or diaphragm 7.
  • the pressure duct 8 is formed in a part of the elastomeric layer that extends downwardly into a recess 9 made in the lower support plate 4.
  • the pressure duct portion 10 is filled with a short liquid column (not shown) , e.g. glycerol, the function of which will be described below.
  • the valve seat 6 protruding from the flow channel wall extends with its extreme part almost up to the valve membrane 7 (in its unloaded position) and exhibits a contact surface 10 for the membrane 7 with a concave (in the case illustrated in the figure elliptic-cylindrical) profile across the flow channels, as is best shown in Figs. 3 and 4.
  • This contact surface or area 10 is in the following called top sealing surface and defines a flow channel 11 between itself and the membrane 7.
  • the profile of the top sealing surface 10 should have a different curvature than that obtained by the membrane 7 when affected by actuating pressure for the reasons presented below.
  • the valve seat 6 On each side of the top sealing surface 10 (as seen in the flow channel direction) , the valve seat 6 has a lower located secondary sealing surface or area 12 and 12', respectively, for the membrane 7 with a sharply angled transition from the top sealing surface.
  • each one of these two secondary sealing surfaces 12, 12' is in the illustrated case (see particularly Figs. 1 and 2) arranged in the form of two different concave "steps", an upper step 13, 13' (nearest the top sealing surface 10) and a lower step 14, 14', with a sharply angled transition between the two steps.
  • the relatively thin, flexible valve seat 6 thus exhibits a well defined total sealing area. The function of the valve will now be described.
  • the membrane is then stretched further until it meets the larger, lower located step-shaped secondary sealing surface 12, 12', the contact pressure on the valve seat decreasing but still being sufficiently high to provide for reliable valve sealing by the enlarged contact area.
  • This sealing position is indicated in Fig. 2 by the dashed membrane contour 16.
  • the membrane 7 would be stretched around the latter until the actuating force balanced the seat contact force and membrane elasticity force for each point of the membrane.
  • the membrane 7 would then hang down sharply around the thin valve seat surface 10 with the risk of mechanical wear, deformation or break thereof.
  • the pressure is removed in the pressure duct 8, so that the actuating pressure momentarily decreases to zero.
  • the elasticity force of the stretched membrane 7 in combination with the fluid pressure in the flow channel parts 5, 5 1 first separate the membrane 7 from the larger, step-shaped sealing surfaces 12, 12' of the valve seat 6, the valve still being kept closed by the contact of the membrane with the top sealing surface 10. Then, the remaining reduced elasticity force of the membrane 7 and the channel fluid pressure separate the membrane substantially momentarily from the considerably smaller top sealing surface 10.
  • the profile of the top sealing surface 10 across the flow channels 5, 5' should have a curvature differing from the parabolic profile obtained by the membrane 7 when actuating pressure is applied, so that the centre of the membrane will reach the top sealing surface 10 faster than the side portions of the membrane. This means in turn that the separation of the membrane from the surface 10 also takes place successively, since the membrane is first released from the centre and then from the sides, whereby the separation is facilitated and may take place more rapidly.
  • the valve opening time is determined by the difference between, on the one hand, the opening forces, i.e. the elasticity (contracting force) of the membrane and the fluid pressure in the channel, and, on the other hand, the closing "adhesive force” resulting when the two elastomer surfaces of the valve seat 6 and the membrane 7 are pressed together.
  • This "adhesive force" as well as the membrane separation time related thereto will be approximately proportional to the contact area of the membrane 7.
  • valve opening time is reduced, simultaneously as a considerably more reproducible valve opening time is obtained as compared with the case when the whole membrane is separated from the whole valve seat area at the same time, or when an initially opened smaller channel in the seat surface is caused to connect the liquid flow channels as in the known construction according to the above- mentioned US-A-4,858,883. Due to the lower channel fluid pressure that is required for valve opening, also pressure peaks in the flow start are avoided in contrast to valve constructions where the whole membrane is separated from the valve seat essentially simultaneously.
  • a valve designed according to the invention has several advantages compared with the known valve constructions. Firstly, it is possible to use a low actuating pressure and still obtain good sealing with a high contact pressure for the membrane against the valve seat. Further, valve opening and closing are effected rapidly, and the valve position states can be controlled with high reproducibility. Finally, the material fatigue of the valve membrane and the valve seat is minimised, on the one hand, through the "two-step seat construction" and, on the other hand, since both the membrane and the seat are of elastic material.

Abstract

A valve of the membrane valve type comprises a valve body with two fluid flow channels (5, 5') separated by a land portion which forms a valve seat (6) having a sealing surface for co-operation with a flexible membrane (7) mounted over a duct (8) which opens in front of the valve seat and is arranged for fluid pressure actuation of the membrane between a closing position, where the membrane (7) sealingly contacts the valve seat (6), and an opening position where there is a flow channel communicating space (11) between the valve seat (6) and the membrane (7). The valve is characterized in that the sealing surface of the valve seat (6) comprises (i) a primary sealing surface (10) located nearest and facing the membrane, and (ii) a secondary sealing surface (12, 12') provided on each fluid channel side of the valve seat, so that when the valve is closing, the membrane (7) successively seals against the primary sealing surface (10) and the secondary sealing surfaces (12, 12'), and, inversely, when the valve is opening, the membrane (7) is successively separated from the secondary sealing surfaces (12, 12') and the primary sealing surface (10).

Description

Valve, especially for fluid handling bodies with microflowchannels.
The present invention relates to a valve of the type that employs a flexible membrane to close or open the valve, particularly a valve that is included in fluid networks for handling various types of fluids, gaseous as well as liquid.
A known type of membrane valve consists of a valve body and a flexible membrane. Two liquid flow channels formed in the surface of the valve body are separated by a land portion, or valve seat, having a contact surface for the membrane, which can be actuated so that the membrane surface in a first position sealingly contacts the land portion to block the flow between the two channels, and in a second position is spaced from the land portion to allow liquid flow between the channels.
In US-A-4, 304,257 the land portion is flat and coincident with the rest of the surface of the valve body, and the membrane is flexed mechanically between the two positions by means of a solenoid operated rod member attached to the membrane, and more particularly such that the membrane in the state of rest contacts the land portion and to open the valve is pulled downwardly into, an aperture below the membrane.
This valve has several disadvantages. In addition to the mechanical solenoid operation of the membrane being relatively complicated and requiring sensitive adjustment, the membrane is subjected to great stresses with the risk of permanent stretch. Further, liquid flow through the valve does not take place directly when the membrane is withdrawn from the land portion, but the void formed must first be filled with liquid, which causes a prolonged valve opening time. Developments of the above described valve where several of the mentioned drawbacks are overcome are described in US-A-4,848,722, US-A-4,852,851 and US-A- 4,858,883. First of all, the mechanical actuation of the
SUBSTITUTE SHEET membrane is replaced by a considerably simpler pneumatic actuation in all these valve constructions.
Further, in the construction according to US-A-4,848, 722, the land portion is replaced by a spherically concave recess in the valve body, in which recess the two flow channels terminate. By virtue of such a concave contact surface for the membrane, the sealing area is maximised and the stresses on the membrane are reduced as membrane wrinkles and sharp membrane bends are avoided. The enlarged contact area is, however, disadvantageous in that it makes the valve opening slower.
The valve construction according to US-A-4,858,883 is therefore provided with a groove or a channel in the bottom of the concave recess, which channel in the closed position of the valve is also sealed by the membrane, but which when the valve is opening is rapidly uncovered by the membrane to connect the two flow channels so that liquid flow is allowed almost immediately and before a larger gap or void has been created between the membrane and the valve seat. Hereby, the response time of the valve is reduced to a considerable extent.
US-A-4 , 852 , 851 describes a similar construction in which, however, a reduced continuous flow is maintained through the valve by means of a flow through channel formed in the concave surface and having such a depth that it can not be sealed by the membrane.
The present invention relates to a further improved valve construction of the above-mentioned type which provides for better sealing with low actuating pressure, quicker valve opening and valve closing, more reproducible control of the valve position states, and minimised material fatigue of the valve membrane as well as of the valve seat.
According to a basic concept of the invention, this is accomplished by a membrane valve of the mentioned pneumatic type where the valve seat surface is divided into a, preferably smaller, primary sealing surface, or top sealing surface, and a, preferably larger, secondary sealing surface, so that opening and closing, respectively, of the valve takes place in two steps, and more particularly such that when the valve is closing, the membrane first rapidly seals against the top sealing surface, and then provides further ensured sealing by contact with the (preferably enlarged) secondary sealing surface, while inversely, when the valve is opening, the membrane is first separated from the (preferably larger) secondary sealing surface and is then substantially momentarily separated from the top sealing surface.
Such a valve has the features given in claim 1. Advantageous embodiments are defined in the subclaims.
In the following, the invention will be described in more detail with regard to a non-limiting embodiment thereof, reference being made to the accompanying drawings, where
Fig. 1 shows a transparent top plan view of the valve, Fig. 2 shows a longitudinal section along A-A in Fig. 1 of the valve in its opening state and closing state, respectively,
Fig. 3 shows a cross-section along B-B in Fig. 1, and Fig. 4 shows a cross-section along C-C in Fig. 1. The valve construction illustrated in Figs. 1 to 4 is designed to be integratable into a fluid handling block comprising several such valves and microfluidic channels, e.g. a fluid handling block of the type that is included in the optical biosensor system described in US-A-5,313,264. The fluid handling block is essentially constructed from an upper support plate 1, a first, harder (say about 75° shore A) elastomeric layer 2, e.g. silicone rubber, a second, softer (say about 30° shore A) elastomeric layer 3, e.g. also silicone rubber, and a lower support plate 4. The first elastomeric layer has the appropriate flow channel system formed therein so that flow channels 5, 5' are defined between the first elastomeric layer 2 and the second elastomeric layer 3.
Each valve in this block construction is constituted by a land portion, or valve seat, 6 formed in the first elastomeric layer 2 between two flow channels 5, 5', and an opposed portion of the second elastomeric layer 3 mounted over a cylindrical pressure duct 8 connected to a source of compressed air (not shown) , the elastomeric layer 3 here being thinned to form a flexible valve membrane or diaphragm 7. In the illustrated case, the pressure duct 8 is formed in a part of the elastomeric layer that extends downwardly into a recess 9 made in the lower support plate 4. The pressure duct portion 10 is filled with a short liquid column (not shown) , e.g. glycerol, the function of which will be described below.
The valve seat 6 protruding from the flow channel wall extends with its extreme part almost up to the valve membrane 7 (in its unloaded position) and exhibits a contact surface 10 for the membrane 7 with a concave (in the case illustrated in the figure elliptic-cylindrical) profile across the flow channels, as is best shown in Figs. 3 and 4. This contact surface or area 10 is in the following called top sealing surface and defines a flow channel 11 between itself and the membrane 7. The profile of the top sealing surface 10 should have a different curvature than that obtained by the membrane 7 when affected by actuating pressure for the reasons presented below. On each side of the top sealing surface 10 (as seen in the flow channel direction) , the valve seat 6 has a lower located secondary sealing surface or area 12 and 12', respectively, for the membrane 7 with a sharply angled transition from the top sealing surface. Viewed sideways, each one of these two secondary sealing surfaces 12, 12' is in the illustrated case (see particularly Figs. 1 and 2) arranged in the form of two different concave "steps", an upper step 13, 13' (nearest the top sealing surface 10) and a lower step 14, 14', with a sharply angled transition between the two steps. Altogether, the relatively thin, flexible valve seat 6 thus exhibits a well defined total sealing area. The function of the valve will now be described. In the open position of the valve, no gas pressure is applied to the pressure duct 8, and fluid, usually liquid (but may also be gas) flows through the valve between the flow channels 5, 51 on each side of the valve seat 6 via the flow through channel 11. As indicated by the dashed lines in Fig. 3, the membrane 7 is usually pressed out by the liquid pressure to the position indicated at 15, so that the cross-section of flow through channel 11 becomes a little larger than that existing when the membrane is unloaded (in the Figure, the extent to which the membrane is pressed out is exaggerated for clarity) . To close the valve, an actuating pressure of pressure gas, usually compressed air, is applied to the pressure duct 8, which pressure via the above-mentioned (not shown) liquid column therein presses the membrane 7 against the valve seat 6. Due to the liquid column, compressed air is prevented from penetrating the membrane 7 and causing undesired air bubbles in the channels 5, 51. The membrane 7 is stretched by the momentarily applied actuating pressure until it first meets the top sealing surface 10. Due to the relatively small surface area of the latter (in the case shown intended to be about 5% of the membrane area) , a high membrane/seat contact pressure is obtained even at a relatively low membrane overpressure and moderate stretching of the membrane, resulting in quick and reliable blocking of the liquid flow between the channel parts 5, 5 ' .
The membrane is then stretched further until it meets the larger, lower located step-shaped secondary sealing surface 12, 12', the contact pressure on the valve seat decreasing but still being sufficiently high to provide for reliable valve sealing by the enlarged contact area. This sealing position is indicated in Fig. 2 by the dashed membrane contour 16.
If there were only the small top sealing surface 10, the membrane 7 would be stretched around the latter until the actuating force balanced the seat contact force and membrane elasticity force for each point of the membrane. The membrane 7 would then hang down sharply around the thin valve seat surface 10 with the risk of mechanical wear, deformation or break thereof. When the valve is opened, the pressure is removed in the pressure duct 8, so that the actuating pressure momentarily decreases to zero. The elasticity force of the stretched membrane 7 in combination with the fluid pressure in the flow channel parts 5, 51 first separate the membrane 7 from the larger, step-shaped sealing surfaces 12, 12' of the valve seat 6, the valve still being kept closed by the contact of the membrane with the top sealing surface 10. Then, the remaining reduced elasticity force of the membrane 7 and the channel fluid pressure separate the membrane substantially momentarily from the considerably smaller top sealing surface 10.
As mentioned above, the profile of the top sealing surface 10 across the flow channels 5, 5' should have a curvature differing from the parabolic profile obtained by the membrane 7 when actuating pressure is applied, so that the centre of the membrane will reach the top sealing surface 10 faster than the side portions of the membrane. This means in turn that the separation of the membrane from the surface 10 also takes place successively, since the membrane is first released from the centre and then from the sides, whereby the separation is facilitated and may take place more rapidly.
The valve opening time is determined by the difference between, on the one hand, the opening forces, i.e. the elasticity (contracting force) of the membrane and the fluid pressure in the channel, and, on the other hand, the closing "adhesive force" resulting when the two elastomer surfaces of the valve seat 6 and the membrane 7 are pressed together. This "adhesive force" as well as the membrane separation time related thereto will be approximately proportional to the contact area of the membrane 7.
By dividing the membrane/seat separation into two steps as above, the separation from the top sealing surface preferably also taking place successively as described above, the valve opening time is reduced, simultaneously as a considerably more reproducible valve opening time is obtained as compared with the case when the whole membrane is separated from the whole valve seat area at the same time, or when an initially opened smaller channel in the seat surface is caused to connect the liquid flow channels as in the known construction according to the above- mentioned US-A-4,858,883. Due to the lower channel fluid pressure that is required for valve opening, also pressure peaks in the flow start are avoided in contrast to valve constructions where the whole membrane is separated from the valve seat essentially simultaneously. This is due to the fact that it is easier to reproducibly separate two surfaces that stick together from each other if the contact surface is divided into smaller parts which can be separated successively by a smaller force instead of separating the whole area simultaneously by means of a considerably greater force. It is clear from the description above that a valve designed according to the invention has several advantages compared with the known valve constructions. Firstly, it is possible to use a low actuating pressure and still obtain good sealing with a high contact pressure for the membrane against the valve seat. Further, valve opening and closing are effected rapidly, and the valve position states can be controlled with high reproducibility. Finally, the material fatigue of the valve membrane and the valve seat is minimised, on the one hand, through the "two-step seat construction" and, on the other hand, since both the membrane and the seat are of elastic material.
The invention is, of course, not limited to the embodiment described above and shown in the drawings, but many modifications and changes may be made within the scope of the general inventive concept as defined in the following claims.

Claims

1. A valve comprising a valve body with two fluid flow channels (5, 51) separated by a land portion which forms a valve seat (6) having a sealing surface for co-operation with a flexible membrane (7) mounted over a duct (8) which opens in front of the valve seat and is arranged for fluid pressure actuation of the membrane between a closing position, where the membrane (7) sealingly contacts the valve seat (6) , and an opening position where there is a flow channel communicating space (11) between the valve seat (6) and the membrane (7) , characterized in that said sealing surface of the valve seat (6) comprises (i) a primary sealing surface (10) located nearest and facing the membrane, and (ii) a secondary sealing surface (12, 12') provided on each fluid channel side of the valve seat, so that when the valve is closing, the membrane (7) successively seals against the primary sealing surface and the secondary sealing surfaces (12, 12') , and, inversely, when the valve is opening, the membrane (7) is successively separated from the secondary sealing surfaces (12, 12') and the primary sealing surface (10) .
2. The valve according to claim 1, characterized in that the secondary sealing surfaces (12, 12') have a larger membrane contact area than the primary sealing surface (10) .
3. The valve according to claim 1 or 2, characterized in that the membrane (7) is elastic.
4. The valve according to claim 1, 2 or 3, characterized in that the valve seat (6) is elastic.
5. The valve according to claim 1 or 2, characterized in that both the valve seat (6) and the membrane (7) are elastic, the valve seat (6) having a lower elasticity than the membrane (7) .
6. The valve according to any one of claims 1 to 5, characterized in that the duct (8) for fluid pressure actuation of the membrane (7) is arranged to be connected to a source of compressed air.
7. The valve according to any one of claims 1 to 6, characterized in that each secondary sealing surface (12, 12') comprises a step (13, 13') extending in the flow channel direction and spaced from the primary sealing surface (10) .
8. The valve according to claim 7, characterized in that the valve seat (6) widens in a concave fashion from the primary sealing surface (10) to said steps (13, 13 ' ) .
9. The valve according to claim 8, characterized in that the valve seat (6) widens from said steps (13, 13') in a concave fashion (14, 14') towards the flow channel wall opposite to the membrane (7) .
10. The valve according to any one of claims 1 to 9, characterized in that there is a sharp transition between the primary sealing surface (10) and the secondary sealing surfaces (12, 12' ) .
11. The valve according to any one of claims 1 to 10, characterized in that the primary sealing surface (10) has a concave profile across the flow channels (5, 51).
PCT/SE1994/000824 1993-06-09 1994-09-06 Valve, especially for fluid handling bodies with microflowchannels WO1995007425A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE69424883T DE69424883T2 (en) 1993-09-06 1994-09-06 VALVE, ESPECIALLY FOR VALVE BLOCK WITH MICROCHANNELS
EP94926446A EP0775277B1 (en) 1993-09-06 1994-09-06 Valve, especially for fluid handling bodies with microflowchannels
AT94926446T ATE193759T1 (en) 1993-09-06 1994-09-06 VALVE, ESPECIALLY FOR VALVE BLOCK WITH MICRO CHANNELS
US08/605,166 US5593130A (en) 1993-06-09 1994-09-06 Valve, especially for fluid handling bodies with microflowchannels
JP50863095A JP3420241B2 (en) 1993-09-06 1994-09-06 In particular, a valve for a fluid operating body having a microflow channel

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9302865A SE501713C2 (en) 1993-09-06 1993-09-06 Diaphragm-type valve, especially for liquid handling blocks with micro-flow channels
SE9302865-2 1993-09-06

Publications (1)

Publication Number Publication Date
WO1995007425A1 true WO1995007425A1 (en) 1995-03-16

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PCT/SE1994/000824 WO1995007425A1 (en) 1993-06-09 1994-09-06 Valve, especially for fluid handling bodies with microflowchannels

Country Status (7)

Country Link
US (1) US5593130A (en)
EP (1) EP0775277B1 (en)
JP (1) JP3420241B2 (en)
AT (1) ATE193759T1 (en)
DE (1) DE69424883T2 (en)
SE (1) SE501713C2 (en)
WO (1) WO1995007425A1 (en)

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EP0775277A1 (en) 1997-05-28
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US5593130A (en) 1997-01-14
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SE9302865D0 (en) 1993-09-06
DE69424883D1 (en) 2000-07-13
ATE193759T1 (en) 2000-06-15
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DE69424883T2 (en) 2000-10-05
EP0775277B1 (en) 2000-06-07

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