WO1996041226A1 - A method of making and an apparatus for a flat diffraction grating light valve - Google Patents
A method of making and an apparatus for a flat diffraction grating light valve Download PDFInfo
- Publication number
- WO1996041226A1 WO1996041226A1 PCT/US1996/009255 US9609255W WO9641226A1 WO 1996041226 A1 WO1996041226 A1 WO 1996041226A1 US 9609255 W US9609255 W US 9609255W WO 9641226 A1 WO9641226 A1 WO 9641226A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- substrate
- conducting
- ribbons
- forming
- Prior art date
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1828—Diffraction gratings having means for producing variable diffraction
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69603857T DE69603857T2 (en) | 1995-06-07 | 1996-06-05 | MANUFACTURING METHOD AND DEVICE FOR A LIGHT SWITCH WITH A PLANE BREATHING GRID |
JP9501613A JP3016871B2 (en) | 1995-06-07 | 1996-06-05 | Method and apparatus for manufacturing flat diffraction grating light valve |
AU61564/96A AU6156496A (en) | 1995-06-07 | 1996-06-05 | A method of making and an apparatus for a flat diffraction grating light valve |
EP96919154A EP0830629B1 (en) | 1995-06-07 | 1996-06-05 | A method of making and an apparatus for a flat diffraction grating light valve |
KR1019970708747A KR100306085B1 (en) | 1995-06-07 | 1996-06-05 | A method of making and an apparatus for a flat diffraction grating light valve |
NO975695A NO975695D0 (en) | 1995-06-07 | 1997-12-05 | Method of manufacturing a device for a flat diffraction grating light valve |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/480,459 US5661592A (en) | 1995-06-07 | 1995-06-07 | Method of making and an apparatus for a flat diffraction grating light valve |
US08/480,459 | 1995-06-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996041226A1 true WO1996041226A1 (en) | 1996-12-19 |
Family
ID=23908065
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/009255 WO1996041226A1 (en) | 1995-06-07 | 1996-06-05 | A method of making and an apparatus for a flat diffraction grating light valve |
Country Status (10)
Country | Link |
---|---|
US (1) | US5661592A (en) |
EP (1) | EP0830629B1 (en) |
JP (1) | JP3016871B2 (en) |
KR (1) | KR100306085B1 (en) |
CN (1) | CN1153081C (en) |
AT (1) | ATE183590T1 (en) |
AU (1) | AU6156496A (en) |
DE (1) | DE69603857T2 (en) |
NO (1) | NO975695D0 (en) |
WO (1) | WO1996041226A1 (en) |
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US6947195B2 (en) | 2001-01-18 | 2005-09-20 | Ricoh Company, Ltd. | Optical modulator, optical modulator manufacturing method, light information processing apparatus including optical modulator, image formation apparatus including optical modulator, and image projection and display apparatus including optical modulator |
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KR100632548B1 (en) | 2004-09-06 | 2006-10-09 | 삼성전기주식회사 | Diffraction type optical modulator using symmetrical cantilever |
Also Published As
Publication number | Publication date |
---|---|
KR100306085B1 (en) | 2001-11-02 |
EP0830629A1 (en) | 1998-03-25 |
NO975695L (en) | 1997-12-05 |
US5661592A (en) | 1997-08-26 |
CN1153081C (en) | 2004-06-09 |
CN1187249A (en) | 1998-07-08 |
EP0830629B1 (en) | 1999-08-18 |
DE69603857D1 (en) | 1999-09-23 |
DE69603857T2 (en) | 2000-01-13 |
JP3016871B2 (en) | 2000-03-06 |
AU6156496A (en) | 1996-12-30 |
JPH10510375A (en) | 1998-10-06 |
ATE183590T1 (en) | 1999-09-15 |
NO975695D0 (en) | 1997-12-05 |
KR19990022268A (en) | 1999-03-25 |
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