WO1997026114A1 - A polishing pad and a method for making a polishing pad with covalently bonded particles - Google Patents
A polishing pad and a method for making a polishing pad with covalently bonded particles Download PDFInfo
- Publication number
- WO1997026114A1 WO1997026114A1 PCT/US1997/000861 US9700861W WO9726114A1 WO 1997026114 A1 WO1997026114 A1 WO 1997026114A1 US 9700861 W US9700861 W US 9700861W WO 9726114 A1 WO9726114 A1 WO 9726114A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- bonding
- matrix material
- abrasive particles
- polishing pad
- molecule
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
- B24B37/245—Pads with fixed abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/20—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially organic
- B24D3/28—Resins or natural or synthetic macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/34—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents characterised by additives enhancing special physical properties, e.g. wear resistance, electric conductivity, self-cleaning properties
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S451/00—Abrading
- Y10S451/921—Pad for lens shaping tool
Abstract
Description
Claims
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU18328/97A AU1832897A (en) | 1996-01-22 | 1997-01-21 | A polishing pad and a method for making a polishing pad with covalently bonded particles |
DE69713057T DE69713057T2 (en) | 1996-01-22 | 1997-01-21 | POLISHING CUSHION AND METHOD FOR PRODUCING POLISHING CUSHION WITH COVALENT-TIED PARTICLES |
EP97903862A EP0876242B1 (en) | 1996-01-22 | 1997-01-21 | A polishing pad and a method for making a polishing pad with covalently bonded particles |
JP52625697A JP4171846B2 (en) | 1996-01-22 | 1997-01-21 | Polishing pad having shared particles and method for producing the same |
AT97903862T ATE218413T1 (en) | 1996-01-22 | 1997-01-21 | POLISHING PAD AND METHOD FOR PRODUCING POLISHING PAD WITH COVALENTLY BONDED PARTICLES |
KR10-1998-0705588A KR100459528B1 (en) | 1996-01-22 | 1997-01-21 | A polishing pad comprising covalently bonded particles, a method of manufacturing the same, and a flattening machine including the same |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/589,774 | 1996-01-22 | ||
US08/589,774 US5624303A (en) | 1996-01-22 | 1996-01-22 | Polishing pad and a method for making a polishing pad with covalently bonded particles |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1997026114A1 true WO1997026114A1 (en) | 1997-07-24 |
Family
ID=24359467
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1997/000861 WO1997026114A1 (en) | 1996-01-22 | 1997-01-21 | A polishing pad and a method for making a polishing pad with covalently bonded particles |
Country Status (8)
Country | Link |
---|---|
US (3) | US5624303A (en) |
EP (1) | EP0876242B1 (en) |
JP (2) | JP4171846B2 (en) |
KR (1) | KR100459528B1 (en) |
AT (1) | ATE218413T1 (en) |
AU (1) | AU1832897A (en) |
DE (1) | DE69713057T2 (en) |
WO (1) | WO1997026114A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107083233A (en) * | 2010-02-24 | 2017-08-22 | 巴斯夫欧洲公司 | Abrasive article, its preparation method and its application process |
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- 1997-01-21 WO PCT/US1997/000861 patent/WO1997026114A1/en active IP Right Grant
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- 1997-01-21 JP JP52625697A patent/JP4171846B2/en not_active Expired - Fee Related
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Cited By (1)
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CN107083233A (en) * | 2010-02-24 | 2017-08-22 | 巴斯夫欧洲公司 | Abrasive article, its preparation method and its application process |
Also Published As
Publication number | Publication date |
---|---|
KR100459528B1 (en) | 2005-06-02 |
AU1832897A (en) | 1997-08-11 |
DE69713057T2 (en) | 2003-01-23 |
ATE218413T1 (en) | 2002-06-15 |
JP4171846B2 (en) | 2008-10-29 |
JP2000503601A (en) | 2000-03-28 |
DE69713057D1 (en) | 2002-07-11 |
KR19990081877A (en) | 1999-11-15 |
JP2006013523A (en) | 2006-01-12 |
US5823855A (en) | 1998-10-20 |
JP4174607B2 (en) | 2008-11-05 |
US5879222A (en) | 1999-03-09 |
EP0876242A1 (en) | 1998-11-11 |
US5624303A (en) | 1997-04-29 |
EP0876242B1 (en) | 2002-06-05 |
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