WO1998018195A1

WO1998018195A1 - Linear drive and process for manufacturing a passive unit for a linear drive, and device for carrying out the process

Info

Publication number: WO1998018195A1
Application number: PCT/EP1997/005839
Authority: WO
Inventors: Klaus Martin; Günter DREIFKE
Original assignee: Pasim Mikrosystemtechnik Gmbh I.L.
Priority date: 1996-10-22
Filing date: 1997-10-22
Publication date: 1998-04-30

Abstract

A linear drive has a fixed active unit (1), a movable passive unit (2), a guiding unit (3) and a control unit. The passive unit (2) consists of a hollow, light-weight base body (10) made of glass or carbon fibre-reinforced plastics upon which are mounted components (12, 31) which form magnetisable/magnetic areas. Also disclosed are a process and device (40) for manufacturing such a passive unit (2).

Description

Linear drive and method for producing a

Passive unit of a linear drive, and device for

Implementation of the procedure

The invention relates to a linear drive with an active unit which has elements for generating a variable magnetic flux; a passive unit that includes magnetizable or magnetic areas; a leadership unit that allows a low-friction movement between active and passive units; and a control unit with which the magnetic flux can be changed.

Furthermore, this invention relates to a method for producing a passive unit of a linear drive, which consists of a lightweight basic body made of composite material with magnetizable or magnetic areas.

In addition, the invention relates to a device for producing a passive unit of a linear drive, which consists of a lightweight basic body made of composite material with magnetizable or magnetic areas.

In recent times, linear motors in particular have been increasingly used in precision engineering and device technology, the main advantage of which is the integration of several functions required for drive units in a few structural units. Such linear drives, like other motors that work according to the electromagnetic principle, have an active unit and a passive unit. The generation of force is achieved by the interaction of these two units, it being possible for both the active unit and the passive unit to be the motor part which is moving relative to the other unit. With more suitable

CONFIRMATION COPY constructive design, as is often found in linear drives, the force generating elements simultaneously take over the function of guiding the moving parts and also represent the frame system for any application.

Such a linear drive is described in German Offenlegungsschrift DE 32 08 380 AI. This is a brushless direct current linear motor in which permanent magnets and electromagnets are combined in the active unit to generate a controllable magnetic flux, while the passive unit consists of a soft iron strip provided with pole teeth. With regard to the functional principle, reference is made to the detailed description of such linear motors in this document.

The embodiments shown in this disclosure mainly use the active unit as a runner, while the passive unit is the part of the motor that is fixed to the frame. It is also mentioned that these functions can be reversed so that the passive unit can be moved. In this case, a stable and therefore material-intensive construction of the passive unit is required, since at the same time carrier functions for a tool or a workpiece to be machined must be taken over. As a result, in both cases, this leads to movable units with a relatively high mass, which means that only slight accelerations are possible and the positioning and repetition accuracy decrease due to high inertia forces.

German patent DE 31 28 834 describes a linear motor with a stator which has a large number of magnetic teeth at a constant distance and a rotor which faces the stator over a narrow gap. With regard to the functioning of such a linear motor, in particular a multi-phase linear motor, reference is made to this document. The above disadvantage of known line armotor also occurs here. In addition, guides are provided between the stator and the runner, which make the construction of such a linear motor complex and complicated.

US Pat. No. 4,563,602 describes a linear motor which, inter alia, specifies a very simply constructed passive unit and can be designed both as a single-phase synchronous machine and as a multi-phase synchronous machine. The possibility of air storage between the active and passive unit is also known from this document. The disadvantage of the motor shown is again the high mass of the moving unit (here the active unit), which, among other things, limits the use of such motors.

It is also known from the prior art that linear motors can not only be used to produce straight-line movements in one direction. The European patent application EP 0 237 639 AI is cited here as an example, which specifies the use of the linear motor principle in a cylinder-shaped motor. For example, movements in the direction of the z-axis can be realized in this way.

A precision direct drive is already described in the journal "antπebstechnik" 33 (1994) No. 7, p. 68. The principle of operation of a permanent magnet-excited two-phase reluctance motor using hybrid technology is shown there.

From the German patent application DE 36 06 061 AI a linear drive for a special application as Antπebsem direction m a data carrier reading device is known. The slide used in this case, which carries a magnetic head, also does not perform any supporting functions, as are required, for example, in the case of workpiece positioning devices. In the German patent application DE 44 36 865 AI, a modular planar runner is specified which is made up of several modular components. With regard to the structure and the mode of operation of the drive units not described in more detail here, reference is made to this application.

It is therefore an object of the present invention to avoid the aforementioned disadvantages of all known linear motors and to provide a linear drive in which the mass of the moving parts is greatly reduced and at the same time high stability is ensured, so that frame functions are taken over can.

This object is achieved in that the passive unit consists of a lightweight basic body made of glass fiber reinforced or carbon fiber reinforced plastic, on which components are arranged which form the magnetizable / magnetic ranges.

Such a design of the passive unit of the linear drive enables the production of drive systems that can work with high accelerations, do not require increased drive forces, and at the same time improve the positioning and repetition accuracy of the entire drive system.

These material combinations proposed for the passive unit have a particularly favorable relationship between the stability to be achieved and the resulting mass of the lightweight basic body.

In particular, it is advantageous if the lightweight basic body is an elongated cuboid hollow body whose

Cavity m of a modified embodiment with a Filler can be filled with a steaming effect. The geometric shape of the lightweight base body can easily be adapted to the primary purpose of the linear drive due to the good machinability of composite materials, with geometric shapes which offer high rigidity and stability being preferred.

In a preferred embodiment, the magnetizable areas are formed from soft iron sheets which are glued to the lightweight basic body. The pole teeth required for the functioning of the linear drive can be formed relatively easily in the soft iron sheets. Due to the adhesive bond between the soft iron sheet and the lightweight basic body, homogeneous surfaces can be formed without the fastening elements interfering with the magnetic flux to be generated. As far as the adhesive layers are kept thin, this includes advantageous for a desired total mass of the passive unit that is as low as possible. In general, the adhesive layers should be kept as thin as possible in order to keep the negative effects of different expansion coefficients low.

Another embodiment is characterized in that the agnetizable areas are formed from low-carbon steels. With steels such as ST 37 or ST 33 drive performance comparable to that of soft iron sheets. However, low-carbon steels are much cheaper.

An advantageous embodiment of the linear drive consists in that the active unit has elements for generating a permanent magnetic flux and at least one electromagnet which generates a temporary magnetic flux interacting with the permanent magnetic flux when an electric current flows, that the resulting total magnetic flux passes through the magnetizable / magnetic areas of the passive unit, and that the temporary magnetic flux through the control Unit is changed in such a way that it results in a force component acting in the direction of movement. A linear drive with such features has a particularly simple structure, with which both the desired drive forces can be achieved and, with appropriate control, high positioning accuracies can be achieved.

The advantage of a modified embodiment in which the active unit has a large number of permanent magnets and a large number of electromagnets which are arranged in a linear sequence, the directly adjacent electromagnets being driven with phase-shifted electrical currents, in particular there is a higher positioning accuracy, which is due to the phase-shifted control of neighboring electromagnets can be achieved in the active unit. It is thus possible that the active and passive units can also assume positions in relation to one another in which the opposing pole teeth do not overlap in alignment, but can assume an arbitrarily offset position. In this construction, the positioning accuracy is no longer dependent on the distance between successive pole teeth, which is limited by the manufacturing process.

It is particularly expedient if the permanent magnets are broken down into a multiplicity of smaller permanent magnets. In the case of service and maintenance, there is the option of removing the plumber permanent magnets from the active unit without great effort, in order to then separate the active unit and the passive unit. Otherwise, especially with larger structures, this would hardly be possible due to the magnetic attraction forces.

In a preferred embodiment, two identical active units arranged perpendicular to one another are provided, which interact with a passive unit which has two magnetized magnetic units arranged perpendicular to one another. has bare / magnetic areas. A linear drive is thus available which does not require any additional guide elements, since the moving parts of the linear drive are guided in all directions by the drive units themselves.

It is particularly expedient if the active units are stationary and the light passive unit is movable.

In a further embodiment, a plurality of active and passive units are connected to form a drive which can be moved in the m x direction and in the m y direction. Such linear drives can advantageously be used, for example, in laser processing technology, with either a workpiece carriage being built up with the linear drive, or the laser tool itself being movable in the corresponding working positions.

To generate the desired movement with as little loss as possible, it is particularly advantageous if the guide unit acting between the active and passive unit is formed by an air bearing. This results in only minimal friction losses during the movement and at the same time cooling of the components heated by the magnetic flux can be achieved.

Another object of the present invention is to provide a method for producing a passive unit of such a linear drive. This task is solved by the following process steps: a) the extensive magnetic / magnetizable components are manufactured; b) these components are inserted with the side forming the tread m a reusable form and temporarily locked there; c) a suitable adhesive is applied to the side of the components facing the lightweight base body; d) the lightweight basic body is applied to the adhesive-coated side of the components; e) after the adhesive has hardened, the lightweight basic body with the components is removed from the mold.

The advantages of this method are that the passive unit can be produced in the same way, the individual method steps being easy to automate. Errors are largely excluded and tolerances can be kept within a controllable range.

It is particularly expedient if the components are fastened in the mold by generating a magnetic field. The magnetic field must be designed so that the components are drawn magnetically into the mold. This leads, particularly in the case of thin soft iron sheets, to a largely flat support of the sheets of the form, which ensures that the components can be attached exactly to the lightweight body.

A third object of the invention is to provide a device for producing a passive unit of such a linear drive. This object is achieved by the device according to the invention, which is distinguished by a shape in which the extended magnetizable / magnetic components can be inserted temporarily and in which a magnetic field can be built up at least in sections such that the magnetizable / magnetic components are drawn into the shape are, and which is characterized by a receiving area, which serves for the temporary recording, positioning and holding of the base body during the connection process between the base body and components. The advantage of this device is that it is easy to handle during the Passivein manufacturing process

It is particularly expedient if a magnetic field can be built up at least in sections within the mold, which is designed such that the magnetizable / magnetic components are drawn into the mold. On the one hand, this ensures a flat contact of the components of the mold, which results in a flat surface after assembly of the components on the lightweight basic body. The resulting surface flatness is advantageous for the subsequent finishing.

Further advantages, details and further developments result from the following description of preferred embodiments with reference to the drawing. Show it:

1 shows a partially sectioned side view of a linear drive with an active unit and a passive unit; Figure 2 is a schematic diagram of a linear drive with air bearings, as far as according to the prior art. 3 shows a simplified perspective illustration of a passive unit with two magnetizable regions arranged perpendicular to one another; 4 shows a modified embodiment of the linear drive from FIG. 1 with two active units which are arranged perpendicular to one another;

5 shows a partially sectioned front view of the linear drive from FIG. 4; FIG. 6 shows a partially sectioned view from above of the linear drive according to FIG. 4; 7 shows a detailed side view of a magnetizable component with pole teeth; FIG. 8 shows a perspective principle representation of a modified lightweight basic body with a plurality of magnetizable areas; FIG. FIG. 9 shows a perspective illustration of a device for producing a lightweight basic body;

Fig. 10 is a top view of the device for

Production of the lightweight basic body according to FIG. 9, with inserted magnetizable components.

The embodiments shown in the drawing are described in detail below. The description is exemplary. The scope of the invention is not restricted thereby. In principle, the invention can be used with all similar linear drives.

1 shows a simplified illustration of a linear drive in a partially sectioned side view. The main components of the linear drive are an active unit 1, a passive unit 2, a guide unit 3 and a control unit (not shown).

The active unit 1 is fixed to the frame in the embodiment shown, i.e. mounted in a stationary manner, and has a U-shaped frame body 5 which receives one or more anti-friction modules 6.

The passive unit 2 consists of a lightweight basic body 10, on the underside of which a magnetic or magnetizable component 12 is attached via an adhesive layer 11. The attachment of the component 12 can also be done in any other way. In the embodiment according to FIG. 1, the lightweight basic body 10 is an elongated hollow profile with a rectangular cross section, which consists of a composite material. Particularly suitable material combinations are glass fiber reinforced or carbon fiber reinforced plastics. The lightweight body can also consist of plastics that either have sufficient rigidity and stability themselves or are stiffened with other materials. The shape of the lightweight basic body is arbitrary and is adapted to the respective application and the shape of the active unit. Epoxy resin, for example, is used as the adhesive, with the aim being a durable and permanent connection between the lightweight base body 10 and the component 12.

In order to ensure a uniform, low-loss relative movement between the active and passive units, it is necessary to avoid surface unevenness on the underside of the passive unit. The adhesive layer should therefore be as uniform as possible. The flatness required for air storage with height tolerances of 2 to 3 micrometers is achieved by fine machining, e.g. achieved by grinding, following the gluing process.

To further reduce weight, very thin adhesive layers are sought. An adhesive layer thickness of approximately 0.5 millimeters has proven to be advantageous.

The guide unit 3 is formed in the example shown by an air cushion, which works in a known manner as an air bearing. It is expedient to provide open air outlet nozzles 4 within the active unit 1 to the passive unit, through which the required amount of air can flow out.

To understand the mode of operation of the linear drive, reference is made below to FIG. 2, in which the principle position of a two-phase linear drive known per se is shown. The drive module 6 of the active unit comprises permanent magnets 15 which are in magnetic connection with an iron core 16. An electric coil 17 is wound around the iron core 16, whereby an electromagnet is formed. A permanent magnetic flux 18 is generated by the permanent magnet 15. When current flows through the electric coil 17th In addition, a temporary magnetic flux 19 arises, which in the region 20 has the same effect as the permanent magnetic flux 18, which results in an increased overall magnetic flux at this point. In the region 21, the temporary magnetic flux 19 runs opposite to the permanent magnetic flux 18, which results in a reduced total magnetic flux.

The iron core 16 is constructed in such a way that individual pole teeth 25 are formed, which are oriented toward the passive unit 2 and are arranged at a periodic distance along the active unit 1. 2, the passive unit consists of a stable, self-supporting, frame-fixed, magnetizable component 12. Individual pole teeth 26 are also formed on component 12. In the figures, the individual pole teeth are not recognizable due to their small dimensions, but are shown in simplified form with continuous lines. The distance between the individual pole teeth 25 on the drive module in the area 20 is matched to the area 21 in a ratio of 1: 1.5. Other conditions are possible. Appropriate control of the total magnetic flux, which also passes through the components 12, results in a known manner in force effects between the opposing pole teeth and thus in a relative movement between the active unit and the passive unit.

The storage takes place through the air bearing 3, which is built up by the outflowing compressed air on the underside of the active unit. The compressed air is supplied via the nozzle 4. For a more precise understanding of the functioning of such linear drives, reference is made to the documents of the prior art mentioned in the introduction.

In the linear drive shown in FIG. 1, an attraction force which emanates from the permanent magnets and which are arranged in the drive modules 6 of the active unit 1 and which attracts the passive unit 2 downwards also acts in the idle state. With the help of the air cushion acting as a guide unit 3, a slight gap between active unit 1 and passive unit 2 is maintained. The air gap is approximately 10 micrometers, for example. This enables a low-loss movement of the passive unit 2.

Due to the construction of the passive unit 2, it has a particularly low weight and at the same time a high stability. This means that significantly higher accelerations can be achieved with the linear drive shown without the drive forces having to be increased additionally.

For certain applications, it is advantageous if a filler is introduced into the inner cavity of the lightweight base body 10, which has steaming effects, as a result of which, for example, impacts on the lightweight base body can be evaporated.

3 shows a separately illustrated passive unit 2 m in a simplified perspective view. The pole teeth 26 arranged on the magnetizable components are only shown as lines.

This modified embodiment in turn has a lightweight basic body 10 with a rectangular cross section, which is designed as a hollow profile. In addition to the first magnetizable component 12 attached via the first adhesive layer 11, a second adhesive layer 30 is applied to a second side of the lightweight basic body 10, which creates the connection to a second magnetizable component 31.

A modified linear drive can be constructed with the passive unit shown in FIG. 3, which is shown in a simplified partially sectioned side view in FIG. 4. The special feature of this linear drive is that a further active unit 35 is provided perpendicular to the first active unit 1. The two active units 1, 35 are again fixed to the frame. The second active unit 35 also has drive modules 6, which in turn contain permanent magnets, iron cores and electrical coils. The passive unit 2 is arranged on the two active units in such a way that the first magnetizable components 12 are directed towards the lower active unit 1 and the second magnetizable components 31 are directed towards the lateral active unit 35. The two active units 1, 35 are controlled by a common control unit. The passive unit receives a guidance m in the direction of movement, that is to say along its longitudinal extent, through the first active unit 1. The passive unit is also guided in the z-axis direction due to the interaction of the magnetic fields of the first active unit 1 generated in the drive modules 6 and the air gap generated by the air bearing. In this respect, however, the passive unit 2 could be moved transversely to the direction of movement. The leadership that prevents this is formed by the second active unit 35, which operates in the same way. This means that no additional guide elements are required. At the same time, the maximum driving force that can be provided by the entire linear drive is doubled.

FIG. 5 shows the partially sectioned front view of the linear drive from FIG. 4. It can be seen that the active unit 1 has a modular structure. In the frame body 5, two drive modules 6 are strung together, which act on the passive unit 2 at the same time due to the greater longitudinal extent of the latter. The modular structure makes it possible to arrange a larger number of drive modules in the active unit if this is necessary due to the required drive forces. Suitable positioning of the drive modules makes it possible to control them from a common control unit and to supply them with the corresponding control signals in parallel with one another. The drive modules 6 are fastened with suitable fastening elements 36 in the frame body 5. FIG. 6 shows the linear drive from FIG. 4 m in a partially sectioned view from above. This view reveals that the second active unit 35 also contains two drive modules 6 lined up. The modular structure also brings cost advantages and simplified assembly options, since all the drive modules used within the linear drive are identical and thus a wide variety of linear drives adapted to the respective application can be assembled.

The described configurations of the linear drive according to the invention only show examples of diverse design configurations. In particular, it is possible to design the lightweight basic body with different cross sections and to adapt it to changed drive modules. Any shape can be produced by using composite materials for the lightweight basic body.

7 shows a side view as a detailed drawing of the section of the magnetizable component 12. So that this component can be adapted to the desired geometric shapes of the lightweight body, em soft iron sheet is particularly suitable. It has proven to be advantageous if the total thickness of the soft iron sheet is approximately 3 mm. The pole teeth 26 are produced, for example, by milling or by etching. Tooth spacing in the range from 0.5 to 2.0 mm is advantageous. The tooth depth is suitably adapted to the tooth spacing. A tooth depth that is approximately 0.5 times the tooth pitch is advantageous.

8 shows, in a simplified perspective view, a further design of a passive unit 2. The lightweight basic body 10 is equipped with magnetizable components 12 on the two narrow side surfaces. Further magnetizable components 31 are attached to the upper broad side surface. brings. These are components which are separate from one another and which, if appropriate, can also have different tooth spacings of the pole teeth. The components arranged on the top of the lightweight basic body can have the same or different divisions of the pole teeth. Separate active units or connected active units can interact with the passive unit, as a result of which a wide variety of drive solutions can be implemented. Such a design of the passive unit is useful, for example, if the passive unit is designed to be fixed to the frame and the active unit is movable. In the embodiment shown, two groups of active units can attack this common passive unit, each group of active units in turn consisting of two active units arranged perpendicular to one another. With this structure, the active units can be moved independently of one another on the common passive unit. It is also conceivable to design the first active unit to be fixed to the frame and to arrange a second active unit on the then movable passive unit, which in turn is movable.

Such combinations of active and passive units can also be used to build up an x-y coordinate array. In the x-direction, for example, a first passive unit can be moved, which is driven and guided via two active units arranged at an angle to one another. A further active unit is attached to this moving passive unit, which drives and guides a second passive unit in the y direction. Any other arrangement is possible.

The method described below is suitable for producing the passive units of the linear drive according to the invention.

In a first method step, the magnetic or magnetizable components are produced. If soft iron sheets are used, the corresponding shapes must be used cut and continue the pole tooth z. B. be worked out by milling or etching.

The prefabricated components are then placed in an auxiliary device in which the further assembly takes place. This device is used to position and hold the magnetizable components and to facilitate the application of these components to the lightweight base body. The lightweight basic body is manufactured with the desired geometric shape. Depending on the application of the linear actuator to be assembled, rectangular cross-sections or hollow cylinders are suitable.

In the next process step, the back of the components are provided with a suitable adhesive, to which the lightweight basic body is then applied. This creates the connection between the magnetizable components and the lightweight body.

After the adhesive has hardened, the lightweight basic body and the components attached to it are removed from the auxiliary device.

9 shows a representation of an expedient device for producing a passive unit of a linear drive in a simplified perspective view. The device shown is suitable for the production of passive units with an essentially rectangular cross section. The device consists of a base unit 40, which is provided with a V-shaped groove 41. At least one electromagnet 42 is arranged on each leg of the V-shaped groove 41 within the base unit 40. In the operating state, magnetic fields are built up by the electromagnets 42, which extend in the area of the groove. These magnetic fields attract the magnetizable components that are to be attached to the lightweight base body and thus press them against the walls of the V-shaped groove 41. If thin soft iron sheets are used, these are given by sufficiently strong magnetic fields, the soft iron straightened and then lie flat on the wall surfaces of the groove. In this state, the adhesive can be applied to the components and the lightweight basic body can be glued on easily. The glued-on components must then be subjected to fine machining. If necessary, the pole teeth are reworked and the entire surface is ground off so that the required flatness is achieved, which is a prerequisite for the use of air bearings. Finally, the gaps between the individual pole teeth can be filled with epoxy resin, for example, so that a closed, insensitive surface is created.

It is also possible to provide a heating unit within the base unit 40 which heats the area of the V-shaped groove 41, as a result of which the inserted magnetizable components and thus the applied adhesive layer are heated, which leads to faster curing for certain adhesives. This can speed up production. When heating, however, care must be taken to ensure that, due to different expansion coefficients in the overall structure, no stresses arise which lead to an uneven surface or to uncontrollable material changes.

FIG. 10 shows a section of the device from FIG. 9 in a simplified view from above. Magnetizable components 12 are placed on a wall of the V-shaped groove 41. Such a device also makes it possible to apply individual magnetizable components to very long lightweight basic bodies, with shorter pieces of the components being lined up directly next to one another. In such a series, it is necessary that the tooth spacing between the individual pole teeth is also exactly maintained at the abutment points. Otherwise there may be irregularities in the motion sequence of the linear drive. Due to the magnetic attraction of the components within the V-shaped groove 41 can be positioned exactly without difficulty before the lightweight basic body is glued on.

This means that magnetisable components can be kept in stock in standard lengths, which are put together to form a complete component during the manufacture of the passive unit. For this purpose, it is expedient that the individual magnetizable components each end in the middle of a pole tooth gap and can thus be strung together directly.

With such a device, magnetizable components can be strung together in a line as well as placed side by side on the lightweight building blocks, so that areas of lightweight building blocks of any size can be fitted with such components.

Claims

Claims:

1. Linear drive with

* a fixed activity (1), which has elements for generating a variable magnetic flux;

* a movable passive unit (2) comprising magnetizable or magnetic areas;

* a leadership unit (3), which allows a low-friction movement between active and passive unit; * and a control unit with which the magnetic flux can be changed; characterized in that the passive unit (2) consists of a hollow lightweight basic body (10) made of glass fiber reinforced or carbon fiber reinforced plastic, on which components (12, 31) are arranged which form the magnetizable / magnetic areas.

2. Linear drive according to claim 1, characterized in that the lightweight body (10) is an elongated cuboid hollow body.

3. Linear drive according to claim 1 or 2, characterized in that cavities within the lightweight body are at least partially filled with steaming fillers.

4. Linear drive according to one of claims 1 to 3, characterized in that the magnetizable components are made of soft iron sheets (12) which are glued to the lightweight body (10).

5. Linear drive according to one of claims 1 to 4, characterized in that the magnetizable components are formed from low-carbon steels which are attached to the lightweight body.

6. Linear drive according to one of claims 1 to 5, characterized in that the active unit (1) has elements for generating a permanent magnetic flux (15) and at least one electromagnet (16, 17) which cooperates with the permanent magnetic flux when an electric current flows Temporary magnetic flux produces that the resulting total magnetic flux passes through the magnetizable / magnetic areas (12) of the passive unit (2), and that the temporary magnetic flux is changed by the control unit in such a way that a force component acting in the direction of movement results.

7. Linear drive according to claim 6, characterized in that the active unit (1) has a plurality of permanent magnets (15) and a plurality of electromagnets (16, 17) which are arranged in a linear sequence, the immediately adjacent electromagnets having phase-shifted electrical Currents can be controlled.

8. Linear drive according to claim 7, characterized in that the permanent magnets (15), which are assigned to an electromagnet (16, 17), m a plurality of plumber permanent magnets dissected and releasably connected to the iron cores (16) of the associated electromagnet.

9. Linear drive according to one of claims 1 to 8, characterized in that two identical, mutually perpendicular active units (1, 35) interact with a passive unit (2), the two mutually perpendicular magnetizable / magnetic areas (12, 31st ) has.

10. Linear drive according to one of claims 1 to 9, characterized in that a plurality of active and passive units cooperate such that an m X direction and m Y direction movable drive results.

11. Linear drive according to one of claims 1 to 10, characterized in that the Fuhrungsemheit by em Luft- bearing (3) is formed.

12. Linear drive according to claim 11, characterized in that the active unit (1) air nozzles (4) are provided through which compressed air escapes, whereby an air cushion (3) is built up between active unit and passive unit.

13. A method for producing a passive unit (2) of a linear drive, which consists of a basic body (10) with extensive, magnetizable or magnetic components (12, 31) forming the tread of the passive unit, with the following method steps: a) the extended magnetic / magnetizable components (12, 31) are produced; b) these components are inserted with the side forming the tread a reusable form (41) and temporarily locked there; c) on the side of the components facing the lightweight base body, a suitable adhesive is applied; d) the lightweight basic body is applied to the adhesive-coated side of the components; e) after the adhesive has hardened, the base body with the components is removed from the mold.

14. The method according to claim 13, characterized in that the fastening of the components of the mold is carried out by generating a magnetic field, whereby the components are magnetically drawn into the mold.

15. The method according to claim 14, characterized in that the magnetic field of the form generated by electromagnets only after inserting the components and is switched off again before the removal of the lightweight body.

16. Device (40) for producing a passive unit (2) of a linear drive, which consists of a basic body (10) with extended, the tread of the passive unit forming, magnetizable or magnetic components, comprising: * a shape (41), which the extensive, magnetizable / magnetic components (12) can be inserted temporarily and which magnetic field (at least in sections) can be built up in such a way that the magnetizable / magnetic components (12) are drawn into the shape,

* A recording area, which is used for the temporary recording, positioning and holding of the basic body during the connection process between the basic body and components.

17. The apparatus according to claim 16, characterized in that controllable electromagnets (42) are arranged which generate the magnetic field for attracting the components (12).

18. The apparatus according to claim 16 or 17, characterized in that the shape (41) has a substantially V-shaped cross section.

19. Device according to one of claims 16 to 18, characterized in that further heating elements are provided with which the mold (41) and the components (12) introduced therein can be heated.