WO1998050773A3 - Microcantilever biosensor - Google Patents

Microcantilever biosensor Download PDF

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Publication number
WO1998050773A3
WO1998050773A3 PCT/US1998/009338 US9809338W WO9850773A3 WO 1998050773 A3 WO1998050773 A3 WO 1998050773A3 US 9809338 W US9809338 W US 9809338W WO 9850773 A3 WO9850773 A3 WO 9850773A3
Authority
WO
WIPO (PCT)
Prior art keywords
microbeam
biosensor
microcantilever
microcantilever biosensor
micrometer
Prior art date
Application number
PCT/US1998/009338
Other languages
French (fr)
Other versions
WO1998050773A2 (en
Inventor
Deborah H Charych
Ronald C Mcglennen
Dennis L Polla
Original Assignee
Univ Minnesota
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Minnesota filed Critical Univ Minnesota
Publication of WO1998050773A2 publication Critical patent/WO1998050773A2/en
Publication of WO1998050773A3 publication Critical patent/WO1998050773A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01G—WEIGHING
    • G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
    • G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
    • G01G3/13—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing having piezoelectric or piezoresistive properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
    • G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
    • G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
    • G01N33/54366—Apparatus specially adapted for solid-phase testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G01N2291/0257—Adsorption, desorption, surface mass change, e.g. on biosensors with a layer containing at least one organic compound

Abstract

A biosensor includes a cantilever microbeam which responds to a chemical stimulus, binding event or mass loading with an electrical output. The microbeam is formed using a series of microfabrication processes, in the micrometer to millimeter size range and using thin deposition of piezoelectric materials.
PCT/US1998/009338 1997-05-08 1998-05-07 Microcantilever biosensor WO1998050773A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US85275897A 1997-05-08 1997-05-08
US08/852,758 1997-05-08
US5422398A 1998-04-02 1998-04-02
US09/054,223 1998-04-02

Publications (2)

Publication Number Publication Date
WO1998050773A2 WO1998050773A2 (en) 1998-11-12
WO1998050773A3 true WO1998050773A3 (en) 1999-04-15

Family

ID=26732773

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/009338 WO1998050773A2 (en) 1997-05-08 1998-05-07 Microcantilever biosensor

Country Status (1)

Country Link
WO (1) WO1998050773A2 (en)

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DE60032772T2 (en) 2000-09-27 2007-11-08 Stmicroelectronics S.R.L., Agrate Brianza Integrated chemical microreactor with thermally insulated measuring electrodes and method for its production
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US8372139B2 (en) 2001-02-14 2013-02-12 Advanced Bio Prosthetic Surfaces, Ltd. In vivo sensor and method of making same
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US7344678B2 (en) 2002-11-15 2008-03-18 The Regents Of The University Of California Composite sensor membrane
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US7497133B2 (en) 2004-05-24 2009-03-03 Drexel University All electric piezoelectric finger sensor (PEFS) for soft material stiffness measurement
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JP2006214744A (en) * 2005-02-01 2006-08-17 Gunma Univ Biosensor and biosensor chip
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CN101371132B (en) * 2006-01-23 2013-05-01 德雷塞尔大学 Self-exciting, self-sensing piezoelectric cantilever sensor
US8171795B1 (en) 2006-01-23 2012-05-08 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor for detection of airborne analytes directly in air
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US7671511B2 (en) 2006-12-12 2010-03-02 Concentris Gmbh System for oscillating a micromechanical cantilever
US8456150B2 (en) 2007-02-01 2013-06-04 Drexel University Hand-held phase-shift detector for sensor applications
US8512947B2 (en) 2007-02-16 2013-08-20 Drexel University Detection of nucleic acids using a cantilever sensor
WO2008101199A1 (en) 2007-02-16 2008-08-21 Drexel University Enhanced sensitivity of a cantilever sensor via specific bindings
WO2009035732A2 (en) 2007-05-30 2009-03-19 Drexel University Detection and quantification of biomarkers via a piezoelectric cantilever sensor
WO2009079154A2 (en) 2007-11-23 2009-06-25 Drexel University Lead-free piezoelectric ceramic films and a method for making thereof
US8236508B2 (en) 2008-01-29 2012-08-07 Drexel University Detecting and measuring live pathogens utilizing a mass detection device
US8741663B2 (en) 2008-03-11 2014-06-03 Drexel University Enhanced detection sensitivity with piezoelectric sensors
KR20110049748A (en) 2008-05-16 2011-05-12 드렉셀유니버시티 System and method for evaluating tissue
IT1392736B1 (en) 2008-12-09 2012-03-16 St Microelectronics Rousset INTEGRATED TORSIONAL MICRO-BALANCE DEVICE IN MEMS TECHNOLOGY AND ITS MANUFACTURING PROCESS
US8722427B2 (en) 2009-10-08 2014-05-13 Drexel University Determination of dissociation constants using piezoelectric microcantilevers
US8479585B2 (en) 2010-09-08 2013-07-09 Micropen Technologies Corporation Pressure sensing or force generating device
US10266397B2 (en) 2014-08-13 2019-04-23 University Of South Carolina III-V nitride resonate structure based photoacoustic sensor
EP3322410A4 (en) * 2015-07-14 2019-02-20 Nanosniff Technologies Pvt. Ltd. Process for immobilizing one or more receptor biomolecules on one or more solid surfaces
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DE102021107254A1 (en) 2021-03-23 2022-09-29 digid GmbH Digital sensor device for detecting an analyte in a sample

Citations (9)

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US4906440A (en) * 1986-09-09 1990-03-06 The United States Of America As Represented By The Secretary Of The Air Force Sensor for detecting chemicals
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WO1994005414A1 (en) * 1992-08-31 1994-03-17 The Regents Of The University Of California Microfabricated reactor
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Patent Citations (10)

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US4906440A (en) * 1986-09-09 1990-03-06 The United States Of America As Represented By The Secretary Of The Air Force Sensor for detecting chemicals
US5209119A (en) * 1990-12-12 1993-05-11 Regents Of The University Of Minnesota Microdevice for sensing a force
WO1994005414A1 (en) * 1992-08-31 1994-03-17 The Regents Of The University Of California Microfabricated reactor
US5674742A (en) * 1992-08-31 1997-10-07 The Regents Of The University Of California Microfabricated reactor
EP0657737A2 (en) * 1993-12-13 1995-06-14 Hewlett-Packard Company Method and reagents for binding chemical analytes to a substrate surface, and related analytical devices and diagnostic techniques
US5445008A (en) * 1994-03-24 1995-08-29 Martin Marietta Energy Systems, Inc. Microbar sensor
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Non-Patent Citations (1)

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MIHAILOVIC R.E. ET AL: "Measurement of the elastic stress of thin films deposited on gallium arsenide", J.VAC.SCI.TECHNOL.A., vol. 14, no. 4, 1996, US, pages 2483 - 2487, XP002091883 *

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