WO1999010705A3 - A scanning probe microscope system removably attached to an optical microscope objective - Google Patents

A scanning probe microscope system removably attached to an optical microscope objective Download PDF

Info

Publication number
WO1999010705A3
WO1999010705A3 PCT/US1998/015758 US9815758W WO9910705A3 WO 1999010705 A3 WO1999010705 A3 WO 1999010705A3 US 9815758 W US9815758 W US 9815758W WO 9910705 A3 WO9910705 A3 WO 9910705A3
Authority
WO
WIPO (PCT)
Prior art keywords
objective
scanning probe
removably attached
spm
system removably
Prior art date
Application number
PCT/US1998/015758
Other languages
French (fr)
Other versions
WO1999010705A2 (en
Inventor
John D Alexander
Marco Tortonese
Thai Nguyen
Original Assignee
Thermomicroscopes Corp
John D Alexander
Marco Tortonese
Thai Nguyen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US08/916,571 external-priority patent/US5861624A/en
Application filed by Thermomicroscopes Corp, John D Alexander, Marco Tortonese, Thai Nguyen filed Critical Thermomicroscopes Corp
Priority to AU87606/98A priority Critical patent/AU8760698A/en
Publication of WO1999010705A2 publication Critical patent/WO1999010705A2/en
Publication of WO1999010705A3 publication Critical patent/WO1999010705A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/02—Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
    • G01Q30/025—Optical microscopes coupled with SPM

Abstract

A scanning probe microscope (SPM) system is provided, which is removably attachable to an objective of an optical microscope comprising an objective mounting adaptor, with an SPM assembly attached thereto by means of an SPM mounting adaptor and an SPM assembly and cap. The objective mounting adaptor and SPM assembly each include an optically transmissive region through which an optical view of the sample can be obtained by the microscope objective.
PCT/US1998/015758 1997-08-22 1998-07-29 A scanning probe microscope system removably attached to an optical microscope objective WO1999010705A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU87606/98A AU8760698A (en) 1997-08-22 1998-07-29 Scanning probe microscope system removably attachable to an optical microscope objective

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US91683097A 1997-08-22 1997-08-22
US08/916,571 1997-08-22
US08/916,830 1997-08-22
US08/916,571 US5861624A (en) 1997-08-22 1997-08-22 Atomic force microscope for attachment to optical microscope
US09/119,808 US6005251A (en) 1997-08-22 1998-07-21 Voice coil scanner for use in scanning probe microscope
US09/119,808 1998-07-21

Publications (2)

Publication Number Publication Date
WO1999010705A2 WO1999010705A2 (en) 1999-03-04
WO1999010705A3 true WO1999010705A3 (en) 1999-11-11

Family

ID=27382370

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/015758 WO1999010705A2 (en) 1997-08-22 1998-07-29 A scanning probe microscope system removably attached to an optical microscope objective

Country Status (2)

Country Link
AU (1) AU8760698A (en)
WO (1) WO1999010705A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100399040C (en) * 2005-03-31 2008-07-02 电子科技大学 Magnetizer for magnetic probe of magnetic microscope
US10302598B2 (en) 2016-10-24 2019-05-28 General Electric Company Corrosion and crack detection for fastener nuts

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449213A (en) * 1980-12-18 1984-05-15 Sony Corporation Optical reading apparatus
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
JPS62174811A (en) * 1986-01-29 1987-07-31 Hitachi Constr Mach Co Ltd Finely positioning device
EP0331148A2 (en) * 1988-03-04 1989-09-06 Kabushiki Kaisha Toshiba Microscope apparatus
US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
EP0421354A2 (en) * 1989-10-02 1991-04-10 Olympus Optical Co., Ltd. Scanning tunneling microscope
US5289004A (en) * 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
EP0594362A1 (en) * 1992-10-20 1994-04-27 International Business Machines Corporation Carriage assembly and positioning device for a scanning probe
US5345815A (en) * 1991-01-04 1994-09-13 Board Of Trustees, Leland Stanford Jr. University Atomic force microscope having cantilever with piezoresistive deflection sensor
WO1996007074A1 (en) * 1994-08-27 1996-03-07 International Business Machines Corporation Fine positioning apparatus with atomic resolution
JPH08226928A (en) * 1994-12-08 1996-09-03 Nikon Corp Interatomic force microscope with optical microscope
EP0763881A2 (en) * 1995-09-13 1997-03-19 Hewlett-Packard Company Magnetic micro-mover
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
EP0807799A1 (en) * 1996-05-13 1997-11-19 Seiko Instruments Inc. Probe Scanning Apparatus

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4449213A (en) * 1980-12-18 1984-05-15 Sony Corporation Optical reading apparatus
US4667415A (en) * 1985-11-29 1987-05-26 Gca Corporation Microlithographic reticle positioning system
JPS62174811A (en) * 1986-01-29 1987-07-31 Hitachi Constr Mach Co Ltd Finely positioning device
EP0331148A2 (en) * 1988-03-04 1989-09-06 Kabushiki Kaisha Toshiba Microscope apparatus
US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
EP0421354A2 (en) * 1989-10-02 1991-04-10 Olympus Optical Co., Ltd. Scanning tunneling microscope
US5289004A (en) * 1990-03-27 1994-02-22 Olympus Optical Co., Ltd. Scanning probe microscope having cantilever and detecting sample characteristics by means of reflected sample examination light
US5345815A (en) * 1991-01-04 1994-09-13 Board Of Trustees, Leland Stanford Jr. University Atomic force microscope having cantilever with piezoresistive deflection sensor
EP0594362A1 (en) * 1992-10-20 1994-04-27 International Business Machines Corporation Carriage assembly and positioning device for a scanning probe
US5689063A (en) * 1993-07-15 1997-11-18 Nikon Corporation Atomic force microscope using cantilever attached to optical microscope
WO1996007074A1 (en) * 1994-08-27 1996-03-07 International Business Machines Corporation Fine positioning apparatus with atomic resolution
JPH08226928A (en) * 1994-12-08 1996-09-03 Nikon Corp Interatomic force microscope with optical microscope
EP0763881A2 (en) * 1995-09-13 1997-03-19 Hewlett-Packard Company Magnetic micro-mover
EP0807799A1 (en) * 1996-05-13 1997-11-19 Seiko Instruments Inc. Probe Scanning Apparatus

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
"SCANNING FORCE MICROSCOPE OBJECTIVE", IBM TECHNICAL DISCLOSURE BULLETIN, vol. 34, no. 8, 1 January 1992 (1992-01-01), pages 257 - 259, XP000302110 *
DRAKE B ET AL: "Tunneling microscope for operation in air or fluids", REVIEW OF SCIENTIFIC INSTRUMENTS, MARCH 1986, USA, vol. 57, no. 3, ISSN 0034-6748, pages 441 - 445, XP002085938 *
PATENT ABSTRACTS OF JAPAN vol. 012, no. 019 (P - 657) 21 January 1988 (1988-01-21) *

Also Published As

Publication number Publication date
WO1999010705A2 (en) 1999-03-04
AU8760698A (en) 1999-03-16

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