WO1999013495A3 - Sealed cabinet for storage of semiconductor wafers - Google Patents

Sealed cabinet for storage of semiconductor wafers Download PDF

Info

Publication number
WO1999013495A3
WO1999013495A3 PCT/US1998/018949 US9818949W WO9913495A3 WO 1999013495 A3 WO1999013495 A3 WO 1999013495A3 US 9818949 W US9818949 W US 9818949W WO 9913495 A3 WO9913495 A3 WO 9913495A3
Authority
WO
WIPO (PCT)
Prior art keywords
capsules
storage
semiconductor wafers
station
load
Prior art date
Application number
PCT/US1998/018949
Other languages
French (fr)
Other versions
WO1999013495A2 (en
Inventor
George E Niemirowski
John M Harrell
P V Patel
Adam F Niemirowski
Original Assignee
Novus Corp
George E Niemirowski
John M Harrell
P V Patel
Adam F Niemirowski
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novus Corp, George E Niemirowski, John M Harrell, P V Patel, Adam F Niemirowski filed Critical Novus Corp
Publication of WO1999013495A2 publication Critical patent/WO1999013495A2/en
Publication of WO1999013495A3 publication Critical patent/WO1999013495A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Abstract

An apparatus is provided for storing capsules containing semiconductor wafers in a sealed clean environment. The apparatus includes a housing (10) having a plurality of vertically arranged shelves (36) for supporting a plurality of capsules (16), a load-in station through which capsules may be inserted for storage, and a transfer port (42) through which capsules stored in the apparatus can be retrieved. The apparatus also includes an elevator mechanism (32) for selectively positioning capsules placed at the load-in station on a shelf and for selectively moving capsules at the shelves to the transfer port. The apparatus can be sealed at the load-in station and the transfer port.
PCT/US1998/018949 1997-09-12 1998-09-11 Sealed cabinet for storage of semiconductor wafers WO1999013495A2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US5878797P 1997-09-12 1997-09-12
US5877897P 1997-09-12 1997-09-12
US5876697P 1997-09-12 1997-09-12
US60/058,787 1997-09-12
US60/058,778 1997-09-12
US60/058,766 1997-09-12

Publications (2)

Publication Number Publication Date
WO1999013495A2 WO1999013495A2 (en) 1999-03-18
WO1999013495A3 true WO1999013495A3 (en) 1999-05-06

Family

ID=27369542

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/018949 WO1999013495A2 (en) 1997-09-12 1998-09-11 Sealed cabinet for storage of semiconductor wafers

Country Status (1)

Country Link
WO (1) WO1999013495A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7165927B2 (en) 2002-06-19 2007-01-23 Brooks Automation, Inc. Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
KR101323337B1 (en) * 2002-10-11 2013-10-30 무라타 기카이 가부시키가이샤 Access to one or more levels of material storage shelves by an overhead hoist transport vehicle from a single track position
CN102460675B (en) * 2009-05-18 2015-04-29 布鲁克斯自动化公司 Integrated systems for interfacing with substrate container storage systems
US8882433B2 (en) 2009-05-18 2014-11-11 Brooks Automation, Inc. Integrated systems for interfacing with substrate container storage systems
JP5370775B2 (en) * 2010-02-01 2013-12-18 株式会社ダイフク Goods storage facility

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
JPH05105206A (en) * 1991-10-17 1993-04-27 Shinko Electric Co Ltd Airtight stocker for clean room
EP0552756A1 (en) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Article storage house in a clean room
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4867629A (en) * 1986-11-20 1989-09-19 Shimizu Construction Co., Ltd. Dusttight storage cabinet apparatus for use in clean rooms
US5064337A (en) * 1988-07-19 1991-11-12 Tokyo Electron Limited Handling apparatus for transferring carriers and a method of transferring carriers
US5059079A (en) * 1989-05-16 1991-10-22 Proconics International, Inc. Particle-free storage for articles
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
JPH05105206A (en) * 1991-10-17 1993-04-27 Shinko Electric Co Ltd Airtight stocker for clean room
EP0552756A1 (en) * 1992-01-21 1993-07-28 Shinko Electric Co. Ltd. Article storage house in a clean room
US5464313A (en) * 1993-02-08 1995-11-07 Tokyo Electron Kabushiki Kaisha Heat treating apparatus
US5466109A (en) * 1994-02-18 1995-11-14 Daifuku Co., Ltd. Load storing equipment
US5628604A (en) * 1994-05-17 1997-05-13 Shinko Electric Co., Ltd. Conveying system
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus

Also Published As

Publication number Publication date
WO1999013495A2 (en) 1999-03-18

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