WO1999014575B1 - Improved sample inspection system - Google Patents
Improved sample inspection systemInfo
- Publication number
- WO1999014575B1 WO1999014575B1 PCT/US1998/019564 US9819564W WO9914575B1 WO 1999014575 B1 WO1999014575 B1 WO 1999014575B1 US 9819564 W US9819564 W US 9819564W WO 9914575 B1 WO9914575 B1 WO 9914575B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- radiation
- sample
- cancelled
- detector
- path
- Prior art date
Links
- 238000007689 inspection Methods 0.000 title 1
- 230000005855 radiation Effects 0.000 claims abstract 72
- 230000003287 optical effect Effects 0.000 claims 8
- 239000002245 particle Substances 0.000 claims 2
- 238000005286 illumination Methods 0.000 abstract 6
- 238000001514 detection method Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
- G01N21/474—Details of optical heads therefor, e.g. using optical fibres
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0216—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using light concentrators or collectors or condensers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8822—Dark field detection
- G01N2021/8825—Separate detection of dark field and bright field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8845—Multiple wavelengths of illumination or detection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8848—Polarisation of light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/21—Polarisation-affecting properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/065—Integrating spheres
Abstract
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98947155A EP1023582B1 (en) | 1997-09-19 | 1998-09-18 | Improved sample inspection system |
JP2000512065A JP4499279B2 (en) | 1997-09-19 | 1998-09-18 | Improved sample inspection system |
DE69819929T DE69819929T2 (en) | 1997-09-19 | 1998-09-18 | IMPROVED TESTING SYSTEM FOR SAMPLES |
US10/070,079 US6891611B1 (en) | 1997-09-19 | 1998-09-18 | Sample inspection system |
AU94000/98A AU9400098A (en) | 1997-09-19 | 1998-09-18 | Improved sample inspection system |
US11/031,813 US20050134841A1 (en) | 1998-09-18 | 2005-01-07 | Sample inspection system |
US11/126,467 US20050206886A1 (en) | 1997-09-19 | 2005-05-10 | Sample inspection system |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/933,771 | 1997-09-19 | ||
US08/933,771 US6201601B1 (en) | 1997-09-19 | 1997-09-19 | Sample inspection system |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US08/933,771 Continuation US6201601B1 (en) | 1997-09-19 | 1997-09-19 | Sample inspection system |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/031,813 Continuation US20050134841A1 (en) | 1998-09-18 | 2005-01-07 | Sample inspection system |
US11/126,467 Continuation US20050206886A1 (en) | 1997-09-19 | 2005-05-10 | Sample inspection system |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1999014575A1 WO1999014575A1 (en) | 1999-03-25 |
WO1999014575B1 true WO1999014575B1 (en) | 1999-06-03 |
Family
ID=25464477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/019564 WO1999014575A1 (en) | 1997-09-19 | 1998-09-18 | Improved sample inspection system |
Country Status (6)
Country | Link |
---|---|
US (9) | US6201601B1 (en) |
EP (3) | EP1265063B1 (en) |
JP (1) | JP4499279B2 (en) |
AU (1) | AU9400098A (en) |
DE (3) | DE69828827T2 (en) |
WO (1) | WO1999014575A1 (en) |
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1997
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1998
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- 1998-09-18 EP EP98947155A patent/EP1023582B1/en not_active Expired - Lifetime
- 1998-09-18 WO PCT/US1998/019564 patent/WO1999014575A1/en active Application Filing
- 1998-09-18 AU AU94000/98A patent/AU9400098A/en not_active Abandoned
- 1998-09-18 JP JP2000512065A patent/JP4499279B2/en not_active Expired - Lifetime
- 1998-09-18 EP EP04024371A patent/EP1508799B1/en not_active Expired - Lifetime
- 1998-09-18 DE DE69828827T patent/DE69828827T2/en not_active Expired - Lifetime
- 1998-09-18 DE DE69819929T patent/DE69819929T2/en not_active Expired - Lifetime
- 1998-09-18 DE DE69840532T patent/DE69840532D1/en not_active Expired - Lifetime
- 1998-09-18 US US10/070,079 patent/US6891611B1/en not_active Expired - Fee Related
-
2000
- 2000-12-21 US US09/746,415 patent/US6657715B2/en not_active Expired - Lifetime
- 2000-12-21 US US09/746,141 patent/US6639662B2/en not_active Expired - Lifetime
- 2000-12-21 US US09/745,492 patent/US6384910B2/en not_active Expired - Lifetime
-
2001
- 2001-12-27 US US10/033,069 patent/US6618134B2/en not_active Expired - Lifetime
-
2003
- 2003-05-13 US US10/437,829 patent/US7079238B2/en not_active Expired - Fee Related
- 2003-07-24 US US10/627,402 patent/US7064821B2/en not_active Expired - Fee Related
-
2005
- 2005-05-10 US US11/126,467 patent/US20050206886A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
US6657715B2 (en) | 2003-12-02 |
US7064821B2 (en) | 2006-06-20 |
DE69819929T2 (en) | 2004-11-11 |
EP1508799A2 (en) | 2005-02-23 |
US6639662B2 (en) | 2003-10-28 |
EP1508799B1 (en) | 2009-02-04 |
DE69819929D1 (en) | 2003-12-24 |
US20010002149A1 (en) | 2001-05-31 |
EP1023582B1 (en) | 2003-11-19 |
US20020080346A1 (en) | 2002-06-27 |
US7079238B2 (en) | 2006-07-18 |
DE69840532D1 (en) | 2009-03-19 |
US20010000679A1 (en) | 2001-05-03 |
EP1508799A3 (en) | 2005-05-18 |
EP1265063B1 (en) | 2005-01-26 |
US6891611B1 (en) | 2005-05-10 |
AU9400098A (en) | 1999-04-05 |
US20010000977A1 (en) | 2001-05-10 |
US20050174568A1 (en) | 2005-08-11 |
US6201601B1 (en) | 2001-03-13 |
DE69828827D1 (en) | 2005-03-03 |
JP4499279B2 (en) | 2010-07-07 |
EP1023582A4 (en) | 2000-11-29 |
US6618134B2 (en) | 2003-09-09 |
DE69828827T2 (en) | 2006-01-05 |
EP1265063A1 (en) | 2002-12-11 |
EP1023582A1 (en) | 2000-08-02 |
US20050206886A1 (en) | 2005-09-22 |
US6384910B2 (en) | 2002-05-07 |
US20030206295A1 (en) | 2003-11-06 |
WO1999014575A1 (en) | 1999-03-25 |
JP2001516874A (en) | 2001-10-02 |
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