WO1999024141A1 - Micromachined membrane particle filter using parylene reinforcement - Google Patents
Micromachined membrane particle filter using parylene reinforcement Download PDFInfo
- Publication number
- WO1999024141A1 WO1999024141A1 PCT/US1998/023822 US9823822W WO9924141A1 WO 1999024141 A1 WO1999024141 A1 WO 1999024141A1 US 9823822 W US9823822 W US 9823822W WO 9924141 A1 WO9924141 A1 WO 9924141A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- holes
- parylene
- size
- silicon substrate
- substrate
- Prior art date
Links
- 229920000052 poly(p-xylylene) Polymers 0.000 title claims abstract description 22
- 239000012528 membrane Substances 0.000 title claims abstract description 20
- 239000002245 particle Substances 0.000 title claims abstract description 11
- 230000002787 reinforcement Effects 0.000 title description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 17
- 239000010703 silicon Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000011248 coating agent Substances 0.000 claims abstract description 5
- 238000000576 coating method Methods 0.000 claims abstract description 5
- 238000005530 etching Methods 0.000 claims abstract description 5
- 238000001914 filtration Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 150000003376 silicon Chemical class 0.000 claims 1
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000001471 micro-filtration Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/0088—Physical treatment with compounds, e.g. swelling, coating or impregnation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2068—Other inorganic materials, e.g. ceramics
- B01D39/2093—Ceramic foam
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0002—Organic membrane manufacture
- B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/0032—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0034—Organic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
- B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
- B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/0213—Silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/06—Organic material
- B01D71/72—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds, not provided for in a single one of the groups B01D71/46 - B01D71/70 and B01D71/701 - B01D71/702
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0471—Surface coating material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/04—Additives and treatments of the filtering material
- B01D2239/0471—Surface coating material
- B01D2239/0478—Surface coating material on a layer of the filter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2239/00—Aspects relating to filtering material for liquid or gaseous fluids
- B01D2239/10—Filtering material manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/021—Pore shapes
Definitions
- a mechanical filter can be used to remove, filter, or collect particles. This filtering and collection of particles can be used for sampling of particles, chemical detection, and/or biological cell analysis.
- a membrane particle filter which uses micromachining technologies.
- the filters are fabricated using a substrate membrane that is perforated with holes.
- the holes can have different shapes, different dimensions, and different opening factors. Preferred shapes include circular, hexagonal, and rectangular, with dimensions ranging from 6-13 ⁇ m.
- a layer of Parylene material is uniformly coated on the filters and on the inner surfaces of the holes in order to increase the overall strength of the filter.
- Another important feature is the amount of power which is necessary to provide the desired pressure drop across the filter. Proper control of the opening size allows determining various tradeoffs, including the energy and power necessary to form the desired pressure drop. Another feature of this disclosure is that the sizes of the openings can be more specifically controlled by deposition of Parylene material.
- FIGs. 1A-1F show a membrane filter fabrication process
- FIG. 2 shows different results of different filtering regions
- FIGs. 3A-3D show various fabricated membrane filters and their openings
- FIGs. 4 and 5 show different pressure drops as functions of the flow rate.
- the fabrication process for the preferred mode filter is shown in FIGs. 1A-1F.
- the process begins in FIG. 1A by depositing a layer of low stress LPCVD silicon nitride 100 and 102 ("SiN") at 850°C on a silicon substrate 104.
- the layer 100 is preferably between a and l ⁇ m micron thick.
- the material is deposited with an SIH 2 C1 2 : -NH 3 gas flow ratio of 4 to 1.
- the SiN layers 100, 102 are deposited on both sides of silicon substrate 104.
- FIG. IB shows patterning the SiN layer 102 on the backside of the silicon substrate 104.
- the desired areas to be protected are covered with photoresist layer 110. This is followed by dry etching the SiN 102 to form a pattern.
- FIG. 1C shows the anisotropic etching step which uses an anisotropic etchant such as KOH. This leaves a window 120 left in the wafer, with only a thin area of the silicon wafer 122 remaining.
- the thin wafer area can be between 20 and 100 ⁇ m thick.
- the overlying silicon nitride 100 remains unchanged during this step.
- FIG. ID shows using RIE to provide patterns 130 in the SiN layer 100.
- the pattern includes holes 132 into the silicon nitride layer 100.
- the holes can be of any desired size and shape as described above.
- Parylene is available from Specialty Coating Systems, Inc., 5707 West Minnesota Street, Indianapolis, IN 46241. The Parylene uniformly covers the entire wafer surface, forming Parylene overlayers 150, 152. Each of the holes therefore includes a Parylene overlayer on each of its surfaces: top surface, bottom surface, and all sides.
- the layer of Parylene 150 serves three main purposes.
- the Parylene overlayer greatly improves the strength of the membrane filter by providing a reinforcement to the filter. Uniform deposition of Parylene also allows changing the hole size. Different hole sizes can be obtained from the same basic filter skeleton. Control of the thickness of the Parylene layer can be used to obtain these different hole sizes. For example, a 10 ⁇ m opening can be changed to a 4 ⁇ m opening by depositing 2 ⁇ m of Parylene on the entire device, forming two, 2- ⁇ m barriers at two ends of the hole. Hence, the same basic filter can have different holes sizes by changing the thickness of the Parylene layer.
- Parylene is biocompatible, making the filter suitable for biological applications.
- the preferred hole shapes include circular, hexagonal, and/or rectangular. Filters as large as 8 X 8 square millimeters can be fabricated. The opening area ratio increases as the hole size increases. The hole size also defines the filtering threshold -- the minimum size of the particles that can be blocked by the filter.
- a filter with a 10.6 ⁇ m diameter hole has an opening area ratio of approximately 12 ⁇ %.
- Hexagonal holes can provide higher opening area ratios, but cause higher stress concentration in the membrane. This effectively reduces the strength of the filter.
- Rectangular holes can provide a large range of opening area ratio without changing the filtering threshold.
- One dimension of the rectangular holes must be kept constant.
- FIG. 3A shows a top view of a circular hole.
- FIG. 3B shows the rectangular hole, while FIGs. 3C and 3D respectively show the hexagonal holes for these filters.
- FIG. 2 shows different characteristics for the filters.
- the far left side of the figure shows a top view of 8 millimeter X 8 millimeter area. This is defined into different non-filtering regions and filtering regions.
- TABLE 1 shows how the final Parylene coating layer increases the strength of the filters. Burst pressure of various membrane filters was tested using differential pneumatic pressure across the filter membrane. The first pressure of filter 6 in TABLE 1 was more than 4 times higher when coated with 2.69 microns of " Parylene.
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU13897/99A AU1389799A (en) | 1997-11-07 | 1998-11-06 | Micromachined membrane particle filter using parylene reinforcement |
EP98957706A EP1059979A4 (en) | 1997-11-07 | 1998-11-06 | Micromachined membrane particle filter using parylene reinforcement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6480797P | 1997-11-07 | 1997-11-07 | |
US60/064,807 | 1997-11-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999024141A1 true WO1999024141A1 (en) | 1999-05-20 |
Family
ID=22058388
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/023822 WO1999024141A1 (en) | 1997-11-07 | 1998-11-06 | Micromachined membrane particle filter using parylene reinforcement |
Country Status (4)
Country | Link |
---|---|
US (2) | US6622872B1 (en) |
EP (1) | EP1059979A4 (en) |
AU (1) | AU1389799A (en) |
WO (1) | WO1999024141A1 (en) |
Cited By (11)
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US6562404B1 (en) * | 2000-08-25 | 2003-05-13 | The Regents Of The University Of California | Conformal chemically resistant coatings for microflow devices |
WO2006129072A1 (en) * | 2005-05-28 | 2006-12-07 | Xaar Technology Limited | Passivation of printhead assemblies and components therefor |
US7846743B2 (en) | 2005-04-21 | 2010-12-07 | California Institute Of Technology | Uses of parylene membrane filters |
US7846393B2 (en) | 2005-04-21 | 2010-12-07 | California Institute Of Technology | Membrane filter for capturing circulating tumor cells |
CN109092074A (en) * | 2018-08-09 | 2018-12-28 | 常州费曼生物科技有限公司 | Silicon-on-insulator material infusion filter membrane and preparation method thereof, filter and infusion apparatus |
CN109563460A (en) * | 2016-12-20 | 2019-04-02 | 株式会社村田制作所 | Cell filtration stripper |
US10712657B2 (en) | 2015-07-17 | 2020-07-14 | Asml Netherlands B.V. | Method for manufacturing a membrane assembly |
US11033862B2 (en) | 2013-05-01 | 2021-06-15 | Koninklijke Philips N.V. | Method of manufacturing partially freestanding two-dimensional crystal film and device comprising such a film |
EP3851848A1 (en) * | 2020-01-20 | 2021-07-21 | Infineon Technologies AG | Micromechanical device with perforated membrane |
US11671763B2 (en) | 2021-02-24 | 2023-06-06 | Shure Acquisition Holdings, Inc. | Parylene electret condenser microphone backplate |
US11971656B2 (en) | 2015-07-17 | 2024-04-30 | Asml Netherlands B.V. | Method for manufacturing a membrane assembly |
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NL1016030C1 (en) * | 2000-08-28 | 2002-03-01 | Aquamarijn Holding B V | Spraying device with a nozzle plate, a nozzle plate, as well as methods for manufacturing and applying such a nozzle plate. |
US6881198B2 (en) * | 2001-01-09 | 2005-04-19 | J. David Brown | Glaucoma treatment device and method |
US20030150791A1 (en) * | 2002-02-13 | 2003-08-14 | Cho Steven T. | Micro-fluidic anti-microbial filter |
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US7282148B2 (en) * | 2003-10-30 | 2007-10-16 | International Business Machines Corporation | Porous silicon composite structure as large filtration array |
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-
1998
- 1998-11-06 EP EP98957706A patent/EP1059979A4/en not_active Withdrawn
- 1998-11-06 AU AU13897/99A patent/AU1389799A/en not_active Abandoned
- 1998-11-06 US US09/187,475 patent/US6622872B1/en not_active Expired - Lifetime
- 1998-11-06 WO PCT/US1998/023822 patent/WO1999024141A1/en not_active Application Discontinuation
-
2000
- 2000-12-20 US US09/741,968 patent/US6598750B2/en not_active Expired - Lifetime
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US5067491A (en) * | 1989-12-08 | 1991-11-26 | Becton, Dickinson And Company | Barrier coating on blood contacting devices |
WO1995013860A1 (en) * | 1993-11-12 | 1995-05-26 | Rijn Cornelis Johannes Maria V | Membrane filter and a method of manufacturing the same as well as a membrane |
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Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6562404B1 (en) * | 2000-08-25 | 2003-05-13 | The Regents Of The University Of California | Conformal chemically resistant coatings for microflow devices |
US7846743B2 (en) | 2005-04-21 | 2010-12-07 | California Institute Of Technology | Uses of parylene membrane filters |
US7846393B2 (en) | 2005-04-21 | 2010-12-07 | California Institute Of Technology | Membrane filter for capturing circulating tumor cells |
US8288170B2 (en) | 2005-04-21 | 2012-10-16 | California Institute Of Technology | Uses of parylene membrane filters |
WO2006129072A1 (en) * | 2005-05-28 | 2006-12-07 | Xaar Technology Limited | Passivation of printhead assemblies and components therefor |
US8911060B2 (en) | 2005-05-28 | 2014-12-16 | Xaar Technology Limited | Passivation of printhead assemblies and components therefor |
US11033862B2 (en) | 2013-05-01 | 2021-06-15 | Koninklijke Philips N.V. | Method of manufacturing partially freestanding two-dimensional crystal film and device comprising such a film |
US10712657B2 (en) | 2015-07-17 | 2020-07-14 | Asml Netherlands B.V. | Method for manufacturing a membrane assembly |
US11061320B2 (en) | 2015-07-17 | 2021-07-13 | Asml Netherlands B.V. | Method for manufacturing a membrane assembly |
US11624980B2 (en) | 2015-07-17 | 2023-04-11 | Asml Netherlands B.V | Method for manufacturing a membrane assembly |
US11971656B2 (en) | 2015-07-17 | 2024-04-30 | Asml Netherlands B.V. | Method for manufacturing a membrane assembly |
CN109563460A (en) * | 2016-12-20 | 2019-04-02 | 株式会社村田制作所 | Cell filtration stripper |
CN109563460B (en) * | 2016-12-20 | 2022-02-22 | 株式会社村田制作所 | Cell filtering filter |
CN109092074A (en) * | 2018-08-09 | 2018-12-28 | 常州费曼生物科技有限公司 | Silicon-on-insulator material infusion filter membrane and preparation method thereof, filter and infusion apparatus |
EP3851848A1 (en) * | 2020-01-20 | 2021-07-21 | Infineon Technologies AG | Micromechanical device with perforated membrane |
US11671763B2 (en) | 2021-02-24 | 2023-06-06 | Shure Acquisition Holdings, Inc. | Parylene electret condenser microphone backplate |
Also Published As
Publication number | Publication date |
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EP1059979A1 (en) | 2000-12-20 |
US6598750B2 (en) | 2003-07-29 |
US6622872B1 (en) | 2003-09-23 |
EP1059979A4 (en) | 2001-05-30 |
AU1389799A (en) | 1999-05-31 |
US20010019029A1 (en) | 2001-09-06 |
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