WO1999034453A1 - Piezoelectric transducer - Google Patents
Piezoelectric transducer Download PDFInfo
- Publication number
- WO1999034453A1 WO1999034453A1 PCT/US1998/027669 US9827669W WO9934453A1 WO 1999034453 A1 WO1999034453 A1 WO 1999034453A1 US 9827669 W US9827669 W US 9827669W WO 9934453 A1 WO9934453 A1 WO 9934453A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric layer
- electrodes
- layer
- transducer
- transducer element
- Prior art date
Links
- 230000008859 change Effects 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 6
- 239000002033 PVDF binder Substances 0.000 claims description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 230000004044 response Effects 0.000 description 19
- 238000006073 displacement reaction Methods 0.000 description 14
- 230000002463 transducing effect Effects 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 229920002160 Celluloid Polymers 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/41—Detecting, measuring or recording for evaluating the immune or lymphatic systems
- A61B5/413—Monitoring transplanted tissue or organ, e.g. for possible rejection reactions after a transplant
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0031—Implanted circuitry
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
- A61B5/053—Measuring electrical impedance or conductance of a portion of the body
- A61B5/0535—Impedance plethysmography
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/72—Devices for measuring pulsing fluid flows
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N1/00—Electrotherapy; Circuits therefor
- A61N1/18—Applying electric currents by contact electrodes
- A61N1/32—Applying electric currents by contact electrodes alternating or intermittent currents
- A61N1/36—Applying electric currents by contact electrodes alternating or intermittent currents for stimulation
- A61N1/372—Arrangements in connection with the implantation of stimulators
- A61N1/37211—Means for communicating with stimulators
- A61N1/37252—Details of algorithms or data aspects of communication system, e.g. handshaking, transmitting specific data or segmenting data
- A61N1/37288—Communication to several implantable medical devices within one patient
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S310/00—Electrical generator or motor structure
- Y10S310/80—Piezoelectric polymers, e.g. PVDF
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69841689T DE69841689D1 (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer and method of application |
EP98966753A EP1042822B1 (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer and method of use |
JP2000526980A JP4288388B2 (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
AU24500/99A AU2450099A (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
AT98966753T ATE469441T1 (en) | 1997-12-30 | 1998-12-28 | PIEZOELECTRIC TRANSDUCER AND APPLICATION METHOD |
CA2316843A CA2316843C (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
US09/305,442 US6431175B1 (en) | 1997-12-30 | 1999-05-06 | System and method for directing and monitoring radiation |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/000,553 US6140740A (en) | 1997-12-30 | 1997-12-30 | Piezoelectric transducer |
US09/000,553 | 1997-12-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999034453A1 true WO1999034453A1 (en) | 1999-07-08 |
Family
ID=21692008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1998/027669 WO1999034453A1 (en) | 1997-12-30 | 1998-12-28 | Piezoelectric transducer |
Country Status (8)
Country | Link |
---|---|
US (3) | US6140740A (en) |
EP (1) | EP1042822B1 (en) |
JP (1) | JP4288388B2 (en) |
AT (1) | ATE469441T1 (en) |
AU (1) | AU2450099A (en) |
CA (1) | CA2316843C (en) |
DE (1) | DE69841689D1 (en) |
WO (1) | WO1999034453A1 (en) |
Cited By (16)
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---|---|---|---|---|
WO2003043688A1 (en) | 2001-11-19 | 2003-05-30 | Remon Medical Technologies Ltd | Systems and methods for communicating with implantable devices |
US6628989B1 (en) | 2000-10-16 | 2003-09-30 | Remon Medical Technologies, Ltd. | Acoustic switch and apparatus and methods for using acoustic switches within a body |
US6746404B2 (en) | 2000-12-18 | 2004-06-08 | Biosense, Inc. | Method for anchoring a medical device between tissue |
US6764446B2 (en) | 2000-10-16 | 2004-07-20 | Remon Medical Technologies Ltd | Implantable pressure sensors and methods for making and using them |
US7198603B2 (en) | 2003-04-14 | 2007-04-03 | Remon Medical Technologies, Inc. | Apparatus and methods using acoustic telemetry for intrabody communications |
US7273457B2 (en) | 2000-10-16 | 2007-09-25 | Remon Medical Technologies, Ltd. | Barometric pressure correction based on remote sources of information |
US7908334B2 (en) | 2006-07-21 | 2011-03-15 | Cardiac Pacemakers, Inc. | System and method for addressing implantable devices |
US8277441B2 (en) | 1997-12-30 | 2012-10-02 | Remon Medical Technologies, Ltd. | Piezoelectric transducer |
US8340778B2 (en) | 2007-06-14 | 2012-12-25 | Cardiac Pacemakers, Inc. | Multi-element acoustic recharging system |
US8744580B2 (en) | 2004-11-24 | 2014-06-03 | Remon Medical Technologies, Ltd. | Implantable medical device with integrated acoustic transducer |
US8825161B1 (en) | 2007-05-17 | 2014-09-02 | Cardiac Pacemakers, Inc. | Acoustic transducer for an implantable medical device |
US8852099B2 (en) | 2004-09-17 | 2014-10-07 | Cardiac Pacemakers, Inc. | Systems and methods for deriving relative physiologic measurements |
US8934972B2 (en) | 2000-10-16 | 2015-01-13 | Remon Medical Technologies, Ltd. | Acoustically powered implantable stimulating device |
US9024582B2 (en) | 2008-10-27 | 2015-05-05 | Cardiac Pacemakers, Inc. | Methods and systems for recharging an implanted device by delivering a section of a charging device adjacent the implanted device within a body |
US9713427B2 (en) | 2006-09-15 | 2017-07-25 | Cardiac Pacemakers, Inc. | Mechanism for releasably engaging an implantable medical device for implantation |
US10390714B2 (en) | 2005-01-12 | 2019-08-27 | Remon Medical Technologies, Ltd. | Devices for fixing a sensor in a lumen |
Families Citing this family (262)
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US7070590B1 (en) | 1996-07-02 | 2006-07-04 | Massachusetts Institute Of Technology | Microchip drug delivery devices |
US5899847A (en) | 1996-08-07 | 1999-05-04 | St. Croix Medical, Inc. | Implantable middle-ear hearing assist system using piezoelectric transducer film |
US6809462B2 (en) * | 2000-04-05 | 2004-10-26 | Sri International | Electroactive polymer sensors |
AU2001217746A1 (en) | 1998-05-14 | 2002-05-27 | Calypso Medical, Inc. | Systems and methods for locating and defining a target location within a human body |
US6363940B1 (en) * | 1998-05-14 | 2002-04-02 | Calypso Medical Technologies, Inc. | System and method for bracketing and removing tissue |
US6364825B1 (en) | 1998-09-24 | 2002-04-02 | St. Croix Medical, Inc. | Method and apparatus for improving signal quality in implantable hearing systems |
US7575550B1 (en) | 1999-03-11 | 2009-08-18 | Biosense, Inc. | Position sensing based on ultrasound emission |
US7590441B2 (en) | 1999-03-11 | 2009-09-15 | Biosense, Inc. | Invasive medical device with position sensing and display |
US7549960B2 (en) * | 1999-03-11 | 2009-06-23 | Biosense, Inc. | Implantable and insertable passive tags |
US7174201B2 (en) * | 1999-03-11 | 2007-02-06 | Biosense, Inc. | Position sensing system with integral location pad and position display |
US7558616B2 (en) * | 1999-03-11 | 2009-07-07 | Biosense, Inc. | Guidance of invasive medical procedures using implantable tags |
JP3531522B2 (en) * | 1999-04-19 | 2004-05-31 | 株式会社村田製作所 | Piezoelectric resonator |
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US6720708B2 (en) * | 2000-01-07 | 2004-04-13 | Lewis Athanas | Mechanical-to-acoustical transformer and multi-media flat film speaker |
US6911764B2 (en) * | 2000-02-09 | 2005-06-28 | Sri International | Energy efficient electroactive polymers and electroactive polymer devices |
DE60116520T2 (en) * | 2000-10-10 | 2006-08-31 | Microchips, Inc., Bedford | MICROCHIP RESERVOIR DEVICES WITH WIRELESS TRANSMISSION OF ENERGY AND DATA |
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US8372139B2 (en) | 2001-02-14 | 2013-02-12 | Advanced Bio Prosthetic Surfaces, Ltd. | In vivo sensor and method of making same |
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JP4657577B2 (en) * | 2001-01-09 | 2011-03-23 | マイクロチップス・インコーポレーテッド | Flexible microchip device for ocular and other applications |
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US8277441B2 (en) | 1997-12-30 | 2012-10-02 | Remon Medical Technologies, Ltd. | Piezoelectric transducer |
JP4664332B2 (en) * | 2000-10-16 | 2011-04-06 | レモン メディカル テクノロジーズ リミテッド | Acoustic switch and device and method of using an acoustic switch in the body |
US6764446B2 (en) | 2000-10-16 | 2004-07-20 | Remon Medical Technologies Ltd | Implantable pressure sensors and methods for making and using them |
US8934972B2 (en) | 2000-10-16 | 2015-01-13 | Remon Medical Technologies, Ltd. | Acoustically powered implantable stimulating device |
US7024248B2 (en) | 2000-10-16 | 2006-04-04 | Remon Medical Technologies Ltd | Systems and methods for communicating with implantable devices |
US6628989B1 (en) | 2000-10-16 | 2003-09-30 | Remon Medical Technologies, Ltd. | Acoustic switch and apparatus and methods for using acoustic switches within a body |
US7273457B2 (en) | 2000-10-16 | 2007-09-25 | Remon Medical Technologies, Ltd. | Barometric pressure correction based on remote sources of information |
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US8744580B2 (en) | 2004-11-24 | 2014-06-03 | Remon Medical Technologies, Ltd. | Implantable medical device with integrated acoustic transducer |
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US7908334B2 (en) | 2006-07-21 | 2011-03-15 | Cardiac Pacemakers, Inc. | System and method for addressing implantable devices |
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US8825161B1 (en) | 2007-05-17 | 2014-09-02 | Cardiac Pacemakers, Inc. | Acoustic transducer for an implantable medical device |
US8340778B2 (en) | 2007-06-14 | 2012-12-25 | Cardiac Pacemakers, Inc. | Multi-element acoustic recharging system |
US9731141B2 (en) | 2007-06-14 | 2017-08-15 | Cardiac Pacemakers, Inc. | Multi-element acoustic recharging system |
US9024582B2 (en) | 2008-10-27 | 2015-05-05 | Cardiac Pacemakers, Inc. | Methods and systems for recharging an implanted device by delivering a section of a charging device adjacent the implanted device within a body |
Also Published As
Publication number | Publication date |
---|---|
JP2002528887A (en) | 2002-09-03 |
EP1042822B1 (en) | 2010-05-26 |
US6720709B2 (en) | 2004-04-13 |
US20030006673A1 (en) | 2003-01-09 |
US6504286B1 (en) | 2003-01-07 |
EP1042822A1 (en) | 2000-10-11 |
AU2450099A (en) | 1999-07-19 |
JP4288388B2 (en) | 2009-07-01 |
DE69841689D1 (en) | 2010-07-08 |
EP1042822A4 (en) | 2006-09-13 |
CA2316843A1 (en) | 1999-07-08 |
US6140740A (en) | 2000-10-31 |
ATE469441T1 (en) | 2010-06-15 |
CA2316843C (en) | 2010-09-21 |
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