WO1999053205A1

WO1999053205A1 - Liquid flow amplification device

Info

Publication number: WO1999053205A1
Application number: PCT/EP1999/001199
Authority: WO
Inventors: Kurt Stoll; Michael Weinmann; Peter Post; Herbert Vollmer
Original assignee: Festo Ag & Co.
Priority date: 1998-04-11
Filing date: 1999-02-25
Publication date: 1999-10-21
Also published as: DE19816283A1

Abstract

The invention relates to a liquid flow amplification device comprising at least one micromechanic, fluidically regulated, flow amplifier (2) produced in a microstructuring process. The amplifier consists of a chamber defined by two stratified compacts (3, 4), whereby said chamber is sub-divided by means of a movable control membrane (6). Fluidic regulation enables the control membrane (6) to be shifted between an open position and a closed position wherein it controls the junction between the feed channel (13) and the discharge channel (14).

Description

Quantity amplifier device for fluid flows

description

In the fluidic microcontroller technology sector, microvalves produced by microstructuring processes are known which enable the control of small and very small fluid flows. EP 0 485 739 A1 describes a possible design for such a microvalve, wherein a valve plate structured out of a silicon carrier can be actuated by electrostatic actuators in order to control a fluid flow.

A disadvantage of the known microvalve is the limited controllable fluid throughput. Due to the electrostatic actuators, only a small stroke of the valve plate can be realized, which limits the available flow cross sections. Conventional valve technology must therefore usually be used to control fluid flows with a higher throughput, which results in correspondingly larger construction volumes.

It is the object of the present invention to create possibilities which also allow the control of fluid flows of higher flow rates in the field of fluidic micro-control technology.

This object is achieved with a quantity amplifier device for fluid streams which contains at least one fluid-controlled micromechanical quantity amplifier produced by microstructuring processes, one by two Laminated body has a chamber which is subdivided by a movable control membrane into a control chamber communicating with a control channel and an overflow chamber communicating with an inflow channel and an outflow channel, the control membrane depending on the control pressure applied to the control channel into a closed position closing the inflow channel and the outflow channel or an open position releasing these two channels and thus allowing fluid to flow over between the inflow channel and the outflow channel can be moved.

With such a quantity amplifier device, micro-construction methods on the one hand and the control of large quantities of fluid on the other hand can be combined in an advantageous manner. In the simplest case, the core of the quantity amplifier device is formed by a micromechanical quantity amplifier in membrane construction, which can be produced by any microstructuring technology. A control membrane is used as the control element, which at least partially has flexible properties and whose instantaneous switching

Position can be specified by the control pressure applied to the control channel. When a sufficiently high control pressure is applied to the control channel, the control membrane is pressed tightly against the mouths of the inflow channel and the outflow channel, so that the connection between these two channels is shut off. The sufficiently high control pressure can be achieved, for example, by choosing a suitable control pressure level or by suitable surface differences in the control membrane. When the control pressure is removed or reduced in a suitable manner, the control membrane lifts off the aforementioned orifices, so that a fluid present at the inflow channel, for example compressed air, can flow through the overflow space to the outflow channel. The actuation of the control membrane, which is caused by the fluidic and preferably pneumatic control pressure, allows the realization of relatively large switching paths and accordingly the provision of large flow cross sections in the open position, see above da _ß large amounts of working fluid can be controlled with a small amount of control fluid despite micro-design. _In the pneumatics sector, the volume booster device is suitable for vacuum applications as well as for overpressure applications.

Advantageous developments of the invention emerge from the subclaims.

The production of the quantity amplifier device and the quantity amplifier belonging to it is possible in principle with all relevant microstructuring methods. The production using silicon technology or by means of impression technology is only an example. The control membrane can be manufactured separately and then attached to the

Laminated bodies to be fixed, in addition, a direct molding, for example by spin coating, would also be possible after the associated laminated body has been planarized beforehand, if necessary.

A particular advantage of the quantity amplifier device is that a plurality of micromechanical quantity amplifiers can be combined in it with a suitable fluidic connection. This allows the implementation of cascaded arrangements or higher-quality valve functions. In a particularly expedient design, three micromechanical quantity amplifiers are fluidly linked to one another in such a way that a three-way valve switching function can be implemented. A characteristic can easily be set here according to the selected link

Realize "normally closed" or "normally open", depending on the respective application.

In order to obtain a 3/2 valve function, the quantity amplifier device expediently has two quantity amplifiers which are linked to one another in such a way that the supply _S flow channel of one is connected to the outflow channel of the other quantity amplifier and both of the aforementioned channels communicate with a common working channel, the control channel of one quantity amplifier being connected via a pilot channel to the outflow channel of a third quantity amplifier (pilot quantity amplifier) used for pilot control, the control channel of which communicates with the control channel of the other quantity amplifier of the first two quantity amplifiers mentioned. In this case, it is expedient if the pilot channel is connected to a vent channel leading to the surroundings, which allows the pilot channel to be vented when the outflow channel of the pilot quantity amplifier is blocked. Here, a constantly open ventilation channel provided with a flow resistance can be provided, which could also be referred to as a "bleed resistor" or "standard leak". As an alternative to this, a switchable shut-off valve could also be provided, the actuation of which is coupled to the actuation of the pilot quantity amplifier.

To control at least one and preferably a group of quantity boosters, the quantity booster device expediently has at least one micromechanical control valve which is constructed in a multi-layer construction and which is assigned to the control channel of at least one quantity booster in order to influence its control pressure and thus the pressure of the connected control room or rooms. Since only small amounts of fluid have to be applied to the micromechanical quantity amplifier on the part of the control channel, a conventional microvalve with electrical actuation can be used for control or pre-control. A possible design for a control valve is given in EP 0 485 739 AI, whereby either a 3/2-way valve or two 2/2-valves could expediently be used.

In a particularly advantageous embodiment, the quantity amplifier device has a structural unit in which at least one micromechanical quantity amplifier and at least one micromechanical control valve are combined to form one structural unit. Above all, a particularly favorable production is possible here, since the various laminated bodies of the quantity booster (s) and of the control valve (s) can at least partially be designed as a structural unit and can be processed together for this purpose.

The invention is explained in more detail below with reference to the accompanying drawing. In this show-.

FIG. 1 shows a first design of the quantity amplifier device according to the invention, containing a single micro-mechanical quantity amplifier, which is shown in cross section, the control membrane being shown in the closed position and its open position additionally indicated by dash-dot lines.

Figure 2 shows a further embodiment of the quantity amplifier device according to the invention, the three to one

3/2-switching function linked quantity amplifier and a micromechanical control valve serving for control has, the overall arrangement is combined to form a structural unit and dash-dotted lines indicate additional cover layer bodies in which connecting fluid channels can run, the whole on average at right angles to the expansion planes of the individual Layers,

3 shows the membrane amplifier device according to FIG. 2 in a section parallel to the plane of expansion of the layers according to section line IV-IV, with an optional supplementary component being shown in dash-dot lines, which contains a switchable shut-off valve (not shown in greater detail) which is assigned to a ventilation channel, and FIG. 4 shows a schematic representation of the structure and the internal fluidic connection of the individual components of the quantity booster device according to FIGS. 2 and 3.

Starting with FIG. 1, a quantity amplifier device 1 is shown which has a single fluid-controlled micromechanical quantity amplifier 2. This quantity amplifier 2 is produced by any suitable microstructuring method in a layered construction.

In the exemplary embodiment shown, the quantity amplifier 2 comprises two layer bodies 3, 4 which are arranged next to one another and have mutually parallel expansion planes in the normal direction of these expansion planes and are produced using silicon technology. The laminated bodies 3, 4 delimit between them a chamber 5, for example formed by etching, in which is arranged a control membrane 6, for example made of plastic material, which is at least partially flexible or at least flexibly suspended.

The control membrane 6 is fixed on the edge in the connection area between the two laminated bodies 3, 4 and divides the chamber 5 into a control chamber 7 facing one laminated body 3 and an overflow space 8 facing the other laminated body 4. Alternatively, the control membrane could also be free without an attachment on the edge be designed to be movable.

The control chamber 7 defined between the control membrane 6 and the one, first laminate 3 communicates with a control channel 12 which penetrates the first laminate 3 and opens out into the control chamber 7 opposite the control membrane 6. The overflow space 8 communicates with an inflow channel 13 and an outflow channel 14. These two channels penetrate the other, second sealing body 4 and open opposite the control membrane 6 into the overflow space 8.

The control membrane 6 can be moved in the chamber 5 at right angles to its plane of expansion running parallel to the layer planes, in accordance with the double arrow 15. For this purpose, it can be designed to be flexurally elastic overall and have a film-like structure that is present in the exemplary embodiment.

However, a rather rigid middle part would also be conceivable, which is fixed to the laminated bodies 3, 4 by means of suspension regions that are flexible and, for example, arm-like.

In any case, the control membrane 6 can be moved between the closed position shown in solid lines in FIG. 1 and an open position shown in broken lines by the movement options mentioned. In the closed position, it covers the mouths of the inflow channel 13 and the outflow channel 14 facing the overflow chamber 8, so that these two channels are separated from the overflow chamber 8. The control membrane 6 is lifted from the mouth of the control channel 12, which consequently communicates with the control chamber 7. In the open position, the control membrane 6 covers the mouth of the control channel 12 and simultaneously releases the mouths of the inflow channel 13 and outflow channel 14, which are thus both connected to the overflow space 8.

In one possible mode of operation, the inflow channel 13 is connected to a pressure source Y - preferably a compressed air source - and the outflow channel 14 leads to a consumer Z. The control channel 12 can be connected in a controlled manner to a control pressure source X, the current position of the control membrane 6 being dependent on that Control channel depends on the existing control pressure. As a rule, the pressure at the inflow channel 13 will correspond to the pressure that can be applied at the control channel 12, since both channels can be supplied from the same fluid source.

If there is a fluid at a sufficient control pressure at the control channel 12, the control membrane 6, which is in the form of a light film, is placed close over the mouths of the channels 13, 14 due to the area differences, so that the consumer Z is shut off from the pressure source Y. Removing the control pressure at the control channel 12 means that the fluid present at the inflow channel 13 can lift the control membrane 16 from the assigned mouth and can move it in the direction of the first laminate 3. The control membrane 6 also lifts from the mouth of the outflow channel 14 and the fluid originating from the pressure source Y can flow out to the consumer Z through the overflow space 8.

The control membrane 6 is thus controlled fluidically and in particular pneumatically. This allows large diaphragm strokes to be realized in the direction of movement 15 and, accordingly, in the open position to ensure large flow cross sections. With only low flow values on the part of the control channel 12, large flow values on the part of the inflow channel 13 and the outflow channel 14 can thus be controlled and a connected consumer can thus be supplied with high flow rates despite the micro-construction.

There is thus a micromechanical quantity amplifier in membrane design, which can be used optimally for controlling fluid flows, particularly in micropneumatic applications. It can be used alone or in combination with other similar quantity amplifiers in order to obtain quantity amplifier devices that enable more complex amplifier circuits. A possible embodiment for such a multiple arrangement will be explained later with reference to FIGS. 2 to 4. In one possible way of producing the quantity amplifier 2, the two layer bodies 3, 4 are processed using silicon technology. Thus, in the case of the second layer body 4, the overflow space 8 can first be patterned out by an etching process, starting from a silicon wafer. The depression is then filled with a resist and planarized. The control membrane 6 is hurled onto it from plastic material. Subsequently, the inflow channel 13 and the outflow channel 14 are structured and the resist is removed through these channels, so that a unit consisting of the second laminate 4 and the control membrane 6 is present. Finally, only the first laminate 3, which is also structured from a silicon wafer, has to be glued on in a suitable manner.

It goes without saying that other microstructuring methods can also be used in the production. For example, the laminated bodies 3, 4 could be made of plastic material and the control membrane 6 could be made on the basis of silicon material, for example in the form of a further interposed laminated body.

If sealing seats are required to seal the channel openings, these can be provided on the laminated bodies 3, 4 and / or on the control membrane 6, as desired.

The quantity amplifier device can generally be used wherever small flows are to be amplified, for example in connection with pneumatic measuring probes or as a fluid-operated valve. The control membrane 6 can be suspended on one or more sides; both a fluid-impermeable and a fluid-permeable structure are possible. Overall, the material selection of the quantity booster is possible within wide limits, whereby in addition to silicon and polymer, for example, amorphous metals or material combinations can also be used. It would also be conceivable to additionally equip the quantity amplifier 2 with a microactuator which, in addition to the fluid-actuated switching of the control membrane, can be used for this purpose in any configuration. A variety of configurations are conceivable within the framework of the basic principle of the quantity amplifier.

The further exemplary embodiment of a quantity amplifier device 1 'shown in FIGS. 2 to 4 is distinguished by the presence of a plurality of micromechanical quantity amplifiers 2 which are combined to form an amplifier unit 16 and are fluidically linked to one another. The specific exemplary embodiment has a total of three volume boosters 2, which are identified by reference numerals 2 ¹ , 2 "and 2"'' for better distinction. The fluidic connection is implemented, for example, in such a way that a higher-value valve function is located above a simple two-way switching function is generated, which in the present case is a 3/2 switching function.

First of all, the basic circuitry structure of a particularly advantageous embodiment will be explained with reference to FIG.

Accordingly, the quantity amplifier device l ^{1 contains} a first quantity amplifier 2 'and a second quantity amplifier 2 ", which are linked to one another in such a way that the inflow channel 13' of the first quantity amplifier 2 'is connected to the outflow channel 14" of the second quantity amplifier 2 ". These two channels 13 ', 14 "also communicate with a common working channel A, which can be connected to a consumer to be operated, for example with a pneumatic miniature cylinder. The inlet channel 13 'of the second set amplifier 2' is connected to a pressure source P in compound which provides a rbeitsdruck _A under a stationary fluid pressure medium.

The Abεtrömkanal 14 'of the erεten Mengenverεtärkers 2 ^■ communicates with a Druckεenke R in compound beiεpielεweise with the atmosphere.

The control channel 12 "of the second quantity amplifier 2" is connected via a pilot control channel 17 to the outflow channel 14 '''of the third quantity amplifier 2 ^I,! connected. The length of the pilot channel 17 can be selected to be as short as desired; for example, it can be defined by control and outflow channels 12 ", 14"'' which merge directly into one another, as is shown in FIG. 2.

The third quantity amplifier 2 '' 'practically represents a pilot control quantity amplifier which is used for the pilot control of the second quantity amplifier 2 ". Its inflow channel 13' '' is connected to a pressure source P which is connected to that of the inflow channel 13" of the second Quantity amplifier 2 "can be identical.

The control channel 12 '' 'of the third quantity amplifier 2' '' is connected to the control channel 12 'of the first quantity amplifier 2'. Uniform control pressurization of the two control channels 12 '' ', 12 "is thus possible.

The above-mentioned control pressure is expediently controlled by at least one micromechanical control valve 18 produced in a multi-layer construction. In the exemplary embodiment, this is designed as a 3/2-way switching valve and is produced by conventional microstructuring processes. A possible structure is explained in EP 0 485 739 AI, to which reference is hereby made, so that details of the structure can be dispensed with. The actuation of the control valve 18 is triggered electrically, for which purpose it is via has suitable actuators, for example those based on an electrostatic principle.

The output 22 of the control valve 18 communicates with the control channels 12 ', 12' '' of the first and third quantity amplifiers 2 ', 2' ''. In addition, the control valve 18 is connected to a control pressure source X and a pressure sink R, for example formed by the atmosphere.

The control valve 18 is expediently designed as a component of the quantity amplifier device 1 'and is combined with the amplifier unit 16 to form a structural unit which can be seen in FIGS. 2 and 3. This enables particularly small dimensions with short fluid paths and correspondingly high efficiency.

The interconnection shown in FIG. 4 results in a quantity amplifier device 1 'which produces a 3/2-valve function which has a so-called "normally closed" characteristic. In the first switch position of the

Control valve 18 has its outlet 22 vented, so that the two control channels 12 ', 12''' of the first and third quantity amplifiers 2 ', 2''' are depressurized. Therefore, the third quantity amplifier 2 ' ¹ ' switches through and there is a pressure on the control channel 12 "of the second quantity amplifier 2" which shifts the assigned control membrane 6 "into the closed position. At the same time, the control membrane 6 'of the first quantity amplifier 2' can Take open position so that the working channel A can be vented via the inflow channel 13 ', the overflow chamber 8' and the outflow channel 14 'of the first quantity amplifier 2'.

Switching the control valve 18 into the second switching position results in pressurization of the two control channels 12 ', 12''' with the control pressure, so that the control membranes 6 ', 6''' of the first and third volume boosters 2 ', 2 Switch to closed position. Thus the work beitskanal A separated from the pressure sink R and can instead be supplied via the inflow channel 13 ", the overflow chamber 8" and the outflow channel 14 "of the second flow amplifier 2" from the associated pressure source P with pressure medium under working pressure.

So that the control membrane 6 "of the second quantity amplifier 2" can switch to the open position when the third quantity amplifier 2 '' 'is closed, the control channel 12 "assigned to it is connected to a ventilation channel 23 leading to a pressure sink R. The latter communicates when it is switched off. leadership example with the pilot channel 17. The vent channel 23 enables a pressure drop at the control channel 12 "and accordingly the switching of the control membrane 6" into the open position.

The ventilation duct 23 can be a constantly open connection to the atmosphere or pressure sink R, the cross section of which is so small that there is sufficient flow resistance to avoid an excessive pressure drop and high fluid losses when the control pressure is applied to the pilot duct 17. On the other hand, the flow resistance should not be too low, so that the pilot channel 17 is quickly vented when the pilot quantity amplifier is shut off and the assigned second quantity amplifier 2 "has a good response behavior.

An alternate embodiment of the ventilation duct 23 'is indicated by dash-dotted lines in FIG. In this case, a shut-off valve 24, which can be switched in particular by means of electrical signals, and which is expediently designed as a 2/2-way switching valve, is switched into the venting channel 23 ". It normally shuts off the venting channel 23 'and, in the actuated state, provides the connection between the pilot channel 17 or the control channel 12 "and the pressure sink R, whereby a sufficiently large diameter can be selected in order to bring about an instantaneous drop in pressure. It goes without saying that, instead of the "normally closed" characteristic, a "normally open" characteristic can also be implemented, which creates an open fluid connection between the working channel A and the pressure source R in the case of unpressurized control channels 12 ', 12''' . All that is required for this is to interchange the connection configuration of the outflow duct 14 "of the first quantity amplifier 2 'and the inflow duct 13" of the second quantity amplifier 2 ". This is indicated in FIG. 4 by the designations" R "and" P "in parentheses.

The integration of the three quantity amplifiers 2 ', 2 ", 2 ¹ ' ¹ in the quantity amplifier device 1 'according to FIGS. 2 to 4 preferably takes place with simultaneous assignment of one or more laminate bodies 3, 4 to different quantity amplifiers. Thus, the quantity amplifier device 1' the realization of the amplifier unit 16 using only three layered bodies 25 lying one on top of the other, which keeps the manufacturing effort low.

In the exemplary embodiment, one of the quantity amplifiers 2 - in the present case the third quantity amplifier 2 ' ¹ ' - is arranged in a first amplifier level 26, while the other two quantity amplifiers - in the present case the first and second quantity amplifiers 2 ', 2 "- are arranged together in a second amplifier level The two amplifier levels 26, 27 extend parallel to the layer levels and are arranged one on top of the other in the normal direction. In the illustration and alignment of the quantity amplifier device 1 'shown, the first amplifier level 26 lies above the second amplifier level 27.

The two upper laminates 25 which are vertically adjacent to one another in the exemplary embodiment form the two laminates 3 ″, 4 ″ ″ of the third quantity amplifier 2 ″. At the same time, the middle laminate 25 forms the respective first laminate 3 ′, 3 ″ of the first and second quantity Strengthener 2 ', 2 "and the lower laminate 25 of the amplifier unit 16 in the unit represents the second laminate 4', 4" of the first and second quantity amplifier 2 ', 2 ". Although it would be possible the laminate 3', 3"; Executing 4 ', 4 "of the first and second quantity amplifiers 2', 2" separately is advisable for the sake of simpler manufacture by simultaneous processing, the one-piece combination in each case in one and the same laminate.

The control valve 18 is physically combined with the amplifier unit 16 to form a structural unit 28. In the exemplary embodiment, it is placed next to the amplifier unit 16 in the direction of the layer planes. Since the control valve 18 also has a multi-layer structure, it is advisable to arrange its individual layer bodies 32 with a parallel layer orientation, and in particular such that a layer body 25 of the amplifier unit 16 runs in the same plane with a layer body 32 of the control valve 18. In the exemplary embodiment, this is realized, the control valve 18 having a three-layer structure comparable to the amplifier unit 16. In this context, a further expedient design is given when the layer bodies 25, 32 of the amplifier unit 16 and the control valve 18 lying in a common layer plane are formed integrally with one another and can therefore be produced together. This also greatly simplifies the assembly of the quantity booster device 1 'and it is possible to avoid sealing points on the joining areas.

Instead of a control valve 18 with a 3/2 switching function, two 2/2 switching valves could also be provided, for example.

If necessary, the above-mentioned structural unit 28 could be supplemented by a ventilation unit 33 - indicated by dash-dotted lines in FIG. 3 - in which the ventilation channel 23, 23 'and in particular, a shut-off valve 24, if present, is also arranged. The venting unit 33 could easily have a layer structure comparable to the control valve 18 and, accordingly, could be coupled to the layer bodies 25, 32 of the amplifier unit 16 and / or the control valve 18 or could be made in one piece.

In FIG. 2, the two large-area outer surfaces of the two outer layer bodies 25, 32 of the structural unit 28 are each covered with a cover layer 34, 34 ', which has fluid channels 35, indicated by dash-dotted lines, which can be used to produce internal and external connections. In particular, at least one of the cover layers 34, 34 'contains connection openings (not shown in any more detail) which enable the connection to further fluid channels which lead to a pressure source, a pressure sink or one or more consumers.

Claims

Expectations

l. quantity amplifier device for fluid flow, with at least one fluid-controlled micromechanical quantity amplifier (2) produced by microstructuring method, which has a chamber delimited by two laminated bodies (3, 4), which from a movable control membrane (6) into a with a control channel (12 ) communicating control chamber (7) and an overflow chamber (8) communicating with an inflow channel (13) and an outflow channel (14), the control membrane (6) depending on the control pressure at the control channel (12) into one of the inflow channel ( 13) and the closed position closing the outflow channel (14) or an open position releasing these two channels and thus allowing fluid to flow over between the inflow channel (13) and the outflow channel (14).

2. Quantity amplifier device according to claim 1, characterized in that the control channel (12) in one layer body (3) and the inflow channel (13) and the outflow channel (14) are formed together in the other layer body (4).

3. Quantity amplifier device according to claim 1 or 2, characterized in that the laminated bodies (3, 4) and / or the control membrane (6) are designed as silicon-made components.

4. Quantity amplifier device according to one of claims 1 to 3, characterized in that the laminated body (3, 4) and / or the control membrane (6) consist of plastic material.

5. Quantity amplifier device according to one of claims 1 to 4, characterized in that the control membrane (6) is fixed at the edge between the two laminated bodies (3, 4).

6. Quantity amplifier device according to one of claims 1 to 5, characterized in that the control membrane (6) is designed to be flexurally elastic and preferably foil-like.

7. Quantity amplifier device according to one of claims 1 to 6, characterized by a plurality of micromechanical quantity amplifiers (2; 2 ', 2 ", 2 1 I I) combined to form a block-like amplifier unit (16) in particular and fluid-technically linked to one another

8. Quantity amplifier device according to one of claims 1 to 7, characterized by a plurality of micromechanical quantity amplifiers (2; 2 ', 2 ", 2' '') which are fluidically linked to one another in such a way that εie together they have a 2/2 switching function Exercise higher-quality valve function.

9. Quantity amplifier device according to one of claims 1 to 8, characterized by three to a three-way switching function linked micromechanical quantity amplifier (2; 2 ', 2 ", 2' ¹ '), for example a" normally closed "- or a" normally open "Enable characteristic.

10. Quantity amplifier device according to one of claims 7 to 9, characterized by two quantity amplifiers (2 ', 2 ") which are linked to one another in such a way that the inflow channel (13') of the one quantity amplifier (2 ') with the outflow channel (14") of the other quantity amplifier (2 ") is connected and both channels (13 ', 14") communicate with a common working channel (A), the control channel (12 ") of the one quantity amplifier (2") via a pilot channel (17) with the

Outflow channel (14 ¹¹¹ ) of a pilot control quantity amplifier (2 ''') is connected, the control channel (12''') of which is expedient communicates with the control channel (12 ') of the other quantity amplifier (2').

11. Quantity amplifier device according to one of claims 1 to 10, characterized in that the control channel (12) at least one quantity amplifier (2) with a ventilation channel (23, 23 ') iεt, which ε constantly open and verεehen with a flow resistance or with a switchable Shut-off valve (24) is equipped.

12. Quantity amplifier device according to claim 11 in conjunction with claim 10, characterized in that the pilot channel (17) is connected to a ventilation channel (23, 23 ').

13. Quantity amplifier device according to one of claims 1 to 12, characterized in that the control channel (12, 12 '' ') at least one quantity amplifier (2, 2' '') at least one multi-layer micromechanical control valve (18) produced by microstructuring methods for influencing the Pressurization of the control room is assigned.

14. Quantity amplifier device according to claim 13, characterized in that it contains a structural unit (28) with at least one micromechanical quantity amplifier (2) and at least one micromechanical control valve (18).

15. Quantity amplifier device according to claim 14, characterized by a structural unit (28) with a multilayer structure, one or more layers being present in which both a laminate (25) of a quantity amplifier (2) and a laminate (32) of a control valve (18) are provided.

16. A quantity amplifier device according to claim 15, characterized in that the layered bodies lying in one plane by (25, 32) of quantity booster (2) and control valve (18) are integrally formed with each other.

17. Quantity amplifier device according to one of claims 14 to 16, characterized in that one or both outer layer bodies (25, 32) of the structural unit (28) are provided on their outside with a cover layer body (34, 34 ') which has one or more fluid channels (35) contains.

18. Quantity amplifier device according to one of claims 13 to 17, characterized in that the at least one control valve (18) has a 2/2 switching function or a 3/2 switching function.

19. Quantity amplifier device according to one of claims 1 to 18, characterized in that the existing components are combined to form an integrated structural unit.