WO1999061931A1 - Magnetic field sensing device - Google Patents
Magnetic field sensing device Download PDFInfo
- Publication number
- WO1999061931A1 WO1999061931A1 PCT/US1999/011587 US9911587W WO9961931A1 WO 1999061931 A1 WO1999061931 A1 WO 1999061931A1 US 9911587 W US9911587 W US 9911587W WO 9961931 A1 WO9961931 A1 WO 9961931A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor unit
- integrated device
- sensing element
- bridge
- magnetization
- Prior art date
Links
- 230000005415 magnetization Effects 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 16
- 239000013078 crystal Substances 0.000 claims description 27
- 239000004020 conductor Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 9
- 238000010276 construction Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
Definitions
- the elements of the x-axis sensor i.e., elements 20, 28, 30 and 32
- the elements of the y-axis sensor i.e., elements 34, 36, 38 and 40
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Measuring Magnetic Variables (AREA)
- Hall/Mr Elements (AREA)
- Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP99925851A EP1082619B1 (en) | 1998-05-27 | 1999-05-26 | Magnetic field sensing device |
DE69904168T DE69904168T2 (en) | 1998-05-27 | 1999-05-26 | MAGNETIC SENSOR |
JP2000551273A JP3510592B2 (en) | 1998-05-27 | 1999-05-26 | Magnetic field detection device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/085,858 | 1998-05-27 | ||
US09/085,858 US6529114B1 (en) | 1998-05-27 | 1998-05-27 | Magnetic field sensing device |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1999061931A1 true WO1999061931A1 (en) | 1999-12-02 |
Family
ID=22194441
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/011587 WO1999061931A1 (en) | 1998-05-27 | 1999-05-26 | Magnetic field sensing device |
Country Status (5)
Country | Link |
---|---|
US (3) | US6529114B1 (en) |
EP (1) | EP1082619B1 (en) |
JP (1) | JP3510592B2 (en) |
DE (1) | DE69904168T2 (en) |
WO (1) | WO1999061931A1 (en) |
Cited By (4)
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WO2003060538A1 (en) * | 2002-01-15 | 2003-07-24 | Honeywell International Inc. | Integrated magnetic field strap for signal isolator |
WO2005093448A1 (en) * | 2004-03-19 | 2005-10-06 | Honeywell International, Inc. | Improved permalloy sensor |
CN102297652A (en) * | 2011-03-03 | 2011-12-28 | 江苏多维科技有限公司 | Magneto-resistance angular sensor with independent packaging |
CN102298125A (en) * | 2011-03-03 | 2011-12-28 | 江苏多维科技有限公司 | Push-pull bridge magneto resistor sensor |
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US6529114B1 (en) * | 1998-05-27 | 2003-03-04 | Honeywell International Inc. | Magnetic field sensing device |
US7005958B2 (en) * | 2002-06-14 | 2006-02-28 | Honeywell International Inc. | Dual axis magnetic sensor |
JP4016857B2 (en) * | 2002-10-18 | 2007-12-05 | ヤマハ株式会社 | Magnetic sensor and manufacturing method thereof |
US7050917B2 (en) * | 2003-03-24 | 2006-05-23 | Delphi Technologies, Inc. | Method for selectively reconfiguring a sensor according to applicable sensing requirements and reconfigurable sensor |
DE10314838A1 (en) * | 2003-04-01 | 2004-10-28 | Robert Seuffer Gmbh & Co. Kg | Method and device for measuring the position which a magnet and a measuring location have in relation to one another |
JP2007515629A (en) * | 2003-12-04 | 2007-06-14 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | Magnetic field sensor device |
US7126330B2 (en) * | 2004-06-03 | 2006-10-24 | Honeywell International, Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
US7341887B2 (en) * | 2004-10-29 | 2008-03-11 | Intel Corporation | Integrated circuit die configuration for packaging |
US7958782B2 (en) * | 2005-04-08 | 2011-06-14 | Nxp B.V. | Device with a magnetic sensor arrangement for detecting acceleration |
US20080184799A1 (en) * | 2005-04-22 | 2008-08-07 | Koninklijke Philips Electronics, N.V. | Device With A Sensor Arrangement |
US8438957B2 (en) * | 2005-10-19 | 2013-05-14 | Brown Line Metal Works, Llc | Digital beam torque wrench with an electronic sensor |
JP4632142B2 (en) * | 2006-05-17 | 2011-02-16 | 日立金属株式会社 | 2-axis magnetic field sensor |
US20080024265A1 (en) * | 2006-07-11 | 2008-01-31 | Jones Richard K | Wrist-wearable electrical detection device |
US20080117081A1 (en) * | 2006-11-17 | 2008-05-22 | Peter Jerome Radusewicz | Portable traffic analyzer |
WO2008120118A2 (en) * | 2007-03-30 | 2008-10-09 | Nxp B.V. | Magneto-resistive sensor |
US7394248B1 (en) | 2007-08-02 | 2008-07-01 | Magic Technologies, Inc. | Method and structure to reset multi-element MTJ |
JP4458149B2 (en) * | 2007-10-31 | 2010-04-28 | Tdk株式会社 | Magnetic coupler |
US20090152356A1 (en) * | 2007-12-14 | 2009-06-18 | Honeywell International Inc. | Non-contact magnetic pattern recognition sensor |
US8242776B2 (en) * | 2008-03-26 | 2012-08-14 | Everspin Technologies, Inc. | Magnetic sensor design for suppression of barkhausen noise |
US20090315554A1 (en) * | 2008-06-20 | 2009-12-24 | Honeywell International Inc. | Integrated three-dimensional magnetic sensing device and method to fabricate an integrated three-dimensional magnetic sensing device |
FR2955942B1 (en) * | 2010-01-29 | 2013-01-04 | Centre Nat Rech Scient | INTEGRATED MAGNETOMETER AND METHOD FOR MANUFACTURING THE SAME |
US8525514B2 (en) * | 2010-03-19 | 2013-09-03 | Memsic, Inc. | Magnetometer |
JP5411818B2 (en) * | 2010-08-26 | 2014-02-12 | セミコンダクター・コンポーネンツ・インダストリーズ・リミテッド・ライアビリティ・カンパニー | Semiconductor device |
US8947082B2 (en) | 2011-10-21 | 2015-02-03 | University College Cork, National University Of Ireland | Dual-axis anisotropic magnetoresistive sensors |
TWI452319B (en) * | 2012-01-09 | 2014-09-11 | Voltafield Technology Corp | Magnetoresistive sensing device |
US9116198B2 (en) * | 2012-02-10 | 2015-08-25 | Memsic, Inc. | Planar three-axis magnetometer |
US9372242B2 (en) * | 2012-05-11 | 2016-06-21 | Memsic, Inc. | Magnetometer with angled set/reset coil |
ITTO20120614A1 (en) | 2012-07-11 | 2014-01-12 | St Microelectronics Srl | MULTILAYER INTEGRATED MAGNETORESISTIVE SENSOR AND ITS MANUFACTURING METHOD |
JP6089572B2 (en) * | 2012-10-18 | 2017-03-08 | ヤマハ株式会社 | Magnetoresistive element reset circuit |
US9244134B2 (en) * | 2013-01-15 | 2016-01-26 | Infineon Technologies Ag | XMR-sensor and method for manufacturing the XMR-sensor |
US8786397B1 (en) * | 2013-02-07 | 2014-07-22 | Excelliance Mos Corporation | Electric field resistor |
EP2778704B1 (en) * | 2013-03-11 | 2015-09-16 | Ams Ag | Magnetic field sensor system |
US9134385B2 (en) | 2013-05-09 | 2015-09-15 | Honeywell International Inc. | Magnetic-field sensing device |
ITTO20130436A1 (en) * | 2013-05-29 | 2014-11-30 | St Microelectronics Srl | INTEGRATED AMR LOW CONSUMPTION MAGNETOR RESISTOR |
TWI493209B (en) * | 2013-07-05 | 2015-07-21 | Voltafield Technology Corp | A single-chip three-axis magnetic field sensing device |
CN104698409B (en) * | 2015-02-04 | 2017-11-10 | 江苏多维科技有限公司 | A kind of single-chip has the high-intensity magnetic field X-axis linear magnetoresistance sensor of alignment coil/replacement coil |
CN105182258A (en) * | 2015-10-21 | 2015-12-23 | 美新半导体(无锡)有限公司 | Magnetic field sensor capable of realizing resetting and self-inspection |
CN205581283U (en) * | 2016-04-11 | 2016-09-14 | 江苏多维科技有限公司 | Magnetism resistance transducer with encapsulation of initialization coil |
JP2019087688A (en) * | 2017-11-09 | 2019-06-06 | Tdk株式会社 | Magnetic sensor |
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US4847584A (en) * | 1988-10-14 | 1989-07-11 | Honeywell Inc. | Magnetoresistive magnetic sensor |
DE4317512A1 (en) * | 1993-05-26 | 1994-12-01 | Univ Schiller Jena | Device for the contactless measurement of zero point, position and angle of rotation |
US5521501A (en) * | 1993-06-09 | 1996-05-28 | Institut Fuer Mikrostrukturtechnologie Und Optoelektronik E.V. | Magnetic field sensor constructed from a remagnetization line and one magnetoresistive resistor or a plurality of magnetoresistive resistors |
US5583436A (en) * | 1994-02-28 | 1996-12-10 | U.S. Philips Corporation | Miniature magnetic field sensor with compact magnetization coil |
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-
1998
- 1998-05-27 US US09/085,858 patent/US6529114B1/en not_active Expired - Lifetime
-
1999
- 1999-05-26 EP EP99925851A patent/EP1082619B1/en not_active Expired - Lifetime
- 1999-05-26 JP JP2000551273A patent/JP3510592B2/en not_active Expired - Lifetime
- 1999-05-26 DE DE69904168T patent/DE69904168T2/en not_active Expired - Lifetime
- 1999-05-26 WO PCT/US1999/011587 patent/WO1999061931A1/en active IP Right Grant
-
2003
- 2003-01-29 US US10/353,620 patent/US7034651B2/en not_active Expired - Lifetime
-
2006
- 2006-03-08 US US11/370,318 patent/US7202771B2/en not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4847584A (en) * | 1988-10-14 | 1989-07-11 | Honeywell Inc. | Magnetoresistive magnetic sensor |
DE4317512A1 (en) * | 1993-05-26 | 1994-12-01 | Univ Schiller Jena | Device for the contactless measurement of zero point, position and angle of rotation |
US5521501A (en) * | 1993-06-09 | 1996-05-28 | Institut Fuer Mikrostrukturtechnologie Und Optoelektronik E.V. | Magnetic field sensor constructed from a remagnetization line and one magnetoresistive resistor or a plurality of magnetoresistive resistors |
US5583436A (en) * | 1994-02-28 | 1996-12-10 | U.S. Philips Corporation | Miniature magnetic field sensor with compact magnetization coil |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2003060538A1 (en) * | 2002-01-15 | 2003-07-24 | Honeywell International Inc. | Integrated magnetic field strap for signal isolator |
US7046117B2 (en) | 2002-01-15 | 2006-05-16 | Honeywell International Inc. | Integrated magnetic field strap for signal isolator |
WO2005093448A1 (en) * | 2004-03-19 | 2005-10-06 | Honeywell International, Inc. | Improved permalloy sensor |
US7196875B2 (en) | 2004-03-24 | 2007-03-27 | Honeywell International Inc. | Permalloy sensor having individual permalloy resist pattern runners with lengths perpendicular to a wafer level anisotropy |
CN102297652A (en) * | 2011-03-03 | 2011-12-28 | 江苏多维科技有限公司 | Magneto-resistance angular sensor with independent packaging |
CN102298125A (en) * | 2011-03-03 | 2011-12-28 | 江苏多维科技有限公司 | Push-pull bridge magneto resistor sensor |
CN102297652B (en) * | 2011-03-03 | 2012-12-05 | 江苏多维科技有限公司 | Magneto-resistance angular sensor with independent packaging |
CN102298125B (en) * | 2011-03-03 | 2013-01-23 | 江苏多维科技有限公司 | Push-pull bridge magneto resistor sensor |
Also Published As
Publication number | Publication date |
---|---|
EP1082619B1 (en) | 2002-11-27 |
US20030141957A1 (en) | 2003-07-31 |
US7034651B2 (en) | 2006-04-25 |
JP3510592B2 (en) | 2004-03-29 |
US20060152332A1 (en) | 2006-07-13 |
US7202771B2 (en) | 2007-04-10 |
EP1082619A1 (en) | 2001-03-14 |
JP2002516999A (en) | 2002-06-11 |
US6529114B1 (en) | 2003-03-04 |
DE69904168T2 (en) | 2003-07-17 |
DE69904168D1 (en) | 2003-01-09 |
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