WO2000009443A1 - Carbon nanotube structures made using catalyst islands - Google Patents
Carbon nanotube structures made using catalyst islands Download PDFInfo
- Publication number
- WO2000009443A1 WO2000009443A1 PCT/US1999/015222 US9915222W WO0009443A1 WO 2000009443 A1 WO2000009443 A1 WO 2000009443A1 US 9915222 W US9915222 W US 9915222W WO 0009443 A1 WO0009443 A1 WO 0009443A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- catalyst
- nanotube
- substrate
- island
- islands
- Prior art date
Links
- 239000003054 catalyst Substances 0.000 title claims abstract description 85
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 37
- 239000002071 nanotube Substances 0.000 claims abstract description 139
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 229910052751 metal Inorganic materials 0.000 claims abstract description 46
- 239000002184 metal Substances 0.000 claims abstract description 46
- 239000002245 particle Substances 0.000 claims abstract description 43
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 22
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims abstract description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 16
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 9
- 239000010453 quartz Substances 0.000 claims abstract description 6
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 6
- 239000010703 silicon Substances 0.000 claims abstract description 6
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 24
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 11
- 239000011733 molybdenum Substances 0.000 claims description 11
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 229910052750 molybdenum Inorganic materials 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 5
- 238000004630 atomic force microscopy Methods 0.000 claims description 5
- 229910017052 cobalt Inorganic materials 0.000 claims description 5
- 239000010941 cobalt Substances 0.000 claims description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 5
- 239000002109 single walled nanotube Substances 0.000 claims description 5
- 229910052725 zinc Inorganic materials 0.000 claims description 5
- 239000011701 zinc Substances 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 230000005684 electric field Effects 0.000 claims description 4
- 239000000377 silicon dioxide Substances 0.000 claims description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims 7
- 229910052707 ruthenium Inorganic materials 0.000 claims 7
- 239000007789 gas Substances 0.000 abstract description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 15
- 239000002105 nanoparticle Substances 0.000 description 11
- VCJMYUPGQJHHFU-UHFFFAOYSA-N iron(III) nitrate Inorganic materials [Fe+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O VCJMYUPGQJHHFU-UHFFFAOYSA-N 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ROZSPJBPUVWBHW-UHFFFAOYSA-N [Ru]=O Chemical class [Ru]=O ROZSPJBPUVWBHW-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N iron oxide Inorganic materials [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 159000000014 iron salts Chemical class 0.000 description 2
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 206010004542 Bezoar Diseases 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000012769 bulk production Methods 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000994 depressogenic effect Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 239000003353 gold alloy Substances 0.000 description 1
- ZNKMCMOJCDFGFT-UHFFFAOYSA-N gold titanium Chemical compound [Ti].[Au] ZNKMCMOJCDFGFT-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000003306 harvesting Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- LZKLAOYSENRNKR-LNTINUHCSA-N iron;(z)-4-oxoniumylidenepent-2-en-2-olate Chemical compound [Fe].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O LZKLAOYSENRNKR-LNTINUHCSA-N 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 230000007847 structural defect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229910001258 titanium gold Inorganic materials 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
- 235000014692 zinc oxide Nutrition 0.000 description 1
- RNWHGQJWIACOKP-UHFFFAOYSA-N zinc;oxygen(2-) Chemical class [O-2].[Zn+2] RNWHGQJWIACOKP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/08—Probe characteristics
- G01Q70/10—Shape or taper
- G01Q70/12—Nanotube tips
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C13/00—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00
- G11C13/02—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change
- G11C13/025—Digital stores characterised by the use of storage elements not covered by groups G11C11/00, G11C23/00, or G11C25/00 using elements whose operation depends upon chemical change using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
- G11C17/14—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM
- G11C17/16—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards in which contents are determined by selectively establishing, breaking or modifying connecting links by permanently altering the state of coupling elements, e.g. PROM using electrically-fusible links
- G11C17/165—Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2202/00—Structure or properties of carbon nanotubes
- C01B2202/02—Single-walled nanotubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/102—Fullerene type base or coating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
- Y10S977/745—Carbon nanotubes, CNTs having a modified surface
- Y10S977/746—Modified with biological, organic, or hydrocarbon material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/842—Manufacture, treatment, or detection of nanostructure for carbon nanotubes or fullerenes
- Y10S977/843—Gas phase catalytic growth, i.e. chemical vapor deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
- Y10S977/86—Scanning probe structure
- Y10S977/875—Scanning probe structure with tip detail
- Y10S977/876—Nanotube tip
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/894—Manufacture, treatment, or detection of nanostructure having step or means utilizing biological growth
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/895—Manufacture, treatment, or detection of nanostructure having step or means utilizing chemical property
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
- Y10S977/957—Of chemical property or presence
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2973—Particular cross section
- Y10T428/2975—Tubular or cellular
Definitions
- an apparatus including a substrate and a catalyst island disposed on the substrate.
- the catalyst island includes a catalyst particle that is capable of growing carbon nanotubes when exposed to a hydrocarbon gas at elevated temperatures .
- a carbon nanotube extends from the catalyst particle.
- the nanotube may be in contact with a top surface of the substrate.
- Fig. 2 shows a second step in making nanotubes according to the present invention.
- Fig. 3 shows a third step in making nanotubes according to the present invention.
- Fig. 4 shows a top view of a substrate with three catalyst islands .
- Fig. 5 shows a closeup top view of a single catalyst island which has been used to grow nanotubes .
- Fig. 6 shows an apparatus according to the present invention which has a nanotube connected between a catalyst island and a metal pad.
- Fig. 7 shows a preferred embodiment of the present invention in which metal covers are disposed on top of the catalyst islands and portions of the nanotubes .
- Fig. 8A-8C illustrate how the metal covers of Fig. 7 can be made.
- Fig. 9 shows a side view of a resonator according to the present invention made from a freestanding nanotube supported by the ends of the nanotube.
- Fig. 10 shows a top view illustrating how the apparatus of Fig. 9 can be made.
- Individually separable nanotubes are useful for the manufacturing of electronic and micromechanical devices because individual nanotubes can be incorporated into the devices by appropriately locating islands 29. Electrical and mechanical connections can be made to individual nanotubes if they are spatially separated and distinct.
- the conductive lines 33 may be applied to the substrate 20 before the islands 29 are deposited. In this way, the islands rest on top of the conductive lines 33. Also, the conductive lines 33 can be disposed on top of the islands (by applying the conductive lines on top of the islands. The conductive lines can be deposited before or after the growth of nanotubes.
- the nanotube 30b can be resonated by locating the nanotube 30b in a magnetic field (perpendicular to the length of the nanotube 30b) and passing an oscillating current through the nanotube.
- a conductive film 37 capacitiveiy coupled with the nanotube 30b extracts a resonant signal from the nanotube.
- the conductive film 37 can be used to electrostatically excite mechanical vibrations in the nanotube 30b.
Abstract
The present invention includes several nanotubes (30) which can be made using catalyst islands (45) disposed on a substrate (42) (e.g. silicon, alumina, or quartz) or on the free end (48) of an atomic force microscope cantilever (42). The catalyst islands (45) are capable of catalyzing the growth of carbon nanotubes (30) from carbon containing gases (e.g. methane). The present invention includes an island (45) of catalyst material (such as Fe O) disposed on the substrate (42) with a carbon nanotube (30) extending from the island (45). Also included in the present invention is a pair of islands (29) with a nanotube (30a) extending between the islands (29), electrically connecting them. Conductive metal lines (34) connected to the islands (29) (which may be a few microns on a side) allows for external circuitry to connect to the nanotube (30a). Such a structure can be used in many different electronic and microelectromechanical devices. Also, the present invention includes a catalyst particle (45) disposed on the free end (48) of an AFM cantilever (42) and having a nanotube (30) extending from the particle (45). The nanotube (30) can be used as the scanning tip of the AFM as is known in the art.
Description
Carbon Nanotube Structures made Using Catalyst Islands
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority from US patent application serial number 09/133,948 filed 14 August 1998.
FIELD OF THE INVENTION
The present invention relates generally to the fabrication of nanotubes, and in particular to methods of fabricating nanotube structures from an array of catalyst islands on a semiconductor surface.
BACKGROUND OF THE INVENTION
Carbon nanotubes are recently discovered, hollow graphite tubules. When isolated, individual nanotubes are useful for making microscopic electrical, mechanical, or electromechanical devices. Obtaining individual, high quality, single-walled nanotubes has proven to be a difficult task, however. Existing methods for the production of nanotubes, including arc-discharge and laser ablation techniques, yield bulk materials with tangled nanotubes. The nanotubes in the bulk materials are mostly in bundled forms . These tangled nanotubes are extremely difficult to purify, isolate, manipulate, and use as discrete elements for making functional devices.
One conventional method for producing carbon nanotubes is disclosed in U.S. Patent 5,482,601 issued to Oshima et al. on January 9, 1996. The nanotubes are produced by successively repositioning a rod-like, carbon anode relative to a cathode surface such that a tip of the anode successively faces different portions of the cathode surface. A direct current voltage is impressed between the tip of the anode and the cathode surface so that an arc discharge occurs with the simultaneous formation of carbonaceous deposits containing carbon nanotubes on the cathode surface. The carbonaceous deposits are scraped and collected.
U.S, Patent 5,500,200 issued to Mandeville et al. on March 19, 1996 discloses a method for the bulk production of multi-walled tubes. According to the method, a catalyst is prepared using particles of fumed alumina with an average particle size of about 100 A. Iron acetylacetonate is deposited on the alumina particles, and the resultant catalyst particles are heated in a hydrogen/ethylene atmosphere. The catalyst particles are preferably reacted with the hydrogen/ethylene mixture for about 0.5 hours in a reactor tube, after which the reactor tube is allowed to cool to room temperature under a flow of argon. Harvesting of the carbon tubes so produced showed a yield greater than 30 times the weight of the iron in the catalyst particles.
Although the methods described by Oshima and Mandeville are effective for producing bulk amounts of carbon tubes or carbon fibrils, the resulting bulk materials are "hairballs" containing tangled and kinked tubes which one collects into vials or containers . These bulk materials are useful to put into polymers or metals to make composites that exhibit improved properties of the polymers or metals . For making functional microscopic devices, however, these bulk materials are nearly useless because it is nearly impossible to isolate one individual tube from the tangled material, manipulate the tube, and construct a functional device using that one tube. Also, many of the tubes have molecular-level structural defects which results in weaker tubes with poor electrical characteristics.
Atomic force microscopes (AFMs) sometimes employ nanotubes as the scanning tip because nanotubes are resilient and have an atomically sharp tip. However, the manufacturing of nanotube- tipped AFM devices is problematic because the nanotubes must be painstakingly separated from disorganized bundles of nanotubes and attached to the AFM cantilever. It would be an advance in the art of atomic force microscopy to provide a nanotube-tipped AFM device that is simpler to manufacture.
OBJECTS AND ADVANTAGES OF THE INVENTION
In view of the above, it is an object of the present invention to provide a method for the large scale synthesis of individual distinct single-walled nanotubes. In particular, it is an object of the present invention to provide such a method which allows nanotube growth to be confined to desired locations so that the nanotubes can be easily addressed and integrated into structures to obtain functional microscopic devices. It is a further object of the invention to provide a method for integrating the nanotubes into semiconductor microstructures to obtain a variety of nanotube devices. Further, it is an object of the present invention to provide a nanotube-tipped atomic force microscope device which is simple to manufacture.
These and other objects and advantages will become more apparent after consideration of the ensuing description and the accompanying drawings .
SUMMARY
These objects and advantages are provided by an apparatus including a substrate and a catalyst island disposed on the substrate. The catalyst island includes a catalyst particle that is capable of growing carbon nanotubes when exposed to a hydrocarbon gas at elevated temperatures . A carbon nanotube extends from the catalyst particle. The nanotube may be in contact with a top surface of the substrate.
The substrate may be made of silicon, alumina, quartz, silicon oxide or silicon nitride. The nanotube may be a single-walled nanotube. The catalyst may include Fe2θ3 or other catalyst materials including molybdenum, cobalt, nickel, or zinc and oxides thereof (iron, molybdenum and ruthenium oxides are preferred) . The catalyst island is preferably about 1-5 microns in size.
The present invention also includes an apparatus having a substrate with two catalyst islands and a nanotube extending between the islands. The nanotube provides an electrical connection between the islands, which are electrically conductive.
Conductive lines can provide electrical connections to the islands
and nanotube. The nanotube may be freestanding above the substrate. A freestanding nanotube can be used as a high frequency, high-Q resonator.
Alternatively, one of the islands is replaced with a metal pad that does not have catalytic properties.
The present invention also includes an atomic force microscopy apparatus that has a catalyst particle disposed on a free end of a cantilever. A nanotube extends from the catalyst particle. The nanotube can be used as the scanning tip of the atomic force microscope apparatus .
The present invention also includes a method of making individually distinct nanotubes on a substrate surface. The method begins with disposing catalyst islands on the surface of a substrate. Then, the catalyst islands are contacted with methane gas at elevated temperature. The nanotubes grown are separate and extend over the surface of the substrate. The separate and distinct nanotubes can be incorporated into microelectronic or microelectromechanical devices.
BRIEF DESCRIPTION OF THE DRAWINGS
Fig. 1 shows a first step in making nanotubes according to the present invention.
Fig. 2 shows a second step in making nanotubes according to the present invention. Fig. 3 shows a third step in making nanotubes according to the present invention. Fig. 4 shows a top view of a substrate with three catalyst islands . Fig. 5 shows a closeup top view of a single catalyst island which has been used to grow nanotubes . Fig. 6 shows an apparatus according to the present invention which has a nanotube connected between a catalyst island and a metal pad. Fig. 7 shows a preferred embodiment of the present invention in which metal covers are disposed on top of the catalyst islands and portions of the nanotubes .
Fig. 8A-8C illustrate how the metal covers of Fig. 7 can be made. Fig. 9 shows a side view of a resonator according to the present invention made from a freestanding nanotube supported by the ends of the nanotube. Fig. 10 shows a top view illustrating how the apparatus of Fig. 9 can be made.
Figs. 11A and 11B illustrate an alternative method of making the apparatus of Fig. 9. Fig. 12 shows an atomic force microscope tip made according to the present invention. Figs. 13A-13D illustrate a method of producing a carbon nanotube on a tip of an atomic force microscope cantilever according to the present invention.
DETAILED DESCRIPTION
Fig. 1 shows a first step in a method of the present invention for making individual carbon nanotubes which are individually separable and distinct. A layer of resist 20 is disposed and patterned on a top surface of a substrate 22. Patterning can be performed by e-beam lithography. The substrate 22 can be made of silicon, alumina, quartz, silicon oxide or silicon nitride for example. The substrate can also have a metal film on top.
The patterned resist 20 has holes 24 which expose the underlying substrate 22. The holes 24 are about 3-5 microns in size and spaced apart by a distance 26 of about 10 microns. The resist may have a single hole or many holes 24.
Next, in Fig. 2, a solution of Fe(N03)3 in methanol, mixed with alumina nanoparticles (about 15-30 nanometers in size, for example) is deposited on the surfaces of the resist 20 and substrate 22. In a specific example, catalyst preparation includes mixing 4.0 grams of alumina nanoparticles with 1.0 gram of Fe(N03)3*9H2θ in 30mL methanol for 24 hours. After applying the mixture to the substrate, the solvent (i.e. methanol) is evaporated, leaving alumina nanoparticles coated with metal salt (i.e. Fe(Nθ3)3) 28 adhering to the resist and in the holes 24.
Next, in Fig. 3, a lift-off process is performed, leaving isolated (nonconnected) islands 29 of Fe (NO3 ) 3-coated nanoparticles
adhering in regions where holes 24 existed. Fig. 4 shows a top view of the islands 29.
Heating the substrate 22 and nanoparticles decomposes the Fe(Nθ3)3 to Fe2θ3. This is performed by placing the substrate in a furnace with an Argon atmosphere and heating to about 100-400° Celsius. The Fe2θ3/nanoparticle mixture is an active catalyst which will catalyze the formation of carbon nanotubes when exposed to methane gas at elevated temperature .
Growth of single-walled nanotubes is performed by heating the substrate with catalyst islands in the furnace at about 850-1000°C and flowing 99.99% pure methane over the catalyst islands 29 at a velocity of about 2-20 centimeters per second (e.g., for a 1-inch diameter tube, flowing methane at a rate of about 600-6000cm3/min) . Use of these parameters results in nanotubes which are substantially perfect and straight, with no structural flaws (i.e. all the carbon rings in the nanotubes have 6 carbon atoms instead of 5 or 7 carbon atoms) . Most of the nanotubes are single-walled, with diameters in the range of about 1-5 nanometers. When grown at 1000°C, 90% of the tubes were single-walled; when grown at 900°C, 99% of the tubes were single-walled. Most of the nanotubes have diameters in the range of 1-2 nanometers. The nanotubes have large aspect ratios (length/diameter) approaching about 10,000, and are very straight (a result of the absence of structural flaws).
It is noted that many different recipes for nanotube catalysts are known in the art. For example, Fe(Sθ4) or other Iron salts can be substituted for the Fe(N03)3. The quality of the nanotubes depends upon the catalyst material used. Iron, molybdenum and zinc oxides are preferred for making high quality tubes . A particularly good catalyst is made with a mixture of iron, molybdenum and ruthenium oxides. Most generally, both elemental metals and their oxides can be used to grow nanotubes .
Also, the nanoparticles can be made of many ceramic materials besides alumina. Silica, for example, can also be used. Generally, refractory oxide ceramic materials can be used in place of the alumina nanoparticles. Still further, nanoparticles may
not be used at all. Small quantities of Iron salts can be deposited on the substrate (for example, by dissolving in a solvent and evaporating the solvent) and heated to decomposition without being mixed with nanoparticles.
Fig. 5 shows a closeup top view of the island 29 and substrate after the growth of nanotubes has been performed. Carbon nanotubes 30 extend from the island 29 in random directions. The carbon nanotubes 30 are not freestanding, but are disposed in contact with the substrate surface. Also, the carbon nanotubes are firmly attached to the island 29. The nanotubes generally grow in a 'base-growth' mode, where new carbon is added to the nanotubes 30 at the point where they are attached to the island 29. The nanotubes are attached at one end to the island, and the opposite end is free. The nanotubes can be used as resonators by allowing the free end to vibrate.
The carbon nanotubes 30 are not tangled together, but are individually separable. This is due to the fact that a small number of nanotubes grow from each island. Also, the nanotubes are spaced apart by a substantial distance. Typically, about 10- 50 nanotubes are grown from each island. If larger numbers of nanotubes are grown (e.g. by using a more effective catalyst) , then the nanotubes may form bundles. This is undesirable for applications requiring single distinct nanotubes. However, bundles of nanotubes can also be useful for many electrical and mechanical devices such as interconnects, field effect transistors, single electron transistors, and resonators which have only one fixed end.
Individually separable nanotubes are useful for the manufacturing of electronic and micromechanical devices because individual nanotubes can be incorporated into the devices by appropriately locating islands 29. Electrical and mechanical connections can be made to individual nanotubes if they are spatially separated and distinct.
Fig. 6 shows a top view of an electronic device made by locating the island 29 close to a patterned metal pad 32. A single nanotube 30a extends from the island 29 to the metal pad 32,
thereby providing electrical contact between the island 29 and pad 32. The island 29 and pad 32 are spaced apart by a distance in the range of 100 nanometers to about 5 microns. The island 29 and pad 32 are both electrically conductive, so patterned conductive lines 33 on the substrate surface can provide for macroscopic electrical connections to the nanotube 30a. The nanotube 30a with a macroscopic electrical connection on each end can be used in many devices including field-effect transistors, single electron transistors, or low current value fuses.
The conductive lines 33 may be applied to the substrate 20 before the islands 29 are deposited. In this way, the islands rest on top of the conductive lines 33. Also, the conductive lines 33 can be disposed on top of the islands (by applying the conductive lines on top of the islands. The conductive lines can be deposited before or after the growth of nanotubes.
The apparatus of Fig. 6 is made by simply locating the island and metal pad proximate to one another and catalytically growing nanotubes from the island. The closer the island 29 and pad 32, the more likely that a nanotube will be grown that connects the island and pad.
Also, two or more nanotubes can simultaneously electrically connect the island 29 and metal pad 32. If multiple nanotubes connect between the island and pad, then all but one of the nanotubes can be broken with an AFM tip. This is performed by dragging the AFM tip across the substrate surface so that it bends unwanted nanotubes until they break.
Further, a second catalyst island can be substituted for the metal pad 32. In such a device, the nanotube 30a provides electrical contact between two catalyst islands 29 instead of between an island 29 and a metal pad 32. Metal lines 33 can provide electrical connections to each catalyst island as in Fig. 6. The same spacing distance can be used (100 nanometers to about 5 microns) if a catalyst island is substituted for the metal pad.
Fig. 7 shows a side view of a preferred embodiment of the present invention in which a metal cover 34 is deposited on top of each
catalyst island 29. The metal covers 34 can be made of platinum or titanium-gold alloy, for example. Each metal cover 34 covers a portion of each island 29 and covers an end portion 37 of the nanotube 30a. The metal cover therefore serves to help hold the nanotube 30a rigidly in place.
The metal covers 34 help to provide Ohmic electrical connections to the ends of the nanotube 30a. Ohmic electrical connections with the nanotube are assured by heating the apparatus after depositing the metal covers 34. For example, heating the apparatus to about 300°C in air will result in Ohmic electrical connections between the metal covers 34 and nanotube 30a. Metal lines 33 as shown in Fig. 6 can be connected to the metal covers to provide macroscopic electrical connections with the nanotube 30a. Electrical conduction through the catalyst island is therefore not necessary.
The metal covers 34 can be made by lithographically patterning the metal comprising the covers 34. Figs. 8A-8C illustrate how this can be done. First, a layer of spin-on resist 60 is deposited on top of the islands 29 and nanotube 30a. Next, the resist 60 is etched in regions 61 where the metal cover 34 is to be located. The metal comprising the metal covers 34 is then deposited (by physical vapor deposition or CVD processes, for example), and the resist 60 is removed in a lift-off process which leaves only the metal covers 34.
The present invention can provide freestanding nanotubes capable of acting as high-Q resonators. Fig. 9 shows a side view of a device including a freestanding nanotube 30b. The freestanding nanotube 30b is suspended above the substrate 22 which is depressed in a trench region 35 between the islands 29. The trench 35 can be formed by etching the substrate. The nanotube 30b therefore lies above a surface 36 of the etched substrate 22 and is supported only by nanotube ends 39. The trench 35 and metal covers 34 can be combined in the same apparatus.
The nanotube 30b can be resonated by locating the nanotube 30b in a magnetic field (perpendicular to the length of the nanotube 30b) and passing an oscillating current through the nanotube. A
conductive film 37 capacitiveiy coupled with the nanotube 30b extracts a resonant signal from the nanotube. Alternatively, the conductive film 37 can be used to electrostatically excite mechanical vibrations in the nanotube 30b.
Fig. 10 shows a top view of the substrate 22 and islands 29 illustrating how the apparatus of Fig. 9 can be made. First, the nanotube 30b which connects the islands 29 is grown. Other nanotubes will also be grown from both islands, but they are not shown for clarity. Then, all regions of the substrate except for a region defined by a box 38 are masked with resist. Spin-on resist can be used, for example. The act of spin-coating resist on the substrate will not damage^ the nanotube 30b. Next, the region inside the box 38 is exposed to an etchant which removes substrate material, but does not affect the nanotube 30b. Many different etchants can be used, depending upon the composition of the substrate (e.g. hydrofluoric acid can be used to etch Siθ2 or
Si substrates). Etching the substrate 22 under the nanotube 30b results in the nanotube being supported only at its ends 39. Metal lines 33 provide macroscopic electrical connections to the nanotube 30b through the catalyst islands 29. Also, metal covers 34 can be deposited before or after etching the trench 35 to provide Ohmic electrical connections to the nanotube and improved mechanical stability for the nanotube ends 39.
An alternative method for making the apparatus of Fig. 9 is shown in the side views of Figs. 11A and 11B. In Fig. 11A, the substrate 22 is etched to form the trench 35 where the nanotube 30b is suspended. Then islands 29 are disposed on opposite sides of the trench 35 and nanotubes are grown from the islands 29. The nanotube 30b that connects the islands grows from one island to the other. Alternatively, one of the islands can be replaced with the metal pad 32, in which case the nanotube grows from the island 29 to the pad 32. Also, metal covers 34 can be deposited on top of the nanotube 30b and catalyst islands 29.
The present invention includes an embodiment where the freestanding nanotube is only supported on one end by a catalyst island 29 (i.e. the freestanding nanotube does not extend all the
way across the trench 35) . The nanotube is therefore a cantilever, and can be used as a resonator.
It is noted that growing nanotubes between islands, or between an island and a metal pad is an uncertain endeavor. One cannot be sure that a particular arrangement of catalyst islands will result in a nanotube connection between a particular pair of islands, or how many nanotubes will connect. However, if a pair of islands are spaced less than about 10 microns apart, and are at least 1 micron wide, a nanotube is likely to connect the pair of islands. At least one bridging nanotube connection can be practically assured if a number of islands are disposed with various spacings in an array.
Fig. 12 shows another embodiment of the present invention in which a catalyst particle 45 is located on a tip 47 of an atomic force microscope (AFM) cantilever 42. The cantilever 42 is supported by a base 49, and has a free end 48 opposite the base
49. The particle 45 may be made of Fe2U3 (decomposed from
Fe(N03)3), for example. The catalyst particle 45 may or may not have supporting nanoparticles (i.e. silica or alumina particles).
The catalyst particle is firmly attached to the tip 47. Nanotubes
30 grown from the particle 45 are firmly attached to the cantilever and are atomically sharp. Nanotubes grown from the catalyst particle can be used as probe tips for AFM. Alternatively, the cantilever does not have a tip 47, and the particle is disposed directly on the cantilever 42.
Figs. 13A and 13B illustrate how the apparatus of Fig. 12 can be made. First, in Fig. 13A, a substrate 50 is coated with a gold film 52, and then droplets of Fe(Nθ3>3 dissolved in methanol are deposited on the gold surface. The methanol is then evaporated leaving only small particles 54 of Fe(N03)3 on the gold film 52.
Next , as shown in Fig. 13B, the AFM tip 47 is brought into contact with a particle 54 of Fe(N03)3. ^^ electric field is then applied between the tip 47 and the gold film 52. The electric field causes the Fe(Nθ3)3 particle to adhere to the tip 47 and may cause the Fe (NO3 ) 3 to decompose into Fe2U3. Then, in Fig. 13C, the cantilever 42 and nip 47 with the adhered Fe(Nθ3)3 particle 54 is removed from the gold film 52. In Fig. 13D, the device is
heated to fully decompose the Fe(N03>3 particle 54 into Fe2U3. This transforms the Fe(N03)3 particle 54 into a catalyst particle 45 (shown in Fig. 12) . Then, nanotubes 30 are grown from the catalyst particle 45.
An AFM cantilever with a catalytically grown nanotube tip has several advantages over an AFM cantilever with a nanotube bonded with other techniques. It is a relatively simple task to catalytically grow a nanotube from the catalyst particle on the cantilever. Also, the nanotube is firmly bonded to the cantilever.
It will be clear to one skilled in the art that the above embodiment may be altered in many ways without departing from the scope of the invention. Accordingly, the scope of the invention should be determined by the following claims and their legal equivalents .
Claims
What is claimed is:
1. An apparatus comprising:
a) a substrate with a top surface; b) a catalyst island disposed on the top surface of the substrate; c) a carbon nanotube extending from the catalyst island.
' 2. The apparatus of claim 1 wherein the nanotube is disposed on the top surface of the substrate.
3. The apparatus of claim 1 wherein the nanotube is a single- walled nanotube.
4. The apparatus of claim 1 wherein the catalyst island comprises Fe2U3.
5. The apparatus of claim 1 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.
6. The apparatus of claim 1 wherein the catalyst island is in the range of 1-5 microns in size.
7. The apparatus of claim 1, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, and silicon nitride.
8. The apparatus of claim 1 wherein the catalyst island comprises particles of ceramic material .
9. The apparatus of claim 1 further comprising a metal cover which covers an end portion of the nanotube and a portion of the island.
10 . An apparatus comprising :
a) a substrate with a top surface; b) two catalyst islands disposed on the top surface of the substrate; c) a carbon nanotube extending between the catalyst islands such that the nanotube provides an electrical connection between the catalyst islands.
11. The apparatus of claim 10 wherein the nanotube is disposed on the top surface of the substrate.
12. The apparatus of claim 10 wherein the nanotube is supported only by its ends.
13. The apparatus of claim 10 wherein the substrate comprises a trench under the nanotube so that the nanotube is freestanding.
14. The apparatus of claim 10 wherein the catalyst island comprises particles of ceramic material.
15. The apparatus of claim 10 further comprising a conductive line in electrical contact with each island.
16. The apparatus of claim 10 wherein the catalyst islands are separated by a distance less than about 50 microns.
17. The apparatus of claim 10, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, silica and silicon nitride.
18. The apparatus of claim 10 wherein the catalyst islands comprise a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof .
19. The apparatus of claim 10 further comprising a metal cover which covers an end portion of the nanotube and a portion of at least one island.
20. An apparatus comprising:
a) a substrate with a top surface; b) a catalyst island disposed on the top surface of the substrate; c) a metal pad disposed on the top surface of the substrate; d) a carbon nanotube extending between the catalyst island and the metal pad such that the nanotube provides an electrical connection between the catalyst island and metal pad.
21. The apparatus of claim 20 wherein the nanotube is disposed on the top surface of the substrate.
22. The apparatus of claim 20 wherein the nanotube is supported only by its ends.
23. The apparatus of claim 20 wherein the substrate comprises a trench under the nanotube so that the nanotube is freestanding.
24. The apparatus of claim 20 wherein the catalyst island comprises particles of ceramic material.
25. The apparatus of claim 20 further comprising a conductive line in electrical contact with the island.
26. The apparatus of claim 20 further comprising a conductive line in electrical contact with the metal pad.
27. The apparatus of claim 20, wherein the substrate comprises a material selected from the group consisting of silicon, alumina, quartz, silica and silicon nitride.
28. The apparatus of claim 1 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.
29. The apparatus of claim 1 further comprising a metal cover which covers an end portion of the nanotube and a portion of the island.
30. An apparatus for atomic force microscopy comprising:
a) a base; a) a cantilever extending from the base, the cantilever having a free end opposite the base; b) a catalyst particle disposed on the free end of the cantilever, wherein the catalyst particle is capable of catalyzing the growth of carbon nanotubes; c) a carbon nanotube extending from the catalyst particle.
31. The apparatus of claim 30 wherein the catalyst particle comprises Fe2U3.
32. The apparatus of claim 30 wherein the catalyst particle comprises a material selected from the group consisting of iron, molybdenum, cobalt, nickel, ruthenium, zinc and oxides thereof.
33. The apparatus of claim 30 further comprising a tip on the free end, wherein the catalyst particle is disposed on the tip.
34. A method for producing an atomic force microscopy apparatus with a tip comprising a carbon nanotube, the method comprising the steps of:
a) providing a cantilever suitable for use in atomic force microscopy; b) disposing a catalyst particle on a free end of the cantilever, wherein the catalyst particle is capable of growing carbon nanotubes when exposed to a carbon- containing gas at elevated temperature; c) contacting a carbon-containing gas to the catalyst particle at elevated temperature.
41. The method of claim 34 wherein step (b) comprises the steps of: i) contacting the free end to a particle of Fe(Nθ3)3 disposed on an electrically conductive substrate; and
ii) applying an electric field between the free end and the substrate.
42. The method of claim 34 wherein step (b) comprises the steps of: i) contacting the free end to a particle of Fe(Sθ4)2 disposed on an electrically conductive substrate; and ii) applying an electric field between the free end and the substrate.
43. A method for producing individually distinct carbon nanotubes, the method comprising the steps of:
a) providing a substrate with a top surface; b) forming an island of catalyst material on the top surface; c) heating the substrate and catalyst island; and d) contacting the catalyst island with a carbon-containing gas for a period of time sufficient to form the nanotubes.
44. the method of claim 43 wherein the catalyst island is about 1-5 microns in size.
45. The method of claim 43, wherein the carbon-containing gas comprises methane.
46. The method of claim 43, wherein the period of time is about 10 minutes.
47. The apparatus of claim 1 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, ruthenium and oxides thereof.
48. The apparatus of claim 10 wherein the catalyst islands comprise a material selected from the group consisting of iron, molybdenum, ruthenium and oxides thereof.
49. The apparatus of claim 20 wherein the catalyst island comprises a material selected from the group consisting of iron, molybdenum, ruthenium and oxides thereof.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/133,948 US6346189B1 (en) | 1998-08-14 | 1998-08-14 | Carbon nanotube structures made using catalyst islands |
US09/133,948 | 1998-08-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000009443A1 true WO2000009443A1 (en) | 2000-02-24 |
Family
ID=22461049
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1999/015222 WO2000009443A1 (en) | 1998-08-14 | 1999-07-02 | Carbon nanotube structures made using catalyst islands |
Country Status (2)
Country | Link |
---|---|
US (5) | US6346189B1 (en) |
WO (1) | WO2000009443A1 (en) |
Cited By (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001021863A1 (en) * | 1999-09-23 | 2001-03-29 | Commonwealth Scientific And Industrial Research Organisation | Patterned carbon nanotubes |
GB2364933A (en) * | 2000-07-18 | 2002-02-13 | Lg Electronics Inc | Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method |
WO2002017397A1 (en) * | 2000-08-24 | 2002-02-28 | Infineon Technologies Ag | Electronic element, method for producing an element of this type and a semiconductor element |
WO2002022499A1 (en) * | 2000-09-18 | 2002-03-21 | President And Fellows Of Harvard College | Fabrication of nanotube microscopy tips |
WO2002026624A1 (en) * | 2000-09-29 | 2002-04-04 | President And Fellows Of Harvard College | Direct growth of nanotubes, and their use in nanotweezers |
WO2002073624A2 (en) * | 2001-03-13 | 2002-09-19 | Paul Scherrer Institut (Psi) | Memory element, method for structuring a surface, and storage device |
US6457350B1 (en) * | 2000-09-08 | 2002-10-01 | Fei Company | Carbon nanotube probe tip grown on a small probe |
EP1271554A3 (en) * | 2001-06-26 | 2003-05-02 | Hokkaido University | Scanning probe microscope |
GB2382718A (en) * | 2000-07-18 | 2003-06-04 | Lg Electronics Inc | Field effect transistor using horizontally grown carbon nanotubes |
WO2004000003A2 (en) * | 2002-02-06 | 2003-12-31 | Ut-Battelle, Llc | Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process |
DE10230657A1 (en) * | 2002-07-03 | 2004-01-22 | Institut Für Polymerforschung Dresden E.V. | Positioning and forming meltable particles on measurement points, comprises using an optical system to select a particle, heating and cooling |
US6781166B2 (en) | 1999-07-02 | 2004-08-24 | President & Fellows Of Harvard College | Nanoscopic wire-based devices and arrays |
US6831017B1 (en) | 2002-04-05 | 2004-12-14 | Integrated Nanosystems, Inc. | Catalyst patterning for nanowire devices |
EP1557843A2 (en) * | 2004-01-22 | 2005-07-27 | FEI Company | Directed growth of nanotubes on a catalyst |
JP2006266765A (en) * | 2005-03-23 | 2006-10-05 | Totoku Electric Co Ltd | Probe needle and its manufacturing method |
US7235159B2 (en) | 2003-09-17 | 2007-06-26 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
US7258901B1 (en) | 2000-09-08 | 2007-08-21 | Fei Company | Directed growth of nanotubes on a catalyst |
WO2009098346A1 (en) * | 2008-02-05 | 2009-08-13 | Consejo Superior De Investigaciones Cientificas | Method and system for reducing or eliminating the greenhouse-gas content of a gas or mixture of gases |
US7666708B2 (en) | 2000-08-22 | 2010-02-23 | President And Fellows Of Harvard College | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
CN101209833B (en) * | 2006-12-27 | 2010-09-29 | 清华大学 | Preparation of carbon nano-tube array |
US7858965B2 (en) | 2005-06-06 | 2010-12-28 | President And Fellows Of Harvard College | Nanowire heterostructures |
US7910064B2 (en) | 2003-06-03 | 2011-03-22 | Nanosys, Inc. | Nanowire-based sensor configurations |
US7911009B2 (en) | 2000-12-11 | 2011-03-22 | President And Fellows Of Harvard College | Nanosensors |
US8058640B2 (en) | 2006-09-11 | 2011-11-15 | President And Fellows Of Harvard College | Branched nanoscale wires |
US8154002B2 (en) | 2004-12-06 | 2012-04-10 | President And Fellows Of Harvard College | Nanoscale wire-based data storage |
US8232584B2 (en) | 2005-05-25 | 2012-07-31 | President And Fellows Of Harvard College | Nanoscale sensors |
US8502277B2 (en) | 2003-08-29 | 2013-08-06 | Japan Science And Technology Agency | Field-effect transistor, single-electron transistor and sensor using the same |
US8575663B2 (en) | 2006-11-22 | 2013-11-05 | President And Fellows Of Harvard College | High-sensitivity nanoscale wire sensors |
US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
US8964943B2 (en) | 2010-10-07 | 2015-02-24 | Moxtek, Inc. | Polymer layer on X-ray window |
US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
US9076628B2 (en) | 2011-05-16 | 2015-07-07 | Brigham Young University | Variable radius taper x-ray window support structure |
US9102521B2 (en) | 2006-06-12 | 2015-08-11 | President And Fellows Of Harvard College | Nanosensors and related technologies |
US9173623B2 (en) | 2013-04-19 | 2015-11-03 | Samuel Soonho Lee | X-ray tube and receiver inside mouth |
US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
US9297796B2 (en) | 2009-09-24 | 2016-03-29 | President And Fellows Of Harvard College | Bent nanowires and related probing of species |
US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
US9390951B2 (en) | 2009-05-26 | 2016-07-12 | Sharp Kabushiki Kaisha | Methods and systems for electric field deposition of nanowires and other devices |
Families Citing this family (439)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3740295B2 (en) * | 1997-10-30 | 2006-02-01 | キヤノン株式会社 | Carbon nanotube device, manufacturing method thereof, and electron-emitting device |
US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
US7416699B2 (en) * | 1998-08-14 | 2008-08-26 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube devices |
US7150864B1 (en) * | 1998-09-18 | 2006-12-19 | William Marsh Rice University | Ropes comprised of single-walled and double-walled carbon nanotubes |
US6692717B1 (en) * | 1999-09-17 | 2004-02-17 | William Marsh Rice University | Catalytic growth of single-wall carbon nanotubes from metal particles |
US6597090B1 (en) | 1998-09-28 | 2003-07-22 | Xidex Corporation | Method for manufacturing carbon nanotubes as functional elements of MEMS devices |
US6666075B2 (en) * | 1999-02-05 | 2003-12-23 | Xidex Corporation | System and method of multi-dimensional force sensing for scanning probe microscopy |
US20060156798A1 (en) * | 2003-12-22 | 2006-07-20 | Vladimir Mancevski | Carbon nanotube excitation system |
IL129718A0 (en) * | 1999-05-02 | 2000-02-29 | Yeda Res & Dev | Synthesis of nanotubes of transition metal chalcogenides |
US6333016B1 (en) * | 1999-06-02 | 2001-12-25 | The Board Of Regents Of The University Of Oklahoma | Method of producing carbon nanotubes |
US7816709B2 (en) * | 1999-06-02 | 2010-10-19 | The Board Of Regents Of The University Of Oklahoma | Single-walled carbon nanotube-ceramic composites and methods of use |
US20030091496A1 (en) * | 2001-07-23 | 2003-05-15 | Resasco Daniel E. | Method and catalyst for producing single walled carbon nanotubes |
US7501091B2 (en) * | 1999-12-30 | 2009-03-10 | Smiths Detection Inc. | Sensors with improved properties |
KR100360470B1 (en) * | 2000-03-15 | 2002-11-09 | 삼성에스디아이 주식회사 | Method for depositing a vertically aligned carbon nanotubes using thermal chemical vapor deposition |
US6413487B1 (en) * | 2000-06-02 | 2002-07-02 | The Board Of Regents Of The University Of Oklahoma | Method and apparatus for producing carbon nanotubes |
US6919064B2 (en) * | 2000-06-02 | 2005-07-19 | The Board Of Regents Of The University Of Oklahoma | Process and apparatus for producing single-walled carbon nanotubes |
DE10035365B4 (en) * | 2000-07-20 | 2005-02-10 | Infineon Technologies Ag | Method of inferring the existence of light from a dye-bound nanotube |
US7301199B2 (en) * | 2000-08-22 | 2007-11-27 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
US20060175601A1 (en) * | 2000-08-22 | 2006-08-10 | President And Fellows Of Harvard College | Nanoscale wires and related devices |
KR100376768B1 (en) * | 2000-08-23 | 2003-03-19 | 한국과학기술연구원 | Parallel and selective growth and connection method of carbon nanotubes on the substrates for electronic-spintronic device applications |
US6591658B1 (en) * | 2000-10-25 | 2003-07-15 | Advanced Micro Devices, Inc. | Carbon nanotubes as linewidth standards for SEM & AFM |
US6737939B2 (en) * | 2001-03-30 | 2004-05-18 | California Institute Of Technology | Carbon nanotube array RF filter |
US6803840B2 (en) * | 2001-03-30 | 2004-10-12 | California Institute Of Technology | Pattern-aligned carbon nanotube growth and tunable resonator apparatus |
US6689835B2 (en) * | 2001-04-27 | 2004-02-10 | General Electric Company | Conductive plastic compositions and method of manufacture thereof |
JP2002340506A (en) * | 2001-05-11 | 2002-11-27 | Seiko Instruments Inc | Position detection and electronic clock hand position detector using the same |
JP3948223B2 (en) * | 2001-05-30 | 2007-07-25 | 株式会社日立製作所 | Gene sequence reader |
US20030048619A1 (en) * | 2001-06-15 | 2003-03-13 | Kaler Eric W. | Dielectrophoretic assembling of electrically functional microwires |
US7186381B2 (en) * | 2001-07-20 | 2007-03-06 | Regents Of The University Of California | Hydrogen gas sensor |
US6835591B2 (en) * | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
US6919592B2 (en) | 2001-07-25 | 2005-07-19 | Nantero, Inc. | Electromechanical memory array using nanotube ribbons and method for making same |
US7259410B2 (en) * | 2001-07-25 | 2007-08-21 | Nantero, Inc. | Devices having horizontally-disposed nanofabric articles and methods of making the same |
US6924538B2 (en) * | 2001-07-25 | 2005-08-02 | Nantero, Inc. | Devices having vertically-disposed nanofabric articles and methods of making the same |
US7566478B2 (en) * | 2001-07-25 | 2009-07-28 | Nantero, Inc. | Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7563711B1 (en) * | 2001-07-25 | 2009-07-21 | Nantero, Inc. | Method of forming a carbon nanotube-based contact to semiconductor |
US6706402B2 (en) * | 2001-07-25 | 2004-03-16 | Nantero, Inc. | Nanotube films and articles |
KR100455284B1 (en) * | 2001-08-14 | 2004-11-12 | 삼성전자주식회사 | High-throughput sensor for detecting biomolecules using carbon nanotubes |
US6897603B2 (en) * | 2001-08-24 | 2005-05-24 | Si Diamond Technology, Inc. | Catalyst for carbon nanotube growth |
DE10144704B4 (en) * | 2001-09-11 | 2007-10-04 | Infineon Technologies Ag | Method for connecting a component to a carrier |
US7183228B1 (en) | 2001-11-01 | 2007-02-27 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube growth |
US7318908B1 (en) * | 2001-11-01 | 2008-01-15 | The Board Of Trustees Of The Leland Stanford Junior University | Integrated nanotube sensor |
US7022541B1 (en) | 2001-11-19 | 2006-04-04 | The Board Of Trustees Of The Leland Stanford Junior University | Patterned growth of single-walled carbon nanotubes from elevated wafer structures |
US20030124717A1 (en) * | 2001-11-26 | 2003-07-03 | Yuji Awano | Method of manufacturing carbon cylindrical structures and biopolymer detection device |
US20030143327A1 (en) * | 2001-12-05 | 2003-07-31 | Rudiger Schlaf | Method for producing a carbon nanotube |
US6835613B2 (en) * | 2001-12-06 | 2004-12-28 | University Of South Florida | Method of producing an integrated circuit with a carbon nanotube |
FR2833935B1 (en) * | 2001-12-26 | 2004-01-30 | Commissariat Energie Atomique | METHOD FOR MANUFACTURING AT LEAST ONE NANOTUBE BETWEEN TWO ELECTRICALLY CONDUCTIVE ELEMENTS AND DEVICE FOR CARRYING OUT SUCH A METHOD |
US6784028B2 (en) | 2001-12-28 | 2004-08-31 | Nantero, Inc. | Methods of making electromechanical three-trace junction devices |
US20040132070A1 (en) * | 2002-01-16 | 2004-07-08 | Nanomix, Inc. | Nonotube-based electronic detection of biological molecules |
US20070178477A1 (en) * | 2002-01-16 | 2007-08-02 | Nanomix, Inc. | Nanotube sensor devices for DNA detection |
US20040253741A1 (en) * | 2003-02-06 | 2004-12-16 | Alexander Star | Analyte detection in liquids with carbon nanotube field effect transistor devices |
US7956525B2 (en) | 2003-05-16 | 2011-06-07 | Nanomix, Inc. | Flexible nanostructure electronic devices |
US8154093B2 (en) | 2002-01-16 | 2012-04-10 | Nanomix, Inc. | Nano-electronic sensors for chemical and biological analytes, including capacitance and bio-membrane devices |
US7955559B2 (en) | 2005-11-15 | 2011-06-07 | Nanomix, Inc. | Nanoelectronic electrochemical test device |
US20030134433A1 (en) * | 2002-01-16 | 2003-07-17 | Nanomix, Inc. | Electronic sensing of chemical and biological agents using functionalized nanostructures |
US20050279987A1 (en) * | 2002-09-05 | 2005-12-22 | Alexander Star | Nanostructure sensor device with polymer recognition layer |
US20060228723A1 (en) * | 2002-01-16 | 2006-10-12 | Keith Bradley | System and method for electronic sensing of biomolecules |
US8152991B2 (en) | 2005-10-27 | 2012-04-10 | Nanomix, Inc. | Ammonia nanosensors, and environmental control system |
US7115305B2 (en) * | 2002-02-01 | 2006-10-03 | California Institute Of Technology | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials |
US20030148289A1 (en) * | 2002-02-04 | 2003-08-07 | Intel Corporation | Modified carbon nanotubes as molecular labels with application to DNA sequencing |
AU2003210961A1 (en) * | 2002-02-11 | 2003-09-04 | Rensselaer Polytechnic Institute | Directed assembly of highly-organized carbon nanotube architectures |
US20070035226A1 (en) * | 2002-02-11 | 2007-02-15 | Rensselaer Polytechnic Institute | Carbon nanotube hybrid structures |
US7504364B2 (en) * | 2002-03-01 | 2009-03-17 | Receptors Llc | Methods of making arrays and artificial receptors |
WO2003078652A2 (en) * | 2002-03-15 | 2003-09-25 | Nanomix, Inc. | Modification of selectivity for sensing for nanostructure device arrays |
US7522040B2 (en) * | 2004-04-20 | 2009-04-21 | Nanomix, Inc. | Remotely communicating, battery-powered nanostructure sensor devices |
US20070048180A1 (en) * | 2002-09-05 | 2007-03-01 | Gabriel Jean-Christophe P | Nanoelectronic breath analyzer and asthma monitor |
US7714398B2 (en) * | 2002-09-05 | 2010-05-11 | Nanomix, Inc. | Nanoelectronic measurement system for physiologic gases and improved nanosensor for carbon dioxide |
US7312095B1 (en) * | 2002-03-15 | 2007-12-25 | Nanomix, Inc. | Modification of selectivity for sensing for nanostructure sensing device arrays |
US20070048181A1 (en) * | 2002-09-05 | 2007-03-01 | Chang Daniel M | Carbon dioxide nanosensor, and respiratory CO2 monitors |
US7547931B2 (en) * | 2003-09-05 | 2009-06-16 | Nanomix, Inc. | Nanoelectronic capnometer adaptor including a nanoelectric sensor selectively sensitive to at least one gaseous constituent of exhaled breath |
US7955483B2 (en) * | 2002-03-18 | 2011-06-07 | Honeywell International Inc. | Carbon nanotube-based glucose sensor |
AU2003224723A1 (en) * | 2002-03-20 | 2003-10-08 | The Board Of Trustees Of The Leland Stanford Junior University | Molybdenum-based electrode with carbon nanotube growth |
US7112816B2 (en) * | 2002-04-12 | 2006-09-26 | University Of South Flordia | Carbon nanotube sensor and method of producing the same |
US6871528B2 (en) * | 2002-04-12 | 2005-03-29 | University Of South Florida | Method of producing a branched carbon nanotube for use with an atomic force microscope |
US20040022943A1 (en) * | 2002-04-12 | 2004-02-05 | Rudiger Schlaf | Carbon nanotube tweezer and a method of producing the same |
US7335395B2 (en) * | 2002-04-23 | 2008-02-26 | Nantero, Inc. | Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7381316B1 (en) | 2002-04-30 | 2008-06-03 | Northwestern University | Methods and related systems for carbon nanotube deposition |
US6689674B2 (en) * | 2002-05-07 | 2004-02-10 | Motorola, Inc. | Method for selective chemical vapor deposition of nanotubes |
US20040067530A1 (en) * | 2002-05-08 | 2004-04-08 | The Regents Of The University Of California | Electronic sensing of biomolecular processes |
US6774052B2 (en) * | 2002-06-19 | 2004-08-10 | Nantero, Inc. | Method of making nanotube permeable base transistor |
US7829622B2 (en) * | 2002-06-19 | 2010-11-09 | The Board Of Regents Of The University Of Oklahoma | Methods of making polymer composites containing single-walled carbon nanotubes |
US7948041B2 (en) | 2005-05-19 | 2011-05-24 | Nanomix, Inc. | Sensor having a thin-film inhibition layer |
US7013708B1 (en) * | 2002-07-11 | 2006-03-21 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube sensors |
AU2003261205A1 (en) | 2002-07-19 | 2004-02-09 | President And Fellows Of Harvard College | Nanoscale coherent optical components |
JP2005534515A (en) * | 2002-08-01 | 2005-11-17 | ステイト オブ オレゴン アクティング バイ アンド スルー ザ ステイト ボード オブ ハイヤー エデュケーション オン ビハーフ オブ ポートランド ステイト ユニバーシティー | Method for synthesizing nanoscale structure in place |
JP3804594B2 (en) * | 2002-08-02 | 2006-08-02 | 日本電気株式会社 | Catalyst supporting substrate, carbon nanotube growth method using the same, and transistor using carbon nanotubes |
US6809384B1 (en) * | 2002-08-09 | 2004-10-26 | Pts Corporation | Method and apparatus for protecting wiring and integrated circuit device |
US7098056B2 (en) * | 2002-08-09 | 2006-08-29 | Nanoink, Inc. | Apparatus, materials, and methods for fabrication and catalysis |
US20060263255A1 (en) * | 2002-09-04 | 2006-11-23 | Tzong-Ru Han | Nanoelectronic sensor system and hydrogen-sensitive functionalization |
US20070114573A1 (en) * | 2002-09-04 | 2007-05-24 | Tzong-Ru Han | Sensor device with heated nanostructure |
US20060057625A1 (en) * | 2002-09-16 | 2006-03-16 | Carlson Robert E | Scaffold-based artificial receptors and methods |
WO2005003326A2 (en) * | 2003-03-28 | 2005-01-13 | Receptors Llc. | Artificial receptors including reversibly immobilized building blocks and methods |
US20040137481A1 (en) * | 2002-09-16 | 2004-07-15 | Receptors Llc | Artificial receptor building blocks, components, and kits |
US20050136483A1 (en) * | 2003-09-03 | 2005-06-23 | Receptors Llc | Nanodevices employing combinatorial artificial receptors |
US20050037429A1 (en) * | 2003-03-28 | 2005-02-17 | Receptors Llc | Artificial receptors including reversibly immobilized building blocks and methods |
US7469076B2 (en) * | 2003-09-03 | 2008-12-23 | Receptors Llc | Sensors employing combinatorial artificial receptors |
US20050037381A1 (en) * | 2002-09-16 | 2005-02-17 | Receptors Llc | Artificial receptors, building blocks, and methods |
US7002215B1 (en) * | 2002-09-30 | 2006-02-21 | Pts Corporation | Floating entrance guard for preventing electrical short circuits |
DE10247679A1 (en) * | 2002-10-12 | 2004-04-22 | Fujitsu Ltd., Kawasaki | Semiconductor body structure, as a biosensor, has two thick layers of one material separated by a thin different intermediate layer forming a nano gap, with organic wire structures as the contacts |
US20040072994A1 (en) * | 2002-10-15 | 2004-04-15 | Herr Daniel J.C. | Nanostructures including controllably positioned and aligned synthetic nanotubes, and related methods |
US7037319B2 (en) * | 2002-10-15 | 2006-05-02 | Scimed Life Systems, Inc. | Nanotube paper-based medical device |
EP1560792B1 (en) * | 2002-10-29 | 2014-07-30 | President and Fellows of Harvard College | Carbon nanotube device fabrication |
US7253434B2 (en) * | 2002-10-29 | 2007-08-07 | President And Fellows Of Harvard College | Suspended carbon nanotube field effect transistor |
US6998103B1 (en) | 2002-11-15 | 2006-02-14 | The Regents Of The University Of California | Method for producing carbon nanotubes |
US6949931B2 (en) * | 2002-11-26 | 2005-09-27 | Honeywell International Inc. | Nanotube sensor |
AU2003298716A1 (en) * | 2002-11-27 | 2004-06-23 | Molecular Nanosystems, Inc. | Nanotube chemical sensor based on work function of electrodes |
US6780664B1 (en) | 2002-12-20 | 2004-08-24 | Advanced Micro Devices, Inc. | Nanotube tip for atomic force microscope |
TW580562B (en) * | 2002-12-30 | 2004-03-21 | Ind Tech Res Inst | Apparatus and method for controlling the length of a carbon nanotube |
CA2512181A1 (en) * | 2003-01-02 | 2004-07-22 | Bioforce Nanosciences, Inc. | Method and apparatus for molecular analysis in small sample volumes |
US7560136B2 (en) * | 2003-01-13 | 2009-07-14 | Nantero, Inc. | Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US7666382B2 (en) * | 2004-12-16 | 2010-02-23 | Nantero, Inc. | Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof |
AU2003205098A1 (en) * | 2003-01-13 | 2004-08-13 | Nantero, Inc. | Methods of using thin metal layers to make carbon nanotube films, layers, fabrics, ribbons, elements and articles |
US9574290B2 (en) | 2003-01-13 | 2017-02-21 | Nantero Inc. | Methods for arranging nanotube elements within nanotube fabrics and films |
US8937575B2 (en) | 2009-07-31 | 2015-01-20 | Nantero Inc. | Microstrip antenna elements and arrays comprising a shaped nanotube fabric layer and integrated two terminal nanotube select devices |
US7858185B2 (en) * | 2003-09-08 | 2010-12-28 | Nantero, Inc. | High purity nanotube fabrics and films |
US20050112051A1 (en) * | 2003-01-17 | 2005-05-26 | Duke University | Systems and methods for producing single-walled carbon nanotubes (SWNTS) on a substrate |
US7316061B2 (en) * | 2003-02-03 | 2008-01-08 | Intel Corporation | Packaging of integrated circuits with carbon nano-tube arrays to enhance heat dissipation through a thermal interface |
US7641863B2 (en) * | 2003-03-06 | 2010-01-05 | Ut-Battelle Llc | Nanoengineered membranes for controlled transport |
DE602004028298D1 (en) * | 2003-03-07 | 2010-09-02 | Seldon Technologies Llc | Cleaning liquids with nanomaterials |
US7419601B2 (en) * | 2003-03-07 | 2008-09-02 | Seldon Technologies, Llc | Nanomesh article and method of using the same for purifying fluids |
US20040186459A1 (en) * | 2003-03-20 | 2004-09-23 | Michael Shur | Fluid delivery to cells and sensing properties of cells using nanotubes |
US6918284B2 (en) * | 2003-03-24 | 2005-07-19 | The United States Of America As Represented By The Secretary Of The Navy | Interconnected networks of single-walled carbon nanotubes |
US7294877B2 (en) | 2003-03-28 | 2007-11-13 | Nantero, Inc. | Nanotube-on-gate FET structures and applications |
US7022976B1 (en) | 2003-04-02 | 2006-04-04 | Advanced Micro Devices, Inc. | Dynamically adjustable probe tips |
AU2003250225A1 (en) * | 2003-04-22 | 2004-11-19 | Commissariat A L'energie Atomique | A process for modifying at least one electrical property of a nanotube or a nanowire and a transistor incorporating it. |
US20040211942A1 (en) * | 2003-04-28 | 2004-10-28 | Clark Darren Cameron | Electrically conductive compositions and method of manufacture thereof |
CA2523911A1 (en) * | 2003-04-28 | 2004-11-11 | Leandro Balzano | Single-walled carbon nanotube-ceramic composites and methods of use |
WO2005031299A2 (en) * | 2003-05-14 | 2005-04-07 | Nantero, Inc. | Sensor platform using a non-horizontally oriented nanotube element |
US9234867B2 (en) | 2003-05-16 | 2016-01-12 | Nanomix, Inc. | Electrochemical nanosensors for biomolecule detection |
US20040232389A1 (en) * | 2003-05-22 | 2004-11-25 | Elkovitch Mark D. | Electrically conductive compositions and method of manufacture thereof |
TW200518337A (en) * | 2003-06-09 | 2005-06-01 | Nantero Inc | Non-volatile electromechanical field effect devices and circuits using same and methods of forming same |
KR100525764B1 (en) * | 2003-06-13 | 2005-11-04 | 한국과학기술원 | Biosensor using the conductive carbon nanotubes and method thereof |
US7118941B2 (en) * | 2003-06-25 | 2006-10-10 | Intel Corporation | Method of fabricating a composite carbon nanotube thermal interface device |
US7112472B2 (en) * | 2003-06-25 | 2006-09-26 | Intel Corporation | Methods of fabricating a composite carbon nanotube thermal interface device |
US20040262581A1 (en) * | 2003-06-27 | 2004-12-30 | Rodrigues David E. | Electrically conductive compositions and method of manufacture thereof |
US20050000438A1 (en) * | 2003-07-03 | 2005-01-06 | Lim Brian Y. | Apparatus and method for fabrication of nanostructures using multiple prongs of radiating energy |
US20050156157A1 (en) * | 2003-07-21 | 2005-07-21 | Parsons Gregory N. | Hierarchical assembly of interconnects for molecular electronics |
US20050029498A1 (en) * | 2003-08-08 | 2005-02-10 | Mark Elkovitch | Electrically conductive compositions and method of manufacture thereof |
US20050036905A1 (en) * | 2003-08-12 | 2005-02-17 | Matsushita Electric Works, Ltd. | Defect controlled nanotube sensor and method of production |
US7026432B2 (en) * | 2003-08-12 | 2006-04-11 | General Electric Company | Electrically conductive compositions and method of manufacture thereof |
US7354988B2 (en) * | 2003-08-12 | 2008-04-08 | General Electric Company | Electrically conductive compositions and method of manufacture thereof |
US7583526B2 (en) | 2003-08-13 | 2009-09-01 | Nantero, Inc. | Random access memory including nanotube switching elements |
EP1665278A4 (en) * | 2003-08-13 | 2007-11-07 | Nantero Inc | Nanotube-based switching elements with multiple controls and circuits made from same |
US7375369B2 (en) * | 2003-09-08 | 2008-05-20 | Nantero, Inc. | Spin-coatable liquid for formation of high purity nanotube films |
US7416993B2 (en) * | 2003-09-08 | 2008-08-26 | Nantero, Inc. | Patterned nanowire articles on a substrate and methods of making the same |
JP2007505323A (en) * | 2003-09-12 | 2007-03-08 | ナノミックス・インコーポレーテッド | Nanoelectronic sensor for carbon dioxide |
US20050214197A1 (en) * | 2003-09-17 | 2005-09-29 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
US7309727B2 (en) * | 2003-09-29 | 2007-12-18 | General Electric Company | Conductive thermoplastic compositions, methods of manufacture and articles derived from such compositions |
US20050070658A1 (en) * | 2003-09-30 | 2005-03-31 | Soumyadeb Ghosh | Electrically conductive compositions, methods of manufacture thereof and articles derived from such compositions |
FR2860780B1 (en) * | 2003-10-13 | 2006-05-19 | Centre Nat Rech Scient | METHOD FOR SYNTHESIS OF NANOMETRIC FILAMENT STRUCTURES AND COMPONENTS FOR ELECTRONICS COMPRISING SUCH STRUCTURES |
US20060024227A1 (en) * | 2003-10-16 | 2006-02-02 | Shigeo Maruyama | Array of single-walled carbon nanotubes and process for preparaton thereof |
US20090068461A1 (en) * | 2003-10-16 | 2009-03-12 | The University Of Akron | Carbon nanotubes on carbon nanofiber substrate |
US6921684B2 (en) * | 2003-10-17 | 2005-07-26 | Intel Corporation | Method of sorting carbon nanotubes including protecting metallic nanotubes and removing the semiconducting nanotubes |
US7628974B2 (en) * | 2003-10-22 | 2009-12-08 | International Business Machines Corporation | Control of carbon nanotube diameter using CVD or PECVD growth |
WO2005066360A1 (en) * | 2003-12-05 | 2005-07-21 | Northwestern University | Micro/nano-fabricated glucose sensors using single-walled carbon nanotubes |
JP4238716B2 (en) * | 2003-12-15 | 2009-03-18 | 富士ゼロックス株式会社 | Electrode for electrochemical measurement and manufacturing method thereof |
CN1922347A (en) * | 2003-12-15 | 2007-02-28 | 丹尼尔·E·里萨斯科 | Rhenium catalysts and methods for production of single-walled carbon nanotubes |
JP4238715B2 (en) * | 2003-12-15 | 2009-03-18 | 富士ゼロックス株式会社 | Electrochemical measurement electrode |
US7618300B2 (en) * | 2003-12-24 | 2009-11-17 | Duke University | Method of synthesizing small-diameter carbon nanotubes with electron field emission properties |
WO2005067059A1 (en) * | 2003-12-26 | 2005-07-21 | Fuji Xerox Co., Ltd. | Rectifying device and electronic circuit employing same, and process for producing rectifying device |
US20050151126A1 (en) * | 2003-12-31 | 2005-07-14 | Intel Corporation | Methods of producing carbon nanotubes using peptide or nucleic acid micropatterning |
US7276285B2 (en) * | 2003-12-31 | 2007-10-02 | Honeywell International Inc. | Nanotube fabrication basis |
AU2004314423A1 (en) * | 2004-01-09 | 2005-08-04 | The Board Of Regents Of The University Of Oklahoma | Carbon nanotube pastes and methods of use |
JP3837568B2 (en) * | 2004-01-23 | 2006-10-25 | 国立大学法人 東京大学 | Carbon nanotube manufacturing method and manufacturing apparatus |
US7052618B2 (en) * | 2004-01-28 | 2006-05-30 | Agilent Technologies, Inc. | Nanostructures and methods of making the same |
US7229692B2 (en) * | 2004-02-09 | 2007-06-12 | Ut-Battelle Llc | Nanoconduits and nanoreplicants |
US7528437B2 (en) * | 2004-02-11 | 2009-05-05 | Nantero, Inc. | EEPROMS using carbon nanotubes for cell storage |
US7338684B1 (en) * | 2004-02-12 | 2008-03-04 | Performance Polymer Solutions, Inc. | Vapor grown carbon fiber reinforced composite materials and methods of making and using same |
US20090227107A9 (en) * | 2004-02-13 | 2009-09-10 | President And Fellows Of Havard College | Nanostructures Containing Metal Semiconductor Compounds |
CN1310024C (en) * | 2004-02-28 | 2007-04-11 | 鸿富锦精密工业(深圳)有限公司 | Probe unit of microscope with atomic force and manufacturing method |
AU2005219413A1 (en) * | 2004-03-02 | 2005-09-15 | Massachusetts Institute Of Technology | Nanocell drug delivery system |
US20070053845A1 (en) * | 2004-03-02 | 2007-03-08 | Shiladitya Sengupta | Nanocell drug delivery system |
KR100583769B1 (en) * | 2004-03-17 | 2006-05-26 | 한국과학기술원 | Carbon Nanotube Cartridge Manufacturing Unit |
US7341651B2 (en) * | 2004-03-22 | 2008-03-11 | The Regents Of The University Of California | Nanoscale mass conveyors |
US7276283B2 (en) * | 2004-03-24 | 2007-10-02 | Wisconsin Alumni Research Foundation | Plasma-enhanced functionalization of carbon-containing substrates |
JP4448356B2 (en) * | 2004-03-26 | 2010-04-07 | 富士通株式会社 | Semiconductor device and manufacturing method thereof |
US20050221473A1 (en) * | 2004-03-30 | 2005-10-06 | Intel Corporation | Sensor array integrated circuits |
US20050233263A1 (en) * | 2004-04-20 | 2005-10-20 | Applied Materials, Inc. | Growth of carbon nanotubes at low temperature |
US20050238810A1 (en) * | 2004-04-26 | 2005-10-27 | Mainstream Engineering Corp. | Nanotube/metal substrate composites and methods for producing such composites |
WO2006041535A2 (en) * | 2004-05-05 | 2006-04-20 | California Institute Of Technology | Capillary lithography of nanofiber arrays |
CN101010137B (en) * | 2004-05-13 | 2011-02-02 | 国立大学法人北海道大学 | Fine carbon dispersion |
US8075863B2 (en) | 2004-05-26 | 2011-12-13 | Massachusetts Institute Of Technology | Methods and devices for growth and/or assembly of nanostructures |
US7147534B2 (en) * | 2004-06-04 | 2006-12-12 | Teco Nanotech Co., Ltd. | Patterned carbon nanotube process |
US7709880B2 (en) * | 2004-06-09 | 2010-05-04 | Nantero, Inc. | Field effect devices having a gate controlled via a nanotube switching element |
US20070264623A1 (en) * | 2004-06-15 | 2007-11-15 | President And Fellows Of Harvard College | Nanosensors |
US7161403B2 (en) | 2004-06-18 | 2007-01-09 | Nantero, Inc. | Storage elements using nanotube switching elements |
US7164744B2 (en) | 2004-06-18 | 2007-01-16 | Nantero, Inc. | Nanotube-based logic driver circuits |
KR100617470B1 (en) | 2004-06-18 | 2006-08-29 | 전자부품연구원 | AFM cantilever having a carbon nanotube transistor and method for manufacturing the same |
US7652342B2 (en) | 2004-06-18 | 2010-01-26 | Nantero, Inc. | Nanotube-based transfer devices and related circuits |
US7194912B2 (en) * | 2004-07-13 | 2007-03-27 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Carbon nanotube-based sensor and method for continually sensing changes in a structure |
US7597788B2 (en) * | 2004-07-20 | 2009-10-06 | Applied Nanotech Holdings, Inc. | Oxygen-chemical agent sensor |
WO2007013872A2 (en) | 2004-07-22 | 2007-02-01 | The Board Of Trustees Of The University Of Illinois | Sensors employing single-walled carbon nanotubes |
US7129097B2 (en) * | 2004-07-29 | 2006-10-31 | International Business Machines Corporation | Integrated circuit chip utilizing oriented carbon nanotube conductive layers |
US20060042364A1 (en) * | 2004-08-31 | 2006-03-02 | Hongtao Cui | Angled tip for a scanning force microscope |
US7129567B2 (en) * | 2004-08-31 | 2006-10-31 | Micron Technology, Inc. | Substrate, semiconductor die, multichip module, and system including a via structure comprising a plurality of conductive elements |
US20070287202A1 (en) * | 2004-08-31 | 2007-12-13 | Kenzo Maehashi | Method for Producing Nano-Scale Low-Dimensional Quantum Structure, and Method for Producing Integrated Circuit Using the Method for Producing the Structure |
SG135065A1 (en) * | 2006-02-20 | 2007-09-28 | Micron Technology Inc | Conductive vias having two or more elements for providing communication between traces in different substrate planes, semiconductor device assemblies including such vias, and accompanying methods |
WO2006028930A2 (en) | 2004-09-03 | 2006-03-16 | Receptors Llc | Combinatorial artificial receptors including tether building blocks on scaffolds |
EP1789792A2 (en) * | 2004-09-11 | 2007-05-30 | Receptors LLC | Combinatorial artificial receptors including peptide building blocks |
WO2006121461A2 (en) * | 2004-09-16 | 2006-11-16 | Nantero, Inc. | Light emitters using nanotubes and methods of making same |
US20060084570A1 (en) * | 2004-09-21 | 2006-04-20 | Kopley Thomas E | System and method for growing nanostructures from a periphery of a catalyst layer |
CA2581058C (en) * | 2004-09-21 | 2012-06-26 | Nantero, Inc. | Resistive elements using carbon nanotubes |
US7863798B2 (en) * | 2004-10-04 | 2011-01-04 | The Regents Of The University Of California | Nanocrystal powered nanomotor |
US20070240757A1 (en) * | 2004-10-15 | 2007-10-18 | The Trustees Of Boston College | Solar cells using arrays of optical rectennas |
US20080090183A1 (en) * | 2004-10-22 | 2008-04-17 | Lingbo Zhu | Aligned Carbon Nanotubes And Method For Construction Thereof |
JP2006125846A (en) * | 2004-10-26 | 2006-05-18 | Olympus Corp | Cantilever |
US8021967B2 (en) * | 2004-11-01 | 2011-09-20 | California Institute Of Technology | Nanoscale wicking methods and devices |
EP1807919A4 (en) * | 2004-11-02 | 2011-05-04 | Nantero Inc | Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches |
US20100147657A1 (en) * | 2004-11-02 | 2010-06-17 | Nantero, Inc. | Nanotube esd protective devices and corresponding nonvolatile and volatile nanotube switches |
US7926440B1 (en) | 2004-11-27 | 2011-04-19 | Etamota Corporation | Nanostructure synthesis apparatus and method |
US7348592B2 (en) | 2004-11-29 | 2008-03-25 | The United States Of America As Represented By The Secretary Of The Navy | Carbon nanotube apparatus and method of carbon nanotube modification |
US9005331B2 (en) | 2004-12-22 | 2015-04-14 | Brookhaven Science Associates, Llc | Platinum-coated non-noble metal-noble metal core-shell electrocatalysts |
US7855021B2 (en) | 2004-12-22 | 2010-12-21 | Brookhaven Science Associates, Llc | Electrocatalysts having platium monolayers on palladium, palladium alloy, and gold alloy core-shell nanoparticles, and uses thereof |
US7691780B2 (en) * | 2004-12-22 | 2010-04-06 | Brookhaven Science Associates, Llc | Platinum- and platinum alloy-coated palladium and palladium alloy particles and uses thereof |
KR100635546B1 (en) * | 2004-12-24 | 2006-10-17 | 학교법인 포항공과대학교 | Probe of scanning probe microscope having a field effect transistor channel and Fabrication method thereof |
US7920169B2 (en) * | 2005-01-31 | 2011-04-05 | Invention Science Fund I, Llc | Proximity of shared image devices |
US7462656B2 (en) * | 2005-02-15 | 2008-12-09 | Sabic Innovative Plastics Ip B.V. | Electrically conductive compositions and method of manufacture thereof |
CN1830753A (en) * | 2005-03-10 | 2006-09-13 | 清华大学 | Assembling method of carbon nanometer pipe and carbon nanometer pipe device |
EP1861072A2 (en) * | 2005-03-14 | 2007-12-05 | Massachusetts Institute Of Technology | Nanocells for diagnosis and treatment of diseases and disorders |
US7776269B2 (en) * | 2005-03-15 | 2010-08-17 | The United States Of America As Represented By The Secretary Of The Navy | Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes |
US20060210467A1 (en) * | 2005-03-17 | 2006-09-21 | Smith Steven M | Producing a stable catalyst for nanotube growth |
US20060213251A1 (en) * | 2005-03-24 | 2006-09-28 | University Of Florida Research Foundation, Inc. | Carbon nanotube films for hydrogen sensing |
CN1840465B (en) * | 2005-03-30 | 2010-09-29 | 清华大学 | Method for manufacturing unidimensional nano material device |
CN100572260C (en) * | 2005-03-31 | 2009-12-23 | 清华大学 | The manufacture method of unidimensional nano material device |
US20060220006A1 (en) * | 2005-04-01 | 2006-10-05 | Yong Chen | Molecular-doped transistor and sensor |
US8941094B2 (en) | 2010-09-02 | 2015-01-27 | Nantero Inc. | Methods for adjusting the conductivity range of a nanotube fabric layer |
US9390790B2 (en) | 2005-04-05 | 2016-07-12 | Nantero Inc. | Carbon based nonvolatile cross point memory incorporating carbon based diode select devices and MOSFET select devices for memory and logic applications |
US8000127B2 (en) | 2009-08-12 | 2011-08-16 | Nantero, Inc. | Method for resetting a resistive change memory element |
US9287356B2 (en) | 2005-05-09 | 2016-03-15 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
CN102183630A (en) * | 2005-04-06 | 2011-09-14 | 哈佛大学校长及研究员协会 | Molecular characterization with carbon nanotube control |
US20060231946A1 (en) * | 2005-04-14 | 2006-10-19 | Molecular Nanosystems, Inc. | Nanotube surface coatings for improved wettability |
US7596751B2 (en) * | 2005-04-22 | 2009-09-29 | Hewlett-Packard Development Company, L.P. | Contact sheet based image management |
US20060251897A1 (en) * | 2005-05-06 | 2006-11-09 | Molecular Nanosystems, Inc. | Growth of carbon nanotubes to join surfaces |
US9911743B2 (en) | 2005-05-09 | 2018-03-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7835170B2 (en) * | 2005-05-09 | 2010-11-16 | Nantero, Inc. | Memory elements and cross point switches and arrays of same using nonvolatile nanotube blocks |
US7781862B2 (en) * | 2005-05-09 | 2010-08-24 | Nantero, Inc. | Two-terminal nanotube devices and systems and methods of making same |
US8217490B2 (en) * | 2005-05-09 | 2012-07-10 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7479654B2 (en) * | 2005-05-09 | 2009-01-20 | Nantero, Inc. | Memory arrays using nanotube articles with reprogrammable resistance |
US8008745B2 (en) * | 2005-05-09 | 2011-08-30 | Nantero, Inc. | Latch circuits and operation circuits having scalable nonvolatile nanotube switches as electronic fuse replacement elements |
US8513768B2 (en) * | 2005-05-09 | 2013-08-20 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US9196615B2 (en) * | 2005-05-09 | 2015-11-24 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US7394687B2 (en) * | 2005-05-09 | 2008-07-01 | Nantero, Inc. | Non-volatile-shadow latch using a nanotube switch |
US8183665B2 (en) * | 2005-11-15 | 2012-05-22 | Nantero Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
TWI324773B (en) * | 2005-05-09 | 2010-05-11 | Nantero Inc | Non-volatile shadow latch using a nanotube switch |
US7782650B2 (en) * | 2005-05-09 | 2010-08-24 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
US8102018B2 (en) * | 2005-05-09 | 2012-01-24 | Nantero Inc. | Nonvolatile resistive memories having scalable two-terminal nanotube switches |
US8013363B2 (en) * | 2005-05-09 | 2011-09-06 | Nantero, Inc. | Nonvolatile nanotube diodes and nonvolatile nanotube blocks and systems using same and methods of making same |
WO2007078316A2 (en) | 2005-05-10 | 2007-07-12 | The Regents Of The University Of California | Tapered probe structures and fabrication |
US7598127B2 (en) | 2005-05-12 | 2009-10-06 | Nantero, Inc. | Nanotube fuse structure |
US20060255333A1 (en) * | 2005-05-12 | 2006-11-16 | Kuekes Philip J | Method of forming a controlled distribution of nano-particles on a surface |
WO2006119549A1 (en) * | 2005-05-12 | 2006-11-16 | Very Small Particle Company Pty Ltd | Improved catalyst |
TWI264271B (en) * | 2005-05-13 | 2006-10-11 | Delta Electronics Inc | Heat sink |
US7575693B2 (en) * | 2005-05-23 | 2009-08-18 | Nantero, Inc. | Method of aligning nanotubes and wires with an etched feature |
US7915122B2 (en) * | 2005-06-08 | 2011-03-29 | Nantero, Inc. | Self-aligned cell integration scheme |
US20060278866A1 (en) * | 2005-06-08 | 2006-12-14 | Alexander Star | Nanotube optoelectronic memory devices |
US7278324B2 (en) * | 2005-06-15 | 2007-10-09 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Carbon nanotube-based sensor and method for detection of crack growth in a structure |
US7439731B2 (en) | 2005-06-24 | 2008-10-21 | Crafts Douglas E | Temporary planar electrical contact device and method using vertically-compressible nanotube contact structures |
US20060292716A1 (en) * | 2005-06-27 | 2006-12-28 | Lsi Logic Corporation | Use selective growth metallization to improve electrical connection between carbon nanotubes and electrodes |
JP5443756B2 (en) | 2005-06-28 | 2014-03-19 | ザ ボード オブ リージェンツ オブ ザ ユニバーシティ オブ オクラホマ | Method for growing and collecting carbon nanotubes |
US7538040B2 (en) * | 2005-06-30 | 2009-05-26 | Nantero, Inc. | Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers |
US7623972B1 (en) | 2005-07-08 | 2009-11-24 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Detection of presence of chemical precursors |
US8000903B1 (en) * | 2005-07-08 | 2011-08-16 | The United States of America as represented by the Administrator of the National Aeronautics and Space Asministration (NASA) | Coated or doped carbon nanotube network sensors as affected by environmental parameters |
US7801687B1 (en) * | 2005-07-08 | 2010-09-21 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) | Chemical sensors using coated or doped carbon nanotube networks |
US7875455B1 (en) | 2005-07-08 | 2011-01-25 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration (Nasa) | Real time oil reservoir evaluation using nanotechnology |
US7736616B2 (en) * | 2005-07-14 | 2010-06-15 | Colorado School Of Mines | Membrane separation of feed and growth environments in carbon nanostructure growth |
US7645482B2 (en) * | 2005-08-04 | 2010-01-12 | The Regents Of The University Of California | Method to make and use long single-walled carbon nanotubes as electrical conductors |
US7718224B2 (en) * | 2005-08-04 | 2010-05-18 | The Regents Of The University Of California | Synthesis of single-walled carbon nanotubes |
US7170055B1 (en) * | 2005-08-18 | 2007-01-30 | The Board Of Trustees Of The Leland Stanford Junior University | Nanotube arrangements and methods therefor |
CN100336192C (en) * | 2005-08-18 | 2007-09-05 | 上海交通大学 | Method for bonding nanometer material on metal electrode |
KR100697323B1 (en) * | 2005-08-19 | 2007-03-20 | 한국기계연구원 | Nano tip and fabrication method of the same |
US8268405B2 (en) | 2005-08-23 | 2012-09-18 | Uwm Research Foundation, Inc. | Controlled decoration of carbon nanotubes with aerosol nanoparticles |
US8240190B2 (en) * | 2005-08-23 | 2012-08-14 | Uwm Research Foundation, Inc. | Ambient-temperature gas sensor |
EP1917557A4 (en) | 2005-08-24 | 2015-07-22 | Trustees Boston College | Apparatus and methods for solar energy conversion using nanoscale cometal structures |
US7649665B2 (en) * | 2005-08-24 | 2010-01-19 | The Trustees Of Boston College | Apparatus and methods for optical switching using nanoscale optics |
US7623746B2 (en) * | 2005-08-24 | 2009-11-24 | The Trustees Of Boston College | Nanoscale optical microscope |
US7589880B2 (en) * | 2005-08-24 | 2009-09-15 | The Trustees Of Boston College | Apparatus and methods for manipulating light using nanoscale cometal structures |
US7754964B2 (en) * | 2005-08-24 | 2010-07-13 | The Trustees Of Boston College | Apparatus and methods for solar energy conversion using nanocoax structures |
US9084546B2 (en) * | 2005-08-31 | 2015-07-21 | The Regents Of The University Of Michigan | Co-electrodeposited hydrogel-conducting polymer electrodes for biomedical applications |
US7682453B2 (en) * | 2005-09-01 | 2010-03-23 | Ut-Battelle, Llc | System and method for controlling hydrogen elimination during carbon nanotube synthesis from hydrocarbons |
US7850778B2 (en) * | 2005-09-06 | 2010-12-14 | Lemaire Charles A | Apparatus and method for growing fullerene nanotube forests, and forming nanotube films, threads and composite structures therefrom |
WO2007030483A2 (en) * | 2005-09-06 | 2007-03-15 | Nantero, Inc. | Method and system of using nanotube fabrics as joule heating elements for memories and other applications |
US7744793B2 (en) | 2005-09-06 | 2010-06-29 | Lemaire Alexander B | Apparatus and method for growing fullerene nanotube forests, and forming nanotube films, threads and composite structures therefrom |
US7927992B2 (en) * | 2005-09-06 | 2011-04-19 | Nantero, Inc. | Carbon nanotubes for the selective transfer of heat from electronics |
WO2007030484A2 (en) * | 2005-09-06 | 2007-03-15 | Nantero, Inc. | Nanotube fabric-based sensor systems and methods of making same |
US7371677B2 (en) * | 2005-09-30 | 2008-05-13 | Freescale Semiconductor, Inc. | Laterally grown nanotubes and method of formation |
TW200730436A (en) * | 2005-12-19 | 2007-08-16 | Advanced Tech Materials | Production of carbon nanotubes |
US7544523B2 (en) * | 2005-12-23 | 2009-06-09 | Fei Company | Method of fabricating nanodevices |
KR101159074B1 (en) * | 2006-01-14 | 2012-06-25 | 삼성전자주식회사 | Conductive carbon nanotube tip, probe of scanning probe microscope comprising the same and manufacturing method of the conductive carbon nanotube tip |
US7417119B2 (en) * | 2006-01-17 | 2008-08-26 | Sri International | Nanoscale array biomolecular bond enhancer device |
WO2007089550A2 (en) | 2006-01-26 | 2007-08-09 | Nanoselect, Inc. | Cnt-based sensors: devices, processes and uses thereof |
US20090278556A1 (en) * | 2006-01-26 | 2009-11-12 | Nanoselect, Inc. | Carbon Nanostructure Electrode Based Sensors: Devices, Processes and Uses Thereof |
US20070176255A1 (en) * | 2006-01-31 | 2007-08-02 | Franz Kreupl | Integrated circuit arrangement |
US20070207182A1 (en) * | 2006-03-06 | 2007-09-06 | Jan Weber | Medical devices having electrically aligned elongated particles |
US7638169B2 (en) * | 2006-03-28 | 2009-12-29 | Intel Corporation | Directing carbon nanotube growth |
US20070227700A1 (en) * | 2006-03-29 | 2007-10-04 | Dimitrakopoulos Christos D | VLSI chip hot-spot minimization using nanotubes |
US7796999B1 (en) | 2006-04-03 | 2010-09-14 | Sprint Spectrum L.P. | Method and system for network-directed media buffer-size setting based on device features |
KR100874026B1 (en) * | 2006-04-04 | 2008-12-17 | 재단법인서울대학교산학협력재단 | Biosensor using nanowires and its manufacturing method |
KR100839226B1 (en) | 2006-04-06 | 2008-06-17 | 주식회사 지오모바일 | Method for measuring crack using sensor including carbon nanotubes, and method for measuring corrosion using the sensor |
WO2007117503A2 (en) | 2006-04-07 | 2007-10-18 | The Trustees Of Columbia University In The City Of New York | Preparing nanoparticles and carbon nanotubes |
US20070237706A1 (en) | 2006-04-10 | 2007-10-11 | International Business Machines Corporation | Embedded nanoparticle films and method for their formation in selective areas on a surface |
US20100117764A1 (en) * | 2006-04-17 | 2010-05-13 | Board Of Regents, The University Of Texas System | Assisted selective growth of highly dense and vertically aligned carbon nanotubes |
US20100075137A1 (en) * | 2006-05-17 | 2010-03-25 | Lockheed Martin Corporation | Carbon nanotube synthesis using refractory metal nanoparticles and manufacture of refractory metal nanoparticles |
US7736414B1 (en) | 2006-05-17 | 2010-06-15 | Lockheed Martin Corporation | Rhenium nanoparticles |
KR20080006911A (en) * | 2006-07-14 | 2008-01-17 | 전자부품연구원 | Afm cantilever and method for manufacturing the same |
US8936794B2 (en) * | 2006-08-25 | 2015-01-20 | The Regents Of The University Of Michigan | Conducting polymer nanotube actuators for precisely controlled release of medicine and bioactive molecules |
WO2008097275A2 (en) * | 2006-08-30 | 2008-08-14 | Molecular Nanosystems, Inc. | Methods for forming freestanding nanotube objects and objects so formed |
US8130007B2 (en) | 2006-10-16 | 2012-03-06 | Formfactor, Inc. | Probe card assembly with carbon nanotube probes having a spring mechanism therein |
US8354855B2 (en) * | 2006-10-16 | 2013-01-15 | Formfactor, Inc. | Carbon nanotube columns and methods of making and using carbon nanotube columns as probes |
WO2008060455A2 (en) | 2006-11-09 | 2008-05-22 | Nanosys, Inc. | Methods for nanowire alignment and deposition |
KR100806296B1 (en) * | 2006-11-10 | 2008-02-22 | 한국기초과학지원연구원 | Methods for manufacturing li-doped silica nanotube using anodic aluminum oxide template |
CA2670073A1 (en) | 2006-11-17 | 2008-11-06 | The Trustees Of Boston College | Nanoscale sensors |
US8029902B2 (en) * | 2006-12-11 | 2011-10-04 | Wisconsin Alumni Research Foundation | Plasma-enhanced functionalization of substrate surfaces with quaternary ammonium and quaternary phosphonium groups |
US9005755B2 (en) | 2007-01-03 | 2015-04-14 | Applied Nanostructured Solutions, Llc | CNS-infused carbon nanomaterials and process therefor |
US8951631B2 (en) | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused metal fiber materials and process therefor |
US20120189846A1 (en) * | 2007-01-03 | 2012-07-26 | Lockheed Martin Corporation | Cnt-infused ceramic fiber materials and process therefor |
US9806273B2 (en) * | 2007-01-03 | 2017-10-31 | The United States Of America As Represented By The Secretary Of The Army | Field effect transistor array using single wall carbon nano-tubes |
US20100279569A1 (en) * | 2007-01-03 | 2010-11-04 | Lockheed Martin Corporation | Cnt-infused glass fiber materials and process therefor |
US8951632B2 (en) * | 2007-01-03 | 2015-02-10 | Applied Nanostructured Solutions, Llc | CNT-infused carbon fiber materials and process therefor |
JP4825697B2 (en) * | 2007-01-25 | 2011-11-30 | 株式会社ミツトヨ | Digital displacement measuring instrument |
US7723684B1 (en) * | 2007-01-30 | 2010-05-25 | The Regents Of The University Of California | Carbon nanotube based detector |
CN101627479B (en) * | 2007-01-30 | 2011-06-15 | 索拉斯特公司 | Photovoltaic cell and method of making thereof |
JP2010518623A (en) * | 2007-02-12 | 2010-05-27 | ソーラスタ インコーポレイテッド | Photocell with reduced hot carrier cooling |
US20080238882A1 (en) * | 2007-02-21 | 2008-10-02 | Ramesh Sivarajan | Symmetric touch screen system with carbon nanotube-based transparent conductive electrode pairs |
JP4224109B2 (en) * | 2007-03-02 | 2009-02-12 | コーア株式会社 | Laminated body and method for producing the same |
JP5204758B2 (en) * | 2007-03-05 | 2013-06-05 | シャープ株式会社 | Chemical sensing element |
WO2008112764A1 (en) | 2007-03-12 | 2008-09-18 | Nantero, Inc. | Electromagnetic and thermal sensors using carbon nanotubes and methods of making same |
US7892610B2 (en) * | 2007-05-07 | 2011-02-22 | Nanosys, Inc. | Method and system for printing aligned nanowires and other electrical devices |
US8115187B2 (en) * | 2007-05-22 | 2012-02-14 | Nantero, Inc. | Triodes using nanofabric articles and methods of making the same |
US8367506B2 (en) | 2007-06-04 | 2013-02-05 | Micron Technology, Inc. | High-k dielectrics with gold nano-particles |
US7810314B2 (en) | 2007-06-12 | 2010-10-12 | Ford Global Technologies, Llc | Approach for controlling particulate matter in an engine |
WO2009002748A1 (en) | 2007-06-22 | 2008-12-31 | Nantero, Inc. | Two-terminal nanotube devices including a nanotube bridge and methods of making same |
KR20100039371A (en) * | 2007-07-03 | 2010-04-15 | 솔라스타, 인코포레이티드 | Distributed coax photovoltaic device |
EP2842582B1 (en) * | 2007-09-06 | 2018-06-20 | Boston Scientific Limited | Medical devices containing silicate and carbon particles |
WO2009085356A2 (en) * | 2007-10-01 | 2009-07-09 | University Of Southern California Usc Stevens | Methods of using and constructing nanosensor platforms |
US8470408B2 (en) * | 2007-10-02 | 2013-06-25 | President And Fellows Of Harvard College | Carbon nanotube synthesis for nanopore devices |
US8717046B2 (en) * | 2007-10-11 | 2014-05-06 | The Regents Of The University Of California | Nanotube resonator devices |
US8149007B2 (en) * | 2007-10-13 | 2012-04-03 | Formfactor, Inc. | Carbon nanotube spring contact structures with mechanical and electrical components |
US8063483B2 (en) * | 2007-10-18 | 2011-11-22 | International Business Machines Corporation | On-chip temperature gradient minimization using carbon nanotube cooling structures with variable cooling capacity |
EP2062515B1 (en) * | 2007-11-20 | 2012-08-29 | So, Kwok Kuen | Bowl and basket assembly and salad spinner incorporating such an assembly |
US20090236675A1 (en) * | 2008-03-21 | 2009-09-24 | National Tsing Hua University | Self-aligned field-effect transistor structure and manufacturing method thereof |
TWI502522B (en) * | 2008-03-25 | 2015-10-01 | Nantero Inc | Carbon nanotube-based neural networks and methods of making and using same |
FR2929464B1 (en) * | 2008-03-28 | 2011-09-09 | Commissariat Energie Atomique | NANO MAGNETIC RESONATOR |
US8776870B2 (en) * | 2008-05-07 | 2014-07-15 | The Regents Of The University Of California | Tunable thermal link |
KR101024325B1 (en) * | 2008-06-11 | 2011-03-24 | 서울대학교산학협력단 | biomolecular sensors with a plurality of metal plates and method of producing the same |
WO2009155359A1 (en) * | 2008-06-20 | 2009-12-23 | Nantero, Inc. | Nram arrays with nanotube blocks, nanotube traces, and nanotube planes and methods of making same |
KR101071325B1 (en) * | 2008-08-05 | 2011-10-07 | 재단법인서울대학교산학협력재단 | Circuit board comprising a aligned nanostructure and method for fabricating the circuit board |
US9263126B1 (en) | 2010-09-01 | 2016-02-16 | Nantero Inc. | Method for dynamically accessing and programming resistive change element arrays |
US8357921B2 (en) * | 2008-08-14 | 2013-01-22 | Nantero Inc. | Integrated three-dimensional semiconductor system comprising nonvolatile nanotube field effect transistors |
US8178787B2 (en) * | 2008-08-26 | 2012-05-15 | Snu R&Db Foundation | Circuit board including aligned nanostructures |
US8192685B2 (en) | 2008-11-04 | 2012-06-05 | Advanced Concepts And Technologies International, L.L.C. | Molecular separators, concentrators, and detectors preparatory to sensor operation, and methods of minimizing false positives in sensor operations |
US20100204062A1 (en) * | 2008-11-07 | 2010-08-12 | University Of Southern California | Calibration methods for multiplexed sensor arrays |
US7915637B2 (en) | 2008-11-19 | 2011-03-29 | Nantero, Inc. | Switching materials comprising mixed nanoscopic particles and carbon nanotubes and method of making and using the same |
US8039909B2 (en) * | 2008-11-26 | 2011-10-18 | International Business Machines Corporation | Semiconductor nanowires charge sensor |
JP4843077B2 (en) * | 2008-12-03 | 2011-12-21 | 韓國電子通信研究院 | Biosensor with transistor structure and manufacturing method thereof |
BRPI1008131A2 (en) * | 2009-02-27 | 2016-03-08 | Applied Nanostructured Sols | "low temperature carbon nanotube growth using gas preheat method". |
US20100224129A1 (en) * | 2009-03-03 | 2010-09-09 | Lockheed Martin Corporation | System and method for surface treatment and barrier coating of fibers for in situ cnt growth |
US20100252317A1 (en) * | 2009-04-03 | 2010-10-07 | Formfactor, Inc. | Carbon nanotube contact structures for use with semiconductor dies and other electronic devices |
US8272124B2 (en) * | 2009-04-03 | 2012-09-25 | Formfactor, Inc. | Anchoring carbon nanotube columns |
WO2010115143A1 (en) * | 2009-04-03 | 2010-10-07 | University Of Southern California | Surface modification of nanosensor platforms to increase sensitivity and reproducibility |
WO2010118381A1 (en) * | 2009-04-10 | 2010-10-14 | Lockheed Martin Corporation | Method and apparatus for using a vertical furnace to infuse carbon nanotubes to fiber |
DK2417286T3 (en) * | 2009-04-10 | 2015-08-17 | Applied Nanostructured Solutions Inc | Device and method for producing carbon nanotubes on a substrate that moves continuously |
US20100272891A1 (en) * | 2009-04-10 | 2010-10-28 | Lockheed Martin Corporation | Apparatus and method for the production of carbon nanotubes on a continuously moving substrate |
US20100260998A1 (en) * | 2009-04-10 | 2010-10-14 | Lockheed Martin Corporation | Fiber sizing comprising nanoparticles |
JP5658739B2 (en) | 2009-04-17 | 2015-01-28 | シーアストーン リミテッド ライアビリティ カンパニー | Method for producing solid carbon by reducing carbon oxide |
CN102421704A (en) * | 2009-04-30 | 2012-04-18 | 应用纳米结构方案公司 | Method and system for close proximity catalysis for carbon nanotube synthesis |
KR101129416B1 (en) | 2009-07-29 | 2012-03-26 | 한국기계연구원 | Bio Sensor |
US8128993B2 (en) * | 2009-07-31 | 2012-03-06 | Nantero Inc. | Anisotropic nanotube fabric layers and films and methods of forming same |
US8574673B2 (en) | 2009-07-31 | 2013-11-05 | Nantero Inc. | Anisotropic nanotube fabric layers and films and methods of forming same |
EP2461953A4 (en) | 2009-08-03 | 2014-05-07 | Applied Nanostructured Sols | Incorporation of nanoparticles in composite fibers |
US20110034008A1 (en) * | 2009-08-07 | 2011-02-10 | Nantero, Inc. | Method for forming a textured surface on a semiconductor substrate using a nanofabric layer |
JP2013501921A (en) | 2009-08-07 | 2013-01-17 | ナノミックス・インコーポレーテッド | Biological detection based on magnetic carbon nanotubes |
BG66424B1 (en) | 2009-09-29 | 2014-03-31 | "Амг Технолоджи" Оод | Sensors for scanning probing microscopy, a method of three-dimensional measuing and a method for producing such sensors |
WO2011050331A2 (en) * | 2009-10-23 | 2011-04-28 | Nantero, Inc. | Method for passivating a carbonic nanolayer |
US8895950B2 (en) | 2009-10-23 | 2014-11-25 | Nantero Inc. | Methods for passivating a carbonic nanolayer |
US8351239B2 (en) * | 2009-10-23 | 2013-01-08 | Nantero Inc. | Dynamic sense current supply circuit and associated method for reading and characterizing a resistive memory array |
CA2779489A1 (en) * | 2009-11-02 | 2011-05-05 | Applied Nanostructured Solutions, Llc | Cnt-infused aramid fiber materials and process therefor |
KR20120120172A (en) * | 2009-11-23 | 2012-11-01 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | Cnt-tailored composite sea-based structures |
US20110123735A1 (en) * | 2009-11-23 | 2011-05-26 | Applied Nanostructured Solutions, Llc | Cnt-infused fibers in thermoset matrices |
US20110124253A1 (en) * | 2009-11-23 | 2011-05-26 | Applied Nanostructured Solutions, Llc | Cnt-infused fibers in carbon-carbon composites |
TW201119935A (en) * | 2009-12-04 | 2011-06-16 | Univ Nat Chiao Tung | Catalytic seeding control method |
US8222704B2 (en) * | 2009-12-31 | 2012-07-17 | Nantero, Inc. | Compact electrical switching devices with nanotube elements, and methods of making same |
JP2013518438A (en) * | 2010-01-25 | 2013-05-20 | ボード オブ トラスティーズ オブ ザ レランド スタンフォード ジュニア ユニバーシティ | Connected nanostructures and methods therefor |
US8530271B2 (en) * | 2010-01-25 | 2013-09-10 | The Board Of Trustees Of The Leland Stanford Junior University | Fullerene-doped nanostructures and methods therefor |
KR101906262B1 (en) * | 2010-02-02 | 2018-10-10 | 어플라이드 나노스트럭처드 솔루션스, 엘엘씨. | Fiber containing parallel-aligned carbon nanotubes |
KR101709823B1 (en) | 2010-02-12 | 2017-02-23 | 난테로 인크. | Methods for controlling density, porosity, and/or gap size within nanotube fabric layers and films |
US20110203632A1 (en) * | 2010-02-22 | 2011-08-25 | Rahul Sen | Photovoltaic devices using semiconducting nanotube layers |
US10661304B2 (en) | 2010-03-30 | 2020-05-26 | Nantero, Inc. | Microfluidic control surfaces using ordered nanotube fabrics |
JP6130787B2 (en) | 2010-03-30 | 2017-05-17 | ナンテロ,インク. | Method for arranging nanoscale elements in networks, fabrics and films |
WO2011135978A1 (en) * | 2010-04-28 | 2011-11-03 | 学校法人 慶應義塾 | Carbon nanotube light emitter, light source and phootocoupler |
US9017854B2 (en) | 2010-08-30 | 2015-04-28 | Applied Nanostructured Solutions, Llc | Structural energy storage assemblies and methods for production thereof |
US20120058352A1 (en) * | 2010-09-02 | 2012-03-08 | Applied Nanostructured Solutions, Llc | Metal substrates having carbon nanotubes grown thereon and methods for production thereof |
JP2013540683A (en) | 2010-09-14 | 2013-11-07 | アプライド ナノストラクチャード ソリューションズ リミテッド ライアビリティー カンパニー | Glass substrate having grown carbon nanotube and method for producing the same |
US8716029B1 (en) | 2010-09-21 | 2014-05-06 | The United States Of America As Represented By The Secretary Of The United States | Carbon nanotube sensors employing synthetic multifunctional peptides for surface functionalization |
AU2011305809A1 (en) | 2010-09-22 | 2013-02-28 | Applied Nanostructured Solutions, Llc | Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof |
US9880126B2 (en) * | 2010-09-24 | 2018-01-30 | Ajou University Industry-Academic Cooperation Foundation | Biosensor based on carbon nanotube-electric field effect transistor and method for producing the same |
US8872176B2 (en) | 2010-10-06 | 2014-10-28 | Formfactor, Inc. | Elastic encapsulated carbon nanotube based electrical contacts |
EP2718228A1 (en) | 2011-06-13 | 2014-04-16 | University of Dayton | Receptor-catalyst growth process for carbon nanotubes |
US20130072077A1 (en) * | 2011-09-21 | 2013-03-21 | Massachusetts Institute Of Technology | Systems and methods for growth of nanostructures on substrates, including substrates comprising fibers |
WO2013120109A2 (en) | 2012-02-10 | 2013-08-15 | Lockheed Martin Corporation | Photovoltaic cells having electrical contacts formed from metal nanoparticles and methods for production thereof |
WO2013120110A1 (en) | 2012-02-10 | 2013-08-15 | Lockheed Martin Corporation | Nanoparticle paste formulations and methods for production and use thereof |
JP6242858B2 (en) | 2012-04-16 | 2017-12-06 | シーアストーン リミテッド ライアビリティ カンパニー | Method and system for capturing and sequestering carbon and reducing the mass of carbon oxide in a waste gas stream |
EP2838837A4 (en) | 2012-04-16 | 2015-12-23 | Seerstone Llc | Methods and structures for reducing carbon oxides with non-ferrous catalysts |
EP2838839B1 (en) | 2012-04-16 | 2020-08-12 | Seerstone LLC | Method for producing solid carbon by reducing carbon dioxide |
NO2749379T3 (en) | 2012-04-16 | 2018-07-28 | ||
EP2838844A4 (en) | 2012-04-16 | 2015-10-28 | Seerstone Llc | Methods for treating an offgas containing carbon oxides |
US9896341B2 (en) | 2012-04-23 | 2018-02-20 | Seerstone Llc | Methods of forming carbon nanotubes having a bimodal size distribution |
US10815124B2 (en) | 2012-07-12 | 2020-10-27 | Seerstone Llc | Solid carbon products comprising carbon nanotubes and methods of forming same |
JP6284934B2 (en) | 2012-07-12 | 2018-02-28 | シーアストーン リミテッド ライアビリティ カンパニー | Solid carbon product containing carbon nanotubes and method of forming the same |
CN107215882A (en) | 2012-07-13 | 2017-09-29 | 赛尔斯通股份有限公司 | Method and system for forming ammonia and solid carbon product |
US9779845B2 (en) | 2012-07-18 | 2017-10-03 | Seerstone Llc | Primary voltaic sources including nanofiber Schottky barrier arrays and methods of forming same |
CN104718170A (en) | 2012-09-04 | 2015-06-17 | Ocv智识资本有限责任公司 | Dispersion of carbon enhanced reinforcement fibers in aqueous or non-aqueous media |
JP6389824B2 (en) | 2012-11-29 | 2018-09-12 | シーアストーン リミテッド ライアビリティ カンパニー | Reactor and method for producing solid carbon material |
EP3129133A4 (en) | 2013-03-15 | 2018-01-10 | Seerstone LLC | Systems for producing solid carbon by reducing carbon oxides |
WO2014151144A1 (en) | 2013-03-15 | 2014-09-25 | Seerstone Llc | Carbon oxide reduction with intermetallic and carbide catalysts |
EP3129321B1 (en) | 2013-03-15 | 2021-09-29 | Seerstone LLC | Electrodes comprising nanostructured carbon |
EP3129135A4 (en) | 2013-03-15 | 2017-10-25 | Seerstone LLC | Reactors, systems, and methods for forming solid products |
US9783416B2 (en) | 2013-03-15 | 2017-10-10 | Seerstone Llc | Methods of producing hydrogen and solid carbon |
US10333044B2 (en) | 2013-04-07 | 2019-06-25 | The Regents Of The University Of Colorado, A Body Corporate | Phononic metamaterials adapted for reduced thermal transport |
WO2014168894A2 (en) * | 2013-04-07 | 2014-10-16 | The Regents Of The University Of Colorado, A Body Corporate | Nanophononic metamaterials |
US10283689B2 (en) | 2013-04-07 | 2019-05-07 | The Regents Of The University Of Colorado, A Body Corporate | Phononic metamaterials comprising atomically disordered resonators |
US9650732B2 (en) | 2013-05-01 | 2017-05-16 | Nantero Inc. | Low defect nanotube application solutions and fabrics and methods for making same |
US9716279B2 (en) | 2013-05-15 | 2017-07-25 | Brookhaven Science Associates, Llc | Core-shell fuel cell electrodes |
US10654718B2 (en) | 2013-09-20 | 2020-05-19 | Nantero, Inc. | Scalable nanotube fabrics and methods for making same |
US9299430B1 (en) | 2015-01-22 | 2016-03-29 | Nantero Inc. | Methods for reading and programming 1-R resistive change element arrays |
KR101767886B1 (en) * | 2015-07-31 | 2017-08-14 | 한양대학교 에리카산학협력단 | Multi-layer ceramic/metal type gas sensor and manufacturing method of the same |
US9947400B2 (en) | 2016-04-22 | 2018-04-17 | Nantero, Inc. | Methods for enhanced state retention within a resistive change cell |
US9941001B2 (en) | 2016-06-07 | 2018-04-10 | Nantero, Inc. | Circuits for determining the resistive states of resistive change elements |
US9934848B2 (en) | 2016-06-07 | 2018-04-03 | Nantero, Inc. | Methods for determining the resistive states of resistive change elements |
US11752459B2 (en) | 2016-07-28 | 2023-09-12 | Seerstone Llc | Solid carbon products comprising compressed carbon nanotubes in a container and methods of forming same |
US10533963B2 (en) * | 2017-01-09 | 2020-01-14 | Mobiosense Corp. | Biosensor device |
EP3695217A1 (en) | 2017-10-10 | 2020-08-19 | Thermo Electron Scientific Instruments LLC | Carbon nanotube-based device for sensing molecular interaction |
US10957626B2 (en) | 2017-12-19 | 2021-03-23 | Thermo Electron Scientific Instruments Llc | Sensor device with carbon nanotube sensor positioned on first and second substrates |
US11027284B2 (en) | 2017-12-28 | 2021-06-08 | Thermo Electron Scientific Instruments Llc | Well plate mixing apparatus |
WO2020102880A1 (en) | 2018-11-20 | 2020-05-28 | National Research Council Of Canada | Sensor platform |
US11771334B1 (en) | 2019-10-30 | 2023-10-03 | Brigham Young University | Methods and devices for aligning miniaturized impedance sensors in wearable devices |
US11883146B1 (en) | 2019-10-30 | 2024-01-30 | Brigham Young University | Methods and devices for selecting miniaturized impedance electrodes of miniaturized impedance sensors |
US11701023B1 (en) | 2019-10-30 | 2023-07-18 | Brigham Young University | Miniaturized impedance sensors for wearable devices |
US11019734B1 (en) | 2019-10-30 | 2021-05-25 | Tula Health, Inc. | Methods and systems for fabricating miniaturized nanotube sensors |
US11895781B1 (en) | 2019-10-30 | 2024-02-06 | Tula Health, Inc. | Miniaturized impedance sensors |
US11883199B1 (en) | 2019-10-30 | 2024-01-30 | Tula Health Inc. | Interdigitated impedance electrodes of miniaturized impedance sensors |
US11284809B1 (en) | 2019-10-30 | 2022-03-29 | Brigham Young University | Impedance sensors for detecting heart wave forms |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995010481A1 (en) * | 1993-10-13 | 1995-04-20 | E.I. Du Pont De Nemours And Company | Carbon nanotubes and nested fullerenes supporting transition metals |
WO1998005920A1 (en) * | 1996-08-08 | 1998-02-12 | William Marsh Rice University | Macroscopically manipulable nanoscale devices made from nanotube assemblies |
US5780101A (en) * | 1995-02-17 | 1998-07-14 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Method for producing encapsulated nanoparticles and carbon nanotubes using catalytic disproportionation of carbon monoxide |
Family Cites Families (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4495793A (en) | 1982-08-30 | 1985-01-29 | Washington Research Foundation | Sensing device for detecting the presence of a gas contained in a mixture thereof |
US4663230A (en) * | 1984-12-06 | 1987-05-05 | Hyperion Catalysis International, Inc. | Carbon fibrils, method for producing same and compositions containing same |
US5165909A (en) * | 1984-12-06 | 1992-11-24 | Hyperion Catalysis Int'l., Inc. | Carbon fibrils and method for producing same |
US5707916A (en) * | 1984-12-06 | 1998-01-13 | Hyperion Catalysis International, Inc. | Carbon fibrils |
US6375917B1 (en) | 1984-12-06 | 2002-04-23 | Hyperion Catalysis International, Inc. | Apparatus for the production of carbon fibrils by catalysis and methods thereof |
US4970123A (en) * | 1987-10-29 | 1990-11-13 | Exxon Research And Engineering Company | Isotropically reinforced net-shape microcomposites |
ZA907803B (en) * | 1989-09-28 | 1991-07-31 | Hyperion Catalysis Int | Electrochemical cells and preparing carbon fibrils |
US5626650A (en) | 1990-10-23 | 1997-05-06 | Catalytic Materials Limited | Process for separating components from gaseous streams |
US5458784A (en) | 1990-10-23 | 1995-10-17 | Catalytic Materials Limited | Removal of contaminants from aqueous and gaseous streams using graphic filaments |
US5830326A (en) * | 1991-10-31 | 1998-11-03 | Nec Corporation | Graphite filaments having tubular structure and method of forming the same |
JP2546608B2 (en) | 1992-06-27 | 1996-10-23 | ドレーゲルヴェルク アクチェンゲゼルシャフト | Sensor for detecting an analyte in a fluid medium and method for manufacturing the same |
US5466605A (en) * | 1993-03-15 | 1995-11-14 | Arizona Board Of Regents | Method for detection of chemical components |
US5436167A (en) | 1993-04-13 | 1995-07-25 | Board Of Regents, University Of Texas System | Fiber optics gas sensor |
IL106243A (en) * | 1993-07-05 | 1996-01-31 | Scitex Corp Ltd | Internal drum printing plate plotter |
US5643670A (en) * | 1993-07-29 | 1997-07-01 | The Research Foundation Of State University Of New York At Buffalo | Particulate carbon complex |
US5690997A (en) * | 1993-10-04 | 1997-11-25 | Sioux Manufacturing Corporation | Catalytic carbon--carbon deposition process |
KR970010981B1 (en) * | 1993-11-04 | 1997-07-05 | 엘지전자 주식회사 | Alcohol concentration measuring bio-sensor, manufacturing method and related apparatus |
US5547748A (en) * | 1994-01-14 | 1996-08-20 | Sri International | Carbon nanoencapsulates |
JP2526408B2 (en) | 1994-01-28 | 1996-08-21 | 工業技術院長 | Carbon nano tube continuous manufacturing method and apparatus |
US5448906A (en) | 1994-07-26 | 1995-09-12 | Rockwell International Corporation | Ambient temperature gas sensor |
US5866434A (en) | 1994-12-08 | 1999-02-02 | Meso Scale Technology | Graphitic nanotubes in luminescence assays |
US6203814B1 (en) * | 1994-12-08 | 2001-03-20 | Hyperion Catalysis International, Inc. | Method of making functionalized nanotubes |
DE69623550T2 (en) * | 1995-07-10 | 2003-01-09 | Japan Res Dev Corp | Process for the production of graphite fibers |
US6162926A (en) | 1995-07-31 | 2000-12-19 | Sphere Biosystems, Inc. | Multi-substituted fullerenes and methods for their preparation and characterization |
US6445006B1 (en) * | 1995-12-20 | 2002-09-03 | Advanced Technology Materials, Inc. | Microelectronic and microelectromechanical devices comprising carbon nanotube components, and methods of making same |
US5872422A (en) | 1995-12-20 | 1999-02-16 | Advanced Technology Materials, Inc. | Carbon fiber-based field emission devices |
DE19618935C2 (en) * | 1996-05-10 | 2002-11-28 | Siemens Ag | Gas sensor and method for manufacturing a gas sensor |
US5726524A (en) | 1996-05-31 | 1998-03-10 | Minnesota Mining And Manufacturing Company | Field emission device having nanostructured emitters |
JP3047062B2 (en) * | 1996-09-20 | 2000-05-29 | 大阪府 | Gas sensor |
US6683783B1 (en) * | 1997-03-07 | 2004-01-27 | William Marsh Rice University | Carbon fibers formed from single-wall carbon nanotubes |
US6221330B1 (en) * | 1997-08-04 | 2001-04-24 | Hyperion Catalysis International Inc. | Process for producing single wall nanotubes using unsupported metal catalysts |
JP3740295B2 (en) * | 1997-10-30 | 2006-02-01 | キヤノン株式会社 | Carbon nanotube device, manufacturing method thereof, and electron-emitting device |
US6129901A (en) * | 1997-11-18 | 2000-10-10 | Martin Moskovits | Controlled synthesis and metal-filling of aligned carbon nanotubes |
US6156256A (en) * | 1998-05-13 | 2000-12-05 | Applied Sciences, Inc. | Plasma catalysis of carbon nanofibers |
KR20010074667A (en) * | 1998-06-19 | 2001-08-08 | 추후보정 | Free-standing and aligned carbon nanotubes and synthesis thereof |
US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
ATE481745T1 (en) * | 1999-07-02 | 2010-10-15 | Harvard College | ARRANGEMENT CONTAINING NANOSCOPIC WIRE, LOGICAL FIELDS AND METHOD FOR THE PRODUCTION THEREOF |
US6340822B1 (en) * | 1999-10-05 | 2002-01-22 | Agere Systems Guardian Corp. | Article comprising vertically nano-interconnected circuit devices and method for making the same |
US6837928B1 (en) * | 2001-08-30 | 2005-01-04 | The Board Of Trustees Of The Leland Stanford Junior University | Electric field orientation of carbon nanotubes |
-
1998
- 1998-08-14 US US09/133,948 patent/US6346189B1/en not_active Expired - Lifetime
-
1999
- 1999-07-02 WO PCT/US1999/015222 patent/WO2000009443A1/en active Application Filing
-
2000
- 2000-05-19 US US09/574,393 patent/US6528020B1/en not_active Expired - Lifetime
-
2002
- 2002-01-07 US US10/042,426 patent/US20030049444A1/en not_active Abandoned
- 2002-11-18 US US10/299,610 patent/US7166325B2/en not_active Expired - Fee Related
-
2004
- 2004-04-26 US US10/831,786 patent/US20040194705A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1995010481A1 (en) * | 1993-10-13 | 1995-04-20 | E.I. Du Pont De Nemours And Company | Carbon nanotubes and nested fullerenes supporting transition metals |
US5780101A (en) * | 1995-02-17 | 1998-07-14 | Arizona Board Of Regents On Behalf Of The University Of Arizona | Method for producing encapsulated nanoparticles and carbon nanotubes using catalytic disproportionation of carbon monoxide |
WO1998005920A1 (en) * | 1996-08-08 | 1998-02-12 | William Marsh Rice University | Macroscopically manipulable nanoscale devices made from nanotube assemblies |
Non-Patent Citations (1)
Title |
---|
DAI, HONGJIE ET AL.: "Nanotubes as nanoprobes in scanning probe microscopy", NATURE, vol. 384, 14 November 1996 (1996-11-14), pages 147 - 150, XP002925059 * |
Cited By (70)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8178907B2 (en) | 1999-07-02 | 2012-05-15 | President And Fellows Of Harvard College | Nanoscopic wire-based electrical crossbar memory-devices and arrays |
US6781166B2 (en) | 1999-07-02 | 2004-08-24 | President & Fellows Of Harvard College | Nanoscopic wire-based devices and arrays |
US7399691B2 (en) | 1999-07-02 | 2008-07-15 | President And Fellows Of Harvard College | Methods of forming nanoscopic wire-based devices and arrays |
US7172953B2 (en) | 1999-07-02 | 2007-02-06 | President And Fellows Of Harvard College | Methods of forming nanoscopic wire-based devices and arrays |
US8471298B2 (en) | 1999-07-02 | 2013-06-25 | President And Fellows Of Harvard College | Nanoscopic wire-based devices and arrays |
US6866801B1 (en) | 1999-09-23 | 2005-03-15 | Commonwealth Scientific And Industrial Research Organisation | Process for making aligned carbon nanotubes |
WO2001021863A1 (en) * | 1999-09-23 | 2001-03-29 | Commonwealth Scientific And Industrial Research Organisation | Patterned carbon nanotubes |
GB2364933B (en) * | 2000-07-18 | 2002-12-31 | Lg Electronics Inc | Method of horizontally growing carbon nanotubes |
GB2364933A (en) * | 2000-07-18 | 2002-02-13 | Lg Electronics Inc | Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method |
DE10134866B4 (en) * | 2000-07-18 | 2005-08-11 | Lg Electronics Inc. | Method of horizontally growing carbon nanotubes and field effect transistor using the process grown carbon nanotubes |
GB2382718A (en) * | 2000-07-18 | 2003-06-04 | Lg Electronics Inc | Field effect transistor using horizontally grown carbon nanotubes |
GB2382718B (en) * | 2000-07-18 | 2004-03-24 | Lg Electronics Inc | Field effect transistor using horizontally grown carbon nanotubes |
US7915151B2 (en) | 2000-08-22 | 2011-03-29 | President And Fellows Of Harvard College | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors and fabricating such devices |
US7666708B2 (en) | 2000-08-22 | 2010-02-23 | President And Fellows Of Harvard College | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
US8153470B2 (en) | 2000-08-22 | 2012-04-10 | President And Fellows Of Harvard College | Doped elongated semiconductors, growing such semiconductors, devices including such semiconductors, and fabricating such devices |
WO2002017397A1 (en) * | 2000-08-24 | 2002-02-28 | Infineon Technologies Ag | Electronic element, method for producing an element of this type and a semiconductor element |
US6457350B1 (en) * | 2000-09-08 | 2002-10-01 | Fei Company | Carbon nanotube probe tip grown on a small probe |
US7258901B1 (en) | 2000-09-08 | 2007-08-21 | Fei Company | Directed growth of nanotubes on a catalyst |
US7032437B2 (en) | 2000-09-08 | 2006-04-25 | Fei Company | Directed growth of nanotubes on a catalyst |
US6716409B2 (en) | 2000-09-18 | 2004-04-06 | President And Fellows Of The Harvard College | Fabrication of nanotube microscopy tips |
WO2002022499A1 (en) * | 2000-09-18 | 2002-03-21 | President And Fellows Of Harvard College | Fabrication of nanotube microscopy tips |
US6743408B2 (en) | 2000-09-29 | 2004-06-01 | President And Fellows Of Harvard College | Direct growth of nanotubes, and their use in nanotweezers |
WO2002026624A1 (en) * | 2000-09-29 | 2002-04-04 | President And Fellows Of Harvard College | Direct growth of nanotubes, and their use in nanotweezers |
US8399339B2 (en) | 2000-12-11 | 2013-03-19 | President And Fellows Of Harvard College | Nanosensors |
US7956427B2 (en) | 2000-12-11 | 2011-06-07 | President And Fellows Of Harvard College | Nanosensors |
US7911009B2 (en) | 2000-12-11 | 2011-03-22 | President And Fellows Of Harvard College | Nanosensors |
WO2002073624A2 (en) * | 2001-03-13 | 2002-09-19 | Paul Scherrer Institut (Psi) | Memory element, method for structuring a surface, and storage device |
WO2002073624A3 (en) * | 2001-03-13 | 2003-10-02 | Paul Scherrer Inst Psi | Memory element, method for structuring a surface, and storage device |
EP1271554A3 (en) * | 2001-06-26 | 2003-05-02 | Hokkaido University | Scanning probe microscope |
US6655196B2 (en) | 2001-06-26 | 2003-12-02 | Hokkaido University | Scanning probe microscope |
US7947976B2 (en) | 2002-02-06 | 2011-05-24 | Ut-Battelle, Llc | Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process |
US7245068B2 (en) | 2002-02-06 | 2007-07-17 | Ut-Battelle, Llc | Apparatus for controlled alignment of catalytically grown nanostructures |
WO2004000003A3 (en) * | 2002-02-06 | 2005-01-06 | Ut Battelle Llc | Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process |
US7408186B2 (en) | 2002-02-06 | 2008-08-05 | Ut-Battelle Llc | Controlled alignment catalytically grown nanostructures |
WO2004000003A2 (en) * | 2002-02-06 | 2003-12-31 | Ut-Battelle, Llc | Controlled alignment of catalytically grown nanostructures in a large-scale synthesis process |
US6958572B2 (en) | 2002-02-06 | 2005-10-25 | Ut-Battelle Llc | Controlled non-normal alignment of catalytically grown nanostructures in a large-scale synthesis process |
US6831017B1 (en) | 2002-04-05 | 2004-12-14 | Integrated Nanosystems, Inc. | Catalyst patterning for nanowire devices |
DE10230657A1 (en) * | 2002-07-03 | 2004-01-22 | Institut Für Polymerforschung Dresden E.V. | Positioning and forming meltable particles on measurement points, comprises using an optical system to select a particle, heating and cooling |
DE10230657B4 (en) * | 2002-07-03 | 2006-04-20 | Leibniz-Institut Für Polymerforschung Dresden E.V. | Method and device for positioning and deforming fusible polymer particles at measuring tips |
US7910064B2 (en) | 2003-06-03 | 2011-03-22 | Nanosys, Inc. | Nanowire-based sensor configurations |
US8772099B2 (en) | 2003-08-29 | 2014-07-08 | Japan Science And Technology Agency | Method of use of a field-effect transistor, single-electron transistor and sensor |
US8502277B2 (en) | 2003-08-29 | 2013-08-06 | Japan Science And Technology Agency | Field-effect transistor, single-electron transistor and sensor using the same |
US8766326B2 (en) | 2003-08-29 | 2014-07-01 | Japan Science And Technology Agency | Field-effect transistor, single-electron transistor and sensor |
US9506892B2 (en) | 2003-08-29 | 2016-11-29 | Japan Science And Technology Agency | Field-effect transistor, single-electron transistor and sensor using the same |
US7235159B2 (en) | 2003-09-17 | 2007-06-26 | Molecular Nanosystems, Inc. | Methods for producing and using catalytic substrates for carbon nanotube growth |
EP1557843A2 (en) * | 2004-01-22 | 2005-07-27 | FEI Company | Directed growth of nanotubes on a catalyst |
EP1557843A3 (en) * | 2004-01-22 | 2006-07-05 | FEI Company | Directed growth of nanotubes on a catalyst |
US8154002B2 (en) | 2004-12-06 | 2012-04-10 | President And Fellows Of Harvard College | Nanoscale wire-based data storage |
JP4676224B2 (en) * | 2005-03-23 | 2011-04-27 | 東京特殊電線株式会社 | Probe needle and manufacturing method thereof |
JP2006266765A (en) * | 2005-03-23 | 2006-10-05 | Totoku Electric Co Ltd | Probe needle and its manufacturing method |
US8232584B2 (en) | 2005-05-25 | 2012-07-31 | President And Fellows Of Harvard College | Nanoscale sensors |
US7858965B2 (en) | 2005-06-06 | 2010-12-28 | President And Fellows Of Harvard College | Nanowire heterostructures |
US9102521B2 (en) | 2006-06-12 | 2015-08-11 | President And Fellows Of Harvard College | Nanosensors and related technologies |
US9903862B2 (en) | 2006-06-12 | 2018-02-27 | President And Fellows Of Harvard College | Nanosensors and related technologies |
US8058640B2 (en) | 2006-09-11 | 2011-11-15 | President And Fellows Of Harvard College | Branched nanoscale wires |
US9535063B2 (en) | 2006-11-22 | 2017-01-03 | President And Fellows Of Harvard College | High-sensitivity nanoscale wire sensors |
US8575663B2 (en) | 2006-11-22 | 2013-11-05 | President And Fellows Of Harvard College | High-sensitivity nanoscale wire sensors |
CN101209833B (en) * | 2006-12-27 | 2010-09-29 | 清华大学 | Preparation of carbon nano-tube array |
US9305735B2 (en) | 2007-09-28 | 2016-04-05 | Brigham Young University | Reinforced polymer x-ray window |
WO2009098346A1 (en) * | 2008-02-05 | 2009-08-13 | Consejo Superior De Investigaciones Cientificas | Method and system for reducing or eliminating the greenhouse-gas content of a gas or mixture of gases |
ES2351742A1 (en) * | 2008-02-05 | 2011-02-10 | Consejo Superior De Investigaciones Cientificas (Csic) | Method and system for reducing or eliminating the greenhouse-gas content of a gas or mixture of gases |
US9390951B2 (en) | 2009-05-26 | 2016-07-12 | Sharp Kabushiki Kaisha | Methods and systems for electric field deposition of nanowires and other devices |
US9297796B2 (en) | 2009-09-24 | 2016-03-29 | President And Fellows Of Harvard College | Bent nanowires and related probing of species |
US8964943B2 (en) | 2010-10-07 | 2015-02-24 | Moxtek, Inc. | Polymer layer on X-ray window |
US8804910B1 (en) | 2011-01-24 | 2014-08-12 | Moxtek, Inc. | Reduced power consumption X-ray source |
US8929515B2 (en) | 2011-02-23 | 2015-01-06 | Moxtek, Inc. | Multiple-size support for X-ray window |
US9174412B2 (en) | 2011-05-16 | 2015-11-03 | Brigham Young University | High strength carbon fiber composite wafers for microfabrication |
US9076628B2 (en) | 2011-05-16 | 2015-07-07 | Brigham Young University | Variable radius taper x-ray window support structure |
US8989354B2 (en) | 2011-05-16 | 2015-03-24 | Brigham Young University | Carbon composite support structure |
US9173623B2 (en) | 2013-04-19 | 2015-11-03 | Samuel Soonho Lee | X-ray tube and receiver inside mouth |
Also Published As
Publication number | Publication date |
---|---|
US6346189B1 (en) | 2002-02-12 |
US20040194705A1 (en) | 2004-10-07 |
US20030049444A1 (en) | 2003-03-13 |
US20030068432A1 (en) | 2003-04-10 |
US6528020B1 (en) | 2003-03-04 |
US7166325B2 (en) | 2007-01-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6346189B1 (en) | Carbon nanotube structures made using catalyst islands | |
US7011884B1 (en) | Carbon nanotube with a graphitic outer layer | |
US6401526B1 (en) | Carbon nanotubes and methods of fabrication thereof using a liquid phase catalyst precursor | |
Stevens et al. | Improved fabrication approach for carbon nanotube probe devices | |
US6833558B2 (en) | Parallel and selective growth method of carbon nanotube on the substrates for electronic-spintronic device applications | |
JP3768867B2 (en) | Method for producing carbon nanotube | |
Dai | Nanotube growth and characterization | |
US7491269B2 (en) | Method for catalytic growth of nanotubes or nanofibers comprising a NiSi alloy diffusion barrier | |
JP4602304B2 (en) | Carbon nanotube manufacturing apparatus and manufacturing method | |
US9108850B2 (en) | Preparing nanoparticles and carbon nanotubes | |
JPH11194134A (en) | Carbon nano tube device, its manufacture and elecfron emission element | |
US7022541B1 (en) | Patterned growth of single-walled carbon nanotubes from elevated wafer structures | |
US20040144970A1 (en) | Nanowires | |
WO2004027127A1 (en) | Acicular silicon crystal and process for producing the same | |
US7161148B1 (en) | Tip structures, devices on their basis, and methods for their preparation | |
JP4231228B2 (en) | Micromachine | |
Mann | Synthesis of carbon nanotubes | |
CN101218173B (en) | Method for growing carbon nanotubes having a predetermined chirality | |
US20050103993A1 (en) | Vertically aligned nanostructure scanning probe microscope tips | |
US20070186629A1 (en) | Functionalizable nanowire-based AFM probe | |
US7718224B2 (en) | Synthesis of single-walled carbon nanotubes | |
US7645482B2 (en) | Method to make and use long single-walled carbon nanotubes as electrical conductors | |
WO2005046305A2 (en) | Method of producing nanostructure tips | |
US9494615B2 (en) | Method of making and assembling capsulated nanostructures | |
RU2240623C2 (en) | Point structures, devices built around them, and their manufacturing methods |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): CA JP |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
122 | Ep: pct application non-entry in european phase |