WO2000030077A1 - Differential vgmr sensor - Google Patents

Differential vgmr sensor Download PDF

Info

Publication number
WO2000030077A1
WO2000030077A1 PCT/US1999/023119 US9923119W WO0030077A1 WO 2000030077 A1 WO2000030077 A1 WO 2000030077A1 US 9923119 W US9923119 W US 9923119W WO 0030077 A1 WO0030077 A1 WO 0030077A1
Authority
WO
WIPO (PCT)
Prior art keywords
vgmr
magnetic
sensor
layer
stack
Prior art date
Application number
PCT/US1999/023119
Other languages
French (fr)
Other versions
WO2000030077A9 (en
Inventor
Brenda Anne Everitt
Taras Grigorievich Pokhil
Original Assignee
Seagate Technology Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology Llc filed Critical Seagate Technology Llc
Priority to US09/600,270 priority Critical patent/US6556388B1/en
Priority to KR1020017006305A priority patent/KR20010075724A/en
Priority to GB0111769A priority patent/GB2362985B/en
Priority to DE19983808T priority patent/DE19983808T1/en
Priority to JP2000583006A priority patent/JP2003529199A/en
Publication of WO2000030077A1 publication Critical patent/WO2000030077A1/en
Publication of WO2000030077A9 publication Critical patent/WO2000030077A9/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/02Recording, reproducing, or erasing methods; Read, write or erase circuits therefor
    • G11B5/09Digital recording
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/1278Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3945Heads comprising more than one sensitive element
    • G11B5/3948Heads comprising more than one sensitive element the sensitive elements being active read-out elements
    • G11B5/3951Heads comprising more than one sensitive element the sensitive elements being active read-out elements the active elements being arranged on several parallel planes
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3945Heads comprising more than one sensitive element
    • G11B5/3948Heads comprising more than one sensitive element the sensitive elements being active read-out elements
    • G11B5/3951Heads comprising more than one sensitive element the sensitive elements being active read-out elements the active elements being arranged on several parallel planes
    • G11B5/3954Heads comprising more than one sensitive element the sensitive elements being active read-out elements the active elements being arranged on several parallel planes the active elements transducing on a single track
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B2005/0002Special dispositions or recording techniques
    • G11B2005/0005Arrangements, methods or circuits
    • G11B2005/001Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure
    • G11B2005/0013Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure of transducers, e.g. linearisation, equalisation
    • G11B2005/0016Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure of transducers, e.g. linearisation, equalisation of magnetoresistive transducers
    • G11B2005/0018Controlling recording characteristics of record carriers or transducing characteristics of transducers by means not being part of their structure of transducers, e.g. linearisation, equalisation of magnetoresistive transducers by current biasing control or regulation
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices

Definitions

  • the invention relates to magnetic recording heads and more specifically to a differential VGMR sensor.
  • magnetoresistance The change in resistance caused by a magnetic field is called magnetoresistance . This phenomena has been exploited in recording head technology, for example, in computer mass storage devices such as tape and disk drives. Magnetoresistive recording heads are well known to be useful in reading back data from a magnetic media mass storage device such as a disk drive or magnetic tape drive.
  • a magnetoresistive (“MR”) sensor detects magnetic field signals by measuring changes in the resistance of an MR element, fabricated of a magnetic material. Resistance of the MR element changes as a function of the strength and direction of magnetic flux being sensed by the element. Changes in resistance are then converted to determine the flux radiated from the magnetic medium. This measurement determines the signal stored on the medium.
  • AMR anisotropic magnetoresistive effect
  • D p is the component of resistance of interest and p 0 is the base resistance of the MR element.
  • p 0 is the base resistance of the MR element.
  • GMR giant magnetoresistive
  • VGMR vertical GMR
  • the GMR effect is due to spin dependent scattering of electrons from two or more magnetic layers, separated by nonmagnetic spacer layers.
  • the available magnetic flux is decreased.
  • sensitivity may be decreased from thermal noise.
  • the head While the head is flying over the disk surface, it may hit a particle (contamination) .
  • the energy of this collision will be dissipated in the form of heat causing the temperature of the head to increase, causing an increase in the resistance of the head , ultimately resulting in a signal that may be even higher than the magnetic signal from a transition.
  • read heads with greater sensitivities are needed.
  • the invention feature an apparatus for reading data including a first magnetoresistive element, a second magnetoresistive element formed substantially parallel to the first magnetoresistive element, a nonmagnetic spacer interposed between the first and second magnetoresistive elements, wherein the first and second magnetoresistive elements are comprised of a first magnetic layer, a second magnetic layer formed substantially parallel to the first magnetic layer and a conductive spacer interposed between the first and second magnetic layers, wherein a bias current applied to the conductive spacer of the first magnetoresistive element is substantially equal and opposite to a bias current applied to the conductive spacer of the second magnetoresistive element.
  • the apparatus can further include a permanent magnet formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer, a current strip formed between the first and second magnetoresistive elements and in between the nonmagnetic spacer and the permanent magnet, a current strip formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer.
  • the first magnetic layer of at least one of the first and second magnetoresistive elements includes a first magnetic material, a second magnetic material, a spacing material interposed between the first and second magnetic materials.
  • the first and second magnetic materials are comprised of synthetic antiferromagnetics and the spacing material is ruthenium.
  • the second magnetic layer of at least one of the first and second magnetoresistive elements includes a first magnetic material, a second magnetic material, a spacing material interposed between the first and second magnetic materials .
  • the first magnetic layer is a single layer, wherein the single layer can be comprised of at least one of NiFe, CoFe, and NiFeCo.
  • the apparatus of claim 1 wherein the first magnetic layer is a bilayer.
  • the apparatus further includes a first thin layer adjacent interposed between the first magnetic layer and the conductive spacer and a second thin layer interposed between the second magnetic layer and the conductive spacer, wherein the first and second thin layers can be comprised of at least one of Co and CoFe .
  • the invention features a VGMR sensor, including a first VGMR stack, a second VGMR stack and a nonmagnetic and nonconductive spacer interposed between the first and second VGMR stacks .
  • the first and second VGMR stacks includes a first SAF stack, a second SAF stack and a conductive spacer interposed between the first and second SAF stacks.
  • each of the first and second SAF stacks includes a first SAF layer, a second SAF layer and a spacer layer interposed between the first and second SAF layers, wherein the conductive spacer can be copper.
  • a current source to apply a first bias current to the first VGMR stack and a second bias current to the second VGMR stack are included.
  • the VGMR sensor can include a differential amplifier for summing the first and second bias currents and a detector for detecting changes in the first and second magnetizations.
  • the invention features a differential GMR sensor, including a plurality of spaced
  • GMR stacks and means for biasing the magnetization of respective stacks to respond to external magnetic fields by increasing resistance in one stack and decreasing resistance in adjacent stacks.
  • the invention may provide one or more of the following advantages .
  • a differential VGMR sensor provided with two VGMR sensors which respond differently to an external field, thus producing a differential signal proportional to the field are provided.
  • the sensor produces a better signal- to-noise ratio compared with a standard VGMR sensor. This better signal-to-noise ratio increases the read density of the sensor.
  • Fig. 1A is a perspective view of a conventional VGMR sensor.
  • Fig. IB is a perspective view of a conventional VGMR sensor.
  • Fig. 1C is a side view of a conventional VGMR sensor.
  • Fig. 2 is a schematic diagram of an implementation of two VGMR sensors producing a differential signal output.
  • Fig. 2A is a perspective view of a differential VGMR sensor utilizing a permanent magnet.
  • Fig. 2B is a perspective view of a differential VGMR sensor of Fig. 2A.
  • Fig. 2C is a side view of a differential VGMR sensor of Figs. 2A and 2B.
  • Fig. 2D is a side view of a differential VGMR sensor of Figs. 2A and 2B in the presence of a magnetic field.
  • Fig. 3A is a perspective view of another implementation of a differential VGMR sensor utilizing a current strip.
  • Fig. 3B is a perspective view of a differential VGMR sensor of Fig. 3A.
  • Fig. 3C is a side view of a differential VGMR sensor of Figs. 3A and 3B.
  • Fig. 3D is a side view of a differential VGMR sensor of Figs. 3A and 3B in the presence of a magnetic field.
  • Fig. 4A is a perspective view of yet another implementation of a differential VGMR sensor utilizing a permanent magnet and a current strip .
  • Fig. 4B is a perspective view of a differential VGMR sensor of Fig. 4A.
  • Fig. 4C is a side view of a differential VGMR sensor of Figs. 4A and 4B.
  • Fig. 4D is a side view of a differential VGMR sensor of Figs. 4A and 4B in the presence of a magnetic intensity.
  • Fig. 5A is a perspective view of another implementation of a differential VGMR sensor utilizing a thin nonmagnetic spacer.
  • Fig. 6A is a perspective view of an enhanced differential VGMR stack.
  • Fig. 6B is a perspective view of the enhanced differential VGMR stack of Fig. 6A.
  • Fig. 6C is a side view of the enhanced differential VGMR stack of Fig. 6A.
  • Fig. 7A is a perspective view of a enhanced differential VGMR stack.
  • Fig. 7B is a perspective view of the enhanced differential VGMR stack of Fig. 7A.
  • Fig. 7C is a side view of the enhanced differential VGMR stack of Fig. 7A.
  • Fig. 7D is a view of the enhanced differential VGMR stack of Fig. 7A.
  • Fig. 8A is a perspective view of an implementation of a folded differential VGMR sensor utilizing two folded Differential VGMR stacks.
  • Fig. 8B is a perspective view of another implementation of a folded differential VGMR sensor utilizing two enhanced differential VGMR stacks.
  • Fig. 8C is a side view of the folded differential VGMR sensor of Fig. 8A.
  • Fig. 8D is a side view of the folded differential VGMR sensor of Fig, 8A in the presence of a magnetic intensity.
  • Figs. 1A, IB, and 1C are alternate perspective side views of a conventional Giant Magnetoresistive (GMR) stack 10.
  • the conventional sandwiched GMR 10 is typically comprised of a conductive spacer material 11, such as copper, sandwiched in between two magnetic layers or bilayers 12, 13 such as NiFe, CoFe, and NiFeCo.
  • a bias or sensing current density J b as depicted by a vector 14 runs through the GMR stack 10 via the conductive spacer 11.
  • the magnetic layers 12, 13 have a magnetization M x and 2 represented by vectors 15A and 15B.
  • the magnetization vectors 15A and 15B are shown in two orientations represented by a solid and a dashed line.
  • the magnetization vectors 15A, 15B orient themselves perpendicular to an air bearing surface 16A (ABS) which is the surface of the head facing recording media 16.
  • ABS air bearing surface
  • the perpendicular orientation is due to the inherent anisotropic properties of the magnetic layers 12, 13.
  • a resultant magnetic field B has a vector 17 that "curls" around the current density vector 14. This magnetic field B acts in opposite directions on each of the two magnetic layers 12 and 13.
  • the magnetization vectors 15A and 15B of the magnetic layers 12, 13 will orient themselves in the direction of the magnetic field vector 17, which is the direction of the magnetic flux created by the field B.
  • angles ⁇ x and ⁇ 2 are formed between the magnetization vectors 15A and 15B and a vector 18 normal to the ABS
  • the function of the bias current density 14 is to provide an output signal and assist in biasing the sensor in its sensitive operating regime. Resistance depends on the angle between magnetization directions in the magnetic layers. As the magnetization of the magnetic layers changes direction as it senses the magnetic flux from the recording medium, its resistance will change. Therefore when a magnetic field density H represented by a vector H radiates from the magnetic medium 16 the magnetization vectors will attempt to align themselves with that field. Consequently, as the vector 18 varies in its intensity, the magnetization vectors 15A and 15B will change their orientation. There will be a corresponding change in resistance due to the GMR effect, which will be indicated by a change in the bias current density 14. These changes in resistance are measured and a signal is obtained. This embodiment describes GMR detection.
  • Fig. 2 illustrates a schematic diagram of two differential VGMR sensors 200, 201 biased by bias current densities J bl and J b2 respectively through lines 205 and 210 respectively, with a common ground 215.
  • the resultant change in the bias currents that result from an increase (decrease) in resistance of one VGMR sensor 200, and a decrease (increase) of resistance in the other VGMR sensor 201 are combined at differential amplifier 220 to produce differential signal 225.
  • Fig. 2A depicts an implementation having two VGMR sensors connected in parallel.
  • the magnetizations of a first VGMR sensor VGMR1 21A and a second VGMR sensor VGMR2 21B are oriented in opposite directions.
  • An external magnetic field from a recording medium applied perpendicular to the ABS will cause an increase/decrease of the angle between the magnetization directions in the magnetic layers of VGMR1 and a corresponding decrease/increase in the magnetization directions of the magnetic layers in VGMR2.
  • Fig. 2A depicts a differential VGMR sensor 20 with a permanent magnet 22 and a nonmagnetic spacer 24 sandwiched between a first VGMR stack 21A ("VGMR1") and a second VGMR stack 2IB (“VGMR2”) .
  • the nonmagnetic spacer 24 is thick enough so as not to cause ferromagnetic orange peel coupling between the adjacent magnetic layers of VGMR1 and VGMR2. Orange peel coupling is due to the topography of the GMR stack itself giving rise to parallel coupling between the magnetic layers in the GMR stack.
  • the nonmagnetic spacer is typically 10 - 40 Angstroms but is not limited to this thickness.
  • the spacer 24 is located near the ABS edge 16A of VGMR1 21A and VGMR2 21B.
  • the permanent magnet 22 is located away from the ABS 16A edge in order to prevent disruption of the recording medium 16 and to prevent a decrease in sensitivity of the sensor 20.
  • the magnetization of the permanent magnet 22 is directed parallel to the ABS and normal to the VGMR layers 21A and 2IB.
  • the presence of the permanent magnet 22 is to achieve opposite magnetizations in VGMR1 21A and VGMR2 21B.
  • a magnetic field vector 23 from the permanent magnetic 22 will orient the magnetization vectors 15A, 15B (see Fig. 2B) in VGMR1 21A and 15C, 15D (see Fig. 2B) in VGMR2 2IB in the opposite directions.
  • the magnetic flux from the permanent magnet 23 is generally directed in the y direction with respect to VGMR1 21A and in the -y direction with respect to VGMR2 2IB.
  • the magnetization vectors 15A, 15B of VGMR1 21A will orient themselves along the field lines of vector 23 in the y direction.
  • the magnetization vectors 15C, 15D of VGMR2 21B will orient themselves along the field lines of vector 23 in the -y direction.
  • the magnetizations of the respective layers of VGMR1 21A and VGMR2 21B will scissor with respect to each other (ie M x 15A scissors with M 2 15B and M 3 15C scissors with M 4 15D) .
  • Fig. 3A depicts another implementation of a differential VGMR sensor 30 with a current strip 31 and a nonmagnetic spacer 24 sandwiched between VGMR1 21A and VGMR2 2IB.
  • the current strip 31 provides a magnetic flux from a magnetic field B represented by vector 32 having a similar effect to the flux caused by the permanent magnet (see Figs. 2A, 2B, 2C) .
  • a current density J s runs through the strip 31 in the -z direction as indicated by the current density vector 33.
  • the current strip creates the magnetic field 32 that curls around the strip 31 as indicated.
  • the magnetic field B caused by the current strip 31 results in a field flux in one direction with respect to VGMR1 21A (generally in the y direction) and in the opposite direction with respect to VGMR2 21B (generally in the -y direction) .
  • the respective magnetizations of VGMR1 and VGMR2 will orient themselves in the opposite directions, M x 15A and 2 15B (Fig. 3B) in the y direction and M 3 15C and M 4 15D (Fig. 3B) in the -y direction.
  • the current strips orients the magnetizations 15A, 15B of VGMR1 21A and the magnetizations 15C, 15D of VGMR2 21B antiparallel to each other achieving the same effect as with the presence of a permanent magnet (Figs. 2A, 2B, 2C) .
  • the use of bias current densities represented by vectors 25, 26 is the same as described above.
  • the current densities 25, 26 cause a respective orientation of magnetization vectors 15A, 15B and 15C, 15D respectively.
  • a magnetic field density H represented by vector 18 from a recording medium 16 perpendicular to the ABS 16A all magnetizations will attempt to align themselves in the direction of the recording medium magnetic flux along vector 18 in the y direction.
  • M x 15A and 2 15B will decrease the angle ⁇ between them, and 2 and 4 will increase the angle ⁇ 2 between them as all magnetization vectors attempt to align themselves in the y direction.
  • the magnetic field H vector 18 from the magnetic medium 16 will cause variations in the magnetoresistance of the VGMR stacks 21A, 21B, ultimately creating a differential signal .
  • Fig. 4A depicts a differential VGMR sensor 40 with a current strip 31, a permanent magnet 22, and a nonmagnetic spacer 24 sandwiched between VGMRl 21A and VGMR2 2IB.
  • a current density J s runs through the strip 31 as indicated by the current density vector 33.
  • the current 31 strip creates a magnetic field that curls around the strip represented by vector 32.
  • the magnetic field B caused by the current strip 31 results in a field flux in one direction with respect to VGMRl 21A and in the opposite direction with respect to VGMR2 2IB.
  • the permanent magnet is oriented away from the ABS edge.
  • the magnetization of the permanent magnet 22 is oriented parallel to the ABS 16A and normal to the VGMR layers 21A, 2IB.
  • the magnetic field flux from the permanent magnetic 22 layer will orient the magnetization in the VGMRl 21A and the VGMR2 2IB stripes in the opposite directions.
  • the combination of fluxes from the respective B fields of the permanent magnet 22 and the current strip 31 represented by vectors 23 and 32 respectively orient the magnetizations 15A, 15B (Fig. 4B) of VGMRl 21A and the magnetizations 15C, 15D (Fig. 4B) of VGMR2 21B in opposite directions, similarly to how the permanent magnet 22 or the current strip 31 would orient the magnetizations 15A, 15B, 15C, 15D alone.
  • a magnetic field density H represented by vector 18 from a recording medium 16 perpendicular to the ABS 16A all magnetizations will attempt to align themselves in the direction of the recording medium magnetic flux along vector 18 in the y direction.
  • M x 15A and M 2 15B will decrease the angle ⁇ ⁇ between them, and M 2 and M 4 will increase the angle ⁇ 2 between them as all magnetization vectors attempt to align themselves in the y direction.
  • the magnetic field H vector 18 from the magnetic medium 16 will cause variations in the magnetoresistance of the VGMR stacks 21A, 21B, ultimately creating a differential signal .
  • FIG. 5A depicts a Differential VGMR sensor 50 with a thin nonmagnetic spacer 24 sandwiched between VGMRl 21A and VGMR2 2IB.
  • the thin spacer 24 is located near the ABS 16A.
  • This exchange coupling between the magnetic layers 12,13 of VGMRl 21A and VGMR2 21B adjacent to the spacer 24 will have a negative value.
  • the negative exchange coupling between the magnetic layers will orient the magnetization vectors 15A, 15B, 15C, 15D in the respective sensors 21A, 2IB in the opposite directions.
  • the spacer 24 widens from 7 - 9 Angstroms to about 100 - 400 Angstroms .
  • the use of negative exchange coupling using a thin spacer can be used in conjunction with the permanent magnet 22 and the current strip 31.
  • the magnetizations of the two VGMR sensors are in opposite directions by changing the material composition of one of the sensors.
  • the need for additional components such as the permanent magnet and the current strip are not necessary because the inherent magnetic qualities of the materials will orient the magnetizations.
  • at least one of the stacks in the differential sensor incorporates synthetic antiferromagnetic ("SAF") layers.
  • Fig 6A depicts an enhanced Differential VGMR sensor 60 with a conductive spacer 11 sandwiched between a first arrangement of SAF layers 61A and a second arrangement of SAF layers 61B.
  • Both SAF arrangements 61A, 61B are comprised of a thin nonmagnetic spacer 63A, 63B sandwiched between a first SAF layer 62A, 62B located adjacent to the conductive spacer 11 and a thicker SAF layer 64A, 64B .
  • the nonmagnetic spacers 63A, 63B can be any suitable nonmagnetic material such as ruthenium.
  • the thicker outer layers 64A, 64B have a magnetization M x , 2 oriented in a first direction as represented by vectors 65A, 65B (Fig. 6B) respectively.
  • the thinner inner layers 62A, 62B are coupled to the outer layers 65A, 65B and have a magnetization M- , M 2 ' represented by vectors 66A, 66B (Fig. 6B) respectively opposite the magnetization vectors 65A, 65B of the outer layers 64A, 64B.
  • the magnetization vectors 65A, 65B of the outer layers 64A, 64B orient themselves in the direction of the magnetic flux (not shown) .
  • the inner SAF layers 62A, 62B are oriented antiparallel, the magnetization vectors 66A, 66B will orient themselves opposite the vectors 65A, 65B respectively.
  • the outer layers 64A, 64B have a greater magnetization than the inner layers 62A, 62B, due to the fact that they are thicker SAF layers.
  • JV ⁇ and M in the direction of the 1 ⁇ vector 65A.
  • M 2 and 2 ' in the direction of the 2 vector 65B.
  • Fig. 6C depicts a side view of the VGMR sensor 60 showing the orientations of the magnetizations 65A, 65B, 66A, 66B. Net magnetization M. etl , M n ⁇ t2 vectors 67A, 67B are shown.
  • the inner layers 62A, 62B of the SAF arrangements 61A, 61B are made thicker than the outer layers 64A, 64B.
  • the magnetization vectors 66A, 66B will be larger than the magnetic vectors 65A, 65B (Fig. 7B) of the outer layers 64A, 64B (Fig. 7B) , thereby creating a net magnetization in the direction of M and M 2 ' (Fig. 7B) respectively.
  • Fig. 7D depicts an implementation of VGMR sensor 70 having a cap layer 68 and a buffer layer 69.
  • Cap layer 68 is typically Ta and has an approximate thickness of 35 A.
  • Buffer layer is typically Ta in the range of 30-40 A or NiFeCr in the range of 25-50 A.
  • Magnetic - De layers 64A, 64B are typically NiFeCo or NiFe are in the range of 40-60 A.
  • Nonmagnetic spacer layers 63A, 63B are typically Ru and are in the range of 7-10 A.
  • the inner magnetic layers 62A, 62B are typically NiFeCo, NiFe, CoFe or some combination and are in the range of 15-40 A.
  • the Cu conductive spacer 11 is typically 25-40 A.
  • Fig. 7C depicts a side view of the VGMR sensor 70 showing the orientations of the magnetizations 65A, 65B, 66A, 66B. Net magnetization M ⁇ , ⁇ , M- ⁇ j vectors 67A, 67B are shown. As compared to Figs. 6A, 6B, and 6C the net magnetizations 67A, 67B are oriented in the opposite directions .
  • a folded differential VGMR 80 sensor is shown combining the VGMR stacks similar to the stacks depicted in Figs. 6A and 7A.
  • a first VGMR stack 81 and a second VGMR stack 83 sandwich a nonmagnetic spacer 82. With the magnetization in the first stack 81 oriented in one direction and the magnetization in the second stack 83 oriented in the opposite direction, a differential signal can be obtained.
  • Each of the VGMR stacks 81 and 83 two SAF layers 81a, 81b and 83a, 83b respectively.
  • the SAF layers include non magnetic spacers 91a, 91b, 94a, 94b which is sandwiched by individual SAF layers 90a, 92a, 90b, 92b, 93a, 95a, 93b, 95b.
  • Each of the SAF pairs, 90a and 92a, 90b and 92b, 93a and 95a and 93b and 95b are strongly antiparallel coupled.
  • the magnetization vectors - L and M , M 2 and M 2 ' , M 3 and M 3 ' , 4 and 4 ' are oriented antiparallel as shown in Figs 8A and 8B. As described above with respect to Figs.
  • Fig 8B is another perspective view of the differential VGMR sensor 80 shown in Fig. 8A.
  • Fig. 8C depicts a side view of the folded differential VGMR sensor 80.
  • This view of the sensor 80 shows the relative orientations of the magnetization vectors 84A, 84B, 84C, 84D, 85A, 85B, 85C, 85D in the presence of bias currents (not shown) .
  • net Magnetization vectors M- ⁇ , ⁇ , M,, ⁇ , M. et3 , M n ⁇ t4 86A, 86B, 86C, 86D respectively. As seen in the figure there is scissoring of the magnetization vectors.
  • a side view of the folded differential VGMR sensor is shown in the presence of a magnetic intensity H represented by vector 18.
  • H a magnetic intensity
  • the scissoring between Mmati etl and ⁇ in the first sensor has decreased, and the scissoring between M. ⁇ and M- ⁇ 4 has increased in the second stack.
  • the angle ⁇ 1 between the two magnetization vectors 86A, 86B will decrease while the angle ⁇ 2 in between the magnetization vectors 86C, 86D in the second sensor will increase.
  • the first VGMR sensor 81 will increase the resistance as the magnetization vectors 86A, 86B align with the magnetic vector 18.
  • the magnetization vectors 86C, 86D in the second VGMR stack 83 are attempting to align with the magnetic vector 18, they are actually moving farther out of alignment, therefore the resistance will decrease.
  • the differential signal produced by the stacks. Since the layers are experiencing an opposite resistance change, the differential signal will be large in comparison to stacks that are experience a corresponding resistance change. Therefore the signal will be further removed from the noise floor, thereby increasing the sensitivity of the VGMR stack.

Abstract

A Vertical Giant Magnetoresistive Sensor (VGMR) with two VGMR structures (61A, 61B), each responding differently to an external magnetic field, producing a differential signal proportional to the field. The magnetizations (M1, M1', M2, M2') in each of the sensors are oriented antiparallel. The antiparallel magnetization is attained by altering the magnetic compositions of the two structures, or adding an additional structure such as a permanent magnet or current strip (11) between the VGMR structures.

Description

DIFFERENTIAL VGMR SENSOR
The invention relates to magnetic recording heads and more specifically to a differential VGMR sensor.
Background of the Invention The change in resistance caused by a magnetic field is called magnetoresistance . This phenomena has been exploited in recording head technology, for example, in computer mass storage devices such as tape and disk drives. Magnetoresistive recording heads are well known to be useful in reading back data from a magnetic media mass storage device such as a disk drive or magnetic tape drive. A magnetoresistive ("MR") sensor detects magnetic field signals by measuring changes in the resistance of an MR element, fabricated of a magnetic material. Resistance of the MR element changes as a function of the strength and direction of magnetic flux being sensed by the element. Changes in resistance are then converted to determine the flux radiated from the magnetic medium. This measurement determines the signal stored on the medium.
Conventional MR sensors operate on the basis of the anisotropic magnetoresistive effect ("AMR") in which a component of the element's resistance varies as the square of the cosine of the angle between the magnetization vector of the MR element and the vector of a bias or sense current through the element :
p=p0+Dpcos2θ
where Dp is the component of resistance of interest and p0 is the base resistance of the MR element. A variety of multilayered structures demonstrate significantly greater sensitivity to magnetic fields from the recording medium. This effect is known as the giant magnetoresistive ("GMR") effect. One type of sensor based on the GMR effect is called a vertical GMR ("VGMR") sensor.
The GMR effect is due to spin dependent scattering of electrons from two or more magnetic layers, separated by nonmagnetic spacer layers. As systems are pushed to higher read density, higher magnetic bit size or decreased recording media size, the available magnetic flux is decreased. In addition, sensitivity may be decreased from thermal noise. For example, while the head is flying over the disk surface, it may hit a particle (contamination) . The energy of this collision will be dissipated in the form of heat causing the temperature of the head to increase, causing an increase in the resistance of the head , ultimately resulting in a signal that may be even higher than the magnetic signal from a transition. In order to sense these smaller signals and increase areal density, read heads with greater sensitivities are needed.
Summary of the Invention Various implementations of the invention may include one or more of the following features.
In general, in one aspect, the invention feature an apparatus for reading data including a first magnetoresistive element, a second magnetoresistive element formed substantially parallel to the first magnetoresistive element, a nonmagnetic spacer interposed between the first and second magnetoresistive elements, wherein the first and second magnetoresistive elements are comprised of a first magnetic layer, a second magnetic layer formed substantially parallel to the first magnetic layer and a conductive spacer interposed between the first and second magnetic layers, wherein a bias current applied to the conductive spacer of the first magnetoresistive element is substantially equal and opposite to a bias current applied to the conductive spacer of the second magnetoresistive element.
In an implementation, the apparatus can further include a permanent magnet formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer, a current strip formed between the first and second magnetoresistive elements and in between the nonmagnetic spacer and the permanent magnet, a current strip formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer.
In an implementation, the first magnetic layer of at least one of the first and second magnetoresistive elements includes a first magnetic material, a second magnetic material, a spacing material interposed between the first and second magnetic materials.
In another implementation, the first and second magnetic materials are comprised of synthetic antiferromagnetics and the spacing material is ruthenium. In another implementation, the second magnetic layer of at least one of the first and second magnetoresistive elements includes a first magnetic material, a second magnetic material, a spacing material interposed between the first and second magnetic materials . In still another implementation, the first magnetic layer is a single layer, wherein the single layer can be comprised of at least one of NiFe, CoFe, and NiFeCo.
In yet another implementation, the apparatus of claim 1 wherein the first magnetic layer is a bilayer. In another implementation, the apparatus further includes a first thin layer adjacent interposed between the first magnetic layer and the conductive spacer and a second thin layer interposed between the second magnetic layer and the conductive spacer, wherein the first and second thin layers can be comprised of at least one of Co and CoFe .
In another aspect, the invention features a VGMR sensor, including a first VGMR stack, a second VGMR stack and a nonmagnetic and nonconductive spacer interposed between the first and second VGMR stacks .
In an implementation, the first and second VGMR stacks includes a first SAF stack, a second SAF stack and a conductive spacer interposed between the first and second SAF stacks.
In another implementation, each of the first and second SAF stacks includes a first SAF layer, a second SAF layer and a spacer layer interposed between the first and second SAF layers, wherein the conductive spacer can be copper.
In another implementation, a current source to apply a first bias current to the first VGMR stack and a second bias current to the second VGMR stack are included. In another implementation, the VGMR sensor can include a differential amplifier for summing the first and second bias currents and a detector for detecting changes in the first and second magnetizations.
In another aspect, the invention features a differential GMR sensor, including a plurality of spaced
GMR stacks and means for biasing the magnetization of respective stacks to respond to external magnetic fields by increasing resistance in one stack and decreasing resistance in adjacent stacks. The invention may provide one or more of the following advantages .
A differential VGMR sensor provided with two VGMR sensors which respond differently to an external field, thus producing a differential signal proportional to the field are provided. The sensor produces a better signal- to-noise ratio compared with a standard VGMR sensor. This better signal-to-noise ratio increases the read density of the sensor. The details of one or more embodiments are set forth in the accompanying drawings and the description below. Other features, objects, and advantages of the invention will be apparent from the description and the drawings, and from the claims.
Brief Description of the Drawings
Fig. 1A is a perspective view of a conventional VGMR sensor.
Fig. IB is a perspective view of a conventional VGMR sensor.
Fig. 1C is a side view of a conventional VGMR sensor.
Fig. 2 is a schematic diagram of an implementation of two VGMR sensors producing a differential signal output.
Fig. 2A is a perspective view of a differential VGMR sensor utilizing a permanent magnet.
Fig. 2B is a perspective view of a differential VGMR sensor of Fig. 2A.
Fig. 2C is a side view of a differential VGMR sensor of Figs. 2A and 2B. Fig. 2D is a side view of a differential VGMR sensor of Figs. 2A and 2B in the presence of a magnetic field.
Fig. 3A is a perspective view of another implementation of a differential VGMR sensor utilizing a current strip.
Fig. 3B is a perspective view of a differential VGMR sensor of Fig. 3A.
Fig. 3C is a side view of a differential VGMR sensor of Figs. 3A and 3B.
Fig. 3D is a side view of a differential VGMR sensor of Figs. 3A and 3B in the presence of a magnetic field.
Fig. 4A is a perspective view of yet another implementation of a differential VGMR sensor utilizing a permanent magnet and a current strip .
Fig. 4B is a perspective view of a differential VGMR sensor of Fig. 4A.
Fig. 4C is a side view of a differential VGMR sensor of Figs. 4A and 4B.
Fig. 4D is a side view of a differential VGMR sensor of Figs. 4A and 4B in the presence of a magnetic intensity.
Fig. 5A is a perspective view of another implementation of a differential VGMR sensor utilizing a thin nonmagnetic spacer.
Fig. 6A is a perspective view of an enhanced differential VGMR stack. Fig. 6B is a perspective view of the enhanced differential VGMR stack of Fig. 6A.
Fig. 6C is a side view of the enhanced differential VGMR stack of Fig. 6A.
Fig. 7A is a perspective view of a enhanced differential VGMR stack.
Fig. 7B is a perspective view of the enhanced differential VGMR stack of Fig. 7A.
Fig. 7C is a side view of the enhanced differential VGMR stack of Fig. 7A.
Fig. 7D is a view of the enhanced differential VGMR stack of Fig. 7A.
Fig. 8A is a perspective view of an implementation of a folded differential VGMR sensor utilizing two folded Differential VGMR stacks.
Fig. 8B is a perspective view of another implementation of a folded differential VGMR sensor utilizing two enhanced differential VGMR stacks.
Fig. 8C is a side view of the folded differential VGMR sensor of Fig. 8A.
Fig. 8D is a side view of the folded differential VGMR sensor of Fig, 8A in the presence of a magnetic intensity.
Detailed Description Figs. 1A, IB, and 1C are alternate perspective side views of a conventional Giant Magnetoresistive (GMR) stack 10. Referring to Fig. 1A, the conventional sandwiched GMR 10 is typically comprised of a conductive spacer material 11, such as copper, sandwiched in between two magnetic layers or bilayers 12, 13 such as NiFe, CoFe, and NiFeCo. A bias or sensing current density Jb as depicted by a vector 14 runs through the GMR stack 10 via the conductive spacer 11. Referring to Figs. 1A and IB, the magnetic layers 12, 13 have a magnetization Mx and 2 represented by vectors 15A and 15B. The magnetization vectors 15A and 15B are shown in two orientations represented by a solid and a dashed line. In the absence of bias current density 14, the magnetization vectors 15A, 15B orient themselves perpendicular to an air bearing surface 16A (ABS) which is the surface of the head facing recording media 16. The perpendicular orientation is due to the inherent anisotropic properties of the magnetic layers 12, 13. In the presence of the bias current density 14, a resultant magnetic field B has a vector 17 that "curls" around the current density vector 14. This magnetic field B acts in opposite directions on each of the two magnetic layers 12 and 13. Consequently, the magnetization vectors 15A and 15B of the magnetic layers 12, 13 will orient themselves in the direction of the magnetic field vector 17, which is the direction of the magnetic flux created by the field B. As a result, angles θx and θ2 are formed between the magnetization vectors 15A and 15B and a vector 18 normal to the ABS
16A. A further result is that the magnetization vectors 15A and 15B form a scissoring orientation with respect to each other as shown in Fig. 1C.
The function of the bias current density 14 is to provide an output signal and assist in biasing the sensor in its sensitive operating regime. Resistance depends on the angle between magnetization directions in the magnetic layers. As the magnetization of the magnetic layers changes direction as it senses the magnetic flux from the recording medium, its resistance will change. Therefore when a magnetic field density H represented by a vector H radiates from the magnetic medium 16 the magnetization vectors will attempt to align themselves with that field. Consequently, as the vector 18 varies in its intensity, the magnetization vectors 15A and 15B will change their orientation. There will be a corresponding change in resistance due to the GMR effect, which will be indicated by a change in the bias current density 14. These changes in resistance are measured and a signal is obtained. This embodiment describes GMR detection.
Fig. 2 illustrates a schematic diagram of two differential VGMR sensors 200, 201 biased by bias current densities Jbl and Jb2 respectively through lines 205 and 210 respectively, with a common ground 215. The resultant change in the bias currents that result from an increase (decrease) in resistance of one VGMR sensor 200, and a decrease (increase) of resistance in the other VGMR sensor 201 are combined at differential amplifier 220 to produce differential signal 225.
Fig. 2A depicts an implementation having two VGMR sensors connected in parallel. The magnetizations of a first VGMR sensor VGMR1 21A and a second VGMR sensor VGMR2 21B are oriented in opposite directions. An external magnetic field from a recording medium applied perpendicular to the ABS will cause an increase/decrease of the angle between the magnetization directions in the magnetic layers of VGMR1 and a corresponding decrease/increase in the magnetization directions of the magnetic layers in VGMR2. Fig. 2A depicts a differential VGMR sensor 20 with a permanent magnet 22 and a nonmagnetic spacer 24 sandwiched between a first VGMR stack 21A ("VGMR1") and a second VGMR stack 2IB ("VGMR2") . A Cartesian coordinate system has been added to the figure for ease of discussion. The nonmagnetic spacer 24 is thick enough so as not to cause ferromagnetic orange peel coupling between the adjacent magnetic layers of VGMR1 and VGMR2. Orange peel coupling is due to the topography of the GMR stack itself giving rise to parallel coupling between the magnetic layers in the GMR stack. The nonmagnetic spacer is typically 10 - 40 Angstroms but is not limited to this thickness. The spacer 24 is located near the ABS edge 16A of VGMR1 21A and VGMR2 21B. The permanent magnet 22 is located away from the ABS 16A edge in order to prevent disruption of the recording medium 16 and to prevent a decrease in sensitivity of the sensor 20. The magnetization of the permanent magnet 22 is directed parallel to the ABS and normal to the VGMR layers 21A and 2IB. The presence of the permanent magnet 22 is to achieve opposite magnetizations in VGMR1 21A and VGMR2 21B. A magnetic field vector 23 from the permanent magnetic 22 will orient the magnetization vectors 15A, 15B (see Fig. 2B) in VGMR1 21A and 15C, 15D (see Fig. 2B) in VGMR2 2IB in the opposite directions. As seen in Fig. 2A, the magnetic flux from the permanent magnet 23 is generally directed in the y direction with respect to VGMR1 21A and in the -y direction with respect to VGMR2 2IB. Thus the magnetization vectors 15A, 15B of VGMR1 21A will orient themselves along the field lines of vector 23 in the y direction. In contrast, the magnetization vectors 15C, 15D of VGMR2 21B will orient themselves along the field lines of vector 23 in the -y direction. Then, in the presence of bias currents 25, 26 in each of VGMR1 21A and VGMR2 21B respectively, the magnetizations of the respective layers of VGMR1 21A and VGMR2 21B will scissor with respect to each other (ie Mx 15A scissors with M2 15B and M3 15C scissors with M4 15D) . Referring now to Fig. 2D, in the presence of a magnetic field density H represented by vector 18 from a recording medium 16 perpendicular to the ABS 16A, all magnetizations will attempt to align themselves in the direction of the recording medium magnetic flux along vector 18 in the y direction. In the Fig. 2D, Mx 15A and M2 15B will decrease the angle φx between them, and M2 and M4 will increase the angle φ2 between them as all magnetization vectors attempt to align themselves in the y direction.
As a result of the change in the magnetization directions in VGMR1 21A and VGMR2 2IB there will be a corresponding change in resistance in each of VGMR1 21A and VGMR2 2IB. As stated above, as the magnetization vectors 15A, 15B, 15C, 15D orient themselves in a direction antiparallel to each other, the resistance of the stacks will increase. As the magnetization vectors orient themselves parallel to each other, the resistance will decrease. Since the magnetizations in the VGMR stacks 21A, 21B have been oriented antiparallel due to the presence of the permanent magnet 22, one of the stacks will increase its resistance and one of the stacks will decrease its resistance as the field intensity of the vector 18 varies due to the GMR effect. As a result there will be a differential signal produced by the stacks. Since the layers are experiencing an opposite resistance change, the differential signal will be large in comparison to stacks that experience a corresponding resistance change. The resulting output signal will be further removed from the noise floor, thereby increasing the sensitivity of the VGMR sensor 20. Fig. 3A depicts another implementation of a differential VGMR sensor 30 with a current strip 31 and a nonmagnetic spacer 24 sandwiched between VGMR1 21A and VGMR2 2IB. In an implementation of the invention the current strip 31 provides a magnetic flux from a magnetic field B represented by vector 32 having a similar effect to the flux caused by the permanent magnet (see Figs. 2A, 2B, 2C) . A current density Js runs through the strip 31 in the -z direction as indicated by the current density vector 33. The current strip creates the magnetic field 32 that curls around the strip 31 as indicated. The magnetic field B caused by the current strip 31 results in a field flux in one direction with respect to VGMR1 21A (generally in the y direction) and in the opposite direction with respect to VGMR2 21B (generally in the -y direction) . Thus, the respective magnetizations of VGMR1 and VGMR2 will orient themselves in the opposite directions, Mx 15A and 2 15B (Fig. 3B) in the y direction and M3 15C and M4 15D (Fig. 3B) in the -y direction. In this implementation the current strips orients the magnetizations 15A, 15B of VGMR1 21A and the magnetizations 15C, 15D of VGMR2 21B antiparallel to each other achieving the same effect as with the presence of a permanent magnet (Figs. 2A, 2B, 2C) . The use of bias current densities represented by vectors 25, 26 is the same as described above. The current densities 25, 26 cause a respective orientation of magnetization vectors 15A, 15B and 15C, 15D respectively.
Referring now to Fig. 3D, in the presence of a magnetic field density H represented by vector 18 from a recording medium 16 perpendicular to the ABS 16A, all magnetizations will attempt to align themselves in the direction of the recording medium magnetic flux along vector 18 in the y direction. In the Fig. 2D, Mx 15A and 2 15B will decrease the angle φ between them, and 2 and 4 will increase the angle φ2 between them as all magnetization vectors attempt to align themselves in the y direction. The magnetic field H vector 18 from the magnetic medium 16 will cause variations in the magnetoresistance of the VGMR stacks 21A, 21B, ultimately creating a differential signal .
Fig. 4A depicts a differential VGMR sensor 40 with a current strip 31, a permanent magnet 22, and a nonmagnetic spacer 24 sandwiched between VGMRl 21A and VGMR2 2IB. A current density Js runs through the strip 31 as indicated by the current density vector 33. The current 31 strip creates a magnetic field that curls around the strip represented by vector 32. The magnetic field B caused by the current strip 31 results in a field flux in one direction with respect to VGMRl 21A and in the opposite direction with respect to VGMR2 2IB. Thus the respective magnetizations of VGMRl 21A and VGMR2 2IB will orient themselves in the opposite directions. The permanent magnet is oriented away from the ABS edge. The magnetization of the permanent magnet 22 is oriented parallel to the ABS 16A and normal to the VGMR layers 21A, 2IB. The magnetic field flux from the permanent magnetic 22 layer will orient the magnetization in the VGMRl 21A and the VGMR2 2IB stripes in the opposite directions. In an implementation of the invention, the combination of fluxes from the respective B fields of the permanent magnet 22 and the current strip 31 represented by vectors 23 and 32 respectively, orient the magnetizations 15A, 15B (Fig. 4B) of VGMRl 21A and the magnetizations 15C, 15D (Fig. 4B) of VGMR2 21B in opposite directions, similarly to how the permanent magnet 22 or the current strip 31 would orient the magnetizations 15A, 15B, 15C, 15D alone.
Referring now to Fig. 4D, in the presence of a magnetic field density H represented by vector 18 from a recording medium 16 perpendicular to the ABS 16A, all magnetizations will attempt to align themselves in the direction of the recording medium magnetic flux along vector 18 in the y direction. In Fig. 2D, Mx 15A and M2 15B will decrease the angle φτ between them, and M2 and M4 will increase the angle φ2 between them as all magnetization vectors attempt to align themselves in the y direction. The magnetic field H vector 18 from the magnetic medium 16 will cause variations in the magnetoresistance of the VGMR stacks 21A, 21B, ultimately creating a differential signal . Once again the bias currents through the VGMR 21A, 2 IB stacks will sense the change in the resistance of the stacks as a field intensity H 18 varies from the medium 16. Fig. 5A depicts a Differential VGMR sensor 50 with a thin nonmagnetic spacer 24 sandwiched between VGMRl 21A and VGMR2 2IB. The thin spacer 24 is located near the ABS 16A. At a certain thickness of the spacer 24, typically 7-9 A, there is exchange coupling between the magnetic layers 12, 13 of the VGMR sensors 21A, 2 IB. Exchange coupling is parallel or antiparallel magnetic coupling between magnetic layers separated by a nonmagnetic spacer. This exchange coupling between the magnetic layers 12,13 of VGMRl 21A and VGMR2 21B adjacent to the spacer 24 will have a negative value. The negative exchange coupling between the magnetic layers will orient the magnetization vectors 15A, 15B, 15C, 15D in the respective sensors 21A, 2IB in the opposite directions. In an implementation, to avoid magnetic coupling and magnetic pinholes farther from the ABS the spacer 24 widens from 7 - 9 Angstroms to about 100 - 400 Angstroms .
In an implementation of the invention, the use of negative exchange coupling using a thin spacer can be used in conjunction with the permanent magnet 22 and the current strip 31.
In another embodiment of the invention the magnetizations of the two VGMR sensors are in opposite directions by changing the material composition of one of the sensors. In this embodiment the need for additional components such as the permanent magnet and the current strip are not necessary because the inherent magnetic qualities of the materials will orient the magnetizations. In this embodiment at least one of the stacks in the differential sensor incorporates synthetic antiferromagnetic ("SAF") layers.
Fig 6A depicts an enhanced Differential VGMR sensor 60 with a conductive spacer 11 sandwiched between a first arrangement of SAF layers 61A and a second arrangement of SAF layers 61B. Both SAF arrangements 61A, 61B are comprised of a thin nonmagnetic spacer 63A, 63B sandwiched between a first SAF layer 62A, 62B located adjacent to the conductive spacer 11 and a thicker SAF layer 64A, 64B . The nonmagnetic spacers 63A, 63B can be any suitable nonmagnetic material such as ruthenium. The ferromagnetic material used in the layers 62A, 62B, 64A, 64B, which are antiferromagnetically coupled through the spacers 63A, 63B, produce a magnetic orientation in the absence of any magnetic field such as a permanent magnet 22 (see e.g. Fig. 2A) , a current strip (see e.g. Fig. 3A) , negative exchange coupling (see e.g. Fig. 5A) , or any combination thereof. In an implementation, the thicker outer layers 64A, 64B have a magnetization Mx, 2 oriented in a first direction as represented by vectors 65A, 65B (Fig. 6B) respectively. The thinner inner layers 62A, 62B are coupled to the outer layers 65A, 65B and have a magnetization M- , M2' represented by vectors 66A, 66B (Fig. 6B) respectively opposite the magnetization vectors 65A, 65B of the outer layers 64A, 64B.
As described above, the presence of the current density bias Jb in the conductive spacer 11, creates a magnetic field (not shown) about the VGMR stack. Thus the magnetization vectors 65A, 65B of the outer layers 64A, 64B orient themselves in the direction of the magnetic flux (not shown) . Since the inner SAF layers 62A, 62B are oriented antiparallel, the magnetization vectors 66A, 66B will orient themselves opposite the vectors 65A, 65B respectively. The outer layers 64A, 64B have a greater magnetization than the inner layers 62A, 62B, due to the fact that they are thicker SAF layers. Thus there is a net magnetization of JV^ and M in the direction of the 1^ vector 65A. Similarly there is a net magnetization of M2 and 2' in the direction of the 2 vector 65B.
Fig. 6C depicts a side view of the VGMR sensor 60 showing the orientations of the magnetizations 65A, 65B, 66A, 66B. Net magnetization M.etl, Mnβt2 vectors 67A, 67B are shown.
Referring now to Fig. 7A, in another implementation of the invention, the inner layers 62A, 62B of the SAF arrangements 61A, 61B are made thicker than the outer layers 64A, 64B. In this configuration, since the inner layers 62A, 62B are thicker, the magnetization vectors 66A, 66B will be larger than the magnetic vectors 65A, 65B (Fig. 7B) of the outer layers 64A, 64B (Fig. 7B) , thereby creating a net magnetization in the direction of M and M2' (Fig. 7B) respectively.
Fig. 7D depicts an implementation of VGMR sensor 70 having a cap layer 68 and a buffer layer 69. Cap layer 68 is typically Ta and has an approximate thickness of 35 A. Buffer layer is typically Ta in the range of 30-40 A or NiFeCr in the range of 25-50 A. Magnetic - De layers 64A, 64B are typically NiFeCo or NiFe are in the range of 40-60 A. Nonmagnetic spacer layers 63A, 63B are typically Ru and are in the range of 7-10 A. The inner magnetic layers 62A, 62B are typically NiFeCo, NiFe, CoFe or some combination and are in the range of 15-40 A. The Cu conductive spacer 11 is typically 25-40 A.
Fig. 7C depicts a side view of the VGMR sensor 70 showing the orientations of the magnetizations 65A, 65B, 66A, 66B. Net magnetization M^,^, M-^j vectors 67A, 67B are shown. As compared to Figs. 6A, 6B, and 6C the net magnetizations 67A, 67B are oriented in the opposite directions .
Referring now to Fig. 8A, a folded differential VGMR 80 sensor is shown combining the VGMR stacks similar to the stacks depicted in Figs. 6A and 7A. A first VGMR stack 81 and a second VGMR stack 83 sandwich a nonmagnetic spacer 82. With the magnetization in the first stack 81 oriented in one direction and the magnetization in the second stack 83 oriented in the opposite direction, a differential signal can be obtained. Each of the VGMR stacks 81 and 83 two SAF layers 81a, 81b and 83a, 83b respectively. The SAF layers include non magnetic spacers 91a, 91b, 94a, 94b which is sandwiched by individual SAF layers 90a, 92a, 90b, 92b, 93a, 95a, 93b, 95b. Each of the SAF pairs, 90a and 92a, 90b and 92b, 93a and 95a and 93b and 95b are strongly antiparallel coupled. The magnetization vectors -L and M , M2 and M2' , M3 and M3' , 4 and 4' are oriented antiparallel as shown in Figs 8A and 8B. As described above with respect to Figs. 6A - 7C, the presence of bias currents Jbl and Jb2, through conductive spacers 100 and 110, creates a magnetic field in which the magnetization vectors attempt to align themselves creating net magnetizations as discussed below. Fig 8B is another perspective view of the differential VGMR sensor 80 shown in Fig. 8A.
Fig. 8C depicts a side view of the folded differential VGMR sensor 80. This view of the sensor 80 shows the relative orientations of the magnetization vectors 84A, 84B, 84C, 84D, 85A, 85B, 85C, 85D in the presence of bias currents (not shown) . Also depicted are net Magnetization vectors, M-^,^, M,,^, M.et3, Mnβt4 86A, 86B, 86C, 86D respectively. As seen in the figure there is scissoring of the magnetization vectors.
Referring now to Fig. 8D, a side view of the folded differential VGMR sensor is shown in the presence of a magnetic intensity H represented by vector 18. With a magnetic field vector 18 perpendicular to the ABS (not shown) of the magnetic medium not shown) , the scissoring between M„etl and ^ in the first sensor has decreased, and the scissoring between M.^^ and M-^4 has increased in the second stack. In the first stack the angle φ1 between the two magnetization vectors 86A, 86B will decrease while the angle φ2 in between the magnetization vectors 86C, 86D in the second sensor will increase. In the implementation shown in the diagrams, the first VGMR sensor 81 will increase the resistance as the magnetization vectors 86A, 86B align with the magnetic vector 18. In contrast, although the magnetization vectors 86C, 86D in the second VGMR stack 83 are attempting to align with the magnetic vector 18, they are actually moving farther out of alignment, therefore the resistance will decrease. As a result there will be a differential signal produced by the stacks. Since the layers are experiencing an opposite resistance change, the differential signal will be large in comparison to stacks that are experience a corresponding resistance change. Therefore the signal will be further removed from the noise floor, thereby increasing the sensitivity of the VGMR stack.
A number of embodiments of the present invention have been described. Nevertheless, it will be understood that various modifications may be made without departing from the spirit and scope of the invention. Accordingly, other embodiments are within the scope of the following claims .

Claims

What is claimed is:
1. An apparatus for reading data comprising: a first magnetoresistive element; a second magnetoresistive element formed substantially parallel to the first magnetoresistive element ; a nonmagnetic spacer interposed between the first and second magnetoresistive elements; wherein the first and second magnetoresistive elements are comprised of: a first magnetic layer; a second magnetic layer formed substantially parallel to the first magnetic layer; and a conductive spacer interposed between the first and second magnetic layers, wherein a bias current applied to the conductive spacer of the first magnetoresistive element is substantially equal and opposite to a bias current applied to the conductive spacer of the second magnetoresistive element.
2. The apparatus of claim 1 further comprising a permanent magnet formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer.
3. The apparatus of claim 2 further comprising a current strip formed between the first and second magnetoresistive elements and in between the nonmagnetic spacer and the permanent magnet .
4. The apparatus of claim 1 further comprising a current strip formed between the first and second magnetoresistive elements and adjacent the nonmagnetic spacer.
5. The apparatus of claim 1 wherein the first magnetic layer of at least one of the first and second magnetoresistive elements is comprised of: a first magnetic material; a second magnetic material; a spacing material interposed between the first and second magnetic materials.
6. The apparatus of claim 5 wherein the first and second magnetic materials are comprised of synthetic antiferromagnetics .
7. The apparatus of claim 5 wherein the spacing material is ruthenium.
8. The apparatus of claim 5 wherein the second magnetic layer of at least one of the first and second magnetoresistive elements is comprised of: a first magnetic material; a second magnetic material; a spacing material interposed between the first and second magnetic materials.
9. The apparatus of claim 1 wherein the first magnetic layer is a single layer.
10. The apparatus of claim 9 wherein the single layer is comprised of at least one of NiFe, CoFe, and NiFeCo.
11. The apparatus of claim 1 wherein the first magnetic layer is a bilayer.
12. The apparatus of claim 1 further comprising: a first thin layer adjacent interposed between the first magnetic layer and the conductive spacer ; and a second thin layer interposed between the second magnetic layer and the conductive spacer.
13. The apparatus of claim 12 wherein the first and second thin layers are comprised of at least one of Co and CoFe .
14. A VGMR sensor, comprising: a first VGMR stack; a second VGMR stack; and a nonmagnetic and nonconductive spacer interposed between the first and second VGMR stacks.
15. The VGMR sensor of claim 14 wherein each of the first and second VGMR stacks comprises: a first SAF stack; a second SAF stack; and a conductive spacer interposed between the first and second SAF stacks.
16. The VGMR sensor of claim 15 wherein each of the first and second SAF stacks comprises: a first SAF layer; a second SAF layer; and a spacer layer interposed between the first and second SAF layers .
17. The VGMR sensor of claim 15 wherein the conductive spacer is copper.
18. The VGMR sensor of claim 14 further comprising a current source to apply a first bias current to the first VGMR stack and a second bias current to the second VGMR stack.
19. The VGMR sensor of claim 18 further comprising: a differential amplifier for summing the first and second bias currents; and a detector for detecting changes in the first and second magnetizations.
20. A differential GMR sensor, comprising: a plurality of spaced GMR stacks; and means for biasing the magnetization of respective stacks to respond to external magnetic fields by increasing resistance in one stack and decreasing resistance in adjacent stacks.
PCT/US1999/023119 1998-11-18 1999-10-06 Differential vgmr sensor WO2000030077A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
US09/600,270 US6556388B1 (en) 1998-11-20 1999-10-06 Differential VGMR sensor
KR1020017006305A KR20010075724A (en) 1998-11-18 1999-10-06 Differential vgmr sensor
GB0111769A GB2362985B (en) 1998-11-20 1999-10-06 A magnetic recording head
DE19983808T DE19983808T1 (en) 1998-11-20 1999-10-06 Difference VGMR sensor
JP2000583006A JP2003529199A (en) 1998-11-20 1999-10-06 Differential VGMR sensor

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US60/109,288 1998-11-18
US10928898P 1998-11-20 1998-11-20
US11676399P 1999-01-22 1999-01-22
US60/116,763 1999-01-22

Publications (2)

Publication Number Publication Date
WO2000030077A1 true WO2000030077A1 (en) 2000-05-25
WO2000030077A9 WO2000030077A9 (en) 2000-09-21

Family

ID=26806822

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/023119 WO2000030077A1 (en) 1998-11-18 1999-10-06 Differential vgmr sensor

Country Status (6)

Country Link
US (1) US6556388B1 (en)
JP (1) JP2003529199A (en)
KR (1) KR20010075724A (en)
DE (1) DE19983808T1 (en)
GB (1) GB2362985B (en)
WO (1) WO2000030077A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516604A (en) * 2003-05-13 2007-06-21 フリースケール セミコンダクター インコーポレイテッド Magnetoelectronic information device with composite magnetic free layer

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621664B1 (en) * 2000-02-28 2003-09-16 Seagate Technology Llc Perpendicular recording head having integrated read and write portions
US6798623B2 (en) * 2001-02-08 2004-09-28 Seagate Technology Llc Biased CPP sensor using spin-momentum transfer
US6911826B2 (en) * 2001-06-12 2005-06-28 General Electric Company Pulsed eddy current sensor probes and inspection methods
US7271986B2 (en) * 2002-05-15 2007-09-18 Seagate Technology Llc V-shape magnetic field sensor with anisotropy induced orthogonal magnetic alignment
DE10236983A1 (en) * 2002-08-13 2004-03-04 Robert Bosch Gmbh The magnetic sensor system
US6963071B2 (en) * 2002-11-25 2005-11-08 Intel Corporation Debris mitigation device
US7183893B2 (en) * 2004-02-04 2007-02-27 Seagate Technology Llc TMR sensor with oxidized alloy barrier layer and method for forming the same
US7477490B2 (en) * 2004-06-30 2009-01-13 Seagate Technology Llc Single sensor element that is naturally differentiated
KR100647319B1 (en) * 2005-02-05 2006-11-23 삼성전자주식회사 Multi-bit magnetic memory device using spin-polarized current and methods of manufacturing and operating the same
US7715154B2 (en) * 2005-04-13 2010-05-11 Seagate Technology Llc Suppression of spin momentum transfer and related torques in magnetoresistive elements
US7573684B2 (en) * 2005-04-13 2009-08-11 Seagate Technology Llc Current-in-plane differential magnetic tri-layer sensor
US7835116B2 (en) * 2005-09-09 2010-11-16 Seagate Technology Llc Magnetoresistive stack with enhanced pinned layer
DE102005060713B4 (en) * 2005-12-19 2019-01-24 Austriamicrosystems Ag Magnetic field sensor arrangement and method for non-contact measurement of a magnetic field
JP5006339B2 (en) * 2006-12-20 2012-08-22 アルプス電気株式会社 Magnetic detector
US20110007426A1 (en) * 2009-07-13 2011-01-13 Seagate Technology Llc Trapezoidal back bias and trilayer reader geometry to enhance device performance
US20110026169A1 (en) * 2009-07-28 2011-02-03 Hardayal Singh Gill Dual cpp gmr head using a scissor sensor
US8582250B2 (en) * 2009-12-04 2013-11-12 Seagate Technology Llc Double biasing for trilayer MR sensors
US8390963B2 (en) * 2011-04-25 2013-03-05 Seagate Technology Llc Trilayer reader with current constraint at the ABS
US11237227B2 (en) 2017-04-25 2022-02-01 Konica Minolta, Inc. Magnetic sensor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5442508A (en) * 1994-05-25 1995-08-15 Eastman Kodak Company Giant magnetoresistive reproduce head having dual magnetoresistive sensor
US5576915A (en) * 1993-03-15 1996-11-19 Kabushiki Kaisha Toshiba Magnetoresistive head with antiferromagnetic sublayers interposed between first and second spin-valve units to exchange bias inner magnetic films thereof
US5576914A (en) * 1994-11-14 1996-11-19 Read-Rite Corporation Compact read/write head having biased GMR element
US5818685A (en) * 1997-05-05 1998-10-06 Read-Rite Corporation CIP GMR sensor coupled to biasing magnet with spacer therebetween

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5390061A (en) 1990-06-08 1995-02-14 Hitachi, Ltd. Multilayer magnetoresistance effect-type magnetic head
JPH05183212A (en) 1991-07-30 1993-07-23 Toshiba Corp Magneto-resistance effect element
US5549978A (en) 1992-10-30 1996-08-27 Kabushiki Kaisha Toshiba Magnetoresistance effect element
JPH0721530A (en) * 1993-06-30 1995-01-24 Toshiba Corp Magneto-resistance effect type head
US5828525A (en) * 1994-03-15 1998-10-27 Kabushiki Kaisha Toshiba Differential detection magnetoresistance head
US5583725A (en) 1994-06-15 1996-12-10 International Business Machines Corporation Spin valve magnetoresistive sensor with self-pinned laminated layer and magnetic recording system using the sensor
US5701222A (en) * 1995-09-11 1997-12-23 International Business Machines Corporation Spin valve sensor with antiparallel magnetization of pinned layers
JPH09274710A (en) * 1996-04-04 1997-10-21 Fujitsu Ltd Spin valve magneto-resistive effect head, its manufacture and magnetic recorder
US5869963A (en) * 1996-09-12 1999-02-09 Alps Electric Co., Ltd. Magnetoresistive sensor and head
US5751521A (en) * 1996-09-23 1998-05-12 International Business Machines Corporation Differential spin valve sensor structure
US5859754A (en) * 1997-04-03 1999-01-12 Read-Rite Corporation Magnetoresistive transducer having a common magnetic bias using assertive and complementary signals
US6469873B1 (en) * 1997-04-25 2002-10-22 Hitachi, Ltd. Magnetic head and magnetic storage apparatus using the same
JPH10302203A (en) * 1997-04-25 1998-11-13 Hitachi Ltd Vertical magnetic recorder
US5748399A (en) 1997-05-13 1998-05-05 International Business Machines Corporation Resettable symmetric spin valve
US5825595A (en) 1997-05-13 1998-10-20 International Business Machines Corporation Spin valve sensor with two spun values separated by an insulated current conductor
US5858455A (en) 1997-10-09 1999-01-12 International Business Machines Corporation Method for forming a lateral giant magnetoresistance multilayer for a magnetoresistive sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5576915A (en) * 1993-03-15 1996-11-19 Kabushiki Kaisha Toshiba Magnetoresistive head with antiferromagnetic sublayers interposed between first and second spin-valve units to exchange bias inner magnetic films thereof
US5442508A (en) * 1994-05-25 1995-08-15 Eastman Kodak Company Giant magnetoresistive reproduce head having dual magnetoresistive sensor
US5576914A (en) * 1994-11-14 1996-11-19 Read-Rite Corporation Compact read/write head having biased GMR element
US5818685A (en) * 1997-05-05 1998-10-06 Read-Rite Corporation CIP GMR sensor coupled to biasing magnet with spacer therebetween

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007516604A (en) * 2003-05-13 2007-06-21 フリースケール セミコンダクター インコーポレイテッド Magnetoelectronic information device with composite magnetic free layer

Also Published As

Publication number Publication date
GB0111769D0 (en) 2001-07-04
US6556388B1 (en) 2003-04-29
DE19983808T1 (en) 2002-01-10
JP2003529199A (en) 2003-09-30
GB2362985B (en) 2003-06-25
KR20010075724A (en) 2001-08-09
WO2000030077A9 (en) 2000-09-21
GB2362985A (en) 2001-12-05

Similar Documents

Publication Publication Date Title
US6556388B1 (en) Differential VGMR sensor
US7177122B2 (en) Biasing for tri-layer magnetoresistive sensors
US7697242B2 (en) Method for providing a self-pinned differential GMR sensor having a bias structure comprising layers of ferromagnetic and non-magnetic material selected to provide a net-zero magnetic moment
US7035058B2 (en) Magneto-resistive effect element, magnetic sensor using magneto-resistive effect, magnetic head using magneto-resistive effect and magnetic memory
JP5771352B2 (en) Magnetic reproducing recording head and manufacturing method thereof
JP3266552B2 (en) MR read head, composite head including the same, and magnetic disk drive including the same
US9099125B1 (en) Current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor structure with stacked sensors for minimization of the effect of head skew
US6469879B1 (en) Magneto-resistive tunnel junction head with biasing elements abutting free layer extended portions
JP2002150512A (en) Magnetoresistive element and magnetoresistive magnetic head
EP4049272A1 (en) Two-dimensional magnetic recording (tdmr) read head structure with different stacked sensors and disk drive incorporating the structure
KR100330524B1 (en) Dual gmr sensor with a single afm layer
US8520344B2 (en) Magnetoresistive device with enhanced pinned layer
JP2009026400A (en) Differential magnetoresistive magnetic head
US8305715B2 (en) Magnetoresistance (MR) read elements having an active shield
US7016160B2 (en) Differential CPP reader for perpendicular magnetic recording
US6762915B2 (en) Magnetoresistive sensor with oversized pinned layer
US7038889B2 (en) Method and apparatus for enhanced dual spin valve giant magnetoresistance effects having second spin valve self-pinned composite layer
US6498707B1 (en) Giant magnetoresistive sensor with a CrMnPt pinning layer and a NiFeCr seed layer
KR20050001361A (en) Magnetic device with improved antiferromagnetically coupling film
US6791805B2 (en) Current-perpendicular-to-plane spin valve reader with reduced scattering of majority spin electrons
TW200419171A (en) A magnetic sensor
US6590749B1 (en) Dual AP pinned spin valve sensor biased by opposite ferromagnetic coupling fields and opposite demagnetizing fields
JPH10294504A (en) Magneto-resistance sensor
JP2002353533A (en) Magnetoresistive effect element, magnetoresistive effect type magnetic sensor, magnetoresistive effect type magnetic head, and magnetic memory
JP2000251224A (en) Magneto-resistance effect sensor and its manufacture

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): DE GB JP KR SG US US

WWE Wipo information: entry into national phase

Ref document number: 09600270

Country of ref document: US

DFPE Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
AK Designated states

Kind code of ref document: C2

Designated state(s): DE GB JP KR SG US US

COP Corrected version of pamphlet

Free format text: PAGES 1/28-28/28, DRAWINGS, REPLACED BY NEW PAGES 1/19-19/19; DUE TO LATE TRANSMITTAL BY THE RECEIVING OFFICE

ENP Entry into the national phase

Ref document number: 200111769

Country of ref document: GB

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 2000 583006

Country of ref document: JP

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 1020017006305

Country of ref document: KR

WWP Wipo information: published in national office

Ref document number: 1020017006305

Country of ref document: KR

RET De translation (de og part 6b)

Ref document number: 19983808

Country of ref document: DE

Date of ref document: 20020110

WWE Wipo information: entry into national phase

Ref document number: 19983808

Country of ref document: DE

WWW Wipo information: withdrawn in national office

Ref document number: 1020017006305

Country of ref document: KR